CN104241076B - 轴向磁离子源及相关电离方法 - Google Patents
轴向磁离子源及相关电离方法 Download PDFInfo
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- CN104241076B CN104241076B CN201410222709.6A CN201410222709A CN104241076B CN 104241076 B CN104241076 B CN 104241076B CN 201410222709 A CN201410222709 A CN 201410222709A CN 104241076 B CN104241076 B CN 104241076B
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- ion
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- ionisation chamber
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- 238000010894 electron beam technology Methods 0.000 claims abstract description 60
- 238000010884 ion-beam technique Methods 0.000 claims abstract description 25
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- 238000000034 method Methods 0.000 claims description 38
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Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J49/00—Particle spectrometers or separator tubes
- H01J49/02—Details
- H01J49/10—Ion sources; Ion guns
- H01J49/14—Ion sources; Ion guns using particle bombardment, e.g. ionisation chambers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J27/00—Ion beam tubes
- H01J27/02—Ion sources; Ion guns
- H01J27/022—Details
- H01J27/024—Extraction optics, e.g. grids
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J27/00—Ion beam tubes
- H01J27/02—Ion sources; Ion guns
- H01J27/20—Ion sources; Ion guns using particle beam bombardment, e.g. ionisers
- H01J27/205—Ion sources; Ion guns using particle beam bombardment, e.g. ionisers with electrons, e.g. electron impact ionisation, electron attachment
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J49/00—Particle spectrometers or separator tubes
- H01J49/02—Details
- H01J49/10—Ion sources; Ion guns
- H01J49/14—Ion sources; Ion guns using particle bombardment, e.g. ionisation chambers
- H01J49/147—Ion sources; Ion guns using particle bombardment, e.g. ionisation chambers with electrons, e.g. electron impact ionisation, electron attachment
Landscapes
- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Physics & Mathematics (AREA)
- Combustion & Propulsion (AREA)
- Plasma & Fusion (AREA)
- Analytical Chemistry (AREA)
- Optics & Photonics (AREA)
- Electron Tubes For Measurement (AREA)
- Other Investigation Or Analysis Of Materials By Electrical Means (AREA)
- Electron Sources, Ion Sources (AREA)
- Pharmaceuticals Containing Other Organic And Inorganic Compounds (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US13/925,623 | 2013-06-24 | ||
| US13/925,623 US9117617B2 (en) | 2013-06-24 | 2013-06-24 | Axial magnetic ion source and related ionization methods |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN104241076A CN104241076A (zh) | 2014-12-24 |
| CN104241076B true CN104241076B (zh) | 2018-06-15 |
Family
ID=50685801
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201410222709.6A Active CN104241076B (zh) | 2013-06-24 | 2014-05-23 | 轴向磁离子源及相关电离方法 |
Country Status (6)
| Country | Link |
|---|---|
| US (1) | US9117617B2 (enExample) |
| EP (1) | EP2819144B1 (enExample) |
| JP (1) | JP6423615B2 (enExample) |
| CN (1) | CN104241076B (enExample) |
| GB (1) | GB2517830B (enExample) |
| IT (1) | ITTO20140088U1 (enExample) |
Families Citing this family (17)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US9214318B1 (en) * | 2014-07-25 | 2015-12-15 | International Business Machines Corporation | Electromagnetic electron reflector |
| US9721777B1 (en) | 2016-04-14 | 2017-08-01 | Bruker Daltonics, Inc. | Magnetically assisted electron impact ion source for mass spectrometry |
| US10515789B2 (en) | 2017-03-28 | 2019-12-24 | Thermo Finnigan Llc | Reducing detector wear during calibration and tuning |
| US10490396B1 (en) | 2017-03-28 | 2019-11-26 | Thermo Finnigan Llc | Ion source with mixed magnets |
| US20180286656A1 (en) * | 2017-03-28 | 2018-10-04 | Thermo Finnigan Llc | Systems and methods for electron ionization ion sources |
| US10541122B2 (en) * | 2017-06-13 | 2020-01-21 | Mks Instruments, Inc. | Robust ion source |
| KR101886755B1 (ko) * | 2017-11-17 | 2018-08-09 | 한국원자력연구원 | 다중 펄스 플라즈마를 이용한 음이온 공급의 연속화 시스템 및 방법 |
| KR101983293B1 (ko) | 2017-12-20 | 2019-05-28 | 주식회사 코어밸런스 | 고성능 축방향 전자충돌 이온원 |
| GB201810824D0 (en) | 2018-06-01 | 2018-08-15 | Micromass Ltd | An outer source assembly and associated components |
| GB2576169B (en) * | 2018-08-07 | 2022-03-09 | Applied Science & Tech Solutions Ltd | Mass spectrometry system |
| JP7300197B2 (ja) * | 2019-04-03 | 2023-06-29 | 国立研究開発法人量子科学技術研究開発機構 | イオン源と、それを備えた多種イオン生成装置 |
| US20210175063A1 (en) | 2019-12-10 | 2021-06-10 | Thermo Finnigan Llc | Axial ci source - off-axis electron beam |
| CN114566420B (zh) * | 2020-11-27 | 2025-08-08 | 株式会社岛津制作所 | 质量分析装置 |
| DE112022003505T5 (de) * | 2021-07-12 | 2024-04-25 | Quadrocore Corp. | Elektronenstossionisation innerhalb von hochfrequenz-einschlussfelder |
| GB2631100A (en) | 2023-06-19 | 2024-12-25 | Thermo Fisher Scient Bremen Gmbh | Axial ion source |
| US20250037985A1 (en) * | 2023-07-27 | 2025-01-30 | Thermo Finnigan Llc | Axial ion source with magnetic field adjustment |
| CN119049953B (zh) * | 2024-08-22 | 2025-06-24 | 上海仪电分析仪器有限公司 | 一种提高质谱仪分辨率和灵敏度的ei离子源及控制方法 |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3924134A (en) * | 1974-11-29 | 1975-12-02 | Ibm | Double chamber ion source |
| SU1308091A1 (ru) * | 1985-04-01 | 1988-06-07 | Предприятие П/Я М-5881 | Источник ионов |
| US5317161A (en) * | 1991-05-24 | 1994-05-31 | Ims Ionen Mikrofabrikations Systeme Gesellschaft M.B.H. | Ion source |
| CN101868114A (zh) * | 2009-04-16 | 2010-10-20 | 西门子公司 | 离子源及其电极以及将待电离的气体导入离子源的方法 |
Family Cites Families (18)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS60240039A (ja) | 1984-05-11 | 1985-11-28 | Ryuichi Shimizu | イオン銃 |
| JPH04147978A (ja) * | 1990-10-11 | 1992-05-21 | Seiko Instr Inc | イオンビーム支援ｃｖｄ膜の形成方法 |
| US5340983A (en) * | 1992-05-18 | 1994-08-23 | The State Of Oregon Acting By And Through The State Board Of Higher Education On Behalf Of Oregon State University | Method and apparatus for mass analysis using slow monochromatic electrons |
| US5384465A (en) * | 1993-09-17 | 1995-01-24 | Applied Materials, Inc. | Spectrum analyzer in an ion implanter |
| US5412207A (en) * | 1993-10-07 | 1995-05-02 | Marquette Electronics, Inc. | Method and apparatus for analyzing a gas sample |
| US5942752A (en) | 1996-05-17 | 1999-08-24 | Hewlett-Packard Company | Higher pressure ion source for two dimensional radio-frequency quadrupole electric field for mass spectrometer |
| GB9813327D0 (en) * | 1998-06-19 | 1998-08-19 | Superion Ltd | Apparatus and method relating to charged particles |
| US7259019B2 (en) * | 2002-03-11 | 2007-08-21 | Pawliszyn Janusz B | Multiple sampling device and method for investigating biological systems |
| US7060987B2 (en) | 2003-03-03 | 2006-06-13 | Brigham Young University | Electron ionization source for othogonal acceleration time-of-flight mass spectrometry |
| EP1901332B1 (en) * | 2004-04-05 | 2016-03-30 | Micromass UK Limited | Mass spectrometer |
| US7071466B2 (en) * | 2004-04-19 | 2006-07-04 | Ngx, Inc. | Mass spectrometry system for continuous control of environment |
| US7291845B2 (en) | 2005-04-26 | 2007-11-06 | Varian, Inc. | Method for controlling space charge-driven ion instabilities in electron impact ion sources |
| US7807963B1 (en) * | 2006-09-20 | 2010-10-05 | Carnegie Mellon University | Method and apparatus for an improved mass spectrometer |
| US8395112B1 (en) * | 2006-09-20 | 2013-03-12 | Mark E. Bier | Mass spectrometer and method for using same |
| US9594879B2 (en) * | 2011-10-21 | 2017-03-14 | California Instutute Of Technology | System and method for determining the isotopic anatomy of organic and volatile molecules |
| US10186410B2 (en) * | 2012-10-10 | 2019-01-22 | California Institute Of Technology | Mass spectrometer, system comprising the same, and methods for determining isotopic anatomy of compounds |
| US8822912B2 (en) | 2012-12-19 | 2014-09-02 | Schlumberger Technology Corporation | Ion source having increased electron path length |
| US9029797B2 (en) * | 2013-07-25 | 2015-05-12 | Agilent Technologies, Inc. | Plasma-based photon source, ion source, and related systems and methods |
-
2013
- 2013-06-24 US US13/925,623 patent/US9117617B2/en active Active
-
2014
- 2014-05-12 EP EP14167844.1A patent/EP2819144B1/en active Active
- 2014-05-19 JP JP2014103382A patent/JP6423615B2/ja active Active
- 2014-05-23 CN CN201410222709.6A patent/CN104241076B/zh active Active
- 2014-06-20 GB GB1411010.0A patent/GB2517830B/en not_active Expired - Fee Related
- 2014-06-20 IT ITTO2014U000088U patent/ITTO20140088U1/it unknown
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3924134A (en) * | 1974-11-29 | 1975-12-02 | Ibm | Double chamber ion source |
| SU1308091A1 (ru) * | 1985-04-01 | 1988-06-07 | Предприятие П/Я М-5881 | Источник ионов |
| US5317161A (en) * | 1991-05-24 | 1994-05-31 | Ims Ionen Mikrofabrikations Systeme Gesellschaft M.B.H. | Ion source |
| CN101868114A (zh) * | 2009-04-16 | 2010-10-20 | 西门子公司 | 离子源及其电极以及将待电离的气体导入离子源的方法 |
Non-Patent Citations (1)
| Title |
|---|
| 《Effect of magnetic field in electron-impact ion sources and simulation of electron trajectories》;Park Chang et al;《Review of Scientific Instruments》;20060822;第77卷(第8期);第2页左栏1段-右栏第1段、以及附图3 * |
Also Published As
| Publication number | Publication date |
|---|---|
| EP2819144B1 (en) | 2019-11-13 |
| GB2517830B (en) | 2018-04-11 |
| US20140375209A1 (en) | 2014-12-25 |
| JP2015008127A (ja) | 2015-01-15 |
| GB201411010D0 (en) | 2014-08-06 |
| JP6423615B2 (ja) | 2018-11-14 |
| EP2819144A2 (en) | 2014-12-31 |
| ITTO20140088U1 (it) | 2015-12-20 |
| GB2517830A (en) | 2015-03-04 |
| CN104241076A (zh) | 2014-12-24 |
| US9117617B2 (en) | 2015-08-25 |
| EP2819144A3 (en) | 2015-04-01 |
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| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant |