CN102866468A - Hollow photonic crystal optical fiber gas absorption cell device and manufacturing method thereof - Google Patents

Hollow photonic crystal optical fiber gas absorption cell device and manufacturing method thereof Download PDF

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CN102866468A
CN102866468A CN2012103276758A CN201210327675A CN102866468A CN 102866468 A CN102866468 A CN 102866468A CN 2012103276758 A CN2012103276758 A CN 2012103276758A CN 201210327675 A CN201210327675 A CN 201210327675A CN 102866468 A CN102866468 A CN 102866468A
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photonic crystal
hollow
crystal fiber
airtight chamber
airtight
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黄崇德
程楠
皮浩洋
陈迪俊
陈高庭
蔡海文
瞿荣辉
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Shanghai Institute of Optics and Fine Mechanics of CAS
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Abstract

一种空心光子晶体光纤气体吸收池装置及制作方法,该装置由空心光子晶体光纤、保护套、气密室、真空计、真空阀、窗口玻璃、耦合镜、调节组件构成。本发明利用空心光子晶体光纤柔韧可弯曲,纤芯可以充入气体的特点,用气密室、真空计、真空阈实现气体的定量注入,将光束经耦合镜和窗口玻璃耦合进入空心光子晶体光纤中,用光纤金属化及馈通焊工艺进行密封,本发明装置具有结构紧凑小巧,可靠性高,气压可控,可重复使用,光束截面与气体截面重合度高的特点。可用于气体光谱分析实验,稳频激光器频率参考的气体吸收池。

A hollow photonic crystal fiber gas absorption cell device and its manufacturing method. The device is composed of a hollow photonic crystal fiber, a protective sleeve, an airtight chamber, a vacuum gauge, a vacuum valve, a window glass, a coupling mirror and an adjustment component. The invention utilizes the characteristics that the hollow photonic crystal fiber is flexible and bendable, and the fiber core can be filled with gas, and the quantitative injection of gas is realized by using an airtight chamber, a vacuum gauge, and a vacuum threshold, and the light beam is coupled into the hollow photonic crystal fiber through a coupling mirror and a window glass. , sealed with optical fiber metallization and feed-through welding process, the device of the present invention has the characteristics of compact structure, high reliability, controllable air pressure, reusable, high coincidence degree of beam cross-section and gas cross-section. It can be used for gas spectrum analysis experiments and gas absorption cells for frequency-stabilized laser frequency reference.

Description

空心光子晶体光纤气体吸收池装置及其制作方法Hollow photonic crystal fiber gas absorption cell device and manufacturing method thereof

技术领域 technical field

本发明涉及一种空心光子晶体光纤气体吸收池装置及其制作方法,该装置可应用于气体吸收谱分析、激光频率稳定、冷原子钟等领域。The invention relates to a hollow photonic crystal fiber gas absorption cell device and a manufacturing method thereof, which can be applied to the fields of gas absorption spectrum analysis, laser frequency stabilization, cold atomic clocks and the like.

背景技术 Background technique

在气体吸收谱分析、激光频率稳定、冷原子钟等领域,都需要有一个特定频率且频率稳定性高的激光器,利用气体吸收线作为频率参考进行稳频就是实现这种激光器的一种方法。In the fields of gas absorption spectrum analysis, laser frequency stabilization, and cold atomic clocks, a laser with a specific frequency and high frequency stability is required. Using gas absorption lines as a frequency reference to stabilize frequency is a method to realize this laser.

气体吸收池是用气体吸收线作为频率参考实现激光稳频的必要部件之一。对于某些吸收强度比较弱的气体,需要有光与气体的相互作用距离较长。此外特别对于星载、机载、车载的应用,对稳频激光器还有重量和抗震的要求,因此气体吸收池还要具有体积小,重量轻,稳健性高的特点。传统的气体吸收池典型代表有White型吸收池(参考在先技术[1]:J.U.White.“Long optical paths of largeaperture”,J.O.S.A,Vol.32,May 1942)和Herriott型吸收池(参考在先技术[2]:D.Herriott,H.Kogelnok,and R.Kompfner,“Off-Axis Paths in SphericalMirror Interferometers”,Applied Optics,Vol.3,Iss.4,1 April 1964),都需要控制光束入射角度,利用腔镜让光在空间中实现多次反射来增加光与气体的相互作用距离,光学稳定性较难保证;这两种结构体积较大,重量较重,要做好气密性比较有难度;而且容易损坏,可靠性不高。所以这两种结构的气体吸收池不能满足星载、机载、车载的应用对光学稳定性,气密性,可靠性的特殊要求。The gas absorption cell is one of the necessary components to use the gas absorption line as a frequency reference to achieve laser frequency stabilization. For some gases with relatively weak absorption intensity, a longer interaction distance between light and gas is required. In addition, especially for spaceborne, airborne, and vehicle-mounted applications, there are requirements for weight and shock resistance for frequency-stabilized lasers. Therefore, the gas absorption cell must have the characteristics of small size, light weight, and high robustness. Typical representatives of traditional gas absorption cells are White type absorption cells (refer to prior art [1]: J.U.White. "Long optical paths of large aperture", J.O.S.A, Vol.32, May 1942) and Herriott type absorption cells (refer to prior art Technology [2]: D. Herriott, H. Kogelnok, and R. Kompfner, "Off-Axis Paths in SphericalMirror Interferometers", Applied Optics, Vol.3, Iss.4, 1 April 1964), all need to control the beam incident angle , the use of cavity mirrors allows light to achieve multiple reflections in space to increase the interaction distance between light and gas, and it is difficult to ensure optical stability; these two structures are large in size and heavy in weight, and it is difficult to make airtightness ; And easily damaged, the reliability is not high. Therefore, the gas absorption cells of these two structures cannot meet the special requirements for optical stability, airtightness, and reliability of spaceborne, airborne, and vehicle-mounted applications.

P.S.Light等人提出了一种利用空心光子晶体光纤实现体积小,重量轻,稳健性高的乙炔气体吸收池的方案(参考在先技术[3]:P.S.Light,F.Couny,andF.Benabid.“Low optical insertion-loss and vacuum-pressure all-fiberacetylene cell based on hollow-core photonic crystal fiber”,Optics Letters,Vol.31,No.17,1 September 2006),该方案是先在空心光子晶体光纤中充入指定气压的乙炔气体,再充入氦气直到气压略大于环境气压,再将空心光子晶体光纤两端与普通单模光纤熔接,最后等待氦气通过空心光子晶体光纤的包层全部渗透扩散到光纤外部,完成空心光子晶体光纤气体吸收池的制作。但是该方案存在下述问题:一旦气体吸收池制作完成,气池内的气压或者气体种类就无法改变。所以该方案只能制作确定气体各类并且确定气压的气体吸收池,不适用于需要对气压进行调整的稳频参数优化的实验环节。P.S.Light et al. proposed a scheme to realize small volume, light weight and high robustness of acetylene gas absorption cell by using hollow-core photonic crystal fiber (refer to prior art [3]: P.S.Light, F.Couny, and F.Benabid. "Low optical insertion-loss and vacuum-pressure all-fiberacetylene cell based on hollow-core photonic crystal fiber", Optics Letters, Vol.31, No.17, 1 September 2006), this scheme is first in the hollow-core photonic crystal fiber Fill the acetylene gas with the specified pressure, and then fill it with helium until the pressure is slightly higher than the ambient pressure, then weld the two ends of the hollow-core photonic crystal fiber to the ordinary single-mode fiber, and finally wait for the helium to penetrate and diffuse through the cladding of the hollow-core photonic crystal fiber To the outside of the optical fiber, the fabrication of the hollow photonic crystal optical fiber gas absorption cell is completed. However, this solution has the following problems: once the gas absorption cell is fabricated, the air pressure or gas type in the gas cell cannot be changed. Therefore, this scheme can only make gas absorption cells that determine the various types of gases and determine the air pressure, and is not suitable for the experimental link of frequency stabilization parameter optimization that needs to adjust the air pressure.

Poberezhskiy I.Y.等人提出一种可以实现充放气体和气压控制的空心光子晶体光纤气体吸收池的方案(参考在先技术[4]:Ilya Y.Poberezhskiy,PatrickMeras,and et al.“Compact and robust refilling and connectorization ofa hollow core photonic crystal fiber gas reference cells”,The 20th AnnualMeeting of the IEEE Laser and Electro-Optics Society,2007),该方案将空心光子晶体光纤与多模光纤用硅基V型槽对准,实现光耦合,并且两个光纤端之间留有一点空隙,以供充放气体,对准的光纤与V型槽放在一块铝板上,光纤接头处用一石英管保护,用环氧树脂密封,石英管可以接上阀门,抽真空装置或者充气装置,实现可充放气体、实现气压控制的吸收池。但是环氧树脂密封方法的气密性与牢固程度与金属焊接方法相比要差;另外,空心光子晶体光纤与普通单模或者多模光纤的纤径不一样,实现光纤对准的V型槽不可能用机械加工的方法实现,必须用光刻的方法制作。Poberezhskiy IY et al. proposed a solution for a hollow photonic crystal fiber gas absorption cell that can realize gas filling and discharging and air pressure control (refer to the prior art [4]: Ilya Y.Poberezhskiy, PatrickMeras, and et al. "Compact and robust refilling and connectorization of a hollow core photonic crystal fiber gas reference cells", The 20 th Annual Meeting of the IEEE Laser and Electro-Optics Society, 2007), this scheme aligns the hollow core photonic crystal fiber with the multimode fiber with a silicon-based V-groove, Optical coupling is realized, and there is a little space between the two fiber ends for filling and discharging gas. The aligned optical fiber and V-groove are placed on an aluminum plate, and the optical fiber joint is protected by a quartz tube and sealed with epoxy resin , the quartz tube can be connected to a valve, a vacuum device or an inflatable device to realize an absorption pool that can be filled and discharged with air pressure control. However, the airtightness and firmness of the epoxy resin sealing method are inferior to those of the metal welding method; in addition, the fiber diameter of the hollow-core photonic crystal fiber is different from that of the ordinary single-mode or multi-mode fiber, and the V-groove for fiber alignment is realized. It is impossible to realize it by machining, and it must be made by photolithography.

发明内容 Contents of the invention

本发明的目的在于克服上述在先技术的不足,提供空心光子晶体光纤气体吸收池装置及其制作方法,该方案用光纤金属化方案与馈通焊、金属焊接工艺,实现高气密性,高稳健性,可以充放气体,控制气压的空心光子晶体光纤气体吸收池。The purpose of the present invention is to overcome the deficiencies of the above-mentioned prior art, and provide a hollow photonic crystal fiber gas absorption cell device and a manufacturing method thereof. Robust, gas-filled and gas-controlled hollow-core photonic crystal fiber gas absorption cell.

本发明的技术解决方案如下:Technical solution of the present invention is as follows:

一种空心光子晶体光纤气体吸收池装置,其特点在于该装置由空心光子晶体光纤及其两端的气密接头构成,所述的气密接头具有相同的结构:A hollow photonic crystal fiber gas absorption cell device is characterized in that the device is composed of a hollow photonic crystal fiber and airtight joints at both ends thereof, and the airtight joints have the same structure:

所述的气密接头包括保护套、气密室、真空计、真空阀、窗口玻璃、外调节组件、内调节组件、耦合镜,上述元部件的连接关系如下:所述的气密室具有光纤接口、通气管和气密室窗口,所述的光纤接口和气密室窗口相对,所述的光纤接口用于连接所述的空心光子晶体光纤,该空心光子晶体光纤与光纤接口的连接部位用保护套保护,在所述的通气管上安装所述的真空计和真空阀,所述的窗口玻璃镀以环型金属膜,与所述的气密室窗口用金属焊接工艺连接,所述的外调节组件从气密室窗口方向与所述的气密室用螺钉固定,所述的内调节组件是一个中空圆筒,圆筒外有细螺纹的构件,所述的耦合镜固定在所述的内调节组件的圆筒的内端上,该内调节组件的外端接具有FC接头的普通光纤,所述的内调节组件的外细螺纹旋入所述的外调节组件的内螺纹中,通过内调节组件的旋转以改变内调节组件与外调节组件的配合深度,该内调节组件的位置通过外调节组件的径向螺钉锁定。The airtight joint includes a protective cover, an airtight chamber, a vacuum gauge, a vacuum valve, a window glass, an external adjustment assembly, an internal adjustment assembly, and a coupling mirror. The connection relationship of the above components is as follows: the airtight chamber has an optical fiber interface, The ventilation tube and the window of the airtight chamber, the optical fiber interface is opposite to the window of the airtight chamber, the optical fiber interface is used to connect the hollow photonic crystal fiber, and the connection part between the hollow photonic crystal fiber and the optical fiber interface is protected by a protective sleeve. The vacuum gauge and vacuum valve are installed on the vent pipe, the window glass is coated with a ring-shaped metal film, and connected with the window of the airtight chamber by metal welding process, and the external adjustment assembly is connected from the window of the airtight chamber The direction and the airtight chamber are fixed with screws, the inner adjustment assembly is a hollow cylinder with fine threaded components outside the cylinder, and the coupling mirror is fixed inside the cylinder of the inner adjustment assembly On the end, the outer end of the inner adjustment component is connected with an ordinary optical fiber with a FC connector. The outer fine thread of the inner adjustment component is screwed into the inner thread of the outer adjustment component, and the inner adjustment component is rotated to change the inner thread. The matching depth of the adjustment assembly and the outer adjustment assembly, the position of the inner adjustment assembly is locked by the radial screw of the outer adjustment assembly.

所述空心光子晶体光纤与所述的气密室采用馈通焊工艺连接,即所述的空心光子晶体光纤经过光纤金属化处理后,插入所述的气密室的光纤接口中,用馈通焊工艺连接。The hollow photonic crystal fiber is connected to the airtight chamber by a feed-through welding process, that is, the hollow photonic crystal fiber is inserted into the optical fiber interface of the airtight chamber after the optical fiber metallization process, and is welded by a feed-through welding process. connect.

所述的空心光子晶体光纤气体吸收池装置的制作方法,其特点在于该方法包括如下步骤:The manufacturing method of the hollow photonic crystal fiber gas absorption cell device is characterized in that the method comprises the following steps:

1)、空心光子晶体光纤与气密接头连接:1), the hollow photonic crystal fiber is connected with the airtight connector:

①首先在窗口玻璃接触气密室的区域用磁控溅射的方法镀上一层环形金属膜,再用金属焊接工艺把窗口玻璃焊接到气密室的窗口上;①Firstly, a layer of annular metal film is coated on the area where the window glass contacts the airtight chamber by magnetron sputtering, and then the window glass is welded to the window of the airtight chamber by a metal welding process;

②在气密室的通气管上安装好真空计与真空阀;② Install a vacuum gauge and a vacuum valve on the vent pipe of the airtight chamber;

③在空心光子晶体光纤其中一端选取合适长度去除的涂覆层,在其端面位置涂上保护胶,封住空心光子晶体光纤端面的开口,防止在光纤金属化过程中化学试剂进入空心光子晶体光纤的内部造成堵塞;用现有的光纤金属化工艺在空心光子晶体光纤一端已经除掉涂覆层的表面镀上金属层,再把涂有保护胶的头部割掉,将经过上述处理的空心光子晶体光纤的一端插入到气密室的光纤接口用现有的馈通焊工艺焊接,最后在连接处外部套好保护套;③ Select a suitable length of coating layer removed from one end of the hollow-core photonic crystal fiber, and apply protective glue on the end face to seal the opening of the end face of the hollow-core photonic crystal fiber to prevent chemical reagents from entering the hollow-core photonic crystal fiber during the metallization process of the fiber The interior of the hollow photonic crystal fiber is blocked by using the existing optical fiber metallization process to plate a metal layer on the surface of the hollow photonic crystal fiber that has been removed from the coating layer, and then cut off the head coated with the protective glue, and the hollow photonic crystal fiber that has undergone the above treatment One end of the photonic crystal fiber is inserted into the fiber interface of the airtight chamber and welded with the existing feed-through welding process, and finally the protective sleeve is put on the outside of the connection;

④把耦合镜用光学环氧胶固定在内调节组件上,依次装配好外调节组件,内调节组件,该内调节组件的外端接具有FC接头的普通光纤;④Fix the coupling mirror on the inner adjustment assembly with optical epoxy glue, assemble the outer adjustment assembly and the inner adjustment assembly in sequence, and the outer end of the inner adjustment assembly is connected with a common optical fiber with FC connector;

2)、空心光子晶体光纤的另一端与气密接头按如上步骤1)进行连接;2) The other end of the hollow-core photonic crystal fiber is connected to the airtight joint according to step 1) above;

3)、对连接好的空心光子晶体光纤气体吸收池装置进行光路调节:把其中一个气密接头的普通光纤接上激光器;另一个气密接头的外调节组件与气密室暂时分开,在其气密室窗口处用光功率计探测从空心光子晶体光纤出射的光功率;调节前一个气密接头外调节组件和内调节组件的位置,直到光功率计探测到的光功率最大;然后把光功率计去掉,把后一个气密接头的外调节组件和气密室连接起来,在其普通光纤后接上光功率计,调节其外调节组件和内调节组件的位置,直到光功率计探测到的光功率最大,完成光路调节,制作完成。3) Adjust the optical path of the connected hollow photonic crystal fiber gas absorption cell device: connect the ordinary optical fiber of one of the airtight joints to the laser; the external adjustment component of the other airtight joint is temporarily separated from the airtight chamber. Use an optical power meter to detect the optical power emitted from the hollow photonic crystal fiber at the window of the secret room; adjust the position of the outer adjustment component and the inner adjustment component of the previous airtight joint until the optical power detected by the optical power meter is maximum; then put the optical power meter Remove it, connect the outer adjustment component of the latter airtight joint with the airtight chamber, connect an optical power meter behind the ordinary optical fiber, and adjust the positions of the outer adjustment component and the inner adjustment component until the optical power detected by the optical power meter reaches the maximum , the optical path adjustment is completed, and the production is completed.

所述的气密室用于保持空心光子晶体光纤内部的气密性,通过真空计与真空阀调节控制空心光子晶体光纤内部的气压,另外还可以把气密室的通气管密封起来,撤掉真空计、真空阀、气瓶和真空泵,作为小巧的气体吸收池使用。The airtight chamber is used to maintain the airtightness inside the hollow photonic crystal fiber, and the air pressure inside the hollow photonic crystal fiber can be adjusted and controlled by a vacuum gauge and a vacuum valve. In addition, the ventilation pipe of the airtight chamber can be sealed, and the vacuum gauge can be removed. , vacuum valve, cylinder and vacuum pump, used as a small gas absorption pool.

所述的外调节组件和内调节组件是用于调节空心光子晶体光纤与普通光纤的相对位置,用以保证两者之间的耦合效率最大。The outer adjustment component and the inner adjustment component are used to adjust the relative position of the hollow-core photonic crystal fiber and the ordinary fiber, so as to ensure the maximum coupling efficiency between the two.

本发明与在先技术相比,有如下优点和积极效果:Compared with the prior art, the present invention has the following advantages and positive effects:

1、与在先技术[1]、[2]相比,本发明的空心光子晶体光纤气体吸收池体积小,质量轻,结构牢固可靠,气密性高,更适于在星载、机载等恶劣环境下使用。1. Compared with the prior art [1] and [2], the hollow photonic crystal optical fiber gas absorption cell of the present invention is small in volume, light in weight, firm and reliable in structure, and high in air tightness, and is more suitable for spaceborne and airborne Use in harsh environments.

2、与在先技术[3]相比,本发明的空心光子晶体光纤气体吸收池可以更换气体和改变气压,可以用于调整气压的稳频参数优化的实验环节。2. Compared with the prior art [3], the hollow photonic crystal fiber gas absorption cell of the present invention can replace the gas and change the air pressure, and can be used in the experiment link of optimizing the frequency stabilization parameters of the air pressure.

3、与在先技术[4]相比,本发明的空心光子晶体光纤气体吸收池用馈通焊工艺和金属焊接工艺实现密封,气密性和结构牢固程序比用环氧树脂或其他胶粘的方法更好,另外没有用到V型槽,不用光刻工艺,加工更简单。3. Compared with the prior art [4], the hollow photonic crystal fiber gas absorption cell of the present invention is sealed with a feed-through welding process and a metal welding process, and the airtightness and firm structure are better than epoxy resin or other adhesives The method is better, in addition, no V-groove is used, no photolithography process is required, and the processing is simpler.

总之,本发明装置具有结构紧凑小巧,可靠性高,气压可控,可重复使用,光束截面与气体截面重合度高的特点。可用于气体光谱分析实验,稳频激光器频率参考的气体吸收池,In a word, the device of the present invention has the characteristics of compact structure, high reliability, controllable air pressure, reusability, and high coincidence degree of beam cross-section and gas cross-section. Can be used for gas spectrum analysis experiments, gas absorption cells for frequency-stabilized laser frequency reference,

附图说明 Description of drawings

图1是本发明空心光子晶体光纤气体吸收池装置的结构示意图Fig. 1 is the structural representation of hollow photonic crystal fiber gas absorption cell device of the present invention

图2是本发明空心光子晶体光纤气体吸收池装置的结构另一实施例结构示意图Fig. 2 is a structural schematic diagram of another embodiment of the structure of the hollow photonic crystal fiber gas absorption cell device of the present invention

具体实施方式 Detailed ways

下面结合实例和附图对本发明进行进一步说明,但不应以此限制本发明的保护范围。The present invention will be further described below in conjunction with examples and accompanying drawings, but the protection scope of the present invention should not be limited thereby.

先请参阅图1,图1是本发明空心光子晶体光纤气体吸收池装置的结构示意图图。由图可见,本发明空心光子晶体光纤气体吸收池装置,由空心光子晶体光纤1及其两端的气密接头构成,所述的气密接头具有相同的结构:Please refer to FIG. 1 first. FIG. 1 is a schematic diagram of the structure of the hollow photonic crystal fiber gas absorption cell device of the present invention. It can be seen from the figure that the hollow photonic crystal fiber gas absorption cell device of the present invention is composed of a hollow photonic crystal fiber 1 and airtight joints at both ends thereof, and the airtight joints have the same structure:

所述的气密接头包括保护套2、气密室3、真空计4、真空阀5、窗口玻璃6、外调节组件7、内调节组件8、耦合镜9,上述元部件的连接关系如下:所述的气密室3具有光纤接口3a、通气管3b和气密室窗口3c,所述的光纤接口3a和气密室窗口3c相对,所述的光纤接口3a用于连接所述的空心光子晶体光纤1,该空心光子晶体光纤1与光纤接口3a的连接部位用保护套2保护,在所述的通气管3b上安装所述的真空计4和真空阀5,所述的窗口玻璃6镀以环型金属膜,与所述的气密室窗口3c用金属焊接工艺连接,所述的外调节组件7从气密室窗口3c方向与所述的气密室3用螺钉固定,所述的内调节组件8是一个中空圆筒,圆筒外有细螺纹的构件,所述的耦合镜9固定在所述的内调节组件8的圆筒的内端上,该内调节组件8的外端接具有FC接头的普通光纤10,所述的内调节组件8的外细螺纹旋入所述的外调节组件7的内螺纹中,通过内调节组件8的旋转以改变内调节组件8与外调节组件7的配合深度,该内调节组件8的位置通过外调节组件7的径向螺钉锁定。The airtight joint includes a protective cover 2, an airtight chamber 3, a vacuum gauge 4, a vacuum valve 5, a window glass 6, an external adjustment assembly 7, an internal adjustment assembly 8, and a coupling mirror 9. The connection relationship of the above components is as follows: Described airtight chamber 3 has optical fiber interface 3a, air pipe 3b and airtight chamber window 3c, and described optical fiber interface 3a is opposite to airtight chamber window 3c, and described optical fiber interface 3a is used for connecting described hollow photonic crystal fiber 1, and this hollow The connection part between the photonic crystal fiber 1 and the optical fiber interface 3a is protected by a protective cover 2, the vacuum gauge 4 and the vacuum valve 5 are installed on the vent pipe 3b, the window glass 6 is coated with a ring-shaped metal film, It is connected with the airtight chamber window 3c by a metal welding process, the outer adjustment assembly 7 is fixed with the airtight chamber 3 from the direction of the airtight chamber window 3c, and the inner adjustment assembly 8 is a hollow cylinder , a member with fine threads outside the cylinder, the coupling mirror 9 is fixed on the inner end of the cylinder of the inner adjustment assembly 8, the outer end of the inner adjustment assembly 8 is connected with a common optical fiber 10 with an FC connector, The external fine thread of the internal adjustment assembly 8 is screwed into the internal thread of the external adjustment assembly 7, and the depth of cooperation between the internal adjustment assembly 8 and the external adjustment assembly 7 can be changed by the rotation of the internal adjustment assembly 8. The position of the assembly 8 is locked by the radial screws of the outer adjustment assembly 7 .

所述空心光子晶体光纤1与所述的气密室3的连接采用馈通焊工艺连接,即所述的空心光子晶体光纤1的一端1a经过光纤金属化处理后,插入所述的气密室3的光纤接口3a中,用馈通焊工艺连接。The connection between the hollow photonic crystal fiber 1 and the airtight chamber 3 is connected by a feed-through welding process, that is, one end 1a of the hollow photonic crystal fiber 1 is inserted into the airtight chamber 3 after being processed by optical fiber metallization. The optical fiber interface 3a is connected by a feed-through welding process.

外调节组件7与气密室3用螺钉固定,借助机械加工公差可以微量调节接触面方向的位移,内调节组件8与外调节组件7通过细螺纹连接,通过旋转可以改变内调节组件8与外调节组件7的配合深度,并可以通过外调节组件7用螺钉锁死内调节组件8的位置,耦合镜9固定在内调节组件8上,FC接头的普通光纤10接在内调节组件8上。The outer adjustment component 7 and the airtight chamber 3 are fixed with screws, and the displacement in the direction of the contact surface can be slightly adjusted by means of machining tolerances. The inner adjustment component 8 and the outer adjustment component 7 are connected by fine threads, and the inner adjustment component 8 and the outer adjustment can be changed by rotation. The matching depth of the component 7 can be locked by the external adjustment component 7 with screws to lock the position of the internal adjustment component 8, the coupling mirror 9 is fixed on the internal adjustment component 8, and the ordinary optical fiber 10 of the FC connector is connected to the internal adjustment component 8.

使用时,将空心光子晶体光纤1的一端1a作为气体入口,所连接的气密室3的通气管3b与气瓶连接,实现气体的充入;空心光子晶体光纤1的另一端为气体出口,该端的通气管3b与真空泵连接,实现气体抽出。During use, one end 1a of the hollow-core photonic crystal fiber 1 is used as a gas inlet, and the vent pipe 3b of the connected airtight chamber 3 is connected with a gas bottle to realize filling of gas; the other end of the hollow-core photonic crystal fiber 1 is a gas outlet. The vent pipe 3b at the end is connected with a vacuum pump to realize gas extraction.

气密室3用于保持空心光子晶体光纤1内部的气密性,通过安装在通气管3b上的真空计4与真空阀5调节控制空心光子晶体光纤1内部的气压。The airtight chamber 3 is used to maintain the airtightness inside the hollow photonic crystal fiber 1 , and the air pressure inside the hollow photonic crystal fiber 1 is adjusted and controlled by a vacuum gauge 4 and a vacuum valve 5 installed on the vent pipe 3 b.

另外还可以把气密室的通气管密封起来,撤掉真空计、真空阀,作为小巧的气体吸收池使用,如图2所示。In addition, the ventilation pipe of the airtight chamber can be sealed, the vacuum gauge and the vacuum valve can be removed, and it can be used as a small and exquisite gas absorption cell, as shown in Figure 2.

外调节组件7和内调节组件8是用于调节光子晶体光纤1与普通光纤10的相对位置,用以保证两者之间的耦合效率最大。The outer adjusting component 7 and the inner adjusting component 8 are used to adjust the relative position of the photonic crystal fiber 1 and the common optical fiber 10 to ensure the maximum coupling efficiency between the two.

本发明空心光子晶体光纤气体吸收池装置的具体制作步骤如下:The specific manufacturing steps of the hollow photonic crystal fiber gas absorption cell device of the present invention are as follows:

1、空心光子晶体光纤1与气密接头连接:1. The hollow photonic crystal fiber 1 is connected to the airtight joint:

①首先在窗口玻璃6接触气密室3的区域用磁控溅射的方法镀上一层环形金属膜,再用金属焊接工艺把窗口玻璃6焊接到气密室3的窗口3c上;1. Firstly, the area where the window glass 6 contacts the airtight chamber 3 is coated with an annular metal film by magnetron sputtering, and then the window glass 6 is welded to the window 3c of the airtight chamber 3 by a metal welding process;

②在气密室3的通气管3b上安装好真空计4与真空阀5;②A vacuum gauge 4 and a vacuum valve 5 are installed on the ventilation pipe 3b of the airtight chamber 3;

③在空心光子晶体光纤1其中一端1a选取合适长度去除的涂覆层,在其端面位置涂上保护胶,封住空心光子晶体光纤1端面的开口,防止在光纤金属化过程中化学试剂进入空心光子晶体光纤1的内部造成堵塞;用现有的光纤金属化工艺在空心光子晶体光纤1一端1a已经除掉涂覆层的表面镀上金属层,再把涂有保护胶的头部割掉,将经过上述处理的空心光子晶体光纤1的一端1a插入到气密室3的光纤接口3a用现有的馈通焊工艺焊接,最后在连接处外部套好保护套2;③ Select a suitable length of the coating layer removed from one end 1a of the hollow-core photonic crystal fiber 1, and apply protective glue on the end face to seal the opening of the end face of the hollow-core photonic crystal fiber 1 to prevent chemical reagents from entering the hollow core during the metallization process of the optical fiber. The inside of photonic crystal fiber 1 causes blockage; Use existing optical fiber metallization process to have removed coating layer on the surface of hollow photonic crystal fiber 1 one end 1a and plate metal layer, then the head that is coated with protective glue is cut off, Insert one end 1a of the above-mentioned processed hollow photonic crystal fiber 1 into the optical fiber interface 3a of the airtight chamber 3 and weld it with the existing feed-through welding process, and finally put the protective sheath 2 on the outside of the connection;

④把耦合镜9用光学环氧胶固定在内调节组件8上,依次装配好外调节组件7,内调节组件8,该内调节组件8的外端接具有FC接头的普通光纤10;④ Fix the coupling mirror 9 on the inner adjustment component 8 with optical epoxy glue, assemble the outer adjustment component 7 and the inner adjustment component 8 in sequence, and the outer end of the inner adjustment component 8 is connected with the ordinary optical fiber 10 with FC connector;

2、空心光子晶体光纤1的另一端按如上步骤1进行连接;2. The other end of the hollow photonic crystal fiber 1 is connected according to the above step 1;

3、对连接好的空心光子晶体光纤气体吸收池装置进行光路调节:把其中一个气密接头的普通光纤10接上激光器;另一个气密接头的外调节组件7与气密室3暂时分开,在其气密室窗口3c处用光功率计探测从空心光子晶体光纤1出射的光功率;调节前一个气密接头外调节组件7和内调节组件8的位置,直到光功率计探测到的光功率最大;然后把光功率计去掉,把后一个气密接头的外调节组件7和气密室3连接起来,在其普通光纤10后接上光功率计,调节其外调节组件7和内调节组件8的位置,直到光功率计探测到的光功率最大,完成光路调节,本发明空心光子晶体光纤气体吸收池装置的制作完成。3. Adjust the optical path of the connected hollow photonic crystal fiber gas absorption cell device: connect the ordinary optical fiber 10 of one of the airtight joints to the laser; the external adjustment component 7 of the other airtight joint is temporarily separated from the airtight chamber 3, Use an optical power meter to detect the optical power emitted from the hollow photonic crystal fiber 1 at the window 3c of the airtight chamber; adjust the positions of the outer adjustment assembly 7 and the inner adjustment assembly 8 of the previous airtight joint until the optical power detected by the optical power meter is the largest Then remove the optical power meter, connect the outer adjustment assembly 7 of the last airtight joint with the airtight chamber 3, connect the optical power meter after its ordinary optical fiber 10, and adjust the positions of its outer adjustment assembly 7 and inner adjustment assembly 8 , until the optical power detected by the optical power meter reaches the maximum, the optical path adjustment is completed, and the manufacture of the hollow photonic crystal fiber gas absorption cell device of the present invention is completed.

本发明的操作方法如下:The operating method of the present invention is as follows:

1.其中一个气密接头的通气管3b接气瓶,作为气体入口;另一个气密接头的通气管3b接真空泵,作为气体出口;1. One of the vent tubes 3b of the airtight joint is connected to the gas cylinder as the gas inlet; the vent tube 3b of the other airtight joint is connected to the vacuum pump as the gas outlet;

2.在充入实验气体前,先用真空泵把空心光子晶体光纤1与其两端的气密接头抽成真空,在另一个通气管3b处接入氦气气瓶,用氦气对空心光子晶体光纤1进行冲洗,最后再用真空泵抽成真空;2. Before filling the experimental gas, use a vacuum pump to evacuate the airtight joints of the hollow photonic crystal fiber 1 and its two ends, and connect the helium gas cylinder to the other vent pipe 3b, and use helium gas to the hollow photonic crystal fiber. 1 Rinse, and finally vacuumize with a vacuum pump;

2.通气管3b改接入实验所需气体的气瓶,充入实验气体,气体入口处的通气管3b的真空计2气压读数可略大于所需气压,等待气体缓慢流通到气体出口处,直到气体入口处真空计2气压读数与气体出口处真空计2气压读数相等,再交替打开真空泵和气瓶进行抽气和充气,直到气体入口处与气体出口处的气压读数均为所需气压,此时气体充入完成,可作为实验用的气体吸收池;2. Change the air pipe 3b into the cylinder of the gas required for the experiment, and fill it with the experimental gas. The air pressure reading of the vacuum gauge 2 on the air pipe 3b at the gas inlet can be slightly greater than the required air pressure, and wait for the gas to slowly flow to the gas outlet. Until the pressure reading of the vacuum gauge 2 at the gas inlet is equal to the pressure reading of the vacuum gauge 2 at the gas outlet, then alternately turn on the vacuum pump and the gas cylinder to pump and inflate until the pressure readings at the gas inlet and gas outlet are both the required pressure. When the gas is filled, it can be used as a gas absorption cell for experiments;

3.需要制作小巧结构的吸收池时,把通气管3b钳紧压扁不漏气,割去真空计4和真空阀5,再对通气管3b填充焊料进行密封,如图2所示。3. When it is necessary to make an absorption pool with a compact structure, clamp and flatten the vent tube 3b to prevent air leakage, cut off the vacuum gauge 4 and vacuum valve 5, and then fill the vent tube 3b with solder to seal it, as shown in Figure 2.

本发明采用了光纤金属化、馈通焊接、金属焊接工艺实现气体吸收池的制作,能很好地保证吸收池的密封性,以及结构的牢固性,另外它的结构紧凑和轻便小巧的特点可以很好地适用于星载的应用环境。气密室的设计结构可以满足在实验阶段对气压的调整,也可以将通气管密封起来后作为小巧的气体吸收池使用。The invention adopts optical fiber metallization, feed-through welding and metal welding processes to realize the production of the gas absorption pool, which can well ensure the airtightness of the absorption pool and the firmness of the structure. In addition, its compact structure, light weight and small size can It is well suited to the spaceborne application environment. The design structure of the airtight chamber can meet the adjustment of the air pressure during the experimental stage, and the ventilation tube can also be sealed and used as a small gas absorption pool.

Claims (3)

1.一种空心光子晶体光纤气体吸收池装置,其特征在于该装置由空心光子晶体光纤(1)及其两端的气密接头构成,所述的气密接头具有相同的结构:1. A hollow photonic crystal fiber gas absorption cell device, characterized in that the device is made of a hollow photonic crystal fiber (1) and airtight joints at both ends thereof, and the airtight joints have the same structure: 所述的气密接头包括保护套(2)、气密室(3)、真空计(4)、真空阀(5)、窗口玻璃(6)、外调节组件(7)、内调节组件(8)、耦合镜(9),上述元部件的连接关系如下:所述的气密室(3)具有光纤接口(3a)、通气管(3b)和气密室窗口(3c),所述的光纤接口(3a)和气密室窗口(3c)相对,所述的光纤接口(3a)用于连接所述的空心光子晶体光纤(1),该空心光子晶体光纤(1)与光纤接口(3a)的连接部位用保护套(2)保护,在所述的通气管(3b)上安装所述的真空计(4)和真空阀(5),所述的窗口玻璃(6)镀以环型金属膜,与所述的气密室窗口(3c)用金属焊接工艺连接,所述的外调节组件(7)从气密室窗口(3c)方向与所述的气密室(3)用螺钉固定,所述的内调节组件(8)是一个中空圆筒,圆筒外有细螺纹的构件,所述的耦合镜(9)固定在所述的内调节组件(8)的圆筒的内端上,该内调节组件(8)的外端接具有FC接头的普通光纤(10),所述的内调节组件(8)的外细螺纹旋入所述的外调节组件(7)的内螺纹中,通过内调节组件(8)的旋转以改变内调节组件(8)与外调节组件(7)的配合深度,该内调节组件(8)的位置通过外调节组件(7)的径向螺钉锁定。The airtight joint includes a protective cover (2), an airtight chamber (3), a vacuum gauge (4), a vacuum valve (5), a window glass (6), an outer adjustment component (7), an inner adjustment component (8) , coupling mirror (9), the connection relationship of the above components is as follows: the airtight chamber (3) has an optical fiber interface (3a), a vent pipe (3b) and an airtight chamber window (3c), and the optical fiber interface (3a) Opposite to the airtight chamber window (3c), the optical fiber interface (3a) is used to connect the hollow photonic crystal fiber (1), and the connection part between the hollow photonic crystal fiber (1) and the optical fiber interface (3a) is covered with a protective sleeve (2) protection, install the vacuum gauge (4) and vacuum valve (5) on the vent pipe (3b), the window glass (6) is coated with a ring-shaped metal film, and the The airtight chamber window (3c) is connected by metal welding process, the outer adjustment assembly (7) is fixed with the airtight chamber (3) from the direction of the airtight chamber window (3c), and the inner adjustment assembly (8 ) is a hollow cylinder with fine threaded components outside the cylinder, the coupling mirror (9) is fixed on the inner end of the cylinder of the inner adjustment assembly (8), the inner adjustment assembly (8) The external end of the ordinary optical fiber (10) with FC connector, the external fine thread of the internal adjustment component (8) is screwed into the internal thread of the external adjustment component (7), and the internal adjustment component (8) Rotate to change the matching depth between the inner adjustment component (8) and the outer adjustment component (7), and the position of the inner adjustment component (8) is locked by the radial screw of the outer adjustment component (7). 2.根据权利要求1所述的空心光子晶体光纤气体吸收池装置,其特征在于所述空心光子晶体光纤(1)与所述的气密室(3)采用馈通焊工艺连接,即所述的空心光子晶体光纤(1)经过光纤金属化处理后,插入所述的气密室(3)的光纤接口(3a)中,用馈通焊工艺连接。2. The hollow photonic crystal fiber gas absorption cell device according to claim 1, characterized in that the hollow photonic crystal fiber (1) and the airtight chamber (3) are connected by a feed-through welding process, that is, the The hollow photonic crystal optical fiber (1) is inserted into the optical fiber interface (3a) of the airtight chamber (3) after being treated with optical fiber metallization, and connected by a feed-through welding process. 3.权利要求1或2所述的空心光子晶体光纤气体吸收池装置的制作方法,其特征在于该方法包括如下步骤:3. the manufacture method of hollow photonic crystal fiber gas absorption cell device described in claim 1 or 2, it is characterized in that the method comprises the steps: 1)、空心光子晶体光纤(1)与气密接头连接:1), the hollow photonic crystal fiber (1) is connected with the airtight joint: ①首先在窗口玻璃(6)接触气密室(3)的区域用磁控溅射的方法镀上一层环形金属膜,再用金属焊接工艺把窗口玻璃(6)焊接到气密室(3)的窗口(3c)上;①Firstly, coat the area where the window glass (6) touches the airtight chamber (3) with a ring-shaped metal film by magnetron sputtering, and then weld the window glass (6) to the airtight chamber (3) by metal welding process. on window (3c); ②在气密室(3)的通气管(3b)上安装好真空计(4)与真空阀(5);② Install the vacuum gauge (4) and vacuum valve (5) on the air pipe (3b) of the airtight chamber (3); ③在空心光子晶体光纤(1)其中一端(1a)选取合适长度去除的涂覆层,在其端面位置涂上保护胶,封住空心光子晶体光纤(1)端面的开口,防止在光纤金属化过程中化学试剂进入空心光子晶体光纤(1)的内部造成堵塞;用现有的光纤金属化工艺在空心光子晶体光纤(1)一端(1a)已经除掉涂覆层的表面镀上金属层,再把涂有保护胶的头部割掉,将经过上述处理的空心光子晶体光纤(1)的一端(1a)插入到气密室(3)的光纤接口(3a)用现有的馈通焊工艺焊接,最后在连接处外部套好保护套(2);③ Select a suitable length of the coating layer removed from one end (1a) of the hollow-core photonic crystal fiber (1), and apply protective glue on the end face to seal the opening of the end face of the hollow-core photonic crystal fiber (1) to prevent metallization in the fiber. During the process, chemical reagents enter the interior of the hollow-core photonic crystal fiber (1) to cause blockage; use the existing optical fiber metallization process to plate a metal layer on the surface of the hollow-core photonic crystal fiber (1) where the coating layer has been removed, Then cut off the head coated with protective glue, insert one end (1a) of the above-mentioned processed hollow photonic crystal fiber (1) into the optical fiber interface (3a) of the airtight chamber (3) and use the existing feedthrough welding process Welding, and finally put a protective cover (2) on the outside of the joint; ④把耦合镜(9)用光学环氧胶固定在内调节组件(8)上,依次装配好外调节组件(7),内调节组件(8),该内调节组件(8)的外端接具有FC接头的普通光纤(10);④Fix the coupling mirror (9) on the inner adjustment assembly (8) with optical epoxy glue, assemble the outer adjustment assembly (7), the inner adjustment assembly (8) in sequence, and the outer terminal of the inner adjustment assembly (8) Common optical fiber (10) with FC connector; 2)、空心光子晶体光纤(1)的另一端与气密接头按如上步骤1)进行连接;2), the other end of the hollow photonic crystal fiber (1) is connected to the airtight connector according to the above step 1); 3)、对连接好的空心光子晶体光纤气体吸收池装置进行光路调节:把其中一个气密接头的普通光纤(10)接上激光器;另一个气密接头的外调节组件(7)与气密室(3)暂时分开,在其气密室窗口(3c)处用光功率计探测从空心光子晶体光纤(1)出射的光功率;调节前一个气密接头外调节组件(7)和内调节组件(8)的位置,直到光功率计探测到的光功率最大;然后把光功率计去掉,把后一个气密接头的外调节组件(7)和气密室(3)连接起来,在其普通光纤(10)后接上光功率计,调节其外调节组件(7)和内调节组件(8)的位置,直到光功率计探测到的光功率最大,完成光路调节,制作完成。3) Adjust the optical path of the connected hollow photonic crystal fiber gas absorption cell device: connect the ordinary optical fiber (10) of one of the airtight joints to the laser; the external adjustment component (7) of the other airtight joint and the airtight chamber (3) Temporarily separate, and use an optical power meter to detect the optical power emitted from the hollow photonic crystal fiber (1) at the window (3c) of the airtight chamber; adjust the outer adjustment component (7) and the inner adjustment component (7) of the previous airtight joint ( 8) until the optical power detected by the optical power meter reaches the maximum; then remove the optical power meter, and connect the outer adjustment component (7) of the latter airtight joint with the airtight chamber (3), and connect the ordinary optical fiber (10 ) and connect the optical power meter, adjust the positions of the outer adjustment component (7) and the inner adjustment component (8) until the optical power detected by the optical power meter reaches the maximum, the optical path adjustment is completed, and the production is completed.
CN2012103276758A 2012-09-06 2012-09-06 Hollow photonic crystal optical fiber gas absorption cell device and manufacturing method thereof Pending CN102866468A (en)

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