CN104242721A - Flexible actuator - Google Patents
Flexible actuator Download PDFInfo
- Publication number
- CN104242721A CN104242721A CN201410467729.XA CN201410467729A CN104242721A CN 104242721 A CN104242721 A CN 104242721A CN 201410467729 A CN201410467729 A CN 201410467729A CN 104242721 A CN104242721 A CN 104242721A
- Authority
- CN
- China
- Prior art keywords
- dielectric elastomer
- cover plate
- flexible
- dielectric
- layer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
Abstract
The invention discloses a flexible actuator which comprises a cover plate, a bottom plate, a dielectric elastic body, flexible electrodes and aluminum foils. The cover plate is of a circular ring structure; the bottom plate is located on the lower side of the cover plate and is of a round structure, a blind hole is formed in the bottom plate, and an inflation hole is formed in the bottom of the blind hole; the dielectric elastic body is tightly pressed between the lower end face of the cover plate and the upper end face of the bottom plate after being pre-stressed, the portion, between the cover plate and the bottom plate, of the dielectric elastic body is an activity area, the dielectric elastic body is formed by stacking multiple single-layer dielectric elastic main bodies, and the active area of each layer of the dielectric elastic main body is divided into multiple symmetric sub areas in the same way; the upper surface and the lower surface of each sub area are coated with the flexible electrodes, and a distance is reserved between every two adjacent flexible electrodes; the aluminum foils are arranged on the upper surface and the lower surface of each sub area in a one-to-one correspondence mode and are led out from boundaries formed by the bottom plate and the cover plate. The flexible actuator has the advantages of being good in flexibility, large in drive force, simple in structure and good in universality, is simple in structure, can be repeatedly used and is low in cost, free of noise and magnetism and convenient to install.
Description
Technical field
The present invention relates to actuator technologies field, be specifically related to a kind of flexible actuator.
Background technology
The activation manners of traditional actuators mostly adopts mechanically actuated, electromechanical actuation, hydraulic actuation, and these traditional actuators exist the problem of response time length, complicated in mechanical structure, large, flexible poor, the bionical poor performance of noise.Except the actuator of traditional activation manners, in recent years, researcher have developed the actuator that the new function materials such as a lot of Shape-based interpolation memorial alloy, magnetostriction activate, but above-mentioned actuator also also exists the defect of response time long, flexible poor, bionical poor performance.
Dielectric elastomer is a kind of electric field-activate polymeric material, due to the similar natural muscle of its performance, is commonly called as artificial-muscle.Dielectric elastomer has many good qualities compared with other new function material and traditional actuation technology: structure is simple, without the need to transmission mechanism, can directly externally do work; Volume is little, quality is light; Without magnetic, without heat, noiseless; Power-mass ratio large (3.4J/g); Electromechanical energy conversion efficiency high (60%-90%); Fast response time (10
-3s); Distortion large (maximum 380%), can produce larger displacement; There is flexibility, be convenient to structure arrangement, be easy to realize actuating integrated.Just because of the above-mentioned advantage of dielectric elastomer, the actuator based on dielectric elastomer is made to become the focus in actuation technology field.
Cold sturdy pines, patent of invention " the gas-filled type dielectric elastomer hemi-spherical driver " (application for a patent for invention number: 200810064273.7) propose a kind of gas-filled type dielectric elastomer hemi-spherical driver of Liu Yanju etc., mainly contain substrate, first film, second film, first dielectric elastomeric body thin film, second dielectric elastomeric body thin film, first electrode, second electrode, first aluminium foil, second aluminium foil, the inner surface of the first film sticks the first dielectric elastomeric body thin film, the inner surface of the second film sticks the second dielectric elastomeric body thin film, the interior facade of the first dielectric elastomeric body thin film and the second dielectric elastomeric body thin film upper end is fitted, fit in the upper surface of the first dielectric elastomeric body thin film and the second dielectric elastomeric body thin film bottom and substrate, the inner surface of the first dielectric elastomeric body thin film applies the first electrode, the inner surface of the second dielectric elastomeric body thin film applies the second electrode, the outer surface of the first electrode draws the first aluminium foil, the outer surface of the second electrode draws the second aluminium foil.The program utilizes dielectric flexible body thin film under DC Electric Field, is changed and stretch, bend, tighten and expand by material internal structure.Although the program makes moderate progress relative to traditional actuators performance, still there is following problem:
(1) it adopts film as support frame, and structure is comparatively complicated, and impacts flex capability.
(2) it can only produce the actuation force of left and right both direction by the deformation of the first dielectric elastomeric body thin film and the second dielectric elastomeric body thin film, and application is restricted.
(3) its dielectric elastomeric body thin film is individual layer, and only at a surface-coated electrode, output drive strength is limited.
(4) its electrode used therein is common graphite powder material, conductivity and mobility poor, affect the deformability of dielectric elastomer.
Summary of the invention
For above defect or the Improvement requirement of prior art, the object of the present invention is to provide a kind of flexible actuator, there is flexible, that actuating force is large, structure is simple, versatility is good advantage.
For achieving the above object, the present invention adopts following technical scheme:
Cover plate is a circular ring structure;
Base plate, is positioned at the below of cover plate, and it is a circular configuration, and inside has a blind hole, and blind via bottom has an air-filled pore;
Dielectric elastomer, press after pre-stretching between the lower surface and the upper surface of base plate of cover plate, the dielectric elastomer being in cover plate and base plate mid portion is zone of action, the dielectric elastomer pressing part between the lower surface and the upper surface of base plate of cover plate is fixed area, dielectric elastomer is formed by stacking by multilayer individual layer dielectric elastomer, and the zone of action of every layer of dielectric elastomer is divided into symmetrical multiple subregions by same way;
Flexible electrode, is coated on the upper and lower surface of every sub regions of every layer of dielectric elastomer, keeps spacing between adjacent flexible electrode;
Aluminium foil, one_to_one corresponding is arranged in the upper and lower surface of every sub regions of every layer of dielectric elastomer, and draws from the border that described base plate and cover plate are formed.
Further, described pre-stretching dielectric elastomer is formed by stacking by 1 ~ 5 layer of individual layer dielectric elastomer.
Further, described flexible electrode is the mixture of ultra-fine carbon black powder, silicone oil, silica gel and normal heptane, wherein the volume ratio of silicone oil, silica gel is 1:0.4 ~ 1:3, the quality of carbon black powder is 2 ~ 3 times of quality after silicone oil, silica gel mixing, after ultra-fine carbon black powder, silicone oil, silica gel mix and stir, slowly add normal heptane again to stir, addition to the mixed liquor of normal heptane reach thick.Employing like this, compared to other electrodes, this flexible electrode can be pasted onto dielectric elastomeric surface very equably, is out of shape along with the distortion of dielectric elastomer, has the advantages such as good fluidity, resistance of deformation be little.
Further, described dielectric elastomer radially carries out pre-stretching according to 2.5 times ~ 4 times, so adopts, and the thickness of dielectric elastomer is less, and actuation voltage is lower, and the distortion of dielectric elastomer and power output are larger, activate performance more excellent.
Further, described a kind of flexible actuator, is characterized in that, described dielectric elastomer is formed by stacking by 1 ~ 5 layer of individual layer dielectric elastomer, and every layer of dielectric elastomer of zone of action is divided into symmetrical 2N region (, 1≤N≤3, and N is integer) here.
Further, the flexible electrode that aluminium foil applies with the upper and lower surface in described each region fully contacts, setting like this, when ensureing aluminium foil energising, dielectric elastomer is by the reliability of electric actuation, and the surface of aluminium foil has viscous glue solution, utilize the cementability of dielectric elastomer itself to make the bonding more firm of cover plate, dielectric elastomer and base plate simultaneously.
Advantageous Effects of the present invention is embodied in:
Before inflation, flexible actuator is in unaerated state, and the prestretching force that on dielectric elastomer, each region is born is identical, and flexible actuator is in poised state.When inflating from the air-filled pore on base plate to actuator, actuator is in hemisphere state, and now gas is as the framework of flexible actuator, and compared with the framework formed with other materials, a kind of flexible actuator of the present invention has flexibility more, and structure is simpler.
After dielectric elastomer subregions some on actuator after inflation apply voltage by aluminium foil, due to electrostatic force, the direction applied along voltage produces and shrinks by energising subregion dielectric elastomer, and extend at the Directional Extension applied perpendicular to voltage, produce the larger strain perpendicular to direction of an electric field, now, the restoring force effect after pre-stretching is subject to the symmetrical subregion of the energising subregion dielectric elastomer dielectric elastomer that is not energized, contraction can be produced, the stressed disequilibrium of whole flexible actuator, flexible actuator produces the actuation force to the relative region of energising dielectric elastomeric body region, flexible actuator activates to the region that energising dielectric elastomer subregion is relative.When not applying voltage, actuator restores to the original state, and along with the change of extra electric field and flexible electrode connected mode, the deformation of actuator changes, and then produces actuation force, is selected and combination can obtain the actuation force of different size and Orientation by the symmetrical subregion of difference.
Dielectric elastomeric body thin film can select the individual layer dielectric elastomer of the different number of plies as required, and the equal coating flexible electrode of the upper and lower surface of every layer of dielectric elastomer, the actuation force interval range that actuator is produced is larger, and voltage when actuation voltage activates with individual layer is the same, not increase.
Base plate arranges blind hole, and the dielectric elastomeric body thin film avoiding the pre-stretching being in zone of action directly contacts with base plate, hinders dielectric elastomer motion.
Generally speaking, a kind of flexible actuator of the present invention have flexible, actuating force large, good impact resistance, structure simple, can low, the noiseless of Reusability, cost, nonmagnetic, be convenient to the advantages such as installation.The present invention has a wide range of applications in the various fields such as reset and growth of facial expression, bionic mechanical, artificial-muscle, Aero-Space, flow control, muscle.
Accompanying drawing explanation
Fig. 1 is the overall structure figure after a kind of flexible actuator inflated condition of the present invention;
Fig. 2 is the overall structure figure of a kind of flexible actuator unaerated of the present invention state;
Fig. 3 is the structural representation of a kind of flexible actuator base plate of the present invention.
Embodiment
In order to make object of the present invention, technical scheme and advantage clearly understand, below in conjunction with the drawings and specific embodiments, the present invention is described in further detail.Should be appreciated that specific embodiment described herein only in order to explain the present invention, be not intended to limit the present invention.In addition, if below in described each execution mode of the present invention involved technical characteristic do not form conflict each other and just can mutually combine.
A kind of flexible actuator better embodiment of the present invention, as shown in Figure 1, comprises cover plate 1, dielectric elastomeric body thin film 2, base plate 3, flexible electrode 4 and aluminium foil 5;
Described cover plate 1 is a circular ring structure, the anchor ring of cover plate has a circle tapped through hole;
Described base plate 3 is circular configurations, as shown in Figure 3.Its inside has a blind hole 3-1, and base plate 3 arranges blind hole 3-1, avoids dielectric elastomeric body thin film 2 and directly contacts with base plate 3, hinders dielectric elastomeric body thin film 2 to move.The bottom centre of base plate 3 has a screwed air-filled pore 3-2, and air-filled pore 3-2 and blind hole 3-1 is through, by this air-filled pore 3-2 to flexible actuator inflation/deflation.Periphery along blind hole 3-1 is uniform-distribution with a circle screwed hole 3-3, and described screwed hole 3-3 is corresponding with the tapped through hole on cover plate 1 anchor ring, and whole actuator is connected into an entirety by the tapped through hole on screwed hole 3-3 and cover plate anchor ring by screw 6.
Dielectric elastomer, press after pre-stretching between the lower surface and the upper surface of base plate of cover plate, the dielectric elastomer being in cover plate and base plate mid portion is zone of action, and the dielectric elastomer pressing part between the lower surface and the upper surface of base plate of cover plate is fixed area.Described dielectric elastomeric body thin film 2 is formed by stacking by three layers of individual layer dielectric elastomer, and the zone of action of every layer of dielectric elastomer is divided four symmetrical sub regions.Employing like this, the actuation force making actuator is larger, and voltage when adopting every layer of mode driven separately that the actuation voltage with three layers of dielectric elastomeric body thin film 2 actuator is activated with individual layer dielectric elastomeric body thin film 2 is the same, does not increase.
Described dielectric elastomer radially carries out pre-stretching according to 3.5 times.Employing like this, the thickness of dielectric elastomer is less, and actuation voltage is lower, and the distortion of dielectric elastomer and power output are larger, activate performance more excellent.
Described every layer of dielectric elastomer is divided into four symmetrical regions, the equal coating flexible electrode of upper and lower surface in each region, and the upper and lower surface that every layer of dielectric elastomer is divided into each region in four symmetrical regions draws the aluminium foil 5 that a thickness is 0.01mm ~ 0.2mm.Employing like this, make the sealing of whole actuator and cementability better.
The flexible electrode 4 of the upper and lower surface coating of each adjacent area of described every layer of dielectric elastomer is spaced from each other, the aluminium foil 5 that the upper and lower surface in each region of described every layer of dielectric elastomer is drawn fully contacts with the flexible electrode 4 that the upper and lower surface in described each region applies, and the surface of described aluminium foil 5 has viscous glue solution.
Described flexible electrode 4 is preferably the mixture of ultra-fine carbon black powder, silicone oil, silica gel and normal heptane, wherein the volume ratio of silicone oil, silica gel is 1:1, the quality of carbon black powder is 2.4 times of quality after silicone oil, silica gel mixing, after ultra-fine carbon black powder, silicone oil, silica gel mix and stir, slowly add normal heptane again to stir, addition to the mixed liquor of normal heptane reach thick.
Flexible actuator is in unaerated state at ordinary times, as shown in Figure 2.The prestretching force that on dielectric elastomer 2, each region is born is identical, and flexible actuator is in poised state.When inflating from the air-filled pore 3-2 on base plate 3 to actuator, actuator is in hemisphere state, as shown in Figure 1.Now gas is as the framework of flexible actuator, and compared with the framework formed with other materials, a kind of flexible actuator of the present invention has flexibility more, and structure is simpler.After dielectric elastomer 2 subregions some on actuator after inflation apply voltage by aluminium foil 5, due to electrostatic force, the direction applied along voltage produces and shrinks by energising subregion dielectric elastomer 2, and extend at the Directional Extension applied perpendicular to voltage, produce the larger strain perpendicular to direction of an electric field, now, the restoring force effect after pre-stretching is subject to the energising subregion dielectric elastomer 2 symmetrical subregion dielectric elastomer 2 that is not energized, contraction can be produced, the stressed disequilibrium of whole flexible actuator, flexible actuator produces the actuation force to the relative region of energising dielectric elastomer 2 subregion, flexible actuator activates to the region that energising dielectric elastomer 2 subregion is relative.When not applying voltage, actuator restores to the original state, and along with the change of extra electric field and flexible electrode 4 connected mode, the deformation of actuator changes, and then produces the actuation force of different size and Orientation.
After to the present embodiment inflation, when some regions of dielectric elastomer apply the voltage of 4kV, in the 3s time, the actuation angle of flexible actuator reaches 27.5 °, the actuation force produced reaches 5N, after removing voltage to energization area, in the 2.5s time, flexible actuator is returned to original non-"on" position.
The present invention is also on the basis of above-mentioned better embodiment, change the composition ratio of flexible electrode, the volume ratio of the silicone oil in flexible electrode, silica gel is replaced with 1:0.4, the quality of carbon black powder is 2 times of quality after silicone oil, silica gel mixing, result of the test surface, when some regions of dielectric elastomer apply the voltage of 4kV, in the 3s time, the actuation angle of flexible actuator reaches 27 °, the actuation force produced reaches 5N, after removing voltage to energization area, in the 2.4s time, flexible actuator is returned to original non-"on" position.
The present invention is also on the basis of above-mentioned better embodiment, change the composition ratio of flexible electrode, the volume ratio of the silicone oil in flexible electrode, silica gel is replaced with 1:3, the quality of carbon black powder is 3 times of quality after silicone oil, silica gel mixing, result of the test surface, when some regions of dielectric elastomer apply the voltage of 4kV, in the 4s time, the actuation angle of flexible actuator reaches 27.4 °, the actuation force produced reaches 4.8N, after removing voltage to energization area, in the 3s time, flexible actuator is returned to original non-"on" position.
The above is only the preferred embodiment of the present invention; be noted that for those skilled in the art; under the premise without departing from the principles of the invention, can also make some improvements and modifications, these improvements and modifications also should be considered as protection scope of the present invention.
Claims (4)
1. a flexible actuator, is characterized in that, comprising:
Cover plate is a circular ring structure;
Base plate, is positioned at the below of cover plate, and it is a circular configuration, and inside has a blind hole, and blind via bottom has an air-filled pore;
Dielectric elastomer, press after pre-stretching between the lower surface and the upper surface of base plate of cover plate, the dielectric elastomer being in cover plate and base plate mid portion is zone of action, the dielectric elastomer pressing part between the lower surface and the upper surface of base plate of cover plate is fixed area, dielectric elastomer is formed by stacking by multilayer individual layer dielectric elastomer, and the zone of action of every layer of dielectric elastomer is divided into symmetrical multiple subregions by same way;
Flexible electrode, is coated on the upper and lower surface of every sub regions of every layer of dielectric elastomer, keeps spacing between adjacent flexible electrode;
Aluminium foil, one_to_one corresponding is arranged in the upper and lower surface of every sub regions of every layer of dielectric elastomer, and draws from the border that described base plate and cover plate are formed.
2. flexible actuator according to claim 1, is characterized in that, described pre-stretching dielectric elastomer is formed by stacking by 1 ~ 5 layer of individual layer dielectric elastomer.
3. flexible actuator according to claim 1 and 2, it is characterized in that, described flexible electrode is the mixture of ultra-fine carbon black powder, silicone oil, silica gel and normal heptane, wherein the volume ratio of silicone oil, silica gel is 1:0.4 ~ 1:3, the quality of carbon black powder is 2 ~ 3 times of quality after silicone oil, silica gel mixing, after ultra-fine carbon black powder, silicone oil, silica gel mix and stirs, more slowly add normal heptane and stir, addition to the mixed liquor of normal heptane reach thick.
4. flexible actuator according to claim 1 and 2, is characterized in that, described dielectric elastomer pre-stretching amount is radially 2.5 times ~ 4 times.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410467729.XA CN104242721B (en) | 2014-09-15 | A kind of flexible actuator |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410467729.XA CN104242721B (en) | 2014-09-15 | A kind of flexible actuator |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN104242721A true CN104242721A (en) | 2014-12-24 |
| CN104242721B CN104242721B (en) | 2017-01-04 |
Family
ID=
Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104789139A (en) * | 2015-04-15 | 2015-07-22 | 浙江大学 | Reversible adhesive device based on dielectric elastomer |
| CN105099262A (en) * | 2015-08-28 | 2015-11-25 | 浙江大学 | Inflatable deformable body based on dielectric elastomer |
| CN106602922A (en) * | 2016-06-23 | 2017-04-26 | 北京纳米能源与系统研究所 | Tubular friction nanogenerator and cloth and energy shoe using same |
| CN106602921A (en) * | 2016-05-19 | 2017-04-26 | 北京纳米能源与系统研究所 | Friction generator and the preparing method thereof |
| CN106880470A (en) * | 2017-03-07 | 2017-06-23 | 浙江大学 | Multiple degrees of freedom distressed structure and the Wearable action assisting device including the structure |
| CN108923681A (en) * | 2018-08-13 | 2018-11-30 | 南昌大学 | A kind of contact dielectric elastomer electric generator structure |
| CN111130378A (en) * | 2020-01-17 | 2020-05-08 | 闽江学院 | Preparation method of flexible self-powered electric brake |
| CN113232008A (en) * | 2021-05-15 | 2021-08-10 | 吉林大学威海仿生研究院 | Unrestraint hydraulic pressure enlargies static self-driven roll formula robot |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101252326A (en) * | 2008-04-11 | 2008-08-27 | 哈尔滨工业大学 | Gas-filled type dielectric elastomer hemi-spherical driver |
| US20080294079A1 (en) * | 2007-05-22 | 2008-11-27 | Bellacure, Inc. | Orthotic apparatus and method of operation |
| JP2009060696A (en) * | 2007-08-30 | 2009-03-19 | Tokai Rubber Ind Ltd | Actuator |
| CN102556369A (en) * | 2012-01-12 | 2012-07-11 | 北京理工大学 | Pneumatic artificial muscle contraction device for soft landing of airborne equipment |
| CN103822534A (en) * | 2014-02-28 | 2014-05-28 | 湖北三江航天红林探控有限公司 | Electrically actuated pull pin type safety mechanism |
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20080294079A1 (en) * | 2007-05-22 | 2008-11-27 | Bellacure, Inc. | Orthotic apparatus and method of operation |
| JP2009060696A (en) * | 2007-08-30 | 2009-03-19 | Tokai Rubber Ind Ltd | Actuator |
| CN101252326A (en) * | 2008-04-11 | 2008-08-27 | 哈尔滨工业大学 | Gas-filled type dielectric elastomer hemi-spherical driver |
| CN102556369A (en) * | 2012-01-12 | 2012-07-11 | 北京理工大学 | Pneumatic artificial muscle contraction device for soft landing of airborne equipment |
| CN103822534A (en) * | 2014-02-28 | 2014-05-28 | 湖北三江航天红林探控有限公司 | Electrically actuated pull pin type safety mechanism |
Cited By (13)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104789139B (en) * | 2015-04-15 | 2016-12-07 | 浙江大学 | Reversible gluing device based on dielectric elastomer |
| CN104789139A (en) * | 2015-04-15 | 2015-07-22 | 浙江大学 | Reversible adhesive device based on dielectric elastomer |
| CN105099262A (en) * | 2015-08-28 | 2015-11-25 | 浙江大学 | Inflatable deformable body based on dielectric elastomer |
| CN106602921A (en) * | 2016-05-19 | 2017-04-26 | 北京纳米能源与系统研究所 | Friction generator and the preparing method thereof |
| CN106602921B (en) * | 2016-05-19 | 2019-05-17 | 北京纳米能源与系统研究所 | A kind of friction generator and preparation method thereof |
| CN106602922A (en) * | 2016-06-23 | 2017-04-26 | 北京纳米能源与系统研究所 | Tubular friction nanogenerator and cloth and energy shoe using same |
| CN106880470B (en) * | 2017-03-07 | 2023-05-09 | 浙江大学 | Multi-degree-of-freedom deformation structure and wearing type action auxiliary device comprising same |
| CN106880470A (en) * | 2017-03-07 | 2017-06-23 | 浙江大学 | Multiple degrees of freedom distressed structure and the Wearable action assisting device including the structure |
| CN108923681A (en) * | 2018-08-13 | 2018-11-30 | 南昌大学 | A kind of contact dielectric elastomer electric generator structure |
| CN108923681B (en) * | 2018-08-13 | 2024-05-03 | 南昌大学 | Contact dielectric elastomer generator structure |
| CN111130378A (en) * | 2020-01-17 | 2020-05-08 | 闽江学院 | Preparation method of flexible self-powered electric brake |
| CN113232008A (en) * | 2021-05-15 | 2021-08-10 | 吉林大学威海仿生研究院 | Unrestraint hydraulic pressure enlargies static self-driven roll formula robot |
| CN113232008B (en) * | 2021-05-15 | 2023-03-14 | 吉林大学威海仿生研究院 | Unrestraint hydraulic pressure enlargies static self-driven roll formula robot |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CA2537231C (en) | Electroactive polymer pre-strain | |
| US7626319B2 (en) | Three-dimensional electroactive polymer actuated devices | |
| EP3304608B1 (en) | Actuation device | |
| WO2012105095A1 (en) | Gel actuator and gel used therein | |
| JP6464317B2 (en) | Actuator devices based on electroactive or photoactive polymers | |
| US8368284B2 (en) | Dielectric actuator | |
| US7915789B2 (en) | Electroactive polymer actuated lighting | |
| US6867533B1 (en) | Membrane tension control | |
| CN100581039C (en) | Gas-filled type dielectric elastomer hemi-spherical driver | |
| US20090161239A1 (en) | Camera diaphragm and lens positioning system employing a dielectrical polymer actuator | |
| US20070200457A1 (en) | High-speed acrylic electroactive polymer transducers | |
| CN108288922A (en) | A kind of Bionic flexible swing actuator | |
| US20160131275A1 (en) | Seat valve | |
| WO2020180982A1 (en) | Composite layering of hydraulically amplified self-healing electrostatic transducers | |
| US20140250881A1 (en) | Actuator | |
| WO2018207707A1 (en) | Actuator, drive member, haptic device, and drive device | |
| CN101203967A (en) | Piezoelectric actuator with an improved stroke capability | |
| CN104242721A (en) | Flexible actuator | |
| JP5129998B2 (en) | Electrostrictive element | |
| CN104242721B (en) | A kind of flexible actuator | |
| JP7015747B2 (en) | Dielectric elastomer transducer system | |
| JP7502995B2 (en) | Dielectric Elastomer Transducers | |
| CN202049999U (en) | Piezoelectric ceramic-based driver device | |
| KR102135089B1 (en) | An electro active fiber | |
| JP2015508576A (en) | Actuator module having a multilayer actuator arranged in a casing and a constant very small leakage current on the actuator surface |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant |