CN104233186A - A mask manufacturing device - Google Patents
A mask manufacturing device Download PDFInfo
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- CN104233186A CN104233186A CN201310446106.XA CN201310446106A CN104233186A CN 104233186 A CN104233186 A CN 104233186A CN 201310446106 A CN201310446106 A CN 201310446106A CN 104233186 A CN104233186 A CN 104233186A
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- metal mask
- mask sheet
- frame
- sheet
- described metal
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Abstract
The invention provides a mask manufacturing device which enables manufacturing a metal mask which is high in precision. The mask manufacturing device is provided with at least one tension portion (13) applying a prescribed tension force to a metal mask sheet, a setting portion setting a framework coordinate system which regards a metal mask frame for installation of the metal mask sheet as a reference, a measuring portion (8) which measures the coordinate of the metal mask sheet in the framework coordinate system, an adjusting portion adjusting the position of the metal mask sheet relative to the metal mask framework and an installation portion (8) for installation of the the metal mask sheet, of which the position relative to the metal mask frame is adjusted by the adjusting portion, on the metal mask framework.
Description
Technical field
The present invention relates to a kind of fabrication mask device manufacturing metal mask.
Background technology
In the past, there will be a known a kind of frame adhering device of metal sheet, when carrying out the metal mask of use during vacuum evaporation in the manufacturing process being manufactured on organic EL, by clamp system, certain tension force is applied to metal mask sheet, thus not have the state of being out of shape that metal mask sheet is attached at (such as with reference to patent documentation 1) on framework.
Patent documentation 1: Japanese Unexamined Patent Publication 2004-311335 publication
Summary of the invention
Invent problem to be solved
But, in the frame adhering device of above-mentioned metal sheet, when metal mask sheet is attached on framework, owing to there is no accurate management metal mask sheet to the sticking position of framework, so be difficult to utilize the frame adhering device of above-mentioned sheet metal to manufacture high-precision metal mask.
The object of the present invention is to provide a kind of fabrication mask device that can manufacture high-precision metal mask.
For solving the method for problem
The feature of fabrication mask device of the present invention is to possess: at least one tension portion, metal mask sheet is applied to the tension force of regulation; Configuration part, setting frame coordinates system, the system of coordinates that the metal mask frame of described metal mask sheet is benchmark is installed by this frame coordinates system; Determination part, measures the coordinate of described metal mask sheet in described frame coordinates system under the state being applied with tension force by described tension portion; Adjusting portion, based on the measurement result of described determination part, regulates described metal mask sheet relative to the position of metal mask frame; And installation portion, the described metal mask sheet that be have adjusted by described adjusting portion relative to the position of described metal mask frame is installed on described metal mask frame.
In addition, the feature of fabrication mask device of the present invention is, described metal mask frame has the opening portion of rectangular shape, described fabrication mask device possesses pressurization part, and when described metal mask sheet being installed on described metal mask frame, this pressurization part makes the sidepiece of the described opening portion of formation be out of shape with the side of the deflection of regulation to place, described opening portion.
In addition, the feature of fabrication mask device of the present invention is, described installation portion possesses: blowing unit, sprays the rare gas element sprayed described metal mask sheet; And laser weld, under the state that described blowing unit has sprayed described rare gas element, utilize laser that described metal mask sheet is welded in described metal mask frame.
In addition, the feature of fabrication mask device of the present invention is, described installation portion has contiguity portion, and when described weld part welds, this contiguity portion makes described metal mask sheet be close contact in described metal mask frame by conducting oneself with dignity.
In addition, the feature of fabrication mask device of the present invention is to possess laser cutting portion, and what this laser cutting portion utilized metal mask sheet described in laser cutting does not need part.
Invention effect
According to fabrication mask device of the present invention, high-precision metal mask can be manufactured.
Accompanying drawing explanation
Fig. 1 is the stereographic map of the metal mask manufacturing installation representing embodiment.
Fig. 2 is the figure representing the metal mask manufactured by the metal mask manufacturing installation of embodiment.
Fig. 3 is the figure of the determination part of the metal mask manufacturing installation observing embodiment from front.
Fig. 4 is the figure of the section of the internal structure of the tablet press mechanism of the metal mask manufacturing installation representing embodiment.
Fig. 5 is the figure representing the tension device that the metal mask manufacturing installation of embodiment possesses.
Fig. 6 represents the schema of the metal mask manufacturing installation of embodiment to the contraposition process that metal mask sheet carries out.
Fig. 7 is the figure representing the frame coordinates system set by the metal mask manufacturing installation of embodiment.
Fig. 8 represents to use the mensuration microscope of embodiment and the figure of the deviation of the position coordinates of management point that measures.
Fig. 9 is the figure representing the thrust screw that the metal mask manufacturing installation of embodiment possesses.
Figure 10 is the figure representing the pressurization part that the metal mask manufacturing installation of embodiment possesses.
Embodiment
Below, with reference to accompanying drawing, about the fabrication mask device of embodiments of the present invention, the metal mask manufacturing installation of the metal mask used during to carry out vacuum evaporation in the manufacturing process being manufactured on organic EL is described.Fig. 1 is the stereographic map representing metal mask manufacturing installation.In addition, in the following description, setting XYZ orthogonal coordinate system, is described with reference to this XYZ orthogonal coordinate system.As shown in Figure 1, XY plane sets is the face with the plane-parallel of mounting metal mask manufacturing installation by XYZ orthogonal coordinate system, Z axis is set as direction on vertical.
Metal mask manufacturing installation 2 possesses: to load metal mask frame 34(with reference to Fig. 2 with the parallel plane mode of XY) the flat board of rectangular shape and worktable portion 6; Determination part 8, carries out being attached at the metal mask sheet 32(of metal mask frame 34 with reference to Fig. 2) mensuration etc.; Framework 10, is supported for determination part 8 and can slides along ± X-direction; Pair of guide rails 12, is supported for framework 10 and can slides along ± Y-direction; Tension device 13, applies ± the tension force of X-direction to metal mask sheet 32; Pair of guide rails 14, is supported for tension device 13 and can slides along ± Y-direction; And base station 16.In addition, tension device 13 is taken as a pair suite of equipment, is configured at the both sides of metal mask sheet 32 in mode toward each other.In addition, possess near worktable portion 6 to metal mask frame 34 apply ± a pair thrust screw 60(of the pressing force of X-direction be with reference to Fig. 7).
Fig. 2 is the figure representing the metal mask manufactured by the metal mask manufacturing installation 2 of embodiment.As shown in Figure 2, metal mask 30, by metal mask sheet 32 being attached at metal mask frame 34 and manufactured, uses when carrying out the vacuum evaporation of organic materials in the manufacturing process of organic EL.
At this, metal mask sheet 32 is made up of the metal sheet of the longer band shape in a direction, and has the opening portion 32a of multiple rectangular shape along its length, and wherein this opening portion 32a possesses multiple slit.In addition, the edge along the short side direction of opening portion 32a has multiple management point 32b, and this management point 32b forms the index during position measuring metal mask sheet 32.In addition, the both ends 32c of metal mask sheet 32 is cut-off after being attached at metal mask frame 34.
In addition, metal mask frame 34 is the metal frameworks for installing metal mask sheet 32, has the opening portion 34a of rectangular shape in central authorities.In addition, be provided with alignment mark 34b in the corner of metal mask frame 34, this alignment mark 34b forms index during setting frame coordinates system described later (with reference to Fig. 7).
Fig. 3 is the figure of the determination part 8 of the metal mask manufacturing installation 2 observing embodiment from front.As shown in Figure 3, determination part 8 possesses: mensuration microscope 42, measures the position of metal mask sheet 32; Welding laser microscope 44, is welded in metal mask frame 34 by metal mask sheet 32; And sections using laser microscope 46, cut off the both ends 32c being welded in the metal mask sheet 32 of metal mask frame 34.
At this, the multiplying power that mensuration microscope 42 possesses in the end of the downside of lens barrel 42a to specify observes the object lens 42b of metal mask sheet 32, possesses the camera 42c taken the image of the metal mask sheet 32 observed by object lens 42b in the end of the upside of lens barrel 42a.
In addition, welding laser microscope 44 presses the tablet press mechanism 45 of metal mask frame 34 when possessing welding in the end of the downside of lens barrel 44a, possess the camera 44c taken the image of the metal mask sheet 32 observed by not shown object lens in the end of the upside of lens barrel 44a.
In addition, be provided with laser entrance port 44d in the side of lens barrel 44a, this laser entrance port 44d makes it incide lens barrel 44a for utilizing the fiber guides laser that never illustrated laser transmitter penetrates in order to metal mask sheet 32 being welded in metal mask frame 34.In addition, reflects laser is possessed in the inside of lens barrel 44a and the not shown dichroic mirror of visible light transmissive or semi-transparent semi-reflecting lens.
In addition, possessing the required nitrogen nitrogen sprayed in tablet press mechanism 45 when making welding metal mask sheet 32 in the side of tablet press mechanism 45 and spray into portion 45a, possessing the press section 47 when welding, metal mask sheet 32 being pressed on metal mask frame 34 in the downside of tablet press mechanism 45.
In addition, sections using laser microscope 46 possesses the laser entrance port 46a of the laser incidence for the both ends 32c for cutting off metal mask sheet 32 in side.
Fig. 4 is the figure of the section represented when being cut off along vertical by the tablet press mechanism 45 of the metal mask manufacturing installation 2 of embodiment.At this, tablet press mechanism 45 is parts of drum, possesses the blank part 45b of circular cone shape in inside.In addition, be provided with in the end of the downside of tablet press mechanism 45 for by the locking groove 45c of press section 47 engaging in the toroidal on tablet press mechanism 45.
At this, be formed in the end of the downside of press section 47 make laser, opening portion 47a that nitrogen passes through, be formed with the protuberance 47b protruding outside to press section 47 in the upside of press section 47.
In addition, locking groove 45c has height and the width of regulation, is formed with gap in the outside of protuberance 47b and upside.Therefore, press section 47 can be moved neatly under the state being installed on tablet press mechanism 45 in vertical and horizontal direction.
Fig. 5 is the figure representing the tension device 13 that the metal mask manufacturing installation 2 of embodiment possesses.As shown in Figure 5, tension device 13 possesses motor 13a, ball-screw 13b and movable part 13c.At this, when ball-screw 13b being rotated as CD-ROM drive motor 13a, nut 13d moves to+X-direction, and movable part 13c is overall to be moved along linear guides 13e to+X-direction.
In addition, movable part 13c can be supported on linear guides 13e slidably via linear guide blocks 13f.In addition, linear guides 13e edge ± X-direction extends and is arranged on the position of the regulation of metal mask manufacturing installation 2.
When movable part 13c moves to+X-direction, tension force is applied to the metal mask sheet 32 clamped by clamping part 13g.
Then, with reference to Fig. 6, the contraposition process that metal mask manufacturing installation 2 pairs of metal mask sheets 32 of embodiment carry out is described.First, when metal mask frame 34 is placed in the position of regulation in worktable portion 6, the not shown control part of metal mask manufacturing installation 2 as shown in Figure 7, make thrust screw 60 outstanding (step S1), the fore-end of thrust screw 60 is abutted with the outer wall of the middle body 34c of the both sides of metal mask frame 34.Further, control part makes thrust screw 60 give prominence to, until the leading section of thrust screw 60 is from abutted position to the distance that the medial movement of opening portion 34a specifies, and middle body 34c is bent to the inside with the distance measurements of regulation.
At this, the distance of regulation is the distance suitable with the deflection of the middle body 34c envisioned when all metal mask sheets 32 are attached at metal mask frame 34.In addition, all metal mask sheets 32 to be attached at by reality the simulation that metal mask frame 34 carries out and to try to achieve by the deflection of middle body 34c in advance, and are stored in not shown storage part.
So, by applying distortion in advance to metal mask frame 34, thus can prevent from being out of shape at the front and back metal mask frame 34 attached when metal mask sheet 32 being attached at metal mask frame 34.
Then, control part makes mensuration microscope 42 move, and is taken the image being located at the alignment mark 34b of the corner of metal mask frame 34 by camera 42c.Then, control part implements the image procossing of regulation to the view data of captured image, thus tries to achieve the position coordinates of the alignment mark 34b in image.Further, the position coordinates of the alignment mark 34b in worktable portion 6 is determined based on the position coordinates of the camera 42c on the position coordinates of the alignment mark 34b in image and worktable portion 6.
Then, control part, based on the position coordinates of alignment mark 34b, as shown in Figure 7, sets with the frame coordinates system (step S2) of the central position of four alignment mark 34b as coordinate (0,0).
Then, when metal mask sheet 32 is moved to the inspection position of the regulation in worktable portion 6, control part clamps the both ends 32c of metal mask sheet 32 by the clamping part 13g of tension device 13.Then, tension device 13 makes movable part 13c edge ± X-direction move by CD-ROM drive motor 13a, metal mask sheet 32 is applied to the tension force (step S3) of regulation, and metal mask sheet 32 is in does not have the state of distortion, lax and smooth expansion.
Then, control part makes the position of mensuration microscope 42 move and all management point 32b is taken to the image of the metal mask sheet 32 observed by object lens 42b by camera 42c, determines the position coordinates (step S4) of the management point 32b in frame coordinates system.
Then, control part reads the data of the schema being stored in metal mask sheet 32 in not shown information storage part, management point (hereinafter referred to as the design management point) position coordinates in frame coordinates system of when the metal mask sheet determining on schema is installed on metal mask frame 34 exactly, on schema metal mask sheet.
Then, control part judge the design management point of the metal mask sheet on the position coordinates of the management point 32b of metal mask sheet 32 and schema position coordinates between deviation whether converge on (in the scope of such as, ± 5 μm) (step S5) in the scope of specification error.
Deviation between the position coordinates of the design management point of the metal mask sheet on the position coordinates and schema of the management point 32b of metal mask sheet 32 converges in the scope of specification error (step S5: "Yes"), control part stops a series of contraposition process.On the other hand, as shown in Figure 8, deviation between the position coordinates of the design management point of the metal mask sheet on the position coordinates and schema of the management point 32b of metal mask sheet 32 does not converge in the scope of specification error (step S5: "No"), control part makes metal mask sheet 32 move to the position coordinates of the management point 32b of metal mask sheet 32 position (step S6) consistent with the position coordinates of the design management point of the metal mask sheet on schema.At this, repeatedly carry out the process of step S4 ~ S6 until metal mask sheet on the position coordinates of management point 32b of metal mask sheet 32 and schema design management point position coordinates between deviation converge in the scope of specification error.
Then, with reference to accompanying drawing, the installation process that metal mask manufacturing installation 2 pairs of metal mask sheets 32 of embodiment carry out is described.When contraposition completes, control part makes the position of welding laser microscope 44 align with directly over the position (hereinafter referred to as welding position) of the welding object of formation metal mask sheet 32, starts welding laser microscope 44 is declined.In addition, now, press section 47 is positioned at protuberance 47b(with reference to Fig. 4) the position of original state that engages with the upper surface 45f of locking groove 45c of bottom surface 47c.
Then, when welding laser microscope 44 declines specified amount, the opening portion 47a(of press section 47 is with reference to Fig. 4) contact with metal mask sheet 32, the decline of press section 47 is hindered by metal mask sheet 32.
Further, when welding laser microscope 44 drops to the focal position of object lens, as shown in Figure 4, the bottom surface 47c of protuberance 47b leaves from the upper surface 45f of locking groove 45c.Therefore, metal mask sheet 32 is pressed against metal mask frame 34 by the deadweight of the press section 47 of movement flexibly.
Then, under the state making metal mask sheet 32 be close contact in metal mask frame 34 in the deadweight by press section 47, control part makes nitrogen spray into portion 45a and sprays into nitrogen.At this, the nitrogen sprayed in blank part 45b is ejected into metal mask sheet 32 via opening portion 47a.Thus, the oxygen concn of the vicinity of welding position reduces, and when preventing from welding, metal mask sheet 32 is oxidized and zoom.
Then, make nitrogen jet under the state of metal mask sheet 32, control part makes laser incident from laser entrance port 44d to lens barrel 44a.Incident laser by after dichroic mirror, irradiate welding position via opening portion 47a.Thus, the welding position of metal mask sheet 32 is welded in metal mask frame 34.Thus, the image of welding position is taken by camera 44c, so can check whether based on captured image and implement welding exactly.
Then, control part makes laser incident from laser entrance port 46a tangential section laser microscope 46, by not shown condensor, laser is converged on metal mask sheet 32, thus cuts off the both ends 32c(of metal mask sheet 32 with reference to Fig. 2).In addition, being breaking at of both ends 32c makes sections using laser microscope 46 carry out while the not shown section groove movement on metal mask sheet 32.
Correspondingly repeatedly perform above process with the quantity (with reference to Fig. 2) of the metal mask sheet 32 being attached at metal mask frame 34, thus complete metal mask 30.
According to the metal mask manufacturing installation 2 of this embodiment, before the attaching carrying out metal mask sheet 32, tension force is applied to metal mask sheet 32, the contraposition of the sticking position to metal mask frame 34 is carried out, so high-precision metal mask can be manufactured under the state that metal mask sheet 32 does not have distortion, lax and smooth expansion.In addition, due to the attaching making metal mask frame 34 be out of shape laggard row metal mask sheet 32 in advance, so metal mask frame 34 before and after the attaching of metal mask sheet 32 can be prevented to be out of shape, metal mask sheet 32 can be attached well as carried out precision contraposition.
In addition, make metal mask sheet 32 be close contact in metal mask frame 34 by tablet press mechanism 45 and weld, so can weld exactly metal mask sheet 32 under the state of not floating.In addition, when usually to have carried out after the contraposition of sheet with stronger pressing force pressing tablet, the position deviation sometimes of the sheet behind location, such as press the situation etc. that direction (Z axis) tilts, but in the present invention, because the metal mask sheet 32 during welding is pressed on metal mask frame 34, so can prevent such state of affairs by the deadweight of the tablet press mechanism 45 by movement flexibly.That is, even if press metal mask sheet 32 after having carried out contraposition, metal mask sheet 32 also can not produce position deviation.
In addition, in the above-described embodiment, as shown in Figure 9, multiple thrust screw 60 can be possessed, use multiple thrust screw 60 that the both sides of metal mask frame 34 are bent to the inside.Thereby, it is possible to the distortion of metal mask frame 34 when compacted screw 60 is bent further close to actual metal mask sheet 32 is attached at metal mask frame 34 time distortion.
In addition, in the above-described embodiment, employ thrust screw 60 as pressurization part, but also can use the pressing mechanism that cylinder, hydro-cylinder equipressure change.In addition, pressurization part may not be a pair, but one-sided fixing.In addition, in the above-described embodiment with linearity pressurization, but also the pressurization part possessing cam mechanism can be used as shown in Figure 10.
In addition, in the above-described embodiment, the situation adjusting position to make metal mask sheet 32 move is illustrated, but worktable portion 6 also can be made to move to adjust position.
In addition, in the above-described embodiment, the theoretic simulation that the deflection envisioned when making metal mask frame 34 indeformable and attach all metal mask sheets 32 also can be undertaken by the design data of the design data and metal mask sheet 32 that use metal mask frame 34 calculates.
In addition, in the above-described embodiment, be illustrated for the metal mask sheet 32 of the slit pattern possessing multiple slit at opening portion 32a, but also can be used in the metal mask sheet that opening portion 32a has the dot pattern in the multiple holes being arranged in point-like.In addition, also can be used in opening portion 32a neither to there is slit not there is so-called opened type mask a little yet.
In addition, in the above-described embodiment, when carrying out the contraposition of metal mask sheet 32, not necessarily management by measurement point 32b(with reference to Fig. 2) position coordinates.Such as, when using the metal mask sheet 32 of dot pattern, the position coordinates in the hole being arranged in point-like can also be measured to carry out the contraposition of metal mask sheet 32.
In addition, in the above-described embodiment, for metal mask 30(with reference to Fig. 2) be illustrated for the situation in the manufacturing process of organic EL, but metal mask 30 also may be used in the manufacturing processes such as organic EL illuminating, semiconductor element, printed base plate, liquid crystal display device.
In addition, in the above-described embodiment, to spray into portion 45a(from nitrogen with reference to Fig. 3) situation from nitrogen to tablet press mechanism 45 that spray into is illustrated, but also can sprays into other rare gas elementes such as xenon, helium.
Description of reference numerals
2 metal mask manufacturing installations
6 worktable portions
8 determination parts
13 tension devices
30 metal masks
32 metal mask sheets
34 metal mask frames
34b alignment mark
42 mensuration microscopes
44 welding laser microscopes
45 tablet press mechanisms
46 sections using laser microscopes
47 press sections
60 thrust screws
Claims (5)
1. a fabrication mask device, is characterized in that, possesses:
At least one tension portion, applies the tension force of regulation to metal mask sheet;
Configuration part, setting frame coordinates system, the system of coordinates that the metal mask frame of described metal mask sheet is benchmark is installed by this frame coordinates system;
Determination part, measures the coordinate of described metal mask sheet in described frame coordinates system under the state being applied with tension force by described tension portion;
Adjusting portion, based on the measurement result of described determination part, regulates described metal mask sheet relative to the position of metal mask frame; And
Installation portion, is installed on described metal mask frame by the described metal mask sheet that be have adjusted by described adjusting portion relative to the position of described metal mask frame.
2. fabrication mask device according to claim 1, is characterized in that,
Described metal mask frame has the opening portion of rectangular shape,
Described fabrication mask device possesses pressurization part, and when described metal mask sheet being installed on described metal mask frame, this pressurization part makes the sidepiece of the described opening portion of formation be out of shape with the inner side of the deflection of regulation to described opening portion.
3. fabrication mask device according to claim 1 and 2, is characterized in that,
Described installation portion possesses:
Blowing unit, sprays the rare gas element sprayed described metal mask sheet; And
Laser weld, utilizes laser that described metal mask sheet is welded in described metal mask frame under the state that described blowing unit has sprayed described rare gas element.
4. fabrication mask device according to claim 3, is characterized in that,
Described installation portion has contiguity portion, and when described weld part welds, this contiguity portion makes described metal mask sheet be close contact in described metal mask frame by conducting oneself with dignity.
5. the fabrication mask device according to any one of Claims 1 to 4, is characterized in that,
Possess laser cutting portion, what this laser cutting portion utilized metal mask sheet described in laser cutting does not need part.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2013126291A JP6108544B2 (en) | 2013-06-17 | 2013-06-17 | Mask manufacturing equipment |
| JP2013-126291 | 2013-06-17 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN104233186A true CN104233186A (en) | 2014-12-24 |
| CN104233186B CN104233186B (en) | 2016-09-21 |
Family
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201310446106.XA Active CN104233186B (en) | 2013-06-17 | 2013-09-26 | Fabrication mask device |
Country Status (2)
| Country | Link |
|---|---|
| JP (1) | JP6108544B2 (en) |
| CN (1) | CN104233186B (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN107604309A (en) * | 2017-11-06 | 2018-01-19 | 京东方科技集团股份有限公司 | Attaching mask device and its applying method |
| CN109302779A (en) * | 2017-07-25 | 2019-02-01 | 新东超精密有限公司 | Fabrication mask device |
| CN109402558A (en) * | 2018-11-01 | 2019-03-01 | 上海精骊电子技术有限公司 | The aligning control method that fine metal mask version is thrown the net |
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| CN105810853B (en) * | 2016-05-19 | 2017-11-24 | 京东方科技集团股份有限公司 | Resistance bringing device, mask manufacture device and correlation method |
| JP6968550B2 (en) * | 2017-03-02 | 2021-11-17 | 新東エスプレシジョン株式会社 | Mask manufacturing equipment and mask manufacturing method |
| KR102011722B1 (en) * | 2018-01-10 | 2019-08-19 | 주식회사 티지오테크 | Producing system of mask integrated frame |
| KR102138797B1 (en) * | 2019-08-09 | 2020-07-28 | 주식회사 오럼머티리얼 | Producing system of mask integrated frame |
| KR102580986B1 (en) * | 2020-02-05 | 2023-09-20 | 도판 인사츠 가부시키가이샤 | Deposition mask intermediate, deposition mask, mask device, and method of manufacturing the deposition mask |
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| CN109302779A (en) * | 2017-07-25 | 2019-02-01 | 新东超精密有限公司 | Fabrication mask device |
| CN109302779B (en) * | 2017-07-25 | 2020-07-03 | 新东超精密有限公司 | Mask manufacturing apparatus |
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| CN109402558A (en) * | 2018-11-01 | 2019-03-01 | 上海精骊电子技术有限公司 | The aligning control method that fine metal mask version is thrown the net |
| CN109402558B (en) * | 2018-11-01 | 2020-11-03 | 上海精骊电子技术有限公司 | Alignment control method for fine metal mask plate expanded mesh |
Also Published As
| Publication number | Publication date |
|---|---|
| JP2015001012A (en) | 2015-01-05 |
| CN104233186B (en) | 2016-09-21 |
| JP6108544B2 (en) | 2017-04-05 |
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