CN104199182B - Two-step diffraction phase imaging method and corresponding phase retrieval method - Google Patents
Two-step diffraction phase imaging method and corresponding phase retrieval method Download PDFInfo
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- CN104199182B CN104199182B CN201410505828.2A CN201410505828A CN104199182B CN 104199182 B CN104199182 B CN 104199182B CN 201410505828 A CN201410505828 A CN 201410505828A CN 104199182 B CN104199182 B CN 104199182B
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Abstract
The invention discloses a two-step diffraction phase imaging method and a corresponding phase retrieval method. 0 scale diffracted by raster is adopted to form two-step geometric optical path interference patterns with high stability with +1 scale and -1 scale diffraction light in sequence; then the difference between the two interference patterns are calculated to eliminate background light intensity so as to apply Hilbert transform to retrieve phase information of samples. Compared with frequently-used phase retrieval methods of off-axis interference, high-pass filtering is not needed in the methods, high-frequency information is reserved integrally, the phase retrieval speed is high and the two-step diffraction imaging method is applicable to all off-axis interferences including slight off-axis interference. The two-step diffraction phase imaging method and the corresponding phase retrieval method have a wide utility value and an application prospect in phase microscopy, especially in the application field of transparent samples such as biological cell phase imaging and phase measuring.
Description
Technical field
The invention belongs to interfere micro-imaging technique field, and in particular to a kind of two step diffraction phases based on optical grating diffraction
Micro imaging method and corresponding phase recovery operation method.
Background technology
Optical microscopy opens a fan gate for the observation of microcosmic things, in the field performance such as biology and medical science
Important function.Numerous biological samples, such as living cells, major part is transparent, shows as phase object.Using phase place with it is strong
The phase imaging technology changed between degree can carry out undamaged blur-free imaging to these samples.At present, the micro- skill of interferometric phase
Art is mainstream technology therein, has the advantages that measuring speed is fast, high resolution.
U.S. Gabriel professors Popescu propose Fourier phase microtechnique within 2004, using the scattered light of sample
With non-scattered respectively as thing field and reference field, it is allowed to common geometrical light-path coaxially interfere, with reference to phase-shifting technique, gathers many
Width interferogram is realizing phase imaging.Similar techniques also have United States Patent (USP) technology US2009290156 (A1), and (the space interference of light shows
The Fourier transformation light scattering transmission method of micro mirror and cell tissue).Such technology phase imaging is highly stable, phase recovery fortune
Calculate easy, unfortunately accuracy controlling phase shift is relatively difficult in practice, and repeatedly phase shift is also unfavorable for the dynamic of sample
State is measured in real time.By contrast, it is off-axis to interfere with single shot characteristic, grinding for the fast phenomenon of phase object can be performed well in
Study carefully.As Massachusetts Institute of Technology's patented technology CN20110374950.7 (for Hilbert phase imaging system and method), it
Based on typical Mach Zehnder interference light path, process single width interferogram using Hilbert integral transformation to realize interfering phase
Position imaging.And for example Lyncee Tec SA companies of Switzerland in 2006 are proposed digital holographic microscope first based on off-axis interference
(DHM-1000), can direct observing samples three-dimensional appearance and PHASE DISTRIBUTION.But object light is adopted with reference light in such technology
Separate light path to interfere, easily affected by extraneous vibration, environmental disturbances etc..In this regard, the off-axis interferometric phase imaging of light path is suggested altogether.
As diffraction phase microtechnique and its elongation technology utilize grating diffration characteristic on the premise of stability is not sacrificed, in fact
Fast imaging is showed.But it with other it is off-axis interfere, it is impossible to enough make full use of the resolution and spatial bandwidth of CCD, and
Need background picture to be eliminated by high-pass filtering during phase recovery, easily cause the disappearance of high-frequency information.Then, class knot
The slight off-axis interference technique for closing phase-shifting technique is suggested, and such as Duke Univ USA Adam professors Wax are by controlling two polaroids
Two steps realized slightly are interfered off axis.The technology subtracts each other the unwanted back of the body of elimination using two interference patterns in phase recovery computing
Scene, ensure that the complete of sample message without the need for high-pass filtering.But phase shift needs to determine by being fitted background striped afterwards, one
Determine in degree, to increased the complexity of phase recovery.In addition, the interference that this technology uses double light path is micro-, do not possess common light
Road advantage.
In sum, can be from the off-axis interferogram demodulation phase information of single width in prior art, but off-axis interference can not be abundant
Using CCD spatial bandwidth, conventional background image height pass filter will also result in high-frequency information disappearance；Although also there is some technologies to adopt
Two width interferograms, two steps that the Adam Wax for such as mentioning in text are proposed slightly are interfered off axis, but use double light path and interfere into
It is as system, unstable, and need device to realize phase shift, and need independent measurement.
The content of the invention
It is an object of the invention to provide a kind of two steps diffraction phase imaging method and corresponding phase restoration methods, with abundant
Using CCD spatial bandwidth and release background image height pass filter, make while to be applied to interfere off axis and slightly off-axis interference, strengthen phase
Stability, degree of accuracy and efficiency that position is imaged.
In order to solve above technical problem, the present invention is extensive with phase place using the two step diffraction phases imaging of diffraction properties
Recovering technology, concrete technical scheme are as follows：
A kind of two step diffraction phase imaging methods, it is characterised in that comprise the following steps：
The first step, makes laser beam form the microscopic image for amplifying by microscopic system, then by imaging screen IP
Grating (12), so as to be divided into diffraction light of many levels comprising microscopic image information；
Second step, the diffraction light utilize the by carrying out Fourier transformation after the 3rd lens (13) in Fourior plane
One baffle plate (16) blocks -1 order diffraction light filter window in spatial light modulator (14), only allows+1 order diffraction light all to pass through, and 0
Order diffraction light low-pass filtering, then+1 grade carries out inverse Fourier transform by the 4th lens (15) with 0 order diffraction light, completes+1
Level is entirely filtered with 0 order diffraction light, and they form the first width interferogram on CCD (18) respectively as sample light and reference light
Sample；
3rd step, in Fourior plane, removes first baffle (16), blocks spatial light modulator using second baffle (17)
(14)+1 order diffraction light filter window in, -1 grade of a permission and 0 order diffraction light pass through, then by the 4th lens (15), in CCD
(18) the second width interference pattern is formed on.
A kind of corresponding phase restoration methods of two steps diffraction phase imaging method, it is characterised in that comprise the following steps：
The first step, records two interferograms
0 grade of the optical grating diffraction forms interference pattern with+1 order diffraction light
Wherein, IS, IRRespectively Object light wave and reference light wave intensity, both sum I0=IS+IRFor background light intensity,For
The spatial variations phase place relevant with sample, spatial frequencys of the k for carrier fringe.0 grade of the optical grating diffraction and -1 order diffraction light
The interference pattern of formation is
Second step, the difference for calculating two interference patterns eliminate background light intensity
3rd step, obtains the complex analytic signal related to phase place
Hilbert transform is carried out to formula (3) first
Wherein, HT is Hilbert transform；
And then complex analytic signal is
Z=HT (I+1-I-1)+j·[-(I+1-I-1)] (5)
Wherein, j is imaginary unit；
4th step, solves sample wrapped phase
Wherein, Im and Re represents the imaginary part and real part of plural number respectively；
5th step, obtains true continuous sample phase by unpacking computing to (6) formula.
Unwanted background light intensity is eliminated using the difference of two interferograms, without the need for high-pass filtering, to ensure sample message
Integrity, so as to be applied to off-axis and slight off-axis interference.
The operation principle of the present invention is as follows：The light beam that laser instrument sends passes through polaroid along vertical direction onwards transmission,
Guarantee light beam is line polarized light, is then transmitted through by the first lens, pin hole spatial filter and expanding that the second lens are constituted
Colimated light system, the light beam Jing after beam-expanding collimation be incident to by sample, adjustable object stage, microcobjective and speculum group into it is micro-
System, so as to form the microscopic image of amplification；The light beam of Jing microscopic system outgoing has switched to collimated light beam, then along horizontal direction
Continue to transmit to relay lens and be corrected process, Beam Control is carried out by aperture afterwards, and micro-image is copied to imaging
On screen IP.A grating is placed on imaging screen IP simultaneously, can obtain the multiorder diffractive comprising image whole spatial information, then diffraction
Light isolates+1 grade and 0 by the standard 4f spatial filtering system being made up of the 3rd lens, spatial light modulator and the 4th lens
Order diffraction light or -1 grade and 0 order diffraction light.Specially：Fourior plane FP first in the 3rd lens is kept off using first baffle
Firmly -1 order diffraction light filter window in spatial light modulator, only allows+1 order diffraction light all to pass through, 0 order diffraction light low pass filtered
Ripple.According to the characteristic of space filtering, the fine structure and Mutational part of image are mainly by caused by radio-frequency component, thus Jing
0 order diffraction light of low-pass filtering lost the high-frequency information of image, then 0 grade after the filtering system described in and+1 order diffraction light
Then interference pattern can be formed on CCD respectively as reference light and sample light.Secondly, first baffle is removed, using second gear
Plate blocks+1 order diffraction light filter window in spatial light modulator, it is allowed to which -1 order diffraction light all passes through, 0 order diffraction light low pass filtered
Ripple, this two light beam isolated form the second width interference pattern on CCD.Then two interference patterns subtract each other the unwanted back of the body of elimination
Scape light intensity, the complex analytic signal related to sample to its result application Hilbert transform acquisition, finally demodulates sample phase,
So as to complete phase imaging.
The present invention has beneficial effect.1st, the present invention is using similar diffraction phase micro-imaging light path, special with common light path
Levy, highly stable, experiment may be repeated；2nd, the present invention using suitable spatial light modulator first allow+1 grade of optical grating diffraction and
0 grade of light passes through and forms the first width interference fringe, then allows -1 grade of optical grating diffraction to pass through and formed the second width with 0 grade of light and interferes
Striped, without the need for phase shift, so as to avoid the difficulty of phase shift accuracy controlling；3rd, the present invention, can by selecting different diffraction gratings
The switching of the slight off-axis interference completely off axis and using CCD spatial bandwidth is realized, because grating constant determines two interference lights
The inclination angle of ripple；4th, the present invention adopts two interference patterns to subtract each other to eliminate background picture, need not require background picture in interference pattern,
Real image and conjugate image are kept completely separate on frequency plane, and phase recovery method is applicable to traditional off-axis and slightly interferes off axis；5、
The present invention eliminates bias light with algebraic operation during whole phase recovery first, does not result in high-frequency information loss, phase
More rich information can be obtained than conventional high-pass filtering method, it is then related to sample with a Hilbert transform acquisition
Complex analytic signal, arithmetic speed are fast, the research of extraction and fast phenomenon beneficial to sample real-time phase information.Therefore the present invention should
With wide, with good practical value.
Description of the drawings
Fig. 1 is the corresponding light path schematic diagram of two steps diffraction phase imaging method of the invention.
In figure：1：Laser instrument；2：Polaroid；3：First lens；4：Pin hole spatial filter；5：Second lens；6：Sample；
7：Adjustable object stage；8：Object lens；9：Reflecting mirror；10：Relay lens；11：Aperture；12：Grating；13：3rd lens；14：Spatial light
Manipulator；15：4th lens；16：First baffle；17：Second baffle；18：CCD；IP：Imaging plane；FP：Fourior plane；+
1：+ 1 order diffraction light filter window；-1：- 1 order diffraction light filter window；0 grade：0 order diffraction light filter window；Solid black lines are+1 grade
Diffracted ray；Dotted line is 0 order diffraction light；Double dot dash line is -1 order diffraction light.
Specific embodiment
With reference to Fig. 1, the two step diffraction phase imaging methods of the present invention are using grating diffration characteristic and space filtering system
What system was realized.
The light beam that laser instrument 1 sends is converted to completely line polarized light by polaroid 2, is then incident to by the first lens
3rd, the light receiving surface of the beam-expanding collimation system of pin hole spatial filter 4 and the composition of the second lens 5, going out Jing after beam-expanding collimation system
Irradiating light beam onwards transmission to sample 6 and adjustable object stage 7, so as to become the light beam for carrying sample message, then by micro- thing
Mirror 8 is amplified and continues onwards transmission and switchs to collimated light beam to reflecting mirror 9.Wherein sample 6, adjustable object stage 7, microcobjective
8 can see an inverted microscopic system as with reflecting mirror 9.By the outgoing beam of microscopic system along horizontal direction successively
Onwards transmission is corrected process by relay lens 10 and carries out Beam Control by aperture 11, then proceed to onwards transmission extremely into
As screen IP, then the microscopic image that Jing microscopic systems amplify has been copied on imaging screen IP.Grating 12 is placed in imaging screen IP simultaneously
On, Jing optical grating diffractions are divided into diffraction light of many levels comprising microscopic image information, and then diffraction light continues on horizontal direction
Onwards transmission is by the standard 4f spatial filtering system that is made up of the 3rd lens 13, spatial light modulator 14 and the 4th lens 15.
Its spatial light modulator 14 is located on the Fourior plane of the 3rd lens, has 3 filter windows：It is followed successively by+1 grade, 0 grade and -1
Order diffraction light filter window, for isolating+1 grade with 0 order diffraction light or -1 grade and 0 order diffraction light.Concrete operations are as follows：It is first
First, -1 grade of filter window in spatial light modulator 14 is blocked using first baffle 16, through the outgoing diffraction light of the 3rd lens 13
Beam onwards transmission all passes through to 14 ,+1 order diffraction light of spatial light modulator, 0 order diffraction light low-pass filtering, and this two light beam is distinguished
As object light and reference light, onwards transmission is then proceeded to through the 4th lens 15, the first width interference pattern is formed on CCD18.
Secondly, first baffle 16 is removed ,+1 grade of filter window in spatial light modulator 14 is blocked using second baffle 17, -1 grade is selected
With 0 order diffraction light, respectively as object light and reference light, the second width interference pattern is formed on CCD18.This completes two width
The collection of interference pattern.
Described this geometric parameter of 12 grating constant of grating determines+1 grade of grating and -1 order diffraction diffraction of light angle,
So as to determine the carrier frequency of interference pattern, then also just determine interference recording mode：It is completely off-axis and slight off-axis.
A kind of corresponding phase recovery method of two steps diffraction phase imaging method of the present invention, is embodied as follows：
+ 1 grade described of optical grating diffraction can with 0 order diffraction light and -1 grade of two step interference pattern formed with 0 order diffraction light
It is expressed as：
Wherein, IS, IRRespectively Object light wave (+1 grade or -1 order diffraction light) and reference light wave (0 order diffraction light) intensity, this two
Person's sum：I0=IS+IRFor background light intensity,It is the spatial variations phase place relevant with sample, k is the spatial frequency of carrier fringe.
Then two interference patterns subtract each other elimination background light intensity, have
The Hilbert transform acquisition complex analytic signal related to sample phase is carried out to above formula
Wherein, HT is Hilbert transform, and then complex analytic signal is represented by
Z=HT (I+1-I-1)+j·[-(I+1-I-1)] (5)
Wherein, j is imaginary unit.The wrapped phase distribution of so sample can be calculated by following formula
Wherein, Im and Re represents the imaginary part and real part of plural number respectively.This can be completed finally by Phase- un- wrapping computing
The purpose of invention phase imaging.
Claims (3)
1. a kind of two steps diffraction phase imaging method, it is characterised in that comprise the following steps：
The first step, laser beam form the microscopic image for amplifying by microscopic system, and the microscopic system is by sample (6), adjustable loading
Platform (7), microcobjective (8) and reflecting mirror (9) composition；Then the microscopic image is by the imaging after the microscopic system
Grating (12) on screen IP, so as to be divided into diffraction light of many levels comprising microscopic image information；
Second step, the diffraction light by carrying out Fourier transformation after the 3rd lens (13) after the imaging screen IP, in institute
State on the Fourior plane FP of the 3rd lens (13), -1 order diffraction in spatial light modulator (14) is blocked using first baffle (16)
Light filter window, only allows+1 order diffraction light all to pass through, 0 order diffraction light low-pass filtering, then+1 order diffraction light and 0 order diffraction
Light carries out inverse Fourier transform by the 4th lens (15) behind the Fourior plane FP, completes+1 order diffraction light and 0
Order diffraction light is entirely filtered, and they form the first width interference pattern on CCD (18) respectively as sample light and reference light；
3rd step, on the Fourior plane FP, removes the first baffle (16), is blocked using second baffle (17) described
+ 1 order diffraction light filter window in spatial light modulator (14), only allows -1 order diffraction light and 0 order diffraction light to pass through, then passes through
4th lens (15), form the second width interference pattern on the CCD (18).
2. corresponding phase restoration methods of a kind of two steps diffraction phase imaging method according to claim 1, its feature exist
In comprising the following steps：
The first step, records two interferograms
0 grade of the optical grating diffraction forms interference pattern with+1 order diffraction light
Wherein, IS, IRRespectively Object light wave and reference light wave intensity, both sum I0=IS+IRFor background light intensity,It is and sample
The relevant spatial variations phase place of product, spatial frequencys of the k for carrier fringe；0 grade of the optical grating diffraction is formed with -1 order diffraction light
Interference pattern be
Second step, the difference for calculating two interference patterns eliminate background light intensity
3rd step, obtains the complex analytic signal related to phase place
Hilbert transform is carried out to formula (3) first
Wherein, HT is Hilbert transform；
And then complex analytic signal is
Z=HT (I+1-I-1)+j·[-(I+1-I-1)] (5)
Wherein, j is imaginary unit；
4th step, solves sample wrapped phase
Wherein, Im and Re represents the imaginary part and real part of plural number respectively；
5th step, obtains true continuous sample phase by unpacking computing to (6) formula.
3. corresponding phase restoration methods of a kind of two steps diffraction phase imaging method according to claim 2, its feature exist
In：Unwanted background light intensity is eliminated using the difference of two interferograms, without the need for high-pass filtering, to ensure the complete of sample message
Property, so as to be applied to off-axis and slight off-axis interference.
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| DE102015216342B3 (en) * | 2015-08-26 | 2016-12-22 | Laser-Laboratorium Göttingen e.V. | Technique for the production of periodic structures |
| CN106442413B (en) * | 2016-09-29 | 2019-02-05 | 江苏大学 | A kind of micro- Polaroid system and method for the nonopiate phase of dual-beam |
| CN108195408B (en) * | 2017-12-13 | 2020-01-21 | 哈尔滨工业大学深圳研究生院 | Two-step phase extraction method, system and medium based on tilt phase shift error correction |
| EP3781977A1 (en) * | 2018-04-17 | 2021-02-24 | ChemoMetec A/S | Depicting of objects |
| US20200004036A1 (en) * | 2018-06-28 | 2020-01-02 | Viavi Solutions Inc. | Diffractive optical device providing structured light |
| CN110081817B (en) * | 2019-04-24 | 2021-05-04 | 杭州光粒科技有限公司 | Method and device for eliminating background light, computer equipment and storage medium |
| CN110715931B (en) * | 2019-10-29 | 2022-04-12 | 上海御微半导体技术有限公司 | Automatic detection method and detection device for defects of transparent sample |
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