CN104211069B - Construction member for ejecting hydrogen chloride gas and reaction apparatus for producing trichlorosilane and method - Google Patents
Construction member for ejecting hydrogen chloride gas and reaction apparatus for producing trichlorosilane and method Download PDFInfo
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- CN104211069B CN104211069B CN201410434126.XA CN201410434126A CN104211069B CN 104211069 B CN104211069 B CN 104211069B CN 201410434126 A CN201410434126 A CN 201410434126A CN 104211069 B CN104211069 B CN 104211069B
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Abstract
The present invention provides a kind of construction member for ejecting hydrogen chloride gas and reaction apparatus for producing trichlorosilane and method, construction member for ejecting hydrogen chloride gas (1) uses in the reaction apparatus for producing trichlorosilane making hydrogen chloride gas and silicon metal powder react to generate trichlorosilane, there is the axle portion (2) extended towards length direction, the head (3) extended with the direction intersected along the above-mentioned length direction with this axle portion (2), the supply hole (4) that above-mentioned length direction extends it is provided with in axle portion (2), multiple squit hole (5) it is formed with on head (3), squit hole (5) connects with supply hole (4), and along the direction extension that the bearing of trend with supply hole (4) intersects at head (3) outer surface opening.
Description
Technical field
The present invention relates to a kind of construction member for ejecting hydrogen chloride gas and there is the reaction apparatus for producing trichlorosilane of this construction member for ejecting hydrogen chloride gas and use the method for producing trichlorosilane of this construction member for ejecting hydrogen chloride gas, the reaction apparatus for producing trichlorosilane that above-mentioned construction member for ejecting hydrogen chloride gas is used when making silicon metal powder and hydrogen chloride gas react and to generate trichlorosilane uses, makes hydrogen chloride gas silicon metal powder in being supplied to apparatus main body sprays.
Background technology
As the trichlorosilane (SiHCl used for manufacturing the raw material of more than 99.999999999% extreme high purity silicon3), it is the silicon metal powder (Si) by making purity be about 98% and hydrogen chloride gas (HCl) reacts and manufactures.
As generating the reaction apparatus for producing trichlorosilane of trichlorosilane for so making silicon metal powder and hydrogen chloride gas react, propose device the most as Patent Document 1, comprising: be supplied to the apparatus main body of silicon metal powder, from the bottom of this apparatus main body by the gas introducing mechanism in hydrogen chloride gas gatherer main body.Here, in order to make hydrogen chloride gas be ejected in silicon metal powder, gas introducing mechanism is provided with the construction member for ejecting hydrogen chloride gas with squit hole.
The less silicon metal powder that particle diameter is below 1000 μm is supplied to apparatus main body, bottom apparatus main body, makes hydrogen chloride gas ejection at a high speed by construction member for ejecting hydrogen chloride gas, make silicon metal powder flow.Thus, make silicon metal powder be fully contacted with hydrogen chloride gas, obtain trichlorosilane by their reaction.
Patent documentation 1: Japanese Unexamined Patent Publication 2002-220219 publication.
But, conventional construction member for ejecting hydrogen chloride gas, it is fixed on bottom apparatus main body in the way of apparatus main body upper opening by its squit hole.Here, silicon metal powder particle diameter as described above is less, it is possible to enter and squit hole blocks.Accordingly, it would be desirable to change or cleaning construction member for ejecting hydrogen chloride gas, but owing to construction member for ejecting hydrogen chloride gas is fixed on bottom apparatus main body, therefore cannot easily unload construction member for ejecting hydrogen chloride gas.
Summary of the invention
The present invention makes in view of the above problems, its object is to provide a kind of blocking suppressing to be caused by silicon metal powder and can make the wide dispersion of hydrogen chloride gas and improve the construction member for ejecting hydrogen chloride gas of the production efficiency of trichlorosilane and have the reaction apparatus for producing trichlorosilane of this construction member for ejecting hydrogen chloride gas and use the method for producing trichlorosilane of this construction member for ejecting hydrogen chloride gas.
The construction member for ejecting hydrogen chloride gas of the present invention, generate making hydrogen chloride gas and silicon metal powder react in the reaction apparatus for producing trichlorosilane of trichlorosilane and use, wherein, this construction member for ejecting hydrogen chloride gas has the axle portion extended towards length direction and the head extended along the direction that the above-mentioned length direction with this axle portion intersects.The supply hole that above-mentioned length direction extends it is provided with in above-mentioned axle portion.Multiple squit hole it is formed with on above-mentioned head.Each squit hole connects with above-mentioned supply hole, and along the direction extension that the bearing of trend with above-mentioned supply hole intersects at the outer surface opening of above-mentioned head.
The construction member for ejecting hydrogen chloride gas of the present invention, there is the axle portion extended towards length direction and the head extended along the direction that the length direction with this axle portion intersects, the supply hole being located in axle portion extends along axle portion length direction, and head is provided with the squit hole of the direction extension that edge intersects with supply hole.Therefore, when being mounted with this construction member for ejecting hydrogen chloride gas on above-mentioned reaction apparatus for producing trichlorosilane, silicon metal powder is difficult to enter squit hole, can prevent the blocking of squit hole.
Additionally, due to form multiple squit hole, therefore can spray hydrogen chloride gas towards multiple directions, make hydrogen chloride gas wide dispersion in silicon metal powder, reaction can be promoted.
The construction member for ejecting hydrogen chloride gas of the present invention, is preferably formed with threaded portion in above-mentioned axle portion.
The construction member for ejecting hydrogen chloride gas of the present invention, is releasably arranged on the gas introducing mechanism of above-mentioned reaction apparatus for producing trichlorosilane.Therefore, even if using for a long time and deteriorating, it is possible to be easily replaced.Additionally, in the case of just in case squit hole blocking occurs, it is possible to taking off this construction member for ejecting hydrogen chloride gas and be cleaned, therefore maintenance is very easy to.And, unscrew can simply load and unload construction member for ejecting hydrogen chloride gas by screwing of screw thread, can further improve maintenance.Furthermore it is preferred that the head of construction member for ejecting hydrogen chloride gas is can be with the shape of the operation tool engagement such as spanner.
Multiple above-mentioned squit holes are preferably formed as from above-mentioned supply hole with radiated entends by the construction member for ejecting hydrogen chloride gas of the present invention.
In the construction member for ejecting hydrogen chloride gas of the present invention, the hydrogen chloride gas supplied by supply hole with radial ejection, can make hydrogen chloride gas disperse in silicon metal powder from multiple squit holes broaderly.
The reaction apparatus for producing trichlorosilane of the present invention, make hydrogen chloride gas and silicon metal powder react and generate trichlorosilane, wherein, this reaction apparatus for producing trichlorosilane have be supplied to above-mentioned silicon metal powder apparatus main body, from the bottom side of this apparatus main body by above-mentioned hydrogen chloride gas to the gas introducing mechanism imported in above-mentioned apparatus main body.In this gas introducing mechanism, above-mentioned construction member for ejecting hydrogen chloride gas runs through the base plate of said apparatus main body and releasably installs, and above-mentioned header arrangement is above above-mentioned base plate.
According to the reaction apparatus for producing trichlorosilane of the present invention, the blocking of construction member for ejecting hydrogen chloride gas can be prevented, stable operation can be carried out.Additionally, by making hydrogen chloride gas wide dispersion in silicon metal powder, the production efficiency of trichlorosilane can be increased substantially.
The method for producing trichlorosilane of the present invention, make hydrogen chloride gas and silicon metal powder react and generate trichlorosilane, wherein, the base plate of apparatus main body being supplied to above-mentioned silicon metal powder installs above-mentioned construction member for ejecting hydrogen chloride gas, by above-mentioned header arrangement above the upper surface of above-mentioned base plate, to above-mentioned apparatus main body bottom while supply silicon metal powder, spray hydrogen chloride gas from the above-mentioned squit hole of above-mentioned construction member for ejecting hydrogen chloride gas.
According to the present invention, the blocking caused by silicon metal powder can be suppressed.In addition, according to the present invention, the wide dispersion of hydrogen chloride gas can be made to improve the production efficiency of trichlorosilane.
Accompanying drawing explanation
Fig. 1 is the side view of the construction member for ejecting hydrogen chloride gas representing embodiment of the present invention.
Fig. 2 is the top view of construction member for ejecting hydrogen chloride gas shown in Fig. 1.
Fig. 3 be use construction member for ejecting hydrogen chloride gas shown in Fig. 1 reaction apparatus for producing trichlorosilane outline figure.
Fig. 4 is the explanatory diagram representing the state being provided with construction member for ejecting hydrogen chloride gas shown in Fig. 1 on gas introducing mechanism.
Fig. 5 is the explanatory diagram of multiple construction member for ejecting hydrogen chloride gas of the base plate representing and being arranged in apparatus main body.
Fig. 6 is the side view of the 2nd embodiment of construction member for ejecting hydrogen chloride gas.
Fig. 7 is the top view of construction member for ejecting hydrogen chloride gas shown in Fig. 6.
Fig. 8 is the side view of the 3rd embodiment of construction member for ejecting hydrogen chloride gas.
Fig. 9 is the top view of construction member for ejecting hydrogen chloride gas shown in Fig. 8.
Figure 10 is the side view of the 4th embodiment of construction member for ejecting hydrogen chloride gas.
Figure 11 is the top view of construction member for ejecting hydrogen chloride gas shown in Figure 10.
Description of reference numerals
1 construction member for ejecting hydrogen chloride gas
2 axle portions
2A external thread part (engaging piece)
3 heads
4 supply holes
5 squit holes
10 reaction apparatus for producing trichlorosilane
11 apparatus main bodies
Bottom 13
20 gas introducing mechanisms
51,53,55 construction member for ejecting hydrogen chloride gas
52,54,56 head.
Detailed description of the invention
Hereinafter, referring to the drawings embodiments of the present invention are illustrated.
As depicted in figs. 1 and 2, the construction member for ejecting hydrogen chloride gas 1 of present embodiment includes: the head 3 that the direction that the length direction (above-below direction in Fig. 1) in the upper end edge in generally cylindrical axle portion 2, in this axle portion 2 and axle portion 2 intersects extends.
In the present embodiment, head 3 extends along the direction orthogonal with the length direction in axle portion 2, and as shown in Figure 2, head 3 is regular hexagon in a top view.It addition, the upper surface 3A of head 3 is the plane orthogonal with the length direction in axle portion 2, the side 3B of head 3 is orthogonal with upper surface 3A.Thus, head 3 is substantially positive hexagon.
Additionally, the outer peripheral face in axle portion 2 is formed with external screw thread.So, construction member for ejecting hydrogen chloride gas 1 makes the shape identical with so-called hex bolts, and head 3 can be with operation tool engagement such as spanners.
Axle portion 2 is provided with the lower surface 2B opening in axle portion 2 and the supply hole 4 of the extension of the length direction along axle portion 2.It addition, this supply hole 4 not opening on the upper surface 3A of head 3, make so-called blind hole.
Further, head 3 is formed and connects with supply hole 4 and along multiple squit holes 5 of the direction extension intersected with the bearing of trend of supply hole 4.In the present embodiment, as depicted in figs. 1 and 2,6 squit holes 5 are formed as orthogonal with the bearing of trend of supply hole 4 respectively.As in figure 2 it is shown, these 6 squit holes 5 are formed as from being positioned at the supply hole 4 at head 3 center with radiated entends, respectively at the lateral opening of the head 3 in positive hexa-prism.That is, the peristome of squit hole 5 is towards the direction orthogonal with the length direction in axle portion 2.
Then, the reaction apparatus for producing trichlorosilane 10 of the construction member for ejecting hydrogen chloride gas 1 using present embodiment is illustrated.
As it is shown on figure 3, reaction apparatus for producing trichlorosilane 10 includes apparatus main body 11, this apparatus main body 11 has in substantially cylindric thorax 12, base plate 13 and top board 14.Here, as shown in Figure 3 and Figure 4, the upper surface 13A and lower surface 13B of base plate 13 are configured to the orthogonal axe of the cylinder formed with thorax 12.
In the bottom of the thorax 12 of apparatus main body 11, it is formed with the Si powder supply mouth 15 being supplied to by silicon metal powder in apparatus main body 11.Connect, on this Si powder supply mouth, the importing pipe arrangement 30 having carrier gas, supply silicon metal powder from feed hopper 31 to the importing pipe arrangement 30 of this carrier gas, be supplied in apparatus main body 11 via Si powder supply mouth 15.Connect on feed hopper 31 and have cyclone separator 33 described later, and connection has the Si powder supply line 40 being externally supplied silicon metal powder.
Additionally, be provided with the gas conveying end 17 that the gas of the trichlorosilane generated because of reaction is fetched into outside on the top board 14 of apparatus main body 11.
It is provided with in the downside of this apparatus main body 11 for hydrogen chloride gas being imported to the gas introducing mechanism 20 within apparatus main body 11.
Gas introducing mechanism 20 includes the gas compartment 21 storing hydrogen chloride gas and the gas supply port 22 being supplied to by hydrogen chloride gas in gas compartment 21.Here, separated internal to gas compartment 21 and apparatus main body 11 by the base plate 13 of apparatus main body 11.
Further, as shown in Figure 4, the base plate 13 of apparatus main body 11 is provided with the construction member for ejecting hydrogen chloride gas 1 of present embodiment.Being described in detail, be provided with installing hole 13C in the base plate 13 of apparatus main body 11, the axle portion 2 of construction member for ejecting hydrogen chloride gas 1 inserts this installing hole 13C, and the head 3 of this construction member for ejecting hydrogen chloride gas 1 is arranged on the upper surface 13A of base plate 13.Nut 25 is screwed on the external thread part 2A being formed at axle portion 2 from the lower surface 13B side of base plate 13, sandwiches base plate 13 with nut 25 and head 3 and is fixed.It addition, be provided with packing ring 26 between the upper surface 13A of head 3 and base plate 13.Additionally, be provided with packing ring 26 between the lower surface 13B of nut 25 and base plate 13.
Thus, the axle portion 2 of construction member for ejecting hydrogen chloride gas 1 inserts inside gas compartment 21 through base plate 13, is releasably installed in this base plate 13.The balance pipe 27 connected with supply hole 4 is had additionally, connect in the axle portion 2 of construction member for ejecting hydrogen chloride gas 1.
As mentioned above, the construction member for ejecting hydrogen chloride gas 1 of present embodiment is fixed in the base plate 13 of device 11, and it is configured to, axle portion 2 extends from base plate 13 (axis of the cylinder that the thorax 12 along apparatus main body 11 is formed) downwards, and the upper surface 3A of head 3 is parallel with the lower surface 13B of the base plate 13 of apparatus main body 11.Additionally, the lower end of the supply hole 4 in axle portion 2 is to gas compartment 21 inner opening, on the other hand, the direction opening of the orthogonal axe of the cylinder that the squit hole 5 of head 3 is formed to the thorax 12 with apparatus main body 11.Further, the hydrogen chloride gas being supplied in gas compartment 21 from gas supply port 22 is ejected in apparatus main body 11 from squit hole 5 via the supply hole 4 of construction member for ejecting hydrogen chloride gas 1.Gas introducing mechanism 20 includes gas supply port 22, gas compartment 21 and construction member for ejecting hydrogen chloride gas 1.
It addition, in the present embodiment, as it is shown in figure 5, multiple hydrogen chloride jetting nozzle 1 arranges with staggered clathrate on whole of the upper surface 13A of base plate 13.
Then, the method for producing trichlorosilane utilizing above-mentioned reaction apparatus for producing trichlorosilane 10 is illustrated.
Silicon metal powder is supplied to feed hopper 31 from Si powder supply line 40, is directed in the importing pipe arrangement 30 of carrier gas through valve 32 from this feed hopper 31, and it is internal to be supplied to apparatus main body 11 by air-flow transfer by Si powder supply mouth 15.Now, hydrogen chloride gas is used as the carrier gas of air-flow transfer.Additionally, import carrier gas with constant pressure.
Additionally, it is internal to utilize gas introducing mechanism 20 that hydrogen chloride gas imports to apparatus main body 11.Multiple construction member for ejecting hydrogen chloride gas 1 that hydrogen chloride gas is configured in the base plate 13 of apparatus main body 11 and spray in apparatus main body 11.The hydrogen chloride gas sprayed by construction member for ejecting hydrogen chloride gas 1 is directed in silicon metal powder.
So, by being ejected into by hydrogen chloride gas in the silicon metal powder in apparatus main body 11, and silicon metal powder is made to flow in apparatus main body 11.Silicon metal powder flows while contacting with hydrogen chloride gas, thus silicon metal powder reacts under determined temperature with hydrogen chloride gas, generates the gas of trichlorosilane.
The trichlorosilane gas generated gas conveying end 17 from the top board 14 being located at apparatus main body 11 is removed and is supplied to subsequent handling.In addition, discharge from gas conveying end 17 together with the gas of trichlorosilane at the internal unreacted silicon metal powder of apparatus main body 11, in being reclaimed by the cyclone separator 33 of subsequent handling and being supplied to feed hopper 31 and import to the importing pipe arrangement 30 of carrier gas, it is supplied again in apparatus main body 11.The silicon metal powder not reclaimed by cyclone separator 33 is removed by the filter 34 of subsequent handling.
The construction member for ejecting hydrogen chloride gas 1 of present embodiment includes: the head 3 extended in generally cylindrical axle portion 2, along the direction that the length direction (above-below direction in Fig. 1) with axle portion 2 intersects, axle portion 2 configures towards the above-below direction of apparatus main body 11 with extending, and the supply hole 4 being located in axle portion 2 also configures towards the above-below direction of apparatus main body 11 (axis direction of the cylinder that the thorax 12 of apparatus main body 11 is formed).Further, the peristome of the squit hole 5 orthogonal with this supply hole 4 is at the lateral opening of head 3, therefore, does not has the peristome situation towards the top of apparatus main body 11 of squit hole 5.Therefore, silicon metal powder is difficult to enter squit hole 5, can prevent the blocking of squit hole 5.
Owing to multiple squit holes 5 are formed as from supply hole 4 with radiated entends, therefore can spray hydrogen chloride gas from a construction member for ejecting hydrogen chloride gas 1 to multiple directions, hydrogen chloride gas wide dispersion in silicon metal powder can be made to promote reaction.Thus, the reaction of silicon metal powder and hydrogen chloride gas can be promoted further, improve the production efficiency of trichlorosilane.
Additionally, due to this construction member for ejecting hydrogen chloride gas 1 is releasably arranged in the base plate 13 of apparatus main body 11, therefore, even if in the case of deteriorating long-time use, it is possible to be simply replaced.Additionally, in the case of just in case squit hole 5 blocking occurs, it is possible to taking off this construction member for ejecting hydrogen chloride gas 1 from the base plate 13 of apparatus main body 11 and be cleaned, therefore maintenance is very easy to.It is additionally, since the head 3 of construction member for ejecting hydrogen chloride gas 1 in positive hexa-prism, it therefore can be made to unscrew carrying out screwing of screw thread with operation tool engagement such as spanners, load and unload simply.
In addition, owing to the construction member for ejecting hydrogen chloride gas 1 of present embodiment makes the shape identical with so-called hex bolts, therefore by general hex bolts being implemented perforate processing, just can produce this construction member for ejecting hydrogen chloride gas 1, it is possible to decrease the cost of manufacture of this construction member for ejecting hydrogen chloride gas 1.
It addition, in the present embodiment, the axle portion 2 of construction member for ejecting hydrogen chloride gas 1 connects and has the balance pipe 27 connect with supply hole 4, the pressure of hydrogen chloride gas sprayed from squit hole 5 therefore can be made uniform.
Above, the construction member for ejecting hydrogen chloride gas of embodiment of the present invention is illustrated, but the invention is not restricted to this, can suitably change in the range of the technology without departing from the present invention is conceived.
Such as, in the present embodiment, explanation is the squit hole situation orthogonal with the bearing of trend of supply hole, but is not limited to this, in order to be installed on the state under shed portion of base plate of apparatus main body not to apparatus main body upper opening, as long as intersecting with supply hole.
Additionally, illustrate to form hex bolts shape and form the situation of 6 squit holes, but the quantity of squit hole does not limit.Preferably consider the configuration of construction member for ejecting hydrogen chloride gas, the shape of apparatus main body and appropriately designed.
Fig. 6～Figure 11 represents the 2nd～the 4th embodiment of construction member for ejecting hydrogen chloride gas.Any embodiment is all that the shape of head is different from the 1st embodiment, axle portion is identical with the 1st embodiment, and therefore, mark same reference numerals omits the description.Other supply hole common with the 1st embodiment, squit holes, also mark same reference numerals.In construction member for ejecting hydrogen chloride gas 51 shown in Fig. 6 and Fig. 7, its head 52 is formed as square when overlooking, upper surface 52A is formed as plane orthogonal to the longitudinal direction, and four squit holes 5 orthogonal with supply hole 4 are respectively in each side 52B upper shed of head 52.In construction member for ejecting hydrogen chloride gas 53 shown in Fig. 8 and Fig. 9, its head 54 is the shape excised in parallel to each other circular both sides when overlooking, upper surface 54A is formed as plane orthogonal to the longitudinal direction, but side is then formed with a pair arc-shaped side 54B and pair of planar shape side 54C.Additionally, orthogonal with supply hole 4 four squit holes 5 are respectively in the arc-shaped side 54B upper shed of head 54.Additionally, in the construction member for ejecting hydrogen chloride gas 55 shown in Figure 10 and Figure 11, its head 56 is formed as hemispherical, makes the shape that a part for its both sides is excised in parallel to each other.Therefore, the upper surface 56A of head 56 is formed as hemisphere face, and pair of planar shape side 56B is formed as parallel with length direction.Further, tilt, with supply hole 4, four squit holes 5 intersected and tilt opening upward on hemispherical upper surface 56A.
Whichever construction member for ejecting hydrogen chloride gas, all there is the planar section of its head (for each side 52B in Fig. 6 and Fig. 7, it Fig. 8 and Fig. 9 is planar side 54C, Figure 10 and Figure 11 is planar side 56B), by carrying out screwing of screw thread unscrew with tool engagement such as spanners, can load and unload relative to base plate.
Additionally, as the nose shape of construction member for ejecting hydrogen chloride gas, except for the above shape, it is also possible to be overlook triangular in shape etc., can be with the plane of tool engagement as long as being formed on side.
Claims (2)
1. a reaction apparatus for producing trichlorosilane, makes hydrogen chloride gas and silicon metal powder react and generates trichlorosilane, it is characterised in that
This reaction apparatus for producing trichlorosilane have be supplied to above-mentioned silicon metal powder apparatus main body, from the bottom side of this apparatus main body by above-mentioned hydrogen chloride gas to the multiple construction member for ejecting hydrogen chloride gas imported in above-mentioned apparatus main body,
Above-mentioned construction member for ejecting hydrogen chloride gas has the head towards the axle portion that length direction extends, extended and the balance pipe being connected communicatively with the supply hole in above-mentioned axle portion along the direction intersected with the above-mentioned length direction in this axle portion,
The supply hole that above-mentioned length direction extends it is provided with in above-mentioned axle portion,
Being formed with threaded portion on the outer peripheral face in above-mentioned axle portion, described threaded portion is connected with nut thread,
Multiple squit hole it is formed with on above-mentioned head,
Being formed with two planar side on the side of above-mentioned head, said two planar side is two planar side that are parallel with the length direction in above-mentioned axle portion and that be parallel to each other,
Each squit hole connects with above-mentioned supply hole, and along the direction extension that the bearing of trend with above-mentioned supply hole intersects at the outer surface opening of above-mentioned head,
Above-mentioned construction member for ejecting hydrogen chloride gas runs through the base plate of said apparatus main body and releasably installs, above-mentioned header arrangement is above above-mentioned base plate, above-mentioned nut is screwed on the threaded portion being formed at above-mentioned axle portion from the lower face side of above-mentioned base plate, sandwich above-mentioned base plate with above-mentioned nut and above-mentioned head and be fixed to above-mentioned base plate
It is respectively equipped with packing ring between the upper surface of above-mentioned head and above-mentioned base plate and between the lower surface of above-mentioned nut and above-mentioned base plate.
2. a method for producing trichlorosilane, makes hydrogen chloride gas and silicon metal powder react and generates trichlorosilane, it is characterised in that
To the bottom of the said apparatus main body of the reaction apparatus for producing trichlorosilane described in claim 1 while supply silicon metal powder, spray hydrogen chloride gas from the above-mentioned squit hole of above-mentioned construction member for ejecting hydrogen chloride gas.
Applications Claiming Priority (5)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2007-277788 | 2007-10-25 | ||
| JP2007277788 | 2007-10-25 | ||
| JP2008197072A JP5343437B2 (en) | 2007-10-25 | 2008-07-30 | Hydrogen chloride gas ejection member, reactor for producing trichlorosilane, and method for producing trichlorosilane |
| JP2008-197072 | 2008-07-30 | ||
| CNA2008101705998A CN101417805A (en) | 2007-10-25 | 2008-10-23 | Hydrogen chrolide gas ejecting nozzle, reaction apparatus for producing trichlorosilane and method for producing trichlorosilane |
Related Parent Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNA2008101705998A Division CN101417805A (en) | 2007-10-25 | 2008-10-23 | Hydrogen chrolide gas ejecting nozzle, reaction apparatus for producing trichlorosilane and method for producing trichlorosilane |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN104211069A CN104211069A (en) | 2014-12-17 |
| CN104211069B true CN104211069B (en) | 2016-08-31 |
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Family Applications (2)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201410434126.XA Active CN104211069B (en) | 2007-10-25 | 2008-10-23 | Construction member for ejecting hydrogen chloride gas and reaction apparatus for producing trichlorosilane and method |
| CNA2008101705998A Pending CN101417805A (en) | 2007-10-25 | 2008-10-23 | Hydrogen chrolide gas ejecting nozzle, reaction apparatus for producing trichlorosilane and method for producing trichlorosilane |
Family Applications After (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNA2008101705998A Pending CN101417805A (en) | 2007-10-25 | 2008-10-23 | Hydrogen chrolide gas ejecting nozzle, reaction apparatus for producing trichlorosilane and method for producing trichlorosilane |
Country Status (3)
| Country | Link |
|---|---|
| JP (1) | JP5343437B2 (en) |
| CN (2) | CN104211069B (en) |
| RU (1) | RU2486954C2 (en) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101962189A (en) * | 2010-10-13 | 2011-02-02 | 宁夏阳光硅业有限公司 | Member for spouting hydrogen chloride gas for trichlorosilane synthesizing tower and trichlorosilane synthesizing method |
| KR102599877B1 (en) * | 2017-11-20 | 2023-11-09 | 가부시끼가이샤 도꾸야마 | Method for producing trichlorosilane and device for producing trichlorosilane |
| US11071961B2 (en) | 2017-11-20 | 2021-07-27 | Tokuyama Corporation | Fluidized bed reaction container and method for producing trichlorosilane |
| US11845667B2 (en) * | 2018-04-18 | 2023-12-19 | Wacker Chemie Ag | Method for producing chlorosilanes |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US2841476A (en) * | 1953-07-16 | 1958-07-01 | Dorr Oliver Inc | Apparatus for contacting solids with gases |
| US3040439A (en) * | 1959-07-21 | 1962-06-26 | Gen Am Transport | Solids fluidizing vessel and gas diffuser plate and nozzle elements therefor |
| JPH02145413A (en) * | 1988-11-29 | 1990-06-04 | Koujiyundo Silicon Kk | Fluidized-bed reactor for production of trichlorosilane |
| CN1363417A (en) * | 2001-01-03 | 2002-08-14 | 韩国化学研究院 | Method and apparatus for preparing polycrysalline silcon |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| RU2060836C1 (en) * | 1992-05-28 | 1996-05-27 | Евгений Валентинович Кузьмин | Sprayer |
| KR100725001B1 (en) * | 2003-06-30 | 2007-06-04 | 현대중공업 주식회사 | Fluidizing gas Nozzle assembly in a fluidized bed reactor |
-
2008
- 2008-07-30 JP JP2008197072A patent/JP5343437B2/en active Active
- 2008-10-23 RU RU2008142152/05A patent/RU2486954C2/en active
- 2008-10-23 CN CN201410434126.XA patent/CN104211069B/en active Active
- 2008-10-23 CN CNA2008101705998A patent/CN101417805A/en active Pending
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US2841476A (en) * | 1953-07-16 | 1958-07-01 | Dorr Oliver Inc | Apparatus for contacting solids with gases |
| US3040439A (en) * | 1959-07-21 | 1962-06-26 | Gen Am Transport | Solids fluidizing vessel and gas diffuser plate and nozzle elements therefor |
| JPH02145413A (en) * | 1988-11-29 | 1990-06-04 | Koujiyundo Silicon Kk | Fluidized-bed reactor for production of trichlorosilane |
| CN1363417A (en) * | 2001-01-03 | 2002-08-14 | 韩国化学研究院 | Method and apparatus for preparing polycrysalline silcon |
Also Published As
| Publication number | Publication date |
|---|---|
| RU2486954C2 (en) | 2013-07-10 |
| CN104211069A (en) | 2014-12-17 |
| JP5343437B2 (en) | 2013-11-13 |
| CN101417805A (en) | 2009-04-29 |
| RU2008142152A (en) | 2010-04-27 |
| JP2009120468A (en) | 2009-06-04 |
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