CN104204570A - Direct levitation device - Google Patents
Direct levitation device Download PDFInfo
- Publication number
- CN104204570A CN104204570A CN201380013111.XA CN201380013111A CN104204570A CN 104204570 A CN104204570 A CN 104204570A CN 201380013111 A CN201380013111 A CN 201380013111A CN 104204570 A CN104204570 A CN 104204570A
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- China
- Prior art keywords
- sliding axle
- slider
- plate
- porous layer
- air supply
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Classifications
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
- F16C29/00—Bearings for parts moving only linearly
- F16C29/02—Sliding-contact bearings
- F16C29/025—Hydrostatic or aerostatic
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
- F16C32/00—Bearings not otherwise provided for
- F16C32/06—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings
- F16C32/0603—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings supported by a gas cushion, e.g. an air cushion
- F16C32/0614—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings supported by a gas cushion, e.g. an air cushion the gas being supplied under pressure, e.g. aerostatic bearings
- F16C32/0618—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings supported by a gas cushion, e.g. an air cushion the gas being supplied under pressure, e.g. aerostatic bearings via porous material
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
- F16C33/00—Parts of bearings; Special methods for making bearings or parts thereof
- F16C33/02—Parts of sliding-contact bearings
- F16C33/04—Brasses; Bushes; Linings
- F16C33/043—Sliding surface consisting mainly of ceramics, cermets or hard carbon, e.g. diamond like carbon [DLC]
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
- F16C33/00—Parts of bearings; Special methods for making bearings or parts thereof
- F16C33/02—Parts of sliding-contact bearings
- F16C33/04—Brasses; Bushes; Linings
- F16C33/06—Sliding surface mainly made of metal
- F16C33/12—Structural composition; Use of special materials or surface treatments, e.g. for rust-proofing
- F16C33/128—Porous bearings, e.g. bushes of sintered alloy
Landscapes
- Engineering & Computer Science (AREA)
- General Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Chemical & Material Sciences (AREA)
- Dispersion Chemistry (AREA)
- Magnetic Bearings And Hydrostatic Bearings (AREA)
Abstract
An air slider device (1) according to one embodiment of the direct levitation device has a slide shaft (2) of rectangular shape, and a slider (3) of frame shape having aerostatic bearing surfaces (31A-31D) of planar shape facing objects to be supported (21). On the back side of porous layers (32A-32D) that form the aerostatic bearing surfaces (31A-31D), the slider (3) has air supply channels (33A-33D) that include air supply slots in a pattern along the edges of the surfaces to be supported (21) of the slide shaft (2). A direct levitation device for achieving more highly accurate linear guidance can be achieved thereby.
Description
Technical field
The present invention relates to a kind of directly floating installation (direct levitation device), in the situation that not contacting, this device makes slider move along axle central direction with respect to sliding axle, utilize aerostatic bearing (aerostatic bearing) that slider is floated from sliding axle simultaneously, more particularly, the present invention relates to a kind of air supply channel structure that can obtain more high-precision linear guide.
Background technique
The gas sliding device (directly floating installation) of the slider (removable main body) arranging around this sliding axle outer surface as the direction guiding of the axle central direction along rectangle sliding axle (stationary body), the guiding device at vacuum chamber transferring semiconductor etc. described in patent documentation 1 is known.
This guiding device comprises: the sliding axle of rectangular shape, and it has the guiding surface of four plane shapes in periphery; And tubular slider, this tubular slider has moving surface, and each surface is facing to the corresponding guiding surface of the sliding axle in interior week.
Air cushion along sliding axle axle central direction (slider movement direction) is arranged in each of four guiding surfaces of sliding axle, and the public pressurized gas that arrives all air cushions is supplied with flow path and is arranged on sliding axle inner side.In addition, in four guiding surfaces of sliding axle, on each, the annular collection trough of collecting the pressurized gas of supplying with forms around corresponding air cushion, and the discharge path that arrives collecting tank is arranged on sliding axle inner side.
In this structure, once pressurized gas is provided to sliding axle and supplies with flow path, pressurized air under identical pressure from the air cushion ejection of four guiding surfaces of sliding axle, thereby between the outer surface (four guiding surfaces) of sliding axle and the interior perimeter surface (four moving surfaces) of slider, form gas-bearing formation, thereby move along the axle central direction of sliding axle under the state that slider can be floated with respect to sliding axle at slider.In addition, because the pressurized gas of the air cushion ejection from each guiding surface of sliding axle is collected by the collecting tank around corresponding air cushion, pressurized gas is discharged to the outside of vacuum chamber by the discharge path in sliding axle, and can between the guiding surface of sliding axle and the moving surface of slider, not leak.
Reference listing
Patent documentation
Patent documentation 1: Japanese Patent Application Laid-Open No.2011-247405.
Summary of the invention
Technical problem
In its guiding surface of guiding device sliding axle described in patent documentation 1, only near middle section, air cushion is set, described middle section is included in the guiding surface of sliding axle of patent documentation 1 described guiding device along the center line of the axle central direction of sliding axle, but described air cushion is not near the sidepiece setting of sliding axle width direction.Therefore, pressurized gas can not be delivered near of sliding axle guiding surface and both sidepieces of slider moving surface on width direction.Therefore, can think on sliding axle width direction, the pressure between sliding axle guiding surface and slider moving surface in gap reduces towards the both sides of sliding axle moving surface from the middle section that air cushion is set.In the time producing such pressure gradient, for example, if load variations (as impacted) is applied to sliding axle or slider, slider and sliding axle may relatively swing around sliding axle Zhou center.
In addition,, in the guiding device described in patent documentation 1, in structure, pressurized gas can not be delivered near sliding axle guiding surface and both ends of slider moving surface along axle central direction.Therefore,, in the time that flexural load is applied to sliding axle, the straight line stability of sliding axle possibility bending and slider reduces.
The present invention makes according to above-mentioned situation, and the object of the present invention is to provide the direct floating installation that can realize the guiding of high-precision linear more.
The solution of problem
In order to address the above problem, gas sliding device according to the present invention comprises:
Cylindricality sliding axle, it has the multiple side surfaces along axle central direction; And
Slider, it comprises the inner wall surface around sliding axle around sliding axle Zhou center, and each inner wall surface is facing to a side surface of sliding axle, slider moves with respect to sliding axle along axle central direction,
In the apparent surface of the side surface of sliding axle and the inner wall surface of slider, any one surface all comprises aerostatic bearing surface, and it supports other surfaces as target surface that will be supported in discontiguous situation, and
In sliding axle and slider, a part with aerostatic bearing surface has:
Base component, it has groove and forms surface, each groove forms the want supported target surface of surface towards correspondence, and form air supply trough on surface at each groove and, to form along the mode of aerostatic bearing marginal surface, be supplied to air supply trough from aerostatic bearing surface towards the pressurized gas of wanting each supported target surface to spray; And
Porous layer, the groove that is stacked on base component forms surface and goes up and form aerostatic bearing surface.
Beneficial effect of the present invention
According to the present invention, enough floating functions are in each side surface of rectangle sliding axle or the outer regions facing to the slider inwall of each side surface of sliding axle, like this can anti-skidding device or sliding axle swing around Qi Zhou center, and increase the rigidity of sliding axle antagonism moment.As a result, can realize more high-precision linear guide.
Brief description of the drawings
[Fig. 1] Fig. 1 (A) is according to the external view of the gas sliding device 1 of one embodiment of the present invention, and Fig. 1 (B) is the A-A sectional view of the gas sliding device 1 shown in Fig. 1 (A).
[Fig. 2] Fig. 2 (A) is the external view of slider 3, and Fig. 2 (B) is the B-B sectional view of slider 3 shown in Fig. 2 (A).
[Fig. 3] Fig. 3 (A) and 3 (B) are for be set to front elevation and the bottom view of opposed facing two boards 30B and 30D in slider 3, Fig. 3 (C) and (D) be C-C sectional view and the D-D sectional view of plate 30B shown in Fig. 3 (A) and 30D.
[Fig. 4] Fig. 4 (A) and 4 (B) for being set to front elevation and the rear view of a plate 30A in opposed facing another two boards 30A and 30C in slider 3, and Fig. 4 (C), 4 (D) and 4 (E) are E-E, F-F and the G-G sectional view of the plate 30A shown in Fig. 4 (A).
[Fig. 5] Fig. 5 (A) for being set to the front elevation of another piece plate 30C in opposed facing other two boards 30A and 30C in slider 3, and Fig. 5 (B), 5 (C) and 5 (D) are H-H, I-I and the G-G sectional view of the plate 30A shown in Fig. 5 (A).
[Fig. 6] Fig. 6 is the view of explaining the buoyancy that is applied to sliding axle 2.
Embodiment
An embodiment of the invention are described below with reference to accompanying drawings.
First, to describing according to the structure of this embodiment's gas sliding device 1.Herein, the structure that sliding axle 2 obtains linear guide by fixing slider 3 on its longitudinal direction will be described by example, and in example, gas sliding device 1 is used as the Z axis movable mechanism of the high-precision positioner of for example conductor mounting apparatus that needs hi-Fix.
Fig. 1 (A) is according to the external view of this embodiment's gas sliding device, and Fig. 1 (B) is the A-A sectional view of this gas sliding device 1.In addition, Fig. 2 (A) is for forming slider 3 its external views of this gas sliding device 1, and Fig. 2 (B) is the B-B sectional view of this slider 3.In order to make an explanation, in orthogonal coordinate system, sliding axle 2 be longitudinally defined as z, and the horizontal width of sliding axle 2 and vertically width direction are defined as x and the y in Fig. 1 (A), other accompanying drawings will utilize this system of coordinates to absolutely prove.
As shown in the figure, comprise according to this embodiment's gas sliding device 1: be fixed to the slider 3 on the z axle of high-precision positioner etc., and sliding axle 2, its periphery 21 is supported by slider 3 in discontiguous situation, and guides along slider 3 Zhou center z (being z direction).
Sliding axle 2 has the shape of cuboid, it has the length corresponding to required displacement distance, and has formed the surface 21 that will support to guide by the non-contact of slider 3 (being after this referred to as to want supported target surface 21) along four side surfaces 21 (wherein two surfaces are not shown) of slider 3 Zhou center z.In addition, according to the application of high-precision positioner, on an end surfaces 22 of sliding axle 2, such as, be used for fixing the absorption chuck for holding workpiece holder screw 25 and the opening in the absorption path 24 of passing through from the pumping tube of vacuum pump that reduces absorption chuck pressure is also formed on this end surfaces.
Simultaneously, slider 3 has frame shape, it has flat inner wall surface 31A to 31D, each inner wall surface is all wanted supported target surface 21 accordingly facing to sliding axle 2, inner wall surface 31A to 31D around sliding axle 2 Zhou center z around sliding axle 2, and the aerostatic bearing surface 31A that each inner wall surface 31A has formed plane shape to 31D is to 31D, and they will supported target surface 21 facing to the corresponding of sliding axle 2 with the predetermined distance d across gas blanket.This slider 3 forms to 30D (four blocks of plates altogether) by two couples of plate 30A in conjunction with following, these four blocks of plates comprise the porous layer 32A with gas permeability to 32D and are positioned at porous layer 32A to the air feed path 33A of the dorsal part of 32D to 33D, thereby make porous layer (32A and the 32C of every a pair of plate, and 32B and 32D) mutually face, and then utilize multiple hex head bolt 37 fixed plates.
At two couples of plate 30A, in 30D, two boards 30B, 30D form has a pair of of analog structure, and is set to mutually face with the distance of the horizontal width size corresponding to sliding axle 2.Fig. 3 (A) and 3 (B) are for being set to front elevation and the bottom view of opposed facing two boards 30B, 30D, and Fig. 3 (C) and 3 (D) are C-C sectional view and the D-D sectional view of plate 30B, 30D shown in Fig. 3 (A).
As shown, plate 30B, 30D each there is square back-metal (matrix part) 34 and be stacked in porous layer 32B, the 32D on the whole surface (porous layer forms surface) 343 of back-metal 34.
In back-metal 34, multiple bolt-inserting holes 342 are formed as through two side surfaces 341 facing to being set to opposed facing other two boards 30A, 30C.Hex head bolt 37 inserts in these bolt-inserting holes 342 by the screw 359 of the plate 30A that introduces below.
In addition, be positioned at the air feed path 33B at porous layer 32B, 32D back, porous layer that 33D is formed on back-metal 34 forms on surface 343.Each has the symmetrical pattern of the symmetrical line (z direction symmetrical line 01 and y direction symmetrical line 02) about back-metal profile these air feed paths 33B, 33D, each comprised through the porous layer of back-metal 34 form surface 343 four folding corner regions 3431 air supply trough 331 and be connected with this air supply trough 331 and the ventilation slot 332 of perforate on the side surface 341 in both sides in y direction.In the present embodiment, air supply trough 331 forms the outside on surface 343 because of forming (belt-like zone of the predetermined width starting from the edge of back-metal 34) in outer regions 3433 along the porous layer of back-metal 34, outer regions 3433 forms surface 343 middle section 3432 (wanting the edge of supported target surface 21 to form along sliding axle 2 relative) around the porous layer of back-metal 34, and ventilation slot 332 is formed on the y direction symmetrical line 02 of back-metal profile, crosses over this air supply trough 331.
The whole porous layer that porous layer 32B, 32D are layered in back-metal 34 forms on surface 343, compressed gas flow path is formed on the back of porous layer 32B, 32D like this, each compressed gas flow path by the opening of the ventilation slot 332 on a side surface 341, by forming surface 343 outer peripheral air supply trough 331 along the porous layer of back-metal 34, arrive the opening of the ventilation slot 332 on opposite side surface 341.In addition, surperficial 31B, the 31D of porous layer 32B, 32D formed aerostatic bearing surface 31B, 31D, and the pressurized gas providing by these flow paths is provided for these bearing surfaces 31B, 31D.
, in 30D, form another right two boards 30A, 30C and be set to mutually face with the distance of the vertical width size corresponding to sliding axle 2, thereby a pair of plate 30B, 30D are clamped by two boards 30A, 30C from its side surface 341 at two couples of plate 30A.
Fig. 4 (A) and 4 (B) are for being set to front elevation and the rear view of plate 30A in opposed facing another two boards 30A, 30C, and Fig. 4 (C), 4 (D) and 4 (E) are E-E, F-F and the G-G sectional view of plate 30A shown in Fig. 4 (A).
As shown, plate 30A in another two boards 30A and 30C comprises back-metal (matrix part) 35 (such as being formed as square steel plate) and porous layer 32A, and described porous layer is stacked on a surface 353 (porous layer forms surface) of back-metal 35.
The porous layer that recess 355 is formed on back-metal 35 forms on surface 353, reserves belt-like zone (plate attachment area) 354, and its width is corresponding to the plate 30B from both sides of the edge 351, the thickness of 30D in the z-direction.Porous layer 32A is arranged in recess 355, and the side 341 that is set to opposed facing a pair of plate 30B, 30D is arranged in the plate attachment area 354 on the both sides of this recess 355.
The air feed path 33A that is arranged on the back of porous layer 32A is formed in the lower surface of this recess 355.This air feed path 33A has symmetrical pattern with respect to the symmetrical line (z direction symmetrical line 03 and x direction symmetrical line 04) of back-metal profile, and comprises through the air supply trough 333 of four folding corner regions 3551 of the lower surface 3554 of recess 355 and the ventilation slot 334 that is connected to this air supply trough 333 and leads to plate attachment area 354 inside in x direction.In the present embodiment, air supply trough 333 forms in all regions 3553 outside (apart from the belt-like zone of the profile predetermined width of the lower surface 3554 of recess 355) along the lower surface profile of recess 355, outer regions 3553 (is wanted the edge of supported target surface 21 and is formed along sliding axle 2 relative) around the center region 3552 of the lower surface 3554 of recess 355, and ventilation slot 334 is formed on the x direction symmetrical line 04 of back-metal profile, cross over air supply trough 333.
In addition the air feed opening 357 that, leads to air supply trough 333 by ventilation slot 334 is formed on another surface 356 of back-metal 35.
Porous layer 32A is stacked on the recess 355 of back-metal 35 that porous layer forms surface 353 1 sides, make compressed gas flow path be formed on the dorsal part of this porous surface 32A, described compressed gas flow path is from being arranged in the air feed opening 357 at middle part on another surface 356 of back-metal 35, via the air supply trough 333 of the lower surface profile of the recess 355 along back-metal 35, lead to the ventilation slot end 3341 in plate attachment area 354.In addition, the surperficial 31A of porous layer 32A has formed the compressed-air actuated aerostatic bearing surface 31A that ejection is supplied via this flow path.
In addition,, on another surface 356 of back-metal 35, screw 359 is formed on the position corresponding with the bolt-inserting hole 342 of the side surface 341 of plate 30B, 30D in plate attachment area 354.
Fig. 5 (A) is the front elevation of mutually facing other plates 30C in other plates 30A, the 30C arranging, and Fig. 5 (B), 5 (C) and 5 (D) are H-H, I-I and the J-J sectional view of plate 30C shown in Fig. 5 (A).
As shown, other plates 30C in other two boards 30A, 30C has back-metal (matrix part) 36 (such as square plate) and is stacked on the porous layer 32C on the surface (porous layer forms surface) 363 of back-metal 36.
The porous layer of back-metal 36 forms surface 363 to be had to the porous layer of plate 30A and forms the similar surface configuration in surface.More particularly, porous layer 32C is arranged on recess 365, recess 365 forms on surface 363 and forms at the porous layer of back-metal 36, leave belt-like zone 364 (plate attachment area), the width of belt-like zone 364 is corresponding to plate 30B, the 30D thickness from two side margin 361 in the z-direction, and the air supply channel 33C being positioned on the back of porous layer 32C is formed in the lower surface of this recess 365.This air feed path 33C has symmetrical pattern about the symmetrical line (z direction symmetrical line 05 and x direction symmetrical line 06) of back-metal profile, and comprise the air supply trough 335 through four folding corner regions of the lower surface of recess 365, and be connected to this air supply trough 335 and arrive the ventilation slot 336 of plate attachment area 364 inside.In the present embodiment, the lower surface profile that air supply trough 335 forms surface 363 recess 365 along the porous layer of back-metal 36 forms in all regions 3653 outside (from the profile of the lower surface 3655 of recess 365, there is the belt-like zone of predetermined width), outer regions 3653 (is wanted the edge of supported target surface 21 and is formed along sliding axle 2 relative) around the center region 3652 of the lower surface 3655 of this recess 365, and ventilation slot 336 is formed on the x direction symmetrical line 06 of back-metal profile, cross over air supply trough 335.
Porous layer 32C is stacked on the recess 365 of back-metal 36 that porous layer forms surperficial 363 sides, thereby the compressed gas flow path that the ventilation slot end 3361 of slave plate attachment area 364 leads to air supply trough 336 along the lower surface profile of the recess 365 of back-metal 36 is formed on the back of this porous layer 32C.In addition, the surperficial 31C of porous layer 32C has formed the aerostatic bearing surface 31C that sprays the pressurized gas of supplying with by this flow path.
Still further,, in the plate attachment area 364 of back-metal 36, multiple screws 369 are formed on the position corresponding with the screw thread patchhole 342 that is arranged in the plate 30B of plate attachment area 364 and other side surfaces 341 of 30D.
Slider 3 forms to 30D by four such plate 30A of following assembling.
Two boards 30B and 30D are under porous layer 32B and the opposed facing state of 32D, and on the both sides of plate 30C, one is arranged in plate attachment area 364 by a ground.In this, by the bolt-inserting hole 342 of other side surfaces 341 and the screw 369 of the plate attachment area 364 of plate 30C of alignment plate 30B, 30D, the opening of ventilation slot 332 in other surfaces 341 of plate 30B and 30D and the ventilation slot end 3361 of the plate attachment area 364 of plate 30C are connected.
In addition, plate 30A is arranged on the side surface 341 of two boards 30B, 30D, and the plate attachment area 354 of plate 30A and other side surfaces of two boards 30B, 30D are contacted.In this, align with the bolt-inserting hole 342 of the side surface 341 of plate 30B, 30D by the screw 359 that makes the plate attachment area 354 on the both sides of plate 30A, the opening of the ventilation slot 332 in the side surface 341 of plate 30B, 30D is connected with the ventilation slot end 3341 of the plate attachment area 354 of plate 30D.
Therefore, four plate 30A interconnect to 33D to the air feed path 33A of 30D, as shown in dotted line in Fig. 1 (A).In this state, the screw 359 of hex head bolt 37 slave plate 30A is inserted into the bolt-inserting hole 342 of plate 30B, 30D, the helical thread portion of these hex head bolts 37 is fastened to the screw 369 of plate 30C.This makes four plate 30A fix with frame type to 30D, thereby becomes slider 3.The shaped as frame slider 3 of manufacturing by this way by combination and the sliding axle 2 of rectangular shape, manufacture can anti-skidding axle 2 around the gas sliding device 1 of slider 3 Zhou center z rotations.
In addition, according to such slider 3, once pressurized gas provides from being couple to the only air supply pipe of the pump of the air feed opening 357 of a plate 30A, pressurized gas is logical stays in the whole gas feed path 33A of four plate 30A on to the porous layer 32A of 30D to the dorsal part of 32D to 33D, and sprays to 31D from the surperficial 31A of whole aerostatic bearing to the pore in 32D to the porous layer 32A of 30D via four plate 30A.
Herein, because air supply trough 331,333,335 arranges at porous layer 32A with the pattern at edge of wanting supported target surface 21 along sliding axle 2 to the dorsal part of 32D, the aerostatic bearing surface 31A of slider 3 to 31D and be inserted into slider 3 sliding axle 2 want in pressure in the gap between supported target surface 21 region (being in the outer regions of wanting supported target surface 21 of sliding axle 2) above air supply trough 331,333,335, become higher than the region without air supply trough 331,333,335.Therefore,, as shown in Fig. 6 (A), the two end part of supported target surface 21 of sliding axle 2 (horizontal width of sliding axle 2 and the vertically two end part of width) are supported in xy plane by enough buoyancy.Therefore, can swinging around axle center by anti-skidding axle 2, for example, is also like this even if load variations (impacting) is applied to sliding axle 2.In addition,, as shown in Fig. 6 (B), because the belt-like zone 60,61 in the whole periphery of sliding axle 2 is subject to enough buoyancy on two positions at sliding axle 2 Zhou centers, the moment of stiffness of sliding axle 2 is increased.Therefore straight line stability that, can anti-skidding axle 2 declines.In addition, because pressurized gas sprays to 31D from whole aerostatic bearing surface 31A, the aerostatic bearing surface 31A that wants supported target surface 21 and slider 3 of sliding axle 2 to the pressure distribution in the gap between 31D compared with traditional guiding device of air cushion is only provided in the middle section of the guiding surface of sliding axle, more even.Therefore, the floating stability of sliding axle 2 strengthens.Therefore, can realize and there is the more sliding axle 2 of high-precision linear guiding according to the gas sliding device 1 of the present embodiment.
In addition, because four plate 30A interconnect by ventilation slot 332,334,336 to 30D by assembling four plate 30A to the air supply trough 331,333,335 on the back of 32D to the porous layer 32A of 30D, an air feed opening 357 that is therefore only provided for supplying compressed gas in a plate 30A is just enough.Therefore, due to multiple air supply pipes of the self-pumping that do not need to arrange, the interference of air supply pipe and miscellaneous part and analogue can not occur substantially, and this is conducive to the adjustment of assembly process.
It should be noted that, illustrate in the present embodiment although slider 3 is the situations of fixing and sliding axle 2 guides along slider 3 Zhou center z, sliding axle 2 can longitudinally fixed with guided slidable device 3 on z.In the case, can realize the high-precision linear guiding of slider 3.
In addition,, although be used as having described as example as the gas sliding device 1 of the z axis movable mechanism of the high-precision positioner of conductor mounting apparatus, be not limited to this according to the application of the gas sliding device 1 of the present embodiment.Such as, also can need used as other mobile mechanism of the device of high-precision linear guiding, the movable workbench mechanism of such as detection device etc.
In addition, although the porous layer that air supply trough 331 forms the back-metal 34 of two boards 30B, 30D in the present embodiment forms in the outer regions on surface 343, lead to the size that the air supply trough of air supply trough 331 or ventilation slot 332 can be based on slider 3 and be further formed on 331 of air supply troughs around center region in.Same case is also applied to other two boards 30A, 30C.
In addition, although the opening in the ventilation slot 332 intersecting with air supply trough 331 and the side surface 341 on back-metal 34 both sides forms the porous layer of the back-metal 34 of two boards 30B in the present embodiment and 30D and forms on surface 343, the through hole intersecting with air supply trough 331 can form on surface 341 from of each back-metal 34 side surface 341 towards opposite side, thereby gets these ventilation slots 332 of shape.The groove with suitable length that passes the opening of these through holes can be formed in the both side surface 341 of plate 30B, 30D, and whether so no matter misalignment occur, and these through holes are all connected on the ventilation slot end 3341,3361 of following another two boards 30A, 30C.Alternatively, the groove with suitable length intersecting with ventilation slot end 3341,3346 in z direction can be formed in the plate attachment area 354,364 of another two boards 30A, 30D.
In addition, although in the present embodiment, used four side surfaces 21 for wanting the rectangular cylindricality sliding axles 2 of supported target surface, sliding axle 2 can have polygonal columnar shape, and its cross section is polygonal but not square.In the case, around the shaped as frame corresponding to sliding axle 2 shape of cross sections that is shaped as of the slider 3 of sliding axle 2.
In addition, although each side surface 21 of sliding axle 2 is for wanting supported target surface, and be in the present embodiment all aerostatic bearing surface round the inner wall surface 31A of the slider that is shaped as frame 3 of sliding axle 2 to 31D around sliding axle 2 Zhou center Z, in contrast, each side surface 21 of sliding axle 2 can be aerostatic bearing surface, and four inner wall surface 31A of slider 3 can be to want supported target surface to 31D.More particularly, similar with above-mentioned slider 3, on each side surface 21 of sliding axle 2, form the ventilation slot to couple together to the air supply trough of the pattern setting at the edge of 31D and by the air supply trough of adjacent side 21 along the relative target surface 31A that will support, and porous layer can be stacked on above them.Thus, because each of slider 3 want supported target surface 31A to the outer regions of 31D by enough buoyant support, and slider 3 is prevented around the swing at axle center, the rigidity of sliding axle 2 resisting moment increases simultaneously, therefore can realize the high-precision linear guiding of slider similar to the above case 3.It should be noted that, in the case, sliding axle 2 can form to the plate of the structure same structure of 30D by assembling the plate 30A that multiple employings and above-mentioned slider 3 adopt, and makes porous layer facing to outside.
In these cases, porous layer 32A can be formed by any materials to 32D, such as porous metals, pottery, as long as this material has gas permeability.Such as, when porous layer 32A is porous metals sinter layer to 32D, the OILES#2000 that can use OILES company as plate 30A to 30D.
Industrial applicibility
When needs more high-precision linear whens guiding, the present invention is widely used in direct floating installation.
Reference character
1: gas sliding device, 2: sliding axle, 3: slider, 21: sliding axle want supported target surface (side surface, periphery), 22: the end surfaces of sliding axle, 24: aspiration path, 25: screw, 30A is to 30D: plate, 31A is to 31D: (the porous layer surface, aerostatic bearing surface of porous layer, slider inner wall surface), 32A is to 32D: porous layer, 33A is to 33D: air feed path, 34 to 36: back-metal, 37: hex head bolt, 331, 333, 335: air supply trough, 332, 334, 336: ventilation slot, 341: the side surface of back-metal, 342: bolt-inserting hole, 343, 353, 363: a surface (porous layer forms surface) of back-metal, 351, 361: the cambial two edges of porous of back-metal, 354, 364: plate attachment area, 355, 365: recess, 356: another surface of back-metal, 357: air feed opening, 359: bolt, 369: screw, 3341, 3361: ventilation slot end
Claims (3)
1. a direct floating installation, comprising:
Prismatic slip axle, it comprises the multiple side surfaces along axle central direction; With
Slider, it comprises the inner wall surface around sliding axle around sliding axle Zhou center, and each inner wall surface is facing to a side surface of sliding axle, slider moves along the direction at axle center with respect to sliding axle;
In apparent surface in the side surface of sliding axle and the inner wall surface of slider, any one surface is included in and does not contact another surperficial situation lower support another surperficial aerostatic bearing surface as target surface that will be supported;
In sliding axle and slider, a part with aerostatic bearing surface comprises:
Matrix part, it has groove and forms surface, each groove forms the want supported target surface of surface towards correspondence, and form the pattern with the edge along aerostatic bearing surface on surface at each groove and form air supply trough, the pressurized gas that will spray to from aerostatic bearing surface each target surface that will be supported is provided for air supply trough, and
Porous layer, the groove that is stacked on matrix part forms surface above, and forms aerostatic bearing surface.
2. direct floating installation according to claim 1, wherein,
Slider comprises plurality of plates, and every block of plate has matrix part and porous layer, and assemble described plurality of plates make porous layer towards sliding axle want supported target surface;
Ventilating path is further formed on the matrix part of every block of plate, ventilating path and the ventilating path that is formed on air supply trough on matrix part and intersects and be connected to the matrix part of another plate adjacent with this plate,
The air feed opening that is connected to the air supply trough being formed in matrix part is formed on the groove of the matrix part of a plate in plurality of plates and forms on the relative apparent surface in surface.
3. direct floating member according to claim 1 and 2, wherein, porous layer is pottery or porous metals sinter layer.
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2012-049845 | 2012-03-06 | ||
| JP2012049845A JP5972611B2 (en) | 2012-03-06 | 2012-03-06 | Direct acting levitation device |
| PCT/JP2013/054339 WO2013133036A1 (en) | 2012-03-06 | 2013-02-21 | Direct levitation device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN104204570A true CN104204570A (en) | 2014-12-10 |
Family
ID=49116519
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201380013111.XA Pending CN104204570A (en) | 2012-03-06 | 2013-02-21 | Direct levitation device |
Country Status (4)
| Country | Link |
|---|---|
| JP (1) | JP5972611B2 (en) |
| KR (1) | KR102004015B1 (en) |
| CN (1) | CN104204570A (en) |
| WO (1) | WO2013133036A1 (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TWI642858B (en) * | 2017-09-06 | 2018-12-01 | 友達光電股份有限公司 | Air suspension bearing module |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6043724U (en) * | 1983-09-02 | 1985-03-27 | 東陶機器株式会社 | hydrostatic fluid bearing slider |
| JPH10299779A (en) * | 1997-04-25 | 1998-11-10 | Kyocera Corp | Static pressure gas bearing device |
| JP2004019760A (en) * | 2002-06-14 | 2004-01-22 | Nsk Ltd | Hydrostatic bearing |
| JP2005273882A (en) * | 2004-03-26 | 2005-10-06 | Kyocera Corp | Vacuum correspondence type hydrostatic fluid bearing |
| JP2005308146A (en) * | 2004-04-23 | 2005-11-04 | Taiheiyo Cement Corp | Static pressure bearing device and its manufacturing method |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP5084580B2 (en) * | 2008-03-26 | 2012-11-28 | 京セラ株式会社 | Mobile device |
| JP2011247405A (en) | 2009-07-30 | 2011-12-08 | Kyocera Corp | Guiding device |
-
2012
- 2012-03-06 JP JP2012049845A patent/JP5972611B2/en active Active
-
2013
- 2013-02-21 KR KR1020147027646A patent/KR102004015B1/en active IP Right Grant
- 2013-02-21 CN CN201380013111.XA patent/CN104204570A/en active Pending
- 2013-02-21 WO PCT/JP2013/054339 patent/WO2013133036A1/en active Application Filing
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6043724U (en) * | 1983-09-02 | 1985-03-27 | 東陶機器株式会社 | hydrostatic fluid bearing slider |
| JPH10299779A (en) * | 1997-04-25 | 1998-11-10 | Kyocera Corp | Static pressure gas bearing device |
| JP2004019760A (en) * | 2002-06-14 | 2004-01-22 | Nsk Ltd | Hydrostatic bearing |
| JP2005273882A (en) * | 2004-03-26 | 2005-10-06 | Kyocera Corp | Vacuum correspondence type hydrostatic fluid bearing |
| JP2005308146A (en) * | 2004-04-23 | 2005-11-04 | Taiheiyo Cement Corp | Static pressure bearing device and its manufacturing method |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TWI642858B (en) * | 2017-09-06 | 2018-12-01 | 友達光電股份有限公司 | Air suspension bearing module |
Also Published As
| Publication number | Publication date |
|---|---|
| JP5972611B2 (en) | 2016-08-17 |
| WO2013133036A1 (en) | 2013-09-12 |
| JP2013185623A (en) | 2013-09-19 |
| KR20140133902A (en) | 2014-11-20 |
| KR102004015B1 (en) | 2019-07-25 |
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