CN104266572A - Method for measuring size of electron beam spot of scanning electron microscope - Google Patents
Method for measuring size of electron beam spot of scanning electron microscope Download PDFInfo
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- CN104266572A CN104266572A CN201410474731.XA CN201410474731A CN104266572A CN 104266572 A CN104266572 A CN 104266572A CN 201410474731 A CN201410474731 A CN 201410474731A CN 104266572 A CN104266572 A CN 104266572A
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Abstract
The invention relates to the technical field of electrons, in particular to a method for measuring the size of the electron beam spot of a scanning electron microscope. The method comprises the steps that first a metal blade placed on a cup opening of a Faraday cup is irradiated through the scanning electron microscope, and a clear metal blade image is obtained; then the image of the edge of a part of a knife edge is cut out, image data processing software is used for acquiring the RGB value of the image, and a R gray level matrix, a G gray level matrix and a B gray level matrix are obtained; the average value of the three matrixes is obtained, and an average matrix is obtained; all the columns of the average matrix are summed, a one-dimensional matrix is obtained, a two-dimensional curve is drawn according to the values of all units of the one-dimensional matrix, the width of the rising edge of the curve is the beam spot diameter of an electron beam, and the purpose of the method is achieved. Accordingly, the method for measuring the size of the electron beam spot of the scanning electron microscope has the advantages of being easy to operate, high in precision, and high in practicability.
Description
Technical field
The present invention relates to electronic technology field, be specifically related to a kind of measuring method measuring scanning electron microscope electron beam spot size.
Background technology
In the related application of high resolution scanning electron microscope, the parameter index of scanning electron microscope electron beam is significant for the microscopical serviceability of Characterization Scanning electron, particularly the size of current of electron beam and beam spot size.The current value of electron beam will affect the brightness of electron beam, and the beam spot size of electron beam will determine the imaging resolution of scanning electron microscope.Therefore Measurement accuracy Electron Beam spot size is extremely necessary.Measurement accuracy scanning electron microscope electron beam current value can be achieved with Faraday cup, method at present for Measurement of Electron Beam spot size realizes mainly through electron beam exposure glue or by the method surveying electron beam current, in micron-sized bundle spot is measured, electron beam exposure glue, because tablet making technology is complicated, developing fixing operation is loaded down with trivial details and imaging does not accurately measure the deficiencies such as bigger error, is difficult to application; And easily produce measuring error with the method survey bundle spot surveying electric current owing to there is the problems such as beam scatter, and need to use microgalvanometer to survey electric current, also need the sample chamber of transforming scanning electron microscope, this brings again the trouble in many measuring error and operational sequence simultaneously.
Summary of the invention
The present invention is directed to background technology Shortcomings part, technical matters to be solved is to provide a kind of simple to operate, and precision is high, the method for practical measurement scanning electron microscope beam spot size.
Technical scheme of the present invention is a kind of method measuring scanning electron microscope beam spot size, and first the method irradiates the metal blade be positioned on Faraday cup rim of a cup by scanning electron microscope, obtain metal blade image clearly; Then intercept the image of part knife-edge, adopt image data processing software to obtain the rgb value of cut-away view picture, obtain R, G, B tri-gray matrixs; Obtain the mean value of these three matrixes again, obtain a mean matrix; By each row summation of mean matrix, obtain an one dimension matrix, become two-dimensional curve according to the numeric renderings of each unit of this one dimension matrix, the width of this curve rising edge is the beam spot diameter, of electron beam, thus realizes goal of the invention.Thus the inventive method comprises:
Step 1: a rectangle sheet metal width being less than Faraday cup diameter is arranged at the rim of a cup of Faraday cup, both guarantees have good electrical contact, Faraday cup is positioned over the sample chamber of scanning electron microscope, ensure simultaneously rectangle sheet metal while vertical with electron microscope scanning direction, open scanning electron microscope, obtain the electron micrograph image of a rectangle sheet metal clearly;
Step 2: choose the edge that rectangle sheet metal is vertical with electron microscope scanning direction, intercept this marginal portion image, comprise in cut-away view picture this edge along electron microscope scanning direction whole grey scale change process;
Step 3: usage data process software reads the rgb value intercepting picture, obtains R, G, B tri-two dimensional gray value matrixs respectively;
Step 4: by average for three Matrix Calculatings obtained in step 3, obtain a mean matrix, then each the row summation to this mean matrix, finally obtain an one dimension gray-scale value matrix;
Step 5: become two-dimensional curve according to each element numeric renderings of one dimension matrix that step 4 obtains, height of curve represents numerical values recited, and defining this curve is electron beam integrated curve, and the rising edge width of this integrated curve is the beam spot diameter, of electron beam.
In described step 1, rectangle sheet metal is trapezoidal in the cross section in scanning of scanning electron microscope direction, and this trapezoidal upper bottom surface and Faraday cup are fitted tightly during placement, both guarantees have good point cantact.
Differential is carried out to the electron beam integrated curve that step 5 obtains, obtains electron beam differential curve, the distance of two intersection points of electron beam differential curve and straight line y=0.1 is decided to be the beam spot diameter, of electron beam.
The present invention is a kind of method measuring scanning electron microscope beam spot size, adopts Faraday cup to be picture background when pictures taken, greatly improves the contrast of shooting sheet metal; Adopt differential curve to calculate the size of bundle spot more accurately, reliably, thus have simple to operate, precision is high, practical effect.
Accompanying drawing explanation
Fig. 1 is scanning electron microscope structural representation;
Fig. 2 is Faraday cup structural representation;
Fig. 3 is sheet metal schematic cross-section;
Fig. 4 is that schematic diagram put by measurement mechanism and sample;
Fig. 5 is the bundle spot integrated curve figure that actual computation obtains;
Fig. 6 is the bundle spot differential curve figure that actual computation obtains.
In figure: 1. first layer metal aperture plate layer, 2. second layer metal aperture plate layer, 3 metal electrode layers, 4. insulation course, 5. Faraday cup, 6. blade, 7. electron beam.
Embodiment
The technological means realized to make the present invention, creation characteristic, reaching object and effect is easy to understand, setting forth the present invention further below in conjunction with concrete diagram.
With reference to the Faraday cup structural representation shown in Fig. 2, design and produce the Faraday cup with aperture plate, add aperture plate object to be to tackle electron beam because beat the secondary electron produced on Faraday cup internal polar plate, thus effectively strengthen the contrast of blade sample knife-edge part.
The sheet metal of reference shown in Fig. 3 is a metal blade, and this blade sample in cross section is wide at the top and narrow at the bottom, and cross section is trapezoidal, and blade angle is θ, and blade thickness is t, and we wish that θ and t is the smaller the better.Meanwhile, need ensure blade sample surface smoothness and smooth finish high as far as possible.
Put schematic diagram with reference to the measurement mechanism shown in Fig. 4 and sample and place Faraday cup and blade sample, after fixing sample, sample stage is horizontally rotated about 10 ° towards the opposite direction of the secondary electron gathering-device of scanning electron microscope, its object is to the contrast increasing blade sample knife-edge part, thus reduce the error of calculation.
Use scanning electron microscope to sample imaging, and the knife-edge positions of blade sample is presented on the view center of display window, enlargement factor is heightened as far as possible when ensureing clear picture, repeatedly adjust focus lamp and the object lens of scanning electron microscope, make Electron Beam Focusing clear, because these parameters are the key factors controlling electron beam spot.
The picture seeing blade sample knife-edge part clearly afterwards, uses low sweep speed synchronous photo taking, to ensure the sample photo obtaining high definition.
The sample photo obtained is carried out image processing, and its method is as follows:
(1) usage data process software reads the rgb value of sample photo;
(2) this rgb value is the two dimensional gray value matrix of three [0,255];
(3) this three RGB two dimensional gray value matrixs summation is averaged again obtains a two dimensional gray value matrix A;
(4) each row summation of matrix A is obtained an one dimension gray-scale value matrix;
(5) be depicted as two-dimensional curve according to the value of matrix A, this curve is the integrated curve of electron beam, and the width of its rising edge is the beam spot diameter, of electron beam;
(6) determine starting point and the end points of the rising edge of integrated curve because we are bad, a numerical differentiation is done to matrix A and draws two-dimensional curve, the differential curve of electron beam can be obtained;
(7) pulse width in electron beam differential curve is the beam spot diameter, of electron beam;
(8) by the traction problems that there is electron beam during scanning electronic microscope observation sample, we need to draft a confidence interval, in this example using y=0.1 as " zero point ";
Fig. 5 and Fig. 6 sets forth the bundle spot integrated curve arrived and the bundle spot differential curve of actual computation electron beam, reading beam bundle spot size can be about 20um easily from Fig. 6.
The method of this measurement scanning electron microscope electron bundle beam spot size is simple and be easy to realize, its key point is the imaging of the sample edge of a knife, here the tuning of scanning electron microscope condenser and object lens to be paid close attention to, because the bundle spot size finally recorded is determined by the value of condenser and object lens; Its difficult point is to obtain after sample pictures the process of sample gray value data and analysis by scanning electron microscope.
The advantage that method is put in this measurement is, one, effectively reduces and adopts direct method to measure the measuring error brought; Its two, avoid making complicated measuring equipment; Its three, make full use of the imaging characteristics of scanning electron microscope, measure convenient and swift, favorable repeatability, be particularly suitable for a large amount of measurements and repeatability calculates, to measure accurately and efficiency is higher.
More than show and describe ultimate principle of the present invention, principal character and advantage of the present invention.The technician of the industry should understand; the present invention is not restricted to the described embodiments; what describe in above-described embodiment and instructions just illustrates principle of the present invention; without departing from the spirit and scope of the present invention; the present invention also has various changes and modifications, and these changes and improvements all fall in the claimed scope of the invention.Application claims protection domain is defined by appending claims and equivalent thereof.
Claims (3)
1. measure a method for scanning electron microscope beam spot size, the method comprises:
Step 1: a rectangle sheet metal width being less than Faraday cup diameter is arranged at the rim of a cup of Faraday cup, both guarantees have good electrical contact, Faraday cup is positioned over the sample chamber of scanning electron microscope, ensure simultaneously rectangle sheet metal while vertical with electron microscope scanning direction, open scanning electron microscope, obtain the electron micrograph image of a rectangle sheet metal clearly;
Step 2: choose the edge that rectangle sheet metal is vertical with electron microscope scanning direction, intercept this marginal portion image, comprise in cut-away view picture this edge along electron microscope scanning direction whole grey scale change process;
Step 3: usage data process software reads the rgb value intercepting picture, obtains R, G, B tri-two dimensional gray value matrixs respectively;
Step 4: by average for three Matrix Calculatings obtained in step 3, obtain a mean matrix, then each the row summation to this mean matrix, finally obtain an one dimension gray-scale value matrix;
Step 5: become two-dimensional curve according to each element numeric renderings of one dimension matrix that step 4 obtains, height of curve represents numerical values recited, and defining this curve is electron beam integrated curve, and the rising edge width of this integrated curve is the beam spot diameter, of electron beam.
2. a kind of method measuring scanning electron microscope beam spot size as claimed in claim 1, it is characterized in that in described step 1, rectangle sheet metal is trapezoidal in the cross section in scanning of scanning electron microscope direction, this trapezoidal upper bottom surface and Faraday cup are fitted tightly during placement, both guarantees have good point cantact.
3. a kind of method measuring scanning electron microscope beam spot size as claimed in claim 1, it is characterized in that the electron beam integrated curve to step 5 obtains carries out differential, obtain electron beam differential curve, the distance of two intersection points of electron beam differential curve and straight line y=0.1 is decided to be the beam spot diameter, of electron beam.
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| CN201410474731.XA CN104266572B (en) | 2014-09-16 | 2014-09-16 | A kind of method for measuring SEM beam spot size |
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| CN201410474731.XA CN104266572B (en) | 2014-09-16 | 2014-09-16 | A kind of method for measuring SEM beam spot size |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112325810A (en) * | 2020-10-26 | 2021-02-05 | 无锡华鑫检测技术有限公司 | Method for measuring depth of electron beam spot of scanning electron microscope |
| CN118111306A (en) * | 2024-03-13 | 2024-05-31 | 苏州束源仪器有限公司 | Method, device, equipment and storage medium for detecting size of electron beam current |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN112325810A (en) * | 2020-10-26 | 2021-02-05 | 无锡华鑫检测技术有限公司 | Method for measuring depth of electron beam spot of scanning electron microscope |
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| CN118111306A (en) * | 2024-03-13 | 2024-05-31 | 苏州束源仪器有限公司 | Method, device, equipment and storage medium for detecting size of electron beam current |
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