CN104241793A - Bent waveguide used for microwave transmission - Google Patents
Bent waveguide used for microwave transmission Download PDFInfo
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- CN104241793A CN104241793A CN201410487485.1A CN201410487485A CN104241793A CN 104241793 A CN104241793 A CN 104241793A CN 201410487485 A CN201410487485 A CN 201410487485A CN 104241793 A CN104241793 A CN 104241793A
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Abstract
The invention relates to a bent waveguide used for microwave transmission. The bent waveguide comprises a horizontal tube section and a vertical tube section, and rectangular through holes with uniform cross sections are formed in the horizontal tube section and the vertical tube section. The bent waveguide is characterized in that an inclined tube section is connected between the horizontal tube section and the vertical tube section, the horizontal tube section, the vertical tube section and the inclined tube section are connected into a whole, and a rectangular through hole with the uniform cross section is formed in the inclined tube section for enabling the rectangular through holes, provided with the uniform cross sections, in the horizontal tube section and the vertical tube section to be communicated. The bent waveguide has the advantages that the structure setting is reasonable, the inclined-straight face structure is adopted for bringing convenience to whole machining, the machining quality is good, accuracy is high, and a smooth and seamless waveguide channel is formed; the using performance is stable, fire striking and microwave power fluctuation can be avoided, and the service life of the product is long; a window is formed so that a microwave system can be conveniently checked and maintained, and the maintaining cost can be reduced; the bent waveguide can be made of hard aluminum alloy materials, and the manufacturing cost of the product is reduced.
Description
Technical field
The present invention relates to a kind of for PCVD(plasma chemical vapor deposition) lathe carries out the waveguide bend of microwave transmission, belongs to preform technical field of processing equipment.
Background technology
PCVD and Plasma Enhanced Chemical Vapor Deposition (PECVD) are one of main technique of preform processing, the processing mechanism of PCVD technique is by the direct effect of high-frequency microwave to reactant gas, make it rapidly physical-chemical reaction occur and form the silicon dioxide of pure silicon dioxide or doping, directly depositing with glassy state at quartz ampoule inwall.PCVD technique has feature accurate flexibly, and plasma resonant microwave system is the core of PCVD process equipment.Plasma resonant microwave system include plasma resonant, microwave generator and waveguide assembly three part composition, the microwave transmission that microwave generator produces is coupled to plasma resonant by waveguide assembly, launches high frequency microwave energy complete PCVD processes process by plasma resonant to preform processing district.
Waveguide assembly is the pith of microwave transmission coupling, and waveguide assembly generally includes column waveguide and waveguide bend, and waveguide bend is used for turning to of microwave.Existing waveguide bend is mostly the arcuate structure waveguide bend of 45 ° of circular arcs, and the primary structure in waveguide bend is in waveguide bend, have a prismatic arcuate socket, and this prismatic shape is rectangle.Because arc vestibule is not easily processed, therefore, existing waveguide bend mostly has arc copper coin and side plate to splice mutually to freeze and form, so not only processing difficulties, and Forming Quality and low precision, yielding, it is firm not that piece connects, there is change in piece gap under certain external force, obviously can occur sparking during actual use at piece gap place, causes microwave power to occur fluctuation.And any one link in microwave transfer path goes wrong, PCVD equipment alarm all can be made to shut down, cause product rejection.In addition, when PCVD equipment high-frequency microwave system goes wrong, usually need to check that whether microwave channel is normal, and existing microwave channel is all without watch window.As checked passage, resonant cavity, the waveguide of resonant cavity column, waveguide bend three must be removed could the microwave path in eye-level direction.Restore installation after checking out and be removed part, or change parts, and will recalibrate resonant cavity center.This maintenance mode workload is very large, consuming time very long, very inconvenient.
Summary of the invention
Technical problem to be solved by this invention is that the deficiency existed for above-mentioned prior art provides a kind of reasonable in design, is easy to processing, Forming Quality and the good waveguide bend for microwave transmission of precision.
The technical scheme that the problem that the present invention is the above-mentioned proposition of solution adopts is: comprise horizontal pipeline section and vertical pipeline section, horizontal pipeline section is provided with uiform section rectangular through-hole with in vertical pipeline section, it is characterized in that connecting oblique pipeline section between horizontal pipeline section and vertical pipeline section, horizontal pipeline section, vertical pipeline section and oblique pipeline section are linked into one, offer uiform section rectangular through-hole horizontal pipeline section is connected with the uiform section rectangular through-hole in vertical pipeline section in oblique pipeline section.
By such scheme, the angle of inclination of described oblique pipeline section is 45 °, and in oblique pipeline section, the lateral cross of uiform section rectangular through-hole is isosceles trapezoid, and the base angle of isosceles trapezoid is 67.5 °.
By such scheme, the front end of described horizontal pipeline section is provided with adpting flange, and back segment is provided with outward-dipping connection port, and the lateral cross base angle of connection port is 67.5 °, is connected mutually with the base angle of oblique pipeline section.
By such scheme, the upper end of described vertical pipeline section is provided with adpting flange, and hypomere is provided with outward-dipping connection port, and the lateral cross base angle of connection port is 67.5 °, is connected mutually with the base angle of oblique pipeline section.
By such scheme, the lateral surface of described oblique pipeline section offers rectangular window, is configured with cover plate in window.
By such scheme, described cover plate face is identical with the lateral surface area of oblique pipeline section.
By such scheme, described waveguide bend entirety is made up of hard aluminium alloy, or is made up of brass material.
Beneficial effect of the present invention is: 1, vibrational power flow is reasonable, and employing is tiltedly faced structure directly and can be convenient to overall processing, and crudy is good, and precision is high, forms smooth seamless waveguide channels; 2, serviceability is stablized, and there will not be sparking and microwave power wave phenomenon, and the long service life of product; 3, offer the inspection and maintenance that window can be convenient to microwave system, reduce maintenance cost; 4, can be made up of hard aluminium alloy material, reduce the cost of manufacture of product.
Accompanying drawing explanation
Fig. 1 is using state of the present invention diagram.
Fig. 2 is the side sectional view of one embodiment of the invention.
Fig. 3 is the vertical view of Fig. 2.
Fig. 4 is the left view of Fig. 2.
Fig. 5 is the stereogram of one embodiment of the invention.
Fig. 6 is the stereogram that one embodiment of the invention removes cover plate.
Embodiment
Embodiments of the invention are further described below in conjunction with accompanying drawing.
Comprise horizontal pipeline section 9 and vertical pipeline section 5, the front end of described horizontal pipeline section is respectively arranged with rectangle adpting flange with the upper end of vertical pipeline section, horizontal pipeline section is rectangular with the lateral cross section of vertical pipeline section, inner chamber is provided with uiform section rectangular through-hole, the width of uiform section rectangle is B, length is L, oblique pipeline section 6 is connected between horizontal pipeline section and vertical pipeline section, horizontal pipeline section, vertical pipeline section and oblique pipeline section are linked into one, offer uiform section rectangular through-hole horizontal pipeline section is connected with the uiform section rectangular through-hole in vertical pipeline section in oblique pipeline section.The lateral cross section width of each pipeline section is equal with length.The angle of inclination of described oblique pipeline section is 45 °, and in oblique pipeline section, the lateral cross of uiform section rectangular through-hole is isosceles trapezoid, and the base angle of isosceles trapezoid is 67.5 °.The back segment of horizontal pipeline section is provided with outward-dipping connection port, the lateral cross base angle of connection port is 67.5 °, be connected mutually with the base angle of oblique pipeline section, form the angle of 135 °, the hypomere of vertical pipeline section is provided with outward-dipping connection port, the lateral cross base angle of connection port is 67.5 °, is connected mutually with the base angle of oblique pipeline section, also forms the angle of 135 °.In addition, the lateral surface of described oblique pipeline section offers rectangular window, cover plate is configured with in window, the outer face of window is provided with connection screw, the hole phase configuration offered with cover plate circumference, described cover plate face is identical with the lateral surface area of oblique pipeline section, and the interior outside of cover plate is straight and waveguide body phase configuration.Waveguide bend entirety is made up of hard aluminium alloy.
The present invention is used for the plasma resonant microwave system of PCVD lathe, gas ions resonant cavity microwave system include plasma resonant 1, microwave generator and waveguide assembly three part composition, the usual column waveguide 2 of waveguide assembly and waveguide bend 3, the other end of waveguide bend is connected with the tuner 4 of microwave generator.
Claims (7)
1. the waveguide bend for microwave transmission, comprise horizontal pipeline section and vertical pipeline section, horizontal pipeline section is provided with uiform section rectangular through-hole with in vertical pipeline section, it is characterized in that connecting oblique pipeline section between horizontal pipeline section and vertical pipeline section, horizontal pipeline section, vertical pipeline section and oblique pipeline section are linked into one, offer uiform section rectangular through-hole horizontal pipeline section 9 is connected with the uiform section rectangular through-hole in vertical pipeline section in oblique pipeline section.
2., by the waveguide bend for microwave transmission according to claim 1, it is characterized in that the angle of inclination of described oblique pipeline section is 45 °, in oblique pipeline section, the lateral cross of uiform section rectangular through-hole is isosceles trapezoid, and the base angle of isosceles trapezoid is 67.5 °.
3. by the waveguide bend for microwave transmission according to claim 2, it is characterized in that the front end of described horizontal pipeline section is provided with adpting flange, back segment is provided with outward-dipping connection port, and the lateral cross base angle of connection port is 67.5 °, is connected mutually with the base angle of oblique pipeline section.
4. by the waveguide bend for microwave transmission according to claim 3, it is characterized in that the upper end of described vertical pipeline section is provided with adpting flange, hypomere is provided with outward-dipping connection port, and the lateral cross base angle of connection port is 67.5 °, is connected mutually with the base angle of oblique pipeline section.
5., by the waveguide bend for microwave transmission described in claim 1 or 2, it is characterized in that the lateral surface of described oblique pipeline section offers rectangular window, in window, be configured with cover plate.
6., by the waveguide bend for microwave transmission according to claim 5, it is characterized in that described cover plate face is identical with the lateral surface area of oblique pipeline section.
7., by the waveguide bend for microwave transmission described in claim 1 or 2, it is characterized in that described waveguide bend entirety is made up of hard aluminium alloy, or be made up of brass material.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410487485.1A CN104241793A (en) | 2014-09-23 | 2014-09-23 | Bent waveguide used for microwave transmission |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410487485.1A CN104241793A (en) | 2014-09-23 | 2014-09-23 | Bent waveguide used for microwave transmission |
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| CN104241793A true CN104241793A (en) | 2014-12-24 |
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| CN201410487485.1A Pending CN104241793A (en) | 2014-09-23 | 2014-09-23 | Bent waveguide used for microwave transmission |
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Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106450635A (en) * | 2016-12-08 | 2017-02-22 | 江苏贝孚德通讯科技股份有限公司 | Integrated microwave wave guide coupler |
| CN109767963A (en) * | 2018-12-29 | 2019-05-17 | 中国电子科技集团公司第十二研究所 | A kind of klystron with waveguide bend structure |
| CN115383411A (en) * | 2022-09-21 | 2022-11-25 | 西安艾力特电子实业有限公司 | Method for machining bent waveguide tube and bent waveguide tube structure |
| CN116487855A (en) * | 2023-06-20 | 2023-07-25 | 成都沃特塞恩电子技术有限公司 | Adjustable curved waveguide and microwave system |
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| CN101481793A (en) * | 2008-12-26 | 2009-07-15 | 上海拓引数码技术有限公司 | Large area microwave plasma CVD device |
| CN101689694A (en) * | 2007-03-05 | 2010-03-31 | 日本电气株式会社 | Divided-type waveguide tube circuit |
| JP2010206326A (en) * | 2009-02-27 | 2010-09-16 | Kyocera Corp | High-frequency circuit board, and transmitter, receiver, transmitter/receiver, and radar system equipped with the high-frequency circuit board |
| CN102324596A (en) * | 2011-06-09 | 2012-01-18 | 中国工程物理研究院电子工程研究所 | TE01 mode Bend structure of millimeter wave boardband plane mirror type |
| CN202772248U (en) * | 2012-05-30 | 2013-03-06 | 中国工程物理研究院应用电子学研究所 | High transmission efficiency millimeter wave guide |
| CN103018932A (en) * | 2012-12-13 | 2013-04-03 | 中国科学院上海光学精密机械研究所 | High-frequency electro-optic position phase modulator |
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2014
- 2014-09-23 CN CN201410487485.1A patent/CN104241793A/en active Pending
Patent Citations (17)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3072870A (en) * | 1960-07-21 | 1963-01-08 | Microwave Ass | Rectangular waveguide bend |
| US3672202A (en) * | 1970-09-15 | 1972-06-27 | Microwave Dev Lab Inc | Method of making waveguide bend |
| GB2082845A (en) * | 1980-07-29 | 1982-03-10 | Gen Electric Co Ltd | Microwave components |
| JPS62249502A (en) * | 1986-04-23 | 1987-10-30 | Fujitsu Ltd | Production of corner waveguide |
| JPH0172701U (en) * | 1987-10-31 | 1989-05-16 | ||
| EP0893842A3 (en) * | 1997-07-25 | 2000-08-09 | Kyocera Corporation | Laminated aperture antenna and multilayered wiring board comprising the same |
| EP0898322A2 (en) * | 1997-08-22 | 1999-02-24 | Kyocera Corporation | Dielectric waveguide line and its branch structure |
| JPH11274820A (en) * | 1998-03-24 | 1999-10-08 | Kyocera Corp | Branching structure of dielectric waveguide line |
| CN2370572Y (en) * | 1999-04-19 | 2000-03-22 | 中国科学院紫金山天文台 | Assembled wave guide bend |
| JP2003332801A (en) * | 2002-05-15 | 2003-11-21 | Mitsubishi Electric Corp | Bent waveguide |
| CN101243535A (en) * | 2005-08-18 | 2008-08-13 | 奥立孔美国公司 | Optical emission interferometry for PECVD using a gas injection hole |
| CN101689694A (en) * | 2007-03-05 | 2010-03-31 | 日本电气株式会社 | Divided-type waveguide tube circuit |
| CN101481793A (en) * | 2008-12-26 | 2009-07-15 | 上海拓引数码技术有限公司 | Large area microwave plasma CVD device |
| JP2010206326A (en) * | 2009-02-27 | 2010-09-16 | Kyocera Corp | High-frequency circuit board, and transmitter, receiver, transmitter/receiver, and radar system equipped with the high-frequency circuit board |
| CN102324596A (en) * | 2011-06-09 | 2012-01-18 | 中国工程物理研究院电子工程研究所 | TE01 mode Bend structure of millimeter wave boardband plane mirror type |
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| CN103018932A (en) * | 2012-12-13 | 2013-04-03 | 中国科学院上海光学精密机械研究所 | High-frequency electro-optic position phase modulator |
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106450635A (en) * | 2016-12-08 | 2017-02-22 | 江苏贝孚德通讯科技股份有限公司 | Integrated microwave wave guide coupler |
| CN109767963A (en) * | 2018-12-29 | 2019-05-17 | 中国电子科技集团公司第十二研究所 | A kind of klystron with waveguide bend structure |
| CN109767963B (en) * | 2018-12-29 | 2021-04-02 | 中国电子科技集团公司第十二研究所 | Klystron with bent waveguide structure |
| CN115383411A (en) * | 2022-09-21 | 2022-11-25 | 西安艾力特电子实业有限公司 | Method for machining bent waveguide tube and bent waveguide tube structure |
| CN115383411B (en) * | 2022-09-21 | 2024-04-30 | 西安艾力特电子实业有限公司 | Method for processing bent waveguide tube and bent waveguide tube structure |
| CN116487855A (en) * | 2023-06-20 | 2023-07-25 | 成都沃特塞恩电子技术有限公司 | Adjustable curved waveguide and microwave system |
| CN116487855B (en) * | 2023-06-20 | 2023-09-26 | 成都沃特塞恩电子技术有限公司 | Adjustable curved waveguide and microwave system |
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Application publication date: 20141224 |
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