CN104199260B - Easily assembling static pressure goes out to flow developing nozzle - Google Patents
Easily assembling static pressure goes out to flow developing nozzle Download PDFInfo
- Publication number
- CN104199260B CN104199260B CN201410493838.9A CN201410493838A CN104199260B CN 104199260 B CN104199260 B CN 104199260B CN 201410493838 A CN201410493838 A CN 201410493838A CN 104199260 B CN104199260 B CN 104199260B
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- China
- Prior art keywords
- runner
- level
- main body
- water conservancy
- conservancy diversion
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- Sink And Installation For Waste Water (AREA)
- Electrostatic Spraying Apparatus (AREA)
Abstract
A kind of easily assembling static pressure goes out to flow developing nozzle, including main body, partition plate and cover board, the main body is in strip, the middle part of body top face forms level-one runner to recessed, the middle part of level-one runner bottom surface forms two level runner to recessed, the down-set vertical water conservancy diversion blind hole of level-one runner bottom surface at one end, exhaust port is correspondingly arranged at the upper side and lower side of one end face of main body and into liquid interface, in main body between exhaust port and the level-one runner, first is formed into corresponding between liquid interface and the lower end of the vertical water conservancy diversion blind hole, second water conservancy diversion runner, the opening's edge of the two level runner sets drainage inclined-plane, if the bottom of two level runner sets and does stream aperture；Partition plate is arranged at the oral area of two level runner in main body, sets overcurrent to stitch above the drainage inclined-plane on partition plate；Cover plate for sealing is assemblied in the oral area of the level-one runner.This developing nozzle not only sprays that uniform, stable, impact is low, and compact-sized, easy to process, assembling.
Description
Technical field
The invention belongs to IC manufacturing field, is sprayed more specifically to the development in integrated circuit fabrication process
Mouth.
Background technology
Semiconductor processing industry is to give priority to industry in national " 12th Five-Year Plan " planning, while is also that China moves towards information
Change the essential step stepped out.In addition there is data to suggest that, if with tribute of the armored concrete of Unit Weight to gross national product
Offer value to measure for 1, then the contribution margin of car is 5, and the contribution margin of computer is 1000, and the contribution margin of integrated circuit is then
Up to 2000.
Developing process is as the key procedure in the photoetching process of semiconductor integrated circuit field, the quality influence for quality of developing
IC chip final mass, and quality of developing is determined by development spraying equipment (referring generally to developing nozzle).With
Constantly advancing for semiconductor technology, on the one hand requires developing nozzle to meet spraying uniformity and low impact in developing process
It is required that on the other hand meeting that development sprays uniformity and low impact requires developing spray nozzle structure compact at the same time, easy to process,
Assembling.This just proposes the challenge of bigger to the structure design of developing nozzle.Continuously improving and optimize with developing nozzle, it is existing
Some developing nozzles having can meet developing uniformity and the requirement of low impact substantially, but compact-sized, processing, assembling side
The requirement in face can't be met.Therefore, the technique nozzle demand for developing technique demand for development being met for design is also got over
Come more urgent.
The content of the invention
The object of the present invention is to provide a kind of easily assembling static pressure to go out to flow developing nozzle, the developing nozzle not only spray uniformly,
Stabilization, impact are low and compact-sized, easy to process, assembling.
Include in order to achieve the above object, a kind of easily assembling static pressure provided by the invention goes out to flow developing nozzle：
Main body, in strip, the middle part of body top face is downward to recessed composition level-one runner, the middle part of level-one runner bottom surface
Recessed composition two level runner, the down-set vertical water conservancy diversion blind hole of level-one runner bottom surface at one end, the upside of one end face of main body is with
Exhaust port is correspondingly arranged at side and into liquid interface, in main body between exhaust port and the level-one runner, into liquid interface with
Corresponding between the lower end of the vertical water conservancy diversion blind hole to form first, second water conservancy diversion runner, the opening's edge of the two level runner is set
Inclined-plane is drained, if the bottom of two level runner, which is set, does stream aperture；
Partition plate, is arranged at the oral area of two level runner in main body, sets overcurrent to stitch above the drainage inclined-plane on partition plate；With
And
Cover board, sealing are assemblied in the oral area of the level-one runner.
During work, developer solution is inputted from into liquid interface, is entered level-one runner through the second water conservancy diversion runner, is uniformly spread out in level-one
Uniformly flow to the drainage inclined-plane on secondary streams road junction edge through the overcurrent seam on partition plate after baffle surface in runner so that developer solution along
Two level runner side wall is flow in two level runner, and the developer solution in two level runner is maintained at same liquid level, by developer solution in two level
The balanced static pressure that runner is formed makes developer solution go out to flow aperture without impact or low impact outflow from two level runner bottom, realizes spraying
Uniformity and low impact.Meanwhile the gas that inner flow passage is assembled in nozzle spraying process through the first water conservancy diversion runner from exhaust
Interface finally flows out.
Go out to flow in developing nozzle in above-mentioned easy assembling static pressure, it is preferable that two sides of the main body are recessed respectively inwards
Two side channels are formed, the oral area sealing installation side plate of two side channels forms insulation liquid accommodating cavity, and one end face of main body exists
Two insulation interfaces are set at left side and right side, keeps the temperature at two in main body and the is formed between interfaces and described two side channels
3rd, the 4th water conservancy diversion runner, also forms the 5th water conservancy diversion runner for connecting described two side channels in main body.During work, two insulations
Interface connects the inlet tube and return duct of insulation liquid respectively, makes two of main body both sides to keep the temperature liquid accommodating cavity and is led by the 3rd to the 5th
Flow runner and form insulation liquid recycle stream road with exterior insulation liquid supply equipment.
Go out to flow in developing nozzle in above-mentioned easy assembling static pressure, it is preferable that the exhaust port, protect into liquid interface and two
Warm interface is located at the same end face of the main body, and four be in crossing distribution.
Go out to flow in developing nozzle in above-mentioned easy assembling static pressure, it is preferable that the described first to the 5th water conservancy diversion runner is laterally
Runner.
Go out to flow in developing nozzle in above-mentioned easy assembling static pressure, it is preferable that the main body form the exhaust port,
Top surface and two sides into liquid interface and the end of two insulation interfaces form convex, and the cover board and side plate are filled with main body
Flushed with the rear surface with corresponding convex.
Go out to flow in developing nozzle in above-mentioned easy assembling static pressure, it is preferable that the length of the level-one runner and two level runner
More than width and depth, in strip.
Go out to flow in developing nozzle in above-mentioned easy assembling static pressure, it is preferable that the first to fourth water conservancy diversion runner is arranged on
One end of main body, the 5th water conservancy diversion runner are arranged on the other end of main body.
Go out to flow in developing nozzle in above-mentioned easy assembling static pressure, it is preferable that the slope angle on the drainage inclined-plane is 30~60 degree.
Go out to flow in developing nozzle in above-mentioned easy assembling static pressure, it is preferable that the bottom surface of the main body is going out to flow around aperture
Form up big and down small protuberance.
Go out to flow in developing nozzle in above-mentioned easy assembling static pressure, it is preferable that it is described go out to flow the aperture of aperture be 0.1-
0.6mm, aspect ratio 2-6, it is all to go out to flow the area of aperture and be 0.02-0.05 with the area ratio of overcurrent seam, it is vented
The area of passage and the area ratio of overcurrent seam are 0.05-0.3, and the height ratio of the level-one runner and two level runner is
0.2-0.4。
Due to using above-mentioned flow passage structure, developer solution is realized with static pressure extrusion method and sprayed, and significantly improves the steady of spraying
Qualitative and uniformity, meets the requirement of spraying uniformly, stable, impact is low.Meanwhile by being set to water conservancy diversion runner in main body
Exhaust port and Media Interface Connector, are all concentrated on an end face of nozzle body by meter so that nozzle arrangements are compact, are easy to add
Work, assembling.
Brief description of the drawings
Fig. 1-3 easily assembles the structure diagram that static pressure goes out to flow the main body of developing nozzle for some embodiments, wherein, Fig. 1 is
Top view, Fig. 2 are front view, and Fig. 3 is left view；
Fig. 4 is the structure diagram that the nozzle formed after partition plate, cover board and side plate is installed in main body.
Embodiment
The present invention is further illustrated with reference to the accompanying drawings and examples.
As shown in Figs 1-4, this easy assembling static pressure goes out to flow developing nozzle and includes：Main body 1, partition plate 3, cover board 4.
Main body 1 is in strip, and the middle part of 1 top surface of main body is to recessed composition level-one runner 1a, in level-one runner 1a bottom surfaces
Portion is to recessed composition two level runner 1b, down-set vertical water conservancy diversion blind hole 1c, 1 left side of main body at the left end of level-one runner 1a bottom surfaces
Exhaust port 1h is set at upside, is set at downside into liquid interface 1i, in exhaust port 1h and the level-one runner 1a in main body 1
Between form the first water conservancy diversion runner 1e, in main body 1 between the lower end of liquid interface 1i and the vertical water conservancy diversion blind hole 1c into
The opening's edge that type has the second water conservancy diversion runner 1f, the two level runner 1b sets drainage inclined-plane 1s, if the bottom of two level runner 1b is set
Do stream aperture 1q.
Partition plate 3 is arranged at the oral area of two level runner 1b in main body 1, is set on partition plate 3 above the drainage inclined-plane 1s
Stream seam 3a.
4a represents the mounting hole on cover board 4 in Fig. 4, and the mounting hole 4a on cover board and the mounting hole in main body are passed through with screw rod
Connection, and O-ring seal is set in the engaging portion of cover board 4 and main body 1, cover board 4 is sealed to the oral area for being assemblied in level-one runner 1a.
During work, developer solution is inputted from into liquid interface 1i, is entered level-one runner 1a through the second water conservancy diversion runner 1f, is uniformly spread out
Uniformly it flow to the drainage inclined-plane of secondary streams road 1b opening's edges behind 3 surface of partition plate through the overcurrent seam 3a on partition plate 3 in level-one runner 1a
1s so that developer solution is flow in two level runner 1b along two level runner 1b side walls, and the developer solution in two level runner 1b is maintained at same
One liquid level, makes developer solution go out to flow aperture from two level runner 1b bottoms by developer solution in the two level runner 1b balanced static pressure formed
1q realizes the uniformity of spraying and low impact without impact or low impact outflow.Meanwhile inner flow passage gathers in nozzle spraying process
The gas of collection is finally flowed out through the first water conservancy diversion runner 1e from exhaust port 1h.
Further it is additionally provided with insulation liquid recycle stream road.The concrete structure for keeping the temperature liquid recycle stream road is as follows：The two of main body 1
A side is recessed respectively inwards to form two side channels 1n, 1r, and the oral area sealing of two side channels 1n, 1r are installed two side plates 2,5 and formed
Liquid accommodating cavity is kept the temperature, the left side of main body 1 sets two insulations interface 1g, 1j at left side and right side, protected in main body 1 at one
The 3rd water conservancy diversion runner 1d is formed between warm interface 1g and a side channel 1r, in another insulation interface 1j and another side channel 1n
Between form the 3rd water conservancy diversion runner 1k, the 5th water conservancy diversion runner for connecting described two side channel 1n, 1r is also formed in main body 1
1o.During work, two insulation interface 1g, 1j, mono- inlet tube for connecing insulation liquid, another connect the return duct of insulation liquid, make main body
Two insulation liquid accommodating cavities of 1 both sides form insulation liquid by the 3rd to the 5th water conservancy diversion runner and exterior insulation liquid supply equipment
Circulatory flow.
With reference to Fig. 3, above-mentioned exhaust port 1h, into liquid interface 1i and two insulations interface 1g, 1j be located at the same of main body 1
End face, four be in crossing distribution.Due to all being concentrated by exhaust port 1h, into liquid interface 1i and two insulation interfaces 1g, 1j
In an end face of nozzle body 1, efficiently solve the exhaust port of existing nozzle, be distributed in spray into liquid interface and insulation interface
The problem of processing difficulties caused by mouth main body, cover board diverse location and cumbersome mixed and disorderly assembling, so that nozzle knot of the present invention
Structure is compact, easy to process, assembling, meets the demand for development of developing technique.
Above-mentioned first to the 5th water conservancy diversion runner is transverse flow channels.First to fourth water conservancy diversion runner 1d, 1e, 1f, 1k is arranged on
The left end of main body 1, first to fourth water conservancy diversion runner are parallel to each other, and the 5th water conservancy diversion runner 1o is arranged on the right end of main body 1.
With reference to Fig. 1,2, main body 1 left part (that is, form the exhaust port, into liquid interface and two insulation interfaces
End) top surface form the first convex 1m, be separately formed the second convex 1l in two sides of left part, cover board 4 with
Main body 1 flushes after assembling with the surface of the first convex 1m, after the assembling of two side plates 2,5 and main body 1 with corresponding second convex 1l
Surface flush.
In some preferred embodiment, level-one runner 1a length is more than width and depth, in strip.Equally, secondary streams
The length of road 1b is more than width and depth, in strip.
The slope angle of drainage inclined-plane 1s crosses conference and causes bubble to increase, and liquid fluctuating；Slope angle is too small, may cause two
Level runner liquid level is gradually reduced, and discharge velocity is gradually reduced, and the preferred range for draining the slope angle of inclined-plane 1s is 30~60 degree, more preferably
Scope be 35~50 degree.
Further, the bottom surface of main body 1 is going out to flow around aperture 1q to form up big and down small protuberance 1p.Protuberance 1p
Can avoid liquid from go out to flow aperture 1q outflow when produce coacervation.
Can also the performance of nozzle be had an impact by going out to flow the size of aperture 1q, overcurrent seam 3a and exhaust passage.Some compared with
In good embodiment, the aperture that goes out to flow aperture 1q is 0.1-0.6mm, aspect ratio 2-6, it is all go out flow aperture area and with it is described
The area ratio of overcurrent seam 3a is 0.02-0.05, and the area of exhaust passage and the area ratio of overcurrent seam 3a are 0.05-
0.3.In some more preferably embodiment, the aperture for going out to flow aperture 1q is 0.5mm, and aspect ratio 4 is all to go out to flow the face of aperture 1q
Product and with the overcurrent seam 3a area ratio be 0.04, the area of exhaust passage and with the overcurrent seam 3a area ratio be
0.125。
The preferred height ratio of level-one runner 1a and two level runner 1b is 0.2-0.4, and more preferably height is than being 0.3.
The present invention is described in detail above by specific embodiment, these specific descriptions must not believe that the present invention
It is only limited to the content of these embodiments.Those skilled in the art conceive according to the present invention, these are described and combine this area public affairs
Know any improvement, equivalents that general knowledge makes, should be included in the protection domain of the claims in the present invention.
Claims (7)
1. a kind of easily assembling static pressure goes out to flow developing nozzle, it is characterised in that including：
Main body (1), in strip, the middle part of body top face forms level-one runner (1a), the middle part of level-one runner bottom surface to recessed
To recessed composition two level runner (1b), the down-set vertical water conservancy diversion blind hole (1c) of level-one runner bottom surface at one end, one end of main body
Exhaust port (1h) is correspondingly arranged at the upper side and lower side in face and into liquid interface (1i), in exhaust port and the level-one in main body
Between runner, between the lower end of liquid interface and the vertical water conservancy diversion blind hole it is corresponding form first, second water conservancy diversion runner (1e,
1f), the opening's edge of the two level runner sets drainage inclined-plane (1s), if the bottom of two level runner, which is set, does stream aperture (1q)；
Partition plate (3), is arranged at the oral area of two level runner in main body, sets overcurrent to stitch above the drainage inclined-plane on partition plate
(3a)；And
Cover board (4), sealing are assemblied in the oral area of the level-one runner；
Two side channels (1n, 1r) of recessed composition, the oral area of two side channels seal installation side respectively inwards for two sides of the main body
Plate (2,5) forms insulation liquid accommodating cavity, one end face of main body is set at left side and right side two keep the temperature interfaces (1g,
1j), kept the temperature in main body at two and form the three, the 4th water conservancy diversion runners (1d, 1k), main body between interface and described two side channels
Inside also form the 5th water conservancy diversion runner (1o) for connecting described two side channels；
The exhaust port, the same end face for keeping the temperature interfaces into liquid interface and two and being located at the main body, four be in cross
Distribution；
Described first to the 5th water conservancy diversion runner is transverse flow channels.
2. easily assembling static pressure as claimed in claim 1 goes out to flow developing nozzle, it is characterised in that：The main body form it is described
Exhaust port, top surface and two sides into liquid interface and the end of two insulation interfaces form convex (1m, 1l), the lid
Plate and side plate flush after being assembled with main body with the surface of corresponding convex.
3. easily assembling static pressure as claimed in claim 1 goes out to flow developing nozzle, it is characterised in that：The level-one runner and secondary streams
The length in road is more than width and depth, in strip.
4. easily assembling static pressure as claimed in claim 1 goes out to flow developing nozzle, it is characterised in that：The first to fourth water conservancy diversion stream
Road is arranged on one end of main body, and the 5th water conservancy diversion runner is arranged on the other end of main body.
5. easily assembling static pressure as claimed in claim 1 goes out to flow developing nozzle, it is characterised in that：It is described drainage inclined-plane slope angle be
30~60 degree.
6. easily assembling static pressure as claimed in claim 1 goes out to flow developing nozzle, it is characterised in that：The bottom surface of the main body is going out stream
Up big and down small protuberance (1p) is formed around aperture.
7. easily assembling static pressure as claimed in claim 1 goes out to flow developing nozzle, it is characterised in that：It is described to go out to flow the aperture of aperture and be
0.1-0.6mm, aspect ratio 2-6, it is all to go out to flow the area of aperture and be 0.02-0.05 with the area ratio of overcurrent seam,
The area of exhaust passage and the area ratio of overcurrent seam are 0.05-0.3, the height ratio of the level-one runner and two level runner
For 0.2-0.4.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410493838.9A CN104199260B (en) | 2014-09-24 | 2014-09-24 | Easily assembling static pressure goes out to flow developing nozzle |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410493838.9A CN104199260B (en) | 2014-09-24 | 2014-09-24 | Easily assembling static pressure goes out to flow developing nozzle |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN104199260A CN104199260A (en) | 2014-12-10 |
| CN104199260B true CN104199260B (en) | 2018-04-24 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201410493838.9A Expired - Fee Related CN104199260B (en) | 2014-09-24 | 2014-09-24 | Easily assembling static pressure goes out to flow developing nozzle |
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Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105045049B (en) * | 2015-07-31 | 2019-05-14 | 清华大学深圳研究生院 | A kind of developing nozzle with exhaust passage |
Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH05166716A (en) * | 1991-12-13 | 1993-07-02 | Tokyo Electron Ltd | Processing device |
| JPH1071358A (en) * | 1997-08-14 | 1998-03-17 | Able:Kk | Coating nozzle for film forming apparatus |
| JPH11317358A (en) * | 1999-02-24 | 1999-11-16 | Tokyo Electron Ltd | Processing method |
| CN103246165A (en) * | 2013-04-25 | 2013-08-14 | 深圳市华星光电技术有限公司 | Photoresist coating device and coating method thereof |
| CN103698986A (en) * | 2013-12-23 | 2014-04-02 | 清华大学深圳研究生院 | Sharp nozzle slit type technical nozzle of outflow structure |
| CN103984213A (en) * | 2014-04-15 | 2014-08-13 | 清华大学深圳研究生院 | Uniform outflow development nozzle having pressure equalization flow channel |
-
2014
- 2014-09-24 CN CN201410493838.9A patent/CN104199260B/en not_active Expired - Fee Related
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH05166716A (en) * | 1991-12-13 | 1993-07-02 | Tokyo Electron Ltd | Processing device |
| JPH1071358A (en) * | 1997-08-14 | 1998-03-17 | Able:Kk | Coating nozzle for film forming apparatus |
| JPH11317358A (en) * | 1999-02-24 | 1999-11-16 | Tokyo Electron Ltd | Processing method |
| CN103246165A (en) * | 2013-04-25 | 2013-08-14 | 深圳市华星光电技术有限公司 | Photoresist coating device and coating method thereof |
| CN103698986A (en) * | 2013-12-23 | 2014-04-02 | 清华大学深圳研究生院 | Sharp nozzle slit type technical nozzle of outflow structure |
| CN103984213A (en) * | 2014-04-15 | 2014-08-13 | 清华大学深圳研究生院 | Uniform outflow development nozzle having pressure equalization flow channel |
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| Publication number | Publication date |
|---|---|
| CN104199260A (en) | 2014-12-10 |
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Granted publication date: 20180424 Termination date: 20200924 |