CN104195527A - Device and technology for plating surface of glass capillary tube with carbon film - Google Patents
Device and technology for plating surface of glass capillary tube with carbon film Download PDFInfo
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- CN104195527A CN104195527A CN201410470320.3A CN201410470320A CN104195527A CN 104195527 A CN104195527 A CN 104195527A CN 201410470320 A CN201410470320 A CN 201410470320A CN 104195527 A CN104195527 A CN 104195527A
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Abstract
The invention provides a device and a technology for plating the surface of a glass capillary tube with a carbon film. The device comprises a carbon dioxide laser printer fixed on a base and a prism matched with the carbon dioxide laser printer and further comprises a hollow casing, wherein a light transmitting window corresponding to the prism is formed in one side surface of the casing, a first gas hole and a second gas hole are formed in the other side surface of the casing, the first gas hole is communicated with a vacuum pump, and the second gas hole is communicated with an acetylene and nitrogen gas tank; an optical fiber clamp is arranged on the casing, and the inner part of the casing is hermetically sealed with the outer part of the casing. The carbon film plating device is suitable for carrying out carbon film deposition on the surface of the glass capillary tube in a chemical vapor deposition method. The glass capillary tube needing to plated with the film is inserted in a collimated glass tube, a tail fiber on the tail is tightened and sealed through a rubber pad, the optical fiber clamp, an optical fiber fixing clamp and a nut, and two turriform joint devices are respectively connected with the vacuum pump and the gas tank. The glass capillary tube coated with the carbon film can effectively prevent the corrosion of hydrogen ions in an external environment. The service life of the glass capillary tube is prolonged.
Description
Technical field
The invention belongs to fiber optic sensor technology field, relate to a kind of anti-hydrogen loss method of Fibre Optical Sensor, particularly film coating apparatus and the technique on a kind of glass capillary surface.
Background technology
In oilfield development process, need downhole temperature, pressure and other parameters to carry out Real-Time Monitoring, thereby the physical condition of understanding down-hole is optimized oil recovery scheme, improve oil-production efficiency, due to the severe environment of down-hole, the advantages such as traditional electronic sensor cannot be in the work of down-hole long-term stability, and Fibre Optical Sensor is strong, corrosion-resistant with its immunity from interference, unfailing performance is good are subject to applying more and more widely.
Nineteen eighty-three, N. Uchida has introduced a significant optical fiber attenuation variation of laying the optical cable more than 2 years in the literature, the optical fiber making is worn to the focus for people research in transmitting procedure, afterwards, by experiment and theoretical investigation learn, this be due to hydrogen molecule infiltrate fiber cores district, have an effect with the glass basis of optical fiber or form OH key, cause the phenomenon of added losses, " hydrogen loss " of the optical fiber being commonly called as.
Optical fiber downhole pressure-temperature sensor adopts the pressure measurement of F-P chamber, Fiber Bragg Grating FBG thermometric, F-P chamber adopts the quartz capillary with optical fiber same material, due in hydrionic environment, hydrogen ion can be diffused in quartz capillary, while reacts with the defect in quartz capillary, and then be diffused in optical fiber, cause optical signal transmission decay increase, affect the measuring accuracy of Fibre Optical Sensor and the work-ing life of Fibre Optical Sensor, the resistance hydrogen performance that therefore improves Fibre Optical Sensor has vital effect to the permanent stability application of Fibre Optical Sensor.
Mainly contain two kinds of physical method and chemical processes in the method for optical fiber or quartz capillary surface coating, wherein physical method mainly contains thermal evaporation, sputtering method and ion plating method etc., chemical process is mainly chemical Vapor deposition process, the main method that prevents optical fiber hydrogen loss by chemical Vapor deposition process at optical fiber or quartz capillary plated surface carbon film, chemical Vapor deposition process is exactly that two or more gaseous state starting material import in a reaction chamber in theory, then there is each other chemical reaction in them, form a kind of new deposition of material to matrix surface.
Summary of the invention
The object of this patent is to provide a kind of device and technique at quartz wool thin glass tube plated surface carbon film, and quartz wool thin glass tube is placed in a closed shell, passes through CO
2laser apparatus carries out local heating to quartz wool thin glass tube, its Heating temperature can be by arranging laser energy and intensity regulates, adopt acetylene gas as reactant gases, first closed shell is vacuumized, in closed shell, pass into again the mixed gas of acetylene and nitrogen, at high temperature first acetylene gas carries out scission of link and dehydrogenation reaction,
Finally form carbon film by polyreaction repeatedly.
Technical scheme of the present invention is, a kind of glass capillary plated surface carbon film device, it comprises the CO 2 laser marking machine being fixed on base and the prism coordinating with CO 2 laser marking machine, also comprise the housing of a hollow, be provided with the optical transmission window corresponding with prism in side of housing, be provided with the first pore and the second pore in housing another side, the first pore is communicated with vacuum pump, and the second pore is communicated with acetylene nitrogen gas tank; On housing, be provided with fiber clamp, enclosure interior and hull outside hermetic seal.
By CO is set
2the mark length of laser marking machine and laser intensity and time, can regulate its Heating temperature to quartz wool thin glass tube; The effect of prism is to be horizontal direction by vertical laser refraction, enters housing by zinc selenide diaphragm.
The concrete feature of this programme also has, and described optical transmission window adopts zinc selenide diaphragm, and the effect of zinc selenide diaphragm has been to CO
2the anti-reflection effect of laser.
Vacuum pump is connected with housing by turriform joint, and its effect is that housing is vacuumized; Acetylene nitrogen gas tank is also connected with housing by a turriform joint, by turriform joint to the reactant gases that passes into acetylene and nitrogen in housing.
On housing, be provided with view port, the eyeglass on view port is fixed on housing by high-temp glue, and the carbon film seeing through in window lens Real Time Observation housing applies situation;
Be provided with vent valve and tensimeter in case top; Vent valve, fixes and is sealed on housing by screw thread and sealing-ring, in order to relief pressure, and pressure in balance housing; Tensimeter is fixed and is sealed on housing by screw thread and silica gel, and in order to the pressure in Real-Time Monitoring housing, vent valve, in order to relief pressure, prevents dangerous generation.
Housing is fixed on the mobile platform of position by nut, and is connected with base by position mobile platform, and position mobile platform can carry out the mobile fine setting upper and lower, front, rear, left and right are sextuple with respect to base, makes quartz wool thin glass tube be placed in CO in order to regulate
2the focus place of laser.
Fiber clamp comprises collimation Glass tubing permanent seat, collimation Glass tubing permanent seat comprises head, neck and afterbody, recess diameter is greater than head and afterbody, head and afterbody side at collimation Glass tubing permanent seat are provided with sealing-ring, collimation Glass tubing permanent seat afterbody is inserted into case top with it in adaptive stepped hole, collimation Glass tubing permanent seat afterbody lower end is stained with collimation Glass tubing by high-temp glue, collimation Glass tubing internal diameter is suitable with the quartz wool thin glass tube external diameter that need plate carbon film, collimation Glass tubing is used for fixing quartz wool thin glass tube, collimation Glass tubing permanent seat head is set with intermediate sleeve, between intermediate sleeve and collimation Glass tubing permanent seat head, be provided with rubber cradle, fastening nut is sleeved on intermediate sleeve outside and realizes hermetic seal with the thread fit compression intermediate sleeve on housing.
The positioning convex being provided with in intermediate sleeve on vertical chute and collimation Glass tubing permanent seat coordinates, and convex role is to make intermediate sleeve and collimation Glass tubing permanent seat keep circumferentially location.
A technique for quartz wool thin glass tube surface-coated carbon film, it comprises the steps:
(1) use previously described glass capillary plated surface carbon film device, the glass capillary that need to plate carbon film is placed in the collimation Glass tubing of fiber clamp bottom, tail optical fiber is through rubber cradle, tighten fastening nut, compress intermediate sleeve and rubber cradle, the relative position of intermediate sleeve and housing is carried out to mark, and vacuum pump is connected with housing by turriform joint with acetylene nitrogen gas tank.
(2) regulation of carbon dioxide laser marking machine go out luminous point and prism between distance and prism be CO 2 laser marking machine to the distance sum of quartz wool thin glass tube focal length is 22cm, then carry out the fine setting of distance by position mobile platform, fine setting stops regulating when maximum to the brightness of observing quartz wool thin glass tube by view port.
(3) opening vacuum pump bleeds, being pumped to tensimeter is shown as and closes vacuum pump switch at 1 o'clock, open acetylene nitrogen gas tank switch, pass into reactant gases, ventilate after approximately 3 minutes, open vacuum pump switch limit and pass into reactant gases limit and bleed, to guarantee being full of reactant gases in housing, there is no air, then vacuum pump cuts out.
(4) opening CO 2 laser marking machine setting mark figure is rectangle, length is about 5cm, when regulation of carbon dioxide laser marking machine mark intensity is 300bit left and right, start to carry out mark, be the heating of carbon dioxide laser to quartz capillary, because marking image is rectangle, laser can carry out mark to the total length of quartz wool thin glass tube, and the heating that while also needing glass capillary is moved up and down while having avoided the heating of employing laser apparatus single-point laser, disalignment causes is inhomogeneous; In mark heating, reactant gases decomposes, and carbon film is deposited on the surface of glass capillary, to glass capillary mark 2 ~ 3 times, stops mark.
(5) positioning convex being provided with in intermediate sleeve on vertical chute and collimation Glass tubing permanent seat coordinates, and convex role is to make intermediate sleeve and collimation Glass tubing permanent seat keep circumferentially location.
(6) with the basis that is labeled as of the relative position of intermediate sleeve and housing, intermediate sleeve is clockwise rotated to 180 ° with spanner, the other one side of glass capillary is carried out to local heating plating carbon film, method is the same.
(7) after glass capillary both sides carbon film has deposited, first vacuum pump is opened the acetylene reaction gas in housing is extracted out, then turn on fastening nut, fiber clamp is taken out, the glass capillary of plating carbon film is taken out Glass tubing from collimation, so far glass capillary plated surface carbon film completes.
The beneficial effect of this programme is: this device adopts CO 2 laser marking machine as LASER Light Source, utilize the CO 2 laser marking machine can mark one segment length, the heating that while avoiding also needing quartz wool thin glass tube is moved up and down while adopting the heating of laser apparatus single-point laser, disalignment causes be inhomogeneous.This device compresses collimation Glass tubing permanent seat by screwing fastening nut, and owing to there being diameter to be slightly less than the through hole of fibre diameter on rubber cradle, extruding rubber cradle is realized the sealing to optical fiber.Two turriform piecing devices are realized and being vacuumized and the sealing of ventilate body timer and flexible pipe, by the pressure in tensimeter Real-Time Monitoring housing, utilize vent valve releasing device internal pressure.Zinc selenide eyeglass plays enhancement to carbon dioxide laser, reduces the power loss of carbon dioxide laser, realizes the local heating of carbon dioxide laser to glass capillary.
Brief description of the drawings
Fig. 1 is glass capillary plated surface carbon film device schematic diagram.Fig. 2 is glass capillary plated surface carbon film device local section structural representation.Fig. 3 is quartz wool thin glass tube and afterbody optical fiber sealing device enlarged diagram.
In figure, 1-CO 2 laser marking machine; 2-prism; 3-vacuum pump; 4-acetylene nitrogen gas tank; 5-zinc selenide diaphragm; 6-view port; 7-position mobile platform; 8-housing; 10-vent valve; 11-tensimeter; 12-fastening nut; 13-intermediate sleeve; 14-fiber clamp; 15-collimates Glass tubing; 16-rubber cradle; 17-positioning convex; 18-glass capillary; 19-tail optical fiber; 20-collimation Glass tubing permanent seat; 21-the first pore; 22-the second pore; 23-sealing-ring; 24-stepped hole.
Embodiment
in conjunction with the technical program and drawings in detail, apparatus of the present invention and the method implementation process at quartz wool thin glass tube surface-coated carbon film is described.
Embodiment 1:
As shown in Figure 1-2, a kind of glass capillary plated surface carbon film device, it comprises the CO 2 laser marking machine 1 being fixed on base and the prism 2 coordinating with CO 2 laser marking machine 1, also comprise the housing 8 of a hollow, be provided with the optical transmission window corresponding with prism 2 in 8 one sides of housing, be provided with the first pore 21 in housing 8 another sides and the second pore 22, the first pores 21 are communicated with vacuum pump 3, the second pore 22 is communicated with acetylene nitrogen gas tank 4; On housing 8, be provided with fiber clamp 14, housing 8 inside and the outside hermetic seal of housing 8.
By mark length and laser intensity and the time of CO 2 laser marking machine 1 are set, can regulate its Heating temperature to glass capillary 18; The effect of prism 2 is to be horizontal direction by vertical laser refraction, enters housing 8 by zinc selenide diaphragm 5; Described optical transmission window adopts zinc selenide diaphragm 5, and the effect of zinc selenide diaphragm 5 has been to CO
2the anti-reflection effect of laser.
Vacuum pump 3 is connected with housing 8 by turriform joint, and its effect is that housing 8 is vacuumized; Acetylene nitrogen gas tank 4 is also connected with housing 8 by a turriform joint, by turriform joint to the reactant gases that passes into acetylene and nitrogen in housing 8.
On housing 8, be provided with view port 6, the eyeglass on view port 6 is fixed on housing 8 by high-temp glue, and the carbon film seeing through in window lens 6 Real Time Observation housings 8 applies situation;
Be provided with vent valve 10 and tensimeter 11 at housing 8 tops; Vent valve 10 is fixed and is sealed on housing 8 by screw thread and sealing-ring, in order to relief pressure, and the interior pressure of balance housing 8; Tensimeter 11 is fixed and is sealed on housing 8 by screw thread and silica gel, in order to the pressure in Real-Time Monitoring housing 8, prevents dangerous generation.
Housing 8 is fixed on position mobile platform 7 by nut, and be connected with base by position mobile platform 7, position mobile platform 7 can carry out the mobile fine setting upper and lower, front, rear, left and right are sextuple with respect to base, makes glass capillary 18 be placed in CO in order to regulate
2the focus place of laser.
Fiber clamp 14 comprises collimation Glass tubing permanent seat 20, collimation Glass tubing permanent seat 20 comprises head, neck and afterbody, recess diameter is greater than head and afterbody, head and afterbody side at collimation Glass tubing permanent seat 20 are provided with sealing-ring 23, collimation Glass tubing permanent seat 20 afterbodys are inserted into housing 8 tops with it in adaptive stepped hole 24, collimation Glass tubing permanent seat 20 afterbody lower ends are stained with collimation Glass tubing 15 by high-temp glue, collimation Glass tubing 15 internal diameters are suitable with glass capillary 18 external diameters that need plate carbon film, collimation Glass tubing 15 is used for fixing glass capillary 18, collimation Glass tubing permanent seat 20 heads are set with intermediate sleeve 13, between intermediate sleeve 13 and collimation Glass tubing permanent seat 20 heads, be provided with rubber cradle 16, the thread fit compression intermediate sleeve 13 that fastening nut 12 is sleeved on intermediate sleeve 13 outsides and housing 8 realizes hermetic seal.Rubber cradle 16 central authorities have diameter to be slightly less than the through hole of fibre diameter.The positioning convex 17 being provided with in intermediate sleeve 13 on vertical chute and collimation Glass tubing permanent seat 20 coordinates, and the effect of positioning convex 17 is to make intermediate sleeve 13 and collimation Glass tubing permanent seat 20 keep circumferentially location.The model of described CO 2 laser marking machine 1 is the CO that big nation of Shenzhen laser is produced
2-H30.Glass capillary 18 is quartz wool thin glass tube.
Embodiment 2:
The present embodiment and embodiment 1 something in common repeat no more, and difference is that it is a kind of technique of glass capillary plated surface carbon film, and it has used the glass capillary surface-coated carbon film device described in embodiment 1, and it comprises the steps:
(1) put up glass capillary plated surface carbon film device, housing 8 is fixed on position mobile platform 7, rubber cradle 16 is put between intermediate sleeve 13 and collimation Glass tubing permanent seat 20, the glass capillary 18 that need to plate carbon film is placed in the collimation Glass tubing 15 of fiber clamp 14 bottoms, tail optical fiber 19 is through rubber cradle 16, tighten fastening nut 12, compress intermediate sleeve 13 and rubber cradle 16, intermediate sleeve 13 and the relative position of housing 8 are carried out to mark, and vacuum pump 3 is connected with housing 8 by turriform joint with acetylene nitrogen gas tank 4.
(2) regulation of carbon dioxide laser marking machine 1 go out luminous point and prism 2 between distance and prism 2 be CO 2 laser marking machine 1 to the distance sum of glass capillary 18 focal length is 22cm, then carry out the fine setting of distance by position mobile platform 7, fine setting stops regulating when maximum to the brightness of observing glass capillary 18 by view port 6.
(3) opening vacuum pump 3 bleeds, bleed approximately 5 minutes, tensimeter is shown as closes vacuum pump 3 switches at 1 o'clock, open acetylene nitrogen gas tank 4 switches, pass into reactant gases, ventilate after approximately 3 minutes, opening vacuum pump 3 switch limits passes into reactant gases limit and bleeds, to guarantee being full of reactant gases in housing, there is no air, then vacuum pump 3 cuts out.
(4) open the control software of CO 2 laser marking machine 1, drawing mark figure is rectangle, length is about 5cm, when regulation of carbon dioxide laser marking machine 1 mark intensity is 300bit left and right, start to carry out mark, be the heating of carbon dioxide laser to glass capillary 18, because marking image is rectangle, laser can carry out mark to the total length of glass capillary 18, and the heating that while also needing glass capillary 18 is moved up and down while having avoided the heating of employing laser apparatus single-point laser, disalignment causes is inhomogeneous; In mark heating, reactant gases decomposes, and carbon film is deposited on the surface of glass capillary 18, to glass capillary 18 mark 2 ~ 3 times, stops mark.
(5) positioning convex 17 being provided with in intermediate sleeve 13 on vertical chute and collimation Glass tubing permanent seat 20 coordinates, and the effect of positioning convex 17 is to make intermediate sleeve 13 and collimation Glass tubing permanent seat 20 keep circumferentially location.
(6) with the basis that is labeled as of the relative position of intermediate sleeve 13 and housing 8, intermediate sleeve 13 is clockwise rotated to 180 ° with spanner, the other one side of glass capillary 18 is carried out to local heating plating carbon film, method is the same.
(7) after glass capillary 18 both sides carbon films have deposited, first vacuum pump 3 is opened the acetylene reaction gas in housing 8 is extracted out, then turn on fastening nut 12, fiber clamp 14 is taken out, take out from collimate Glass tubing 15 at the glass capillary 18 that will plate carbon film, so far glass capillary 18 plated surface carbon films complete.
The model of CO 2 laser marking machine 1 described in the present embodiment is the CO that big nation of Shenzhen laser is produced
2-H30.Glass capillary 18 is quartz wool thin glass tube.
Claims (9)
1. a glass capillary plated surface carbon film device, it comprises the CO 2 laser marking machine being fixed on base and the prism coordinating with CO 2 laser marking machine, also comprise the housing of a hollow, be provided with the optical transmission window corresponding with prism in side of housing, be provided with the first pore and the second pore in housing another side, the first pore is communicated with vacuum pump, and the second pore is communicated with acetylene nitrogen gas tank; On housing, be provided with fiber clamp, enclosure interior and hull outside hermetic seal.
2. glass capillary plated surface carbon film device according to claim 1, is characterized in that described optical transmission window adopts zinc selenide diaphragm.
3. glass capillary plated surface carbon film device according to claim 1, is characterized in that vacuum pump passes through turriform joint and is connected with housing; Acetylene nitrogen gas tank is also connected with housing by a turriform joint.
4. glass capillary plated surface carbon film device according to claim 1, is characterized in that being provided with view port on housing, and the eyeglass on view port is fixed on housing by high-temp glue.
5. glass capillary plated surface carbon film device according to claim 1, is characterized in that being provided with vent valve and tensimeter in case top.
6. glass capillary plated surface carbon film device according to claim 1, is characterized in that housing passes through position mobile platform and is connected with base, and position mobile platform can carry out the mobile fine setting upper and lower, front, rear, left and right are sextuple with respect to base.
7. glass capillary plated surface carbon film device according to claim 1, it is characterized in that fiber clamp comprises collimation Glass tubing permanent seat, collimation Glass tubing permanent seat comprises head, neck and afterbody, recess diameter is greater than head and afterbody, head and afterbody side at collimation Glass tubing permanent seat are provided with sealing-ring, collimation Glass tubing permanent seat afterbody is inserted into case top with it in adaptive stepped hole, collimation Glass tubing permanent seat afterbody lower end is stained with collimation Glass tubing by high-temp glue, collimation Glass tubing internal diameter is suitable with the quartz wool thin glass tube external diameter that need plate carbon film, collimation Glass tubing is used for fixing quartz wool thin glass tube, collimation Glass tubing permanent seat head is set with intermediate sleeve, between intermediate sleeve and collimation Glass tubing permanent seat head, is provided with rubber cradle, and fastening nut is sleeved on intermediate sleeve outside and realizes hermetic seal with the thread fit compression intermediate sleeve on housing.
8. glass capillary plated surface carbon film device according to claim 7, is characterized in that in intermediate sleeve, being provided with vertical chute joins with the positioning convex cunning on collimation Glass tubing permanent seat.
9. a technique for quartz wool thin glass tube surface-coated carbon film, it comprises the steps:
(1) use glass capillary plated surface carbon film device as claimed in claim 1, the glass capillary that need to plate carbon film is placed in the collimation Glass tubing of fiber clamp bottom, tail optical fiber is through rubber cradle, tighten fastening nut, compress intermediate sleeve and rubber cradle, the relative position of intermediate sleeve and housing is carried out to mark, and vacuum pump is connected with housing by turriform joint with acetylene nitrogen gas tank;
(2) regulation of carbon dioxide marking machine go out luminous point and prism between distance and prism be the focal length of carbonic acid gas marking machine to the distance sum of quartz wool thin glass tube, then carry out the fine setting of distance by position mobile platform, fine setting stops regulating when maximum to the brightness of observing quartz wool thin glass tube by view port;
(3) opening vacuum pump bleeds, being pumped to tensimeter is shown as and closes vacuum pump switch at 1 o'clock, open acetylene nitrogen gas tank switch, pass into reactant gases, ventilate after 3 minutes, open vacuum pump switch limit and pass into reactant gases limit and bleed, to guarantee being full of reactant gases in housing, there is no air, then vacuum pump cuts out;
(4) opening carbonic acid gas marking machine setting mark figure is rectangle, length is 5cm, when regulation of carbon dioxide marking machine mark intensity is 300bit, start to carry out mark, be the heating of carbon dioxide laser to quartz capillary, because mark figure is rectangle, laser can carry out mark to the total length of glass capillary, and the heating that while also needing glass capillary is moved up and down while having avoided the heating of employing laser apparatus single-point laser, disalignment causes is inhomogeneous; In mark heating, reactant gases decomposes, and carbon film is deposited on the surface of glass capillary, to glass capillary mark 2 ~ 3 times, stops mark;
(5) positioning convex being provided with in intermediate sleeve on vertical chute and collimation Glass tubing permanent seat coordinates, and convex role is to make intermediate sleeve and collimation Glass tubing permanent seat keep circumferentially location;
(6) with the basis that is labeled as of the relative position of intermediate sleeve and housing, intermediate sleeve is clockwise rotated to 180 ° with spanner, the other one side of glass capillary is carried out to local heating plating carbon film, method is the same;
(7) after glass capillary both sides carbon film has deposited, first vacuum pump is opened the acetylene reaction gas in housing is extracted out, then turn on fastening nut, fiber clamp is taken out, the glass capillary of plating carbon film is taken out Glass tubing from collimation, so far glass capillary plated surface carbon film completes.
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CN201510331571.8A CN104947066B (en) | 2014-09-16 | 2014-09-16 | Capillary glass pipe surface plates carbon technology |
CN201410470320.3A CN104195527B (en) | 2014-09-16 | 2014-09-16 | Glass capillary plated surface carbon film device |
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CN201410470320.3A CN104195527B (en) | 2014-09-16 | 2014-09-16 | Glass capillary plated surface carbon film device |
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CN201410470320.3A Active CN104195527B (en) | 2014-09-16 | 2014-09-16 | Glass capillary plated surface carbon film device |
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Cited By (2)
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CN108508531A (en) * | 2018-03-22 | 2018-09-07 | 中国人民解放军国防科技大学 | Capillary glass tube heating and air suction device |
CN112146956A (en) * | 2020-09-24 | 2020-12-29 | 中国科学院重庆绿色智能技术研究院 | Glass needle tip nanopore filling device based on vacuum method and using method thereof |
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TWI651038B (en) * | 2017-02-18 | 2019-02-11 | 蔡鴻玟 | Device for heat transmission, dissipation and highly efficient capillary siphoning action and method for manufacturing the same |
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CN112146956B (en) * | 2020-09-24 | 2023-06-20 | 中国科学院重庆绿色智能技术研究院 | Glass needle tip nano-hole filling device based on vacuum method and using method thereof |
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CN104947066B (en) | 2017-08-15 |
CN104947066A (en) | 2015-09-30 |
CN104195527B (en) | 2015-08-26 |
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