CN104181110B - A kind of based on microscopical laser double modulation reflection spectrum detection system - Google Patents
A kind of based on microscopical laser double modulation reflection spectrum detection system Download PDFInfo
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- CN104181110B CN104181110B CN201410403293.8A CN201410403293A CN104181110B CN 104181110 B CN104181110 B CN 104181110B CN 201410403293 A CN201410403293 A CN 201410403293A CN 104181110 B CN104181110 B CN 104181110B
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Abstract
The invention discloses a kind of based on microscopical laser double modulation spectroscopic system, it includes a single-mode fiber, a set of imaging amplification system, one semi-transparent semi-reflecting, a set of laser beam expanding system, low frequency chopper, laser instrument, a set of microscopic system and a high frequency chopper.Nano material laser double modulation reflective spectral measure is realized by with lower component: according to laser double modulation operation principle, using high frequency chopper modulate after white light source through microscope illumination system as detection light, as pump light after laser beam expanding after the modulation of low frequency chopper, then detection light and pump light act on sample surfaces through same microcobjective, single-mode fiber is placed on secondary as field stop and amplifies at image planes, control sample surface is carried out two-dimensional scan by motor, it is thus achieved that associated optical signals.Present invention achieves the spectrographic detection in nanometer scale region, effectively eliminate the interference of background reflectance light, can apply to the measurement of the optical signature spectrum in micronano optical field.
Description
Technical field
This patent belongs to field of spectral analysis technology, is specifically related to a kind of based on microscopical laser double modulation reflection spectrum detection system, and it detects for the optical characteristics for the nanometer sized materials such as nano belt, nano wire.
Background technology
Nano material refers to the most one-dimensional material being in nano-scale range or being made up of as elementary cell them in three dimensions.Compared with conventional body material, it has many specific performances, such as: quantum size effect, skin effect, quantum tunneling effect etc., there is very big difference compared with making to be in the atom of surface state, electronic behavior and being in the atom of inside, electronics, thus cause nano material to have the new optical characteristics not available for macroscopic body material of the same race.The optical property of research nano material, needs by means of microtechnique.Excite in addition it is also necessary to microcell to be carried out light and collect so that selected nanostructured is carried out detailed research.
Reflectance spectrum is one of most basic most common optical means of research semiconductor energy band structure and other relevant nature, reflects the electron transition process between upper state and energy subband.But, simple reflectance spectrum is a kind of static experiment, there is significant limitation, because the many structures in reflectance spectrum figure are faint, unclean and muting sensitivity, it is impossible to static reflex is composed photon energy corresponding to structure and static calculation formula as parameter regulation foundation fundamental transition directly connect.In order to overcome these defects of static reflex spectrum, since the sixties in 20th century, people have developed multimedia modulated spectrum method.So-called modulated spectrum, it is simply that while measure spectrum, the experiment condition of the tested semiconductor samples of periodic variation or the extraneous perturbation parameter of one periodically-varied of applying.Wherein, extraneous perturbation parameter can be electric field, magnetic field, pressure, stress, thermal pulse, incident illumination electromagnetic wavelength or incident intensity etc..Modulated spectrum can be not only used for semiconductor bulk material it can also be used to low dimensional structures such as heterojunction semiconductor, SQW and nano wires.And modulated spectrum technology has high-resolution and high sensitivity is because the periodically-varied of the band structure that modulation parameter causes and shows the most most effectively at the singular point of the associating density of states, thus inhibit the contribution in other extension region in Brillouin zone, highlight the critical point contribution to modulated spectrum.Nowadays, owing to having and sensitivity advantages of higher simple with sample noncontact, not damaged, method, laser modulation technique has been shown one's talent from other modulated spectrum technology and has been widely used in spectral detection field.But laser modulation technique there is also certain limitation, during because laser periodically incides sample surfaces, the fluorescence that sample self sends can be with identical carrier frequency, therefore detectable signal can include autofluorescent background signal simultaneously, in order to overcome the autofluorescent background problem of laser modulation technique, needs introduce can be with the laser double modulation technology of Fluorophotometry background, by make reflectance spectrum variable quantity and autofluorescent background signal with different carrier frequencies, thus during signal extraction by both signaling zones separately.
For modulated spectrum, its modulated signal is generally the 10 of static reflex signal-4-10-6.The most how to suppress extraneous noise, the signal to noise ratio improving laser double modulation reflected signal becomes its development bottleneck.When sample is nano material, owing to the size of material is in nanometer scale, if visual field not being carried out particular restriction, obtained laser modulation signal will drown out in useless background returns, therefore, eliminate background reflectance, nano material modulation reflectance spectrum technology is had higher requirement by raising signal to noise ratio.
Summary of the invention
The purpose of this patent is to provide a kind of based on microscopical laser double modulation reflection spectrum detection system, it is achieved that the spectrographic detection in nanometer scale region.
To achieve these goals, this patent provides a kind of based on microscopical laser double modulation reflection spectrum detection system.The parts realizing this system include single-mode fiber 1, imaging amplification system 2, semi-transparent semi-reflecting 3, laser beam expanding system 4, low frequency chopper 5, laser instrument 6, microscopic system 7 and high frequency chopper 8, detection light and pump light act on nano material through same microcobjective, wherein:
nullSingle-mode fiber 1 is realized the restriction effect to visual field as field stop by detecting system，Sample is positioned over microcobjective front focal plane 7-3，White light source after being modulated by high frequency chopper 8 is focused into by microscope illumination system 7-2 is mapped to sample surfaces as detection light，The laser that laser instrument 6 sends passes through beam-expanding system 4 after low frequency chopper 5 is modulated，Then enter tube lens 7-1 by the reflection of semi-transparent semi-reflecting 3 and react on nano material through same microcobjective 7-4 with detection light one as pump light，The light of sample reflection is imaged onto at the Polaroid face of microscope 10 through microcobjective 7-4 and tube lens 7-1，Secondary after single-mode fiber 1 is placed on imaged amplification system 2 as field stop amplifies at image planes 9 and achieves the restriction effect to visual field，Reduce the interference of useless background returns，Improve the signal to noise ratio of laser double modulation reflected signal，Complete the laser double modulation to nano material.
The laser double modulation reflectance spectrum signal detection principle of nano material is on the basis of laser double modulation, utilize laser beam expanding system and modern microscopes system with the use of, it is simultaneously achieved the pumping to sample and detection effect, again by the single-mode fiber restriction effect to visual field, it is achieved that the laser double modulation spectrographic detection in nanometer scale region.This patent is that the white light source after utilizing microscope illumination system will be modulated by high frequency chopper is focused into is mapped to microcobjective front focal plane as detection light, laser after expanding acts on this plane as pump light through same microcobjective, ensures that laser facula can be completely covered detection light hot spot simultaneously.The reflection photoimaging of sample is to tube lens back focal plane, and realizes the amplification of secondary image planes by external imaging amplification system.Single-mode fiber is placed on secondary as field stop and amplifies at image planes, controls sample surface to be carried out two-dimensional scan and collects associated optical signals by motor, obtains the laser double modulation reflectance spectrum signal of nano material.
This patent is advantageous in that: on the basis of modern microscopes system, by introducing pumping and the detection of the completeest paired samples of laser from the external world, and using single-mode fiber as field stop, sample is carried out the spectrographic detection in nanometer scale region, effectively eliminate the impact of background reflectance light.The spectrum detection device of a high s/n ratio is provided for micronano optical field such as nano film material, nano wire, quantum dot etc..
Accompanying drawing explanation
Fig. 1 is the schematic diagram of a kind of based on microscope and single-mode fiber the nano material laser double modulation reflectance spectrum signal measurement apparatus that this patent provides；
Description of symbols in Fig. 1
1 single-mode fiber；
2 imaging amplification systems；
3 semi-transparent semi-reflecting；
4 laser beam expanding systems；
5 low frequency choppers；
6 laser instrument；
7 microscopic systems；
7-1 tube lens；
7-2 microscope illumination system；
7-3 microcobjective front focal plane；
7-4 microcobjective；
8 high frequency choppers；
Zoom into image planes 9 two times；
10 tube lens back focal planes；
Detailed description of the invention
This patent provides the schematic diagram of a kind of nano material laser double modulation reflectance spectrum signal measurement apparatus as shown in Figure 1.
A kind of nano material laser double modulation reflectance spectrum signal measurement apparatus, utilize laser spectrum double modulation technology, including a single-mode fiber 1, a set of imaging amplification system 2, semi-transparent semi-reflecting 3, a set of laser beam expanding system 5, laser instrument 6 of 4, low frequency chopper, a set of microscopic system 7 and a high frequency chopper 8, wherein main devices design parameter is as follows:
Single-mode fiber 1 is visible light wave section single-mould fiber, and covering wave band is 400-680nm, and inner core diameter is 10um, cladding diameter 125um.
Laser beam expanding system uses 10 times of zoom beam expanders of Galileo.
The output frequency of low frequency chopper 5 is 33Hz, and the output frequency of high frequency chopper 8 is 3333Hz.
Microscopic system 7 uses biological microscope, and wherein, it is 100X that tube lens 7-1 and microcobjective 7-4 is implemented in combination with enlargement ratio, microcobjective 7-4 numerical aperture 0.8.Microscope illumination system 7-2 uses Kohler illumination mode.
Imaging amplification system 2 uses mirror group imaging system, and two lens Jiao's length of mirror are respectively 25mm and 500mm, and zooming into image planes 9 with tube lens back focal plane 10 and secondary is that two conjugate planes zoom into picture to complete 20X.
nullSingle-mode fiber 1 is realized the restriction effect to visual field as field stop by described nano material laser double modulation reflectance spectrum signal measurement apparatus，Sample is positioned over microcobjective front focal plane 7-3，Operation principle according to laser double modulation，White light source is focused into by microscope illumination system 7-2 is mapped to sample surfaces as detecting light after being modulated by high frequency chopper 8，Laser passes through beam-expanding system 4 after low frequency chopper 8 is modulated，Nano material is acted on through same microcobjective 7-4 as pump light together with detection light subsequently into tube lens 7-1，Secondary after single-mode fiber 1 is placed on imaged amplification system 2 as field stop amplifies at image planes 9 and achieves the restriction effect to visual field，Reduce useless background returns，Laser modulation signal can be extracted，Complete the laser double modulation to nano material.
Claims (1)
1. based on a microscopical laser double modulation reflection spectrum detection system, including single-mode fiber (1),
Imaging amplification system (2), semi-transparent semi-reflecting (3), laser beam expanding system (4), low frequency chopper (5),
Laser instrument (6), microscopic system (7) and a high frequency chopper (8), it is characterised in that:
In described laser double modulation reflection spectrum detection system, sample is burnt flat before being positioned over microscope
On face (7-3), being shone by microscope by the white light source after high frequency chopper (8) modulation as detection light
Bright system (7-2) is focused into and is mapped to sample surfaces, and the laser that laser instrument (6) sends is through low frequency chopper (5)
By laser beam expanding system (4) after modulation, then enter mirror by the reflection of semi-transparent semi-reflecting (3)
Cylinder lens (7-1) is focused into through same microcobjective (7-4) together with detection light as pump light and is mapped to
Sample surfaces, the light of sample reflection converges to tube lens back focal plane (10) through microscopic system (7)
Place imaged amplification system (2) imaging to secondary zoom into image planes (9), as the single mode of field stop
Optical fiber (1) is placed on secondary and zooms into image planes (9) place, controls that sample surface is carried out two dimension by motor and sweeps
Retouch, it is thus achieved that the laser double modulation reflectance spectrum signal of nano-area.
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| CN108227180A (en) * | 2016-12-22 | 2018-06-29 | 凝辉(天津)科技有限责任公司 | A kind of machinery optic modulating device |
| CN107192675B (en) * | 2017-06-05 | 2020-04-07 | 中国科学院上海技术物理研究所 | Light modulation reflection spectrum detection system capable of simply and effectively inhibiting fluorescence interference |
| CN113552084A (en) * | 2021-07-29 | 2021-10-26 | 深圳市先亚生物科技有限公司 | System, method and device for eliminating interference of spectrum detection background signal |
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| US5260562A (en) * | 1989-09-29 | 1993-11-09 | Regents Of The University Of California | High-resolution light microscope using coherent light reflected from a target to modulate the power output from a laser |
| DE102004034983A1 (en) * | 2004-07-16 | 2006-02-02 | Carl Zeiss Jena Gmbh | Light scanning microscope |
| CN1782695B (en) * | 2004-12-02 | 2010-04-28 | 中国科学院光电技术研究所 | Reflective measurement equipment for band gap characteristic of periodic micron and nano structure |
| JP2006235420A (en) * | 2005-02-28 | 2006-09-07 | Yokogawa Electric Corp | Confocal microscope |
| CN100424499C (en) * | 2006-01-06 | 2008-10-08 | 中国科学院上海技术物理研究所 | Infrared-modulated photoluminescence spectrum measuring method and apparatus based on step scan |
| CN100465617C (en) * | 2006-01-18 | 2009-03-04 | 中国科学院上海技术物理研究所 | Photo-modulated reflectance spectrum measuring method and apparatus based on step scan |
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| CN201607406U (en) * | 2010-02-10 | 2010-10-13 | 华中科技大学 | Laser probe micro-area component analyzer based on double laser light sources |
| CN101936903B (en) * | 2010-08-26 | 2012-07-04 | 中国科学院上海微系统与信息技术研究所 | Test system adopting double modulation scheme to enhance fluorescence test sensitivity |
| CN102661795B (en) * | 2012-05-30 | 2014-01-15 | 哈尔滨工业大学 | Pump-detection spectrum method with synchronous chopping of pump light and signal light and recording of signal light subarea, and realizing device of method |
| CN204086126U (en) * | 2014-08-15 | 2015-01-07 | 中国科学院上海技术物理研究所 | Based on microscopical laser double modulation reflection spectrum detection system |
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