CN110231358A - Scanning electron microscope and spectroscopy equipment combined apparatus - Google Patents
Scanning electron microscope and spectroscopy equipment combined apparatus Download PDFInfo
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- CN110231358A CN110231358A CN201910628602.4A CN201910628602A CN110231358A CN 110231358 A CN110231358 A CN 110231358A CN 201910628602 A CN201910628602 A CN 201910628602A CN 110231358 A CN110231358 A CN 110231358A
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- 238000004611 spectroscopical analysis Methods 0.000 title claims abstract description 27
- 239000000523 sample Substances 0.000 claims abstract description 65
- 230000003287 optical effect Effects 0.000 claims abstract description 45
- 238000001514 detection method Methods 0.000 claims abstract description 40
- 238000001228 spectrum Methods 0.000 claims abstract description 37
- 238000010894 electron beam technology Methods 0.000 claims abstract description 26
- 230000005670 electromagnetic radiation Effects 0.000 claims abstract description 8
- 230000003595 spectral effect Effects 0.000 claims abstract description 7
- 238000006073 displacement reaction Methods 0.000 claims description 34
- 230000007246 mechanism Effects 0.000 claims description 29
- 238000001914 filtration Methods 0.000 claims description 13
- 230000003028 elevating effect Effects 0.000 claims description 10
- 238000004458 analytical method Methods 0.000 claims description 9
- 230000008878 coupling Effects 0.000 claims description 7
- 238000010168 coupling process Methods 0.000 claims description 7
- 238000005859 coupling reaction Methods 0.000 claims description 7
- 238000003384 imaging method Methods 0.000 claims description 6
- 230000005540 biological transmission Effects 0.000 claims description 5
- 238000000034 method Methods 0.000 claims description 5
- 230000008569 process Effects 0.000 claims description 3
- 238000009434 installation Methods 0.000 claims description 2
- 238000005259 measurement Methods 0.000 description 6
- 238000010408 sweeping Methods 0.000 description 4
- 238000001237 Raman spectrum Methods 0.000 description 3
- 230000005284 excitation Effects 0.000 description 3
- 238000002189 fluorescence spectrum Methods 0.000 description 3
- 241000233855 Orchidaceae Species 0.000 description 2
- 238000012512 characterization method Methods 0.000 description 2
- 238000011065 in-situ storage Methods 0.000 description 2
- 238000007689 inspection Methods 0.000 description 2
- 238000002381 microspectrum Methods 0.000 description 2
- 238000001069 Raman spectroscopy Methods 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000011066 ex-situ storage Methods 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 238000012625 in-situ measurement Methods 0.000 description 1
- 238000011835 investigation Methods 0.000 description 1
- 230000003447 ipsilateral effect Effects 0.000 description 1
- 238000004020 luminiscence type Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000000879 optical micrograph Methods 0.000 description 1
- 230000011514 reflex Effects 0.000 description 1
- 238000011160 research Methods 0.000 description 1
- 238000012827 research and development Methods 0.000 description 1
- 230000002441 reversible effect Effects 0.000 description 1
- 238000005070 sampling Methods 0.000 description 1
- 230000011664 signaling Effects 0.000 description 1
- 238000010183 spectrum analysis Methods 0.000 description 1
- 238000012546 transfer Methods 0.000 description 1
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/62—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light
- G01N21/63—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light optically excited
- G01N21/64—Fluorescence; Phosphorescence
- G01N21/645—Specially adapted constructive features of fluorimeters
- G01N21/6456—Spatial resolved fluorescence measurements; Imaging
- G01N21/6458—Fluorescence microscopy
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/62—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light
- G01N21/63—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light optically excited
- G01N21/65—Raman scattering
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
- G01N23/22—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material
- G01N23/2206—Combination of two or more measurements, at least one measurement being that of secondary emission, e.g. combination of secondary electron [SE] measurement and back-scattered electron [BSE] measurement
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
- G01N23/22—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material
- G01N23/225—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material using electron or ion
- G01N23/2251—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material using electron or ion using incident electron beams, e.g. scanning electron microscopy [SEM]
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2223/00—Investigating materials by wave or particle radiation
- G01N2223/07—Investigating materials by wave or particle radiation secondary emission
- G01N2223/09—Investigating materials by wave or particle radiation secondary emission exo-electron emission
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2223/00—Investigating materials by wave or particle radiation
- G01N2223/10—Different kinds of radiation or particles
- G01N2223/102—Different kinds of radiation or particles beta or electrons
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2223/00—Investigating materials by wave or particle radiation
- G01N2223/30—Accessories, mechanical or electrical features
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Abstract
The present invention provides a kind of scanning electron microscope and spectroscopy equipment combined apparatus, are related to optical detecting instrument technical field, the scanning electron microscope and spectroscopy equipment combined apparatus, comprising: spectrum detection device, scanning electron microscope reception device and electron gun；The spectrum detection device can be along first direction to electromagnetic radiation laser, the electron gun can be in a second direction to the electromagnetic radiation electron beam, the probe of the scanning electron microscope reception device is towards third direction, the electronic signal of the surface sending for receiving the sample.The direction of spectrum detection device transmitting laser receives sense with Electronic Speculum device respectively and the electron gun direction of the launch is all different, and towards sample, so as to realize that spectrum detection device, scanning electron microscope reception device and electron gun carry out spectral detection and scanning electron microscope Function detection from different directions and in same position of the same time to sample.
Description
Technical field
The present invention relates to optical detecting instrument technical fields, fill more particularly, to a kind of scanning electron microscope and spectroscopy equipment combination
It sets.
Background technique
Scanning electron microscope-Raman/fluorescence spectrum combined system is due to that can see development while scale resolution is observed receiving
The in-situ investigations such as Raman, luminescence generated by light, cold light realize material element, structure, the original of engineering properties parameter and dynamic behaviour
Position characterization is the common requirement of the research and development detection of current multiple subject scientific researches and industrial field.
There are two types of the working principles of existing scanning electron microscope-Raman/fluorescence spectrum combined system.A kind of working principle is
" separately detecting ".Spectral measurement platform and scanning electron microscope platform are specifically placed in the different location of the same vacuum warehouse, the two
Between have the transfer station of an accurate transmission, realize that the spectrum of same sample same position and Electronic Speculum separately detect.The principle is led
Cause measurement pseudo- in situ, not real-time.The working principle of another is laterally to take the photograph spectrum based on parabolic mirror.Specifically scanning
Under the basic framework of Electronic Speculum, the parabolic mirror that a top is provided with micropore is horizontally inserted between electron gun and sample.It throws
Horizontal emission collimated light can be focused on sample surfaces and realize excitation by the focus setting of parabolic mirror in sample surfaces,
And the optical signal that sample surfaces scatter out can thrown object face reflecting mirror collect and horizontal direction reflexes to the spectrum point of distal end
Analysis apparatus.Simultaneously as the micropore on parabolic mirror top is on electron gun Vertical Launch electron beam route, electron beam
Sample surfaces are reached across micropore, thus detection while realizing scanning electron microscope and microspectrum.The principle leads to spectrum
Focusing is complicated when measurement and can not observe sample, it is difficult to guarantee that sampling point position accurately selects and spectral resolution.This
The intervention of outer parabolic mirror has also been blocked the optical path of other characterization apparatus (such as power spectrum) and can not have been detected.
Summary of the invention
The purpose of the present invention is to provide a kind of scanning electron microscope and spectroscopy equipment combined apparatus, to alleviate scanning electron microscope-
Raman/fluorescence spectrum combined system measurement position is inconsistent, when different and low efficiency, the low technical problem of resolution ratio.
The embodiment of the present invention is achieved in that
A kind of scanning electron microscope provided in an embodiment of the present invention and spectroscopy equipment combined apparatus, comprising: spectrum detection device is swept
Retouch Electronic Speculum reception device and electron gun；
The spectrum detection device can be along first direction to electromagnetic radiation laser, and the electron gun can be in a second direction
To the electromagnetic radiation electron beam, the probe of the scanning electron microscope reception device is towards third direction, for receiving the sample
Surface issue electronic signal；And the first direction is not overlapped with the second direction and third direction respectively.
Further, the scanning electron microscope and spectroscopy equipment combined apparatus include vacuum warehouse and sample stage, the spectrum inspection
It surveys device and scanning electron microscope reception device is each attached in the vacuum warehouse；
The electron gun and sample stage are installed in inside the vacuum warehouse, and the electron gun is located at the upper of the sample stage
Side；
And the spectrum detection device and scanning electron microscope reception device are located at the two sides of the electron gun.
Further, the sample stage includes table top and elevating mechanism, and the table top is connect with the elevating mechanism, described
Elevating mechanism is for driving the table top vertically to move up and down.
Further, the spectrum detection device includes laser, spectrograph, outer optical path component, the first adjustment of displacement machine
Structure, light passing flange, second displacement adjustment mechanism, microlens；
The light passing flange is arranged on the bulkhead of the vacuum warehouse, so that can be real by light passing flange inside and outside vacuum warehouse
Existing laser conducting；
The laser and spectrograph are connect with one end of the outer optical path component, the other end of the outer optical path component
It is connect with the movable end of first shift adjusting machine, the fixing end of first shift adjusting machine is fixedly connected on described
On the lateral wall of light passing flange；
The fixing end of the second displacement adjustment mechanism is mounted on the inner sidewall of the light passing flange；The microlens
It is mounted on the movable end of the second displacement adjustment mechanism, first shift adjusting machine and second displacement adjustment mechanism are used for
Adjust the outer optical path component and the same optical axis of microlens.
Further, first shift adjusting machine is two-dimension displacement fixed platform, the second displacement adjustment mechanism
Platform and lens bracket are adjusted including three-D displacement, the lens bracket is mounted on the three-D displacement adjustment platform, described
Lens bracket is for fixing the microlens.
Further, the scanning electron microscope reception device includes that electron-beam analysis equipment, mounting flange and electron beam are collected
Probe；The mounting flange is arranged on the bulkhead of the vacuum warehouse, so as to can be connected to by mounting flange inside and outside vacuum warehouse；
The electron beam collects the inside that probe is fixedly mounted on the mounting flange, and the electron beam collects probe
Outer end is connect after running through the mounting flange with the electron-beam analysis equipment being fixed on the outside of the mounting flange.
Further, the outer optical path component includes collimator, narrow band filter slice, the first reflecting mirror and two-color laser light splitting
Mirror, the two-color laser spectroscope can reflect what the laser that the laser issues and being transmissive to was reflected from the sample
Laser；
First reflecting mirror is used to the light projected from the narrow band filter slice being reflected towards the two-color laser spectroscope,
So as to can successively pass through the collimator, narrow band filter slice, the first reflecting mirror and double-colored sharp from the light that the laser issues
The microlens are injected after light spectroscope；
The outer optical path component further includes coupling camera lens and high-pass filtering piece, and the two is respectively positioned on the spectrograph and double-colored
Between laser beam splitter, so that the laser reflected from the sample can pass sequentially through the microlens, two-color laser point
Enter after light microscopic, high-pass filtering piece and coupling camera lens into the spectrograph.
Further, the outer optical path component further include light source, imaging sensor, half-reflecting half mirror, the second reflecting mirror and
Third reflecting mirror, the third reflecting mirror can be plugged between the high-pass filtering piece and two-color laser spectroscope, so that institute
The light for stating light source sending can be successively after the reflection of half-reflecting half mirror, the second reflecting mirror and third reflecting mirror from described double-colored
Laser beam splitter transmission；
Described image sensor is located at the transparent side of the half-reflecting half mirror, allows it to receive by the two-color laser
It after spectroscope transmission, and is reflected by the second reflecting mirror and third reflecting mirror, then the light transmitted by the half-reflecting half mirror, to be formed
The image information of the sample.
Further, the scanning electron microscope and spectroscopy equipment combined apparatus include vacuum device, the vacuum device
It is connect with the vacuum warehouse, for carrying out vacuumize process to the vacuum warehouse.
The embodiment of the present invention bring it is following the utility model has the advantages that
Scanning electron microscope provided in an embodiment of the present invention and spectroscopy equipment combined apparatus, spectrum detection device emit the side of laser
It is all different to sense and the electron gun direction of the launch is received with Electronic Speculum device respectively, and towards sample, so as to
Realize that spectrum detection device, scanning electron microscope reception device and electron gun carry out spectrum inspection in same position of the same time to sample
It surveys and scanning electron microscope Function detection.Also, between electron gun and sample, no between sample and scanning electron microscope reception device
What shelter, it is ensured that spectrum function and scanning electron microscope flash ranging function can respectively complete, independent operating and do not interfere with each other mutually, reality
The original position of existing real meaning and real-time measurement.
Detailed description of the invention
Technical solution in order to illustrate more clearly of the specific embodiment of the invention or in the related technology, below will be to specific
Attached drawing needed in embodiment or description of Related Art is briefly described, it should be apparent that, it is described below
Attached drawing is some embodiments of the present invention, for those of ordinary skill in the art, before not making the creative labor
It puts, is also possible to obtain other drawings based on these drawings.
Fig. 1 is the schematic diagram of scanning electron microscope provided in an embodiment of the present invention and spectroscopy equipment combined apparatus；
Fig. 2 is that the optical path of the outer optical path component of scanning electron microscope provided in an embodiment of the present invention and spectroscopy equipment combined apparatus is former
Reason figure.
Icon: 110- laser；120- spectrograph；The outer optical path component of 130-；The first shift adjusting machine of 140-；150- is logical
Light flange；160- second displacement adjustment mechanism；170- microlens；200- electron gun；300- vacuum warehouse；400- sample stage；
510- electron beam collects probe；520- mounting flange；530- electron-beam analysis equipment；
610- collimator；620- narrow band filter slice；The first reflecting mirror of 630-；640- two-color laser spectroscope；710- coupling
Camera lens；720- high-pass filtering piece；810- light source；820- imaging sensor；830- half-reflecting half mirror；The second reflecting mirror of 840-；
850- third reflecting mirror.
Specific embodiment
In order to make the object, technical scheme and advantages of the embodiment of the invention clearer, below in conjunction with the embodiment of the present invention
In attached drawing, technical scheme in the embodiment of the invention is clearly and completely described, it is clear that described embodiment is
A part of the embodiment of the present invention, instead of all the embodiments.The present invention being usually described and illustrated herein in the accompanying drawings is implemented
The component of example can be arranged and be designed with a variety of different configurations.
Therefore, the detailed description of the embodiment of the present invention provided in the accompanying drawings is not intended to limit below claimed
The scope of the present invention, but be merely representative of selected embodiment of the invention.Based on the embodiments of the present invention, this field is common
Technical staff's every other embodiment obtained without creative efforts belongs to the model that the present invention protects
It encloses.
It should also be noted that similar label and letter indicate similar terms in following attached drawing, therefore, once a certain Xiang Yi
It is defined in a attached drawing, does not then need that it is further defined and explained in subsequent attached drawing.
In the description of the present invention, it should be noted that term " center ", "upper", "lower", "left", "right", "vertical",
The orientation or positional relationship of the instructions such as "horizontal", "inner", "outside" is to be based on the orientation or positional relationship shown in the drawings, or be somebody's turn to do
Invention product using when the orientation or positional relationship usually put, be merely for convenience of description of the present invention and simplification of the description, without
It is that the device of indication or suggestion meaning or element must have a particular orientation, be constructed and operated in a specific orientation, therefore not
It can be interpreted as limitation of the present invention.In addition, term " first ", " second ", " third " etc. are only used for distinguishing description, and cannot manage
Solution is indication or suggestion relative importance.
In addition, the terms such as term "horizontal", "vertical", " pendency " are not offered as requiring component abswolute level or pendency, and
It is that can be slightly tilted.It is not to indicate the structure if "horizontal" only refers to that its direction is more horizontal with respect to for "vertical"
It has to fully horizontally, but can be slightly tilted.
In the description of the present invention, it is also necessary to which explanation is unless specifically defined or limited otherwise, term " setting ",
" installation ", " connected ", " connection " shall be understood in a broad sense, for example, it may be fixedly connected, may be a detachable connection or one
Connect to body；It can be mechanical connection, be also possible to be electrically connected；It can be directly connected, it can also be indirect by intermediary
It is connected, can be the connection inside two elements.For the ordinary skill in the art, on being understood with concrete condition
State the concrete meaning of term in the present invention.
As shown in Figure 1, scanning electron microscope provided in an embodiment of the present invention and spectroscopy equipment combined apparatus, comprising: spectral detection
Device, scanning electron microscope reception device and electron gun 200；Spectrum detection device can be electric along first direction to electromagnetic radiation laser
Sub- rifle 200 can be in a second direction to electromagnetic radiation electron beam, and the probe of scanning electron microscope reception device is used for towards third direction
Receive the electronic signal that the surface of sample issues；And the first direction does not weigh with the second direction and third direction respectively
It closes.Scanning electron microscope provided in an embodiment of the present invention and spectroscopy equipment combined apparatus, spectrum detection device emit the direction point of laser
Sense is not received with Electronic Speculum device and 200 direction of the launch of electron gun is all different, and towards sample, so as to reality
Existing spectrum detection device, scanning electron microscope reception device and electron gun 200 carry out spectrum in same position of the same time to sample
Detection and scanning electron microscope Function detection.Also, between electron gun 200 and sample, between sample and scanning electron microscope reception device
There is no any shelter, it is ensured that spectrum function and scanning electron microscope flash ranging function can respectively complete, independent operating and mutually not
Interference.The in situ measurement for realizing spectral measurement device and scanning electron microscope has many advantages, such as that high resolution, accuracy are high.
Scanning electron microscope and spectroscopy equipment combined apparatus include vacuum warehouse 300 and sample stage 400, spectrum detection device and scanning
Electronic Speculum reception device is each attached in vacuum warehouse 300.Electron gun 200 and sample stage 400 are installed in inside vacuum warehouse 300.Electricity
Sub- rifle 200 is fixedly mounted on the top surface of vacuum warehouse 300, and straight down, sample stage 400 is located at electronics to the muzzle of electron gun 200
The underface of rifle 200, and spectrum detection device is located at the side of electron gun 200, is fixed on vacuum relative to vertical inclination
On the bulkhead in storehouse 300, surface sweeping Electronic Speculum detection device is located at the opposite other side of electron gun 200, also relative to vertical inclined
It is fixed on the bulkhead of vacuum warehouse 300, also, the inclination side of the inclined direction of spectrum detection device and surface sweeping Electronic Speculum detection device
To opposite.
Spectrum detection device and surface sweeping Electronic Speculum detection device can also asymmetrically be arranged in the two sides of electron gun 200, and two
Person also can be set in the ipsilateral of electron gun 200.
The second direction and third direction, which can be, not to be overlapped；It can also make coincidence, for example, when surface sweeping Electronic Speculum is examined
Surveying device also may be mounted at the edge of electron gun.
Further, sample stage 400 includes table top and elevating mechanism, and table top is connect with elevating mechanism, and elevating mechanism is used for
Table top is driven vertically to move up and down, elevating mechanism may include screw rod or cylinder, for adjusting the height of table top, so that its
On sample high and low position change, to be adapted to spectrum detection device, scanning electron microscope reception device and electron gun 200.
Specifically, spectrum detection device includes laser 110, spectrograph 120, outer optical path component 130, the first adjustment of displacement
Mechanism 140, light passing flange 150, second displacement adjustment mechanism 160, microlens 170；Light passing flange 150 is arranged in vacuum warehouse
On 300 bulkhead, light passing flange 150 plays the role of fixed and light transmission, and transparent window is provided on light passing flange 150
Mouthful, to make to can be realized laser conducting inside and outside vacuum warehouse 300.
Laser 110 and spectrograph 120 are connect with one end of outer optical path component 130, the other end of outer optical path component 130
It is connect with the movable end of the first shift adjusting machine 140, the fixing end of the first shift adjusting machine 140 is fixedly connected on light passing method
On the lateral wall of orchid 150.The light and the received light of spectrograph 120 that laser 110 issues are required to through outer optical path component
130, the fixing end of the first shift adjusting machine 140 is connect with light passing flange 150, and movable end is connect with outer optical path component 130, is led to
Cross the first shift adjusting machine 140 of adjustment, thus it is possible to vary the optical axis of outer optical path component 130, second displacement adjustment mechanism 160 are consolidated
Fixed end is mounted on the inner sidewall of light passing flange 150；Microlens 170 are mounted on the movable end of second displacement adjustment mechanism 160,
It can make outer optical path component 130 and microlens by adjusting the first shift adjusting machine 140 and second displacement adjustment mechanism 160
170 same optical axises.
Spectrum detection device is divided into two parts by light passing flange 150, and a part is in vacuum warehouse 300, and a part is true
Outside hole capital after selling all securities 300, the vacuum degree of vacuum warehouse 300 ensure that, meet the primary condition of sweep electron microscopic measure and sweep to a variety of different
Electronic Speculum is retouched with wide applicability.
First shift adjusting machine 140 can be two-dimension displacement fixed platform, or three Bit Shift fixed platforms.With
First shift adjusting machine 140 be two-dimension displacement fixed platform for, by manipulate two-dimension displacement fixed platform adjusting knob,
It can be realized the movement that outer optical path component 130 carries out two vertical direction in 150 place plane of light passing flange.
Second displacement adjustment mechanism 160 may include three-D displacement adjustment platform and lens bracket, wherein three-D displacement tune
Leveling platform also could alternatively be two-dimension displacement fixed platform.Lens bracket is mounted on three-D displacement adjustment platform, lens bracket
For fixing microlens 170, by manipulating second displacement adjustment mechanism 160, microlens 170 may be implemented upper and lower, left
Adjustment right, on the direction perpendicular to one another of front and back three.Before detection, microlens 170 is enable to be directed at sample.
Scanning electron microscope reception device includes that electron-beam analysis equipment 530, mounting flange 520 and electron beam collect probe 510.
Mounting flange 520 is fixedly mounted on the bulkhead of vacuum warehouse 300, so as to can be connected by mounting flange 520 inside and outside vacuum warehouse 300
Logical, the disk of mounting flange 520 is obliquely installed relative to vertical direction.Electron beam collects probe 510 and is fixedly mounted on fixation
The inside of orchid 520, and 520 outside of mounting flange is run through after mounting flange 520 and be fixed in the outer end of electron beam collection probe 510
Electron-beam analysis equipment 530 connect.
As shown in Fig. 2, specifically, outer optical path component 130 may include that collimator 610, narrow band filter slice 620, first are anti-
Mirror 630 and two-color laser spectroscope 640 are penetrated, two-color laser spectroscope 640 is capable of the laser of the sending of reflection laser 110 and can
Transmit the laser reflected from sample.First reflecting mirror 630 is used to for the light projected from narrow band filter slice 620 being reflected towards double-colored sharp
Light spectroscope 640.The laser issued from laser 110 can successively pass through collimator 610, narrow band filter slice 620, first reflects
Microlens 170 are injected after mirror 630 and two-color laser spectroscope 640, and then are radiated on sample.
Outer optical path component 130 further includes coupling camera lens 710 and high-pass filtering piece 720, and the two is respectively positioned on 120 He of spectrograph
Between two-color laser spectroscope 640.The laser reflected from sample can pass sequentially through microlens 170, two-color laser light splitting
It is entered in spectrograph 120 after mirror 640, high-pass filtering piece 720 and coupling camera lens 710.
Further, outer optical path component 130 further includes light source 810, imaging sensor 820, half-reflecting half mirror 830, second
Reflecting mirror 840 and third reflecting mirror 850, third reflecting mirror 850 can be plugged to high-pass filtering piece 720 and two-color laser spectroscope
Between 640.When third reflecting mirror 850 is inserted between high-pass filtering piece 720 and two-color laser spectroscope 640, light source 810 is sent out
Light out can successively swash after the reflection of half-reflecting half mirror 830, the second reflecting mirror 840 and third reflecting mirror 850 from double-colored
Light spectroscope 640 transmits, and then is radiated on sample by microlens 170；Imaging sensor 820 is located at half-reflecting half mirror
830 transparent side.It is reversible separate according to optical path, imaging sensor 820 can receive by two-color laser spectroscope 640 transmit after,
And reflected by the second reflecting mirror 840 and third reflecting mirror 850, then the light transmitted by half-reflecting half mirror 830, to form the figure of sample
As information.
When needing to observe, by third reflecting mirror 850 be inserted into high-pass filtering piece 720 and two-color laser spectroscope 640 it
Between, to the light of light source 810 is introduced into optical path, thus ready-made observation optical path.After observation, by third reflecting mirror
850 take out between high-pass filtering piece 720 and two-color laser spectroscope 640, and spectral detection optical path can be made to be connected to.
Spectrum detection device uses optical microphotograph camera lens 170, high-resolution focusing excitation and acquisition spectrum, cooperates outer light
Road component 130 can be realized the observation and selection of sample surfaces focal position.
The design principle of the present embodiment is as follows: by adjust the first shift adjusting machine 140 and microlens 170 it is fixed and
Outer optical path component 130 is adjusted to same optical axis with microlens 170 by second displacement adjustment mechanism 160；What laser 110 emitted
Laser initially enters outer optical path component 130, subsequently transmits through oblique light passing flange 150 and enters microlens 170 and focus on
Sample surfaces immediately below electron gun 200；The optical signalling gone out by laser or electron-beam excitation, is collected by microlens 170
Afterwards, it is transmitted through oblique light passing flange 150 and enters outer optical path component 130, spectrograph 120 is finally reached, to realize micro- light
Spectrum analysis function；The scanning beam that SEM electron gun 200 emits, in the electronic signal that sample surfaces are inspired, by electron beam
It collects probe 510 to be detected, and electron-beam analysis equipment 530 is transferred to be analyzed, realize the function of scanning electron microscope.
The embodiment of the present invention breaches the ex situ of existing microspectrum and scanning electron microscope combined system/non real-time, can
By the defects such as property is poor, resolution ratio is low, real-time, original position, the high-resolution spectra detection of collaboration and microscopic observation can be realized.
Scanning electron microscope and spectroscopy equipment combined apparatus include vacuum device, and vacuum device is connect with vacuum warehouse 300, are used
In to the progress vacuumize process of vacuum warehouse 300.It is additionally provided with pressure gauge in vacuum warehouse 300, for detecting the gas in vacuum warehouse 300
Pressure.
These are only the preferred embodiment of the present invention, is not intended to restrict the invention, for those skilled in the art
For member, the invention may be variously modified and varied.All within the spirits and principles of the present invention, it is made it is any modification,
Equivalent replacement, improvement etc., should all be included in the protection scope of the present invention.
Claims (9)
1. a kind of scanning electron microscope and spectroscopy equipment combined apparatus characterized by comprising spectrum detection device, scanning electron microscope connect
Receiving apparatus and electron gun；
The spectrum detection device can be along first direction to electromagnetic radiation laser, and the electron gun can be in a second direction to institute
Electromagnetic radiation electron beam is stated, the probe of the scanning electron microscope reception device is towards third direction, for receiving the table of the sample
The electronic signal that face issues；And the first direction is not overlapped with the second direction and third direction respectively.
2. scanning electron microscope according to claim 1 and spectroscopy equipment combined apparatus, which is characterized in that the scanning electron microscope with
Spectroscopy equipment combined apparatus includes vacuum warehouse and sample stage, and the spectrum detection device and scanning electron microscope reception device are each attached to
In the vacuum warehouse；
The electron gun and sample stage are installed in inside the vacuum warehouse, and the electron gun is located at the top of the sample stage；
And the spectrum detection device and scanning electron microscope reception device are located at the two sides of the electron gun.
3. scanning electron microscope according to claim 2 and spectroscopy equipment combined apparatus, which is characterized in that the sample stage includes
Table top and elevating mechanism, the table top are connect with the elevating mechanism, and the elevating mechanism is for driving the table top vertically
It moves up and down.
4. scanning electron microscope according to claim 2 and spectroscopy equipment combined apparatus, which is characterized in that the spectral detection dress
It sets including laser, spectrograph, outer optical path component, the first shift adjusting machine, light passing flange, second displacement adjustment mechanism, show
Micro lens；
The light passing flange is arranged on the bulkhead of the vacuum warehouse, swashs so as to can be realized by light passing flange inside and outside vacuum warehouse
Light conduction；
The laser and spectrograph are connect with one end of the outer optical path component, the other end of the outer optical path component and institute
The movable end connection of the first shift adjusting machine is stated, the fixing end of first shift adjusting machine is fixedly connected on the light passing
On the lateral wall of flange；
The fixing end of the second displacement adjustment mechanism is mounted on the inner sidewall of the light passing flange；The microlens installation
In the movable end of the second displacement adjustment mechanism, first shift adjusting machine and second displacement adjustment mechanism are for adjusting
The outer optical path component and the same optical axis of microlens.
5. scanning electron microscope according to claim 4 and spectroscopy equipment combined apparatus, which is characterized in that first displacement is adjusted
Complete machine structure is two-dimension displacement fixed platform, and the second displacement adjustment mechanism includes that three-D displacement adjusts platform and lens bracket,
The lens bracket is mounted on the three-D displacement adjustment platform, and the lens bracket is for fixing the microlens.
6. scanning electron microscope according to claim 4 and spectroscopy equipment combined apparatus, which is characterized in that the scanning electron microscope connects
Receiving apparatus includes that electron-beam analysis equipment, mounting flange and electron beam collect probe；The mounting flange is arranged in the vacuum
On the bulkhead in storehouse, so as to can be connected to by mounting flange inside and outside vacuum warehouse；
The electron beam collects the inside that probe is fixedly mounted on the mounting flange, and the electron beam collects the outer end of probe
It is connect after the mounting flange with the electron-beam analysis equipment being fixed on the outside of the mounting flange.
7. scanning electron microscope according to claim 4 and spectroscopy equipment combined apparatus, which is characterized in that the outer optical path component
Including collimator, narrow band filter slice, the first reflecting mirror and two-color laser spectroscope, the two-color laser spectroscope can reflect institute
It states the laser of laser sending and is transmissive to the laser reflected from the sample；
First reflecting mirror is used to the light projected from the narrow band filter slice being reflected towards the two-color laser spectroscope, so that
The light issued from the laser can successively pass through the collimator, narrow band filter slice, the first reflecting mirror and two-color laser point
The microlens are injected after light microscopic；
The outer optical path component further includes coupling camera lens and high-pass filtering piece, and the two is respectively positioned on the spectrograph and two-color laser
Between spectroscope so that the laser reflected from the sample can pass sequentially through the microlens, two-color laser spectroscope,
Enter after high-pass filtering piece and coupling camera lens into the spectrograph.
8. scanning electron microscope according to claim 7 and spectroscopy equipment combined apparatus, which is characterized in that the outer optical path component
It further include light source, imaging sensor, half-reflecting half mirror, the second reflecting mirror and third reflecting mirror, the third reflecting mirror can be inserted
It pulls out between the high-pass filtering piece and two-color laser spectroscope, so that the light that the light source issues can be successively through more than half anti-half
It is transmitted after the reflection of lens, the second reflecting mirror and third reflecting mirror from the two-color laser spectroscope；
Described image sensor is located at the transparent side of the half-reflecting half mirror, allows it to reception and is divided by the two-color laser
It after mirror transmission, and is reflected by the second reflecting mirror and third reflecting mirror, then the light transmitted by the half-reflecting half mirror, described in being formed
The image information of sample.
9. scanning electron microscope according to claim 2 and spectroscopy equipment combined apparatus, which is characterized in that the scanning electron microscope with
Spectroscopy equipment combined apparatus includes vacuum device, and the vacuum device is connect with the vacuum warehouse, for the vacuum
Storehouse carries out vacuumize process.
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