CN104253064A - Fixing device for heater of semiconductor smelting furnace - Google Patents
Fixing device for heater of semiconductor smelting furnace Download PDFInfo
- Publication number
- CN104253064A CN104253064A CN201310266340.4A CN201310266340A CN104253064A CN 104253064 A CN104253064 A CN 104253064A CN 201310266340 A CN201310266340 A CN 201310266340A CN 104253064 A CN104253064 A CN 104253064A
- Authority
- CN
- China
- Prior art keywords
- smelting furnace
- fixing device
- semiconductor
- fixture
- supporter
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
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Classifications
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
- H05B1/00—Details of electric heating devices
Abstract
The invention discloses a fixing device for a heater of a semiconductor smelting furnace. The fixing device is arranged in the smelting furnace, and a plurality of heating circuits are circularly and axially mounted at intervals along the inner wall of the smelting furnace. The fixing device comprises at least 16 supporting rods fixedly arranged on the heating circuits respectively, each supporting rod comprises a plurality of first supports in sequential connection and a plurality of second supports in sequential connection, and each first support is spliced onto the corresponding second support. The fixing device has the advantages that the heating circuits are fixed by the independent supports, and bearing strength of the supporting rods is improved; further, due to increase of the supporting rods, failure rate of distortion and collision of the heating circuits is decreased.
Description
Technical field
The present invention relates to semiconductor heating art, particularly a kind of semiconductor crucible heaters fixture.
Background technology
As shown in Figure 1 and Figure 2, in prior art, semiconductor crucible heaters adopts 12 support bars 3 ' around being arranged on smelting furnace 1 ' inwall, each support bar 3 ' adopts several supporters 31 ' to be connected and forms, this kind of structural support rod easily ruptures, thus cause heating line 2 ' distortion to cause short circuit, make crucible heaters have very high spoilage.
Summary of the invention
The object of this invention is to provide a kind of semiconductor crucible heaters fixture, this fixture adopt two pieces independently supporter fix heating line, strengthen the bearing strength of support bar, increase support bar quantity simultaneously, reduce the failure rate of heating line distortion and touching.
In order to realize above object, the present invention is achieved by the following technical solutions:
A kind of semiconductor crucible heaters fixture, it is arranged on inside furnace, and described interior melter walls vertically interval is provided with some circle heating lines, and be characterized in, this device comprises: some support bars, and it is fixedly installed on described heating line respectively;
Described support bar comprises some the first connected successively supporters and some the second supporters be connected successively, and each the first described supporter is corresponding respectively to be spliced on the second supporter.
Described support bar quantity is at least 16.
The present invention compared with prior art, has the following advantages:
The present invention adopt two pieces independently supporter fix heating line, strengthen the bearing strength of support bar, increase support bar quantity simultaneously, reduce the failure rate of heating line distortion and touching.
Accompanying drawing explanation
Fig. 1 is crucible heaters fixture front view in prior art;
Fig. 2 is crucible heaters fixture vertical view in prior art;
Fig. 3 is the front view of a kind of semiconductor crucible heaters of the present invention fixture;
Fig. 4 is the vertical view of a kind of semiconductor crucible heaters of the present invention fixture;
Fig. 5 is the structure chart of the first supporter of a kind of semiconductor crucible heaters of the present invention fixture;
Fig. 6 is the structure chart of the second supporter of a kind of semiconductor crucible heaters of the present invention fixture.
Embodiment
Below in conjunction with accompanying drawing, by describing a preferably specific embodiment in detail, the present invention is further elaborated.
As shown in Fig. 3, Fig. 4, Fig. 5 and Fig. 6, a kind of semiconductor crucible heaters fixture, it is inner that it is arranged on smelting furnace 1, and described smelting furnace 1 inwall vertically interval is provided with some circle heating lines 2, this device comprises: some support bars 3, and it is fixedly installed on described heating line 2 respectively; Described support bar 3 comprises some the first connected successively supporters 31 and some the second supporters 32 be connected successively, and each the first described supporter 31 is corresponding respectively to be spliced on the second supporter 32.Support bar 3 quantity is at least 16 (in the present embodiment, support bar quantity is 16).
The present invention adopts the first supporter 31 and the second supporter 32 to fix heating line 2, first supporter 31 can be stitched together with the second supporter 32 simultaneously, such structure adds the bearing strength of support bar, reduce the failure rate that support bar damages, effectively prevent heating line 2 distortion and touching.Application actual effect shows, original heater life is approximately 20 months, and the heater life after this improvement can reach 30 months, improves economic benefit.
In sum, a kind of semiconductor crucible heaters of the present invention fixture, this fixture adopt two pieces independently supporter fix heating line, strengthen the bearing strength of support bar, increase support bar quantity simultaneously, reduce the failure rate of heating line distortion and touching.
Although content of the present invention has done detailed introduction by above preferred embodiment, will be appreciated that above-mentioned description should not be considered to limitation of the present invention.After those skilled in the art have read foregoing, for multiple amendment of the present invention and substitute will be all apparent.Therefore, protection scope of the present invention should be limited to the appended claims.
Claims (2)
1. a semiconductor crucible heaters fixture, it is inner that it is arranged on smelting furnace (1), described smelting furnace (1) inwall vertically interval is provided with some circle heating lines (2), it is characterized in that, this device comprises: some support bars (3), and it is fixedly installed on described heating line (2) respectively;
Described support bar (3) comprises some the first supporters (31) connected successively and some the second supporters (32) be connected successively, and each described the first supporter (31) is corresponding respectively to be spliced on the second supporter (32).
2. semiconductor crucible heaters fixture as claimed in claim 1, it is characterized in that, described support bar (3) quantity is at least 16.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201310266340.4A CN104253064A (en) | 2013-06-28 | 2013-06-28 | Fixing device for heater of semiconductor smelting furnace |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201310266340.4A CN104253064A (en) | 2013-06-28 | 2013-06-28 | Fixing device for heater of semiconductor smelting furnace |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN104253064A true CN104253064A (en) | 2014-12-31 |
Family
ID=52187851
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201310266340.4A Pending CN104253064A (en) | 2013-06-28 | 2013-06-28 | Fixing device for heater of semiconductor smelting furnace |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN104253064A (en) |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101315878A (en) * | 2007-06-01 | 2008-12-03 | 东京毅力科创株式会社 | Heat processing furnace and method of manufacturing the same |
| US20090035948A1 (en) * | 2005-08-24 | 2009-02-05 | Hitachi Kokusai Electric Inc. | Substrate processing apparatus, heating apparatus for use in the same, method of manufacturing semiconductors with those apparatuses, and heating element supporting structure |
| US20110281226A1 (en) * | 2010-05-11 | 2011-11-17 | Hitachi Kokusai Electric Inc. | Heater supporting device |
| CN102300345A (en) * | 2010-06-25 | 2011-12-28 | 山特维克热传动公司 | Support structure for heating element coil |
-
2013
- 2013-06-28 CN CN201310266340.4A patent/CN104253064A/en active Pending
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20090035948A1 (en) * | 2005-08-24 | 2009-02-05 | Hitachi Kokusai Electric Inc. | Substrate processing apparatus, heating apparatus for use in the same, method of manufacturing semiconductors with those apparatuses, and heating element supporting structure |
| CN101315878A (en) * | 2007-06-01 | 2008-12-03 | 东京毅力科创株式会社 | Heat processing furnace and method of manufacturing the same |
| US20110281226A1 (en) * | 2010-05-11 | 2011-11-17 | Hitachi Kokusai Electric Inc. | Heater supporting device |
| CN102300345A (en) * | 2010-06-25 | 2011-12-28 | 山特维克热传动公司 | Support structure for heating element coil |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| RJ01 | Rejection of invention patent application after publication |
Application publication date: 20141231 |
|
| RJ01 | Rejection of invention patent application after publication |