CN104205364B - The manufacture of multijunction solar cell device - Google Patents
The manufacture of multijunction solar cell device Download PDFInfo
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- CN104205364B CN104205364B CN201380017589.XA CN201380017589A CN104205364B CN 104205364 B CN104205364 B CN 104205364B CN 201380017589 A CN201380017589 A CN 201380017589A CN 104205364 B CN104205364 B CN 104205364B
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- 239000000758 substrate Substances 0.000 claims abstract description 210
- 238000000034 method Methods 0.000 claims abstract description 47
- 239000013078 crystal Substances 0.000 claims description 51
- 229910001218 Gallium arsenide Inorganic materials 0.000 claims description 26
- 239000004065 semiconductor Substances 0.000 claims description 17
- 238000000926 separation method Methods 0.000 claims description 14
- 229910000530 Gallium indium arsenide Inorganic materials 0.000 claims description 12
- 229910052594 sapphire Inorganic materials 0.000 claims description 11
- 239000010980 sapphire Substances 0.000 claims description 11
- 230000015572 biosynthetic process Effects 0.000 claims description 10
- 229910052750 molybdenum Inorganic materials 0.000 claims description 7
- 229910052721 tungsten Inorganic materials 0.000 claims description 7
- 229910052782 aluminium Inorganic materials 0.000 claims description 6
- 238000010521 absorption reaction Methods 0.000 claims description 4
- 229910052802 copper Inorganic materials 0.000 claims description 4
- 229910052710 silicon Inorganic materials 0.000 claims description 4
- 238000000137 annealing Methods 0.000 claims description 3
- 229910005542 GaSb Inorganic materials 0.000 claims 2
- 229910000673 Indium arsenide Inorganic materials 0.000 claims 2
- RPQDHPTXJYYUPQ-UHFFFAOYSA-N indium arsenide Chemical compound [In]#[As] RPQDHPTXJYYUPQ-UHFFFAOYSA-N 0.000 claims 2
- 230000035882 stress Effects 0.000 claims 1
- 230000008646 thermal stress Effects 0.000 claims 1
- 239000010410 layer Substances 0.000 description 187
- 239000000463 material Substances 0.000 description 9
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- 230000008901 benefit Effects 0.000 description 3
- 230000008021 deposition Effects 0.000 description 3
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- 229910052751 metal Inorganic materials 0.000 description 3
- 239000002184 metal Substances 0.000 description 3
- 239000011733 molybdenum Substances 0.000 description 3
- 239000000126 substance Substances 0.000 description 3
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 3
- 239000010937 tungsten Substances 0.000 description 3
- 229910000577 Silicon-germanium Inorganic materials 0.000 description 2
- 239000004411 aluminium Substances 0.000 description 2
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 2
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- 238000002347 injection Methods 0.000 description 2
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- 238000000576 coating method Methods 0.000 description 1
- 229910052681 coesite Inorganic materials 0.000 description 1
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- 230000010148 water-pollination Effects 0.000 description 1
Classifications
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/04—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices
- H01L31/06—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices characterised by potential barriers
- H01L31/072—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices characterised by potential barriers the potential barriers being only of the PN heterojunction type
- H01L31/0725—Multiple junction or tandem solar cells
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B29/00—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
- C30B29/02—Elements
- C30B29/06—Silicon
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- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B33/00—After-treatment of single crystals or homogeneous polycrystalline material with defined structure
- C30B33/06—Joining of crystals
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/0248—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by their semiconductor bodies
- H01L31/0256—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by their semiconductor bodies characterised by the material
- H01L31/0264—Inorganic materials
- H01L31/0304—Inorganic materials including, apart from doping materials or other impurities, only AIIIBV compounds
- H01L31/03046—Inorganic materials including, apart from doping materials or other impurities, only AIIIBV compounds including ternary or quaternary compounds, e.g. GaAlAs, InGaAs, InGaAsP
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- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/04—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices
- H01L31/06—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices characterised by potential barriers
- H01L31/068—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices characterised by potential barriers the potential barriers being only of the PN homojunction type, e.g. bulk silicon PN homojunction solar cells or thin film polycrystalline silicon PN homojunction solar cells
- H01L31/0687—Multiple junction or tandem solar cells
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/18—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof
- H01L31/184—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof the active layers comprising only AIIIBV compounds, e.g. GaAs, InP
- H01L31/1844—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof the active layers comprising only AIIIBV compounds, e.g. GaAs, InP comprising ternary or quaternary compounds, e.g. Ga Al As, In Ga As P
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- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/18—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof
- H01L31/184—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof the active layers comprising only AIIIBV compounds, e.g. GaAs, InP
- H01L31/1852—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof the active layers comprising only AIIIBV compounds, e.g. GaAs, InP comprising a growth substrate not being an AIIIBV compound
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- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E10/00—Energy generation through renewable energy sources
- Y02E10/50—Photovoltaic [PV] energy
- Y02E10/544—Solar cells from Group III-V materials
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
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Abstract
The present invention relates to a kind of method for manufacturing multijunction solar cell device, this method comprises the following steps:First substrate is set;Second substrate with lower surface and upper surface is set;At least one first solar cell layer is formed on the first substrate, to obtain the first chip architecture;At least one second solar cell layer is formed on the upper surface of the second substrate, to obtain the second chip architecture;First chip architecture is attached to second chip architecture, wherein, at least one described first solar cell layer is attached to the lower surface of the second substrate;And remove the first substrate.
Description
Technical field
The present invention relates to the manufacture of multijunction solar cell substrate, specifically, it is related to including many of wafer transfer process
The manufacture of joint solar cell substrate and the manufacture for ground and the solar battery apparatus of the application of space correlation.
Background technology
Photovoltaic cell or solar cell, which are designed to be used, converts solar radiation into electric current.In concentrating solar photovoltaic
In, incident sunshine is concentrated before solar cell is pointed to by optics.For example, incident sunshine is received by primary mirror, it is main
The radiation that mirror is arrived to secondary mirror reflection receivable, secondary mirror is successively to solar cell reflected radiation, and solar cell passes through in iii-v
Electron-hole pair is produced in semiconductor or monocrystalline silicon the radiation of concentration is converted into electric current.Alternatively, sunshine can pass through profit
Focused on the transmission optics of such as Fresnel (Fresnel) lens on solar cell.
Because different semi-conducting material compositions show optimal absorption for the incident sunshine of different wave length, carry
Multijunction solar cell is gone out, for example, the multijunction solar cell includes three batteries, these three batteries are in different wavelength range
Middle display optimal absorption.For example, GaInP tops battery layers, gap width that three battery structures can be 1.8eV including gap width are
1.4eV GaAs intermediate cells layer and the Ge bottoms battery layers that gap width is 0.7eV.In principle, iii-v or IV races semiconductor can
For use as the active sub- battery for the multijunction cell device for shifting by layer/combining and manufacturing.Multijunction solar cell is generally by list
Chip epitaxial growth is manufactured.One chip growth technique usually require that the layer of any formation be substantially with the layer formed before or bottom
The lattice of laminar substrate matching.However, the epitaxial growth of the solar cell layer on the substrate grown still has lattice mistake
The thorny problem matched somebody with somebody.For example, because the crystallization of InP solar cell layers and optical characteristics can due to lattice is mismatched and it is serious bad
Change, so being not suitable in Ge Epitaxial Growing InP solar cell layers.In addition, in usually used shifting process, in
Between substrate transfer epitaxially grown layer after be dropped.
Thus, regardless of current engineering progress, it is still desirable to a kind of improvement manufacture of multijunction solar cell device
Technique, in the process, realizes the solar cell layer with Low Defectivity and can recycle Intermediate substrate.
The content of the invention
The present invention solves the demand, thus provides a kind of method for manufacturing multijunction solar cell device,
This method comprises the following steps:
First substrate is set;
Second substrate with lower surface and upper surface is set;
At least one first solar cell layer is formed on the first substrate, to obtain the first chip architecture;
At least one second solar cell layer is formed on the upper surface of second substrate, to obtain the second chip architecture;
First chip architecture is attached to the second chip architecture, wherein, at least one first solar cell layer is attached to
The lower surface of second substrate;And
Removal/separation first substrate.
Thus, resulting structure includes at least on any side (being upper and lower surface respectively) of second substrate
One solar cell layer.Unlike the prior art, the solar cell layer on any side of second substrate is not all by extension
Deposition is provided, and can also be provided by combining.Because the surface of second substrate can be polished before bonding, it is possible to
Realize in high quality, specifically, can be with better quality compared with being combined at two (epitaxial growth) solar cell layers
Realize and combine.The step of first chip architecture is attached into the second chip architecture can be at about 400 DEG C to about 600 DEG C
The high temperature bond that the temperature of (specifically, between 450 DEG C to 550 DEG C) is performed, so as to reliable connection.As described below
, second substrate can be the substrate of the relative thin of about 100 microns (for example, about 200 microns), and for some wavelength
Incident sunshine be transparent.Specifically, second substrate can be made up of GaAs or including GaAs.
First substrate can be set in the form of substrate processing (specifically, including sapphire).
Term " substrate processing " includes the substrate different from only pure bulk substrate (pure bulk substrate), but
Including forming layer in a substrate or interface, in order to from as the first chip architecture and the second chip architecture with reference to obtained from
Structure removes the layer or interface.Specifically, " substrate processing " can include the slide fastener layer (zipper between crystal seed layer and substrate
layer).Specifically, substrate processing can be included in the substrate separated in the step of removing substrate processing from crystal seed layer.
Allow to recycle separated substrate using the separation of slide fastener layer.
In this application, the expression of " separation of substrate processing " should be interpreted the separation of substrate.The separating step
Can be before removing the possible residue (if yes) of slide fastener layer and removing crystal seed layer from residual structural.
Slide fastener layer can limit upper crystal seed layer and lower substrate, for example by suitably handling (for example, in a substrate
Carry out hydrogen ion injection or He isotopic geochemistry) formed by weaken layer.
Slide fastener layer can be by carrying out etching anode at the surface of substrate, being formed by buried porous layer.It is then possible to
The epitaxial growth of crystal seed layer is performed on the top of porous layer.
Slide fastener layer can be set in the form of absorbed layer, for extension process (SiGe in Si matrixes, specifically, Si
Strained layer in the middle of 20% SiGe in substrate) period progress laser lift-off, chemical stripping or mechanically decoupled in middle strained layer.
In the alternative arrangement, slide fastener layer can in itself be formed by crystal seed layer, for example, crystal seed layer selectively and can be etched chemically
Open, to separate substrate processing.
Such as knowable to WO2010015878, slide fastener layer can also be by being inserted between crystal seed layer and transparent substrate, use
Formed in the SiN absorbed layers of laser lift-off.
Further possibility for substrate processing is as follows.Combination interface is can remove (to present and be less than 1.5J/m2Low combination
Can, it is preferable that less than 1J/m2) formed between the facing surface of crystal seed layer and substrate support portion (facing surface).
Under the possibility, slide fastener layer is formed by can remove combination interface.Substrate processing is being heated to the situation of epitaxial growth temperature
Under, the first solar cell layer can be given birth to by extension on the seed layer while the removable characteristic of combination interface is protected
It is long.The processing of the roughness of contact surface by execution for increasing one of crystal seed layer or substrate is (especially by chemistry
Corrode or etch and perform), the contact surface that reduces one of crystal seed layer or substrate by completing to be used for (or crystal seed layer and substrate
It is each on SiO2Or Si3N4In binder course) hydrophily, obtain low energy combine.Furthermore, it is possible to select to be used for binder course
Different materials, to realize the weaker inherence mutually chemical affinity of boundary material.For example, can by apply heat treatment or
The separation of substrate is performed from one liquid or the mechanical stress of blade application.This example in WO03/063214 is disclosed.
As described above, substrate processing includes being formed the crystal seed layer at the top or removable combination interface in slide fastener layer.Crystal seed
Layer from the layer of wafer to wafer by shifting (for example, passing through Smart CutTMTechnique) it is transferred to substrate from crystal seed substrate.It is brilliant
Planting layer can be with or without the epitaxial layer being originally formed by extension on crystal seed substrate.Alternatively, crystal seed layer is from block
Shape crystal seed substrate is shifted or separated with block crystal seed substrate.In a preferred embodiment of the invention, crystal seed layer is not used as the sun
Energy battery layers, and the growth of the first solar cell layer is on the seed layer.
Crystal seed layer needs not act as a part for solar cell layer (because its band gap may not in a series of sub- battery layers
Suitable for optimum efficiency).Therefore, in embodiments of the present invention, crystal seed layer is only used for the growth of the first solar cell layer, from
And producing includes many knots of the first solar cell layer (being used as bottom battery) with gratifying crystal property and electrical characteristics
Solar battery apparatus.In fact, according to above-mentioned example, for example, people can remove crystal seed by chemical treatment (as etched)
Layer.
In the examples described above, can be with highly crystalline and electricity quality growth for solar battery layer.For example, it is possible to achieve be less than
106/cm2Dislocation density.
The separation in slide fastener layer can be performed by laser lift-off.It is (e.g., including blue that laser beam is irradiated to substrate processing
Jewel substrate), and deposition of the material in slide fastener layer is driven, so as to allow the separation at slide fastener layer.
Further, this method can be included in after separation first substrate at least one first solar cell layer
Form contact site (contact) and/or form contact site at least one second solar cell layer.Moreover, being connect in formation
Before contact portion, corresponding solar cell layer can be patterned, the table top of contact site can be set thereon to be formed.
Include at least one solar cell layer including second substrate and on any one main surface of second substrate
Structure can be incorporated into substrate.Being attached to substrate can be using formation in the first solar cell layer and/or substrate
On conduction (metal or with conducting oxide, transparent conducting oxide TCO, silicide or by directly in conjunction with etc.) binder course
Perform.Conductive layer especially additionally aids and provides thermal conductivity for substrate, and the substrate as fin or can may be coupled to
Fin, and preferably itself heat conduction and conduction.Conduction is combined can be by forming congruent melting Au/Sn or by hot compression
Obtain.
In the present embodiment, when (final) substrate is not yet present in the structure, perform the first chip architecture and
The combination of second chip architecture.Thus, the risk of metallic pollution is avoided during heat treatment is combined so that high temperature can be used.
Moreover, (expansion of the substrate is at such temperatures due to different thermal coefficient of expansions (CTE) with for the expansion of substrate
One substrate is different with the expansion of second substrate) structure can be damaged, it can especially weaken combination interface.
The final substrate being made up of tungsten or molybdenum or doped semiconductor (e.g., Ge, GaAs or InP) can be particularly suitable for holding
Receive and be arranged on by the stacking of the solar cell layer on second substrate that for example GaAs or GaAsOS (see below)s are made.Specifically
Ground, the CTE of final substrate and the CTE of second substrate difference should be less than 30%, to avoid and be attached to final substrate
Relevant the problem of.
According to specific modification, in the examples described above, at least one first solar cell layer includes two layers, first layer and
The second layer through epitaxial growth on first layer, and at least one second solar cell layer also include two layers, i.e. third layer and
The 4th layer in third layer through epitaxial growth.According to specific example, first layer (bottom battery) includes GaInAs or by GaInAs
Composition, and/or the second layer include GaInAsP or are made up of GaInAsP, and/or the 4th layer of (the multijunction solar cell dress of completion
Top battery in putting) include GaInP or be made up of GaInP, and/or third layer includes GaAs or is made up of GaAs.Hereby it is achieved that
Four battery multijunction solar cell devices (include two solar cell layers) on any main surface of second substrate, wherein,
The material of each battery is most suitable for the incident solar energy of specific wavelength.First solar cell layer and the second solar cell layer
The side (main surface) of second substrate is attached to, and the 3rd solar cell layer and the 4th solar cell layer are grown in the second base
On the opposite side (main surface) of plate.Layer need not be overturned in whole manufacturing process, i.e. each series layer is to be finally sequentially grown in it
On respective substrate, second layer growth is on the first layer and the 4th layer is grown in third layer.
It should be noted that in all above-mentioned examples, only relating to a single separating step (separation first substrate).
The present invention also provides a kind of intermediate semiconductor device, and the intermediate semiconductor device includes:
Substrate (specifically, GaAs substrates);
The second layer, second layer formation is on the lower surface of substrate;First layer, first layer formation is in the second solar-electricity
On the layer of pond;Third layer, third layer formation is on the upper surface of substrate and the 4th layer, and the 4th layer forms in third layer,
Wherein, first layer includes GaInAs or is made up of GaInAs, and/or the second layer includes GaInAsP or is made up of GaInAsP, and/
Or third layer includes GaAs or is made up of GaAs, and/or the 4th layer includes GaInP or is made up of GaInP.
Also include another substrate containing InP according to the intermediate semiconductor substrate of example (specifically, including InP is (specific
InP on ground, sapphire) substrate processing), form the first solar cell layer on another substrate.
Intermediate semiconductor substrate can also include substrate, and specifically, substrate is made up of Cu, Mo, W or Si or Al, tool
Body, substrate is made up of aluminium sheet, specifically, and substrate is attached into the first solar cell layer by conducting binding layer.
The final substrate being made up of tungsten or molybdenum or doped semiconductor (e.g., Ge, GaAs or InP) can be particularly suitable for holding
Receive and be arranged on by the stacking of the solar cell layer on second substrate that for example GaAs or GaAsOS (see below)s are made.Specifically
Ground, the CTE of final substrate and the CTE of second substrate difference should be less than 30%, to avoid and be attached to final substrate
Relevant the problem of.
Additionally, it is provided a kind of multijunction solar cell device, the multijunction solar cell device can be by according to the present invention
Multijunction solar cell device manufacture method above-mentioned example in an example obtain.
It will be described with reference to the accompanying drawings the supplementary features and advantage of the present invention.In the de-scription, referring to the drawings, accompanying drawing illustrates this hair
Bright embodiment.It should be understood that this embodiment does not indicate that the four corner of the present invention.
Fig. 1 illustrates the inventive method for the manufacture for including chip combination step and the multijunction solar cell of substrate separating step
Example.
Fig. 1 shows to include the example of the inventive method of the manufacture of the multijunction solar cell of four solar cell layers.If
A kind of the first processing substrate of the slide fastener layer 2 of separation including for the first follow-up substrate 1 is put.Term " processing " leads to
Refer to that some layer of the separation of substrate or interface will be promoted to introduce base after combining with the chip in subsequent process steps
Mode in plate and the substrate handled.For example, the first substrate 1 is sapphire substrate.In view of sapphire thermal coefficient of expansion (heat
The coefficient of expansion is for the temperature change (rise and reduction) and further technique between male extension (specifically, with reference to step
(see below)) be very important), sapphire can be preferably chosen.Moreover, sapphire is transparent for laser, by
This can allow to carry out laser lift-off in subsequent process steps (see below).Crystal seed layer 3 is (for example, InP or GaAs crystal seeds
Layer) formed on the first substrate 1.For example, crystal seed layer can be grown on crystal seed substrate, substrate processing is then transferred into.
The advantage of the second substrate of sapphire first substrate and GaAs is both in terms of CTE and solar cell
The whole stacking perfect matching of layer, this allows to apply up to 600 DEG C in the case where not reducing the quality of solar cell
Combination temperature.Similar reasoning is applied to may be used as the first substrate 1 and second substrate 6, such as Ge, GaAs or InP
Deng material.Used first substrate 11 can not be (such as sapphire) of conduction, and this make it that the first substrate 11 is combined
To final substrate that must be conductive.Preferably, the material of the first substrate 1 and second substrate 6 can be different, but they
CTE difference should be less than 30%, to allow high combination temperature.However, as the epitaxial growth for solar cell layer
High temperature, due to the CTE difference between the crystal seed layer and substrate of the growth for solar cell layer, so being unsuitable for using using Si
In the first substrate.
In principle, substrate processing can utilize the layer that each crystal seed layer is transferred into substrate to shift to manufacture.For example,
InP epitaxial layers or as strain or the release of another example InGaAs layers can be initial bulk InP crystal seed substrates table
Surface layer, the superficial layer passes through known Smart CutTMProcess sequence is transferred to sapphire substrate.Initial bulk crystal seed substrate
Residue can be recycled after the transfer.Substrate can also be recycled after each separating step.In order to be formed
InP crystal seed layers, it is preferable that by known Smart CutTMTechnique is applied to bulk InP crystal seed substrates.However, it is possible to select by
The extension that same technique is applied to be made up of InP is stacked, and this provides doped level, the crystalline on for example manufacturing crystal seed layer 3
The more multi-option of amount and precise process.
Slide fastener layer 2 includes the material of SiN or crystal seed layer.Crystal seed layer 3 will be not used as solar cell layer, and be used for first too
The epitaxial growth of positive energy battery layers 4.The thickness of InP crystal seed layers can be in 50nm to 1 μm of scope.
First solar cell is formed on the first substrate processing, and on the first solar cell layer 4, epitaxial growth
Second solar cell layer 5.
In addition, there is provided the second substrate of its solar cell layer 7 of Epitaxial growth the 3rd and the 4th solar cell layer 8
6.Second substrate 6 is preferably bulk GaAs substrates, and (because the material is transparent for the wavelength of incident sunshine, this is corresponding
In the absorbing wavelength of solar cell layer 4 and 5).According to the second substrate 6 of example shown in two surfaces (upper surface and following tables
Face) on polish, to promote the combination (see below) of subsequent execution.
Shown four solar cell layers 4,5,7,8 show the absorption maximum limit of the incident sunshine for different wave length
Degree.It should be noted that in the multijunction solar cell device (description that see below) of completion, the first solar cell layer
4 are changed into bottom battery and the 4th solar cell layer 7 is changed into pushing up battery.According to this example, all four monocrystalline solar cells
Layer 4,5,7,8 is by being epitaxially-formed.In principle, it is possible to from by InGaAs, GaAS, AlGaAs, InGaP, InP and
The Group III-V semiconductor of the group of InGaAsP compositions selects the material of solar cell layer.For example, the first solar cell layer 4 can
With including InGaAs, the second solar cell layer 5 can include InGaP, InGaAs or InP, and the 3rd solar cell layer 7 can be with
Including GaAsP or GaAs, and the 4th solar cell layer 8 can include InGaP or InAlAs.Suitable channel junction layer can be with
It is arranged on by the deposition on each solar cell layer or growth between specific solar cell layer.
As shown in figure 1, resulting includes the chip architecture of the first substrate 1 and the one or two solar cell layer 4 and 5
It is respectively incorporated to together with the chip architecture including second substrate 6 and the second two solar cell layers 7 and 8.Most preferred
In embodiment, by structure directly in conjunction with (or in other words, passing through the molecular linkage (moleculer in two faces of contact
Adhesion), without any binder course) perform combination.Molecular linkage is preferably performed under partial vacuum.Contact and knot
Close and performed in higher temperature (about 400 DEG C to 600 DEG C, and it is highly preferred that between 450 DEG C to 550 DEG C).Preferably, up to
After the annealing steps of maximum temperature between to 400 DEG C to 600 DEG C, contact procedure is performed at room temperature (although being not precluded from
Contact procedure is performed at a higher temperature).This combine step for the quality of resulting multijunction solar cell be it is important,
And it is favourable to perform high temperature bond, to realize height between the lower surface of second substrate and the second solar cell layer 5
Quality combination interface, without major defect.
Then, 2 first substrate 1 is separated with crystal seed layer 3 using slide fastener layer, for example, the first substrate processing permission from
Crystal seed layer 3 is separated to split at the slide fastener layer 2 of the first substrate 1.For example, slide fastener layer 2 can with by ion (for example, hydrogen ion
Or helium ion) injection formed by reduction layer form set.In this case, first substrate 1 can be configured to bulk
InP substrate, injects to form reduction layer 2 by the main top surface of bulk substrate, reduction layer 2 respectively at the top of bulk substrate and
The substrate 1 of crystal seed layer 3 and first is created in bottom.It is then possible to reconcile point of the first substrate 1 by applying mechanical force
From to be layered in the reduction layer formed by hydrogen ion or helium ion.
Furthermore, it is possible to residue (the example by etching and/or polishing removal substrate and/or binder course and crystal seed layer 3
Such as, if especially poor electricity and/or thermal characteristics is presented in crystal seed layer 3, and it is not used in follow up device).It should be noted that
It is that can recycle the first substrate 1 after separation, to form the new substrate processing for being used for reusing as extension
The growth substrate of layer.
Second substrate ensures enough stability and is fixed on the structure so that do not force the structure setting final
On substrate.However, in alternative, two solar-electricities are included on any main surface thus obtained, in second substrate 6
The structure of pond layer can be incorporated into substrate 10 (as shown in Figure 1).The combined process can be by by the first solar cell layer 4
Direct conduction combines (conductive bonding) to substrate to perform or using being formed before combined process the
Metal bonding layer on the surface exposed of one solar cell layer 4 or substrate is performed.Can also be by metal bonding layer
On the surface and substrate exposed for being respectively formed at the first solar cell layer 4.It should be noted that substrate may be used as
Heat-conducting substrate and electrically-conductive backing plate.Specifically, substrate can be made up of Cu or Al and (specifically, provide stacking by hard enough
The aluminium sheet of support of solar cell layer be made).Other optional modes contemplated for substrate (are such as adulterated including Si
Silicon), Mo and W.
The final substrate being made up of tungsten or molybdenum or doped semiconductor (e.g., Ge, GaAs or InP) can be particularly suitable for holding
Receive and be arranged on by the stacking of the solar cell layer on second substrate that for example GaAs or GaAsOS (see below)s are made.Specifically
Ground, the CTE of final substrate and the CTE of second substrate difference should be less than 30%, to avoid and be attached to final substrate
Relevant the problem of.
In the next step that Fig. 1 is illustrated, resulting structure enters some fine-processing technique (finish
Processing), including formed include multiple table tops of etched solar cell layer 7 ' and 8 '.Forming appropriate composition
After photoresist and the anti-reflection coating of optional formation, being formed for table top can be realized by photoetching treatment.
Therefore, fine-processing technique can be performed before final substrate is attached to, effect of the fine-processing technique in workflow
It is favourable in terms of rate and the easiness of processing.If however, fine-processing technique is preferred, final bottom can be transferred to
Fine-processing technique is performed after substrate.
The embodiments discussed before all do not lie in and are construed as limiting, and illustratively the features and advantages of the present invention are shown
Example.It should be understood that some or all of in features described above can also be combined by different way.It should be understood that features described above
In some or all of features can also combine by different way.Specifically, according to the present invention it is possible to which being formed not only includes 4
Knot (as before disclosed in embodiment), can also include the multijunction solar cell of 2,3,5 or more knots.
Claims (14)
1. a kind of method for manufacturing multijunction solar cell device, this method comprises the following steps:
First substrate is set;
Second substrate with lower surface and upper surface is set;
At least one first solar cell layer is formed on the first substrate, to obtain the first chip architecture;
At least one second solar cell layer is formed on the upper surface of the second substrate, to obtain the second chip knot
Structure;
First chip architecture is attached to second chip architecture, wherein, at least one described first solar cell
Layer is attached to the lower surface of the second substrate;And
The first substrate is removed,
Wherein, the first substrate is the first substrate processing, wherein, the first substrate includes slide fastener layer and the first crystal seed layer,
First crystal seed layer is only used for the growth of first solar cell layer, and wherein, methods described also includes following step
Suddenly:
A) first substrate processing is separated at the slide fastener layer;And
B) first crystal seed layer is removed,
Wherein, methods described further comprises after the first substrate is separated, by substrate be attached to it is described at least one
First solar cell layer, wherein, the thermal coefficient of expansion (CTE) of the substrate and the CTE of the second substrate difference are small
In 30%.
2. according to the method described in claim 1, wherein,
The slide fastener layer is formed by the electromagnetic absorption layer between the crystal seed layer and basalis of first substrate processing, and institute
The separation for stating the first substrate processing is performed by laser lift-off;Or
The slide fastener layer is to weaken layer, and the separation of first substrate processing is held by applying thermal stress or mechanical stress
OK;Or
The slide fastener layer is porous layer;
Low combination energy interface is presented in the slide fastener layer.
3. the method described in one in preceding claims, this method also includes the upper table to the second substrate
Face and/or lower surface are polished.
4. according to the method described in claim 1, this method is further comprising the steps of:
Contact site is formed at least one described first solar cell layer after the first substrate is separated and/or in institute
State and form contact site at least one second solar cell layer.
5. according to the method described in claim 1, wherein, first substrate processing include sapphire substrate and described first
Crystal seed layer includes InP, InAs, GaSb, Ge or GaAs or is made up of InP, InAs, GaSb, Ge or GaAs.
6. according to the method described in claim 1, wherein, at least one described first solar cell layer include first layer and institute
The second layer on first layer is stated, and/or at least one described second solar cell layer is included in third layer and the third layer
The 4th layer.
7. method according to claim 6, wherein, the first layer includes GaInAs or is made up of GaInAs, and/or institute
The second layer is stated including GaInAsP or is made up of GaInAsP, and/or the third layer includes GaAs or is made up of GaAs, and/or
Described 4th layer includes GaInP or is made up of GaInP.
8. according to the method described in claim 1, wherein, perform at room temperature and first chip architecture be attached to described
The step of two chip architectures, the annealing then performed at a temperature of 400 DEG C to 600 DEG C, specifically, at 450 DEG C to 550
Annealing is performed at a temperature of between DEG C.
9. according to the method described in claim 1, wherein, set first substrate processing to include:
In crystal seed layer described in crystal seed grown on substrates;And
The crystal seed layer is transferred to sapphire substrate.
10. according to the method described in claim 1, wherein, the substrate is made up of Cu, Mo, W or Si or Al.
11. the multijunction solar cell device that a kind of method described in one by preceding claims is obtained.
12. a kind of intermediate semiconductor substrate for multijunction solar cell, the intermediate semiconductor substrate includes:
Substrate, specifically, GaAs substrates;
Second solar cell layer, second solar cell layer formation is on the lower surface of the substrate;First solar-electricity
Pond layer, first solar cell layer formation is on second solar cell layer;3rd solar cell layer, the 3rd too
Positive energy battery layers formation is on the upper surface of the substrate;And the 4th solar cell layer, the 4th solar cell layer shape
Into on the 3rd solar cell layer, wherein, first solar cell layer includes GaInAs or is made up of GaInAs,
And/or second solar cell layer includes GaInAsP or is made up of GaInAsP, and/or the 3rd solar cell layer
Constituted including GaAs or by GaAs, and/or the 4th solar cell layer includes GaInP or is made up of GaInP,
The intermediate semiconductor substrate also includes substrate, and the substrate is attached to first solar energy by conducting binding layer
Battery layers,
Wherein, the CTE of the thermal coefficient of expansion (CTE) of the substrate and substrate difference is less than 30%.
13. intermediate semiconductor substrate according to claim 12, the intermediate semiconductor substrate also includes:
Another substrate including InP, specifically, includes InP substrate processing, and described first is formed on another substrate
Solar cell layer.
14. intermediate semiconductor substrate according to claim 12, wherein, the substrate is by Cu, Mo, W or Si or Al systems
Into.
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EP12290106.9 | 2012-03-28 | ||
EP12290106.9A EP2645428A1 (en) | 2012-03-28 | 2012-03-28 | Manufacture of multijuntion solar cell devices |
PCT/EP2013/055133 WO2013143850A1 (en) | 2012-03-28 | 2013-03-13 | Manufacture of multijunction solar cell devices |
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US (1) | US20150027519A1 (en) |
EP (2) | EP2645428A1 (en) |
KR (1) | KR101700724B1 (en) |
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FR3047350B1 (en) | 2016-02-03 | 2018-03-09 | Soitec | ADVANCED SUBSTRATE WITH INTEGRATED MIRROR |
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WO2010015878A2 (en) | 2008-08-06 | 2010-02-11 | S.O.I. Tec Silicon On Insulator Technologies | Process for modifying a substrate |
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2012
- 2012-03-28 EP EP12290106.9A patent/EP2645428A1/en not_active Withdrawn
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2013
- 2013-03-13 EP EP13710366.9A patent/EP2831928A1/en not_active Withdrawn
- 2013-03-13 KR KR1020147030078A patent/KR101700724B1/en active IP Right Grant
- 2013-03-13 CN CN201380017589.XA patent/CN104205364B/en active Active
- 2013-03-13 US US14/387,518 patent/US20150027519A1/en not_active Abandoned
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CN1478295A (en) * | 2000-11-27 | 2004-02-25 | S��O��I��Tec��Ե���Ϲ輼����˾ | Method for making substrate in particular for optics, eletronics or optoelectronics and resulting substrate |
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WO2013143850A1 (en) | 2013-10-03 |
KR101700724B1 (en) | 2017-02-13 |
KR20140138333A (en) | 2014-12-03 |
EP2645428A1 (en) | 2013-10-02 |
CN104205364A (en) | 2014-12-10 |
US20150027519A1 (en) | 2015-01-29 |
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