CN104236853B - A kind of laser gyro mirror performance online testing device - Google Patents
A kind of laser gyro mirror performance online testing device Download PDFInfo
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- CN104236853B CN104236853B CN201310226911.1A CN201310226911A CN104236853B CN 104236853 B CN104236853 B CN 104236853B CN 201310226911 A CN201310226911 A CN 201310226911A CN 104236853 B CN104236853 B CN 104236853B
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Abstract
The invention belongs to laser performance technical field of measurement and test, be specifically related to a kind of laser gyro mirror performance online testing device.Obtained by machining, optical manufacturing and chemical polishing by the microcrystal glass material of cube structure, main body is the right prism cavity of a decahedron structure, the bottom surface of right prism be each interior angle be the octagon of 135 °, centre has the center through hole of a diameter of 50mm；Sphere outgoing mirror, anode 1, chamber translatory mirror, negative electrode, flat output mirror, anode 2, sphere completely reflecting mirror and blank face are set successively on six sides of right prism.At the flat output mirror of cavity and the both sides of sphere outgoing mirror, four optical windows are set.After on and off switch is opened, laser gyro mirror performance online testing device is started working, anode 1 cathode anode 2 region in right prism cavity is region of discharge, produce, at sphere outgoing mirror and flat output mirror, the He Ne laser that wavelength is 632.8nm to export, thus Real Time Observation laser gyro mirror performance situation of change.
Description
Technical field
The invention belongs to laser performance technical field of measurement and test, be specifically related to a kind of laser gyro mirror performance
Online testing device.
Background technology
Laser gyro belongs to the one of He-Ne laser instrument, although the most straight chamber He-Ne laser technique compares
Maturation, is also greatly improved on life and reliability, but with laser gyro for, commercial He-Ne
Laser instrument is straight cavate, and region of discharge is also away from reflecting mirror, so electron injury can not direct performance to laser
Produce impact.But, due to laser gyro ring resonator structure, thin film electronic damage will directly
Have influence on the index such as the loss of resonator cavity, phase place change.Owing to the electron injury of film layer may result in mirror coating
The change of the indexs such as the absorption of layer, scattering, these changes are directly reflected into the change of cavity loss, i.e. laser
Output changes, and the most how to control film characteristics degeneration under plasma environment and becomes ultralow damage
One of key technology of consumption thin film study.
The quality of low-loss AR film reflecting mirror film performance directly influences the performance of laser gyro, at plasma
Under body discharge environment the optical property of mirror coating layer and laser gyro performance (such as lock-in threshold, light intensity) it
Between relation the most unknown.It is thus desirable to a set of laser gyro mirror performance online testing device, Study of Laser
Gyro mirror performance situation of change under running conditions.
Summary of the invention
The technical problem to be solved in the present invention is to provide a set of laser gyro mirror performance online testing device,
Interact in order to Study of Laser gyro resonator cavity plasma and film layer and mirror film performance
Line situation of change.
In order to realize this purpose, the present invention adopts the technical scheme that:
A kind of laser gyro mirror performance online testing device, is led to by the microcrystal glass material of cube structure
Crossing machining, optical manufacturing and chemical polishing and obtain, main body is the right prism chamber of a decahedron structure
Body, the bottom surface of right prism be each interior angle be the octagon of 135 °, octagon respectively by a length of L1 and
The line segment of L2 is spaced ending successively and is connected to form；L1=31mm, L2=46mm, the height of right prism be 40～
60mm；Centre has the center through hole of a diameter of 50mm；Successively ball is set on six sides of right prism
Face outgoing mirror, anode 1, chamber translatory mirror, negative electrode, flat output mirror, anode 2, sphere completely reflecting mirror and sky
Flour.
Wherein, sphere outgoing mirror, chamber translatory mirror, flat output mirror, sphere completely reflecting mirror constitute annular resonance
Cavity, a length of L1 that four sides at its place project on right prism bottom surface；The sun of discharging condition is provided
The a length of L2 that four sides at pole 1, negative electrode, anode 2, and blank face place project on right prism bottom surface；
Be coated with on sphere outgoing mirror, flat output mirror wavelength be 632.8nm, operating angle be 45 °, a diameter of 25mm
High reverse pumping membrane, plated film district is the region of a diameter of 8mm in center of mirror；Chamber translatory mirror, sphere are complete
Be coated with on anti-mirror wavelength be 632.8nm, operating angle be 45 °, the high-reflecting film of a diameter of 25mm, plated film
District is the region of a diameter of 8mm in center of mirror；Flat output mirror and the two of sphere outgoing mirror at cavity
Side arranges four optical windows.
Between center through hole and sphere outgoing mirror, open the cylindrical optical window of two a diameter of 30mm, each
The axis of optical window is 45 ° with the angle of sphere outgoing mirror place plane, and between the axis of two optical windows, angle is
90°；Set the cylindrical end face at the optical window place near sphere outgoing mirror side as patch minute surface, patch minute surface
The center of circle and the center of circle of sphere outgoing mirror between distance be 15mm；Arranging one side plating wavelength on patch minute surface is
632.8nm, operating angle are the eyeglass of the antireflective film of 0 °, as light window；Defeated with plane in center through hole
Between appearance, open the cylindrical optical window of two a diameter of 30mm, the axis of each optical window and flat output mirror
The angle of place plane is 45 °, and between the axis of two optical windows, angle is 90 °；Set and export near plane
The cylindrical end face at the optical window place of mirror side is patch minute surface, the center of circle of patch minute surface and the circle of flat output mirror
Distance between the heart is 15mm；Patch minute surface on arrange a wavelength be 632.8nm, operating angle be 45 °
The eyeglass of antireflective film, as light window.
Laser gyro mirror performance online testing device is carried to anode 1, anode 2 and negative electrode by power source special
For electric energy, after on and off switch is opened, laser gyro mirror performance online testing device is started working, straight rib
Anode 1-K-A 2 region in post cavity is region of discharge, produces at sphere outgoing mirror and flat output mirror
Raw wavelength is the He-Ne laser output of 632.8nm；Sphere outgoing mirror and flat output mirror are to be tested
Laser gyro reflecting mirror；After laser gyro mirror performance online testing device is properly functioning, defeated to sphere
The laser gyro mirror performance of appearance side carries out on-line measurement, when light beam impinges perpendicularly on one piece of optical window
Inciding sphere outgoing mirror with 45° angle degree after sheet, after being reflected by sphere outgoing mirror, vertical incidence is passed through same again
Another block optical window of side, the light of reflection output is with the reflective information of sphere outgoing mirror, thus monitors ball in real time
Face outgoing mirror performance situation of change；The laser gyro mirror performance of flat output mirror side is surveyed online
Amount, incides flat output mirror with 45° angle degree after light beam impinges perpendicularly on one piece of light window, by flat
After the outgoing mirror reflection of face, vertical incidence passes through another block optical window of homonymy again, and the light of reflection output is defeated with plane
The reflective information of appearance, thus monitoring flat output mirror performance situation of change in real time.
Further, a kind of laser gyro mirror performance online testing device as above, wherein: put
Place face outgoing mirror, flat output mirror, sphere completely reflecting mirror, chamber translatory mirror, the position of optical window all use light
Learning processing, fineness is III level.
Further, a kind of laser gyro mirror performance online testing device as above, wherein: ball
Face outgoing mirror, chamber translatory mirror, flat output mirror, sphere completely reflecting mirror use the plating of ion beam sputter depositing technology
Film.
Further, a kind of laser gyro mirror performance online testing device as above, wherein: ball
Face outgoing mirror, chamber translatory mirror, flat output mirror, sphere completely reflecting mirror use method and the laser gyro of optical cement
Cavity bonds together.
Further, a kind of laser gyro mirror performance online testing device as above, wherein: ball
High reverse pumping membrane reflectance on face outgoing mirror, flat output mirror be more than 99.982%, transmitance be 70～
140ppm。
Further, a kind of laser gyro mirror performance online testing device as above, wherein: chamber
The reflectance of the high-reflecting film on translatory mirror and sphere total reflective mirror is more than 99.992%.
Further, a kind of laser gyro mirror performance online testing device as above, wherein:
On the eyeglass arranged on the patch minute surface of four optical windows, the antireflective film transmitance of plating is more than 99.99%.
Further, a kind of laser gyro mirror performance online testing device as above, wherein: swash
Optical circulator mirror performance online testing device provide electric energy voltage be 1000～2000V, electric current be 0.6～
1.0mA。
Laser gyro mirror performance online testing device in verification experimental verification, technical solution of the present invention can
With Real Time Observation laser gyro mirror performance situation of change, can be preferably in Study of Laser gyro resonator cavity
Plasma interacts with film layer, thus improves laser gyro reflecting mirror combination property further.
Accompanying drawing explanation
Fig. 1 is the structural representation of the laser gyro mirror performance online testing device of the present invention；
Fig. 2 is the two-dimentional installation diagram of the laser gyro mirror performance online testing device of the present invention；
Fig. 3 be the flat output mirror of the laser gyro mirror performance online testing device of the present invention and sphere defeated
Appearance online phase shift test result；
Fig. 4 be the present invention laser gyro mirror performance online testing device in the schematic diagram of light window position.
In figure: 1～4 smooth windows, 5 sphere outgoing mirrors, 6 chamber translatory mirrors, 7 flat output mirrors, 8 spheres are complete
Reflecting mirror, 9 anode 1,10 blank face, 11 anode 2,12 negative electrodes.
Detailed description of the invention
Below in conjunction with the accompanying drawings and be embodied as that the present invention is further illustrated:
As it is shown in figure 1, a kind of laser gyro mirror performance online testing device, micro-by cube structure
Crystal glass material is obtained by machining, optical manufacturing and chemical polishing, and main body is a decahedron knot
The right prism cavity of structure, the bottom surface of right prism be each interior angle be the octagon of 135 °, octagon respectively by
The line segment of a length of L1 and L2 is spaced ending successively and is connected to form；L1=31mm, L2=46mm, right prism
Height be 40～60mm；Centre has the center through hole of a diameter of 50mm；Successively at six of right prism
Sphere outgoing mirror, anode 1, chamber translatory mirror, negative electrode, flat output mirror, anode 2, sphere are set on side
Completely reflecting mirror and blank face.In the present embodiment, placing sphere outgoing mirror, flat output mirror, sphere is all-trans
Penetrate mirror, chamber translatory mirror, the position of optical window all use optical manufacturing, and fineness is III level.Sphere outgoing mirror,
Chamber translatory mirror, flat output mirror, sphere completely reflecting mirror use ion beam sputter depositing technology plated film, use light
The method of glue bonds together with laser gyro cavity.
Wherein, sphere outgoing mirror, chamber translatory mirror, flat output mirror, sphere completely reflecting mirror constitute annular resonance
Cavity, a length of L1 that four sides at its place project on right prism bottom surface；The sun of discharging condition is provided
The a length of L2 that four sides at pole 1, negative electrode, anode 2, and blank face place project on right prism bottom surface；
Be coated with on sphere outgoing mirror, flat output mirror wavelength be 632.8nm, operating angle be 45 °, a diameter of 25mm
High reverse pumping membrane, plated film district is the region of a diameter of 8mm in center of mirror；Chamber translatory mirror, sphere are complete
Be coated with on anti-mirror wavelength be 632.8nm, operating angle be 45 °, the high-reflecting film of a diameter of 25mm, plated film
District is the region of a diameter of 8mm in center of mirror；In the present embodiment, sphere outgoing mirror, plane output
High reverse pumping membrane reflectance on mirror is more than 99.982%, and transmitance is 70～140ppm.Chamber translatory mirror and ball
The reflectance of the high-reflecting film on the total reflective mirror of face is more than 99.992%.Flat output mirror and sphere outgoing mirror at cavity
Both sides four optical windows are set.
Between center through hole and sphere outgoing mirror, open the cylindrical optical window of two a diameter of 30mm, each
The axis of optical window is 45 ° with the angle of sphere outgoing mirror place plane, and between the axis of two optical windows, angle is
90°；Set the cylindrical end face at the optical window place near sphere outgoing mirror side as patch minute surface, patch minute surface
The center of circle and the center of circle of sphere outgoing mirror between distance be 15mm；Arranging one side plating wavelength on patch minute surface is
632.8nm, operating angle are the eyeglass of the antireflective film of 0 °, as light window；Defeated with plane in center through hole
Between appearance, open the cylindrical optical window of two a diameter of 30mm, the axis of each optical window and flat output mirror
The angle of place plane is 45 °, and between the axis of two optical windows, angle is 90 °；Set and export near plane
The cylindrical end face at the optical window place of mirror side is patch minute surface, the center of circle of patch minute surface and the circle of flat output mirror
Distance between the heart is 15mm；Patch minute surface on arrange a wavelength be 632.8nm, operating angle be 45 °
The eyeglass of antireflective film, as light window.In the present embodiment, the patch minute surface of four optical windows is arranged
On eyeglass, the antireflective film transmitance of plating is more than 99.99%.
Laser gyro mirror performance online testing device is carried to anode 1, anode 2 and negative electrode by power source special
For electric energy, after on and off switch is opened, laser gyro mirror performance online testing device is started working, straight rib
Anode 1-K-A 2 region in post cavity is region of discharge, and in the present embodiment, laser gyro reflects
The electric energy voltage that mirror performance online test device provides is 1000～2000V, and electric current is 0.6～1.0mA.?
Sphere outgoing mirror and flat output mirror produce the He-Ne laser output that wavelength is 632.8nm；Sphere outgoing mirror
It is laser gyro reflecting mirror to be tested with flat output mirror；When laser gyro mirror performance on-line testing
After device is properly functioning, the laser gyro mirror performance of sphere outgoing mirror side is carried out on-line measurement, when
Light beam incides sphere outgoing mirror with 45° angle degree after impinging perpendicularly on one piece of light window, is exported by sphere
After mirror reflection, vertical incidence passes through another block optical window of homonymy again, and the light of reflection output is with sphere outgoing mirror
Reflective information, thus monitoring sphere outgoing mirror performance situation of change in real time；Laser to flat output mirror side
Gyro mirror performance carries out on-line measurement, with 45° angle degree after light beam impinges perpendicularly on one piece of light window
Inciding flat output mirror, after being reflected by flat output mirror, vertical incidence passes through another block optical window of homonymy again,
The light of reflection output is with the reflective information of flat output mirror, thus monitoring flat output mirror performance change in real time
Situation.
In the present embodiment, use the WVASE32 type ultraviolet of J.A.WOOLLAM company of the U.S. to near-infrared
Ellipsometer test, when laser gyro mirror performance online testing device stands placement, incident illumination passes through light
Window can with in situ study flat output mirror and sphere outgoing mirror the phase shift variations situation under the conditions of 45 degree.Swash
The flat output mirror of optical circulator mirror performance online testing device and sphere outgoing mirror online phase shift test result
As shown in Figure 4, it can be seen that sphere outgoing mirror is along with laser gyro mirror performance on-line testing
The increase of device working time, phase shift occurs in that a small amount of increase phenomenon, becomes after the work 80min time
In stable, variable quantity is about 0.1 °.The phase shift of flat output mirror is along with along with laser gyro mirror performance
The increase of online testing device working time is substantially at steady statue, this is because flat output mirror is in
In plasma discharge environment, around positive and negative charge is in poised state, so the phase shift shadow to flat output mirror
Ring less.
In the present embodiment, use the Lambda900 type spectrophotometer of PE company to laser gyro reflecting mirror
Performance online tests the flat output mirror in device and the off-line of sphere outgoing mirror and online optical transmission spectra enters
Having gone measurement Research, measurement result shows, optical transmission spectra has fluctuation in a small amount, but basic before and after waveform work
Unchanged, it is seen that the optical transmission spectra of laser gyro reflecting mirror is affected less by plasma discharge.
This embodiment shows, can be with Real Time Observation laser by laser gyro mirror performance online testing device
Gyro mirror performance situation of change, can be by testing plasma in more preferable Study of Laser gyro resonator cavity
Body interacts with film layer, thus improves laser gyro reflecting mirror combination property further.
Claims (8)
1. a laser gyro mirror performance online testing device, it is characterised in that: online testing device is by just
The microcrystal glass material of cube structure is obtained by machining, optical manufacturing and chemical polishing, and main body is
The right prism cavity of one decahedron structure, the bottom surface of right prism be each interior angle be the octagon of 135 °,
Octagon is spaced ending successively by the line segment of a length of L1 and L2 respectively and is connected to form；L1=31mm,
L2=46mm, the height of right prism is 40～60mm；Centre has the center through hole of a diameter of 50mm；
Sphere outgoing mirror, anode 1, chamber translatory mirror, negative electrode are set successively on six sides of right prism, put down
Face outgoing mirror, anode 2, sphere completely reflecting mirror and blank face；
Wherein, sphere outgoing mirror, chamber translatory mirror, flat output mirror, sphere completely reflecting mirror constitute annular resonance
Cavity, a length of L1 that four sides at its place project on right prism bottom surface；The sun of discharging condition is provided
The a length of L2 that four sides at pole 1, negative electrode, anode 2, and blank face place project on right prism bottom surface；
Be coated with on sphere outgoing mirror, flat output mirror wavelength be 632.8nm, operating angle be 45 °, diameter
For the high reverse pumping membrane of 25mm, plated film district is the region of a diameter of 8mm in center of mirror；
Be coated with on chamber translatory mirror, sphere completely reflecting mirror wavelength be 632.8nm, operating angle be 45 °, diameter
For the high-reflecting film of 25mm, plated film district is the region of a diameter of 8mm in center of mirror；
At the flat output mirror of cavity and the both sides of sphere outgoing mirror, four optical windows are set:
Between center through hole and sphere outgoing mirror, open the cylindrical optical window of two a diameter of 30mm, each
The axis of optical window is 45 ° with the angle of sphere outgoing mirror place plane, and between the axis of two optical windows, angle is
90°；Set the cylindrical end face at the optical window place near sphere outgoing mirror side as patch minute surface, patch minute surface
The center of circle and the center of circle of sphere outgoing mirror between distance be 15mm；Arranging a wavelength on patch minute surface is
632.8nm, operating angle are the eyeglass of the antireflective film of 0 °, as light window；
Between center through hole and flat output mirror, open the cylindrical optical window of two a diameter of 30mm, each
The axis of optical window is 45 ° with the angle of flat output mirror place plane, and between the axis of two optical windows, angle is
90°；Set the cylindrical end face at the optical window place near flat output mirror side as patch minute surface, patch minute surface
The center of circle and the center of circle of flat output mirror between distance be 15mm；Arranging a wavelength on patch minute surface is
632.8nm, operating angle are the eyeglass of the antireflective film of 45 °, as light window；
Laser gyro mirror performance online testing device is carried to anode 1, anode 2 and negative electrode by power source special
For electric energy, after on and off switch is opened, laser gyro mirror performance online testing device is started working, straight rib
Anode 1-K-A 2 region in post cavity is region of discharge, produces at sphere outgoing mirror and flat output mirror
Raw wavelength is the He-Ne laser output of 632.8nm；Sphere outgoing mirror and flat output mirror are to be tested
Laser gyro reflecting mirror；
After laser gyro mirror performance online testing device is properly functioning, sphere outgoing mirror side is swashed
Optical circulator mirror performance carries out on-line measurement, with 45° angle after light beam impinges perpendicularly on one piece of light window
Degree incides sphere outgoing mirror, and after being reflected by sphere outgoing mirror, vertical incidence passes through another block light of homonymy again
Window, the light of reflection output is with the reflective information of sphere outgoing mirror, thus monitoring sphere outgoing mirror performance in real time
Situation of change；
The laser gyro mirror performance of flat output mirror side is carried out on-line measurement, when light beam vertically enters
Incide flat output mirror with 45° angle degree after being mapped to one piece of light window, hang down again after being reflected by flat output mirror
Straight incident another block optical window by homonymy, reflects the light reflective information with flat output mirror of output, from
And monitor flat output mirror performance situation of change in real time.
2. a kind of laser gyro mirror performance online testing device as claimed in claim 1, its feature exists
In: place sphere outgoing mirror, flat output mirror, sphere completely reflecting mirror, chamber translatory mirror, optical window position equal
Using optical manufacturing, fineness is III level.
3. a kind of laser gyro mirror performance online testing device as claimed in claim 1, its feature exists
In: sphere outgoing mirror, chamber translatory mirror, flat output mirror, sphere completely reflecting mirror use ion beam sputter depositing
Technology plated film.
4. a kind of laser gyro mirror performance online testing device as claimed in claim 1, its feature exists
In: sphere outgoing mirror, chamber translatory mirror, flat output mirror, sphere completely reflecting mirror use the method for optical cement with sharp
Optical circulator cavity bonds together.
5. a kind of laser gyro mirror performance online testing device as claimed in claim 1, its feature exists
In: the high reverse pumping membrane reflectance on sphere outgoing mirror, flat output mirror is more than 99.982%, and transmitance is
70～140ppm.
6. a kind of laser gyro mirror performance online testing device as claimed in claim 1, its feature exists
In: the reflectance of the high-reflecting film on chamber translatory mirror and sphere completely reflecting mirror is more than 99.992%.
7. a kind of laser gyro mirror performance online testing device as claimed in claim 1, its feature exists
In: on the eyeglass arranged on the patch minute surface of four optical windows, the antireflective film transmitance of plating is more than 99.99%.
8. a kind of laser gyro mirror performance online testing device as claimed in claim 1, its feature exists
In: the electric energy voltage that laser gyro mirror performance online testing device provides is 1000～2000V, electric current
It is 0.6～1.0mA.
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| CN201310226911.1A CN104236853B (en) | 2013-06-07 | 2013-06-07 | A kind of laser gyro mirror performance online testing device |
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| CN201310226911.1A CN104236853B (en) | 2013-06-07 | 2013-06-07 | A kind of laser gyro mirror performance online testing device |
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| CN104236853B true CN104236853B (en) | 2016-11-23 |
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| CN106197953B (en) * | 2016-08-23 | 2019-01-01 | 中国航空工业集团公司西安飞行自动控制研究所 | A kind of universal laser gyro reflecting mirror on-line measurement device |
| CN114289872B (en) * | 2022-03-07 | 2022-08-23 | 西安中科华芯测控有限公司 | Method for assembling ultrafast laser mirror for miniature laser gyroscope |
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|---|---|---|---|---|
| SU1026007A1 (en) * | 1980-11-26 | 1983-06-30 | Предприятие П/Я Х-5827 | Non-flatness measuring method |
| US5495335A (en) * | 1989-04-05 | 1996-02-27 | Litton Systems, Inc. | Ring laser gyroscope with a non-loss inducing mode suppression mechanism |
| CN102003958A (en) * | 2010-10-01 | 2011-04-06 | 中国人民解放军国防科学技术大学 | Control device for working point of four-frequency laser gyro |
| CN102243136A (en) * | 2011-04-14 | 2011-11-16 | 西安电子科技大学 | Laser gyro optical resonant cavity loss measurement system based on resonance method |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
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| JPS6417486A (en) * | 1987-07-13 | 1989-01-20 | Toshiba Corp | Ring laser gyro |
-
2013
- 2013-06-07 CN CN201310226911.1A patent/CN104236853B/en not_active Expired - Fee Related
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| SU1026007A1 (en) * | 1980-11-26 | 1983-06-30 | Предприятие П/Я Х-5827 | Non-flatness measuring method |
| US5495335A (en) * | 1989-04-05 | 1996-02-27 | Litton Systems, Inc. | Ring laser gyroscope with a non-loss inducing mode suppression mechanism |
| CN102003958A (en) * | 2010-10-01 | 2011-04-06 | 中国人民解放军国防科学技术大学 | Control device for working point of four-frequency laser gyro |
| CN102243136A (en) * | 2011-04-14 | 2011-11-16 | 西安电子科技大学 | Laser gyro optical resonant cavity loss measurement system based on resonance method |
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| 激光陀螺光路变动分析及其对陀螺性能的影响;许光明等;《应用光学》;20100930;第31卷(第5期);第805-809页 * |
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