CN104220840B

CN104220840B - There is MEMS (micro electro mechanical system) (MEMS) the multiaxis gyrostat of centric sus-pension part and ring shelf structure

Info

Publication number: CN104220840B
Application number: CN201380007588.7A
Authority: CN
Inventors: C·阿卡
Original assignee: Fairchild Semiconductor Corp
Current assignee: Shanghai Sirui Technology Co.,Ltd.
Priority date: 2012-02-01
Filing date: 2013-01-31
Publication date: 2016-06-01
Anticipated expiration: 2033-01-31
Also published as: CN104272062A; WO2013116522A1; WO2013116514A1; CN104272062B; CN104220840A

Abstract

The present invention discloses various example, comprises the electricity tube core of the microcomputer for motion being responded to, and described microcomputer electricity tube core comprises the Symmetric Mass cube electrode interlocking with asymmetric stator electrode and engaging. Some in these examples comprise the electrode around the bending shaft orthogonal with the described plane that described electrode is arranged wherein. An example provides vertical deflection division, and described vertical deflection division is to allow, in the way of transverse axis flexure, inner ring frame is coupled to quality block.

Description

There is MEMS (micro electro mechanical system) (MEMS) the multiaxis gyrostat of centric sus-pension part and ring shelf structure

Require right of priority

This application claims the U.S. Provisional Patent Application sequence number 61/593 that the name submitted on February 1st, 2012 is called " MEMSMULTI-AXISGYROSCOPEWITHCENTRALSUSPENSIONANDGIMBALSTR UCTURE " (having the MEMS multiaxis gyrostat of centric sus-pension part and ring shelf structure), the rights and interests of the right of priority of 691, this patent application is incorporated herein by reference in full.

Background technology

Orthogonal error is one of principal element of performance of restriction micro mechanical sensor (such as gyrostat). Consider and drive the relative size of vibration with induced oscillation, even if minimum part actuation movement is coupled into inductive mode all may arrange Coriolis (Coriolis) response.

In fact, manufacturing defect may cause the deficient ideal geometry in the structure of such as gyroscope arrangement. Deficient ideal geometry may cause and drive vibration to be partly coupled into inductive mode. Even if there is several cross-couplings approach, such as elasticity, viscosity and electrostatic coupling approach, but in some cases, due to the elasticity such as non-in suspension elements, elasticity coupling increasing degree exceeds required standard.

In the sensing system (such as gyroscope system) with (out-of-plane) operating mode outside face, in face, the elasticity such as non-between direction with direction outside face is the leading root of orthogonal error. Sidewall deflection or inclination in deep reaction ion etching (" DRIE ") can cause the cross section bending a bearing portion to be parallelogram from rectangle deviation, and then cause the elastic axis parallel deviate of Suspension flexure bearing portion in device surface (direction), or deviation is orthogonal to device surface (direction). In one example in which, single shaft or multiaxis micro mechanical sensor structure (such as gyroscope arrangement) may be subject to tilting at least partly the impact of the high orthogonal error caused by DRIE.

In addition, existing syntonizer depends on simple linear flexure bearing portion to generate deflection structure, to allow device to be shifted in resonance. When being etched in generation inclination in flexure bearing portion, great problem can be caused, cause very big unexpected displacement, and usually make induction mechanism activate.

Accompanying drawing explanation

In the accompanying drawings (these accompanying drawings are not necessarily drawn to scale), identical numeral can describe the like in different views. The same numbers with different letter suffix can represent the different examples of like. The accompanying drawing mode unrestricted by example illustrates in the application each embodiment discussed with summarizing.

Fig. 1 exemplifies the sensor construction comprising suspention structure according to an example.

Fig. 2 A exemplifies a part for the Suspension according to an example.

Fig. 2 B exemplifies the Suspension of Fig. 8 A being under the bending state that top section is bent upwards in an example.

Fig. 2 C exemplifies the Suspension of Fig. 8 A under the bending bending state of top section that is in an example downwards.

Fig. 3 exemplifies the twisting motion of the suspention structure according to an example around Z axle.

Fig. 4 exemplifies the twisting motion of the suspention structure according to an example around X-axis.

Fig. 5 exemplifies the twisting motion of the suspention structure according to an example around Y-axis.

Fig. 6 exemplifies the two axle gyrostats comprising low orthogonal error Suspension according to an example.

Fig. 7 exemplifies the three axle gyrostats comprising low orthogonal error Suspension according to an example.

Fig. 8 exemplifies the orthogonal error of an exemplary Suspension.

Fig. 9 exemplifies the driving pattern according to an example.

Figure 10 exemplifies the flexure of four bends that has according to an example and props up bearing portion.

Figure 11 exemplifies the flexure according to an example and props up bearing portion, and bearing portion is propped up in the flexure that flexure bearing portion and non-deflected that bearing portion comprises flexure are propped up in described flexure.

Figure 12 exemplifies the flexure according to an example and props up bearing portion, and bearing portion is propped up in the flexure that flexure bearing portion and the non-deflected shorter than flexure the bearing portion of the non-deflected of Figure 11 that bearing portion comprises the flexure shorter than flexure the bearing portion of Figure 11 are propped up in described flexure.

Figure 13 A exemplifies the Suspension with very wide arc gap according to an example.

Figure 13 B exemplifies the stress relevant to the deflection degree bending a bearing portion.

Figure 14 A exemplifies the Suspension comprising Z font portion according to an example.

Figure 14 B exemplifies the cross section intercepted at the 14B place of Figure 14 A.

Figure 14 C exemplifies the cross section intercepted at the 14C place of Figure 14 A.

Figure 14 D exemplifies the cross section intercepted at the 14D place of Figure 14 A.

Figure 15 exemplifies the Suspension of the Figure 14 around Z axle torsional deflection according to an example.

Figure 16 A exemplifies the Suspension of the Figure 14 around Z axle torsional deflection according to an example.

Figure 16 B exemplifies the Suspension of the Figure 14 around Y-axis flexure according to an example.

Figure 16 C exemplifies the Suspension of the Figure 14 around X-axis flexure according to an example.

Figure 16 D exemplifies the Suspension of the Figure 14 along Y-axis displacement flexure according to an example.

Figure 17 illustrates the method making low orthogonal error Suspension according to an embodiment.

But Figure 18 illustrates the making according to an embodiment and shakes the method for Z axial electrode.

Embodiment

The side wall flexes not needed may negatively affect the performance of flexure bearing portion (" deflection division "), and described flexure is propped up bearing portion and such as propped up bearing portion for supporting the flexure of one or more parts of MEMS (micro electro mechanical system) (" the MEMS ") structure of such as tube core. In one example in which, such as when tilting axis props up the length of bearing portion or beam along flexure, if one or more sidewall has angular error, then in face, actuation movement is moved outside may causing face. In one example in which, when bearing portion is propped up in the pliable and tough or flexible flexure tilted or beam is positioned at opposition side during actuation movement, outside the face of generation, deflection may cause or add orthogonal error. In one example in which, low orthogonal suspension system is moved outside being devoted to reduce or eliminate less desirable.

Fig. 1 exemplifies the sensor construction comprising suspention structure according to an example. Various example discloses the low orthogonal suspension system for sensor. In one example in which, suspention structure can be used on has quality block (proof-mass), in the torsion multiaxis micromechanical gyro instrument system of such as single quality block 104. In one example in which, quality block 104 is suspended in midair by single central anchor 106 at its center. In one example in which, one or more flexure is propped up bearing portion and anchor 106 is connected to quality block 104, is such as connected to the main frame 116 of quality block. In one example in which, one or more deflection division allows quality block torsionally to vibrate around three vertical axles. In one example in which, suspention flexure bearing portion or beam provide and deflect in face and deflection outside face, thus allow quality block torsionally to vibrate around x-axis, y-axis and z-axis.

An example comprises fixed part 118, and wherein anchor 106 is coupled to fixed part 118. In one example in which, the first nonlinear suspension member 108 is coupled to anchor 106 in the side of anchor 106. In one example in which, 2nd nonlinear suspension member 120 is coupled to anchor in the same side of anchor, and described 2nd nonlinear suspension member has the shape and the position that become mirror with described first nonlinear suspension member about anchor bisecting plane 122 (such as x-z face). Various example comprises the quality block 104 of plane formula, described quality block is suspended in midair by the first nonlinear suspension member 108 and the 2nd nonlinear suspension member 120 at least in part so that quality block can rotate around anchor 106 and (such as in an x-y plane) can slide in the plane being parallel to described fixed part.

In one example in which, C shape flexure bearing portion 108 comprises the internal portion 110 being coupled to anchor 106 and extending to anchor bisecting plane 122, and there is the centre portions 114 of portions of proximal and distal part, wherein portions of proximal is coupled to internal portion 110, and distal part extends away from anchor 106 along anchor bisecting plane 122 and is coupled to the external portion 112 of extension away from anchor bisecting plane 122. In one example in which, centre portions 114 is perpendicular to internal portion 110 and external portion 112. In one example in which, centre portions 114 is parallel to anchor bisecting plane 122.

In one example in which, anchor 106, first nonlinear suspension member 108, the 2nd nonlinear suspension member 120 and quality block 104 are formed by single plate material. In one example in which, fixed part 118 comprises the fixing single plate material different from single plate material of anchor 106, first nonlinear suspension member 108, the 2nd nonlinear suspension member 120 and quality block 104. In one example in which, fixed part 118 comprises the fixing single plate material identical with single plate material of anchor 106, first nonlinear suspension member 108, the 2nd nonlinear suspension member 120 and quality block 104.

In one example in which, flexure bearing portion is arranged on every side of central anchor, on the such as opposition side of described anchor. In one example in which, move outside the face caused by the flexure of each C shape on side bearing portion and propped up bearing portion counteracting by the flexure of its symmetry. Correspondingly, in one example in which, the orthogonal error caused in each flexure bearing portion by reducing on the spot or is offset.

In one example in which, centric sus-pension structure 102 is used in sensor, in such as six degree of freedom (" DOF ") sensor 100 (such as comprising the monolithic formula six degree of freedom sensor of symmetrical flexure bearing portion). In one example in which, symmetrical flexure is propped up bearing portion and is comprised " C shape flexure bearing portion " 108. In one example in which, each C shape flexure bearing portion comprises interior flexure and props up bearing portion 110 and connections flexure the bearing portion 114 of bearing portion 112 and the high rigidity between two flexure bearing portion is propped up in outer flexure. In one example in which, interior flexure is propped up bearing portion 112 and is at one end connected to anchor 106, and outer flexure is propped up bearing portion 112 and is connected to quality block 104 at the other end. In one example in which, suspension system 102 is formed by 8 C shapes flexure bearing portion 108 altogether. In one example in which, two symmetrical C shape flexure supporting portions are on every side of four sides of central anchor structure.

In one example in which, suspension system provides three kinds of gyrostat operating mode: reverse in the face of Z axle, for actuation movement; Reverse outside the face of X-axis, for Y-axis gyrostat paratonic movement. stimulus movement; And reverse outside the face of Y-axis, for X-axis gyrostat paratonic movement. stimulus movement. In one example in which, mode of oscillation can switch mutually each other.

Fig. 2 A exemplifies a part for the Suspension according to an example. Fig. 2 B exemplifies the Suspension of Fig. 2 A being under the bending state that top section is bent upwards in one example in which. Fig. 2 C exemplifies the Suspension of Fig. 2 A under the bending bending state of top section that is in one example in which downwards. Shown example exemplifies the deformable contour of suspention mechanism in all directions. In one example in which, in two kinds of distortion situations shown in Fig. 2 B and Fig. 2 C, bend equivalent and occur on the contrary. In one example in which, in each direction, two flexure bearing portion bend in the opposite manner. In one example in which, it is out of shape outside producing the contrary face cancelled out each other so that minimizing deformation outside the overall face from deflection division one end to the other end.

Fig. 3 exemplifies the twisting motion of the suspention structure according to an example around Z axle. In one example in which, two symmetrical C shape flexure bearing portion 302,304 that suspension system 300 is included on every side of central anchor structure 306. In one example in which, one or two in C shape flexure bearing portion 302,304 is formed by high rigidity connection flexure the bearing portion 308 being arranged between two flexure bearing portion 310,312. In one example in which, twisting motion in face (is such as parallel to the motion of the plane of figure) period, move outside the face caused by the deflection of flexure the bearing portion in each C shape flexure the bearing portion on side and propped up bearing portion 310 ', 312 ' by the flexure of symmetry and offset. Correspondingly, the orthogonal error caused in each flexure bearing portion by reducing on the spot or is offset.

The example described exemplifies the twisting motion around Z axle (that is, extend into the page and extend the axle of the page). In one example in which, in face during twisting motion, in each C shape flexure bearing portion, flexure bearing portion 310 and outer flexure are propped up bearing portion 312 in-plane bending are occurred. In one example in which, a high rigidity connection bearing portion 308 does not experience significantly bending. For quality block being rotated counterclockwise around Z axle, the top section of quality block is moved to the left, as shown in the figure. In one example in which, a high rigidity connection bearing portion is all moved to the left. Therefore, interior deflection division and the outer deflection division of C shape flexure the bearing portion on right side bend downwards, and interior deflection division and the outer deflection division of C shape flexure the bearing portion on the left of simultaneously are bent upwards. In one example in which, therefore, the deflection division that described motion causes symmetrical C shape flexure bearing portion deflection in opposite direction. Owing to the deflection in opposite direction of the deflection division in bearing portion is propped up in the C shape flexure of symmetry, move outside the face caused by the deflection of flexure the bearing portion in each C shape flexure the bearing portion on side and propped up bearing portion counteracting by the flexure of its symmetry. Therefore, the orthogonal error caused in each flexure bearing portion is by partial cancellation.

Fig. 4 exemplifies the twisting motion of the suspention structure according to an example around X-axis. In one example in which, suspention structure can be used on has quality block, in the torsion multiaxis micromechanical gyro instrument system of such as single quality block 404. In one example in which, quality block 404 is suspended in midair by single central anchor 406 at its center. In one example in which, one or more flexure is propped up bearing portion 402 and anchor 406 is connected to quality block 404. In one example in which, during twisting motion outside the face of X-axis, mainly the C shape Suspension of Y-axis side is to 412,412 ' deflection. In one example in which, the interior flexure in these C shape Suspensions is propped up bearing portion 410,410 ' and is torsionally bent around X-axis, plays the effect of torsion hinge.

In one example in which, tube core is thin slice shape (wafershaped), and the first nonlinear suspension member 408 and the 2nd nonlinear suspension member 412 have the cross section of rectangle substantially separately, and the height of described cross section is less than width.

Fig. 5 exemplifies the twisting motion of the suspention structure according to an example around Y-axis. In one example in which, suspention structure can be used on has quality block, in the torsion multiaxis micromechanical gyro instrument system of such as single quality block 404. In one example in which, quality block 404 is suspended in midair by single central anchor 406 at its center. In one example in which, one or more flexure is propped up bearing portion 402 and anchor 406 is connected to quality block 404. In one example in which, during twisting motion outside the face of Y-axis, mainly the C shape Suspension of X-axis side is to 412,412 ' deflection. Interior flexure in these C shapes flexure bearing portion 414,414 ' is propped up bearing portion and is torsionally bent around Y-axis, plays the effect of torsion hinge.

Fig. 6 exemplifies the two axle gyrostats comprising low orthogonal error Suspension according to an example. In one example in which, structure 602 can be used for various torsion multiaxis micromechanical gyro instrument system, and described torsion multiaxis micromechanical gyro instrument system has single quality block 604, and described single quality block 604 is suspended in midair by single central anchor 606 at its center. Described anchor is connected to quality block 604 by deflection division 608, and allows described quality block torsionally to vibrate around all three axles. Illustrated example detection is around the respective motion of X-axis and Y-axis, and proves three kinds of gyrostat operating mode: reverse in the face of Z axle, for actuation movement; Reverse outside the face of X-axis, for Y-axis gyrostat paratonic movement. stimulus movement; And reverse outside the face of Y-axis, for X-axis gyrostat paratonic movement. stimulus movement. In one example in which, one or more pectination electrodes 616 are coupled to the fixed part of described device, and are inductively couple to the motion of the pectination electrode 618 of quality block 604. In one example in which, the comb of pectination electrode 618 is arranged along the axle at the angle between bisection X-axis and X-axis.

Fig. 7 exemplifies the three axle gyrostats comprising low orthogonal error Suspension according to an example. In one example in which, structure 702 can be used for various torsion multiaxis micromechanical gyro instrument system, and described torsion multiaxis micromechanical gyro instrument system has single quality block 704, and described single quality block 704 is suspended in midair by single central anchor 706 at its center. Described anchor is connected to quality block 704 by deflection division 708, and allows described quality block torsionally to vibrate around all three axles. In one example in which, device plays the function of three axles (" X/Y/Z ") gyrostat. In one example in which, suspension system 702 provides the gyrostat operating mode similar to the device shown in Fig. 6. In one example in which, the device shown in Fig. 7 comprises the additional deflection division 720 being provided for Z axle inductive mode. In one example in which, one or more pectination electrodes 716 are coupled to the fixed part of described device, and are inductively couple to the motion of the pectination electrode 718 of quality block 704. In one example in which, the comb of pectination electrode 718 is arranged along the axle at the angle between bisection X-axis and X-axis.

Fig. 8 exemplifies the orthogonal error of an exemplary Suspension. In one example in which, the angle of flexure bearing portion has remarkably influenced to orthogonal. In one example in which, for each design, it is possible to the orthogonal error that selected angle produces to optimize the inclination of the deflection division by syntonizer flexure bearing portion. In one example in which, for the concrete enforcement of desired suspension system, best angle is 15 degree. In one example in which, best angle depends on structural shape, and selects based on the structure of corresponding device. In one example in which, for desired structure, two flexure bearing portion are set to identical angular travel, but two flexure bearing portion can easily be set to different angles.

Fig. 9 exemplifies the driving pattern according to an example. Contriver recognizes, in the suspension arrangement comprising anchor 906, the effect of inclination causes orthogonal error, and they by same deflection division 902 or deflection division on 904 on produce contrary inclination and by above-mentioned impact minimumization. Correspondingly, bearing portion is propped up in the flexure that there are two flexures separated by framework, and each flexure bearing portion is out of shape in the opposite direction in driving operating mode. The inclination that the distortion of reverse direction is out of shape outside causing producing the face of reverse direction, when being finally connected to moving-member, outside the face of described reverse direction, distortion cancels each other. This can be used for replacing the existing mechanism only comprising a flexure bearing portion, and the inclination of a flexure bearing portion of described existing mechanism only produces distortion in one direction, thus moves outside causing a large amount of face without any counteracting.

But, in some instances, bearing portion 910,910 ' is propped up in interior flexure and outer flexure is propped up bearing portion 912,912 ' and rotated, thus during driving actuation, and distortion makes a flexure bearing portion be bent upwards and a flexure bearing portion bends downwards. In one example in which, driving pattern is around the rotary mode of central anchor. In one example in which, for each right in 404 of four Suspensions, driving pattern make one in one direction distortion and another be out of shape on other direction.

Figure 10 exemplifies the flexure of four bends that has according to an example and props up bearing portion. In one example in which, deflection division 1002 can comprise more than one bend. In one example in which, this can allow to produce motion outside the face that more strictly controlled. In one example in which, multiple Z font portion 1004 is comprised. In one example in which, Z font portion defines the zig-zag circuit (zigzag) extending to quality block 1005 from anchor 1006. In one example in which, zig-zag circuit comprises the Z font portion of the regular amplitude along the pattern (patter) extending to quality block 1005 from anchor 1006. In a further embodiment, described amplitude is change. In one example in which, described Z font portion is C shape, has parallel to each other but is not parallel to top member 1008 and the bottom member 1014 that high rigidity portion divides 1016.

Figure 11 exemplifies the flexure according to an example and props up bearing portion, and bearing portion is propped up in the flexure that flexure bearing portion and non-deflected that bearing portion comprises flexure are propped up in described flexure. In one example in which, the parameter of deflection division 1102 is also determined by flexure the bearing portion 1112 of flexure the bearing portion 1110,1114 or non-deflected that extend or shorten flexure. In example shown in fig. 12, bearing portion 1112 is propped up in the flexure of flexure the bearing portion 1110 and non-deflected that shorten outside flexure.

Figure 12 exemplifies the flexure according to an example and props up bearing portion, and bearing portion is propped up in the flexure that flexure bearing portion and the non-deflected shorter than flexure the bearing portion of the non-deflected of Figure 11 that bearing portion comprises the flexure shorter than flexure the bearing portion of Figure 11 are propped up in described flexure. Compared with the parts of Figure 11, bearing portion 1212 is propped up in the flexure of flexure the bearing portion 1210 and non-deflected that shorten outside flexure.

Figure 13 A exemplifies the Suspension with very wide arc gap according to an example. Figure 13 B exemplifies the stress relevant to the deflection degree bending a bearing portion. In instances, space 1302 it is provided with between bearing portion 1304 and quality block 1306 in flexure.

Figure 14 A-D exemplifies the tube core 1400 comprising various feature according to an example. These features can be used alone or in combination. A feature is Z font portion 1402. E.g., Z font portion 1402 extends between nonlinear suspension member (C shape flexure bearing portion 1406) and quality block 1408. Adding Z font portion 1402 and can reduce orthogonal error further, this is at least bend outside which reducing face, and outside described, flexure is caused by DRIE etching at least partly. Stride across plane (such as plane 1422) another bearing portion on one side just as by bending, offset the bending of one bearing portion. Offsetting out-of-plane bending by bending 2nd flexure bearing portion 1407, described 2nd flexure bearing portion 1407 can be arranged on the other side of plane 1423.

This type of counteracting figure 15 illustrates. In fig .15, first bearing portion 1502 is bending away from quality block 1508, and the bearing portion being arranged on horizontal reference plane 1510 the other side bends towards quality block. A bearing portion 1506 of the other side in vertical reference plane 1512 and the other side in horizontal reference plane 1510 is also bending away from quality block 1508 in the way of identical substantially with 1506, and this balance just propping up bearing portion Suspension by recovering flexure offsets orthogonal error.

Returning to Figure 14 A and the description to Z font portion 1402, nonlinear suspension member 1406 (e.g., a C shape flexure bearing portion) comprises first or internal portion 1410, the 2nd or centre portions 1420, and the 3rd or external portion 1412. In one example in which, external portion 1412 has the portions of proximal being coupled to centre portions 1420. In one example in which, the distal part of external portion 1412 extends away from anchor bisecting plane 1422. E.g., in one example in which, Part IV 1402 (part in the Z font portion) coupling of external portion 1412 and the first nonlinear suspension member 1406. In one example in which, Part IV 1402 is coupled to the distal part of external portion 1412 in the proximal portion of Part IV 1402. In one example in which, Part IV 1402 extends to its distal part from its portions of proximal towards anchor 1404. In one example in which, the distal part of Part IV 1402 is coupled to the Part V 1424 of the first nonlinear suspension member 1406. In one example in which, Part V 1424 extends towards anchor bisecting plane 1422. In one example in which, internal portion 1410 is linear and parallel with external portion 1412. Generally speaking, relative to the Suspension without Z font portion 1402, Z font portion 1402 example provides other flexure, and the counteracting to this flexure.

2nd feature is asymmetric stator finger electrode, as illustrated especially in Figure 14 C-D. The electrode structure partly illustrated in Figure 14 C and 14D is configured in the MEMS multiaxis gyrostat for having anti-phase linear Z axle rotary inductive pattern. In some instances, two quality blocks 1454 and 1456 can move in the opposite direction. The example of this type games illustrates in Figure 16 D. In one example in which, stator 1430,1431 is by anchor 1428,1429 anchoring of corresponding side. In each example, the electrode on central anchor 1404 opposition side should confront the concurrent outside motion of gauge block or inward responsive, to realize the differential pickup to this motion. Therefore, should not use the stator electrode about Y-Z rotational symmetry, because differential motion can not be responded to by this kind of design, and because differential motion is responded to provides electric capacity difference between the both sides relying on device, and if stator electrode is symmetrical, then the both sides at Y-Z axle are changed by electric capacity similarly.

Differential motion is responded to by the Z axle rotary inductive electrode structure illustrated. This structure provides the Differential Detection to anti-phase paratonic movement. stimulus movement, and wherein quality block finger-like thing is symmetrical about Y-Z plane 1422, and stator electrode is not in relation to Y-Z plane symmetry. But symmetrical electrode configuration be shake required. Disclosed electrode provides the quality cube electrode in Y-Z plane opposite symmetry. Relative to asymmetrical design, symmetrical quality cube electrode achieves the inhibition of vibration of improvement.

The sectional view of Figure 14 C-D exemplifies the staggered engagement details on the opposition side of the tube core according to an example. Although electrode is pixel in appearance, but level and smooth continuous print electrode can be conceived, as represented those electrodes of the feature of DRIE. In Figure 14 C, left stator 1430 have quality block 1446 finger-like thing 1452 outside (as, central anchor 1404 further away from each other) stator finger-like thing 1450, and the right stator 1430 ' illustrated in Figure 14 D has at the inner stator finger-like thing 1452 ' of quality block 1446 ' finger-like thing 1452 '. It should be noted that in two kinds of electrodes of Figure 14 C and 14D, small capacitances gap is positioned at the left side of stator finger-like thing, and quality block finger-like thing is completely symmetrical. When the quality block 1454 of Figure 14 C is to, when moving to left, the electric capacity of the electrode in this figure increases. When the quality block 1456 of Figure 14 D is to, when moving to right, the electric capacity of the electrode in this figure reduces. Therefore, create the differential capacitance that can be detected.

In one example in which, Z axle gyrostat paratonic movement. stimulus movement is responded to via difference quality block, and homophase motion (that is, quality block motion) in the same direction is rejected. In each example, actuation movement (in Figure 14 B 1448) reverses (see Figure 15 and Figure 16 A) around Z axle. Z axle gyrostat paratonic movement. stimulus movement is based on the quality block 1454 and 1456 vibrated in the opposite direction. Figure 16 D exemplifies this type games. E.g., e.g., Z axle paratonic movement. stimulus movement is linear in-plane moving (in X-Y plane) and anti-phase motion (quality block 1454 and 1456 vibrates in the opposite direction).

3rd feature comprises vertical deflection division 1426, illustrates in Figure 14 A and 14B. In one example in which, vertical deflection division 1426 allows quality block frame more than other parts of tube core (such as inner ring frame 1458) deflection, and can be used for regulating Y-axis induced vibration frequency. Illustrated ring shelf structure provides the deflection division 1426 only deflected for the Y-axis inductive mode of gyrostat, and in this Y-axis inductive mode, quality block 1408 rotates around X-axis, as illustrated in Figure 16 C. Therefore, it allows Designers to regulate Y-axis induced vibration frequency independent of driving frequency and X-axis induction frequencies. This makes centric sus-pension part to improve, to be down to minimum by the orthogonal error in X-axis and Y-axis simultaneously.

Such as, fixed part or substrate can be coupled to anchor 1404. Fixed part comprises such as base plate for packaging. First nonlinear suspension member 1406 can be coupled to anchor 1404 in the side of anchor 1404. 2nd nonlinear suspension member 1407 is coupled to anchor 1404 in the same side of anchor 1404. 2nd nonlinear suspension member can have the shape and the position that become mirror with the first nonlinear suspension member about anchor 1404 bisecting plane, but the theme of the present invention is not limited to this. One or both in first nonlinear suspension member and the 2nd nonlinear suspension member can form a part for the inner ring frame 1458 of microcomputer electricity tube core 1400.

The quality block 1408 of plane formula can be coupled to inner ring frame 1458. Quality block suspends in midair by the first suspention component 1460 on the first side being arranged on anchor 1404. Quality block suspends in midair by the 2nd suspention component 1462 on the 2nd side being arranged on anchor 1404. First suspention component 1460 can be coupled relatively with the first side of anchor.

Tube core 1400 can limit the first gap 1464. Gap 1464 can extend along the first side 1466 of anchor 1404. 2nd gap 1468 can extend along the 2nd side 1470 of anchor 1404. 2nd gap 1468 can be relative with the first side 1466. Each in first gap 1464 and the 2nd gap 1468 can extend between inner ring frame 1458 and quality block 1408.

First gap 1464 can extend to the 2nd suspention component 1462 from the first suspention component 1460. 2nd gap 1468 can extend to the 2nd suspention component 1462 from the first suspention component 1460. One or more in first gap and the 2nd gap can be C shape. One C shape can limit the first opening 1472, and this first opening 1472 opens wide towards the 2nd opening 1474 of the 2nd C shape in the 2nd gap 1468.

One C shape can comprise first end section 1482 and second end section 1484, and wherein centre portions 1486 extends between first end section and second end section. First end section and second end section can be perpendicular to centre portions. First inclination part 1488 can extend between first end section 1482 and centre portions, and the 2nd inclination part 1490 can extend between second end section 1484 and centre portions. First gap can be the mirror image shape in the 2nd gap, and the first gap can become mirror image along anchor bisecting plane.

First gap can limit the first vertical deflection division 1476 deflection division 1478 vertical with the 2nd. 2nd gap can limit the 3rd vertical deflection division 1426 deflection division 1480 vertical with the 4th. Each in the vertical deflection division of first, second, third and fourth can be elongated, and length ratio width is long. Each corresponding length can extend away from suspending component accordingly in midair. Each corresponding length can extend away from anchor bisecting plane 1422.

In one example in which, solid quality block frame structure (structure illustrated in such as Fig. 7) relies on centric sus-pension system to arrange and drives frequency and X/Y induction frequencies. Therefore, the whole three kinds of frequencies on two axles and orthogonal error can be improved simultaneously.

The ring shelf structure illustrated in Figure 14 A-D provides extra degree of freedom to regulate Y-axis inductive mode. In one example in which, centre deflection portion 1426 extends away from inner ring frame 1458 along Y-axis. These deflection divisions can vertically bend. Figure 16 C exemplifies the flexure that quality block is rotated of deflection division around X-axis. In one example in which, inner ring frame 1458 can be connected to quality block 1408 framework by one or more deflection division 1426. In one example in which, these deflection divisions 1426 only deflect for the Y-axis inductive mode of gyrostat. Outside the face set up, deflection division allows to regulate Y-axis induced vibration frequency independent of driving frequency and X-axis induction frequencies.

In each example, actuation movement (in Figure 14 B 1448) is reversed around Z axle (such as around central anchor 1404). Figure 15 exemplifies the Suspension of the Figure 14 around Z axle torsional deflection according to an example, and Figure 16 A also exemplifies the Suspension of the Figure 14 around Z axle torsional deflection according to an example. Figure 16 B exemplifies the Suspension of the Figure 14 around Y-axis flexure according to an example. In these examples, deflection division 1426 represents limited flexure. But, Figure 16 C exemplify according to an example around X-axis flexure so that the Suspension of Figure 14 that bends of deflection division 1426. In one example in which, Y-axis paratonic movement. stimulus movement reverses outside the face of X-axis.

The other feature of Figure 14 A-D comprises bending finger electrode. These electrodes may be insensitive to rotating drive movements. Each example can comprise the electrode around the bending shaft orthogonal with the plane that electrode is arranged wherein. E.g., bending finger electrode (finger-like thing 1450 and 1452) may be not too responsive to rotating drive movements (motion illustrated in such as Figure 16 A). In one example in which, although quality cube electrode just rotates relative to stator electrode, but the clearance gap between described electrode is from keeping similar or identical. In some instances, this can maintain similar electric capacity. But, in some instances, the area of other electrodes is changed by an electrode surface, and this can provide differential capacitance, thus allows the induction around Z axle or rotation. Therefore, when if tube core rotates around the axle orthogonal with the plane that electrode exposes wherein, bending electrode keep and clearance gap between quality cube electrode and stator electrode from, (just) optionally can not change electric capacity or change electric capacity lower, maybe can sense that required electric capacity changes to detect rotation.

Microcomputer electricity tube core 1400 can be coupled, with the substrate such as encapsulated, the unicircuit forming encapsulation. Quality block 1408 can be coupled to substrate at anchor 1404 place. Quality block can comprise the first part 1454 that can move relative to anchor 1404. First part can comprise the first quality cube electrode 1452. The second section 1456 relative with first part 1454 about anchor 1404 of quality block 1408 can move relative to anchor 1404 and first part 1454. Second section 1456 can comprise the 2nd quality cube electrode 1452 '. Quality block 1408 can limit the first opening 1492 on the first side of anchor 1404 (such as on the first side of plane 1423). The first part 1454 of quality block can be coupling in opening 1492 through substrate removablely.

First quality cube electrode 1452 can be in more than first the quality cube electrode extending in opening 1492. Described multiple quality cube electrode can be spaced apart from each other. Quality block 1408 can limit the 2nd opening 1494 on the 2nd side of anchor (such as on the first side of plane 1423). Second section 1456 can be coupling in inside the 2nd opening 1494. 2nd quality cube electrode 1452 ' can be in the 2nd many quality cube electrodes being spaced apart from each other extending in opening 1494.

First stator 1430 can be coupled to substrate, such as via anchor 1428, and can comprise the first stator electrode 1450. First stator electrode 1450 can extend on the first quality cube electrode 1452 side of quality block to form the first electrode pair. 2nd stator 1431 can be coupled to substrate and can comprise two stator electrode 1451 relative with the first stator electrode 1450. 2nd stator electrode 1451 can extend on the 2nd quality cube electrode 1452 ' side of the second section 1456 of quality block 1408 to form the 2nd electrode pair. First electrode pair can form the first electrical condenser. 2nd electrode pair can form the 2nd electrical condenser.

First quality cube electrode of quality block can be relative with the 2nd quality cube electrode of quality block at the other side of anchor, and wherein the first stator electrode can be relative with the 2nd anchor electrodes and be coupled to substrate at the other side of anchor.

First stator electrode 1450 can be in more than first stator electrode, and described more than first stator electrode and the respective electrode in described more than first quality cube electrode be staggered to be engaged and paired to form the first electrode pair. 2nd stator can be in the 2nd many stator electrodes, and the described 2nd many stator electrodes are staggered with the respective electrode in described 2nd many stator electrodes to be engaged and paired to form the 2nd electrode pair.

In the first vibration modes of tube core 1400, the first part 1454 of quality block may be about to move away from the second section 1456 of quality block. The distance that first stator electrode 1450 and the 2nd stator electrode 1451 can be arranged such that between the electrode of the first electrode pair can and the electrode of the 2nd electrode pair between distance be inversely proportional to. The first part 1454 of quality block can be symmetrical at the second section 1456 of the other side of anchor 1404 and quality block. First stator 1430 can be asymmetric relative to the 2nd stator 1431 at the other side of anchor 1404.

But Figure 18 illustrates the making according to an embodiment and shakes the method for Z axial electrode. At 1802 places, example comprises formation quality block. This example can comprise the anchor formed for quality block is coupled to substrate. This example can be included on the first side of anchor and form first part, and this first part can move relative to anchor and comprise the first quality cube electrode. This example can be included on the 2nd side relative with the first side of anchor and form second section, and this second section comprises the 2nd quality cube electrode. At 1804 places, this example can comprise the first stator formed for being coupled to substrate, comprises the first quality cube electrode side formed at quality block and extends the first stator electrode to form the first electrode pair. At 1806 places, this example can comprise the 2nd stator formed for being coupled to substrate, comprises the 2nd quality cube electrode side formed at quality block and extends the 2nd stator electrode to form the 2nd electrode pair. According to example, at 1808 places, quality block, the first stator and the 2nd stator are formed to make in the first vibration modes of quality block, and distance between the electrode of first pair and the distance between the electrode of the 2nd electrode pair are inversely proportional to.

In the first vibration modes, described more than first stator electrode can be configured to move away from described more than first stator electrode and move away from anchor, and the described 2nd many stator electrodes can be configured to towards described 2nd many stator electrodes and move towards anchor.

Quality block can be configured to relative to substrate vibration so that the distance between described more than first stator electrode and described more than first stator electrode changes, and the distance between described 2nd many stator electrodes and described 2nd many stator electrodes is changed.

When in described 2nd many stator electrodes near anchor one (as, 1451) can with described 2nd many stator electrodes near anchor one (as, 1452 ') when bigger distance, in described more than first stator electrode near anchor one (as, e.g., 1452) spaced apart with (1450) near anchor in described more than first stator electrode.

Each in first quality cube electrode 1452 and the first stator electrode 1450 can be elongated. Distance D14 between first quality cube electrode and the first stator electrode can be substantially constant along the length L14 of each. Each in 2nd quality cube electrode 1452 ' and the 2nd stator electrode 1451 can be elongated. Distance between 2nd quality cube electrode and the 2nd stator electrode is substantially constant along the length of each.

One or more in first quality cube electrode, the 2nd quality cube electrode, the first stator electrode and the 2nd stator electrode can be bending. Each in described electrode can around a bending shaft, and quality block can be configured in the 2nd vibration modes to rotate around this axle. This axle can be the intersection between plane 1422 and plane 1423. By removing material (such as by cutting material, such as by etching) from wafer, quality block is shaped to shape. Described shaping comprise deep reaction ion etching.

Tube core 1400 can be used for motion being responded to. The vibration of the first part of quality block and the second section of quality block can be excited so that first part and second section towards corresponding first stator and the 2nd stator move together and synchronously between separate. By measuring the difference of the corresponding capacitance value of the first stator and the 2nd stator, being responded to along moving of a direction by tube core, this direction extends between the first part and the second section of quality block of quality block. First quality cube electrode 1452 can move towards the first stator electrode 1450 of the first stator 1430, and second section 1456 can comprise the 2nd quality cube electrode 1452 ' of the 2nd stator electrode 1451 moving away from the 2nd stator. Carry out responding to motion and can comprise the first electric capacity to the first electrode pair comprising the first quality cube electrode and the first stator electrode and the difference that comprises between the 2nd quality cube electrode and the 2nd electrode pair of the 2nd stator electrode is responded to. Can by quality block quality block plane (e.g., the plane parallel with 1423 with plane 1422) in rotate, and do not change the first stator and the 2nd stator corresponding capacitance value record difference. Rotation can the distance between the electrode not changing the first electrode pair and occurring when the distance between the electrode not changing the 2nd electrode pair.

Figure 17 illustrates the method making low orthogonal error Suspension according to an embodiment. At 1702 places, described method comprises etching material to limit anchor. At 1704 places, described method comprises the first nonlinear suspension member that the described material of etching is coupled to anchor to be limited to the side of described anchor. At 1706 places, described method comprises the described material of etching to limit the 2nd nonlinear suspension member, described 2nd nonlinear suspension member is coupled to anchor in the identical side of described anchor, and described 2nd nonlinear suspension member has the shape and the position that become mirror with described first nonlinear suspension member about anchor bisecting plane. At 1708 places, described method comprises the described material of etching to limit the quality block of plane formula, described quality block is at least in part by described first nonlinear suspension member and described 2nd nonlinear suspension member suspention so that described quality block can rotate around described anchor and can be parallel in the plane of substrate to slide.

May there is optional method, be included in wherein etching and comprise the method for deep reaction ion etching. In some optional methods, the first nonlinear suspension member and the 2nd nonlinear suspension member are first group of parts, comprise the described material of etching to limit and described first group of contrary the 2nd group nonlinear suspension member. Some optional methods comprise: etching is used for being coupled to anchor the 3rd group of nonlinear suspension member of quality block, and etching is used for being coupled to anchor the 4th group of nonlinear suspension member of quality block, wherein said 3rd group has with the 4th group and to halve with the 2nd group of similar key element and by the 2nd anchor bisecting plane being perpendicular to the first anchor bisecting plane to described first group.

Additional instruction

The theme of this document can use some examples to describe. Example 1 comprises a kind of MEMS (micro electro mechanical system) tube core for motion being responded to, and comprising: fixed part; It is coupled to the anchor of described fixed part; The first nonlinear suspension member of described anchor it is coupled in the side of described anchor; The 2nd nonlinear suspension member being coupled to described anchor in the same side of described anchor, described 2nd nonlinear suspension member has the shape and the position that become mirror with described first nonlinear suspension member about anchor bisecting plane; And the quality block of plane formula, described quality block is at least in part by described first nonlinear suspension member and described 2nd nonlinear suspension member suspention so that described quality block can rotate around described anchor and can slide in the plane being parallel to described fixed part.

Example 2 comprises the theme of example 1, and wherein the first nonlinear suspension member is C shape.

Example 3 comprises the theme of example 2, wherein said C shape comprises the internal portion being coupled to described anchor and extend towards described anchor bisecting plane, and there is the centre portions of portions of proximal and distal part, wherein said portions of proximal is coupled to described internal portion, described distal part extends away from described anchor along described anchor bisecting plane, and is coupled to the external portion of extension away from described anchor bisecting plane.

Example 4 comprises the theme of example 3, and the described external portion of wherein said first nonlinear suspension member has the portions of proximal of the described centre portions being coupled to described first nonlinear suspension member, and extends the distal part away from described anchor bisecting plane; The Part IV of described first nonlinear suspension member, the described distal part of described external portion it is coupled in its proximal portion, and the distal part of described Part IV is extended to towards described anchor, the distal part of described Part IV is coupled to the Part V extended towards described anchor bisecting plane of described first nonlinear suspension member.

Example 5 comprises in example 3-4 the theme of any one, and wherein internal portion is linear and parallel with external portion.

Example 6 comprises the theme of example 5, and wherein centre portions is perpendicular to internal portion and external portion.

Example 7 comprises in example 3-6 the theme of any one, and wherein centre portions is parallel to anchor bisecting plane.

Example 8 comprises in example 1-7 the theme of any one, and Qi Zhongmao, the first nonlinear suspension member, the 2nd nonlinear suspension member and quality block are formed by single plate material.

Example 9 comprises the theme of example 8, and wherein fixed part comprises the fixing single plate material different from single plate material of anchor, the first nonlinear suspension member, the 2nd nonlinear suspension member and quality block.

Example 10 comprises in example 1-9 the theme of any one, and wherein fixed part comprises the fixing single plate material identical with single plate material of anchor, the first nonlinear suspension member, the 2nd nonlinear suspension member and quality block.

Example 11 comprises in example 1-10 the theme of any one, and wherein tube core is thin slice shape, and each in the first nonlinear suspension member and the 2nd nonlinear suspension member all has the cross section of rectangle substantially, and the height of this cross section is less than width.

Example 12 comprises one method, comprising: etching material is to limit anchor; Etch the first nonlinear suspension member that described material is coupled to anchor to be limited to the side of described anchor; Etching the 2nd nonlinear suspension member that described material is coupled to described anchor to be limited to the same side of described anchor, described 2nd nonlinear suspension member has the shape and the position that become mirror with described first nonlinear suspension member about anchor bisecting plane; And etch described material to limit the quality block of plane formula, described quality block is at least in part by described first nonlinear suspension member and described 2nd nonlinear suspension member suspention so that described quality block can rotate around described anchor and can be parallel in the plane of substrate to slide.

Example 13 comprises the theme of example 12, and wherein etching comprises deep reaction ion etching.

Example 14 comprises in example 12-13 the theme of any one, and wherein the first nonlinear suspension member and the 2nd nonlinear suspension member are first group of parts, comprises the described material of etching to limit and described first group of contrary the 2nd group nonlinear suspension member.

Example 15 comprises the theme of example 14, comprise the three group nonlinear suspension member of etching for anchor being coupled to quality block, and etching is used for being coupled to anchor the 4th group of nonlinear suspension member of quality block, wherein said 3rd group has with the 4th group and to halve with the 2nd group of similar key element and by the 2nd anchor bisecting plane being perpendicular to the first anchor bisecting plane to described first group.

Example 16 can comprise any one of previous examples, and wherein motion is responded to by microcomputer electricity tube core. This example can comprise substrate. This example can be included in the quality block that anchor place is coupled to substrate. Quality block can comprise the first part that can move relative to anchor, and this first part comprises the first quality cube electrode. This example can comprise the second section relative with first part relative to anchor of quality block, and described second section can move relative to anchor and first part, and second section comprises the 2nd quality cube electrode. This example can comprise and is coupled to substrate and comprises the first stator of the first stator electrode, and described first stator electrode extends on the first quality cube electrode side of the first part of quality block to form the first electrode pair. This example can comprise and is coupled to substrate and comprises the 2nd stator of the 2nd stator electrode, and described 2nd stator electrode is relative with the first stator electrode and extends on the 2nd quality cube electrode side of the second section of quality block to form the 2nd electrode pair. According to these examples, in the first vibration modes, wherein the first part of quality block moves away from the second section of quality block, and the distance between the distance that quality block, the first stator electrode and the 2nd stator electrode are arranged such that between the electrode of the first electrode pair and the electrode of the 2nd electrode pair is inversely proportional to.

Example 17 can comprise any one of previous examples, wherein the first quality cube electrode of quality block is relative with the 2nd quality cube electrode of quality block at the other side of anchor, and wherein the first stator electrode is relative with the 2nd anchor electrodes and be coupled to substrate at the other side of anchor.

Example 18 can comprise any one of previous examples, and wherein the first part of quality block is symmetrical at the other side of anchor and the second section of quality block, and the first stator is asymmetric relative to the 2nd stator at the other side of anchor.

Example 19 can comprise any one of previous examples, and wherein the first electrode pair comprises the first electrical condenser, and the 2nd electrode pair comprises the 2nd electrical condenser.

Example 20 can comprise any one of previous examples, and wherein each in the first quality cube electrode and the first stator electrode is elongated, and distance between the first quality cube electrode and the first stator electrode along each length substantially constant.

Example 21 can comprise any one of previous examples, and wherein each in the 2nd quality cube electrode and the 2nd stator electrode is elongated, and distance between the 2nd quality cube electrode and the 2nd stator electrode along each length substantially constant.

Example 22 can comprise any one of previous examples, wherein quality block limits the first opening on the first side of anchor, the first part of quality block is coupled in the first opening removablely, and more than first the quality cube electrode comprising the first quality cube electrode extends in described opening and be spaced apart from each other. In this example, quality block can limit the 2nd opening on the 2nd side of anchor, and second section is coupled in the second opening, and the 2nd many quality cube electrodes comprising the 2nd quality cube electrode extend in described opening and are spaced apart from each other.

Example 23 can comprise any one of previous examples, wherein the first stator electrode is in more than first stator electrode, and described more than first stator electrode and the respective electrode in described more than first quality cube electrode be staggered to be engaged and paired to form the first electrode pair; And wherein the 2nd stator electrode is in the 2nd many stator electrodes, the described 2nd many stator electrodes are staggered with the respective electrode in described 2nd many stator electrodes to be engaged and paired to form the 2nd electrode pair.

Example 24 can comprise any one of previous examples, wherein, in the first vibration modes, described more than first stator electrode is constructed to move away from described more than first stator electrode and away from anchor, and the described 2nd many stator electrodes are constructed to towards described 2nd many stator electrodes and move towards anchor.

Example 25 can comprise any one of previous examples, wherein quality block is constructed to about substrate vibration so that the distance between described more than first stator electrode and described more than first stator electrode changes and makes the distance between described 2nd many stator electrodes and described 2nd many stator electrodes change, in described 2nd many stator electrodes in the one of anchor and described 2nd many stator electrodes closest to the one of anchor at a distance of bigger distance time, closest to the one of an anchor distance apart in the one of anchor and described more than first stator electrode in described more than first stator electrode.

Example 26 can comprise any one of previous examples, wherein the first quality cube electrode, the 2nd quality cube electrode, the first stator electrode and the 2nd stator electrode are bending, wherein each in electrode is around a bending shaft, and quality block is constructed in the 2nd vibration modes to rotate around this axle.

Example 27 can comprise any one of previous examples and can comprise and form quality block, comprises the anchor formed for quality block is coupled to substrate. This example can be included on the first side of anchor and form first part, and this first part can move relative to anchor and comprise the first quality cube electrode. This example can be included on the 2nd side relative with the first side of anchor and form second section, and this second section comprises the 2nd quality cube electrode. This example can comprise the first stator formed for being coupled to substrate, comprises the first quality cube electrode side formed at quality block and extends the first stator electrode to form the first electrode pair. This example can comprise the 2nd stator formed for being coupled to substrate, comprises the 2nd quality cube electrode side formed at quality block and extends the 2nd stator electrode to form the 2nd electrode pair. According to this example, quality block, the first stator and the 2nd stator are formed to make in the first vibration modes of quality block, and distance between the electrode of first pair and the distance between the electrode of the 2nd electrode pair are inversely proportional to.

Example 28 can comprise any one of previous examples, and wherein said formation comprises deep reaction ion etching.

Example 29 can comprise any one of previous examples, wherein form the first quality cube electrode, form the 2nd quality cube electrode, form the first stator electrode and form the 2nd stator electrode and comprise and being formed each with certain curvature, wherein each is around a bending shaft, and quality block rotates around this axle in the 2nd vibration modes.

Example 30 can comprise any one of previous examples, comprises and forms the first electrical condenser with the first electrode pair, and forms the 2nd electrical condenser with the 2nd electrode pair.

Example 31 can comprise any one of previous examples, wherein form the first quality cube electrode and the first stator electrode comprises the first distance forming the length substantially constant along the first electrode pair between which, and form the 2nd quality cube electrode and the 2nd stator electrode comprises the 2nd distance forming the length substantially constant along the 2nd electrode pair between which.

Example 32 can comprise any one of previous examples, comprises a kind of method using microcomputer electricity tube core motion to be responded to, comprises. This example can comprise the vibration of the second section of the first part exciting quality block and quality block so that first part and second section towards corresponding first stator and the 2nd stator move together and synchronously between separate. This example can comprise the difference of the corresponding capacitance value by measuring the first stator and the 2nd stator, is responded to along moving of a direction by tube core, and this direction extends between the first part and the second section of quality block of quality block.

Example 33 can comprise any one of previous examples, and wherein first part comprises the first quality cube electrode that the first stator electrode towards the first stator moves, and second section comprises the 2nd quality cube electrode of the 2nd stator electrode moving away from the 2nd stator.

Example 34 can comprise any one of previous examples, wherein motion is responded to and comprises the first electric capacity to the first electrode pair comprising the first quality cube electrode and the first stator electrode and the difference that comprises between the 2nd quality cube electrode and the 2nd electrode pair of the 2nd stator electrode is responded to.

Example 35 can comprise any one of previous examples, comprises and being turned by the plane internal rotation of quality block at described quality block, and do not change the first stator and the 2nd stator corresponding capacitance value record difference.

Example 36 can comprise any one of previous examples, is turned by the plane internal rotation of quality block at described quality block when the distance that is included between the electrode not changing the first electrode pair and the distance between the electrode not changing the 2nd electrode pair.

Example 37 can comprise any one of previous examples, comprises microcomputer electricity tube core motion responded to. this example can comprise fixed part. this example can comprise the anchor being coupled to fixed part. this example can be included on the first side of anchor to be coupled to the first nonlinear suspension member of anchor. this example can be included on the first side of anchor to be coupled to the 2nd nonlinear suspension member of anchor, and the 2nd nonlinear suspension member has the shape and the position that become mirror with the first nonlinear suspension member about anchor bisecting plane. according to this example, the first nonlinear suspension member and the 2nd nonlinear suspension member are parts for the inner ring frame of microcomputer electricity tube core. this example can comprise the quality block of plane formula, the 2nd suspention component suspention that described quality block suspends component in midair by first on the first side being arranged on anchor and is arranged on the 2nd side relative with the first side of anchor, tube core limits the first gap of the first side extension along anchor and the 2nd gap of the two side extension relative with the first side along anchor, each in first gap and the 2nd gap extends between inner ring frame and described quality block, wherein inner ring frame is supported by the first nonlinear suspension member and the 2nd nonlinear suspension member at least in part, make described quality block can around described anchor rotate and can slide in the plane being parallel to described fixed part.

Example 38 can comprise any one of previous examples, and wherein the first gap extends to the 2nd suspention component from the first suspention component, and the 2nd gap extends to the 2nd suspention component from the first suspention component.

Example 39 can comprise any one of previous examples, and wherein the first gap and the 2nd gap are C shape, the one C shape limit towards the 2nd C shape the 2nd opening open wide the first opening.

Example 40 can comprise any one of previous examples, and wherein the first gap limits the first vertical deflection division deflection division vertical with the 2nd, and the 2nd gap limits the 3rd vertical deflection division deflection division vertical with the 4th.

Example 41 can comprise any one of previous examples, and wherein each in the vertical deflection division of first, second, third and fourth is elongated, and its length ratio width is long, and each corresponding length extends away from suspending component accordingly in midair.

Example 42 can comprise any one of previous examples, and wherein each corresponding length extends away from anchor bisecting plane.

Example 43 can comprise any one of previous examples, and wherein a C shape comprises first end section and second end section, and centre portions extends between described first end section and described second end section.

Example 44 can comprise any one of previous examples, and wherein first end section and second end section is perpendicular to centre portions.

Example 45 can comprise any one of previous examples, and wherein first tilts part extension between first end section and centre portions, and the 2nd inclination part extends between second end section and centre portions.

Example 46 can comprise any one of previous examples, and wherein the first gap is the mirror image shape in the 2nd gap, and the first gap becomes mirror image along anchor bisecting plane.

Example 47 can comprise one method, comprises and forms a kind of material to limit inner ring frame, and this inner ring frame is coupled to be anchored on substrate with anchor. This example can comprise the first nonlinear suspension member that the described material of formation is coupled to anchor to be limited on the first side of described anchor. This example can comprise and forms described material and be coupled to the 2nd nonlinear suspension member of anchor to be limited on the first side of described anchor, and described 2nd nonlinear suspension member has the shape and the position that become mirror with described first nonlinear suspension member about anchor bisecting plane. This example can comprise the described material of formation to limit the quality block of plane formula, the 2nd suspention component suspention that described quality block suspends component in midair by first on the first side being arranged on anchor and is arranged on the 2nd side relative with the first side of anchor, first gap extends along the first side of anchor and the 2nd gap extends along relative with the first side the 2nd side of anchor, and each in the first gap and the 2nd gap extends between quality block and inner ring frame.

Example 48 can comprise any one of previous examples, and wherein said formation comprises deep reaction ion etching.

Example 49 can comprise any one of previous examples, and wherein the first nonlinear suspension member and the 2nd nonlinear suspension member are first group of parts, comprises the described material of etching to limit and described first group of contrary the 2nd group nonlinear suspension member.

Example 50 can comprise the three group nonlinear suspension member of etching for anchor is coupled to quality block, and etching is used for being coupled to anchor the 4th group of nonlinear suspension member of quality block, wherein said 3rd group has with the 4th group and to halve with the 2nd group of similar key element and by the 2nd anchor bisecting plane being perpendicular to the first anchor bisecting plane to described first group.

Example 51 can comprise any one of previous examples, wherein etches the first gap and the 2nd gap comprises each is shaped to C shape, and a C shape in the first gap is opened wide towards the 2nd C shape in the 2nd gap.

Example 52 can comprise a kind of method using microcomputer electricity tube core motion to be responded to, and comprises quality block relative to the inner ring frame rotation being coupled to substrate via anchor. This example can comprise makes the first nonlinear suspension member distortion, and described quality block is coupled to the first side of anchor by this first nonlinear suspension member outside the face of quality block plane, above quality block. This example can comprise makes the 2nd nonlinear suspension member distortion, the 2nd nonlinear suspension member on the first relative side of the external described quality block plane in the face of quality block plane, below quality block, described quality block is coupled to the first side of anchor. This example can comprise the first suspention deformation of member making support quality block and being arranged on the first side of anchor, and make the be arranged on the 2nd side relative with the first side of anchor the 2nd to suspend the deformation of member in midair, the each that tube core limits in the first gap of the first side extension along anchor and the 2nd gap of the 2nd side extension relative with the first side along anchor, the first gap and the 2nd gap extends between inner ring frame and quality block.

Example 53 can comprise any one of previous examples, the first suspention deformation of member wherein making support quality block and be arranged on the first side of anchor, and make the be arranged on the 2nd side relative with the first side of anchor the 2nd to suspend the deformation of member in midair, comprise and the first vertical deflection division deflection division vertical with the 2nd limited by the first gap separately and respective the 3rd vertical deflection division deflection division vertical with the 4th limited by the 2nd gap are out of shape.

Example 54 can comprise any one of previous examples, wherein during the first the half of rotating circulating, first vertical deflection division deflection division vertical with the 2nd is out of shape away from anchor, and the 3rd vertical deflection division deflection division vertical with the 4th is out of shape towards anchor, and during the 2 half of rotating circulating the, first vertical deflection division deflection division vertical with the 2nd is out of shape towards anchor, and the 3rd vertical deflection division deflection division vertical with the 4th is out of shape away from anchor.

Example 55 can comprise any one of previous examples, wherein makes deflection division distortion comprise bending.

Example 56 can comprise any one of previous examples, and wherein anchor vertically is halved by anchor bisecting plane, and passes through between the first nonlinear suspension member and the 2nd nonlinear suspension member and between the first suspention component and the 2nd suspention component.

Above-mentioned circumstantial letter have references to accompanying drawing, and accompanying drawing is also a part for described circumstantial letter. Accompanying drawing shows in diagrammatic mode can apply specific embodiments of the invention. These embodiments are referred to as herein " example ". All publications involved by herein, patent and patent document are all as the reference content of this paper, although they distinguish in addition reference. If there is purposes difference herein and between reference paper, then purposes with reference to file regards as supplementing of purposes herein, if there is irreconcilable difference between the two, is then as the criterion with purposes herein.

Herein, normally used with patent document the same, term " " or " a certain " represent comprise one or more, but other situations or when using " at least one " or " one or more " should except. Herein, except as otherwise noted, otherwise use term "or" refer to without exclusiveness or so that " A or B " comprising: " A but be not B ", " B but be not A " and " A and B ". In the following claims, term " comprising " and " wherein " are equal to the plain English of each term " comprising " and " wherein ". Equally, herein, term " comprises " and " comprising " is open, namely, system, device, article or step comprise the parts except those parts listed after this kind of term in claim, are still considered as dropping within the scope of this claim. And, in claim below, term " first ", " the 2nd " and " the 3rd " etc. are only used as label, and object not has quantity requirement. The effect of above-mentioned explanation be explain orally and unrestricted. In other instances, it is possible to use above-mentioned example (or one or more aspect) be combineding with each other. On the basis understanding above-mentioned specification sheets, certain routine techniques of prior art can be utilized to perform other embodiments.

There is provided specification digest according to patent regulation 37C.F.R. �� 1.72 (b) thus allow reader to determine essence disclosed in technology fast. The submission of specification digest is not intended to scope and the implication for explaining or limit claim. Equally, in embodiment above, various feature can be classified into be rationalized the disclosure. This open feature not shoulding be understood to failed call is essential to any claim. On the contrary, the feature that the theme of the present invention can be is less than all features of specific disclosed embodiment. Therefore, claim below is incorporated in embodiment accordingly, and each claim is all as an independent embodiment, and can be susceptible to these embodiments and can be bonded to each other in various combination or arrangement. Should referring to appended claim, and all scopes of the jljl such as what these claims were enjoyed, determine the scope of the application.

Claims

1. for motion respond to microcomputer electricity a tube core, comprising:

Fixed part;

Anchor, it is coupled to described fixed part;

First nonlinear suspension member, it is coupled to described anchor on the first side of described anchor;

2nd nonlinear suspension member, it is coupled to described anchor on described first side of described anchor, described 2nd nonlinear suspension member has the shape and the position that become mirror with described first nonlinear suspension member about anchor bisecting plane, and wherein said first nonlinear suspension member and described 2nd nonlinear suspension member are parts for the inner ring frame of described microcomputer electricity tube core; And

The quality block of plane shape, the 2nd suspention component suspention that described quality block suspends component in midair by first on the first side being arranged on described anchor and is arranged on the 2nd side relative with described first side of described anchor, described tube core limits the first gap of the first side extension along described anchor and the 2nd gap of the two side extension relative with described first side along described anchor, each in described first gap and described 2nd gap extends between described inner ring frame and described quality block

Wherein said inner ring frame is supported by described first nonlinear suspension member and described 2nd nonlinear suspension member at least in part so that described quality block can rotate around described anchor and can slide in the plane being parallel to described fixed part.

2. tube core according to claim 1, wherein said first gap extends to described 2nd suspention component from described first suspention component, and described 2nd gap extends to described 2nd suspention component from described first suspention component.

3. tube core according to claim 1, wherein said first gap and described 2nd gap are C shape, the one C shape limit towards the 2nd C shape the 2nd opening open wide the first opening.

4. tube core according to claim 3, wherein said first gap limits the first vertical deflection division deflection division vertical with the 2nd, and described 2nd gap limits the 3rd vertical deflection division deflection division vertical with the 4th.

5. tube core according to claim 4, each in the vertical deflection division of wherein said first, second, third and fourth is elongated, and its length ratio width is long, and each corresponding length extends away from suspending component accordingly in midair.

6. tube core according to claim 5, wherein each corresponding length extends away from described anchor bisecting plane.

7. tube core according to claim 3, a wherein said C shape comprises first end section and second end section, and centre portions extends between described first end section and described second end section.

8. tube core according to claim 7, wherein said first end section and described second end section are perpendicular to described centre portions.

9. tube core according to claim 7, wherein first tilts part extension between described first end section and described centre portions, and the 2nd inclination part extends between described second end section and described centre portions.

10. tube core according to any one of claim 1-9, wherein said first gap is the mirror image shape in described 2nd gap, and described first gap becomes mirror image along described anchor bisecting plane.

11. 1 kinds manufacture the method for microcomputer electricity tube core, comprising:

A kind of material of etching is to limit inner ring frame, and described inner ring frame is coupled to be anchored on substrate with anchor;

Etch the first nonlinear suspension member that described material is coupled to described anchor to be limited on the first side of described anchor;

Etching the 2nd nonlinear suspension member that described material is coupled to described anchor to be limited on described first side of described anchor, described 2nd nonlinear suspension member has the shape and the position that become mirror with described first nonlinear suspension member about anchor bisecting plane; And

Etch described material to limit the quality block of plane formula, the 2nd suspention component suspention that described quality block suspends component in midair by first on the first side being arranged on described anchor and is arranged on the 2nd side relative with described first side of described anchor, first gap extends along the first side of described anchor and the 2nd gap extends along relative with described first side the 2nd side of described anchor, and each in described first gap and described 2nd gap extends between described quality block and described inner ring frame.

12. methods according to claim 11, wherein etching comprises deep reaction ion etching.

13. methods according to claim 11, wherein said first nonlinear suspension member and described 2nd nonlinear suspension member are first group of parts, comprise the described material of etching to limit and described first group of contrary the 2nd group nonlinear suspension member.

14. methods according to claim 13, comprise the three group nonlinear suspension member of etching for described anchor being coupled to described quality block, and etching is used for being coupled to described anchor the 4th group of nonlinear suspension member of described quality block, wherein said 3rd group has with described 4th group and with described 2nd group of similar key element and to halve by the 2nd anchor bisecting plane being perpendicular to the first anchor bisecting plane to described first group.

15. methods according to any one of claim 11-14, wherein etch described first gap and described 2nd gap comprises each is shaped to C shape, and a C shape in described first gap is opened wide towards the 2nd C shape in described 2nd gap.