CN104280120A - Spectral bandwidth measuring method and device - Google Patents
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Abstract
本发明提供一种光谱带宽测量方法和装置。本发明的方法包括，S1，单色仪输出波长为λ的单色光；S2，成像光谱仪的探测器上接受波长为λ的单色光的光斑，读取光斑位置上第一像元的光强；S3，单色仪改变输出波长，输出多个波长间隔为Δλ的单色光；通过第二像元和/或第一像元上的光强变化量，计算得出单色光的分布曲线上的n个强度取样点；S4，由n个强度取样点拟合出整个单色光光斑的强度分布，并得出光谱带宽。本发明的测量方法采取波长变化的一组单色光来测量光谱带宽，测量精度和输入单色光的波长间隔有关，波长间隔越小，测得的光谱带宽精度越高。相较于现有的方法，大大提高了光谱带宽的测量精度。
The invention provides a spectral bandwidth measurement method and device. The method of the present invention comprises, S1, monochromator output wavelength is the monochromatic light of λ; S2, accepts the light spot of the monochromatic light of wavelength λ on the detector of imaging spectrometer, reads the light of the first pixel on the spot position Strong; S3, the monochromator changes the output wavelength, and outputs multiple monochromatic lights with a wavelength interval of Δλ; the distribution of monochromatic light is calculated by the light intensity variation on the second pixel and/or the first pixel n intensity sampling points on the curve; S4, fitting the intensity distribution of the entire monochromatic light spot from the n intensity sampling points, and obtaining the spectral bandwidth. The measurement method of the present invention adopts a group of monochromatic lights with varying wavelengths to measure the spectral bandwidth. The measurement accuracy is related to the wavelength interval of the input monochromatic light. The smaller the wavelength interval, the higher the accuracy of the measured spectral bandwidth. Compared with the existing methods, the measurement accuracy of the spectral bandwidth is greatly improved.
Description
技术领域technical field
本发明涉及光学测量技术领域，尤其涉及一种应用于成像光谱仪的光谱带宽测量方法和装置。The invention relates to the technical field of optical measurement, in particular to a spectral bandwidth measurement method and device applied to an imaging spectrometer.
背景技术Background technique
随着国民经济和遥感技术的发展，光谱测量技术在物质成分分析，环境监测，地质测量和军事侦察等方面得到了应用和发展，尤其是星载或机载光谱成像仪在空间探测方面得到了广泛的应用，成像光谱仪能够同时获取目标的二维空间图像和一维光谱信息，既能直观反映被测目标的几何形貌，又能提供目标的理化属性，是一种图谱结合的探测手段。With the development of national economy and remote sensing technology, spectral measurement technology has been applied and developed in material composition analysis, environmental monitoring, geological survey and military reconnaissance, etc. Widely used, the imaging spectrometer can simultaneously acquire the two-dimensional spatial image and one-dimensional spectral information of the target, which can not only directly reflect the geometric shape of the measured target, but also provide the physical and chemical properties of the target. It is a detection method combining graphs and spectra.
上个世纪八十年代以来，光谱成像技术开始被广泛应用于航天航空遥感成像，通过飞行器搭载，在矿产与石油资源探测、水质及大气污染监测、精准农业和林业等领域取得了瞩目成就。目前，这项技术已经逐步渗透到生物医学、艺术品防伪鉴定、食品安全监测、疾病的控制与治疗等民用领域，获得了越来越广泛的研究与运用。Since the 1980s, spectral imaging technology has been widely used in aerospace remote sensing imaging, carried by aircraft, and has made remarkable achievements in the fields of mineral and oil resource detection, water quality and air pollution monitoring, precision agriculture and forestry. At present, this technology has gradually penetrated into civilian fields such as biomedicine, artwork anti-counterfeiting identification, food safety monitoring, disease control and treatment, and has obtained more and more extensive research and application.
成像光谱仪在装调过程中，需要对其系统性能进行各种测试，如空间分辨率、光谱分辨率、辐射定标等。而对于光谱分辨率一般采用光谱带宽来评价，因此需要高精度的光谱带宽测量方法。对于成像光谱仪，一般的光谱带宽测量方法是利用Hg灯等线光源或者单色仪输出单色光，被测光谱仪系统得到光源的强度分布图，分析谱线的形状，通过数值计算的方法得到光谱带宽，强度分布如图1所示，每一个黑色小方点代表一个像元输出的光强值，单色光的光斑分布在10-20个像元上，根据强度分布图，利用高斯公式拟合得到成像光谱仪的光谱带宽，光谱带宽的测量精度和光斑分布的像元数直接相关，也就是在光斑范围内取样点越多，光谱带宽的测量精度越高。During the installation and adjustment process of the imaging spectrometer, it is necessary to conduct various tests on its system performance, such as spatial resolution, spectral resolution, radiation calibration, etc. The spectral resolution is generally evaluated by the spectral bandwidth, so a high-precision spectral bandwidth measurement method is required. For imaging spectrometers, the general spectral bandwidth measurement method is to use a line light source such as a Hg lamp or a monochromator to output monochromatic light. The measured spectrometer system obtains the intensity distribution diagram of the light source, analyzes the shape of the spectral line, and obtains the spectrum by numerical calculation. The bandwidth and intensity distribution are shown in Figure 1. Each small black square point represents the light intensity value output by a pixel, and the monochromatic light spots are distributed on 10-20 pixels. According to the intensity distribution diagram, the Gaussian formula is used to simulate Combined to obtain the spectral bandwidth of the imaging spectrometer, the measurement accuracy of the spectral bandwidth is directly related to the number of pixels in the spot distribution, that is, the more sampling points within the spot range, the higher the measurement accuracy of the spectral bandwidth.
但是由于探测器技术和结构形式的限制，一般成像光谱仪的光谱带宽和像元大小的尺寸相当。当采用传统的方法测量光谱带宽时，由于光斑只分布在2-3个像元上，大部分能量集中在一个像元内，取样点少，因此不能准确测量系统的光谱带宽，只能定性的分析光谱带宽是小于一个像元还是大于一个像元，无法满足系统的高精度测试要求。而光谱带宽是成像光谱仪的一个重要指标，直接影响系统的光谱分辨率，对仪器能否达到识别目标的目的至关重要，因此需要一种高精度的光谱带宽的测量方法。However, due to the limitations of detector technology and structural form, the spectral bandwidth of general imaging spectrometers is equivalent to the size of the pixel. When the traditional method is used to measure the spectral bandwidth, since the light spots are only distributed on 2-3 pixels, most of the energy is concentrated in one pixel, and there are few sampling points, so the spectral bandwidth of the system cannot be accurately measured, only qualitative Analyzing whether the spectral bandwidth is smaller than one pixel or larger than one pixel cannot meet the high-precision testing requirements of the system. The spectral bandwidth is an important indicator of the imaging spectrometer, which directly affects the spectral resolution of the system and is crucial to whether the instrument can achieve the purpose of identifying the target. Therefore, a high-precision spectral bandwidth measurement method is needed.
发明内容Contents of the invention
本发明要解决的技术问题为：现有的光谱带宽测量方法中只能定性的分析光谱带宽是小于还是大于一个像元，取样点少，测量光谱带宽的精度较低。The technical problem to be solved by the present invention is: the existing spectral bandwidth measurement method can only qualitatively analyze whether the spectral bandwidth is smaller or larger than one pixel, there are few sampling points, and the accuracy of measuring spectral bandwidth is low.
本发明的技术方案为：一种光谱带宽测量方法，包括，S1，单色仪输出波长为λ的单色光；S2，成像光谱仪的探测器上接受波长为λ的单色光的光斑，读取光斑上的第一像元上的光强；S3，单色仪改变输出波长，输出多个波长间隔为Δλ的单色光；读取光斑上第一像元和/或第二像元上的光强；通过第二像元和/或第一像元上的光强变化量，计算得出单色光的分布曲线上的n个强度取样点；其中，n为1以上的自然数；S4，由n个强度取样点拟合出整个单色光光斑的强度分布，并得出成像光谱仪的光谱带宽。The technical solution of the present invention is: a spectral bandwidth measurement method, comprising: S1, the monochromator outputting a monochromatic light with a wavelength of λ; Take the light intensity on the first pixel on the spot; S3, the monochromator changes the output wavelength, and outputs multiple monochromatic lights with a wavelength interval of Δλ; read the first pixel and/or the second pixel on the spot The light intensity; through the light intensity variation on the second pixel and/or the first pixel, calculate n intensity sampling points on the distribution curve of monochromatic light; wherein, n is a natural number above 1; S4 , the intensity distribution of the entire monochromatic light spot is fitted by n intensity sampling points, and the spectral bandwidth of the imaging spectrometer is obtained.
进一步地，S3包括：S31，单色仪输出波长变化为λ+Δλ的单色光；S32，成像光谱仪的探测器上接受波长为λ+Δλ的单色光，读取第一像元和第二像元上的光强；S33，通过第二像元上增加的光强，得出单色光的分布曲线上的第一强度取样点。Further, S3 includes: S31, the monochromator outputs monochromatic light with a wavelength change of λ+Δλ; S32, the detector of the imaging spectrometer accepts the monochromatic light with a wavelength of λ+Δλ, and reads the first pixel and the second The light intensity on the second pixel; S33, obtain the first intensity sampling point on the monochromatic light distribution curve through the increased light intensity on the second pixel.
进一步地，S3包括：S34，单色仪输出波长变化为λ+2×Δλ的单色光；S35，成像光谱仪的探测器上接受波长为λ+2×Δλ的单色光，读取第一像元和第二像元上的光强；S36，通过第二像元上的光强减去第一强度取样点的光强，得出单色光的分布曲线上的第二强度取样点。Further, S3 includes: S34, the monochromator outputs monochromatic light with a wavelength change of λ+2×Δλ; S35, the detector of the imaging spectrometer receives monochromatic light with a wavelength of λ+2×Δλ, and reads the first The light intensity on the pixel and the second pixel; S36, subtracting the light intensity at the first intensity sampling point from the light intensity on the second pixel to obtain a second intensity sampling point on the monochromatic light distribution curve.
进一步地，S3包括：S37，单色仪改变输出波长，输出n个波长间隔为Δλ的单色光；S38，成像光谱仪的探测器上接受波长为λ+nΔλ的单色光，读取第一像元和第二像元上的光强；S39，通过计算第二像元上n次中每次增加的光强值，得出单色光的分布曲线上的n个强度取样点。。Further, S3 includes: S37, the monochromator changes the output wavelength, and outputs n monochromatic lights with a wavelength interval of Δλ; S38, the detector of the imaging spectrometer accepts the monochromatic light with a wavelength of λ+nΔλ, and reads the first The light intensity on the pixel and the second pixel; S39, by calculating the light intensity value of each increase in n times on the second pixel, n intensity sampling points on the distribution curve of the monochromatic light are obtained. .
进一步地，光谱仪的每个像元长度所代表的光谱宽度为Δλ0，则波长间隔Δλ满足：m×Δλ＝Δλ0，其中，m为1以上的自然数。Further, the spectral width represented by each pixel length of the spectrometer is Δλ0, and the wavelength interval Δλ satisfies: m×Δλ=Δλ0, where m is a natural number greater than 1.
进一步地，S3包括：S321，单色仪输出波长变化为λ+Δλ的单色光；S322，成像光谱仪的探测器上接受波长为λ+Δλ的单色光，读取第一像元的光强；S323，通过第一像元上减少的光强，得出单色光的分布曲线上的第一强度取样点。Further, S3 includes: S321, the monochromator outputs monochromatic light with a wavelength change of λ+Δλ; S322, the detector of the imaging spectrometer accepts the monochromatic light with a wavelength of λ+Δλ, and reads the light of the first pixel Intensity; S323, obtain the first intensity sampling point on the distribution curve of the monochromatic light through the reduced light intensity on the first pixel.
进一步地，S3包括：S324，单色仪输出波长变化为λ+2×Δλ的单色光；S325，成像光谱仪的探测器上接受波长为λ+2×Δλ的单色光，读取第一像元上的光强；S326，通过第一像元上的减少的光强减去第一强度取样点的光强，得出单色光的分布曲线上的第二强度取样点。Further, S3 includes: S324, the monochromator outputs monochromatic light with a wavelength change of λ+2×Δλ; S325, the detector of the imaging spectrometer receives monochromatic light with a wavelength of λ+2×Δλ, and reads the first Light intensity on the pixel; S326, subtracting the light intensity at the first intensity sampling point from the reduced light intensity on the first pixel to obtain a second intensity sampling point on the monochromatic light distribution curve.
进一步地，所述S3包括：S327，单色仪改变输出波长，输出n个波长间隔为Δλ的单色光；S328，成像光谱仪的探测器上接受波长为λ+nΔλ的单色光，读取第一像元和第二像元上的光强；S329，通过计算第一像元上n次中每次减少的光强值，得出单色光的分布曲线上的n个强度取样点。Further, the S3 includes: S327, the monochromator changes the output wavelength, and outputs n monochromatic lights with a wavelength interval of Δλ; S328, the detector of the imaging spectrometer accepts the monochromatic light with a wavelength of λ+nΔλ, and reads The light intensity on the first pixel and the second pixel; S329, by calculating the light intensity value of each reduction in n times on the first pixel, n intensity sampling points on the distribution curve of the monochromatic light are obtained.
本发明的另一方面，提供了一种光谱带宽测量装置，应用上述任意一项的光谱带宽测量方法，还包括，单色仪，用于输出波长为λ的单色光；成像光谱仪，在探测器上接受波长为λ的单色光的光斑，并输出光斑上的第一像元上的光强；数据采集系统，接受成像光谱仪的数据；其中，单色仪多次改变输出波长，输出多个波长变化为λ+nΔλ的单色光；成像光谱仪的探测器的第一像元和第二像元上的光强输出给数据采集系统；数据采集系统通过第二像元和/或第一像元上的光强计算，得出单色光的分布曲线上的n个强度取样点；其中，n为1以上的自然数。Another aspect of the present invention provides a spectral bandwidth measurement device, which uses any one of the above spectral bandwidth measurement methods, and also includes a monochromator for outputting monochromatic light with a wavelength of λ; an imaging spectrometer for detecting The light spot of monochromatic light with a wavelength of λ is accepted on the device, and the light intensity on the first pixel on the light spot is output; the data acquisition system accepts the data of the imaging spectrometer; wherein, the monochromator changes the output wavelength many times, and outputs multiple A monochromatic light with a wavelength change of λ+nΔλ; the light intensity on the first pixel and the second pixel of the detector of the imaging spectrometer is output to the data acquisition system; the data acquisition system passes the second pixel and/or the first The light intensity on the pixel is calculated to obtain n intensity sampling points on the monochromatic light distribution curve; wherein, n is a natural number greater than 1.
进一步地，还包括，积分球，用于匀化单色仪发出的单色光。Further, an integrating sphere is also included for homogenizing the monochromatic light emitted by the monochromator.
本发明与现有技术相比的优点在于：The advantage of the present invention compared with prior art is:
本发明的测量方法采取波长变化的一组单色光来测量光谱带宽，测量精度和输入单色光的波长间隔有关，波长间隔越小，测得的光谱带宽精度越高。相较于现有的方法，大大提高了光谱带宽的测量精度。The measurement method of the present invention adopts a group of monochromatic lights with varying wavelengths to measure the spectral bandwidth. The measurement accuracy is related to the wavelength interval of the input monochromatic light. The smaller the wavelength interval, the higher the accuracy of the measured spectral bandwidth. Compared with the existing methods, the measurement accuracy of the spectral bandwidth is greatly improved.
附图说明Description of drawings
图1示出了成像光谱仪光谱带宽测量方法的原理示意图；Fig. 1 shows the schematic diagram of the principle of imaging spectrometer spectral bandwidth measurement method;
图2示出了本发明的高精度光谱带宽测量装置的示意图；Fig. 2 shows the schematic diagram of the high precision spectral bandwidth measuring device of the present invention;
图3a示出了本发明的高精度光谱带宽测量方法的数据处理原理示意图；Figure 3a shows a schematic diagram of the data processing principle of the high-precision spectral bandwidth measurement method of the present invention;
图3b示出了本发明的高精度光谱带宽测量方法的数据处理原理示意图；Figure 3b shows a schematic diagram of the data processing principle of the high-precision spectral bandwidth measurement method of the present invention;
图3c示出了本发明的高精度光谱带宽测量方法的数据处理原理示意图；Figure 3c shows a schematic diagram of the data processing principle of the high-precision spectral bandwidth measurement method of the present invention;
图3d示出了本发明的高精度光谱带宽测量方法的数据处理原理示意图；Figure 3d shows a schematic diagram of the data processing principle of the high-precision spectral bandwidth measurement method of the present invention;
图4a示出了现有技术的光谱带宽测量方法的测量结果示意图；Figure 4a shows a schematic diagram of the measurement results of the spectral bandwidth measurement method of the prior art;
图4b示出了本发明高精度光谱带宽测量方法的测量结果示意图。Fig. 4b shows a schematic diagram of measurement results of the high-precision spectral bandwidth measurement method of the present invention.
具体实施方式Detailed ways
本发明针对光谱仪的光谱带宽的测量装置，包括：一个高分辨率的标准单色仪，一个对单色光匀化的积分球，一个被测成像光谱仪和一个实时数据采集和分析系统。标准单色仪输出等波长间隔的单色光，经过积分球匀化后由成像光谱仪接收，通过实时数据采集和分析系统计算得到光谱带宽。The invention aims at measuring the spectral bandwidth of the spectrometer, comprising: a high-resolution standard monochromator, an integrating sphere for homogenizing monochromatic light, a measured imaging spectrometer and a real-time data acquisition and analysis system. The standard monochromator outputs monochromatic light with equal wavelength intervals, which is received by the imaging spectrometer after being homogenized by the integrating sphere, and the spectral bandwidth is calculated by the real-time data acquisition and analysis system.
本发明的一种成像光谱仪光谱带宽的测量方法，当单色仪以已知的固定波长间隔输出多组单色光，并被数据采集系统接收后，通过分析输入波长和探测器上各像元的强度变化的对应关系，得出被测光斑的每个细分段的强度值，并拟合出光斑分布图，计算得出成像光谱仪的光谱带宽。A method for measuring the spectral bandwidth of an imaging spectrometer according to the present invention, when the monochromator outputs multiple sets of monochromatic light at known fixed wavelength intervals and is received by the data acquisition system, by analyzing the input wavelength and each pixel on the detector According to the corresponding relationship of the intensity change, the intensity value of each subdivision of the measured spot is obtained, and the spot distribution map is fitted, and the spectral bandwidth of the imaging spectrometer is calculated.
参考图2所示，本系统的测量装置由四部分组成，分别为标准单色仪11，积分球12，成像光谱仪13和数据采集系统14。标准单色仪11可以输出单色光，光谱范围覆盖整个测量范围，其光谱带宽要满足测试成像光谱仪的要求，具体为一般小于被测成像光谱仪光谱带宽的1/10。单色仪11发出的光在空间分布是不均匀的，积分球12的作用是将单色仪11发出的光均匀化，之后照射在待测的成像光谱仪13上，成像光谱仪13是被测试系统，成像光谱仪13是由光学系统和面阵探测器组成的，面阵探测器可实时接收经积分球12照射进入成像光谱仪13上的光斑，并由数据分析系统14分析光斑的强度分布。在测试的过程中，标准单色仪11会根据要求输出特定波长的单色光，每次测量会输出10～20个波长的单色光，数据采集系统14自动记录所有波长的强度分布，并根据输出波长和探测器上像元强度变化之间的对应关系，自动计算出成像光谱仪13的光谱带宽。Referring to FIG. 2 , the measurement device of this system consists of four parts, namely a standard monochromator 11 , an integrating sphere 12 , an imaging spectrometer 13 and a data acquisition system 14 . The standard monochromator 11 can output monochromatic light, the spectral range covers the entire measurement range, and its spectral bandwidth should meet the requirements of the imaging spectrometer to be tested, specifically, generally less than 1/10 of the spectral bandwidth of the imaging spectrometer to be tested. The light emitted by the monochromator 11 is unevenly distributed in space. The function of the integrating sphere 12 is to homogenize the light emitted by the monochromator 11, and then irradiate it on the imaging spectrometer 13 to be tested. The imaging spectrometer 13 is the system under test. The imaging spectrometer 13 is composed of an optical system and an area array detector. The area array detector can receive the light spot irradiated into the imaging spectrometer 13 through the integrating sphere 12 in real time, and the data analysis system 14 analyzes the intensity distribution of the light spot. During the test, the standard monochromator 11 will output monochromatic light of a specific wavelength according to requirements, and each measurement will output monochromatic light of 10 to 20 wavelengths. The data acquisition system 14 automatically records the intensity distribution of all wavelengths, and The spectral bandwidth of the imaging spectrometer 13 is automatically calculated according to the corresponding relationship between the output wavelength and the intensity change of the pixel on the detector.
参考图3a至图3d所示，本发明为了解决现有光谱带宽测量方式精度不足的问题，本系统不再仅输入一种单色光，而是采用输入一组波长不同的单色光的方式，来提高测量精度。通过本发明前述的测量装置采集到一组单色光，并对其经行数据处理。Referring to Fig. 3a to Fig. 3d, in order to solve the problem of insufficient accuracy of the existing spectral bandwidth measurement method, the system no longer only inputs one kind of monochromatic light, but adopts the method of inputting a group of monochromatic light with different wavelengths , to improve the measurement accuracy. A group of monochromatic light is collected by the aforementioned measurement device of the present invention and subjected to data processing.
具体计算过程为，标准单色仪11输出波长λ的单色光时，该单色光的光斑光强具有分布曲线25。如图3a所示，光斑分布在成像光谱仪13的探测器上，像斑覆盖在像元23和像元24上，这时，探测上只有像元23和像元24有光强输出，像元23输出的光强和像斑211对应，像元24输出的光强和像斑212对应。此时，改变标准单色仪11的输出波长，每次增加波长Δλ，记录光强值的分布。根据理论模型，可知成像光谱仪13每个像元长度所代表的光谱宽度，假定为Δλ0。则波长间隔Δλ需满足公式：m×Δλ＝Δλ0，其中m＝1,2,3……，此方式可简化数据处理过程。每次输出波长增加Δλ，当像元22有光强输出时，记录此时的波长值为λ+nΔλ，其中n＝1,2,3……。The specific calculation process is that when the standard monochromator 11 outputs monochromatic light with a wavelength λ, the spot light intensity of the monochromatic light has a distribution curve 25 . As shown in Figure 3a, the light spots are distributed on the detector of the imaging spectrometer 13, and the image spots cover the pixel 23 and the pixel 24. At this time, only the pixel 23 and the pixel 24 have light intensity output on the detection, and the pixel The light intensity output by pixel 23 corresponds to the image spot 211 , and the light intensity output by the pixel 24 corresponds to the image spot 212 . At this time, the output wavelength of the standard monochromator 11 is changed, and the wavelength Δλ is increased each time, and the distribution of light intensity values is recorded. According to the theoretical model, it can be known that the spectral width represented by each pixel length of the imaging spectrometer 13 is assumed to be Δλ0. Then the wavelength interval Δλ needs to satisfy the formula: m×Δλ=Δλ0, where m=1, 2, 3..., this method can simplify the data processing process. Each time the output wavelength increases by Δλ, when the pixel 22 has light intensity output, record the wavelength value at this time as λ+nΔλ, where n=1, 2, 3 . . . .
参见图3b可知，此时像元22输出的光强和像斑213对应，为波长从λ+(n-1)Δλ变化到λ+nΔλ时光斑的移动量，由此可知像斑213的强度值即为像元22输出的光强值。由此，通过像元22测得的光强值得到了分布曲线25上的一个强度取样点。Referring to Figure 3b, it can be seen that the light intensity output by the pixel 22 at this time corresponds to the image spot 213, which is the movement amount of the spot when the wavelength changes from λ+(n-1)Δλ to λ+nΔλ, and thus the intensity of the image spot 213 can be known The value is the light intensity value output by the pixel 22. Thus, an intensity sampling point on the distribution curve 25 is obtained from the light intensity value measured by the pixel 22 .
参见图3c可知，当标准单色仪11输出波长为λ+(n+1)Δλ时，可知像元22输出的光强为像斑213和像斑214的强度，因为已知像斑213的强度值，所以只需要减去像斑213的强度，既可以得到像斑214的强度值。由此，又通过像元22的光强计算得到了分布曲线25上的第二个强度取样点。以此类推，经过多次的移动和计算，可以得到一系列的强度值取样点。Referring to Fig. 3c, it can be seen that when the output wavelength of the standard monochromator 11 is λ+(n+1)Δλ, it can be seen that the light intensity output by the pixel 22 is the intensity of the image spot 213 and the image spot 214, because the known image spot 213 Intensity value, so it only needs to subtract the intensity of the image spot 213 to obtain the intensity value of the image spot 214. Thus, the second intensity sampling point on the distribution curve 25 is obtained by calculating the light intensity of the pixel 22 . By analogy, after multiple moves and calculations, a series of intensity value sampling points can be obtained.
参见图3d所示，当标准单色仪11输出波长为λ+(n+m)Δλ时，此时像元21有光强输出，由分析可知此时像元21的光强和像斑213对应，而像元22输出的光强则为像斑214,215…直至220的强度之和再减掉像斑213的强度值，由此可以计算出像斑220的强度值。以此类推，可将整个像斑分成多个小段，每段对应的步长为Δλ，根据每段光强所对应的位置，即可拟合出整个光斑的强度分布，根据强度分布即可测出系统的光谱带宽。Referring to Figure 3d, when the output wavelength of the standard monochromator 11 is λ+(n+m)Δλ, the pixel 21 has light intensity output at this time, and it can be known from the analysis that the light intensity and image spot 213 of the pixel 21 at this time Correspondingly, the light intensity output by the pixel 22 is the sum of the intensities of the image spots 214 , 215 . By analogy, the entire image spot can be divided into multiple small sections, and the corresponding step size of each section is Δλ. According to the position corresponding to the light intensity of each section, the intensity distribution of the entire spot can be fitted, and the system can be measured according to the intensity distribution. the spectral bandwidth.
光谱带宽的测试精度和Δλ的选择相关，如果想提高光谱带宽的测量精度，只需要选择更小的Δλ即可。上述方法中采用的是利用像元21和像元22来上的光强增加量来计算光谱带宽，同理，可以用像元23和像元24来计算光谱带宽，只需要计算像元23或像元24上的光强减少量即可。The test accuracy of the spectral bandwidth is related to the selection of Δλ. If you want to improve the measurement accuracy of the spectral bandwidth, you only need to choose a smaller Δλ. In the above method, the spectral bandwidth is calculated by using the light intensity increase on the pixel 21 and the pixel 22. Similarly, the spectral bandwidth can be calculated by the pixel 23 and the pixel 24, only need to calculate the pixel 23 or The amount of light intensity reduction on the pixel 24 is sufficient.
因此，在同一次测量中，可以取两种测量方法的平均值来提高测量精度。本发明的方法简便易行，不需要对成像光谱仪做特殊设置，因此提高了此种测量方法和装置的适用范围，本方法大大提高了成像光谱仪13光谱带宽的测试精度。Therefore, in the same measurement, the average value of the two measurement methods can be taken to improve the measurement accuracy. The method of the present invention is simple and easy, and does not require special settings for the imaging spectrometer, thus improving the scope of application of the measurement method and device, and the method greatly improves the testing accuracy of the spectral bandwidth of the imaging spectrometer 13 .
参考图4a所示，当采用传统测试光谱带宽的方法测试成像光谱仪13时，整个光斑在探测器上只占两个像元，输出了两个光强值，用这两个数值不能计算光谱带宽。而参考图4b所示，采用本发明方法和装置，通过改变输入单色光波长的方法，在整个光斑的范围内采集到了26个点，用26个点可准确的计算成像光谱仪13的光谱带宽，采集到的点数和波长间隔Δλ的设置有关，为了得到更高的精度，可选择更小的Δλ。解决了光谱带宽的测试问题。As shown in Fig. 4a, when the imaging spectrometer 13 is tested by the traditional method of testing the spectral bandwidth, the entire light spot only occupies two pixels on the detector, and two light intensity values are output, and the spectral bandwidth cannot be calculated with these two values . As shown in Fig. 4b, by adopting the method and device of the present invention, by changing the wavelength of the input monochromatic light, 26 points have been collected in the range of the entire light spot, and the spectral bandwidth of the imaging spectrometer 13 can be accurately calculated with 26 points , the number of collected points is related to the setting of the wavelength interval Δλ, in order to obtain higher accuracy, a smaller Δλ can be selected. Solved the test problem of spectral bandwidth.
以上所述，仅为本发明一种具体实施方式，但本发明的保护范围并不局限于此，任何熟悉本技术领域的技术人员在本发明披露的技术范围内，可轻易想到的变化或替换，都应涵盖在本发明的保护范围之内。因此，本发明的保护范围应该以权利要求书的保护范围为准。The above is only a specific embodiment of the present invention, but the scope of protection of the present invention is not limited thereto. Any person familiar with the technical field can easily think of changes or substitutions within the technical scope disclosed in the present invention. , should be covered within the protection scope of the present invention. Therefore, the protection scope of the present invention should be determined by the protection scope of the claims.
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