CN104157796A - Sublimation device and method for manufacturing organic light emitting diode display device - Google Patents
Sublimation device and method for manufacturing organic light emitting diode display device Download PDFInfo
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- CN104157796A CN104157796A CN201410344594.8A CN201410344594A CN104157796A CN 104157796 A CN104157796 A CN 104157796A CN 201410344594 A CN201410344594 A CN 201410344594A CN 104157796 A CN104157796 A CN 104157796A
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- 238000000859 sublimation Methods 0.000 title claims abstract description 66
- 230000008022 sublimation Effects 0.000 title claims abstract description 65
- 238000000034 method Methods 0.000 title claims abstract description 24
- 238000004519 manufacturing process Methods 0.000 title abstract description 14
- 239000011368 organic material Substances 0.000 claims abstract description 53
- 238000010438 heat treatment Methods 0.000 claims abstract description 39
- 239000000758 substrate Substances 0.000 claims abstract description 36
- 230000004888 barrier function Effects 0.000 claims description 48
- 238000007639 printing Methods 0.000 claims description 32
- 238000004821 distillation Methods 0.000 claims description 30
- 238000007739 conversion coating Methods 0.000 claims description 24
- 239000000463 material Substances 0.000 claims description 15
- 210000004877 mucosa Anatomy 0.000 claims description 9
- 238000001704 evaporation Methods 0.000 claims description 6
- 230000008020 evaporation Effects 0.000 claims description 6
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 claims description 6
- 238000009413 insulation Methods 0.000 claims description 5
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims description 3
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 claims description 3
- 238000004380 ashing Methods 0.000 claims description 3
- 229910052799 carbon Inorganic materials 0.000 claims description 3
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 claims description 3
- 229910052737 gold Inorganic materials 0.000 claims description 3
- 239000010931 gold Substances 0.000 claims description 3
- 239000002086 nanomaterial Substances 0.000 claims description 3
- 229920002120 photoresistant polymer Polymers 0.000 claims description 3
- 229910052697 platinum Inorganic materials 0.000 claims description 3
- 229920000767 polyaniline Polymers 0.000 claims description 3
- 238000004528 spin coating Methods 0.000 claims description 3
- 229910052719 titanium Inorganic materials 0.000 claims description 3
- 239000010936 titanium Substances 0.000 claims description 3
- 238000000576 coating method Methods 0.000 abstract description 9
- 239000011248 coating agent Substances 0.000 abstract description 8
- 238000006243 chemical reaction Methods 0.000 abstract 5
- 239000010408 film Substances 0.000 description 17
- 230000004048 modification Effects 0.000 description 3
- 238000012986 modification Methods 0.000 description 3
- 230000015572 biosynthetic process Effects 0.000 description 2
- 238000001816 cooling Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 238000009792 diffusion process Methods 0.000 description 1
- 230000001795 light effect Effects 0.000 description 1
- 230000033001 locomotion Effects 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- 239000012528 membrane Substances 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 239000010970 precious metal Substances 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
Classifications
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
- H10K71/10—Deposition of organic active material
- H10K71/16—Deposition of organic active material using physical vapour deposition [PVD], e.g. vacuum deposition or sputtering
- H10K71/162—Deposition of organic active material using physical vapour deposition [PVD], e.g. vacuum deposition or sputtering using laser ablation
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
- H10K71/40—Thermal treatment, e.g. annealing in the presence of a solvent vapour
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- Electroluminescent Light Sources (AREA)
Abstract
The invention relates to the technical field of display device manufacturing, and discloses a sublimation device and a method for manufacturing an organic light emitting diode display device. The sublimation device comprises a laser emitting unit for emitting laser and a photo-thermal conversion unit positioned above the laser emitting unit, wherein the photo-thermal conversion unit comprises a sublimation heating layer for arranging an organic material, a photo-thermal conversion layer arranged on the lower surface of the sublimation heating layer, and a plurality of light resisting images arranged on the lower surface of the photo-thermal conversion layer; a light-transmitting gap is reserved between every two adjacent light resisting images. The sublimation device has the benefits that the photo-thermal conversion unit is used to convert the laser energy into thermal energy, so that the organic material positioned on the light-transmitting gaps can be sublimated to positions, needing to be coated with the organic material, on a substrate, the coating efficiency of organic films is accelerated, and the production efficiency of the organic light emitting diode display device is improved.
Description
Technical field
The present invention relates to the making field of display unit, a kind of method that refers more particularly to sublimation apparatus and make organic light emitting diodde desplay device.
Background technology
The method for making of Organic Light Emitting Diode has multiple, comprises the method for evaporation, solution method for making, laser thermal transfer method.Evaporation coating method is subject to the impact of equipment at present, yields poorly, and cannot realize the full-color evaporation of large-sized RGB, and the method that can only adopt white light to add color membrane substrates is made.It is expensive that solution is made method material price, and cost of equipment maintenance is high, and device lifetime is low.Laser thermal transfer is not very ripe at present, not for the actual achievement of volume production.
Summary of the invention
A kind of method that the invention provides sublimation apparatus and make organic light emitting diodde desplay device, in order to improve the production efficiency of organic light emitting diodde desplay device.
The invention provides a kind of sublimation apparatus, for organic light emitting diodde desplay device, make, this sublimation apparatus comprises: the laser emission element of Emission Lasers, and the photo-thermal converting unit that is positioned at described laser emission element top, described photo-thermal converting unit comprises: for the distillation zone of heating of organic material is set, be arranged at the photo-thermal conversion coating of described distillation zone of heating lower surface, and a plurality of resistance light patterns that are arranged on described photo-thermal conversion coating lower surface, and there is printing opacity gap between any two adjacent resistance light patterns.
In technique scheme, by adopting photo-thermal converting unit that the energy of laser is changed into heat energy, make the organic material that is positioned at printing opacity gap can sublime up into the position that needs to apply organic material on substrate, accelerate the coating efficiency of organic film, and then improved the production efficiency of organic light emitting diodde desplay device.
Preferably, also comprise the smooth heat insulation photic zone that is arranged at described photo-thermal conversion coating lower surface and described a plurality of resistance light patterns are wrapped.Avoid hindering light pattern and be damaged, meanwhile, make the lower surface of whole photo-thermal converting unit more smooth.
Preferably, described photo-thermal conversion coating is the photo-thermal conversion coating that any one or more materials in CG, polyaniline or carbon nanomaterial are made.There is the good thermal effect that turns.
Preferably, the thickness of described photo-thermal conversion coating is 30mm～600mm.Guaranteed that luminous energy can change into heat energy fully.
Preferably, described resistance light pattern is the resistance light pattern that black photoresist is made.There is good resistance light effect.
Preferably, described distillation zone of heating is the distillation zone of heating that any one or more materials in titanium, gold or platinum are made.Can effectively absorb heat, there is higher intensification.
The present invention also provides a kind of method of utilizing above-mentioned sublimation apparatus to make organic light emitting diodde desplay device, comprises the following steps:
On the substrate that forms switch element and pixel electrode, interval arranges barrier rib, and wherein, the gap between described barrier rib is for applying the region of organic film;
On distillation zone of heating, organic material layer is set;
The substrate that is provided with barrier rib is compressed and contacted with sublimation apparatus, and make organic material layer relative with barrier rib, and the position in the gap between the position in the printing opacity gap on sublimation apparatus and described barrier rib is relative;
By Ear Mucosa Treated by He Ne Laser Irradiation sublimation apparatus, the organic material above printing opacity gap sublimes up in the gap between the barrier rib on substrate and forms organic film.
In technique scheme, by adopting photo-thermal converting unit that the energy of laser is changed into heat energy, the organic material that is positioned at printing opacity gap can be distilled, make it sublime up into the position that needs to apply organic material on substrate, accelerate the coating efficiency of organic film, and then improved the production efficiency of organic light emitting diodde desplay device.
Preferably, describedly in distillation, organic material layer is set on zone of heating and is specially:
Mode by spin coating, evaporation or printing forms organic material layer on distillation zone of heating.Can on distillation zone of heating, organic material be set by different modes.
Preferably, described, the substrate that is provided with barrier rib is compressed and is contacted with sublimation apparatus, and make organic material layer relative with barrier rib, and also comprise before the relative step in the position in the gap between the position in the printing opacity gap on sublimation apparatus and described barrier rib:
The sublimation apparatus that is provided with the substrate of barrier rib and is provided with organic material layer is positioned in vacuum chamber.Improved the effect of organic material distillation.
Preferably, described by Ear Mucosa Treated by He Ne Laser Irradiation sublimation apparatus, the organic material above printing opacity gap sublime up in the gap between the barrier rib on substrate and form the step of organic film after also comprise: by ashing, remove residual organic material on described distillation zone of heating.Thereby can reuse sublimation apparatus.
Accompanying drawing explanation
The vertical view of the substrate that is provided with barrier rib that Fig. 1 provides for the embodiment of the present invention;
The structural representation of the photo-thermal converting unit of the sublimation apparatus that Fig. 2 provides for the embodiment of the present invention;
The structural representation of the sublimation apparatus that Fig. 3 provides for the embodiment of the present invention;
The use state reference map of the sublimation apparatus that Fig. 4 provides for the embodiment of the present invention;
The sublimation apparatus that Fig. 5 provides for the embodiment of the present invention forms the reference view of organic film.
Reference numeral:
10-substrate 11-barrier rib 20-sublimation apparatus
21-distillation zone of heating 22-photo-thermal conversion coating 23-resistance light pattern
The smooth heat insulation photic zone 26-laser emission element of 24-printing opacity gap 25-
30-organic material
Embodiment
In order to improve the production efficiency of organic light emitting diodde desplay device, a kind of method that the embodiment of the present invention provides sublimation apparatus and made organic light emitting diodde desplay device, in the technical scheme of the embodiment of the present invention, by adopting Ear Mucosa Treated by He Ne Laser Irradiation organic material, organic material is sublimed up on the substrate of display device, thereby improved the production efficiency of organic light emitting diodde desplay device.For making the object, technical solutions and advantages of the present invention clearer, below take nonrestrictive embodiment and the present invention is described in further detail as example.
As shown in Figure 3, Fig. 3 shows the structural representation of the sublimation apparatus that the embodiment of the present invention provides.
The embodiment of the present invention provides a kind of sublimation apparatus, for organic light emitting diodde desplay device, make, this sublimation apparatus 20 comprises: the laser emission element 26 of Emission Lasers, and the photo-thermal converting unit that is positioned at described laser emission element 26 tops, described photo-thermal converting unit comprises: for the distillation zone of heating 21 of organic material 30 is set; Be arranged at the photo-thermal conversion coating 22 of described distillation zone of heating 21 lower surfaces, and a plurality of resistance light patterns 23 that are arranged on described photo-thermal conversion coating 22 lower surfaces, and there is printing opacity gap 24 between any two adjacent resistance light patterns 23.
The sublimation apparatus 20 providing in the above-described embodiments in use, first organic material 30 is coated on sublimation apparatus 20, in the lump with reference to figure 1, Fig. 2, Fig. 4 and Fig. 5, wherein, Fig. 1 is the vertical view of substrate 10, Fig. 2 is the structural representation of the photo-thermal converting unit of sublimation apparatus 20, and Fig. 4 and Fig. 5 are the use state reference map of sublimation apparatus 20.Concrete, as depicted in figs. 1 and 2, block by barrier rib 11 in the region that need not apply organic material 30 on substrate 10, and the gap between barrier rib 11 is for applying the region of organic material 30.As shown in Figure 4, at sublimation apparatus 20 and substrate 10 when opposed, organic material 30 coating zones that printing opacity gap 24 between resistance light pattern 23 separates with barrier rib 11 are corresponding, should be understandable that the width in printing opacity gap 24 should equal or be slightly less than the gap width between barrier rib 11.As shown in Figure 5, by Ear Mucosa Treated by He Ne Laser Irradiation photo-thermal converting unit, the laser that is irradiated to the position of resistance light pattern 23 is hindered light pattern 23 and is sheltered from, the laser that is irradiated to printing opacity gap 24 is irradiated to photo-thermal conversion coating 22 through behind printing opacity gap 24, now, the energy of photo-thermal conversion coating 22 absorbing lasers also changes into heat energy, and the heat energy heating sublimation zone of heating 21 of generation make the to distil temperature of zone of heating 21 raises.Now, because the width in printing opacity gap 24 should equal or be slightly less than the gap width between barrier rib 11, thereby guarantee that the organic material 30 that is positioned at 24 tops, printing opacity gap distils under the heating state of distillation zone of heating 21, evaporate into organic material 30 coating zones on substrate 10, and cooling formation organic film, complete the coating of organic film.The sublimation apparatus 20 providing by the present embodiment has been accelerated the coating efficiency of organic film, has improved the production efficiency of organic light emitting diodde desplay device.
Preferably, this sublimation apparatus 20 also comprises the smooth heat insulation photic zone 25 that is arranged at photo-thermal conversion coating 22 lower surfaces and a plurality of resistance light patterns 23 are wrapped.By smooth heat insulation photic zone 25, a plurality of resistance light patterns 23 are wrapped up, avoid hindering light pattern 23 and be damaged, meanwhile, make the lower surface of whole photo-thermal converting unit more smooth, be convenient to mobile.
Concrete, the photo-thermal conversion coating 22 in the sublimation apparatus 20 in above-mentioned enforcement, resistance light pattern 23, distillation zone of heating 21 can select different materials to make.Wherein, photo-thermal conversion coating 22 can be the photo-thermal conversion coating 22 of any one or more materials making in CG, polyaniline or carbon nanomaterial, or adopt precious metal material to make, wherein, when adopting two kinds of above-mentioned materials to be made, the material adopting mixes with the ratio of setting, and this preset proportion is determined according to actual conditions.
Preferably, the thickness of photo-thermal conversion coating 22 is 30mm～600mm, as: 30mm, 50mm, 150mm, 300mm, 400mm, 500mm or 600mm etc. are the thickness between 30mm～600mm arbitrarily.
Preferably, the resistance light pattern 23 that resistance light pattern 23 can select black photoresist to make, or the resistance light pattern 23 of other resistance luminescent material making, specifically unrestricted, can select according to the actual conditions of producing.
In addition, distillation zone of heating 21 wherein can be the distillation zone of heating 21 of any one or more materials making in titanium, gold or platinum, or adopt other materials with higher heat transfer efficiency to make, wherein, when adopting two kinds of above-mentioned materials to be made, the material adopting mixes with the ratio of setting, and this preset proportion is determined according to actual conditions.。
The embodiment of the present invention also provides a kind of method of utilizing above-mentioned sublimation apparatus 20 to make organic light emitting diodde desplay device, comprises the following steps:
On the substrate 10 that forms switch element and pixel electrode, interval arranges barrier rib 11, and wherein, the gap between barrier rib 11 is for applying the region of organic film;
On distillation zone of heating 21,30 layers of organic materials are set;
The substrate 10 that is provided with barrier rib 11 is compressed and contacted with sublimation apparatus 20, and make 30 layers of organic materials relative with barrier rib 11, and the position in the gap between the position in the printing opacity gap 24 on sublimation apparatus 20 and barrier rib 11 is relative;
By Ear Mucosa Treated by He Ne Laser Irradiation sublimation apparatus 20, the organic material 30 above printing opacity gap 24 sublimes up in the gap between the barrier rib 11 on substrate 10 and forms organic film.
By above-mentioned manufacture method, can find out, the manufacture method of the organic light emitting diodde desplay device that the present embodiment provides, has improved the make efficiency of organic film, improved simultaneously organic light emitting diodde desplay device make efficiency.
Below in conjunction with Fig. 1, Fig. 2, Fig. 3, Fig. 4 and Fig. 5, said method is described in detail.
Step 1: interval arranges barrier rib 11 on the substrate 10 that forms switch element and pixel electrode, wherein, the gap between barrier rib 11 is for applying the region of organic film;
Concrete, its structure as shown in Figure 1, on the substrate 10 that forms switch element and pixel electrode, barrier rib 11 is set, gap between barrier rib 11 is for applying the region of organic film, the end surface shape of barrier rib 11 wherein preferably adopts inverted isosceles trapezoidal structure, thereby has certain slope, is convenient to prevent diffusion and the colour mixture of organic material 30, but the end surface shape of barrier rib 11 also can be selected other different shapes, as: rectangle; In addition, switch element can be thin-film transistor, and relay etc. have the device of control switch function.
Step 2: on distillation zone of heating 21,30 layers of organic materials are set;
Concrete, the mode by spin coating, evaporation or printing forms 30 layers of organic materials on distillation zone of heating 21.
Wherein it should be noted that, the order of step 1 and step 2 does not limit, can step 1 formerly, also can step 2 formerly, or step 1 and step 2 are carried out simultaneously.
Step 3: the sublimation apparatus 20 that is provided with the substrate 10 of barrier rib 11 and is provided with 30 layers of organic materials is positioned in vacuum chamber;
Concrete, when placing, substrate 10 up, sublimation apparatus 20 below, and the one side that is provided with barrier rib 11 on substrate 10 is downward, on sublimation apparatus 20, be coated with organic material 30 one facing to top.
Step 4: the substrate 10 that is provided with barrier rib 11 is compressed and contacted with sublimation apparatus 20, and make 30 layers of organic materials relative with barrier rib 11, and the position in the gap between the position in the printing opacity gap 24 on sublimation apparatus 20 and described barrier rib 11 is relative;
Concrete, as shown in Figure 4, by substrate 10 and sublimation apparatus 20 contrapositions, make printing opacity gap 24 relative with the gap between resistance light pattern 23, after contraposition completes, 20 relative motions contact substrate 10 with sublimation apparatus, and barrier rib 11 is pressed on organic material 30.
Step 5: as shown in Figure 5, by Ear Mucosa Treated by He Ne Laser Irradiation sublimation apparatus 20, the organic material 30 above printing opacity gap 24 sublimes up in the gap between the barrier rib 11 on substrate 10 and forms organic film.
Concrete, by Ear Mucosa Treated by He Ne Laser Irradiation sublimation apparatus 20, the laser that is irradiated to the position of resistance light pattern 23 is hindered light pattern 23 and is sheltered from, the laser that is irradiated to printing opacity gap 24 is irradiated to photo-thermal conversion coating 22 through behind printing opacity gap 24, now, the energy of photo-thermal conversion coating 22 absorbing lasers also changes into heat energy, the heat energy heating sublimation zone of heating 21 generating make the to distil temperature of zone of heating 21 raises, now, because the width in printing opacity gap 24 should equal or be slightly less than the gap width between barrier rib 11, thereby guarantee that the organic material 30 that is positioned at 24 tops, printing opacity gap distils under the heating state of distillation zone of heating 21, evaporate into organic material 30 coating zones on substrate 10, and cooling formation organic film.
Step 6: remove residual organic material 30 on distillation zone of heating 21 by ashing.
By above-mentioned concrete description, can find out, the manufacture method of the organic light emitting diodde desplay device that the present embodiment provides, has improved the make efficiency of organic film, improved simultaneously organic light emitting diodde desplay device make efficiency.
Obviously, those skilled in the art can carry out various changes and modification and not depart from the spirit and scope of the present invention the present invention.Like this, if within of the present invention these are revised and modification belongs to the scope of the claims in the present invention and equivalent technologies thereof, the present invention is also intended to comprise these changes and modification interior.
Claims (10)
1. a sublimation apparatus, for organic light emitting diodde desplay device, make, it is characterized in that, the laser emission element that comprises Emission Lasers, and the photo-thermal converting unit that is positioned at described laser emission element top, described photo-thermal converting unit comprises: for the distillation zone of heating of organic material is set, be arranged at the photo-thermal conversion coating of described distillation zone of heating lower surface, and a plurality of resistance light patterns that are arranged on described photo-thermal conversion coating lower surface, and there is printing opacity gap between any two adjacent resistance light patterns.
2. sublimation apparatus as claimed in claim 1, is characterized in that, also comprises the smooth heat insulation photic zone that is arranged at described photo-thermal conversion coating lower surface and described a plurality of resistance light patterns are wrapped.
3. sublimation apparatus as claimed in claim 1 or 2, is characterized in that, described photo-thermal conversion coating is the photo-thermal conversion coating that any one or more materials in CG, polyaniline or carbon nanomaterial are made.
4. sublimation apparatus as claimed in claim 3, is characterized in that, the thickness of described photo-thermal conversion coating is 30mm～600mm.
5. sublimation apparatus as claimed in claim 1 or 2, is characterized in that, described resistance light pattern is the resistance light pattern that black photoresist is made.
6. sublimation apparatus as claimed in claim 1 or 2, is characterized in that, described distillation zone of heating is the distillation zone of heating that any one or more materials in titanium, gold or platinum are made.
7. a method of utilizing the sublimation apparatus described in claim 1 to make organic light emitting diodde desplay device, is characterized in that, comprises the following steps:
On the substrate that forms switch element and pixel electrode, interval arranges barrier rib, and wherein, the gap between described barrier rib is for applying the region of organic film;
On distillation zone of heating, organic material layer is set;
The substrate that is provided with barrier rib is compressed and contacted with sublimation apparatus, and make organic material layer relative with barrier rib, and the position in the gap between the position in the printing opacity gap on sublimation apparatus and described barrier rib is relative;
By Ear Mucosa Treated by He Ne Laser Irradiation sublimation apparatus, the organic material above printing opacity gap sublimes up in the gap between the barrier rib on substrate and forms organic film.
8. the method for making organic light emitting diodde desplay device as claimed in claim 7, is characterized in that, describedly in distillation, organic material layer is set on zone of heating and is specially:
Mode by spin coating, evaporation or printing forms organic material layer on distillation zone of heating.
9. the method for making organic light emitting diodde desplay device as claimed in claim 7, it is characterized in that, described, the substrate that is provided with barrier rib is compressed and contacted with sublimation apparatus, and make organic material layer relative with barrier rib, and also comprise before the relative step in the position in the gap between the position in the printing opacity gap on sublimation apparatus and described barrier rib:
The sublimation apparatus that is provided with the substrate of barrier rib and is provided with organic material layer is positioned in vacuum chamber.
10. the method for making organic light emitting diodde desplay device as claimed in claim 7, it is characterized in that, described by Ear Mucosa Treated by He Ne Laser Irradiation sublimation apparatus, the organic material above printing opacity gap sublime up in the gap between the barrier rib on substrate and form the step of organic film after also comprise: by ashing, remove residual organic material on described distillation zone of heating.
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410344594.8A CN104157796A (en) | 2014-07-18 | 2014-07-18 | Sublimation device and method for manufacturing organic light emitting diode display device |
| PCT/CN2014/095275 WO2016008267A1 (en) | 2014-07-18 | 2014-12-29 | Sublimation device and method for manufacturing an organic light emitting diode display device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410344594.8A CN104157796A (en) | 2014-07-18 | 2014-07-18 | Sublimation device and method for manufacturing organic light emitting diode display device |
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| CN104157796A true CN104157796A (en) | 2014-11-19 |
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| CN201410344594.8A Pending CN104157796A (en) | 2014-07-18 | 2014-07-18 | Sublimation device and method for manufacturing organic light emitting diode display device |
Country Status (2)
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| CN (1) | CN104157796A (en) |
| WO (1) | WO2016008267A1 (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2016008267A1 (en) * | 2014-07-18 | 2016-01-21 | 京东方科技集团股份有限公司 | Sublimation device and method for manufacturing an organic light emitting diode display device |
| CN110350008A (en) * | 2019-07-02 | 2019-10-18 | 深圳市华星光电半导体显示技术有限公司 | Preparation method, luminescent panel and the display device of luminescent panel |
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| CN110350008A (en) * | 2019-07-02 | 2019-10-18 | 深圳市华星光电半导体显示技术有限公司 | Preparation method, luminescent panel and the display device of luminescent panel |
Also Published As
| Publication number | Publication date |
|---|---|
| WO2016008267A1 (en) | 2016-01-21 |
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Application publication date: 20141119 |