CN104259129A - Acid-base soaking machine for silicon material treatment - Google Patents
Acid-base soaking machine for silicon material treatment Download PDFInfo
- Publication number
- CN104259129A CN104259129A CN201410361529.6A CN201410361529A CN104259129A CN 104259129 A CN104259129 A CN 104259129A CN 201410361529 A CN201410361529 A CN 201410361529A CN 104259129 A CN104259129 A CN 104259129A
- Authority
- CN
- China
- Prior art keywords
- air suction
- suction device
- groove
- silicon material
- operating desk
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
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Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B3/00—Cleaning by methods involving the use or presence of liquid or steam
- B08B3/04—Cleaning involving contact with liquid
- B08B3/08—Cleaning involving contact with liquid the liquid having chemical or dissolving effect
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B15/00—Preventing escape of dirt or fumes from the area where they are produced; Collecting or removing dirt or fumes from that area
Abstract
The invention relates to an acid-base soaking machine for silicon material treatment. The acid-base soaking machine for silicon material treatment comprises an operation table; a housing is arranged on the operation table and comprises a top plate, a back plate and two side plates; one side plate, the back plate and the other side plate are vertically arranged on three sides of the operation table sequentially; the top plate is horizontally fixed to the top end of the back plate and the top ends of the side plates; the operation table is grooved inwards to form a first groove and a second groove; a plurality of first air suction devices are evenly arranged on the back plate; a first waste gas collection cover is arranged at the gas outlet ends of the first air suction devices; a second suction device is arranged on the top plate and is arranged over the first groove; a second waste gas collection cover is arranged at the gas outlet end of the second air suction device; an indicator light and a PLC controller are arranged on the outer side edge of the top plate; the indicator light, the first air suction devices and the second air suction device are connected with the PLC controller. According to the invention, the silicon material soaking procedure is simplified, and the hazard to an operator is reduced.
Description
Technical field
The present invention relates to and belong to solar-photovoltaic technology field, be specifically related to a kind of soda acid immersion machine for the process of silicon material.
Background technology
In silicon chip working process, need to carry out acid or alkali immersion treatment, in traditional immersion process to silicon material, silicon material soda acid soaks needs separately process, cause treatment facility cost high, and floor space is larger, meanwhile, the waste gas produced in the process of soaking can work the mischief to the health of operating personnel.
Summary of the invention
Technical problem to be solved by this invention is to provide a kind of soda acid immersion machine for the process of silicon material, simplifies silicon material and soaks program, reduce costs, reduce and endanger operating personnel.
For solving the problems of the technologies described above, technical scheme of the present invention is:
A kind of soda acid immersion machine for the process of silicon material, comprise operating desk, described operating desk is provided with case, described case comprises a top board, a backboard and two side plates, vertically successively on three limits of described operating desk be provided with a side plate, a backboard and a side plate, the top being fixed on described backboard and side plate of described top board level, the described operating desk groove that concaves forms the first groove and the second groove, described backboard is evenly provided with several first air suction devices, the suction end of described first air suction device is positioned at the first cavity that described case and operating desk are formed, the outlet side of described first air suction device is provided with the first gas sampling cover, described top board is provided with second air suction device, described second air suction device is positioned at directly over described first groove, be provided with the second cavity in described backboard and form the second gas sampling cover, the suction end of described second air suction device is positioned at the cavity that described case and operating desk are formed, the outlet side of described second air suction device is connected with the second gas sampling cover, described first gas sampling cover is connected by pipeline with the second gas sampling cover, the outer side edges of described top board is provided with indicator lamp and PLC, described indicator lamp, first air suction device, push up two air suction devices to be connected with PLC.
Above-mentioned a kind of soda acid immersion machine for the process of silicon material, wherein, the height of described operating desk is 80-100cm.
Above-mentioned a kind of soda acid immersion machine for the process of silicon material, wherein, the length of operating desk described in the length > of described top board.
When the present invention uses, pickle or alkali wash water is added in the first groove, open PLC, control the first air suction device, second air suction device carries out air draught, the gas that acid solution in first groove or alkali lye volatilize can be sucked in the first gas sampling cover and the second gas sampling cover, just process in time when waste gas just produces, forming convection current with air avoids waste gas to leak, pure water is added in the second groove, be positioned in special immersion basket by needing the silicon material carrying out pickling or alkali cleaning, immersion basket is immersed in the first groove, the pickling reaching in advance setting or after time needed for alkali cleaning, PLC controls indicator lamp and opens, now, immersion basket can take out by operating personnel in the first groove, in the pure water being submerged to the second groove, enormously simplify silicon material and soak program, thus reduce costs further, reduce and operating personnel are endangered, indicator lamp alert is soaked complete, immersion basket is put into the second groove by operating personnel, dilute acid washing lotion or alkali wash water, greatly reduce the injury to operating personnel in the transportation of going to next procedure, safe and reliable.
Accompanying drawing explanation
Fig. 1 is front view of the present invention
Fig. 2 is side view of the present invention
Fig. 3 is rearview of the present invention
Detailed description of the invention
A kind of soda acid immersion machine for the process of silicon material as shown in the figure, comprise operating desk 1, the height H of described operating desk 1 is 80-100cm, described operating desk 1 is provided with case 2, described case 2 comprises a top board 3, a backboard 4 and two side plates 5, vertically successively on three limits of described operating desk 1 be provided with a side plate 5, a backboard 4 and a side plate 5, the top being fixed on described backboard 4 and side plate 5 of described top board 3 level, the length of operating desk 1 described in the length > of described top board 3, described operating desk 1 groove that concaves forms the first groove 6 and the second groove 7, described backboard 4 is evenly provided with several first air suction devices 8, the suction end 81 of described first air suction device 8 is positioned at the cavity 9 that described case 2 is formed with operating desk 1, the outlet side 82 of described first air suction device 8 is provided with the first gas sampling cover 10, described top board 3 is provided with second air suction device 11, described second air suction device 11 is positioned at directly over described first groove 6, the second cavity is provided with as the second gas sampling cover 12 in described backboard 4, the suction end 111 of described second air suction device is positioned at the cavity 9 that described case and operating desk are formed, the outlet side 112 of described second air suction device is connected with the second gas sampling cover 12, described first gas sampling cover 10 is connected by pipeline 15 with the second gas sampling cover 12, described first gas sampling cover is provided with gas outlet 16, gas outlet is connected with outlet pipe, the waste gas produced in pickling/alkaline cleaning procedure is sent to waste gas by outlet pipe, wastewater treatment center processes, the outer side edges of described top board 3 is provided with an indicator lamp 13 and is connected 14 with a PLC, described indicator lamp 13, first air suction device 8, second air suction device 11 is connected 14 with PLC.
When the present invention uses, pickle HF is added in the first groove, PLC controls the first air suction device, second air suction device carries out air draught, the gas that the pickle HF in the first groove can be volatilized sucks in the first gas sampling cover and the second gas sampling cover, just process in time when waste gas just produces, forming convection current with air avoids waste gas to leak, pure water is added in the second groove, be positioned in special immersion basket by needing the silicon material carrying out pickling or alkali cleaning, open PLC, immersion basket is immersed in the first groove, the pickling reaching in advance setting or after time needed for alkali cleaning, PLC controls indicator lamp and opens, now, immersion basket can take out by operating personnel in the first groove, in the pure water being submerged to the second groove, enormously simplify silicon material and soak program, not only reduce exhaust-gas treatment cost, what also reduce acid/alkali undermines the loss of silicon material, thus reduce costs further, reduce and operating personnel are endangered, indicator lamp alert is soaked complete, immersion basket is put into the second groove by operating personnel, dilute acid washing lotion or alkali wash water, greatly reduce the injury to operating personnel in the transportation of going to next procedure, safe and reliable.
Here description of the invention and application is illustrative, not wants by scope restriction of the present invention in the above-described embodiments, and therefore, the present invention is not by the restriction of the present embodiment, and the technical scheme that any employing equivalence replacement obtains is all in the scope of protection of the invention.
Claims (3)
1. the soda acid immersion machine for the process of silicon material, it is characterized by, comprise operating desk, described operating desk is provided with case, described case comprises a top board, a backboard and two side plates, vertically successively on three limits of described operating desk be provided with a side plate, a backboard and a side plate, the top being fixed on described backboard and side plate of described top board level, the described operating desk groove that concaves forms the first groove and the second groove, described backboard is evenly provided with several first air suction devices, the suction end of described first air suction device is positioned at the first cavity that described case and operating desk are formed, the outlet side of described first air suction device is provided with the first gas sampling cover, described top board is provided with second air suction device, described second air suction device is positioned at directly over described first groove, be provided with the second cavity in described backboard and form the second gas sampling cover, the suction end of described second air suction device is positioned at the cavity that described case and operating desk are formed, the outlet side of described second air suction device is connected with the second gas sampling cover, described first gas sampling cover is connected by pipeline with the second gas sampling cover, the outer side edges of described top board is provided with indicator lamp and PLC, described indicator lamp, first air suction device, push up two air suction devices to be connected with PLC.
2. a kind of soda acid immersion machine for the process of silicon material as claimed in claim 1, it is characterized by, the height of described operating desk is 80-100cm.
3. a kind of soda acid immersion machine for the process of silicon material as claimed in claim 1, is characterized by, the length of operating desk described in the length > of described top board.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410361529.6A CN104259129A (en) | 2014-07-25 | 2014-07-25 | Acid-base soaking machine for silicon material treatment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410361529.6A CN104259129A (en) | 2014-07-25 | 2014-07-25 | Acid-base soaking machine for silicon material treatment |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN104259129A true CN104259129A (en) | 2015-01-07 |
Family
ID=52150776
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201410361529.6A Pending CN104259129A (en) | 2014-07-25 | 2014-07-25 | Acid-base soaking machine for silicon material treatment |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN104259129A (en) |
Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH04371357A (en) * | 1991-06-18 | 1992-12-24 | Ube Ind Ltd | Device for recovering mist in die casting machine |
| US5313966A (en) * | 1990-07-31 | 1994-05-24 | Mitsubishi Denki Kabushiki Kaisha | Immersion cleaning device |
| US20050252537A1 (en) * | 2004-05-17 | 2005-11-17 | Hyun-Yul Park | System for cleaning substrate |
| CN201394556Y (en) * | 2009-05-07 | 2010-02-03 | 锦州华昌光伏科技有限公司 | Graphite carrying plate cleaning device |
| CN102259102A (en) * | 2011-08-10 | 2011-11-30 | 浙江硅宏电子科技有限公司 | Silicon material washer |
| CN202162167U (en) * | 2010-12-25 | 2012-03-14 | 江西旭阳雷迪高科技股份有限公司 | Acid soaking device for silicon material |
| CN203030566U (en) * | 2012-12-24 | 2013-07-03 | 英利能源（中国）有限公司 | Cleaning machine for recycled silicon wafers |
-
2014
- 2014-07-25 CN CN201410361529.6A patent/CN104259129A/en active Pending
Patent Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5313966A (en) * | 1990-07-31 | 1994-05-24 | Mitsubishi Denki Kabushiki Kaisha | Immersion cleaning device |
| JPH04371357A (en) * | 1991-06-18 | 1992-12-24 | Ube Ind Ltd | Device for recovering mist in die casting machine |
| US20050252537A1 (en) * | 2004-05-17 | 2005-11-17 | Hyun-Yul Park | System for cleaning substrate |
| CN201394556Y (en) * | 2009-05-07 | 2010-02-03 | 锦州华昌光伏科技有限公司 | Graphite carrying plate cleaning device |
| CN202162167U (en) * | 2010-12-25 | 2012-03-14 | 江西旭阳雷迪高科技股份有限公司 | Acid soaking device for silicon material |
| CN102259102A (en) * | 2011-08-10 | 2011-11-30 | 浙江硅宏电子科技有限公司 | Silicon material washer |
| CN203030566U (en) * | 2012-12-24 | 2013-07-03 | 英利能源（中国）有限公司 | Cleaning machine for recycled silicon wafers |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| RJ01 | Rejection of invention patent application after publication | ||
| RJ01 | Rejection of invention patent application after publication |
Application publication date: 20150107 |