CN104215918A - Chamber two-dimensional distribution measuring device - Google Patents
Chamber two-dimensional distribution measuring device Download PDFInfo
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- CN104215918A CN104215918A CN201410496695.7A CN201410496695A CN104215918A CN 104215918 A CN104215918 A CN 104215918A CN 201410496695 A CN201410496695 A CN 201410496695A CN 104215918 A CN104215918 A CN 104215918A
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- connecting rod
- branch
- chamber
- dimensional distribution
- slide assemblies
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Abstract
A chamber two-dimensional distribution measuring device comprises a sliding rail member and a limiting block arranged in the middle of the sliding rail member. Two sliding blocks are respectively arranged on both sides of the limiting block on the sliding rail member. The chamber two-dimensional distribution measuring device further comprises a first connecting rod and a second connecting rod, wherein the first connecting rod and the second connecting rod are provided with a common end and can rotate around the common end. The free ends of the first connecting rod and the second connecting rod are respectively connected to the sliding blocks through rotation shafts, the end portion of the common end is provided with a first branch portion fixedly connected to the common end, the end of the first branch portion is provided with a measuring sensor, the first branch portion is axially parallel to the plane formed by axes of the sliding rail member, the first connecting rod and the second connecting rod, the first branch portion is formed close the sliding rail member, and the included angle between the first branch portion and the second connecting rod is 20-60 degrees. The chamber two-dimensional distribution measuring device can be used for two-dimensional measurement in an apparatus with a small opening and the uncertainty is reduced through a branch structure. The chamber two-dimensional distribution measuring device is high in measurement control accuracy, compact and low in costs.
Description
Technical field
The invention belongs to field of measuring technique, relate to the distribution measuring of two-dimensional space, be specifically related to Two dimensional Distribution measurement mechanism in a kind of chamber.
Background technology
In some specific application scenarios, need at cavity outside, by some movement executing mechanisms (such as motor) on cavity chamber wall opening, by gear train, the position of the object in chamber is regulated.Such as manufacture in debug process at cyclotron, need to measure the distribution of cyclotron magnets internal magnetic field along space, this needs the motor being installed on magnet outside by some, the axle be on magnet outer wall is driven to rotate, and then pass through gear train, hall probe with moving magnet inside arrives different positions, measures the magnetic field of diverse location.
Fig. 1 shows a kind of known device that can carry out three-dimension distribution.As shown in Figure 1, this device drives the sensor be placed on gage beam to move along three directions by motor.When this device is used for carrying out three-dimensional position adjustment to the object in cavity, the opening size on cavity wall needs the range of lateral adjustment being greater than sensing station; And the gage beam of this single-cantilever beam type, the vibration in motion process can cause the inaccurate of sensing station.
Fig. 2 shows a kind of known device that can carry out two-dimensional magnetic field distribution measuring.As shown in Figure 2, drive motor can drive gage beam to move along X, Y-direction.The vibration that this structure solves single cantilever beam existence causes the inaccurate problem of sensing station, but opening size required on cavity still needs the range of lateral adjustment being greater than object space.
In some specific application scenarios, need the position adjustments scope of object in cavity comparatively large, and the opening on cavity chamber wall can not be very large, therefore known technology is difficult to the motorized adjustment of the position of the sensor in chamber being carried out to various dimensions outside chamber.
Summary of the invention
For overcoming existing three-dimensional or two-dimentional measuring device measurement out of true, the technological deficiency that young cavity space carries out distributed measurement can not be split, the invention discloses Two dimensional Distribution measurement mechanism in a kind of chamber.
Two dimensional Distribution measurement mechanism in chamber of the present invention, comprise slide assemblies and be positioned at the limited block in the middle part of slide assemblies, the slide assemblies of limited block both sides is respectively arranged with a slide block, also comprise first connecting rod and second connecting rod, described first connecting rod and second connecting rod have a common port, and first connecting rod and second connecting rod can rotate around common port;
Described first connecting rod is connected described slide block with another free end of second connecting rod respectively by rotating shaft, and described common port end is also provided with the first branch be fixedly connected with public end, and described first branch tip is provided with survey sensor;
Described first branch axis being parallel is in by slide assemblies, first connecting rod, the determined plane of second connecting rod three axis, and described first branch trend is near slide assemblies, and the angle of the first branch and second connecting rod is set to 15-90 degree.
Concrete, described first connecting rod is connected by rotating shaft with second connecting rod.
Preferably, described slide assemblies is leading screw.
Further, two free ends of described leading screw are respectively arranged with side plate, side plate are provided with the motor that output terminal is connected with leading screw free end.
Preferably, also comprise the second branch be fixedly connected with public end, described second branch tip is provided with survey sensor, second branched shaft line parallel is in by slide assemblies, first connecting rod, the determined plane of second connecting rod three axis, and the second branch and the first branch lay respectively at second connecting rod both sides.
Further, the second branch becomes rotational symmetry to distribute with the first branch relative to second connecting rod.
Preferably, also comprise fixed base plate, described slide assemblies is arranged on fixed base plate.
Concrete, it is characterized in that, described survey sensor is magnetic sensor
Adopt Two dimensional Distribution measurement mechanism in chamber of the present invention, can at the equipment only having less perforate, such as cyclotron magnets inside is carried out two dimension and is accurately measured, apparatus derivatorius is utilized to reduce uncertainty, Survey control precision is high, and device is compact, with low cost.
Accompanying drawing explanation
Fig. 1 is a kind of device measuring distributed in three dimensions in prior art;
Fig. 2 is the device of a kind of two-dimensional magnetic field distribution measuring in prior art;
Fig. 3 is a kind of embodiment of Two dimensional Distribution measurement mechanism in chamber of the present invention;
In figure, Reference numeral name is called: 1-fixed base plate, 2-motor, 3-slide assemblies, 4-limited block, 5-slide block, 6-first connecting rod, 7-second connecting rod, 8-first branch, 9-second branch, 10-side plate.
Embodiment
Below in conjunction with accompanying drawing, the specific embodiment of the present invention is described in further detail.
Two dimensional Distribution measurement mechanism in chamber of the present invention, the limited block comprising slide assemblies 3 and be positioned in the middle part of slide assemblies, the slide assemblies of limited block both sides is respectively arranged with a slide block 5, also comprise first connecting rod 6 and second connecting rod 7, described first connecting rod and second connecting rod have a common port, and first connecting rod and second connecting rod can rotate around common port;
Described first connecting rod is connected described slide block with another free end of second connecting rod respectively by rotating shaft, and described common port end is also provided with the first branch 8 be fixedly connected with public end, and described first branch tip is provided with survey sensor;
Described first branch axis being parallel is in by slide assemblies 3, first connecting rod 6, the determined plane of second connecting rod 7 three axis, and described first branch trend is near slide assemblies, and the angle of the first branch and second connecting rod is set to 20-60 degree.
As shown in Figure 3, with limited block center for true origin sets up coordinate system, X-coordinate direction is that slide assemblies is axial, Y-coordinate direction is perpendicular to X-coordinate, slide block can slide along slide assemblies, because first connecting rod is connected with slide block rotating shaft with second connecting rod, along with the change in location of two slide blocks, the intersection point of first connecting rod and second connecting rod and the position of common port constantly can adjust in X, Y-coordinate, first branch is fixedly connected with common port, do not change with common port self changes in coordinates with the angle of second connecting rod, survey sensor is arranged on the first branch tip part.Be positioned at the change of two slide positions of limited block both sides, be transferred to common port by first connecting rod and second connecting rod, cause the survey sensor changes in coordinates being arranged on the first branch tip, realize survey sensor (
x, y) two-dimensional position in plane regulates, the setting of the first branch, can control because the uncertainty of slide position causes the position deviation of survey sensor in more among a small circle.For convenience of integral installation, can arrange fixed base plate 1, described slide assemblies is arranged on fixed base plate.
When first connecting rod and second connecting rod contraction are in a straight line, the axial cross section size of said apparatus is accomplished minimum, can insert in more airtight chamber by small-bore opening, now required opening is generally elongated strip shaped, bar length is determined by the projected length of the first branch, and thickness is determined by connecting rod thickness.
Concrete, described first connecting rod can be connected by rotating shaft with second connecting rod.
Described slide assemblies can be leading screw, by rotating threaded shaft, realizes the X-direction coordinate position of fine adjustment slide block.
Further, at leading screw two free ends as slide assemblies, side plate 10 is set, servomotor installed by side plate, motor 2 output terminal is connected with leading screw free end, motor 2 output shaft rotarily drives leading screw and rotates, automatically controlled the rotation revolution of leading screw by motor accurately, control the position of slide block, thus the position of control survey sensor.
In the embodiment shown in Fig. 3, with limited block 4 geometric center for true origin sets up two-dimensional coordinate system, the position at two slide block places is respectively (-
u, 0) and (
v, 0), the length of first connecting rod and second connecting rod is equal and be
l, the first branch length is
w, and with second connecting rod angle be
q.
Can be obtained by plane geometry analysis, the coordinate of common port position be (
,
), then the X of the tip part of the first branch, Y-coordinate position are respectively:
------①
------②
For cyclotron, require to measure with cyclotron geometric center for the center of circle, the two-dimensional magnetic field distribution within the scope of radius 450mm.Can choose first connecting rod and second connecting rod length L is 570mm, the first branch length W is 120mm, the first branch and second connecting rod angle
qbe 30 degree, can realize the movement of survey sensor in a two quadrant of XY two dimensional surface, now survey sensor is magnetic sensor.
For above design parameter, according to 1., 2. formula, close
xaxle (namely
y=0) place, can obtain
ythe formula of error transmission at=0 place:
To W=120 millimeter, L=570 millimeters,
q=30 degree, the uncertainty of survey sensor position is 3.2 times of the position uncertainty of two slide blocks, for guaranteeing to obtain lower position uncertainty, angle
qscope should be greater than 15 degree but be less than 90 degree.
By servomotor and choice accuracy higher leading screw design, the positional precision of two slide blocks can be made to reach less than 20 μm, thus the survey sensor position control accuracy that can realize the first branch tip reaches below 0.1mm.
For realizing the four-quadrant measurement of XY plane three, second branch can be set, second branch is also fixedly connected with public end, described second branch tip is provided with survey sensor, second branched shaft line parallel is in by slide assemblies, first connecting rod, the determined plane of second connecting rod three axis, and the second branch and the first branch lay respectively at second connecting rod both sides, be preferably arranged to the distribution of relative second connecting rod rotational symmetry.
When measuring three four-quadrants, common port is pulled to lower than X-axis, thus realizes the movement of survey sensor in three four-quadrants.
In the horizontal direction, the u corresponding according to the measurement range (i.e. the scope of xd, yd) 1., 2. needed for formula calculating realization, v scope; Calculate the scope in the y direction of opening part, obtain the size of the horizontal direction of required perforate; The size in plummet direction, is obtained by the height of estimation slide assemblies and branch's slide rail;
Such as cavity chamber wall radius 700mm, realize the magnetic-field measurement within the scope of radius 450mm, then required perforate is bar shaped, and horizontal direction width is about 300mm, and the height in plummet direction depends on the concrete component thickness selected.
Adopt Two dimensional Distribution measurement mechanism in chamber of the present invention, can at the equipment only having less perforate, such as cyclotron magnets inside is carried out two dimension and is accurately measured, and Survey control precision is high, and device is compact, with low cost.
Previously described is each preferred embodiment of the present invention, preferred implementation in each preferred embodiment is if not obviously contradictory or premised on a certain preferred implementation, each preferred implementation can stack combinations use arbitrarily, design parameter in described embodiment and embodiment is only the invention proof procedure in order to clear statement inventor, and be not used to limit scope of patent protection of the present invention, scope of patent protection of the present invention is still as the criterion with its claims, the equivalent structure change that every utilization instructions of the present invention and accompanying drawing content are done, in like manner all should be included in protection scope of the present invention.
Claims (8)
1. Two dimensional Distribution measurement mechanism in chamber, it is characterized in that, comprise slide assemblies (3) and be positioned at the limited block (4) in the middle part of slide assemblies, the slide assemblies of limited block both sides is respectively arranged with a slide block (5), also comprise first connecting rod (6) and second connecting rod (7), described first connecting rod and second connecting rod have a common port, and first connecting rod and second connecting rod can rotate around common port;
Described first connecting rod is connected described slide block with another free end of second connecting rod respectively by rotating shaft, and described common port end is also provided with the first branch (8) be fixedly connected with public end, and described first branch tip is provided with survey sensor;
Described first branch (8) axis being parallel is in by slide assemblies (3), first connecting rod (6), the determined plane of second connecting rod (7) three's axis, described first branch trend is near slide assemblies, and the angle of the first branch and second connecting rod is set to 15-90 degree.
2. Two dimensional Distribution measurement mechanism in chamber as claimed in claim 1, it is characterized in that, described first connecting rod (6) is connected by rotating shaft with second connecting rod (7).
3. Two dimensional Distribution measurement mechanism in chamber as claimed in claim 1, it is characterized in that, described slide assemblies (3) is leading screw.
4. Two dimensional Distribution measurement mechanism in chamber as claimed in claim 3, it is characterized in that, two free ends of described leading screw are respectively arranged with side plate (10), side plate are provided with the motor (2) that output terminal is connected with leading screw free end.
5. Two dimensional Distribution measurement mechanism in chamber as claimed in claim 1, it is characterized in that, also comprise the second branch (9) be fixedly connected with public end, described second branch tip is provided with survey sensor, second branch (9) axis being parallel is in by slide assemblies (3), first connecting rod (6), the determined plane of second connecting rod (7) three's axis, and the second branch (9) and the first branch (8) lay respectively at second connecting rod (6) both sides.
6. Two dimensional Distribution measurement mechanism in chamber as claimed in claim 5, it is characterized in that, the second branch becomes rotational symmetry to distribute with the first branch relative to second connecting rod.
7. Two dimensional Distribution measurement mechanism in chamber as claimed in claim 1, it is characterized in that, also comprise fixed base plate (1), described slide assemblies (3) is arranged on fixed base plate (1).
8. Two dimensional Distribution measurement mechanism in chamber as claimed in claim 1, it is characterized in that, it is characterized in that, described survey sensor is magnetic sensor.
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410496695.7A CN104215918A (en) | 2014-09-25 | 2014-09-25 | Chamber two-dimensional distribution measuring device |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410496695.7A CN104215918A (en) | 2014-09-25 | 2014-09-25 | Chamber two-dimensional distribution measuring device |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109188315A (en) * | 2018-08-31 | 2019-01-11 | 哈尔滨工业大学 | A kind of adjustable magnetic gradiometer of sensor array parallax range |
| CN112858967A (en) * | 2021-01-28 | 2021-05-28 | 浙江英洛华引力科技有限公司 | Magnetic attraction force detection device |
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| JP2000352579A (en) * | 1999-06-10 | 2000-12-19 | Kawasaki Steel Corp | Measuring device and measuring method for dynamic magnetic characteristic of motor stator iron core |
| CN102360067A (en) * | 2011-07-12 | 2012-02-22 | 天津市中环天佳电子有限公司 | Surface magnetic measurement device for development magnetic roller |
| CN102636214A (en) * | 2012-04-26 | 2012-08-15 | 聊城大学 | Infrared target motion simulator |
| CN102967772A (en) * | 2012-11-09 | 2013-03-13 | 清华大学 | Two-dimension full automatic electromagnetic field distribution testing system |
| US20130063139A1 (en) * | 2011-09-09 | 2013-03-14 | Hitachi High-Technologies Corporation | Method and its apparatus for inspecting a magnetic head device |
| CN203037836U (en) * | 2013-01-06 | 2013-07-03 | 山西省电力公司大同供电分公司 | Magnetic field strength measurement device |
| CN103481278A (en) * | 2013-10-11 | 2014-01-01 | 天津理工大学 | Three-translational spatial parallel robot mechanism |
| CN204065378U (en) * | 2014-09-25 | 2014-12-31 | 中国工程物理研究院流体物理研究所 | Two dimensional Distribution measurement mechanism in chamber |
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2014
- 2014-09-25 CN CN201410496695.7A patent/CN104215918A/en active Pending
Patent Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2000352579A (en) * | 1999-06-10 | 2000-12-19 | Kawasaki Steel Corp | Measuring device and measuring method for dynamic magnetic characteristic of motor stator iron core |
| CN102360067A (en) * | 2011-07-12 | 2012-02-22 | 天津市中环天佳电子有限公司 | Surface magnetic measurement device for development magnetic roller |
| US20130063139A1 (en) * | 2011-09-09 | 2013-03-14 | Hitachi High-Technologies Corporation | Method and its apparatus for inspecting a magnetic head device |
| CN102636214A (en) * | 2012-04-26 | 2012-08-15 | 聊城大学 | Infrared target motion simulator |
| CN102967772A (en) * | 2012-11-09 | 2013-03-13 | 清华大学 | Two-dimension full automatic electromagnetic field distribution testing system |
| CN203037836U (en) * | 2013-01-06 | 2013-07-03 | 山西省电力公司大同供电分公司 | Magnetic field strength measurement device |
| CN103481278A (en) * | 2013-10-11 | 2014-01-01 | 天津理工大学 | Three-translational spatial parallel robot mechanism |
| CN204065378U (en) * | 2014-09-25 | 2014-12-31 | 中国工程物理研究院流体物理研究所 | Two dimensional Distribution measurement mechanism in chamber |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109188315A (en) * | 2018-08-31 | 2019-01-11 | 哈尔滨工业大学 | A kind of adjustable magnetic gradiometer of sensor array parallax range |
| CN112858967A (en) * | 2021-01-28 | 2021-05-28 | 浙江英洛华引力科技有限公司 | Magnetic attraction force detection device |
| CN112858967B (en) * | 2021-01-28 | 2024-06-07 | 浙江英洛华引力科技有限公司 | Magnetic attraction force detection device |
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Effective date of registration: 20170427 Address after: 621000 Sanjiang Road, Mianyang, Sichuan Province Road, No. 39 Applicant after: Sichuan Source Technology Co., Ltd. Address before: Mianyang City, Sichuan Province, 621000 Mountain Road No. 64 Applicant before: Fluid Physics Inst., China Engineering Physics Academy |
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Application publication date: 20141217 |