CN104244620A - 一种大型半导体设备集约型装配柜体 - Google Patents

一种大型半导体设备集约型装配柜体 Download PDF

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CN104244620A
CN104244620A CN201310245139.8A CN201310245139A CN104244620A CN 104244620 A CN104244620 A CN 104244620A CN 201310245139 A CN201310245139 A CN 201310245139A CN 104244620 A CN104244620 A CN 104244620A
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CN104244620B (zh
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鞠建刚
潘菊凤
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Shanghai Micro Electronics Equipment Co Ltd
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Abstract

本发明涉及一种大型半导体设备集约型装配柜体,包括机柜框架、包覆于所述机柜框架外围的外壳以及设于所述机柜框架内部的内部框架,所述内部框架将机柜框架分为位于上侧的第一散热通道、以及位于下侧并呈左右分布的供电部分和控制机箱,所述供电部分与控制机箱通过线缆连接,所述供电部分采用堆叠式放置且所述供电部分与控制机箱之间预留有维修空间,所述控制机箱采用自旋转式。本发明通过机构布局和预留的维修空间对所述供电部分的正反两面进行维护,利用自旋转式的控制机箱的旋转功能对所述控制机箱的正反两面分别进行维护,利用第一散热通道抽排供电部分及控制机箱的热量,同时,将散热、维护、安置线缆的空间单元合并,从而实现集约型装配。

Description

一种大型半导体设备集约型装配柜体
技术领域
本发明涉及半导体设备领域,尤其涉及一种大型半导体设备集约型装配柜体。
背景技术
目前半导体行业的设备多依托复杂的、大型的控制系统来运行,导致设备需要提供大量的空间给控制机箱、供电机箱、互连线缆以及维护区域等,在一定程度上增大了整机设备的尺寸。
现有的设备中有些设计已经考虑到以上问题,设备中单独设计的电气柜将分系统机箱安装于一个集中区域内,电气柜置于整机设备容易推拉出来的地方,解决了一定的安装空间浪费的问题,但由于推拉的范围需要提供的空间需要的大小基本要求维护人员能进出,所以这种形式的柜体又增加了设备外围空间的需求;而另外一种方式,通过托架模块解决推拉的空间浪费,但远远不能满足大型半导体设备中机箱前后面均维护的使用要求,且半导体设备中供电系统、供电模块设备等还是不可避免的需要同等的需求空间,不同的区域提供相同的安装维护空间,此时的互连线缆因几个不同的区域划分而给布局造成一定的制约,这种现象在大型的半导体设备中已经非常明显了。
发明内容
本发明提供一种大型半导体设备集约型装配柜体,以解决由于大型控制系统所涉及的供电设备繁琐、控制机箱多、互连线缆多、维护操作面多而导致的功能区域分离的现象。
为解决上述技术问题,本发明提供一种大型半导体设备集约型装配柜体,包括机柜框架、包覆于所述机柜框架外围的外壳以及设于所述机柜框架内部的内部框架,所述内部框架将所述机柜框架分为位于上侧的第一散热通道、以及位于下侧并呈左右分布的供电部分和控制机箱,所述供电部分与所述控制机箱通过线缆连接,所述供电部分采用堆叠式放置且所述供电部分与所述控制机箱之间预留有维修空间,所述控制机箱采用自旋转式。
较佳地,所述外壳中一组相邻的两个侧面采用可拆卸式的维护门,另外一组相邻的两个侧面与整机贴合。
较佳地,所述供电部分包括主供电柜、不间断电源以及若干分系统供电模块,所述若干分系统供电模块、主供电柜以及不间断电源依次纵向排列。
较佳地,所述控制机箱、主供电柜、不间断电源以及若干分系统供电模块均为正面操作背面插拔模式,所述控制机箱的背面与所述主供电柜、不间断电源以及若干分系统供电模块的背面分别通过所述线缆连接。
较佳地,所述若干分系统供电模块、主供电柜以及不间断电源的正面与所述维护门相对,背面与所述维修空间相对。
较佳地,所述内部框架上固定一竖直方向的旋转轴,所述控制机箱绕所述旋转轴旋转。
较佳地,所述外壳底部与所述控制机箱旋转0°和90°的位置上分别设有挡块。
较佳地,所述控制机箱在0°~90°之间旋转时,所述大型半导体设备集约型装配柜体的质心始终位于所述大型半导体设备集约型装配柜体内部,且质心高度小于总高度的一半。
较佳地,所述控制机箱的正面与维护门相对,所述控制机箱的背面与同侧的外壳之间设有第二散热通道。
较佳地,所述第一散热通道和第二散热通道分别通过风机散热。
较佳地,所述机柜框架和所述内部框架分别采用铝型材搭建。
与现有技术相比,本发明具有以下优点:
1.本发明通过将系统模块所需空间合并共用的布局优化及结构设计,使所涉及的模块实现集约装配,减少设备的空间约束,从而满足了大型半导体设备的复杂控制系统各有所需的空间要求;
2.与传统独立的拖拉式柜体相比,本发明最大程度的不占用外围空间,将所需维护区域设置于柜体内部,并能提供相对较多的空间需求;
3.与传统单一的控制机柜相比,本发明集成了不同系统模块的功能需求,还将装配空间、维护区域、互连线缆互不影响的布置于共用区域内,实现“一加一大于二”的空间需求。
附图说明
图1为本发明一具体实施方式的大型半导体设备集约型装配柜体的立体结构示意图;
图2为本发明一具体实施方式的大型半导体设备集约型装配柜体的外形结构示意图;
图3为本发明一具体实施方式的大型半导体设备集约型装配柜体的俯视示意图(控制机箱闭合状态);
图4为本发明一具体实施方式的大型半导体设备集约型装配柜体的俯视示意图(控制机箱旋开状态);
图5为本发明一具体实施方式的大型半导体设备集约型装配柜体中控制机箱旋开过程中线缆状态示意图;
图6为本发明一具体实施方式的大型半导体设备集约型装配柜体中分系统机箱的结构示意图。
图中:100-机柜框架、200-外壳、210-维护门、300-内部框架、400-第一散热通道、410-风机、500-供电部分、510-维修空间、520-主供电柜、530-不间断电源、540-分系统供电模块、550-线缆、551-线缆节点、600-控制机箱、610-挡块、620-旋转轴、630-第二散热通道、640-分系统机箱、641-接插件维护区、642-板卡维护区、643-可拆卸面板、700-整机。
具体实施方式
为使本发明的上述目的、特征和优点能够更加明显易懂,下面结合附图对本发明的具体实施方式做详细的说明。需说明的是,本发明附图均采用简化的形式且均使用非精准的比例,仅用以方便、明晰地辅助说明本发明实施例的目的。
本发明提供的大型半导体设备集约型装配柜体,如图1至图5所示,包括机柜框架100、包覆于所述机柜框架100外围的外壳200以及设于所述机柜框架100内部的内部框架300,所述内部框架300将所述机柜框架100分为位于上侧的第一散热通道400、以及位于下侧并呈左右分布的供电部分500和控制机箱600,所述供电部分500与所述控制机箱600通过线缆550连接,所述供电部分500采用堆叠式放置且所述供电部分500与所述控制机箱600之间预留有维修空间510,所述控制机箱600采用自旋转式,具体地,本实施例中,大型半导体设备集约型装配柜体的长为825mm,宽为1980mm,高为2500mm,所述控制机箱600部分可以安装42U的双排控制机箱;所述供电部分500可以安装大于35U的安装空间,当然,可以根据需求对高度区域进行调节。本发明通过机构布局和预留的维修空间510对所述供电部分500的正反两面进行维护,利用自旋转式的控制机箱600的旋转功能对所述控制机箱600的正反两面分别进行维护,利用第一散热通道400抽排供电部分500及控制机箱600的热量,同时,将散热、维护、安置线缆550的空间单元合并,安装、调试、维护各不干扰,从而实现集约型装配。本发明考虑各控制单元所需区域的相互制约性,合理的把空间合并、建立互不干扰区作为解决这种大型设备体积扩张的主要解决方案,类似“合并同类项”的方式把空间压缩在一个区域,具体地,把供电系统500、控制机箱600、线缆550、第一散热通道400进行统一的区域共同分配,通过设计唯一的安装位置提供唯一的维护空间,从而减少整机700的空间压力。
较佳地,请参考图2,并结合图3和图4,所述外壳200中一组相邻的两个侧面采用可拆卸式的维护门210,另外一组相邻的两个侧面与整机700贴合。也就是说,本发明的大型半导体设备集约型装配柜体的六个面中,除上下两面以外,两相邻的侧面镶嵌至所述整机700中,另外两个相邻的侧面裸露在外,作为安装、调试、维护的空间。
较佳地,请重点参考图1,所述供电部分500包括主供电柜520、不间断电源530以及若干分系统供电模块540,所述若干分系统供电模块540、主供电柜520以及不间断电源530依次纵向排列,所述分系统供电模块540为分系统提供功率及电压的额外要求,具体地,所述控制机箱600、主供电柜520、不间断电源530以及若干分系统供电模块540均为正面操作背面插拔模式,本实施例中,正面为日常观测及维护面,背面为装配及维护面,所述控制机箱600的背面与所述主供电柜520、不间断电源530以及若干分系统供电模块540的背面分别通过所述线缆550连接。较佳地,所述若干分系统供电模块540、主供电柜520以及不间断电源530的正面与所述维护门210相对,背面与所述维修空间510相对,本实施例中,所述维修空间510的宽度,即图3中L1的长度为300mm,可对所述供电部分500的背面全尺寸进行维护;另外,所述线缆550置于所述维修空间510内,布置压力不大,满足人眼观测视角即可,在本实施例中,请重点参考图3和图4,在所述供电部分500和控制机箱600中间的内部框架300以及所述控制机箱600背面的外壳200上分别设有线缆节点551,用于整理、固定线缆550。
较佳地,请重点参考图3和图4,并结合图1,所述内部框架300上固定一竖直方向的旋转轴620,也就是说,所述旋转轴620底部的连接点与顶部的连接点处于一个垂向平面内的一条垂线上,所述控制机箱600绕所述旋转轴620旋转,所述外壳200底部与所述控制机箱600旋转0°和90°的位置上分别设有挡块610,换句话说,所述控制机箱600绕所述旋转轴620旋转,当所述控制机箱600在初始状态,即旋转0°时,以及完全旋开状态,即旋转90°时,分别与所述挡块610相接触,以限制所述控制机箱600进一步旋转,避免与所述线缆550以及其他部件之间的碰撞及干扰,当然,线缆550的自由余量保证所述控制机箱600在旋转过程中,线缆550始终不干扰旋转或破坏接插件的装配可靠性。
本实施例中,所述控制机箱600包括14个分系统机箱640,由于所述分系统机箱640背面的空间是贴合于整机700的,不能进行直接的维护,所以不能类似供电部分500那样,简单的堆叠留出操作空间就能进行装配及维护,且维护时需要插拔调试而要求维护空间能足够满足操作人员能进出方便。如图6所示为一种分系统机箱640的结构形式,包括接插件维护区641、板卡维护区642以及可拆卸面板643,所述接插件维护区641的深度空间需求约100mm;所述板卡维护区642中板卡完全拔出需要200mm左右深度的空间;所述可拆卸面板643的深度空间需求约100mm,故闭合状态时只需提供线缆550的放置区域(宽度约为200mm),旋出后留出维护人员进出空间、线缆550放置的共用区域,宽度为L2(SEMI标准为610mm),实现了两个状态互换过程中最大程度的利用内部空间达到空间共用的效果。
另外,请重点参考图1,假设14个分系统机箱640分别为两排,且为质量相同、均匀排布的形式,通过对负重设计,将所述控制机箱600旋出和闭合状态对进行质心变化模拟,计算出所述控制机箱600以旋转轴620为轴在0°~90°之间旋转时,所述大型半导体设备集约型装配柜体的质心始终位于所述大型半导体设备集约型装配柜体内部,且质心高度小于总高度的一半,优选的,所述质心高度小于1200mm,保证旋转过程中整个柜体的可靠性、安全性。
较佳地,如图3和图4所示,所述控制机箱600的正面与维护门210相对,所述控制机箱600的背面与同侧的外壳200之间设有第二散热通道630,较佳地,所述第一散热通道400和第二散热通道630分别通过风机410散热,具体地,热风由所述风机410统一抽排入所述第一散热通道400和第二散热通道630内,由外部环境集中收集。
较佳地,所述机柜框架100和所述内部框架300分别采用铝型材搭建,可根据设备模块的尺寸变化进行缩放;较佳地,所述供电部分500与控制机箱600通过金属板(图中未示出)隔离,互不干扰。
需要说明的是,本发明的大型半导体设备集约型装配柜体在实际操作时具体表现为以下环节:
1.装配调试时:所述供电部分500堆叠放置后,操作人员在设备外围进行调试,在所述维修空间510内进行接插件的安装及线缆550的布置;控制机箱600装配后,转出至图4所示的状态进行机箱接插件安装及线缆550的布置,装配完毕后转回,可在设备外围进行正面的调试。具体地,如图5所示,在所述控制机箱600旋开和闭合的过程中,所述线缆550在重力和折弯力的作用下做箭头方向的折合、释放运动。
2.维修维护时:打开维护门210,所述供电部分500的正面维护可直接进行维护,在所述维修空间510内进行接插件的排查及更换操作;同理,打开维护门210后,可在直接对控制机箱600的正面进行维护,转出控制机箱600,操作人员可对所有控制机箱600进行接插件的排查及更换操作。
综上所述,本发明提供的大型半导体设备集约型装配柜体,包括机柜框架100、包覆于所述机柜框架100外围的外壳200以及设于所述机柜框架100内部的内部框架300,所述内部框架300将所述机柜框架100分为位于上侧的第一散热通道400、以及位于下侧并呈左右分布的供电部分500和控制机箱600,所述供电部分500与所述控制机箱600通过线缆550连接,所述供电部分500采用堆叠式放置且所述供电部分500与所述控制机箱600之间预留有维修空间510,所述控制机箱600采用自旋转式。本发明通过机构布局和预留的维修空间510对所述供电部分500的正反两面进行维护,利用自旋转式的控制机箱600的旋转功能对所述控制机箱600的正反两面分别进行维护,利用第一散热通道400抽排供电部分500及控制机箱600的热量,同时,将散热、维护、安置线缆550的空间单元合并,安装、调试、维护各不干扰,从而实现集约型装配。
显然,本领域的技术人员可以对发明进行各种改动和变型而不脱离本发明的精神和范围。这样,倘若本发明的这些修改和变型属于本发明权利要求及其等同技术的范围之内,则本发明也意图包括这些改动和变型在内。

Claims (11)

1.一种大型半导体设备集约型装配柜体,其特征在于,包括机柜框架、包覆于所述机柜框架外围的外壳以及设于所述机柜框架内部的内部框架,所述内部框架将所述机柜框架分为位于上侧的第一散热通道、以及位于下侧并呈左右分布的供电部分和控制机箱,所述供电部分与所述控制机箱通过线缆连接,所述供电部分采用堆叠式放置且所述供电部分与所述控制机箱之间预留有维修空间,所述控制机箱采用自旋转式。
2.如权利要求1所述的大型半导体设备集约型装配柜体,其特征在于,所述外壳中一组相邻的两个侧面采用可拆卸式的维护门,另外一组相邻的两个侧面与整机贴合。
3.如权利要求2所述的大型半导体设备集约型装配柜体,其特征在于,所述供电部分包括主供电柜、不间断电源以及若干分系统供电模块,所述若干分系统供电模块、主供电柜以及不间断电源依次纵向排列。
4.如权利要求3所述的大型半导体设备集约型装配柜体,其特征在于,所述控制机箱、主供电柜、不间断电源以及若干分系统供电模块均为正面操作背面插拔模式,所述控制机箱的背面与所述主供电柜、不间断电源以及若干分系统供电模块的背面分别通过所述线缆连接。
5.如权利要求4所述的大型半导体设备集约型装配柜体,其特征在于,所述若干分系统供电模块、主供电柜以及不间断电源的正面与所述维护门相对,背面与所述维修空间相对。
6.如权利要求4所述的大型半导体设备集约型装配柜体,其特征在于,所述内部框架上固定一竖直方向的旋转轴,所述控制机箱绕所述旋转轴旋转。
7.如权利要求6所述的大型半导体设备集约型装配柜体,其特征在于,所述外壳底部与所述控制机箱旋转0°和90°的位置上分别设有挡块。
8.如权利要求7所述的大型半导体设备集约型装配柜体,其特征在于,所述控制机箱在0°~90°之间旋转时,所述大型半导体设备集约型装配柜体的质心始终位于所述大型半导体设备集约型装配柜体内部,且质心高度小于总高度的一半。
9.如权利要求6所述的大型半导体设备集约型装配柜体,其特征在于,所述控制机箱的正面与维护门相对,所述控制机箱的背面与同侧的外壳之间设有第二散热通道。
10.如权利要求9所述的大型半导体设备集约型装配柜体,其特征在于,所述第一散热通道和第二散热通道分别通过风机散热。
11.如权利要求1所述的大型半导体设备集约型装配柜体,其特征在于,所述机柜框架和所述内部框架分别采用铝型材搭建。
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* Cited by examiner, † Cited by third party
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CN110186908A (zh) * 2018-02-23 2019-08-30 Asm Ip控股有限公司 用于在高温环境中检测或监测化学前体的设备
US10847366B2 (en) 2018-11-16 2020-11-24 Asm Ip Holding B.V. Methods for depositing a transition metal chalcogenide film on a substrate by a cyclical deposition process
US10844486B2 (en) 2009-04-06 2020-11-24 Asm Ip Holding B.V. Semiconductor processing reactor and components thereof
US10844484B2 (en) 2017-09-22 2020-11-24 Asm Ip Holding B.V. Apparatus for dispensing a vapor phase reactant to a reaction chamber and related methods
US10851456B2 (en) 2016-04-21 2020-12-01 Asm Ip Holding B.V. Deposition of metal borides
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US10867788B2 (en) 2016-12-28 2020-12-15 Asm Ip Holding B.V. Method of forming a structure on a substrate
US10867786B2 (en) 2018-03-30 2020-12-15 Asm Ip Holding B.V. Substrate processing method
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US10910262B2 (en) 2017-11-16 2021-02-02 Asm Ip Holding B.V. Method of selectively depositing a capping layer structure on a semiconductor device structure
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US10934619B2 (en) 2016-11-15 2021-03-02 Asm Ip Holding B.V. Gas supply unit and substrate processing apparatus including the gas supply unit
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US10943771B2 (en) 2016-10-26 2021-03-09 Asm Ip Holding B.V. Methods for thermally calibrating reaction chambers
US10950432B2 (en) 2017-04-25 2021-03-16 Asm Ip Holding B.V. Method of depositing thin film and method of manufacturing semiconductor device
USD913980S1 (en) 2018-02-01 2021-03-23 Asm Ip Holding B.V. Gas supply plate for semiconductor manufacturing apparatus
US11004977B2 (en) 2017-07-19 2021-05-11 Asm Ip Holding B.V. Method for depositing a group IV semiconductor and related semiconductor device structures
US11001925B2 (en) 2016-12-19 2021-05-11 Asm Ip Holding B.V. Substrate processing apparatus
US11015245B2 (en) 2014-03-19 2021-05-25 Asm Ip Holding B.V. Gas-phase reactor and system having exhaust plenum and components thereof
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US12125700B2 (en) 2020-01-16 2024-10-22 Asm Ip Holding B.V. Method of forming high aspect ratio features

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US10770286B2 (en) 2017-05-08 2020-09-08 Asm Ip Holdings B.V. Methods for selectively forming a silicon nitride film on a substrate and related semiconductor device structures
US12040200B2 (en) 2017-06-20 2024-07-16 Asm Ip Holding B.V. Semiconductor processing apparatus and methods for calibrating a semiconductor processing apparatus
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US12040177B2 (en) 2020-08-18 2024-07-16 Asm Ip Holding B.V. Methods for forming a laminate film by cyclical plasma-enhanced deposition processes
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TW202242184A (zh) 2020-12-22 2022-11-01 荷蘭商Asm Ip私人控股有限公司 前驅物膠囊、前驅物容器、氣相沉積總成、及將固態前驅物裝載至前驅物容器中之方法

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN2271765Y (zh) * 1996-04-05 1997-12-31 牛犇 全装配式电气开关柜
US20050276017A1 (en) * 2004-06-10 2005-12-15 Farid Aziz Common plenum and air intake airflow management for telecom equipment
CN201113785Y (zh) * 2007-09-30 2008-09-10 九江整流器厂 一种骨架通风辅助冷却全密封式整流器
CN201323722Y (zh) * 2009-04-20 2009-10-07 天津瑞能电气有限公司 一种电控柜散热风道的固定结构
CN201995229U (zh) * 2010-12-30 2011-09-28 上海微电子装备有限公司 一种电气控制柜
CN202111953U (zh) * 2011-06-23 2012-01-11 西安市伟创科技有限责任公司 镁铝型材机柜

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN2271765Y (zh) * 1996-04-05 1997-12-31 牛犇 全装配式电气开关柜
US20050276017A1 (en) * 2004-06-10 2005-12-15 Farid Aziz Common plenum and air intake airflow management for telecom equipment
CN201113785Y (zh) * 2007-09-30 2008-09-10 九江整流器厂 一种骨架通风辅助冷却全密封式整流器
CN201323722Y (zh) * 2009-04-20 2009-10-07 天津瑞能电气有限公司 一种电控柜散热风道的固定结构
CN201995229U (zh) * 2010-12-30 2011-09-28 上海微电子装备有限公司 一种电气控制柜
CN202111953U (zh) * 2011-06-23 2012-01-11 西安市伟创科技有限责任公司 镁铝型材机柜

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US10844484B2 (en) 2017-09-22 2020-11-24 Asm Ip Holding B.V. Apparatus for dispensing a vapor phase reactant to a reaction chamber and related methods
US11387120B2 (en) 2017-09-28 2022-07-12 Asm Ip Holding B.V. Chemical dispensing apparatus and methods for dispensing a chemical to a reaction chamber
US12033861B2 (en) 2017-10-05 2024-07-09 Asm Ip Holding B.V. Method for selectively depositing a metallic film on a substrate
US11094546B2 (en) 2017-10-05 2021-08-17 Asm Ip Holding B.V. Method for selectively depositing a metallic film on a substrate
US10923344B2 (en) 2017-10-30 2021-02-16 Asm Ip Holding B.V. Methods for forming a semiconductor structure and related semiconductor structures
US10910262B2 (en) 2017-11-16 2021-02-02 Asm Ip Holding B.V. Method of selectively depositing a capping layer structure on a semiconductor device structure
US11022879B2 (en) 2017-11-24 2021-06-01 Asm Ip Holding B.V. Method of forming an enhanced unexposed photoresist layer
US11127617B2 (en) 2017-11-27 2021-09-21 Asm Ip Holding B.V. Storage device for storing wafer cassettes for use with a batch furnace
US11639811B2 (en) 2017-11-27 2023-05-02 Asm Ip Holding B.V. Apparatus including a clean mini environment
US11682572B2 (en) 2017-11-27 2023-06-20 Asm Ip Holdings B.V. Storage device for storing wafer cassettes for use with a batch furnace
US11501973B2 (en) 2018-01-16 2022-11-15 Asm Ip Holding B.V. Method for depositing a material film on a substrate within a reaction chamber by a cyclical deposition process and related device structures
US12119228B2 (en) 2018-01-19 2024-10-15 Asm Ip Holding B.V. Deposition method
US11972944B2 (en) 2018-01-19 2024-04-30 Asm Ip Holding B.V. Method for depositing a gap-fill layer by plasma-assisted deposition
US11482412B2 (en) 2018-01-19 2022-10-25 Asm Ip Holding B.V. Method for depositing a gap-fill layer by plasma-assisted deposition
US11393690B2 (en) 2018-01-19 2022-07-19 Asm Ip Holding B.V. Deposition method
US11018047B2 (en) 2018-01-25 2021-05-25 Asm Ip Holding B.V. Hybrid lift pin
USD913980S1 (en) 2018-02-01 2021-03-23 Asm Ip Holding B.V. Gas supply plate for semiconductor manufacturing apparatus
US11081345B2 (en) 2018-02-06 2021-08-03 Asm Ip Holding B.V. Method of post-deposition treatment for silicon oxide film
US11735414B2 (en) 2018-02-06 2023-08-22 Asm Ip Holding B.V. Method of post-deposition treatment for silicon oxide film
US11685991B2 (en) 2018-02-14 2023-06-27 Asm Ip Holding B.V. Method for depositing a ruthenium-containing film on a substrate by a cyclical deposition process
US11387106B2 (en) 2018-02-14 2022-07-12 Asm Ip Holding B.V. Method for depositing a ruthenium-containing film on a substrate by a cyclical deposition process
US11482418B2 (en) 2018-02-20 2022-10-25 Asm Ip Holding B.V. Substrate processing method and apparatus
CN110186908A (zh) * 2018-02-23 2019-08-30 Asm Ip控股有限公司 用于在高温环境中检测或监测化学前体的设备
US10975470B2 (en) 2018-02-23 2021-04-13 Asm Ip Holding B.V. Apparatus for detecting or monitoring for a chemical precursor in a high temperature environment
US11939673B2 (en) 2018-02-23 2024-03-26 Asm Ip Holding B.V. Apparatus for detecting or monitoring for a chemical precursor in a high temperature environment
US11473195B2 (en) 2018-03-01 2022-10-18 Asm Ip Holding B.V. Semiconductor processing apparatus and a method for processing a substrate
US11629406B2 (en) 2018-03-09 2023-04-18 Asm Ip Holding B.V. Semiconductor processing apparatus comprising one or more pyrometers for measuring a temperature of a substrate during transfer of the substrate
US11114283B2 (en) 2018-03-16 2021-09-07 Asm Ip Holding B.V. Reactor, system including the reactor, and methods of manufacturing and using same
US12020938B2 (en) 2018-03-27 2024-06-25 Asm Ip Holding B.V. Method of forming an electrode on a substrate and a semiconductor device structure including an electrode
US11398382B2 (en) 2018-03-27 2022-07-26 Asm Ip Holding B.V. Method of forming an electrode on a substrate and a semiconductor device structure including an electrode
US11088002B2 (en) 2018-03-29 2021-08-10 Asm Ip Holding B.V. Substrate rack and a substrate processing system and method
US11230766B2 (en) 2018-03-29 2022-01-25 Asm Ip Holding B.V. Substrate processing apparatus and method
US10867786B2 (en) 2018-03-30 2020-12-15 Asm Ip Holding B.V. Substrate processing method
US11469098B2 (en) 2018-05-08 2022-10-11 Asm Ip Holding B.V. Methods for depositing an oxide film on a substrate by a cyclical deposition process and related device structures
US12025484B2 (en) 2018-05-08 2024-07-02 Asm Ip Holding B.V. Thin film forming method
US11056567B2 (en) 2018-05-11 2021-07-06 Asm Ip Holding B.V. Method of forming a doped metal carbide film on a substrate and related semiconductor device structures
US11361990B2 (en) 2018-05-28 2022-06-14 Asm Ip Holding B.V. Substrate processing method and device manufactured by using the same
US11908733B2 (en) 2018-05-28 2024-02-20 Asm Ip Holding B.V. Substrate processing method and device manufactured by using the same
US11837483B2 (en) 2018-06-04 2023-12-05 Asm Ip Holding B.V. Wafer handling chamber with moisture reduction
US11718913B2 (en) 2018-06-04 2023-08-08 Asm Ip Holding B.V. Gas distribution system and reactor system including same
US11270899B2 (en) 2018-06-04 2022-03-08 Asm Ip Holding B.V. Wafer handling chamber with moisture reduction
US11286562B2 (en) 2018-06-08 2022-03-29 Asm Ip Holding B.V. Gas-phase chemical reactor and method of using same
US11296189B2 (en) 2018-06-21 2022-04-05 Asm Ip Holding B.V. Method for depositing a phosphorus doped silicon arsenide film and related semiconductor device structures
US11530483B2 (en) 2018-06-21 2022-12-20 Asm Ip Holding B.V. Substrate processing system
US11492703B2 (en) 2018-06-27 2022-11-08 Asm Ip Holding B.V. Cyclic deposition methods for forming metal-containing material and films and structures including the metal-containing material
US11499222B2 (en) 2018-06-27 2022-11-15 Asm Ip Holding B.V. Cyclic deposition methods for forming metal-containing material and films and structures including the metal-containing material
US11814715B2 (en) 2018-06-27 2023-11-14 Asm Ip Holding B.V. Cyclic deposition methods for forming metal-containing material and films and structures including the metal-containing material
US11952658B2 (en) 2018-06-27 2024-04-09 Asm Ip Holding B.V. Cyclic deposition methods for forming metal-containing material and films and structures including the metal-containing material
US10914004B2 (en) 2018-06-29 2021-02-09 Asm Ip Holding B.V. Thin-film deposition method and manufacturing method of semiconductor device
US11168395B2 (en) 2018-06-29 2021-11-09 Asm Ip Holding B.V. Temperature-controlled flange and reactor system including same
US11923190B2 (en) 2018-07-03 2024-03-05 Asm Ip Holding B.V. Method for depositing silicon-free carbon-containing film as gap-fill layer by pulse plasma-assisted deposition
US11646197B2 (en) 2018-07-03 2023-05-09 Asm Ip Holding B.V. Method for depositing silicon-free carbon-containing film as gap-fill layer by pulse plasma-assisted deposition
US11053591B2 (en) 2018-08-06 2021-07-06 Asm Ip Holding B.V. Multi-port gas injection system and reactor system including same
US10883175B2 (en) 2018-08-09 2021-01-05 Asm Ip Holding B.V. Vertical furnace for processing substrates and a liner for use therein
US11430674B2 (en) 2018-08-22 2022-08-30 Asm Ip Holding B.V. Sensor array, apparatus for dispensing a vapor phase reactant to a reaction chamber and related methods
US11024523B2 (en) 2018-09-11 2021-06-01 Asm Ip Holding B.V. Substrate processing apparatus and method
US11274369B2 (en) 2018-09-11 2022-03-15 Asm Ip Holding B.V. Thin film deposition method
US11804388B2 (en) 2018-09-11 2023-10-31 Asm Ip Holding B.V. Substrate processing apparatus and method
US11049751B2 (en) 2018-09-14 2021-06-29 Asm Ip Holding B.V. Cassette supply system to store and handle cassettes and processing apparatus equipped therewith
US11885023B2 (en) 2018-10-01 2024-01-30 Asm Ip Holding B.V. Substrate retaining apparatus, system including the apparatus, and method of using same
US11232963B2 (en) 2018-10-03 2022-01-25 Asm Ip Holding B.V. Substrate processing apparatus and method
US11414760B2 (en) 2018-10-08 2022-08-16 Asm Ip Holding B.V. Substrate support unit, thin film deposition apparatus including the same, and substrate processing apparatus including the same
US11664199B2 (en) 2018-10-19 2023-05-30 Asm Ip Holding B.V. Substrate processing apparatus and substrate processing method
US11251068B2 (en) 2018-10-19 2022-02-15 Asm Ip Holding B.V. Substrate processing apparatus and substrate processing method
USD948463S1 (en) 2018-10-24 2022-04-12 Asm Ip Holding B.V. Susceptor for semiconductor substrate supporting apparatus
US11735445B2 (en) 2018-10-31 2023-08-22 Asm Ip Holding B.V. Substrate processing apparatus for processing substrates
US11087997B2 (en) 2018-10-31 2021-08-10 Asm Ip Holding B.V. Substrate processing apparatus for processing substrates
US11499226B2 (en) 2018-11-02 2022-11-15 Asm Ip Holding B.V. Substrate supporting unit and a substrate processing device including the same
US11866823B2 (en) 2018-11-02 2024-01-09 Asm Ip Holding B.V. Substrate supporting unit and a substrate processing device including the same
US11572620B2 (en) 2018-11-06 2023-02-07 Asm Ip Holding B.V. Methods for selectively depositing an amorphous silicon film on a substrate
US11244825B2 (en) 2018-11-16 2022-02-08 Asm Ip Holding B.V. Methods for depositing a transition metal chalcogenide film on a substrate by a cyclical deposition process
US11798999B2 (en) 2018-11-16 2023-10-24 Asm Ip Holding B.V. Methods for forming a metal silicate film on a substrate in a reaction chamber and related semiconductor device structures
US10847366B2 (en) 2018-11-16 2020-11-24 Asm Ip Holding B.V. Methods for depositing a transition metal chalcogenide film on a substrate by a cyclical deposition process
US11411088B2 (en) 2018-11-16 2022-08-09 Asm Ip Holding B.V. Methods for forming a metal silicate film on a substrate in a reaction chamber and related semiconductor device structures
US11217444B2 (en) 2018-11-30 2022-01-04 Asm Ip Holding B.V. Method for forming an ultraviolet radiation responsive metal oxide-containing film
US11488819B2 (en) 2018-12-04 2022-11-01 Asm Ip Holding B.V. Method of cleaning substrate processing apparatus
US11158513B2 (en) 2018-12-13 2021-10-26 Asm Ip Holding B.V. Methods for forming a rhenium-containing film on a substrate by a cyclical deposition process and related semiconductor device structures
US11769670B2 (en) 2018-12-13 2023-09-26 Asm Ip Holding B.V. Methods for forming a rhenium-containing film on a substrate by a cyclical deposition process and related semiconductor device structures
US11658029B2 (en) 2018-12-14 2023-05-23 Asm Ip Holding B.V. Method of forming a device structure using selective deposition of gallium nitride and system for same
US11959171B2 (en) 2019-01-17 2024-04-16 Asm Ip Holding B.V. Methods of forming a transition metal containing film on a substrate by a cyclical deposition process
US11390946B2 (en) 2019-01-17 2022-07-19 Asm Ip Holding B.V. Methods of forming a transition metal containing film on a substrate by a cyclical deposition process
US11171025B2 (en) 2019-01-22 2021-11-09 Asm Ip Holding B.V. Substrate processing device
US11127589B2 (en) 2019-02-01 2021-09-21 Asm Ip Holding B.V. Method of topology-selective film formation of silicon oxide
US11227789B2 (en) 2019-02-20 2022-01-18 Asm Ip Holding B.V. Method and apparatus for filling a recess formed within a substrate surface
US11482533B2 (en) 2019-02-20 2022-10-25 Asm Ip Holding B.V. Apparatus and methods for plug fill deposition in 3-D NAND applications
US11798834B2 (en) 2019-02-20 2023-10-24 Asm Ip Holding B.V. Cyclical deposition method and apparatus for filling a recess formed within a substrate surface
US11251040B2 (en) 2019-02-20 2022-02-15 Asm Ip Holding B.V. Cyclical deposition method including treatment step and apparatus for same
US11615980B2 (en) 2019-02-20 2023-03-28 Asm Ip Holding B.V. Method and apparatus for filling a recess formed within a substrate surface
US11342216B2 (en) 2019-02-20 2022-05-24 Asm Ip Holding B.V. Cyclical deposition method and apparatus for filling a recess formed within a substrate surface
US11629407B2 (en) 2019-02-22 2023-04-18 Asm Ip Holding B.V. Substrate processing apparatus and method for processing substrates
US11742198B2 (en) 2019-03-08 2023-08-29 Asm Ip Holding B.V. Structure including SiOCN layer and method of forming same
US11424119B2 (en) 2019-03-08 2022-08-23 Asm Ip Holding B.V. Method for selective deposition of silicon nitride layer and structure including selectively-deposited silicon nitride layer
US11114294B2 (en) 2019-03-08 2021-09-07 Asm Ip Holding B.V. Structure including SiOC layer and method of forming same
US11901175B2 (en) 2019-03-08 2024-02-13 Asm Ip Holding B.V. Method for selective deposition of silicon nitride layer and structure including selectively-deposited silicon nitride layer
US11378337B2 (en) 2019-03-28 2022-07-05 Asm Ip Holding B.V. Door opener and substrate processing apparatus provided therewith
US11551925B2 (en) 2019-04-01 2023-01-10 Asm Ip Holding B.V. Method for manufacturing a semiconductor device
US11447864B2 (en) 2019-04-19 2022-09-20 Asm Ip Holding B.V. Layer forming method and apparatus
US11814747B2 (en) 2019-04-24 2023-11-14 Asm Ip Holding B.V. Gas-phase reactor system-with a reaction chamber, a solid precursor source vessel, a gas distribution system, and a flange assembly
US11781221B2 (en) 2019-05-07 2023-10-10 Asm Ip Holding B.V. Chemical source vessel with dip tube
US11289326B2 (en) 2019-05-07 2022-03-29 Asm Ip Holding B.V. Method for reforming amorphous carbon polymer film
US11355338B2 (en) 2019-05-10 2022-06-07 Asm Ip Holding B.V. Method of depositing material onto a surface and structure formed according to the method
US11515188B2 (en) 2019-05-16 2022-11-29 Asm Ip Holding B.V. Wafer boat handling device, vertical batch furnace and method
US11996309B2 (en) 2019-05-16 2024-05-28 Asm Ip Holding B.V. Wafer boat handling device, vertical batch furnace and method
USD947913S1 (en) 2019-05-17 2022-04-05 Asm Ip Holding B.V. Susceptor shaft
USD935572S1 (en) 2019-05-24 2021-11-09 Asm Ip Holding B.V. Gas channel plate
USD922229S1 (en) 2019-06-05 2021-06-15 Asm Ip Holding B.V. Device for controlling a temperature of a gas supply unit
US11345999B2 (en) 2019-06-06 2022-05-31 Asm Ip Holding B.V. Method of using a gas-phase reactor system including analyzing exhausted gas
US11476109B2 (en) 2019-06-11 2022-10-18 Asm Ip Holding B.V. Method of forming an electronic structure using reforming gas, system for performing the method, and structure formed using the method
US11908684B2 (en) 2019-06-11 2024-02-20 Asm Ip Holding B.V. Method of forming an electronic structure using reforming gas, system for performing the method, and structure formed using the method
USD944946S1 (en) 2019-06-14 2022-03-01 Asm Ip Holding B.V. Shower plate
USD931978S1 (en) 2019-06-27 2021-09-28 Asm Ip Holding B.V. Showerhead vacuum transport
US11746414B2 (en) 2019-07-03 2023-09-05 Asm Ip Holding B.V. Temperature control assembly for substrate processing apparatus and method of using same
US11390945B2 (en) 2019-07-03 2022-07-19 Asm Ip Holding B.V. Temperature control assembly for substrate processing apparatus and method of using same
US11605528B2 (en) 2019-07-09 2023-03-14 Asm Ip Holding B.V. Plasma device using coaxial waveguide, and substrate treatment method
US12107000B2 (en) 2019-07-10 2024-10-01 Asm Ip Holding B.V. Substrate support assembly and substrate processing device including the same
US11664267B2 (en) 2019-07-10 2023-05-30 Asm Ip Holding B.V. Substrate support assembly and substrate processing device including the same
US11996304B2 (en) 2019-07-16 2024-05-28 Asm Ip Holding B.V. Substrate processing device
US11664245B2 (en) 2019-07-16 2023-05-30 Asm Ip Holding B.V. Substrate processing device
US11688603B2 (en) 2019-07-17 2023-06-27 Asm Ip Holding B.V. Methods of forming silicon germanium structures
US11615970B2 (en) 2019-07-17 2023-03-28 Asm Ip Holding B.V. Radical assist ignition plasma system and method
US11643724B2 (en) 2019-07-18 2023-05-09 Asm Ip Holding B.V. Method of forming structures using a neutral beam
US11282698B2 (en) 2019-07-19 2022-03-22 Asm Ip Holding B.V. Method of forming topology-controlled amorphous carbon polymer film
US12112940B2 (en) 2019-07-19 2024-10-08 Asm Ip Holding B.V. Method of forming topology-controlled amorphous carbon polymer film
US11443926B2 (en) 2019-07-30 2022-09-13 Asm Ip Holding B.V. Substrate processing apparatus
US11430640B2 (en) 2019-07-30 2022-08-30 Asm Ip Holding B.V. Substrate processing apparatus
US11587815B2 (en) 2019-07-31 2023-02-21 Asm Ip Holding B.V. Vertical batch furnace assembly
US11227782B2 (en) 2019-07-31 2022-01-18 Asm Ip Holding B.V. Vertical batch furnace assembly
US11587814B2 (en) 2019-07-31 2023-02-21 Asm Ip Holding B.V. Vertical batch furnace assembly
US11876008B2 (en) 2019-07-31 2024-01-16 Asm Ip Holding B.V. Vertical batch furnace assembly
US11680839B2 (en) 2019-08-05 2023-06-20 Asm Ip Holding B.V. Liquid level sensor for a chemical source vessel
USD965044S1 (en) 2019-08-19 2022-09-27 Asm Ip Holding B.V. Susceptor shaft
USD965524S1 (en) 2019-08-19 2022-10-04 Asm Ip Holding B.V. Susceptor support
US11639548B2 (en) 2019-08-21 2023-05-02 Asm Ip Holding B.V. Film-forming material mixed-gas forming device and film forming device
USD930782S1 (en) 2019-08-22 2021-09-14 Asm Ip Holding B.V. Gas distributor
USD940837S1 (en) 2019-08-22 2022-01-11 Asm Ip Holding B.V. Electrode
USD949319S1 (en) 2019-08-22 2022-04-19 Asm Ip Holding B.V. Exhaust duct
US12033849B2 (en) 2019-08-23 2024-07-09 Asm Ip Holding B.V. Method for depositing silicon oxide film having improved quality by PEALD using bis(diethylamino)silane
US11527400B2 (en) 2019-08-23 2022-12-13 Asm Ip Holding B.V. Method for depositing silicon oxide film having improved quality by peald using bis(diethylamino)silane
US11827978B2 (en) 2019-08-23 2023-11-28 Asm Ip Holding B.V. Methods for depositing a molybdenum nitride film on a surface of a substrate by a cyclical deposition process and related semiconductor device structures including a molybdenum nitride film
US11898242B2 (en) 2019-08-23 2024-02-13 Asm Ip Holding B.V. Methods for forming a polycrystalline molybdenum film over a surface of a substrate and related structures including a polycrystalline molybdenum film
US11286558B2 (en) 2019-08-23 2022-03-29 Asm Ip Holding B.V. Methods for depositing a molybdenum nitride film on a surface of a substrate by a cyclical deposition process and related semiconductor device structures including a molybdenum nitride film
US11495459B2 (en) 2019-09-04 2022-11-08 Asm Ip Holding B.V. Methods for selective deposition using a sacrificial capping layer
US11823876B2 (en) 2019-09-05 2023-11-21 Asm Ip Holding B.V. Substrate processing apparatus
US11562901B2 (en) 2019-09-25 2023-01-24 Asm Ip Holding B.V. Substrate processing method
US11610774B2 (en) 2019-10-02 2023-03-21 Asm Ip Holding B.V. Methods for forming a topographically selective silicon oxide film by a cyclical plasma-enhanced deposition process
US11339476B2 (en) 2019-10-08 2022-05-24 Asm Ip Holding B.V. Substrate processing device having connection plates, substrate processing method
US12006572B2 (en) 2019-10-08 2024-06-11 Asm Ip Holding B.V. Reactor system including a gas distribution assembly for use with activated species and method of using same
US11735422B2 (en) 2019-10-10 2023-08-22 Asm Ip Holding B.V. Method of forming a photoresist underlayer and structure including same
US12009241B2 (en) 2019-10-14 2024-06-11 Asm Ip Holding B.V. Vertical batch furnace assembly with detector to detect cassette
US11637011B2 (en) 2019-10-16 2023-04-25 Asm Ip Holding B.V. Method of topology-selective film formation of silicon oxide
US11637014B2 (en) 2019-10-17 2023-04-25 Asm Ip Holding B.V. Methods for selective deposition of doped semiconductor material
US11315794B2 (en) 2019-10-21 2022-04-26 Asm Ip Holding B.V. Apparatus and methods for selectively etching films
US11996292B2 (en) 2019-10-25 2024-05-28 Asm Ip Holding B.V. Methods for filling a gap feature on a substrate surface and related semiconductor structures
US11646205B2 (en) 2019-10-29 2023-05-09 Asm Ip Holding B.V. Methods of selectively forming n-type doped material on a surface, systems for selectively forming n-type doped material, and structures formed using same
US11501968B2 (en) 2019-11-15 2022-11-15 Asm Ip Holding B.V. Method for providing a semiconductor device with silicon filled gaps
US11626316B2 (en) 2019-11-20 2023-04-11 Asm Ip Holding B.V. Method of depositing carbon-containing material on a surface of a substrate, structure formed using the method, and system for forming the structure
US11915929B2 (en) 2019-11-26 2024-02-27 Asm Ip Holding B.V. Methods for selectively forming a target film on a substrate comprising a first dielectric surface and a second metallic surface
US11401605B2 (en) 2019-11-26 2022-08-02 Asm Ip Holding B.V. Substrate processing apparatus
US11923181B2 (en) 2019-11-29 2024-03-05 Asm Ip Holding B.V. Substrate processing apparatus for minimizing the effect of a filling gas during substrate processing
US11646184B2 (en) 2019-11-29 2023-05-09 Asm Ip Holding B.V. Substrate processing apparatus
US11929251B2 (en) 2019-12-02 2024-03-12 Asm Ip Holding B.V. Substrate processing apparatus having electrostatic chuck and substrate processing method
US11840761B2 (en) 2019-12-04 2023-12-12 Asm Ip Holding B.V. Substrate processing apparatus
US11885013B2 (en) 2019-12-17 2024-01-30 Asm Ip Holding B.V. Method of forming vanadium nitride layer and structure including the vanadium nitride layer
US11527403B2 (en) 2019-12-19 2022-12-13 Asm Ip Holding B.V. Methods for filling a gap feature on a substrate surface and related semiconductor structures
US12119220B2 (en) 2019-12-19 2024-10-15 Asm Ip Holding B.V. Methods for filling a gap feature on a substrate surface and related semiconductor structures
US12033885B2 (en) 2020-01-06 2024-07-09 Asm Ip Holding B.V. Channeled lift pin
US11976359B2 (en) 2020-01-06 2024-05-07 Asm Ip Holding B.V. Gas supply assembly, components thereof, and reactor system including same
US11993847B2 (en) 2020-01-08 2024-05-28 Asm Ip Holding B.V. Injector
US12125700B2 (en) 2020-01-16 2024-10-22 Asm Ip Holding B.V. Method of forming high aspect ratio features
US11551912B2 (en) 2020-01-20 2023-01-10 Asm Ip Holding B.V. Method of forming thin film and method of modifying surface of thin film
US11521851B2 (en) 2020-02-03 2022-12-06 Asm Ip Holding B.V. Method of forming structures including a vanadium or indium layer
US11828707B2 (en) 2020-02-04 2023-11-28 Asm Ip Holding B.V. Method and apparatus for transmittance measurements of large articles
US11776846B2 (en) 2020-02-07 2023-10-03 Asm Ip Holding B.V. Methods for depositing gap filling fluids and related systems and devices
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US11986868B2 (en) 2020-02-28 2024-05-21 Asm Ip Holding B.V. System dedicated for parts cleaning
US11876356B2 (en) 2020-03-11 2024-01-16 Asm Ip Holding B.V. Lockout tagout assembly and system and method of using same
US11488854B2 (en) 2020-03-11 2022-11-01 Asm Ip Holding B.V. Substrate handling device with adjustable joints
US11837494B2 (en) 2020-03-11 2023-12-05 Asm Ip Holding B.V. Substrate handling device with adjustable joints
US11961741B2 (en) 2020-03-12 2024-04-16 Asm Ip Holding B.V. Method for fabricating layer structure having target topological profile
US11823866B2 (en) 2020-04-02 2023-11-21 Asm Ip Holding B.V. Thin film forming method
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US11437241B2 (en) 2020-04-08 2022-09-06 Asm Ip Holding B.V. Apparatus and methods for selectively etching silicon oxide films
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US11996289B2 (en) 2020-04-16 2024-05-28 Asm Ip Holding B.V. Methods of forming structures including silicon germanium and silicon layers, devices formed using the methods, and systems for performing the methods
US11898243B2 (en) 2020-04-24 2024-02-13 Asm Ip Holding B.V. Method of forming vanadium nitride-containing layer
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