CN104235360A - Multilayer nano hard coating piston rod and processing process thereof - Google Patents
Multilayer nano hard coating piston rod and processing process thereof Download PDFInfo
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- CN104235360A CN104235360A CN201410471462.1A CN201410471462A CN104235360A CN 104235360 A CN104235360 A CN 104235360A CN 201410471462 A CN201410471462 A CN 201410471462A CN 104235360 A CN104235360 A CN 104235360A
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Abstract
The invention discloses a multilayer nano hard coating piston rod which comprises a rod body, wherein the surface of a substrate of the rod body is sequentially provided with a titanium bottom layer, a titanium nitride transition layer, a titanium carbonitride transition layer, an OTiCN transition layer, an alpha-Al2O3 ceramic coating and a titanium nitride surface layer from inside to outside. The invention also discloses a processing process of the multilayer nano hard coating piston rod. The processing process mainly comprises the following steps: cleaning a piston rod body; loading the piston rod body into low-temperature plasma seeping, pouring and plating equipment, and performing nitriding and coating; inspecting and warehousing. According to the multilayer nano hard coating piston rod, the surface of the substrate of the piston rod body is sequentially provided with six coatings from inside to outside so as to form a piston rod with high inner layer toughness, high outer layer rigidity and high abrasion resistance, the rigidity is 20-50GPa, and the surface friction coefficient is 0.1-0.4. Compared with a traditional piston rod, the multilayer nano hard coating piston rod has the advantages that the friction is obviously reduced, the abrasion resistance is improved, the service life of a single piece is prolonged, and furthermore, the multilayer nano hard coating piston rod can be repeatedly repaired on the premise that the rod body is not damaged, so that the cost is lowered.
Description
Technical field
The present invention relates to a kind of piston rod, particularly relate to a kind of multi-layer nano hard coat piston rod and processing technology.
Background technique
Piston rod is used in the products such as compressor, is the connected element of supporting piston acting, and major applications, in oil cylinder, cylinder moving power unit, is a moving element that motion is frequent, technical requirements is high.Because the operating ambient temperature of piston rod is high, friction frequent, so require piston rod at hardness, wear resistance, friction factor, have higher requirements in working life, improve for many years although traditional piston rod is existing, the combination property in its hardness, wear resistance, friction factor, working life or deficiency.
Summary of the invention
Object of the present invention is just to provide a kind of combination property much higher layer nanometer hard coat piston rod and processing technology to solve the problem.
The present invention is achieved through the following technical solutions above-mentioned purpose:
A kind of multi-layer nano hard coat piston rod, comprise the body of rod, the surface of the base material of the described body of rod is provided with titanium bottom, titanium nitride transition layer, TiCN transition layer, oxygen titanium carbonitride transition layer, α-Al2O3 ceramic coating and titanium nitride top layer from inside to outside successively.
In said structure, titanium bottom and Ti, can increase the adhesion of follow-up coating, thickness is about 100nm ~ 200nm; Titanium nitride transition layer and TiN, play component, hardness, to effective linking effect of aspects such as making a concerted effort, thickness be usually between 0.2 μm-0.5 μm; TiCN transition layer and TiCN, thickness is usually between 1 μm-3 μm; Oxygen titanium carbonitride transition layer and TiCNO, play component, hardness, to effective linking effect of aspects such as making a concerted effort, thickness be usually between 0.1 μm-0.5 μm; α-Al
2o
3ceramic coating is beneficial to the high red hardness keeping coating, and thickness is usually between 1 μm-3 μm; Titanium nitride top layer and TiN, thickness about 0.1 μm-1 μm, plays mark, reduces friction factor, reduces the aspect effects such as stickability.
The base material of the described body of rod is 38CrMoAlA.
A kind of processing technology of multi-layer nano hard coat piston rod: comprise the following steps:
(1) the piston rod body of rod is prepared;
(2) body of rod is cleaned;
(3) body of rod loaded fixture and be placed in low temperature plasma diffusion coating equipment, closing device door, is evacuated to base vacuum>=2 × 10
-2pa, vacuum chamber heating-up temperature to 300 DEG C, and keep more than constant temperature 1h;
(4) pass into high-purity Ar gas, make degree of vacuum be maintained at about 6Pa, unbalanced pulse grid bias power supply, progressively raise and be biased into more than 1KV, dutycycle 80%, auxiliary unlatching hall ion source, carry out plasma glow cleaning more than 10min;
(5) open workpiece rotating mechanism, regulate high-purity Ar throughput, make degree of vacuum be maintained at about 2 × 10
-1pa, unbalanced pulse grid bias power supply, parameter 800V, 80%, open arc source, arc stream 130A, trigger high-purity Ti target, energetic ion stream more than Bombardment and cleaning 5min is carried out to the body of rod;
(6) regulate high-purity Ar throughput, make degree of vacuum remain on 3 ~ 5 × 10
-1pa, reduces pulsed bias to parameter 500V, 30%, the thick about 100nm ~ 200nm of depositing Ti bottom;
(7) high-purity N is passed into
2gas, regulates Ar/N
2ratio, to 1:1, keeps degree of vacuum to be about 1Pa, depositing TiN transition layer, thick about 0.2 μm-0.5 μm;
(8) high-purity C is passed into
2h
2gas, regulates Ar/N
2/ C
2h
2ratio, to 1:30:5, keeps degree of vacuum to be about 1Pa, depositing Ti CN transition layer, thick about 1 μm-3 μm;
(9) high-purity O is passed into
2gas, regulates Ar/N
2/ C
2h
2/ O
2ratio, to 1:30:5:1, keeps degree of vacuum to be about 1Pa, depositing Ti CNO transition layer, thick about 0.1 μm-0.5 μm;
(10) Ti post arc source is closed successively, pulsed bias power supply, high-purity C
2h
2and N
2gas, then regulates Ar/O
2ratio, to 15:1, keeps degree of vacuum to be about 0.5Pa, opens medium frequency magnetron sputtering power supply, parameter 20A, 80%, 40kHz, deposition α-Al
2o
3ceramic coating, thick about 1 μm-3 μm;
(11) medium frequency magnetron sputtering power supply is closed successively, high-purity O
2gas, then passes into high-purity N
2gas, regulates Ar/N
2ratio, to 1:30, keeps degree of vacuum to be about 0.5Pa, opens direct magnetic control power supply, parameter 8A/460V, depositing TiN top layer, thick about 0.2 μm-1 μm;
(12) direct magnetic control power supply is closed successively, high-purity Ar and N
2gas, heating, workpiece rotates, and stops vacuumizing, and waits for that the temp. in vacuum furnace is cooled to less than 60 DEG C or to ambient temperature;
(13) open door for vacuum chamber, get workpiece, check multi-layer nano hard coat piston rod body of rod surface generalization situation piece by piece;
(14) multi-layer nano hard coat piston rod finished product is carried out vacuum package, enter finished stock storeroom.
Illustrate: the ratio between above-mentioned each gas is volume ratio.
Particularly, the described piston rod body of rod take 38CrMoAlA as base material.
Beneficial effect of the present invention is:
The present invention is by setting gradually titanium bottom, titanium nitride transition layer, TiCN transition layer, oxygen titanium carbonitride transition layer, α-Al from inside to outside at piston rod body of rod substrate surface
2o
3ceramic coating and titanium nitride top layer, form internal layer high-strength tenacity, the piston rod entity of outer high hardness, high abrasion, the hardness of its laminated coating is 20GPa ~ 50GPa, surface friction coefficient is 0.1 ~ 0.4, compare the piston rod after traditional machining and surface treatment and can reduce friction significantly, improve wear resistance, extend single-piece working life; And, under the prerequisite not damaging the body of rod, be easy to repeatedly repair, reduce costs.
Accompanying drawing explanation
Fig. 1 is the sectional structure schematic diagram of multi-layer nano hard coat piston rod of the present invention.
Embodiment
Below in conjunction with accompanying drawing, the invention will be further described:
As shown in Figure 1, multi-layer nano hard coat piston rod of the present invention comprises the body of rod 1, and the surface of the base material 8 of the body of rod 1 is provided with titanium bottom 2, titanium nitride transition layer 3, TiCN transition layer 4, oxygen titanium carbonitride transition layer 5, α-Al from inside to outside successively
2o
3ceramic coating 6 and titanium nitride top layer 7.Wherein, the base material 8 of the body of rod 1 is 38CrMoAlA (a kind of special nitriding steel); Titanium bottom and Ti, thickness is about 100nm ~ 200nm; Titanium nitride transition layer and TiN, thickness is usually between 0.2 μm-0.5 μm; TiCN transition layer and TiCN, thickness is usually between 1 μm-3 μm; Oxygen titanium carbonitride transition layer and TiCNO, thickness is usually between 0.1 μm-0.5 μm; α-Al
2o
3thickness of ceramic coating is between 1 μm-3 μm; Titanium nitride top layer and TiN, thickness about 0.1 μm-1 μm.
This multi-layer nano hard coat piston rod has separated type and combined type two kinds of processing modes.Wherein, after the machining operation that separated type processing technology refers to before nitriding completes, sequentially loaded in Nitrizing Treatment equipment, Vacuum coating device respectively by matrix and carry out surface treatment, inspection of then coming out of the stove, encapsulation is put in storage.Wherein, necessary cleaning to all be carried out before each loading vacuum furnace.Adopt the advantage of this manufacturing procedure to be the effective nitridation process of choosing multiple, and nitriding and coating procedure are assigned to different departments or platform completes, dispersion operation cost.Shortcoming is the increase in whole piston rod surface treatment process link, and quality control difficulty increases relatively.
This multi-layer nano hard coat piston rod should adopt combined type processing technology, and concrete steps comprise:
(1) preparation take 38CrMoAlA as the piston rod body of rod of base material, and this body of rod can obtain by following conventional processing steps: blanking → forging → normalizing → rough turn → modified → finish turning → fine grinding → milling six side → check → enter transfer storage facility;
(2) clean the body of rod, generally adopt chemical cleaning;
(3) body of rod loaded fixture and be placed in low temperature plasma diffusion coating equipment, closing device door, is evacuated to base vacuum>=2 × 10
-2pa, vacuum chamber heating-up temperature to 300 DEG C, and keep more than constant temperature 1h;
(4) pass into high-purity Ar gas, make degree of vacuum be maintained at about 6Pa, unbalanced pulse grid bias power supply, progressively raise and be biased into more than 1KV, dutycycle 80%, auxiliary unlatching hall ion source, carry out plasma glow cleaning more than 10min;
(5) open workpiece rotating mechanism, regulate high-purity Ar throughput, make degree of vacuum be maintained at about 2 × 10
-1pa, unbalanced pulse grid bias power supply, parameter 800V, 80%, open arc source, arc stream 130A, trigger high-purity Ti target, energetic ion stream more than Bombardment and cleaning 5min is carried out to the body of rod;
(6) regulate high-purity Ar throughput, make degree of vacuum remain on 3 ~ 5 × 10
-1pa, reduces pulsed bias to parameter 500V, 30%, the thick about 100nm ~ 200nm of depositing Ti bottom;
(7) high-purity N is passed into
2gas, regulates Ar/N
2ratio, to 1:1, keeps degree of vacuum to be about 1Pa, depositing TiN transition layer, thick about 0.2 μm-0.5 μm;
(8) high-purity C is passed into
2h
2gas, regulates Ar/N
2/ C
2h
2ratio, to 1:30:5, keeps degree of vacuum to be about 1Pa, depositing Ti CN transition layer, thick about 1 μm-3 μm;
(9) high-purity O is passed into
2gas, regulates Ar/N
2/ C
2h
2/ O
2ratio, to 1:30:5:1, keeps degree of vacuum to be about 1Pa, depositing Ti CNO transition layer, thick about 0.1 μm-0.5 μm;
(10) Ti post arc source is closed successively, pulsed bias power supply, high-purity C
2h
2and N
2gas, then regulates Ar/O
2ratio, to 15:1, keeps degree of vacuum to be about 0.5Pa, opens medium frequency magnetron sputtering power supply, parameter 20A, 80%, 40kHz, deposition α-Al
2o
3ceramic coating, thick about 1 μm-3 μm;
(11) medium frequency magnetron sputtering power supply is closed successively, high-purity O
2gas, then passes into high-purity N
2gas, regulates Ar/N
2ratio, to 1:30, keeps degree of vacuum to be about 0.5Pa, opens direct magnetic control power supply, parameter 8A/460V, depositing TiN top layer, thick about 0.2 μm-1 μm;
(12) direct magnetic control power supply is closed successively, high-purity Ar and N
2gas, heating, workpiece rotates, and stops vacuumizing, and waits for that the temp. in vacuum furnace is cooled to less than 60 DEG C or to ambient temperature;
(13) open door for vacuum chamber, get workpiece, check multi-layer nano hard coat piston rod body of rod surface generalization situation piece by piece;
(14) multi-layer nano hard coat piston rod finished product is carried out vacuum package, enter finished stock storeroom.
Above-described embodiment is preferred embodiment of the present invention; it is not the restriction to technical solution of the present invention; as long as without the technological scheme that creative work can realize on the basis of above-described embodiment, all should be considered as falling within the scope of the rights protection of patent of the present invention.
Claims (4)
1. a multi-layer nano hard coat piston rod, comprises the body of rod, it is characterized in that: the surface of the base material of the described body of rod is provided with titanium bottom, titanium nitride transition layer, TiCN transition layer, oxygen titanium carbonitride transition layer, α-Al from inside to outside successively
2o
3ceramic coating and titanium nitride top layer.
2. multi-layer nano hard coat piston rod according to claim 1, is characterized in that: the base material of the described body of rod is 38CrMoAlA.
3. the processing technology of a multi-layer nano hard coat piston rod as claimed in claim 1: comprise the following steps:
(1) the piston rod body of rod is prepared;
(2) body of rod is cleaned;
(3) body of rod loaded fixture and be placed in low temperature plasma diffusion coating equipment, closing device door, is evacuated to base vacuum>=2 × 10
-2pa, vacuum chamber heating-up temperature to 300 DEG C, and keep more than constant temperature 1h;
(4) pass into high-purity Ar gas, make degree of vacuum be maintained at about 6Pa, unbalanced pulse grid bias power supply, progressively raise and be biased into more than 1KV, dutycycle 80%, auxiliary unlatching hall ion source, carry out plasma glow cleaning more than 10min;
(5) open workpiece rotating mechanism, regulate high-purity Ar throughput, make degree of vacuum be maintained at about 2 × 10
-1pa, unbalanced pulse grid bias power supply, parameter 800V, 80%, open arc source, arc stream 130A, trigger high-purity Ti target, energetic ion stream more than Bombardment and cleaning 5min is carried out to the body of rod;
(6) regulate high-purity Ar throughput, make degree of vacuum remain on 3 ~ 5 × 10
-1pa, reduces pulsed bias to parameter 500V, 30%, the thick about 100nm ~ 200nm of depositing Ti bottom;
(7) high-purity N is passed into
2gas, regulates Ar/N
2ratio, to 1:1, keeps degree of vacuum to be about 1Pa, depositing TiN transition layer, thick about 0.2 μm-0.5 μm;
(8) high-purity C is passed into
2h
2gas, regulates Ar/N
2/ C
2h
2ratio, to 1:30:5, keeps degree of vacuum to be about 1Pa, depositing Ti CN transition layer, thick about 1 μm-3 μm;
(9) high-purity O is passed into
2gas, regulates Ar/N
2/ C
2h
2/ O
2ratio, to 1:30:5:1, keeps degree of vacuum to be about 1Pa, depositing Ti CNO transition layer, thick about 0.1 μm-0.5 μm;
(10) Ti post arc source is closed successively, pulsed bias power supply, high-purity C
2h
2and N
2gas, then regulates Ar/O
2ratio, to 15:1, keeps degree of vacuum to be about 0.5Pa, opens medium frequency magnetron sputtering power supply, parameter 20A, 80%, 40kHz, deposition α-Al
2o
3ceramic coating, thick about 1 μm-3 μm;
(11) medium frequency magnetron sputtering power supply is closed successively, high-purity O
2gas, then passes into high-purity N
2gas, regulates Ar/N
2ratio, to 1:30, keeps degree of vacuum to be about 0.5Pa, opens direct magnetic control power supply, parameter 8A/460V, depositing TiN top layer, thick about 0.2 μm-1 μm;
(12) direct magnetic control power supply is closed successively, high-purity Ar and N
2gas, heating, workpiece rotates, and stops vacuumizing, and waits for that the temp. in vacuum furnace is cooled to less than 60 DEG C or to ambient temperature;
(13) open door for vacuum chamber, get workpiece, check multi-layer nano hard coat piston rod body of rod surface generalization situation piece by piece;
(14) multi-layer nano hard coat piston rod finished product is carried out vacuum package, enter finished stock storeroom.
4. multi-layer nano hard coat piston rod according to claim 3, is characterized in that: the described piston rod body of rod take 38CrMoAlA as base material.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410471462.1A CN104235360B (en) | 2014-09-16 | 2014-09-16 | Multi-layer nano hard coat piston rod and processing technology |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410471462.1A CN104235360B (en) | 2014-09-16 | 2014-09-16 | Multi-layer nano hard coat piston rod and processing technology |
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| CN104235360A true CN104235360A (en) | 2014-12-24 |
| CN104235360B CN104235360B (en) | 2016-03-23 |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105464937A (en) * | 2015-12-15 | 2016-04-06 | 芜湖市甬微制冷配件制造有限公司 | Novel piston rod of air condition compressor |
| CN107834979A (en) * | 2017-11-23 | 2018-03-23 | 苏州艺力鼎丰智能技术有限公司 | A kind of impregnator for precisely going out liquid |
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| DE102006004783A1 (en) * | 2005-03-26 | 2006-09-28 | Zf Friedrichshafen Ag | Vibration damper piston rod in steel of specific carbon and manganese content, used for engines and machines with piston rods and cylinders, comprises aluminum and titanium alloying additions |
| CN102534392A (en) * | 2012-02-16 | 2012-07-04 | 无锡市万邦机械制造厂 | Processing, formation and manufacturing method of piston rod using 38CrMoAlA steel as materials |
| CN202732926U (en) * | 2012-08-09 | 2013-02-13 | 鞍山信诚设备工程有限公司 | Ceramic spraying piston rod of vibration cylinder |
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| CN203548866U (en) * | 2012-05-09 | 2014-04-16 | 余姚凯登机电数控有限公司 | Piston device |
| CN103775634A (en) * | 2014-02-21 | 2014-05-07 | 四川金星压缩机制造有限公司 | Composite coating piston rod and manufacturing method thereof |
| CN204041985U (en) * | 2014-09-16 | 2014-12-24 | 四川金星压缩机制造有限公司 | Multi-layer nano hard coat piston rod |
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| CN2357179Y (en) * | 1997-04-25 | 2000-01-05 | 孔宪清 | Wear-resisting piston and for automobile vibration damper |
| DE102006004783A1 (en) * | 2005-03-26 | 2006-09-28 | Zf Friedrichshafen Ag | Vibration damper piston rod in steel of specific carbon and manganese content, used for engines and machines with piston rods and cylinders, comprises aluminum and titanium alloying additions |
| CN102534392A (en) * | 2012-02-16 | 2012-07-04 | 无锡市万邦机械制造厂 | Processing, formation and manufacturing method of piston rod using 38CrMoAlA steel as materials |
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105464937A (en) * | 2015-12-15 | 2016-04-06 | 芜湖市甬微制冷配件制造有限公司 | Novel piston rod of air condition compressor |
| CN105464937B (en) * | 2015-12-15 | 2018-10-23 | 中山金菱机械有限公司 | A kind of piston of air-conditioning compressor bar |
| CN107834979A (en) * | 2017-11-23 | 2018-03-23 | 苏州艺力鼎丰智能技术有限公司 | A kind of impregnator for precisely going out liquid |
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| Publication number | Publication date |
|---|---|
| CN104235360B (en) | 2016-03-23 |
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Address after: Welcome international, No.19, Zhenxing West 1st Road, Jinniu District, Chengdu, Sichuan 610000 Patentee after: Sichuan Jinxing Clean Energy Equipment Group Co.,Ltd. Patentee after: SOUTHWEST PETROLEUM University Patentee after: SICHUAN JINXING PETROLEUM AND CHEMICAL MACHINERY EQUIPMENT Co.,Ltd. Address before: Welcome international, No.19, Zhenxing West 1st Road, Jinniu District, Chengdu, Sichuan 610000 Patentee before: SICHUAN JINXING CLEAN ENERGY EQUIPMENT Co.,Ltd. Patentee before: SOUTHWEST PETROLEUM University Patentee before: SICHUAN JINXING PETROLEUM AND CHEMICAL MACHINERY EQUIPMENT Co.,Ltd. |
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