CN104237672B - Multifunctional modular high current electronic beam analyzing system - Google Patents

Abstract

The invention discloses a high current electronic beam analyzing system. The high current electronic beam analyzing system comprises a base module (B) arranged in the horizontal direction and a plurality of function modules which are sequentially arranged on the base module (B) in the horizontal direction. All the function modules are coaxial and have a unified interface part. The base module (B) comprises an optical guide rail (B1) and a knife rest supporting bracket (B2) arranged on the optical guide rail (B1). All the function modules are arranged on the optical guide rail (B1) by the aid of the knife rest supporting bracket (B2). The function modules comprise the electronic gun assembling module (G), the electronic beam transmitting process simulation measuring module (F), the electronic beam energy spectrum measuring module (E) and the electronic beam cross section measuring module (M). By means of the high current electronic beam analyzing system, the function modules can be replaced conveniently, meanwhile, the mounting position of each module does not need to be adjusted again for maintaining centering, and thus the high current electronic beam analyzing functionality and convenience are greatly improved.

Description

Multifunctional modular high current electronics notes analysis system

Technical field

The present invention relates to the detection high current electronics of vacuum electronics field, more particularly, to microwave electron tube research Rifle, the electron-optical properties of high current electronics note transmitting procedure and electronics note longitudinal direction can dissipate the high current electronics note analysis system of characteristic, Including electron-optical detecting and analysing system.

Background technology

Figure 1A is the part-structure figure of the high current electronics note the Electron-Optics Analysis instrument for being traditionally used for microwave electron tube. Figure 1B is the structural representation of electron gun system therein.From Figure 1A, the high current electronics notes the Electron-Optics Analysis instrument bag Electron gun system 1 is included, electron gun system 1 is used to produce high current electronics note, and incide electric float and move pipe 2.And electron gun system System 1 and electronics drift tube 2 are longitudinal direction and erect setting, and electronics drift tube 2 is arranged on the top of electron gun system 1, electron gun system System 1 is to top transmitting high current electronics note.

As shown in Figure 1B, electron gun system 1 includes electron gun, main vacuum cavity, external tapping, high-voltage feedback power head, heater, pottery Ceramic ring part, cathode heater lead etc..Electron gun includes grid, negative electrode, anode, and negative electrode, heater, grid are fixed on by ceramic ring The bottom of main vacuum chamber, and be allowed to insulate with the locular wall of main vacuum chamber.High pressure of the cathode heater lead by main vacuum cavity bottom Feed head draws main vacuum cavity, and grid and negative electrode are idiostatic structures.High-voltage feedback power head is only capable of pressure 10kV or so；Anode Head assembly is placed on another large flange disk at the top of main vacuum cavity.Negative electrode Zhiyang pole span is from grid is to cathode distance All it is fixed, supports what the length of ring was determined by the transition of negative electrode, grid.

Existing high current electronics note analyser as shown in FIG. 1A and 1B only has single simulation heat to survey the electronics that size is fixed Rifle structure, and the hot examining system of simulation that electronics under magnetic focusing notes transmitting procedure is lacked all the time, and research controlling magnetic field distribution, mistake The electronics for crossing area's matching notes the actual measurement system of transmitting procedure characteristic.More lack the note power spectrum of the electronics after transmission and the heat survey point that can be dissipated Analysis system.

2012, applicant of the present invention proposed a kind of " removable die opening electricity that analyser is noted for high current electronics Sub- gun system " (Chinese Patent Application No. is 201210132572.6), system solves the problem heat survey simulation process and is fixed with anode It is motionless for basic point, can adjust during heat is surveyed cathode anode spacing from, grid (or focusing electrode) anode spacing from electron gun Hot geodesic structure, defines one of design studies electron gun preferred series satisfactory texture.Fig. 2A and Fig. 2 B are respectively the high current electronics The structural representation of the electron gun system and its concentric shaft assembly of note analyser.Fig. 2A is refer to, the electron gun system includes：It is main Vacuum cavity GB301 and the electron gun in the main vacuum cavity GB301.The electron gun include an anode GB7, one Negative electrode GB8 and grid G B9.The main vacuum cavity GB301 includes one for by the intercepting and capturing electron stream of the anode GB7 Draw the low voltage feeder head GB17 outside the main vacuum cavity GB301.The main vacuum cavity GB301 transverse horizontals placement, bag An observation window GB1 is included, which is used for the distance for observing and measuring the negative electrode GB8 and grid G B9.The anode GB7 passes through one Individual anode fixing device GB303 is fixed on the front end of the main vacuum cavity GB301.

The electron gun system also includes a concentric shaft assembly GB302, and which is horizontally inserted the main vacuum cavity GB301, also, its one end, in the main vacuum cavity GB301, the other end is extended outside the main vacuum cavity GB301, Including：Concentric shafts GB4 and outer concentric shafts GB5 of grid in negative electrode, concentric shafts GB4 and the outer concentric shafts of the grid in the negative electrode It is nested inside and outside GB5.The one end of concentric shafts GB4 in main vacuum cavity GB301 in the negative electrode, for fixing the negative electrode GB8；The one end of outer concentric shafts GB5 of the grid in main vacuum cavity GB301, for fixing grid G B9.

Electron gun system also includes that an optical table GB305, the optical table GB305 are located at the main vacuum cavity The outside of GB301, and positioned at the lower section of the concentric shaft assembly GB302, for supporting and positioning the concentric shaft assembly GB302.Optical table GB305 includes negative electrode optical table GB13 and grid optical table GB14, and which is respectively used to support institute Concentric shafts GB4 and outer concentric shafts GB5 of grid in negative electrode are stated, and is allowed to be moved horizontally in axial direction respectively, also, described the moon Pole optical table GB13 is on the grid optical table GB14.

Said system can note the GB modules of one of the electron gun assembly section module of analysis system as high current electronics Mobile die opening electron gun general-purpose system, but be the absence of the dissection tube electron gun to fixing each electrode size or float with itself Move the electron gun load module of the real pipe of dissection of the magnetic focusing structure that pipe has been adapted to even with itself.

2012, applicant of the present invention also proposed a kind of " measuring system for vacuum electron device power spectrum " (China Number of patent application is the energy spectrum analysiss for 201210132372.0) solving general microwave tube electron tube electronics note, also can shape Into the standard module EA of a measurement power spectrum.Fig. 3 A, 3B high current electronics note spectral measurement system schematic and its side view, figure 3C is the double aperture slit part sectioned view that the high current electronics notes spectral measurement system.

As shown in fig.3 a 3 c, the electronics note spectral measurement system includes a fine vacuum cavity EA101, two pole ferroelectricities Magnet arrangement EA201, double aperture slit structure EA301, YAG detection system EA401 and CCD camera and control system EA501；It is described Fine vacuum cavity is the titanium alloy of horizontal positioned or without flattened rectangular structure made by magnetic metal material；Vacuum cavity EA101 With front port EA1, rear port EA2, double aperture slit copper body EA3, observation window EA6.Tested electronics note enters cavity by front port EA101.The two pole ferroelectricity magnet arrangement EA201 is stuck in that to produce the uniformity between flattened rectangular vacuum cavity above and below inclined The uniform magnetic field perpendicular to horizontal plane within 1% is differed from, by the magnetic field intensity for adjusting electromagnet structure, is connect before making fine vacuum cavity The electronics note that mouth ring flange is entered through after double aperture slit EA301 in magnetic field can produce 90 degree of deflections and beat in YAG detector EA401 On, and field homogeneity covers whole flattened rectangular cavity EA101.

Double aperture slit structure EA301 is placed in the cavity of EA101 in tracks, and it connects double aperture slit copper body EA3 And EA3 is driven perpendicular to level on electronics note direct of travel or so precise motion；Double aperture slit structure EA301 includes that double aperture slit is tied Structure kinematic axiss EA5, is marked with the collimation pair that the electronics of larger angle of flare is entered by the electronics that limits that two double aperture slit copper bar EA4 are formed Slit.The double aperture slit width is wide by choosing between 0.1-0.5mm.

YAG detection systems EA401 are fixed on double aperture slit copper body EA3 shown in Fig. 3 A, and in YAG detectors 401 The distance of the heart to double aperture slit copper body EA3 is equal with the distance of double aperture slit centrage to YAG detector EA401.Therefore, by double narrow The microelectronics note of seam defines discrete electronics note density on the YAG crystal of YAG detector EA401 through uniform magnetic field deflection Spectral line.

The CCD camera and its control system EA501 face YAG detector EA401 by observation window EA6.The control System EA501 includes the optical table EA8 disposed on compliant platform EA9 and compliant platform.CCD camera is placed in optical table On EA8；On YAG chips of the CCD camera by computer control with incident electronics note pulse modulation voltage synchronous waveform collection EA401 Image.

But said system EA is formed for the extremely strong magnetic focusing electron tube adiabatic compression of such as one class of gyrotron The electronics note of strong rotation cannot be used.Because electronics has the strong characteristic that advance shaft rotation is noted around electronics in electronics note, So that the electronics that heat surveys electronics note in experiment is difficult to through double aperture slit structure, therefore, it is necessary to develop the measurement of other approach The electronics note that gyrotron type is rotated around advance shaft strongly can the scattered module of Prepenem.

2012, applicant of the present invention also proposed " a kind of high current electronics note analyser measurement electronics note section it is logical With system " (Chinese invention patent application number 201210132510.5), solve modulation voltage is noted up to 100kV electronics from low to high Under, the general-purpose system of electronics note section current intensity distribution is measured in larger electron beam channel.

Fig. 4 A, 4B are the general-purpose system structural representations that the measurement electronics notes section, and Fig. 4 B are the top views of Fig. 4 A.It is described General-purpose system includes that fine vacuum cavity MA101, YAG crystal counter MA201, a YAG cylinder are supported and motion MA301, YAG mobile jib motion positions mechanism MA401, an optical observation camera component MA501.

The fine vacuum cavity MA101 is cylinder, and transverse horizontal placement, and its one end has including front port large flange disk MA1, for connecting electron gun settlement or magnetically focused electronics note transmission range or the dissection pipe with magnetic focusing system itself, experiment Guard system, to receive the incidence of high current electronics note, main observation window MA2 is passed for the optical imagery by YAG crystal counter MA201 Vacuum cavity is passed out to optical observation camera component MA501.Observation window MA16, front observation window MA17 are respectively intended to observation afterwards YAG cylinder supports motor process and renewal part with motion MA301 and YAG crystal counter MA201 to use.The height Vacuum cavity MA101 also includes a high-vacuum exhaust system MA102, by mechanical pump, molecular pump, ionic pump, high vacuum valve And high vacuum pipe composition.During working condition, the vacuum of cavity MA101 can reach 1 × 10^-6Pa。

Fig. 4 C are X-ray bremsstrahlung YAG crystal counter structural representation.The YAG detectors MA201 is located at vacuum chamber Cavity can be stretched out by MA301 controls in vivo to reach on the electron injection rays footpath of measured device, electronics can be noted section electric current by it Intensity distribution image is by the proportional 550nm green-yellow light intensity images of intensity that X-ray bremsstrahlung is converted on YAG crystal. MA201 includes the YAG crystal MA3 for mixing Ce, and molybdenum sheet MA4 is disposed before crystal.The detecting structure can be implemented to 20-100kV high currents Electronics note section measures.Preferred YAG wafer thickness 0.05mm～0.5mm, molybdenum sheet are thick 20 μm～50 μm, so as to detection Electronics notes spatial resolution up to 0.05mm.

The YAG cylinder is supported and motion MA301, in fine vacuum cavity MA101, for visiting to YAG crystal Survey its horizontal movement of device MA201 supporting drives and positioning.YAG cylinder is supported and includes YAG cylinder MA5 with motion MA301, sliding Dynamic support MA6, fine vacuum precision optics guide rail MA7, wherein YAG prop up cylinder MA5 by making without magnetic metal material double-skin duct, are One hollow tube element, inner tube constitute an optical channel, and carry circulating water cooling system.The end of YAG cylinder MA5 is solid Being scheduled on can be along the sliding support MA6 that guide rail MA7 slides, and fine vacuum precision optics guide rail MA7 is fixed on the bottom of cavity MA101 again Portion.The sliding support MA6 is coupled and relatively can be slided with fine vacuum precision optics guide rail MA7, so as to YAG cylinder MA5 Can be slided on guide rail MA7 by sliding support MA6.Preferably, the central axis of YAG cylinder MA5 and fine vacuum cavity Within the central axis concentricity of MA101 is 0.05mm.

The YAG mobile jibs motion positions mechanism MA401 and optical observation camera component MA501 are all located at fine vacuum cavity Outside MA101.Wherein YAG mobile jibs motion positions mechanism MA401 is used to control YAG cylinder support and motion MA301 motions And positioning, including optical table MA8, servomotor MA9, YAG mobile jib MA11 and rihid coupling MA14.YAG mobile jib MA11's Motion is to control motion, and YAG mobile jib MA11 by the optical table MA8 outside fine vacuum cavity MA101, servomotor MA9 Arranged parallel in the horizontal plane with YAG cylinder MA5, YAG mobile jib MA11 front ends are put in fine vacuum cavity MA101, with Its rihid coupling MA14 connection sliding support MA6 into an angle of 90 degrees.The motion of mobile jib MA11 drives sliding support MA6, makes YAG Prop up cylinder MA5 to move along fine vacuum precision optics guide rail MA7, it is preferred that within running fix precision is 0.05mm.

The optical observation camera component MA501, for detecting to the optical imagery that YAG detectors MA201 is produced, Including right angle prism MA10, telescope MA15, CCD camera MA12, servo-actuated optical table MA13.Compliant platform MA13 can be three-dimensional Adjust, on big optical table MA8, and be synchronized with the movement with YAG mobile jib MA11.The optics of the YAG cylinder MA5 composition leads to Road is used to transmit the optical imagery excited on YAG crystal, makes the image focusing on YAG detector MA201 exist after light path is mixed up It is lockable telescope MA15, each focus control part of CCD camera MA12 after in CCD camera MA12, makes YAG detector MA201 It is synchronized with the movement when each electronics note section is detected, keeps good focusing.Whole optical observation camera component MA501's Light path central axis is concentric with the central axis of fine vacuum cavity MA101 height.The light path central axis of photograph structure is by straight Angle prism MA10 turn 90 degrees the main observation window MA2 for facing fine vacuum cavity MA101 partially, and with fine vacuum chamber central axis Concentricity is synchronized with the movement up to optical table described in 0.05mm with YAG mobile jibs.

The general-purpose system in the measurement electronics note section is by computer programization control servomotor motion, according to input rule Fixed spacing, pointwise position the position that detected electronics notes section, synchronously provide trigger and open pulse high modulator electricity Pressure goes out pulse electronics note；The molybdenum sheet MA4 of high-pressure electronic note bombardment YAG detector MA201 produces X-ray, and this X-ray is proportionally Electronics is noted into position shape and the X-ray intensity image of X-ray bremstrahlen is converted into electric current distribution, and excite YAG crystal, now YAG defines the light intensity map picture of the respective wavelength 550nm green-yellow light proportional to the distribution of X-ray intensity image again；Therefore, YAG Intensity image shown by crystal also just shows the position shape and current density distributing figure picture of proportional electronics note.Spatial discrimination Rate is up to 0.05mm；Electronics note sectional position running fix precision 0.1mm for being detected.

The general-purpose system in above-mentioned measurement electronics note section can be used to solve 100kV or so high modulations voltage electronic from low to high Noting carries out the test analysis formation detection module MA main bodys of electronics note electro-optical performance in the big passage not less than φ 45mm. But as current high frequency, hyperfrequency microwave electron tube are developed rapidly with the millimetre-sized tiny electron beam channel of diameter Electronics is noted, and detects the detection system of its electro-optical performance, it is necessary to design and develop the new detection system for this device, as Electronics notes analyser New function module.

The content of the invention

(1) technical problem to be solved

Existing high current electronics notes the problem of analysis system presence：

1st, only the application mini system with individual feature out of the ordinary does not set up many work(to existing high current electronics note analysis system The electronics that electronics under the electron gun electro-optical performance, magnetic focusing that different measured devices continuously can measure notes transmitting procedure can be directed to Optical characteristics；And last electronics note energy spectrum analysiss electronics notes the multifunctional modular high current electricity of the scattered distribution character of axial velocity Son note analyzer system.

Although the high current electronics for " electron gun of removable die opening " the 2, having pointed out notes the electron gun system of analyser System, can form one of good module that the heat for electron gun optimum decision system surveys design electron gun structure, but which still lacks and is directed to The real tubular construction for dissecting pipe, experiment tube and the electronics note magnetic focusing structure with adaptation itself removes the formation after collector Measured device constitutes new module problem.

3rd, the existing measuring system that can be dissipated for electronics note in vacuum electron device solves the energy of general microwave device Analysis is dissipated, but for the gyrotron microwave electronic device of some current development, or some strong magnetic focusing electronics injection systems, due to Electronics note electronics is extremely difficult must be using for such new modular system by its double aperture slit colimated light system.

4th, although the general-purpose system in existing high current electronics note analyser measurement electronics note section solves detection diameter More than 45mm electronics is noted the test of electro-optical performance in big passage and can form good measurement electronics note section, but he can not Electronics note electricity in the millimetre-sized tiny electron beam channel of diameter having in solving current high frequency, hyperfrequency microwave electron tube The detection of sub- optical property.

5th, existing high current electronics note analyser lacks electronics note transfer function analogue measurement system module always, makes synthesis Property high current electronics note analyser lacked and research and analyse electronics in microwave electron tube and note the transmission under magnetic focusing state Characteristic, the research of magnetic field matching under actual hot examining system, this research to microwave electron tube is very important.

6th, present high current electronics note analysis system does not have remote automation control system and experimentation monitoring, accident alarming Safe-guard system.The control of more no calculation procedure to motor system in experiment, electronics note transmitting, data image automatic data collection, Process and experimental result includes that two dimension, 3-D view such as show, print at the Automated condtrol processing system of overall process.

(2) technical scheme

For the above-mentioned problems in the prior art, the present invention proposes that a kind of high current electronics notes analysis system, is included in The base module disposed in horizontal direction, and multiple functional modules are disposed successively along horizontal direction in the base module, Each functional module is coaxial and with unified interface unit.

Specific embodiment of the invention, the base module include optics guide rail and the knife being placed on optics guide rail Frame supporting support, each described functional module are furnished with the knife rest supporting support met with its size, each described work( Energy module is placed on the optics guide rail by the knife rest supporting support.

Specific embodiment of the invention, the optics guide rail are double guide rails, the knife rest supporting support with it is described Optics guide rail directly can be installed dismountable.

Specific embodiment of the invention, the knife rest supporting support can be adjusted on three-dimensional.

Specific embodiment of the invention, the optics guide rail include clump ground, optics guide rail base, level Double guide rails；Wherein, the clump ground build the front portion of the optics guide rail base, middle part, rear portion, each optics guide rail respectively in Pedestal all carries Flos Nelumbinis cast iron base wad, is locked with the screw rod in buried clump with large-scale nut.

Specific embodiment of the invention, the knife rest supporting support include support board structure and are fixed on the supporting plate Supporting structure in structure；The support board structure for carrying the supporting structure, lead perpendicular to the optics in the horizontal plane by edge The direction movement of rail；The supporting structure is used for each functional module of fixed support.

Specific embodiment of the invention, the support board structure include bottom bracket and upper pallet, the bottom There are the double guide-track grooves coincideing with the optics guide rail bottom surface of supporting plate, and there is a round handle hand crank side, and the circle handle is shaken manually For making the support board structure move along the optics guide rail.

Specific embodiment of the invention, the upper pallet are carried in the horizontal plane perpendicular to the optics guide rail Direction carriage, in the upper pallet have crank, by shake crank, the upper pallet can be made at the bottom Move in the direction perpendicular to the optics guide rail on portion's supporting plate.

Specific embodiment of the invention, the supporting structure are fixed on the support by the pillar that band heightens jackscrew On hardened structure；The supporting structure respectively has a crescent-shaped bracket along the two ends in the direction of the optics guide rail, and which is used to fix Each functional module is supported, has the central shaft for adjusting the functional module fixed by they in two sides of the crescent-shaped bracket The level-off jackscrew of line angle degree.

Specific embodiment of the invention, the functional module include that electron gun load module and electronics note section are surveyed Amount module, the electron gun load module are used to install electron gun, are to produce electron gun, launch the module of high current electronics note； The electronics note section gauge module is used to measure different cross section position note section electric current density in the electronics note traveling process Distribution.

Specific embodiment of the invention, the functional module also include that electronics notes transmitting procedure analogue measurement mould Block, which is located between the electron gun load module and electronics note section gauge module.

Specific embodiment of the invention, the functional module also include that electronics notes spectral measurement module, and which is located at Between the electron gun load module and electronics note section gauge module.

Specific embodiment of the invention, the functional module also include that electronics notes transmitting procedure analogue measurement module Spectral measurement module, also, the electron gun load module, electronics note transmitting procedure analogue measurement module, electronics are noted with electronics Note spectral measurement module and electronics note section gauge module are arranged in order.

(3) beneficial effect

Compared with prior art, the invention has the beneficial effects as follows：

1st, the present invention breaches existing high current electronics note analyser only other measurement electron gun electro-optical performance, The note analyser of the high current electronics with multifunctional modular is proposed, can targetedly be simulated, be detected microwave electron tube electricity Sub- rifle, magnetic focusing electronics note the electro-optical performance of transmitting procedure, and measurement or the axial energy of electronics note axial velocity profile The high current electronics note analyser of the integration capability of the characteristic of amount distribution.

2nd, the invention provides the long 3.5m of the large-scale pair of guide rail, can more than 2.5 tons of load-bearing stable optical table and can fit The supporting structure on each functional module size, the knife rest supporting plate of height and supporting plate is answered, can be effectively with concentric detector by each mould The mechanical concentric axis of block, magnetic field center axis, three axle of field center axis be uniformly adjusted to in analyser system of subject Heart dead in line.Allow analyzer system rapid for the different module of different, the measured function selecting of measured device Set up high current electronics note analyser with strong points.

Before and after each module design of the present invention, interface is all the large flange disk using corresponding uniform sizes, edge of a knife anaerobic Copper ring or vacuum rubber sealing.Therefore the present invention conveniently can be set up rapidly, and each function continuously can be measured successively.

3rd, the present invention proposes general big molded line bag Uniform magnetic focusing electronics note drift tube unexistent in the past, penetrating receipts The analogue measurement system of collector, i.e. line bag magnetic focusing electronics note transfer function analogue measurement system FA module.Mould is realized first Intend the electro-optical performance of electronics note of the detection in transmitting procedure in microwave electron tube system.

4th, the present invention proposes and can solve some high-intensity magnetic fields to microwave electron tube and focus on electronics note with strong rotation It is difficult to a difficult problem for energy spectrum testing system EA block regions test is noted with electronics, that is, proposes electronics note axial velocity measuring system EB mould Block.

5th, the present invention proposes only millimetre-sized with electronics note drift tube for high frequency, hyperfrequency microwave electron tube Electron beam channel carries out the high current electronics of electronics note section performance measurement and notes small area fiber YAG probe detections structure MB mould Block.

6th, the present invention has and can guarantee that experiment including the remote automation electric operation system including security alarm safeguards system Personnel and analyzer system safety ensure that experiment is smoothed out in an experiment.

7th, the present invention have motor control with industrial computer as core, data acquisition processing system can manually or programme-control oneself The operation of dynamicization ground carries out testing and automatic data collection processes required image and data, and use it is two-dimentional needed for electron-optical Software Create, The three-dimensional electronic note distributed image of transmitting procedure beam current density, Energy distribution image, image and relevant electronics can be dissipated Optical characteristics data, finally automatically generates laboratory report and shows and printout.

In sum, the present invention propose in double guide rail foundation level optical tables and knife rest supporting structure system B modules be On the basis of set up targeted function high current electronics note analyser.Selectable functions module have GA, GB, FA, EA, EB, MA, MB etc., it is possible to set up and transmitting procedure is noted from electron gun to electronics up to last electronics note energy and the analysis that can be dissipated, can be continuous Heat surveys the multifunctional modular high current electronics note analyser researched and analysed.This dissects pipe, experiment tube to microwave electron tube Heat surveys analysis and the electron optic Each part of new device, production routine, technological problemses are researched and solved there is provided important Heat surveys scientific instrument.

Description of the drawings

Figure 1A, Figure 1B are respectively prior art high current electronics note analyser schematic diagram and electron gun system schematic diagram；

Fig. 2A, 2B be respectively prior art " the high current electronics note analyser electron gun general-purpose system of removable die opening " and Its concentric shafts modular construction schematic diagram, i.e. GB module diagrams；

Fig. 3 A, 3B are that prior art high current electronics notes spectral measurement system schematic and its side view, i.e. EA modules signal Figure；

Fig. 3 C are double aperture slit part sectioned views；

Fig. 4 A, 4B are that prior art measurement electronics note section general system diagram and its top view, i.e. MA modules are illustrated Figure；

Fig. 4 C are X-ray bremsstrahlung YAG crystal counter structural representation；

Fig. 5 A multifunctional modular high current electronics of the present invention notes analysis system circuit theory schematic diagram；

Fig. 5 B are the dimensional structure diagrams of the forceful electric power note analysis system of a specific embodiment of the present invention；

Fig. 5 C are the longitudinal profile schematic diagrams of the forceful electric power note analysis system of the embodiment；

Fig. 6 A, 6B are the double guide rail foundation level optical tables of the present invention and knife rest supporting construction schematic diagram；

Fig. 7 is the schematic diagram that the magnetically focused electronics of line bag notes transfer function analogue measurement module；

Fig. 8 is the second high current electronics note axial velocity measurement module schematic diagram of the present invention；

Fig. 9 A, 9B are the second electronics note transmitting procedure simulations for small area fiber YAG probe detections of the present invention Measurement module front schematic view and its top view；

Fig. 9 C optical fiber YAG probes, flexible optical fibre cable, optical cable image output detection structural representation；

Fig. 9 D optical fiber YAG sonde configuration schematic diagrams.

Specific embodiment

In order to solve above-mentioned technical problem, the present invention proposes that a kind of multi-functional modularity high current electronics notes analysis system. Fig. 5 A are the integrated stand compositions of the system.As shown in Figure 5A, the system includes a base module for disposing in the horizontal direction B, in base module B, dispose multiple functional modules, functional module to include the electronics being arranged in order successively along horizontal direction Rifle load module G, electronics note transmitting procedure analogue measurement module F, electronics note spectral measurement module E and electronics note section gauge mould Block M (shows in Fig. 5 A).Also, each functional module is coaxial, i.e., its centrage overlaps.

The electron gun load module G, electronics note transmitting procedure analogue measurement module F, electronics note spectral measurement module E and Unified interface unit (representing with hacures in figure) is adopted between electronics note section gauge module M.Using unified interface portion Part is that the present invention realizes modular basis.Thus, when the analysis system of the present invention needs to realize different electron guns, different tests During requirement, generally it is convenient to select and corresponding module is changed, it is possible thereby to test system is easily and quickly set up, each function Continuously can measure successively.Due to the system requirements condition of high vacuum degree of the present invention, therefore unified standard edge of a knife flange can be adopted Disk is used as interface, and adopts vacuum sealing at anaerobic copper sheet docking port.

As shown in Figure 5A, base module B of the invention includes optics guide rail B1 and the knife rest being placed on optics guide rail B1 Support support B2, each functional module G, F, E, M are furnished with knife rest supporting support B2 met with its size.Thus, each work( Energy module is placed on the optics guide rail B1 by its knife rest supporting support B2.

The optics guide rail B1 of level is the optical table that the high current electronics of the present invention notes analysis system, is that whole system is adopted The basis of transverse horizontal scheme.As it was previously stated, traditional high current electronics note analysis system is vertical using longitudinal direction, as shown in figure 1, It can utilize each component of instrument system from gravity, carried out using the building block system scheme from bottom to top of inner circle and cylindrical centering Build, can be easy to exclude the interference of component stress and gravity.But the program has the shortcomings that its own cannot overcome.And this Invention takes the lead in having broken the constraint of traditional design scheme, innovatively proposes the electronics note analysis system of transverse horizontal.But, this Invention ensures installation accuracy and measuring accuracy to carry compared to prior art with greater need for the impact for overcoming gravity to bring.Therefore, originally The optics guide rail B1 of invention needs to ensure the high accuracy under higher load-bearing weight.For this purpose, the present invention is preferably using double guide rails Optics guide rail B1, the optics guide rail of particularly large-scale double guide rails, the whole depth of parallelism of the long 3.5m of such as precise finiss, water Pingdu error is respectively less than the optics guide rail of double guide rails of 0.02mm, to ensure the levelness and stability of whole system.

Described knife rest supporting support B2 is preferably directly can be installed dismountable with optics guide rail B1.So, when knife rest When support support B2 functional modules corresponding thereto are fixedly connected, can directly by described knife rest supporting support B2 together with Functional module is installed along with optics guide rail B1, or is disassembled from optics guide rail B1, is easily changing functional module While, the installation site of each module need not be readjusted to keep centering.

In order to realize that each functional module in installation, debugging, test process is adjusted carrying out in, knife rest supporting support B2 preferably can be adjusted on three-dimensional, i.e., can slide along optics guide rail B1 in the horizontal direction, energy on vertical direction It is enough to adjust up and down, and the left and right adjusting on the in-plane perpendicular to optics guide rail.Certainly, knife rest supporting support can also be designed B2 is adjusted on more various dimensions.

Electron gun load module G is used to install electron gun, and it is to produce electron gun, launch the module of high current electronics note. The basic structure of electron gun load module G is that have a fixed vacuum cavity for accommodating electron gun, including a set of high vacuum exhaustion System；The high-voltage modulation voltage feed of the supply negative electrode, grid modulation high pressure and heater heated current of a set of connection external power source Head and the related pressure vacuum leader cable group of insulation, and electron gun itself.Generally, when electron gun load module G installs band When having the dissection guard system of drift tube magnetic focusing system itself, vacuum cavity, the current electrode head for dissecting guard system itself can be used With leader cable group, and exempt from the vacuum cavity and electrode power supply system with electron gun load module G.

Electronics note transmitting procedure analogue measurement module F is used to test high current electronics note transmission characteristic, and which includes that electronics drifts about The Xian Bao magnetic focusing mechanism of electronics drift tube outside is managed with penetrating collector and is enclosed within, line bag focusing is circulated cold by multi-group But the line bag of water composition and one group of anti-line bag are constituted.

Be installed on the electronics note that the electron gun of electron gun load module G sends transmitting procedure analogue measurement module is noted from electronics After the interface of F enters its electronics drift tube, advance in the focusing magnetic field that online bag magnetic focusing mechanism produces.Now electronics note transmission The quality of characteristic depends on position shape, the size in magnetic field and the electron gun of Distribution of Magnetic Field to magnetic field transition region between magnetic focusing area The factor such as Distribution of Magnetic Field.The size in magnetic field in the size adjustment electronics drift tube for change electric current in each group line bag can be passed through and divided Cloth；It is by the relative trim locations in front and back for adjusting size of current, direction and the Xian Bao magnetic focusing mechanism of reverse line bag, adjustable The matching magnetic field configuration of section transition region, these can study performance quality and improvement process in measurement electronics note transmitting procedure.

Electronics note spectral measurement module E is which passes through measurement for measuring the distribution of electronics note axial energy, can dissipate situation Electronics is noted the axial energy of axial velocity profile and discrete situation again to calculate electronics note and is distributed, can dissipate situation.

A kind of embodiment is that electronics note spectral measurement module E is set according to the method for measurement electronics note axial velocity Meter (EA modules), applying a uniform magnetic field in the electronics note direction of motion makes electronic deflection and measures friction speed in electronics note Deflection radius and bombard diverse location on CCD target surfaces calculate Energy distribution and can non-dramatic song line, its main structure is One two pole ferrum, double aperture slit structure.Another embodiment (EB modules) is the sense with highly sensitive sensing beam current Answer voltage waveform change and the distribution of beam current waveform to obtain electronics note axial velocity profile, further calculate electronics Note axial energy is distributed and can dissipate, and its main structure is then that highly sensitive beam current inductance loop is accurate with beam current Collection system structure.

Electronics note section gauge module M is used to measure different cross section position note section electric current density in electronics note traveling process Distribution, its basic structure is YAG：Ce crystal target surface and fixation simultaneously by target surface precise motion and can be positioned at electronics note traveling process The electric-controlled mechanical system of different cross section position, and light path that the light image of target surface is passed out and CCD record systems.It Basic functional principle is that electronics note bombardment makes YAG to target surface：Ce crystal inspires the 550nm proportional to beam current density Green-yellow light intensity pattern.Recorded with CCD systems and shown again by computer reconstruction high current beam current density two dimension, three-dimensional figure Shape.

In above-mentioned each functional module, must connect according to G-F-E-M sequent modulars when setting up system and can not change order. But if test is per se with magnetic focusing system, when only cutting the dissection guard system of collector part, the system of the present invention Can be without F modules, module G is sequentially ingressed into module E and module M.

If during without testing electronics note power spectrum, dissipating performance, the system of the present invention can also remove module E.

If the system of the present invention does not measure the transmission performance of electronics note under magnetic focusing situation, simplest analysis system System can be by module G and module M module.Multifunctional modular high current electronics of the invention notes analyzer system concrete as can be seen here Using when have motility.

To make the object, technical solutions and advantages of the present invention become more apparent, below in conjunction with specific embodiment to this It is bright to be described in further detail.

Fig. 5 B are the dimensional structure diagrams of the forceful electric power note analysis system of a specific embodiment of the present invention, and Fig. 5 C are The longitudinal profile schematic diagram of the forceful electric power note analysis system of the embodiment.

(1) overall structure

As illustrated in figs.5 b and 5 c, high current electronics of the invention note analysis system includes that electron gun load module G, electronics note are passed Defeated process simulation measurement module F, electronics note spectral measurement module E and electronics note section gauge module M and base module B.Base Seat module B includes optics guide rail B1 and knife rest supporting support B2 being placed on optics guide rail B1.

In this embodiment, the electron gun load module G can both be the electron gun dress of existing removable die opening Electron gun load module GA is fixed with module GB, or according to new dissection rifle proposed by the present invention.The dissection rifle is solid Determine electron gun load module GA will be described below.

In this embodiment, electronics note transmitting procedure analogue measurement module F is passed using existing line bag magnetic focusing electronics note Transmission function analogue measurement module FA.

In this embodiment, electronics note spectral measurement module E can note spectral measurement module EA using existing electronics, Can be according to new electronics note axial velocity measurement module EB proposed by the present invention.The electronics notes axial velocity measurement module EB is also described below.

In this embodiment, electronics note section detecting module M, can note section universal measurement MA using existing electronics, New small area fiber YAG probe detection modules MB for proposing of the present invention can also be adopted.

In this embodiment, the concrete structure of base module B will be described hereinafter.

Labelling 9 shown in Fig. 5 C is high-vacuum exhaust system, and which is assemblied in electron gun load module G and electronics note power spectrum Measurement module E, for the two modules and system vacuum cavity pumping high vacuum.

(2) base module

Fig. 6 A, 6B are the structure chart of base module B on double guide rail bases that embodiment is adopted.As shown in Figure 6A, the enforcement Example is using the double guide rails in the long heavy-duty engine lathe chassis of 3.5m as mobile knife of different sizes on optics guide rail B1 and the lathe Basis of the frame torr plate as knife rest supporting support B2.The double guide rails in the heavy-duty engine lathe chassis are to use mould steel cast molding, double to lead Rail precise finiss is respectively less than 0.02mm in the whole depth of parallelism of long 3.5m, horizontal gradient error, and it is total to can support multiple functional modules Up to 2.5 tons, the deformation of double guide rails is less than 0.02mm to weight.The processed optics guide rail B1 as double guide rails, which includes cement The double guide rail B13 of pier ground B11, optics guide rail base B12, level..

The clump ground B11 build the front portion of optics guide rail base B12, middle part, rear portion respectively in, respectively have half meter it is deep, And the area with half meter of square.Optics guide rail base B12 carries Flos Nelumbinis cast iron base wad (not shown), with large-scale nut and depth Bury the screw rod locking in clump.Locked fixation after be transferred to below levelness whole process error 0.02mm by double guide rails.

Knife rest supporting support B2 includes the support board structure B21 and supporting structure B22 being fixed on support board structure B21, supporting plate Structure B21 is used for bearing support structure B22, and adjusting bracket structure B22 in the horizontal plane along perpendicular to the optics guide rail B1 Direction movement, the supporting structure B22 is used to fixed support each functional module.The embodiment is by the follow rest supporting plate of lathe Support board structure B21 is transformed into, and is connected with supporting structure B22 thereon.As shown in Figure 6A, which includes bottom to the support board structure B21 Portion supporting plate B211 and upper pallet B212, the bottom surface of bottom bracket B211 have it is coincideing with optics guide rail B1, also pass through grinding The double guide-track groove B213 of spill, side has the round handle hand crank B215 can be by support board structure B21 along optics guide rail B1 movements.

Above bottom bracket B211 also have upper pallet B212, upper pallet B212 with the horizontal plane with bottom The carriage B214 (slide rail etc.) in the good direction perpendicular to optics guide rail B1 of supporting plate B211 break-ins, in upper pallet B212 Also there is a single-grip to shake B216, shaken B216 by shaking single-grip, upper pallet B212 can be made in bottom bracket Move in the direction perpendicular to optics guide rail B1 on B211.Upper pallet B212 and bottom bracket B211 are all instrument cast steel systems Into.

As shown in Figure 6B, the supporting structure B22 is fixedly secured by the pillar B221 that four bands heighten jackscrew B222 In upper pallet B212 of the support board structure B21, supporting structure B22 can be used for regulatory function module together with knife rest supporting support The height and levelness of B2.Respectively there is a crescent-shaped bracket B223 along the two ends in the direction of optics guide rail B1, which is used for fixed Each functional module is supportted, has the central axis for adjusting the functional module fixed by they in two sides of crescent-shaped bracket B223 The level-off jackscrew B224 of angle.

Knife rest supporting support B2 of each functional module needs the support board structure B21 for selecting to meet itself size of each functional module And standard carriage structure B22 of identical own dimensions.It should be noted that electronics note section detecting module M has very long position The optical table of the YAG mobile jib motion positions mechanism outside the vacuum cavity.Therefore electronics note section detecting module M will also have spy The different plateau levels fixed support is aided in, so as to the knife rest supporting support of module M is positioned on lathe head fromer rail first On, auxiliary fixed support is placed on into the leading installation and debugging of lathe head, and locking is no longer moved.And electron gun load module G Removable die opening electron gun general-purpose system module GB also have rear portion to stretch out the platform of concentric shafts kinetic control system, also need picture Fig. 5 B set a diagonal support auxiliary being attached on its place support board structure B21.

(3) electronics note transfer function analogue measurement module FA that line bag is focused on

Existing high current electronics note analysis system lacks electronics note transfer function analogue measurement device always.The present invention takes the lead in Electronics note transfer function analogue measurement module F of proposition, in this embodiment, which is embodied as the note transfer function simulation of the first electronics Measurement module FA.As shown in fig. 7, module FA is by electronics note drift tube FA100, penetrating collector FA200, line bag magnetic focusing structure FA300 is constituted.Drift tube FA100 and the mutual sealing-in of high vacuum seal ring flange of penetrating collector FA200 transverse horizontals, line bag Magnetic focusing structure FA300 is enclosed within the outer ring of general drift tube FA100, and front magnetic cup FA310 is stuck in the front port large flange disk of FA100 On the outer disc of FA101, the large flange disk is made with high-permeability material KM31.Magnetic cup FA311 is stuck in the rear port of FA100 afterwards On the outer disc of large flange disk FA102.Before each line bags of line bag magnetic focusing structure FA300 at least 4-5 and front magnetic cup FA310 one Individual anti-line bag FA301 compositions.There is recirculated cooling water interlayer to separate between each line bag, the cooling line when interlayer adds electric current for line bag Bag is used.Tested electron gun as shown in Figure 7 can be formed by the electric current regulation of each line bag to send in the cavity of drift tube FA100 Electronics note transmission carry out during needed for uniform magnetic field, then coordinate fine setting FA300 magnetic cups and drift tube forward flange disk phase To position change and the magnetic field configuration of electron gun electronics note matching.

General drift tube FA100 has front port ring flange FA101, rear port ring flange FA102, oxygen-free copper inner bag FA105, its front port are connected with tested electron gun structure, and rear port is connected with penetrating collector FA200, oxygen-free copper inner bag FA105 is electrically insulated by insulating ceramics ring FA106, insulating ceramics ring FA107 and vacuum cavity, and inner bag FA105 is connected with circulating cooling Water simultaneously has insulated conductor that the electron stream beaten on inner bag is drawn vacuum cavity external pelivimetry.Penetrating collector FA200 also has bigger Oxygen-free copper inner bag FA204, equally have insulating ceramics FA205 and FA206 and penetrating collector cavity FA203 to be electrically insulated, also have Electronics is drawn cavity independent measurement by circulating cooling water cooling and insulated electric conductors.Reversely stretch into for the ease of YAG cylinder penetrating Collector, rear chamber are unlimited.

Electronics that electron gun sends note is traveled into from note drift tube front port into transmitting in Uniform magnetic focusing magnetic field Diverging after penetrating collector is beaten on collector inner bag, and only center sub-fraction electronics note may pass through collector rear port rule for the treatment of Blue disk carries out energy spectrum analysiss into E modules.And the YAG of M modules cylinders can extend through E module cavitys, penetrating from M modules Collector enters electronics and notes the electronics note electron-optical properties during drift tube detection transmission is advanced.

(4) second electronics note axial velocity measurement module EB

Relative to the traditional electronics note spectral measurement system shown in Fig. 3 A～3C, the present invention proposes a kind of new electronics note Axial velocity measurement module, hereon referred to as the second electronics notes axial velocity measurement module EB.As shown in figure 8, the electronics note is axially Speed measurement module EB is mainly including capacitive probe device EB100, main vacuum cavity EB110, the forward flange for connecting measured device Disk EB201, rear stub EB202, insulating ceramics EB301, EB302, connecting tube EB400, mounting flange EB500, collector Cavity body structure EB600, collector voltage biasing structure EB700, voltage integrating meter and transmission circuit EB800, and current measuring device group Into.

The module EB transverse horizontal placement, electronics note the past flange disk EB201 into main vacuum cavity EB110, The induced voltage of beam current is induced via the electronics note inductance loop EB130 after improvement, then is connect by electromagnetic shielding is good Head is delivered to integrating circuit EB800 with electromagnetic shielding conductor structure and measures electronics note induction voltage waveform V (t), collector cavity The beam current that structure EB600 is collected measures beam current I (t) by current measuring device, via can be calculated electricity Sub- note axial velocity profile v (t)=kI (t)/V (t), wherein k are that capacitive probe structure is normal with one of measuring circuit decision Coefficient.

(5) high current electronics notes the second electronics note transmitting procedure analogue measurement module of small area fiber YAG probe detections MB

Fig. 9 A, 9B are the front schematic views and its top view of the second electronics note transmitting procedure analogue measurement module EB.Fig. 9 C Optical fiber YAG probes, flexible optical fibre cable, optical cable image output detection structural representation；

Fig. 9 D optical fiber YAG sonde configuration schematic diagrams, as shown in Fig. 9 A Fig. 9 B, adopt the present inventor 2012 in the present embodiment Fine vacuum cavity body structure, YAG cylinder in the general-purpose system structure in the patent measurement electronics note section of application is supported and fitness machine Structure, YAG mobile jib motion positions mechanism, the YAG crystal detection agencies of its YAG cylinder front end, optical observation camera are gone Fall, change core component optical fiber YAG probe structure MB100, the flexible optical fibre cable of small area fiber YAG probe detection systems MB200, optical cable image export structure MB300, constitute new module electronic note transmitting procedure analogue measurement module, hereon referred to as Second electronics notes transmitting procedure analogue measurement module MB.

Module MB includes a fine vacuum cavity body structure MB400 same with original structure, with high-vacuum exhaust system MB405, front port large flange MB402, front optical observation window MB401, rear observation window MB403, by former YAG mobile jibs motion positions machine Structure and YAG cylinder support the MB500 for transforming supporting probe horizontal movement positioning with motion as.

Its transformation is to remove former YAG cylinder front end YAG crystal detection agency, as shown in Figure 9 C, changes one for φ 45mm On connection external screw thread annulus of the center inner circle screw threads for fastening on the YAG cylinder of MB500, other end is then can to clamp diameter only to count Tailstock optical fiber retainer ring MB121 of the optical fiber YAG probe MB100 of millimeter makes probe MB100 keep the connection of collimation level state Device MB122.Optical fiber YAG probes MB100 puts in servo electrical machinery system MB503 controls and is connected to front port large flange disk MB402 Motion positions in the electronics drift tube of upper measured device.Electronics note after molybdenum layer is slowed down by optical fiber YAG probe MB110 directly bombards YAG crystal is noted the green-yellow light intensity distribution that section current intensity distributed image is converted to proportional 550nm wavelength by electronics Picture, then via 0.01mm diameters optical fiber lock ring into the fibre bundle for arranging in order, by optical image information via optical fiber YAG Probe MB100, flexible optical cable MB200, optical cable image output detection observation window MB401 of structure MB300 from vacuum cavity MB400 Vacuum sealing planar wave glass MB301 on, then by CCD camera MB302 detection record.

As shown in fig. 9d, flexible optical fibre cable MB200 is out coiled into coil through YAG cylinder end from YAG cylinder, then It is stretched at observation window MB401 from YAG cylinder side, fiber optic cable afterbody retainer ring MB203 is fixed on into optical glass MB301 On.

(6) modularity transformation is carried out to existing test device

(6.1) first gun load module GA

This be high current electronics note analysis system it is most initial, be also most basic module.As shown in Figure 5 C, electron gun assembly section In be exactly this module.Directly using the " a kind of to note for high current electronics of the present inventor's application in 2012 in the embodiment of the present invention The main vacuum cavity of the removable die opening electron gun system of analyser " (Chinese Patent Application No. is 201210132572.6) with And institute's band high-vacuum exhaust system, electronics note modulation voltage feed head, negative electrode and heater heating High-Voltage Insulation cable structure, with And front port standard large flange disk, wherein dissection electron gun or Experimental electron small of the stock rifle are placed in fine vacuum cavity, by electronics Rifle anode flange is equipped with transition connecting apparatus and is fixed on the inside of the front port large flange disk of fine vacuum cavity.Transition connecting apparatus are needed Opening multiple exhaust passage holes makes electron gun area inner vacuum cavity unimpeded with main vacuum cavity gas extraction system.Also can be by Experimental electron Rifle anode flange dribbling transition connector is directly connected to the big of module FA front port standard directly through vacuum cavity forward flange disk On ring flange.In the present embodiment, high-vacuum exhaust system adopts FB-600 Varian molecular pumps, and JB-400 north tech ionic pump is each It is a set of.Domestic 4404 factory product of the electronics note modulation voltage feed head using pressure 100kV, 50A.

The microwave device dissects the electron gun structure such as focusing system with oneself and electronics note drift tube, then this mould The foundation of block GA is just not required to the main vacuum cavity system, is directly removed the microwave device collector, in the device electricity Son drift pipe end pacifies a counter flange disk, and matching standard large flange disk can be directly connected to, then with survey the E modules or jump that can dissipate Cross E modules to be connected with M modules.Now the dissection pipe can be directly positioned in one group of knife rest supporting support structure and form a kind of new Formula GA module.

(6.2) second electron gun load module GB

This system is that the present inventor files an application a kind of " removable pole that analyser is noted for high current electronics for 2012 Pitch electronic gun system " (Chinese Patent Application No. is 201210132572.6).As shown in Fig. 2A, Fig. 2 B, module GB includes One main vacuum cavity structure, the electron gun structure in vacuum cavity, concentric shafts modular construction and optical table structure, institute State electron gun structure anode to be fixed on the front port large flange disk of vacuum cavity, grid, negative electrode are along vacuum cavity central axis The grid for being sequentially fixed at grid concentric shafts top is, the negative electrode for being fixed on negative electrode concentric shafts top；The concentric shaft assembly is one End is stretched in main vacuum cavity, and the other end is then extended to outside vacuum cavity by the vacuum ripple seal of tube, by the inside and outside negative electrode being nested Interior concentric shafts and the outer concentric shafts composition of grid；The optical table structure, disposes grid concentric shafts to support outside vacuum cavity It is same that the structure of drive system and negative electrode concentric shafts support drive system, wherein negative electrode concentric shafts support drive system to be located in grid Heart axle is supported in drive system.Module GB solve hot examining system during heat is surveyed the distance of adjustable cathode and anode, And the distance between grid and anode, formed design, research electron gun optimization system satisfactory texture and improve production technology, The research of steady production structure obtains good utilization.

It is to be noted that as shown in Figure 2 A, the knife rest supporting support structure of the module is except the knife rest supporting support knot of standard The fixed auxiliary stand that can with support board structure move, Fig. 2A are stretched out outside structure GB304 on the bottom plate of the support board structure also It is shown be to stretch out parallel auxiliary stand and it is shown in figure 5b may also be diagonal brace auxiliary stand, for supporting concentric shafts modular construction And optical table structure.

(6.3) first electronics note spectral measurement module EA

Module EA be the present inventor 2012 propose " a kind of measuring system for vacuum electron device power spectrum " (in State's number of patent application is for 201210132372.0).As shown in Fig. 3 A, Fig. 3 B, Fig. 3 C, including a fine vacuum cavity EA101, two Pole ferroelectricity magnet arrangement EA201, double aperture slit structure EA301, YAG detection system EA401 and CCD camera and control system EA501；The main vacuum cavity be horizontal positioned titanium alloy made by flattened rectangular structure, two pole ferroelectricity magnet arrangements are cards The uniform magnetic field perpendicular to horizontal plane within homogeneity deviation 1% can be produced between flat cavity above and below, electric magnet is adjusted The magnetic field intensity of structure, enables the electronics that fine vacuum cavity front port ring flange is entered to produce 90 degree of deflections when noting through double aperture slit Beat on YAG detectors, define discrete electronics note energy spectrum diagram picture, seen positioned at vacuum cavity side by YAG crystal is faced Examine CCD camera outside window and control system is measured and records the optical imagery of spectrum.The slit that the double aperture slit structure is formed , by 0.1-0.5mm, slit length about 0.5-2.0mm is relative to dissipate resolution up to 0.5% for width.

(6.4) first electronics note section gauge module MA

Module MA is that the present inventor proposes that " a kind of high current electronics note analyser measurement electronics notes the general of section for 2012 System " (Chinese invention patent application number 201210132510.5).As shown in Fig. 4 A, 4B, the measurement electronics notes the general of section System includes that fine vacuum cavity MA101, YAG crystal detection agency MA201, YAG cylinder is supported and motion MA301, YAG master Bar motion positions mechanism MA401, an optical observation camera MA501,；The fine vacuum cavity is placed for circular horizontal, Front end interface large flange disk is used to connect electron gun settlement G module or energy test area E modules, and vacuum cavity is also with a set of High-vacuum exhaust system, fore-and-aft observing window；The YAG crystal detection agency MA201 is located at main vacuum cavity central authorities, can be by YAG Propping up cylinder supports the YAG crystal counters for being placed in YAG cylinder front end with motor system control to stretch out front end interface large flange disk, enters Enter the electro-optical performance on detection electronics note travel path in the electronics note drift tube of measured device；The YAG crystal detection Device is mainly for there is big diameter electronics note drift tube, and has and note section more than 20-100kV high currents electronics and detected, it It is in ratio that note section current intensity distributed image can be converted to intensity on YAG chips by X-ray bremsstrahlung form by electronics The green-yellow light intensity image of centre wavelength 550nm；The YAG mobile jibs motion positions mechanism MA401 and optical observation camera MA501 be located at vacuum cavity outside, wherein MA501 be placed on the compliant platform of YAG mobile jib motion positions mechanism MA401 with YAG crystal detection agency MA201 on YAG cylinder of MA401 controls are synchronized with the movement and positioning, and CCD camera is detected and have recorded YAG Optical imagery on chip, the beam current Strength Space resolution of the system record is up to 0.05mm.It is high in the present embodiment Vacuum pumping system adopts FB-600 Varian molecular pumps, and JB-400 north tech ionic pump is each a set of.

Must propose, as shown in Figure 4 A, the MA401 modules of this module are very long, are close to two meters, so its block supports In addition to vacuum cavity is by the support of big palette supporting support, the long square frame of auxiliary as shown in Figure 4 A must also be arranged support at MA401 bottoms Shape levelling bench support is supporting, and is the unique motionless or few dynamic module of big system of the invention.

(7) multifunctional modular high current electronics notes the assembly and adjustment of analyser

It is individually placed to after required function module is chosen on double guide rails.Specific embodiments of the present invention are adjusted from MA modules Rise, the auxiliary stand of the MA401 of MA modules is placed on the head of a bed platform of this lathe, big palette support is placed on the double of headstock and leads On rail, MA modular vacuum cavity MA101 and MA401 are placed on support.The Chinese patent application proposed with the applicant " concentric detector " (Chinese Patent Application No. 201410061191.2), first by the chamber central axis of MA101 and analyser system The machine center axis of system mix up it is consistent again by the YAG pole central axis of MA401 be transferred to system centre diameter parallel and In one horizontal plane, then be adjusted YAG cylinders motion positions central axis it is consistent with system centre axis, so that it may locked institute Have and rise nut, left and right horizontal jackscrew nut, each hand crank of supporting plate on support.And start other modules on double guide rails With concentric detector the vacuum cavity machine center axis of all modules, the magnetic field center axis of line bag magnetic structure, electron gun And field center axis this three axis of electronics note drift tube and penetrating collector is all transferred to three with analyzer system central axis Axis is unified, within concentricity will reach 0.05mm with coaxiality error.Also M modules are detected with concentric detector in addition Horizontal movement YAG probe movement centre of location axis, and negative electrode, the shifting of the concentric axle system of grid of movable electronic rifle structure It is dynamic.Centre of location line is transferred on analyzer system central axis, within coaxiality error also will reach 0.05mm.

Finally by the module chosen, slave module M, module E, module F, module G upside down and be arranged on double guide rails respectively in order Shake manual circle handle crank on the bottom plate of the system to connect together them, make their good oxygen-free coppers of interface large flange disk folder Diaphragm seal is fastened with screw.Locked round handle crank again.One targetedly the precision of all-round property testing high current electronics note Analyzer system is just completed.

(8) analysis system motor control, data acquisition processing system are set up

The present embodiment hardware adopts domestic industrial computer, and NI companies four-way motion control card PCI-7344, high-performance are high Precision multifunctional data acquisition card PCI-6115；Software utilizes Hebei University of Technology's data acquisition measurement, image processing and analyzing, fortune The modules such as dynamic control, and the analysis software of high density electron beam optics.Each moving component precise motion is realized, YAG spies are realized Survey device axially-movable precision and be better than 0.1mm, can pass through programme-control transmitting pulse, the pulse of multiple-pulse and low-repetition-frequency and Required pulse width, impulse waveform back-end crop time, and arrange before transmitting high-voltage pulse and open CCD camera certain time delay Fluoroscopic image on shutter record YAG detectors.The view data for also achieving CCD records simultaneously reaches industrial computer display screen reality When show and recorded in memorizer, using Software Create electronics note section electric current distribution curve.Last industrial computer is by real Detection is axially extended from anode port pointwise with testing program completion timing, determining deviation, when reaching target setting position, industrial computer will The view data of collection generates electronics injection forming, the two dimension of transmission overall process, three-dimensional electronic note electric current according to Electron optic software The electron-optical transmitting procedure performance data of density Relative distribution image and correlation and correlation analysiss, show and print experiment report Accuse.It is same that electronics note energy spectrum analysiss are similarly formed by electronics note Electron energy distribution image, scattergram can be dissipated with dissipating test The correlation analysiss such as shape data simultaneously show printing laboratory report.

Advantages of the present invention

The present invention breaches the high current electricity that existing high current electronics note analyzer system can only detect single fixed structure The electro-optical performance of sub- rifle, there is provided can be directed to different type microwave electron tube has multiple selection different measuring functions The high current electronics note analyser of the multifunctional modular of module.

The present invention provides electronic assemblies area and for fixed electrode Anatomical Structure rifle, experiment rifle or with itself magnetic focusing system The electron gun GA modules of electronics note drift tube also provide the GB modules of removable die opening electron gun general-purpose system；There is provided first Line bag magnetic focusing electronics note transfer function analogue measurement system FA module；Both provide high current electronics and note spectral measurement system EA Module, also provides high current electronics note axial velocity measuring system EB module；It is also directed to the electronics note drift of microwave electron tube The different tube diameters for moving pipe had both provided high current electronics note section gauge system MA module, provided again and only counted for drift pipe diameter The small area fiber YAG probe detections system MB module of millimeter.

The present invention can constitute and single microwave electron tube system is continuously measured, studied, from electron gun to magnetic focusing under Electronics note transmitting procedure electron-optical properties, then to last electronics note power spectrum and can dissipate or electronics note axial velocity profile, zero Scattered measurement and analysis and research.This comprehensive analysis and each several part to the comprehensive electro-optical performance of microwave electron tube Between study with being mutually matched situation and provide condition more directly perceived, effective and means.

The present invention is large-scale precision scientific instrument, permanent vacuum degree 1 × 10^-6Pa, heat survey during vacuum be better than 5 × 10^-6Pa, the electronics note modulation high pressure 80kV that can be born, modulate electric current 30A, measurement electronics note section resolution 0.05mm, electronics Note energy resolution 0.5%, YAG detectors are adjusted axially positioning precision 0.1mm.

The present invention has reliably security alarm safeguards system, ensures the suitable of experimenter, analyser equipment safety and experiment Profit is carried out.And there are advanced remote automation motor control, data acquisition process and analysis system, industrial computer sequencing can be used Control release overall process, and with two-dimensional/three-dimensional image and analytical data, chart intuitively show result in experimentation and The final laboratory report for needing.

Particular embodiments described above, has been carried out to the purpose of the present invention, technical scheme and beneficial effect further in detail Describe in detail bright, it should be understood that the foregoing is only the specific embodiment of the present invention, be not limited to the present invention, it is all Within the spirit and principles in the present invention, any modification, equivalent substitution and improvements done etc. should be included in the protection of the present invention Within the scope of.

Claims (11)

1. a kind of high current electronics notes analysis system, including the base module (B) for disposing in the horizontal direction, and in the base mold The multiple functional modules disposed along horizontal direction successively on block (B), each functional module are coaxial and with unified interface unit；

The base module (B) includes optics guide rail (B1) and the knife rest supporting support (B2) being placed on optics guide rail (B1), often The individual functional module is furnished with the knife rest supporting support (B2) met with its size, each described functional module by The knife rest supporting support (B2) is placed on the optics guide rail (B1)；

It is characterized in that：

The optics guide rail (B1) is double guide rails, and the knife rest supporting support (B2) directly can be dismantled with the optics guide rail (B1) Formula is installed；

The optics guide rail (B1) includes clump ground (B11), optics guide rail base (B12), the double guide rails (B13) of level, its In, the clump ground (B11) build the front portion of the optics guide rail base (B12), middle part, rear portion respectively in.

2. high current electronics as claimed in claim 1 notes analysis system, it is characterised in that the knife rest supporting support (B2) can be It is adjusted on three-dimensional.

3. high current electronics as claimed in claim 1 notes analysis system, it is characterised in that each optics guide rail base (B12) all bands There is Flos Nelumbinis cast iron base wad, locked with the screw rod in buried clump with large-scale nut.

4. high current electronics as claimed in claim 1 notes analysis system, it is characterised in that the knife rest supporting support (B2) includes Support board structure (B21) and the supporting structure (B22) being fixed on the support board structure (B21)；

The support board structure (B21) is for carrying the supporting structure (B22), and adjusting bracket structure (B22) is in the horizontal plane Along the direction movement perpendicular to the optics guide rail (B1)；The supporting structure (B22) supports each functional module for fixed.

5. high current electronics as claimed in claim 4 notes analysis system, it is characterised in that the support board structure (B21) is the bottom of including Portion's supporting plate (B211) and upper pallet (B212), the bottom surface of the bottom bracket (B211) have identical with the optics guide rail (B1) Double guide-track grooves (B213), there is a round handle hand crank (B215) side, and circle handle hand crank (B215) is described for making Support board structure (B21) is mobile along the optics guide rail (B1).

6. high current electronics as claimed in claim 5 notes analysis system, it is characterised in that the upper pallet (B212) with On horizontal plane perpendicular to the direction of the optics guide rail (B1) carriage (B214), have on the upper pallet (B212) Crank (B216), by shaking crank (B216), can make the upper pallet (B212) in the bottom bracket (B211) Move perpendicular to the direction of the optics guide rail (B1).

7. high current electronics as claimed in claim 4 notes analysis system, it is characterised in that the supporting structure (B22) is by band The pillar (B221) for heightening jackscrew (B222) is fixed on the support board structure (B21)；The supporting structure is led along the optics Respectively there is a crescent-shaped bracket (B223) at the two ends in the direction of rail (B1), and which is used for each functional module of fixed support, in the moon There is the water transfer flat-top of the central axis angle for adjusting the functional module fixed by they two sides of thread form support (B223) Silk (B224).

8. the high current electronics as any one of claim 1-7 notes analysis system, it is characterised in that the Functional Module Electron gun load module (G) and electronics note section gauge module (M) are included,

The electron gun load module (G), for installing electron gun, is to produce electron gun, launch the module of high current electronics note；

Electronics note section gauge module (M) is electric for measuring different cross section position note section in the electronics note traveling process Current density is distributed.

9. high current electronics as claimed in claim 8 notes analysis system, it is characterised in that the functional module is also noted including electronics Transmitting procedure analogue measurement module (F), its be located at the electron gun load module (G) and electronics note section gauge module (M) it Between.

10. high current electronics as claimed in claim 8 notes analysis system, it is characterised in that the functional module also includes electronics Note spectral measurement module (E), which is located between the electron gun load module (G) and electronics note section gauge module (M).

11. high current electronics as claimed in claim 8 note analysis system, it is characterised in that the functional module also includes electronics Note transmitting procedure analogue measurement module (F) and electronics note spectral measurement module (E), also, the electron gun load module (G), Electronics note transmitting procedure analogue measurement module (F), electronics note spectral measurement module (E) and electronics note section gauge module (M) according to Secondary arrangement.