CN104280307B - A kind of lunar dust measuring instrument viscous quartz crystal probe scaling method - Google Patents
A kind of lunar dust measuring instrument viscous quartz crystal probe scaling method Download PDFInfo
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- CN104280307B CN104280307B CN201410449831.7A CN201410449831A CN104280307B CN 104280307 B CN104280307 B CN 104280307B CN 201410449831 A CN201410449831 A CN 201410449831A CN 104280307 B CN104280307 B CN 104280307B
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Abstract
The invention discloses a kind of lunar dust measuring instrument viscous quartz crystal probe scaling method.Using the present invention can demarcate SQCM probe on the ground, it is thus achieved that mass sensitivity coefficient, minimum frequency changing value, minimum range and the maximum range of SQCM probe, method is simple, reliable, thus the most accurately tests offer basis for lunar dust measuring instrument.The present invention uses and is placed around, at SQCM probe, the simulation lunar dust load capacity that the mode of aluminium foil is simulated on SQCM probe, then utilize SQCM frequency with the rule of SQCM probe mass change, set up the change of SQCM frequency and SQCM probe mass-change curve, thus realize the demarcation to lunar dust measuring instrument viscous quartz crystal probe.
Description
Technical field
The present invention relates to Dust in Space Detection Techniques field, be specifically related to a kind of lunar dust measuring instrument viscous quartz crystal
(SQCM) probe scaling method.
Background technology
Lunar dust measuring instrument is that the engineering parameter on lunar exploration the second stage of the project CE-3 lander measures equipment, has been transmitted into the moon
Surface, just at operation on orbit.Lunar dust measuring instrument includes two probes, a SQCM probe, and one is solaode probe.
SQCM probe is main measures the moon dust quantity that the accumulation of menology long-term lunar dust is special, the change of monitoring lunar dust mass accumulation；Solaode
The moon dust quantity splashed during probe main measurement lander landing menology.Utilize SQCM probe measurement menology accumulation moon dust quantity, be
On quartz crystal, film becomes viscous quartz crystal, and lunar dust can adsorb on film, then utilizes the frequency of viscous quartz crystal
The relation being directly proportional to its quality, can be obtained by absorption moon dust quantity on film by the frequency measuring quartz crystal, but needs
Viscous quartz crystal frequency-lunar dust figure-of-merit curve is demarcated, due to the method using SQCM probe measurement lunar dust quality
Still belong to the first time in the world, so the demarcation at lunar dust measuring instrument SQCM probe does not has ready-made method to use for reference.Further, due to
SQCM probe measurement precision is high, can reach 10-7g/cm2Magnitude, is difficult to directly directly mark it with a kind of etalon
Fixed, and SQCM probe demarcation needs to simulate actual condition, needs to carry out under high vacuum environment, which increases demarcation difficulty.
Popping one's head in timing signal carrying out SQCM, probe deposition simulation lunar dust process is irreversible, identical in order to ensure to test original state every time,
Repeat test every time and be required for re-starting whole process, demarcate task amount big.
Summary of the invention
In view of this, the invention provides a kind of lunar dust measuring instrument viscous quartz crystal probe scaling method, it is possible on ground
On face demarcating SQCM probe, method is simple, reliable, thus the most accurately tests offer basis for lunar dust measuring instrument.
The lunar dust measuring instrument viscous quartz crystal probe scaling method of the present invention comprises the following steps:
Step 1, being placed around 3 areas at viscous quartz crystal SQCM probe is 1cm2Square aluminium foil, in aluminium foil
The heart is away from SQCM germ nucleus 1cm；
SQCM probe and 3 aluminium foils are placed on the underface of the wind-borne dust device, are placed on evacuation in vacuum storehouse by step 2,
SQCM probe start work, the frequency values of repetitive measurement SQCM probe, wherein, the frequency values of measurement is averaged steady as zero load
Determining frequency values, SQCM frequency probe value is that idling frequency changes maximum deflection difference value with the maximum deflection difference value of meansigma methods；Idling frequency
Change maximum deflection difference value is the minimum frequency changing value that SQCM probe can be differentiated；
Step 3, opens the dust cap of SQCM probe, opens the wind-borne dust device, applies simulation lunar dust load, measures SQCM in real time
The frequency of probe, after the frequency stable of SQCM probe, test gained is to stablize frequency values after dust fall；Open vacuum storehouse, take out
Aluminium foil, measures the lunar dust quality on aluminium foil, the unit are lunar dust quality being calculated on aluminium foil；
Step 4, loads the simulation lunar dust on aluminium foil and SQCM probe and cleans up, repeat step 1 and 2, change airborne dust
The simulation lunar dust load capacity that device applies, repeats step 3, it is thus achieved that stablize the aluminum of frequency values and correspondence after the dust fall of SQCM probe
Unit are lunar dust quality on paper tinsel；Stablize frequency values after dust fall according to SQCM probe and stablize frequency values, and aluminum with zero load
Unit are lunar dust quality on paper tinsel, when using fitting a straight line to obtain unit are lunar dust quality and SQCM probe relative to zero load
The corresponding relation of frequency change, calculate the slope K of fitting a straight line, K is SQCM and pops one's head in mass sensitivity coefficient；
Step 5, the SQCM probe minimum frequency changing value that the K value obtained according to step 4 and step 2 obtain, obtain SQCM
The unit are minimum resolution mass of probe；
Step 6, step 5 the minimum resolution mass of the unit are of the SQCM obtained probe is SQCM probe range
Minima；The unit are lunar dust quality that in step 4, the maximum of the described frequency change of SQCM probe is corresponding is SQCM and visits
The maximum of head range.
Wherein, in described step 2, the idling frequency change maximum deflection difference value method of testing of SQCM probe is as follows:
1., during zero load, after SQCM frequency probe is stable, the measurement frequency of 10 SQCM of follow-on test, test is every 3 points
Clock once, is measured half an hour continuously, afterwards power-off half an hour；
2. start shooting, and repeat step 1., be repeated 2 times altogether, the most altogether test 30 times；
3. SQCM frequency probe value is idling frequency change maximum deflection difference value with the maximum deflection difference value of the meansigma methods of 30 times.
In described step 1, viscous quartz crystal SQCM probe is prepared by film on quartz crystal, cleans in step 4
During SQCM probe, the film on quartz crystal is washed off.
Beneficial effect:
(1) it is obtained in that SQCM probe measurement parameter by the inventive method, including the mass sensitivity system of SQCM probe
Number, minimum frequency changing value, minimum range and maximum range, method is simple, reliable.
(2) the simulation lunar dust load capacity error applied in view of the wind-borne dust device is relatively big, and assay device is in vacuum storehouse
In, SQCM probe being simulated lunar dust load capacity and obtains difficulty, the present invention uses the mode mould being placed around aluminium foil at SQCM probe
Intend the simulation lunar dust load capacity on SQCM probe, and the simulation lunar dust load capacity on aluminium foil can use the mode weighed to obtain, and makes
With convenient.
(3) for improving certainty of measurement, when cleaning SQCM probe, the film on quartz crystal is washed off, once surveys upper
Again film before amount, it is to avoid do not wash clean clearly owing to simulating lunar dust load capacity on the SQCM probe that film causes, thus affect simulation
Relation between lunar dust load capacity and SQCM frequency probe value is demarcated.
Accompanying drawing explanation
Fig. 1 is the relative position view that aluminium foil is popped one's head in SQCM.
Fig. 2 is test lunar dust quality and the flow chart of frequency variable test.
Fig. 3 is the flow chart of test SQCM probe minimum resolution.
Fig. 4 is SQCM probe idling frequency wave pattern.
Fig. 5 is the matched curve of frequency change and mass change.
Wherein, 1,2,3-aluminium foil, 4-SQCM pops one's head in, 5-dust cap.
Detailed description of the invention
Develop simultaneously embodiment below in conjunction with the accompanying drawings, describes the present invention.
The invention provides a kind of lunar dust measuring instrument viscous quartz crystal probe scaling method, utilize SQCM frequency with SQCM
The rule of probe mass change, sets up the change of SQCM frequency and SQCM probe mass-change curve, thus realizes measuring lunar dust
The demarcation of instrument viscous quartz crystal probe.Specifically include following steps:
Step 1, owing to the quality of the lunar dust on SQCM probe is not easy directly to measure, is placed around 3 at SQCM probe
Area is 1cm2Square aluminium foil, aluminium foil centre-to-centre spacing SQCM germ nucleus is about 1cm, as shown in Figure 1.Square aluminium foil surface
Long-pending sufficiently small, it is believed that dust field is uniform in this tiny area, stable, can be by the lunar dust quality of unit are on aluminium foil
Replace the lunar dust quality of unit are on SQCM probe.This substrate of XP2U ultramicron electronic balance weighing aluminium foil is utilized before test
Amount (m1, m2, m3)；
SQCM probe and 3 aluminium foils are placed on the underface of the wind-borne dust device shown in Fig. 1, in being popped one's head in by SQCM by step 2
Quartz crystal film after, by SQCM pop one's head in vacuum storehouse, be in immediately below the wind-borne dust device, be evacuated to 1 × 10-3Pa, surely
After fixed 4 hours (after SQCM probe stationary), SQCM probe start work, time unloaded, after SQCM frequency probe is stable, survey continuously
The measurement frequency of 10 SQCM of examination, test every 3 minutes once, is measured half an hour continuously, afterwards power-off half an hour, is then repeated
2 times, test 30 times altogether, the meansigma methods of 30 times is that frequency values, frequency after the work of SQCM probe stationary are stablized in the zero load of SQCM probe
The change average maximum deflection difference value with 30 timesIt is considered as the frequency maximum perturbation value that hardware system self brings, i.e. corresponding
SQCM pop one's head in the minimum frequency changing value that can differentiate.
Step 3, opens the dust cap of SQCM probe, opens the wind-borne dust device, applies simulation lunar dust load, measures SQCM in real time
The frequency of probe, when, after the frequency stable of SQCM probe, test gained, for stablizing frequency values after the ash that falls, stablizes frequency values after the ash that falls
The difference stablizing frequency values with zero load is variation delta f applying to simulate lunar dust load frequency, opens vacuum storehouse, takes out aluminium foil,
Weigh 3 aluminium foil quality (M after deposition simulation lunar dust1, M2, M3), according to the background quality (m of aluminium foil1, m2, m3), utilizeTry to achieve the meansigma methods of simulation lunar dust quality, then the area (1cm divided by aluminium foil2), thus obtain frequency
The mass change amount Δ m of the unit are that rate changing value is corresponding.
Step 4, by clean to aluminium foil and quartz crystal cleaning, be again placed on aluminium foil near SQCM probe, be placed on vacuum
Evacuation in storehouse, the zero load measuring SQCM probe is stablized frequency values, is changed the simulation lunar dust load capacity that the wind-borne dust device applies, then
Repeating step 3, apply different simulation lunar dust load capacity the most successively, test SQCM measures changing value and the aluminium foil of frequency
On unit are lunar dust mass change amount, obtain lunar dust quality and the frequency change of unit are according to test data matching
(the corresponding relation curve (as shown in Figure 4) of Δ f) tries to achieve mass sensitivity values of factor K (i.e. the slope of Fig. 4 cathetus), flow process
As shown in Figure 2.When dust emission increases to certain value, beyond SQCM probe greatest measurement, the frequency of SQCM probe no longer changes
Change, the quality that the frequency change maximum of SQCM probe is corresponding is the maximum measurement quality that SQCM pops one's head in.
Step 5, the SQCM probe minimum frequency changing value that the K value obtained according to step 4 and step 2 obtain, utilizeTrying to achieve the minimum resolution mass of the unit are of SQCM probe, idiographic flow is as shown in Figure 3.
Step 6, step 5 the minimum resolution mass of the unit are of the SQCM obtained probe, and obtained by step 4
The maximum quality of measuring of SQCM probe, corresponding interval is the range ability of SQCM probe.
An example is given below illustrate.
The stability test unloaded to SQCM probe of method described in step 2 is used to carry out frequency stability survey under vacuum conditions
Examination, test result is shown in Table 1.Measurement frequency and reference frequency are within the testing time, and the change of data is all in the range of requiring, full
Foot stability requirement；The absolute tolerance of difference frequency is 48HZ to the maximum, as shown in Figure 4.
Table 1 SQCM probe idling frequency test data and frequency fluctuation scope
Carry out 5 airborne dusts, the SQCM frequency probe after each airborne dust and the lunar dust quality on the aluminium foil of correspondence such as table 2 institute
Show, it can be seen that the change of K value is all 10-6The order of magnitude on, meet required precision, according to the result of the test of table 2, after matching
Curve as it is shown in figure 5, as can be seen from Figure 5, K value is 5.6435 × 10-9g/cm2Frequency change and the simulation of Hz, SQCM probe
The quality of lunar dust is linear, meets the theory relation of quartz crystal frequency change and mass change.
The test data that table 2 deposition simulation lunar dust mass change changes with frequency
According to the SQCM frequency probe maximum definitely tolerance (48Hz) after stable, and SQCM probe mass sensitivity
Values of factor K (5.6345 × 10-9g/cm2Hz), can show that the minimum resolution that SQCM pops one's head in is less than 2.706 × 10-7g/cm2,
Being better than resolution is 5 × 10-7g/cm2Index request.
As shown in Table 2, frequency change 20835Hz, corresponding quality is 1.29 × 10-4g/cm2, then SQCM probe
Measurement range ability be 2.706 × 10-7g/cm2～1.29 × 10-4g/cm2, meeting measurement range is 2.5 × 10-6g/cm2~
1×10-4g/cm2The requirement of technical specification.
In sum, these are only presently preferred embodiments of the present invention, be not intended to limit protection scope of the present invention.
All within the spirit and principles in the present invention, any modification, equivalent substitution and improvement etc. made, should be included in the present invention's
Within protection domain.
Claims (2)
1. a lunar dust measuring instrument viscous quartz crystal probe scaling method, it is characterised in that comprise the following steps:
Step 1, being placed around 3 areas at viscous quartz crystal SQCM probe is 1cm2Square aluminium foil, aluminium foil centre-to-centre spacing
SQCM germ nucleus 1cm；Described viscous quartz crystal SQCM probe is prepared by film on quartz crystal；
SQCM probe and 3 aluminium foils are placed on the underface of the wind-borne dust device, are placed on evacuation in vacuum storehouse, SQCM by step 2
Probe start work, the frequency values of repetitive measurement SQCM probe, wherein, the frequency values of measurement is averaged as zero load stably frequency
Rate value, SQCM frequency probe value is that idling frequency changes maximum deflection difference value with the maximum deflection difference value of meansigma methods；Idling frequency changes
Maximum deflection difference value is the minimum frequency changing value that SQCM probe can be differentiated；
Step 3, opens the dust cap of SQCM probe, opens the wind-borne dust device, applies simulation lunar dust load, measures SQCM probe in real time
Frequency, after the frequency stable of SQCM probe, test gained is to stablize frequency values after dust fall；Open vacuum storehouse, take out aluminium foil,
Measure the lunar dust quality on aluminium foil, the unit are lunar dust quality being calculated on aluminium foil；
Step 4, loads the simulation lunar dust on aluminium foil and SQCM probe and cleans up, when cleaning SQCM probe, by quartz crystal
On film wash off, repeat step 1 and 2, change the wind-borne dust device apply simulation lunar dust load capacity, repeat step 3, it is thus achieved that SQCM
The unit are lunar dust quality on the aluminium foil of frequency values and correspondence is stablized after the dust fall of probe；After dust fall according to SQCM probe
Stablize the unit are lunar dust quality that frequency values is stablized on frequency values, and aluminium foil with zero load, use fitting a straight line to obtain unit
Area lunar dust quality and SQCM probe, relative to the corresponding relation of frequency change during zero load, calculate the slope of fitting a straight line
K, K are SQCM probe mass sensitivity coefficient；
Step 5, the SQCM probe minimum frequency changing value that the K value obtained according to step 4 and step 2 obtain, obtain SQCM probe
Unit are minimum resolution mass；
Step 6, step 5 the unit are minimum resolution mass of the SQCM obtained probe is the minimum of SQCM probe range
Value；The unit are lunar dust quality that in step 4, the maximum of the described frequency change of SQCM probe is corresponding is SQCM probe amount
The maximum of journey.
2. lunar dust measuring instrument viscous quartz crystal probe scaling method as claimed in claim 1, it is characterised in that described step
In 2, the idling frequency change maximum deflection difference value method of testing of SQCM probe is as follows:
1., during zero load, after SQCM frequency probe is stable, the measurement frequency of 10 SQCM of follow-on test, test was every 3 minutes one
Secondary, measure half an hour continuously, afterwards power-off half an hour；
2. start shooting, and repeat step 1., be repeated 2 times altogether, the most altogether test 30 times；
3. SQCM frequency probe value is idling frequency change maximum deflection difference value with the maximum deflection difference value of the meansigma methods of 30 times.
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| CN101762434A (en) * | 2009-10-13 | 2010-06-30 | 中国航天科技集团公司第五研究院第五一〇研究所 | Measuring method of tiny dust |
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| CN101762434A (en) * | 2009-10-13 | 2010-06-30 | 中国航天科技集团公司第五研究院第五一〇研究所 | Measuring method of tiny dust |
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| QCM传感器检测系统的研究;徐晶;《中国优秀硕士学位论文全文数据库 信息科技辑》;20091015;50-51 * |
| 石英晶振微天平室内空气质量检测传感器的研究;卢好正;《中国优秀博硕士学位论文全文数据库（硕士）信息科技辑》;20050715;11-14 * |
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