CN104152948B - A kind of precise electrotyping method for making high-frequency ripple Feed Horn fine structure - Google Patents
A kind of precise electrotyping method for making high-frequency ripple Feed Horn fine structure Download PDFInfo
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- CN104152948B CN104152948B CN201410395642.6A CN201410395642A CN104152948B CN 104152948 B CN104152948 B CN 104152948B CN 201410395642 A CN201410395642 A CN 201410395642A CN 104152948 B CN104152948 B CN 104152948B
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Abstract
A kind of precise electrotyping method for making high-frequency ripple Feed Horn fine structure that the present invention is provided, be specially：According to the Behaviors of Corrugated Feeds loudspeaker inner-cavity structure form of design, produce Feed Horn electroforming core, after core sets up resist layer processing by surface, using the mode collective effect such as conformal anode, negative electrode rotation, plating solution jet, bidirectional pulse and physics rubbing down, precise electrotyping copper obtains Feed Horn electroforming part on core, then electroforming part is separated with the core demoulding, obtains Feed Horn.The problem of present invention solves the interior ripple microfabrication hardly possible of high-frequency ripple Feed Horn high-aspect-ratio, obtain that inside surface roughness is low using precise electrotyping technology, elocular high-frequency ripple Feed Horn in annular tooth, the Feed Horn structural strength of electroforming making is greatly enhanced, while the low roughness of flared surface is effectively improved microwave signal transmission reliability.
Description
Technical field
The present invention relates to accurate and ultraprecise device process technology field, and in particular to one kind makes high-frequency ripple feed loudspeaker
The precise electrotyping method of fine structure.
Background technology
With space technology fast development, the frequency range of meteorological microwave imaging detection instrument from visible ray, it is infrared expand to it is micro-
Ripple.Either in Modern Information war, the military meteorology satellite of future battlefield complex environment information is obtained, or from big
Cosmic space outside gas-bearing formation carries out round-the-clock, round-the-clock remote sensing observations civilian meteorological satellite to earth atmosphere, in order to accurately obtain
Various detection key elements are obtained, all need to carry high performance microwave imaging detection instrument.The antenna-feedback system of high performance microwave imaging detection instrument
Reflecting antenna is often used as transmitting and the final element received.Reflecting antenna is main by speculum and Feed Horn two parts group
Into, wherein, Feed Horn, as a kind of high-gain focused antenna radiator, is a critical component of microwave imaging survey meter,
The quality of its structure type, structural parameters and processing precision direct influence systematic function.The wave beam that Behaviors of Corrugated Feeds loudspeaker radiation goes out
Possess that directional diagram circumference is symmetrical, secondary lobe is low, the low feature of cross polarization, at present, the widely used ripple in microwave imaging survey meter
Line loudspeaker are as surface antenna feed, efficiency and cross polar component to improve surface antenna.
Behaviors of Corrugated Feeds loudspeaker size is comparable with wavelength, and working frequency rise, wavelength shortens, designed loudspeaker chi
It is very little to diminish.The interior chamber size of below 90GHz Behaviors of Corrugated Feeds loudspeaker is bigger, and the method that can be machined into makes, frequency
Millimeter wave, submillimeter wave (i.e. high-frequency band) Behaviors of Corrugated Feeds loudspeaker in more than 90GHz are small-sized, and trough is deeper, and structure is multiple
Miscellaneous, its inner surface structure is as shown in Figure 1.This Feed Horn receives the several factors such as tool dimension when being machined
Limitation, meanwhile, the Feed Horn used on space exploration instrument bears the high/low-temperature impact of space adverse circumstances repeatedly, and presents
The wall of source loudspeaker is very thin, and the Feed Horn of machining has the defects such as internal stress and tool marks again, there is hidden danger of quality, therefore,
More than 90GHz millimeter wave, submillimeter wave Behaviors of Corrugated Feeds loudspeaker are difficult to be manufactured again by the method for machining.
In order to obtain high band millimeter wave, submillimeter wave Behaviors of Corrugated Feeds loudspeaker, there has been proposed many process for making,
It substantially can be summarized as three major types：Number Milling Machining shaping, lamination welding fabrication, electrotyping process.Being adopted the traditional making of corrugated horn more
The processing method shaped with several millings, number milling shaping is only applicable to the larger corrugated horn of loudspeaker inner chamber free space, for small chi
Very little loudspeaker, because loudspeaker trough is deep, during processing, the size of knife bar length in the vertical and horizontal direction is all very big, directly affects
The formable depth and its size of trough, shape and surface accuracy, so, corrugated horn physical dimension will certainly influence number milling to add
The feasibility of work, this technique is only limited to the making of the big corrugated horn of physical dimension in decimetric wave, centimetre wave system.Lamination welding
Subject matter be that the fine and close quality of welding deformation and weld seam is difficult to control to, due to trumpet weldquality check and solder flux it is clear
Except very difficult, inside dimension can not be repaired.
Precise electrotyping method is to realize millimeter wave, the important method of submillimeter wave Behaviors of Corrugated Feeds loudspeaker, and its basic thought is
By the unmanageable Behaviors of Corrugated Feeds loudspeaker inner surface of number milling, the outer surface of processing electroforming core is changed into.According to Behaviors of Corrugated Feeds loudspeaker
Inner-cavity structure form, produces Feed Horn electroforming core, and precise electrotyping copper obtains Feed Horn electroforming part on core, so
Electroforming part is separated with the core demoulding afterwards, Feed Horn is obtained.Fig. 2 is Behaviors of Corrugated Feeds loudspeaker electroforming core outer surface structure section
Figure.The elocular electroformed layer that uniform deposition is obtained in Behaviors of Corrugated Feeds loudspeaker annular zanjon groove is brought to traditional electroforming making
Very big difficulty, the corner of ring-shaped groove is due to the influence of field-effect, and electric force lines distribution is more sparse, and current potential is low, then due to
Corner's concentration polarization and ion diffusion layer thickness are big, thus it is difficult to realize to the uniform electroformed deposit of corner, through for a long time
Electroforming after, can be formed sandwich electrolyte annular blister cavities, cause Feed Horn fragile structure and can not use, Fig. 3 is electroforming
Annular blister cavities profile.In figure 3, in core deep trench 201, the turning deposition velocity outside groove of electroforming layers of copper 301 is fast,
Interior turning deposition velocity is slow, and annular blister cavities 302 is formed after long-time electroforming.Foreign countries process it has been proposed that being embedded in deep trench
Copper billet or paraffin, then be electroformed, so as to realize filling leveling in deep trench, it is difficult to protect that the shortcoming of this manufacturing process, which is,
There is good contact between copper billet or paraffin and speaker body embedded by card, reduce Feed Horn intensity.Traditional electroforming process comes
Another difficult point for making Behaviors of Corrugated Feeds loudspeaker is the control of loudspeaker low roughness, due to Behaviors of Corrugated Feeds loudspeaker to machining accuracy and
Surface state has high request, typically from readily soluble metal material as core material, and core is removed by chemical attack mode, changes
Learn liquid parting and corrosion inevitably is produced to loudspeaker inner surface, it is difficult to obtain relatively low roughness to meet electromagnetic signal transmission
The requirement of technology.
The content of the invention
It is an object of the invention to provide a kind of precise electrotyping method for making high-frequency ripple Feed Horn fine structure, with
Solve the problem of conventional art makes the interior ripple fine structure difficult processing of high-frequency ripple Feed Horn high-aspect-ratio.
The second object of the present invention is to provide a kind of precise electrotyping side for making high-frequency ripple Feed Horn fine structure
Method, with solve existing precise electrotyping method can not the elocular electroformed layer of uniform deposition and Feed Horn intensity decreases ask
Topic.
The third object of the present invention is to provide a kind of precise electrotyping side for making high-frequency ripple Feed Horn fine structure
Method, is difficult to produce asking for the high-frequency ripple Feed Horn fine structure with low roughness surface to solve traditional electrocasting method
Topic.
To achieve the above object, the present invention provides a kind of precise electrotyping side for making high-frequency ripple Feed Horn fine structure
Method, comprises the following steps：
1. Feed Horn electroforming core is made；
2. Feed Horn electroforming mandrel surface is pre-processed；
3. resist layer is set up in Feed Horn electroforming mandrel surface；
4. precise electrotyping copper is carried out on Feed Horn electroforming core, electroforming part is obtained；
5. electroforming part is stripped and resist layer post processing, obtains Feed Horn.
It is preferred that 1. step specifically includes：The Feed Horn electroforming core is made by mach method.
It is preferred that the Feed Horn electroforming core is made by magnesium alloy, aluminium alloy or other fusible alloy materials.
It is preferred that step 2. in, the preprocessing process includes：Core is subjected to oil removing, acid etching successively, after processing
Nitrogen is dried up.
It is preferred that step 3. in, set up resist layer and specifically include：Mandrel surface be sequentially prepared adhesion layer, barrier layer and
Leading body layer.
It is preferred that the method for preparing adhesion layer uses one kind in electroplating technology, chemical plating process or magnetron sputtering technique；
The method on barrier layer is prepared using one kind in electroplating technology, chemical plating process or magnetron sputtering technique；Prepare leading body layer
Method uses one kind in electroplating technology, chemical plating process or magnetron sputtering technique.
It is preferred that the material for preparing the adhesion layer is titanium or titanium-tungsten；The material for preparing the barrier layer is nickel, platinum
Or one kind in palladium；The material for preparing leading body layer is gold.
It is preferred that step 4. in, precise electrotyping simultaneously using conformal anode, negative electrode rotation, plating solution jet, bidirectional pulse and
Physics rubbing down mode.
It is preferred that the conformal anode is detachable taper titanium basket, on the inside of coating bath spray cup, titanium basket is by spray cup
If nozzle, which is separated into, is equipped with conductive seat on stem portion, titanium basket.
It is preferred that the plating solution jet spray cup inwall is provided with nozzle, nozzle is detachable hollow thread pipe, and plating solution is through magnetic
Power is pumped toward spray cup, projects to form jet through nozzle.
It is preferred that the rubbing down medium of the physics rubbing down can be polishing felt, polyurethane, wire brush or other rigid solids
Material, rubbing down medium is fixed on negative electrode bearing fixed seat through rubbing down frame.
It is preferred that 5. step specifically includes：The demoulding is to remove core, and the resist layer post processing includes dissolving adhesion successively
Layer and barrier layer, and retain leading body layer.
A kind of precise electrotyping method for making high-frequency ripple Feed Horn fine structure that the present invention is provided, first using easy
Molten alloy material makes the electroforming core of Feed Horn, then sets up resist layer, Ran Hou in Feed Horn electroforming mandrel surface
Precise electrotyping copper is carried out on Feed Horn electroforming core, electroforming part is obtained, the last electroforming part demoulding obtains Feed Horn.Pass through
Resist layer is set up, makes core anti-plate corrosion, while protect the loudspeaker inwall after plating not to be demolded corrosion, can with guarantee
To produce the loudspeaker of inner wall smooth.And precise electrotyping process is by employing simultaneously that conformal anode, negative electrode rotate, plating solution penetrates
The mode that stream, bidirectional pulse and physics rubbing down are combined, can obtain satisfactory Feed Horn after the demoulding.
Beneficial effects of the present invention：The present invention makes high-frequency, high-performance Behaviors of Corrugated Feeds loudspeaker using precise electrotyping technique,
Compared with traditional electrocasting method, this method can realize elocular uniform electroformed deposit in loudspeaker fine structure, and greatly
Ground improves Feed Horn structural strength, prepares resist layer in mandrel surface, it is ensured that the low roughness of flared surface, effectively carries
High microwave signal transmission reliability.
This method can not only realize no blister cavities electroformed deposit in loudspeaker tooth, improve Feed Horn intensity, moreover it is possible to obtain
The Behaviors of Corrugated Feeds loudspeaker of low roughness inner surface.
Brief description of the drawings
Fig. 1 is high-frequency ripple Feed Horn inner surface structure sectional view；
Fig. 2 is high-frequency ripple Feed Horn electroforming core outer surface structure sectional view；
Fig. 3 is the annular blister cavities sectional view of electroforming；
Fig. 4 is the coating bath and anode construction sectional view of precise electrotyping of the embodiment of the present invention；
Fig. 5 is the cathode construction sectional view of precise electrotyping of the embodiment of the present invention；
Fig. 6 is the electroforming core resist layer sectional view of the embodiment of the present invention；
Fig. 7 is the flow chart that precise electrotyping method according to embodiments of the present invention makes Behaviors of Corrugated Feeds loudspeaker.
Embodiment
In order to be able to make advantages and positive effects of the present invention find full expression, with reference to the accompanying drawings and examples to this hair
It is bright to further illustrate, it is specific as follows：
Embodiment 1
The step of the present embodiment prepares high-frequency ripple Feed Horn is as shown in fig. 7, be specially：
Step 1：Make Feed Horn electroforming core.By machining or the method for casting, institute in Fig. 1 is produced
The electroforming core of the Feed Horn shown, its outer surface is as shown in Figure 2.Wherein, in Fig. 1, the width of loudspeaker tooth 101 0.24mm, flared channels
102 width 0.24mm, the depth 0.37mm of flared channels 102, the number of teeth 80, loudspeaker input radius 0.75mm, output radius 4.33mm, loudspeaker are total
Long 47.2mm, Behaviors of Corrugated Feeds horn frequency is 183GHz.In the present embodiment, core is made from 6061 aluminum alloy materials,
Obtained as shown in Fig. 2 the size of core groove 201 is the duplication of loudspeaker tooth 101, wide 0.24mm, deep 0.37mm, the size of core tooth 202 is
Flared channels 102 are replicated and obtained, wide 0.24mm.
Step 2：The electroforming core of Feed Horn to being made in step 1 carries out surface preparation.Core is carried out first
Oil removal treatment, i.e., clean core in the mixed solution of tertiary sodium phosphate and sodium metasilicate；Acid etching then is carried out to core, i.e.,
Core is cleaned in the mixed solution of phosphoric acid, sulfuric acid and nitric acid.The cleaned core of oil removing and acid etching uses nitrogen
Drying.
Step 3：Resist layer is set up on the surface of the Feed Horn electroforming core after surface preparation in step 2.Specially：
First, adhesion layer 601 is prepared in electroforming mandrel surface, as shown in Figure 6.Using magnetron sputtering technique, in feed
Loudspeaker electroforming mandrel surface sputters Ti (titanium) film layers as adhesion layer, and the thickness of adhesion layer 601 is。
Secondly, barrier layer 602 is prepared in electroforming mandrel surface, as shown in Figure 6.Using magnetron sputtering technique, in feed
Loudspeaker electroforming mandrel surface sputters Pd (palladium) film layers as barrier layer, and the thickness of barrier layer 602 is。
Finally, leading body layer 603 is prepared in electroforming mandrel surface, as shown in Figure 6.Using magnetron sputtering technique, in feedback
Loudspeaker electroforming mandrel surface in source sputters Au (gold) film layers as leading body layer, and leading body 603 thickness of layer are。
The Ti layers that are sequentially prepared, the composite films of Pd layers and Au layers composition are as resist layer, with anti-plate liquid, antiacid alkali
The effect of corrosion, while the low roughness of loudspeaker can be ensured.
Step 4：The precise electrotyping copper on Feed Horn electroforming core.Precise electrotyping employs conformal anode, negative electrode simultaneously
Rotation, plating solution jet, bidirectional pulse and physics rubbing down mode.
As shown in figure 4, making taper titanium basket as conformal anode, electroforming mandrel surface electricity can be improved using conformal anode
The uniformity of field.Wherein, outer spray cup 402 and interior spray cup 403 be installed in the major trough body 401 of coating bath, interior spray cup 403 inwall be equipped with as
Shape anode 404, conformal anode 404 is the taper titanium basket equipped with phosphorous copper balls, and the top of conformal anode 404 is equipped with titanium matter anode conducting
Nozzle 406 is additionally provided with seat 405, the interior spray inwall of cup 403, nozzle 406 is dismountable PP hollow threads pipe, and nozzle 406 3 is arranged totally
By the even partition of conformal anode 404 into three parts, nozzle 406 is staggered to be in Different Plane.It is interior to spray the bottom side of cup 403 and outer
It is uniform flow chamber 407 to spray the space between the bottom side of cup 402.Plating solution is sent to from Outer Tube under magnetic force pumping action via uniform flow chamber 407
Interior spray cup, is projected through nozzle 406 and forms jet, and major trough body 401 is overflowed back again in spray cup 403 including the plating solution after jet plating
Enter Outer Tube afterwards, complete one cycle.During plating, the jet-loop of plating solution is constantly carried out, this mode is conducive to plating solution to hand over
Change, concentration polarization and ion diffusion layer thickness at reduction trench corner.
As shown in figure 5, electroforming negative electrode (core) and rubbing down frame 501 are arranged on bearing fixed seat 503,504,505 difference
It is connecting shaft set and electric rotating machine.Electroforming negative electrode is connected by adjustable bolt 502 with electric rotating machine 505, the regulation core of adjustable bolt 502
Stretched above and below mould, 505 control cores are in rotary mode during electroforming.Electroforming negative electrode is located in rubbing down frame 501, and rubbing down medium is fixed
Removed on rubbing down frame 501 so that the notch of core groove 201 is grown into too fast copper peak rubbing down.
During precise electrotyping, treat that the core output end end face of electroforming is protected with insulating cement, structural cover shown in Fig. 5 is located at
Shown in Fig. 4 in structure, conformal anode and negative electrode rotation, while being led to using bidirectional pulse to the titanium anode conducting seat 405 in Fig. 4
Electricity, produces the electric current of two-way changing between conformal anode and negative electrode, plating solution jet starts to deposit copper on the core of electroforming negative electrode.Electricity
The jet flow of nozzle 406 is 22L/h, lift 13.5m during casting, and it is 100 beats/min that connecting shaft, which covers 504 speeds of rotation,.Adopted during electroforming
Bidirectional pulse, pulse forward direction peak current density 1A/dm2, inverse peak current density 3A/dm2, average current density
0.24A/dm2, positive dutycycle 33%, reverse dutycycle 20%, pulse frequency is 1000Hz, and then electroforming 36 hours keeps
Parameter constant, selects direct current electroforming mode, electric current 1.2A, and the electroforming time is 188 hours, obtains electroforming part.Plating solution jet is plating
Liquid dynamic circulation in coating bath, may be such that the copper in plating solution is fully electroplated on plating piece, and deposition velocity is fast.Bidirectional pulse can be with
So that the layers of copper that each several part is electroplated on core is more uniform.
Step 5：Electroforming part is stripped, resist layer post processing, obtains Feed Horn.
First, electroforming part is stripped.Electroforming part is placed in 10% NaOH alkaline solutions and be stripped, until aluminum alloy materials
Core is completely dissolved；
Then, carrying out resist layer post processing includes：A, dissolving adhesion layer, mix molten using 30% hydrogen peroxide with 10% ammoniacal liquor
Liquid dissolves the Ti layers of adhesion layer 601；B, dissolving barrier layer, are dissolved using the mixed solution of potassium bichromate, phosphoric acid and hydrochloric acid and stopped
The Pd layers of layer 602；
Retain the Au layers of leading body layer 603, Au layers so far, can obtain Behaviors of Corrugated Feeds loudspeaker as signal transmission film layer.
Embodiment 2
In the present embodiment, size except Feed Horn as described below and electroforming core, in addition to the making material of part-structure,
Material, step and the preparation method of remainder are identical with embodiment one, wherein, different partial contents is as follows：
In step 1, the electroforming core of the Feed Horn shown in Fig. 1 is produced, wherein, the Feed Horn chi described in Fig. 1
It is very little as follows：The width 0.27mm of loudspeaker tooth 101, the width of flared channels 102 0.27mm, groove depth 0.45mm, the number of teeth 80, loudspeaker input radius
2.71mm, output radius 20.85mm, loudspeaker overall length 76.23mm, Behaviors of Corrugated Feeds horn frequency is 150GHz.
In the present embodiment, core is made from AZ40M magnesium alloy materials, and the size of core groove 201 as shown in Figure 2 is
Loudspeaker tooth 101 is replicated and obtained, wide 0.27mm, deep 0.45mm, and the size of core tooth 202 is that the duplication of flared channels 102 is obtained, groove width
0.27mm。
Step 2：The electroforming core of Feed Horn to being made in step 1 carries out surface preparation.Core is carried out first
Oil removal treatment, i.e., clean core in sodium hydroxide solution；Acid etching then is carried out to core, i.e., it is core is molten in chromic acid
Cleaned in liquid.The cleaned core of oil removing and acid etching is dried up using nitrogen.
In step 3, during resist layer manufactured in the present embodiment, first, using magnetron sputtering technique, in Feed Horn electroforming core
Mould surface sputters TiW (titanium tungsten) layers as adhesion layer 601, and the thickness of adhesion layer 601 is.Then, using magnetron sputtering skill
Art, sputters Pd layers as barrier layer 602, the thickness of barrier layer 602 is in Feed Horn electroforming mandrel surface.Finally adopt
With magnetron sputtering technique, Au layers are sputtered as leading body layer 603, leading body 603 thickness of layer in Feed Horn electroforming mandrel surface
For
In step 4, during precise electrotyping, jet flow is 22L/h, lift 13.5m, 504 80 beats/min of the speeds of rotation.Adopt
Bidirectional pulse electroforming, pulse forward direction peak current density 1.5A/dm2, inverse peak current density 4.5A/dm2, average electricity
Current density 0.36A/dm2, positive dutycycle 33%, reverse dutycycle 20%, pulse frequency is 1000Hz, electroforming 52 hours, so
After keep parameter constant, select direct current electroforming mode, electric current 1.5A, the electroforming time is 188 hours, obtains electroforming part.
In step 5, during the demoulding, electroforming part is placed in dilute hydrochloric acid solution and is stripped, until magnesium alloy is completely dissolved.Resisted
The TiW layers of adhesion layer 601 are dissolved when losing layer post processing using hydrogen peroxide, the mixed solution of potassium bichromate, phosphoric acid and hydrochloric acid is used
The Pd layers on barrier layer 602 are dissolved, the Au layers of leading body layer 603 signal transmission film layer are retained as, you can obtain Feed Horn.
The method that the present invention is provided, it is adaptable to make the loudspeaker facewidth and be more than more than 0.1mm, groove depth/wide frequency than less than 5
90GHz millimeter wave, submillimeter wave Behaviors of Corrugated Feeds loudspeaker.
The resist layer prepared in the inventive method is not limited with above-described embodiment, wherein, prepare adhesion layer 601, barrier layer
602 and leading body layer 603 method can also be electroplating technology or chemical plating process.The material for preparing barrier layer 602 can be with
For Ni (nickel) or Pt (platinum), when barrier layer is Ni layers, the etchant solution on dissolving barrier layer is molten for 50% nitric acid in step 5
Liquid, when barrier layer is Pt layers, the etchant solution on dissolving barrier layer is hydrochloric acid and the mixed solution of hydrogen peroxide in step 5.
During the inventive method precise electrotyping, the rubbing down medium of physics rubbing down can be polishing felt, polyurethane, steel wire
Brush or other rigid solid materials.
Material and each several part preparation method employed in the inventive method are not limited with the combination of above-mentioned two embodiment, no
Same technical characteristic can be combined in the case where not conflicting according to actual conditions.
The foregoing is only a specific embodiment of the invention, but protection scope of the present invention is not limited thereto, any
Those skilled in the art the invention discloses technical scope in, to the present invention deformation or replacement done, should all cover
Within protection scope of the present invention.Therefore, protection scope of the present invention should be defined by described scope of the claims.
Claims (11)
1. a kind of precise electrotyping method for making high-frequency ripple Feed Horn fine structure, it is characterised in that comprise the following steps：
1. Feed Horn electroforming core is made；
2. Feed Horn electroforming mandrel surface is pre-processed；
3. resist layer is set up in Feed Horn electroforming mandrel surface；
4. precise electrotyping copper is carried out on Feed Horn electroforming core, electroforming part is obtained；
5. electroforming part is stripped and resist layer post processing, obtains Feed Horn；
Wherein, the loudspeaker facewidth of the Feed Horn is more than 0.1mm, groove depth/wide ratio and is less than 5；
Step 4. in, precise electrotyping is simultaneously using conformal anode, negative electrode rotation, plating solution jet, bidirectional pulse and physics rubbing down core
The mode of mould.
2. the precise electrotyping method according to claim 1 for making high-frequency ripple Feed Horn fine structure, its feature exists
In 1. step specifically includes：The Feed Horn electroforming core is made by mach method.
3. the precise electrotyping method according to claim 1 or 2 for making high-frequency ripple Feed Horn fine structure, its feature
It is, the Feed Horn electroforming core is made by magnesium alloy, aluminium alloy or other fusible alloy materials.
4. the precise electrotyping method according to claim 1 for making high-frequency ripple Feed Horn fine structure, its feature exists
In, step 2. in, the preprocessing process includes：Core is carried out to nitrogen after oil removing, acid etching, processing successively to dry up.
5. the precise electrotyping method according to claim 1 for making high-frequency ripple Feed Horn fine structure, its feature exists
In, step 3. in, set up resist layer and specifically include：Adhesion layer, barrier layer and leading body layer are sequentially prepared in mandrel surface.
6. the precise electrotyping method according to claim 5 for making high-frequency ripple Feed Horn fine structure, its feature exists
In, prepare adhesion layer method use electroplating technology, chemical plating process or magnetron sputtering technique in one kind；Prepare barrier layer
Method uses one kind in electroplating technology, chemical plating process or magnetron sputtering technique；The method of leading body layer is prepared using plating
One kind in technique, chemical plating process or magnetron sputtering technique.
7. the precise electrotyping method according to claim 5 for making high-frequency ripple Feed Horn fine structure, its feature exists
In the material for preparing the adhesion layer is titanium or titanium-tungsten；The material for preparing the barrier layer is one in nickel, platinum or palladium
Kind；The material for preparing leading body layer is gold.
8. the precise electrotyping method according to claim 1 for making high-frequency ripple Feed Horn fine structure, its feature exists
In the conformal anode is detachable taper titanium basket, on the inside of coating bath spray cup, if titanium basket is separated into by the nozzle on spray cup
Conductive seat is housed on stem portion, titanium basket.
9. the precise electrotyping method according to claim 1 for making high-frequency ripple Feed Horn fine structure, its feature exists
In the plating solution jet spray cup inwall is provided with nozzle, and nozzle is detachable hollow thread pipe, and plating solution is sent to spray through magnetic drive pump
Cup, projects to form jet through nozzle.
10. the precise electrotyping method according to claim 1 for making high-frequency ripple Feed Horn fine structure, its feature exists
In the rubbing down medium of the physics rubbing down can be polishing felt, polyurethane, wire brush or other rigid solid materials, and rubbing down is situated between
Matter is fixed on negative electrode bearing fixed seat through rubbing down frame.
11. the precise electrotyping method according to claim 5 for making high-frequency ripple Feed Horn fine structure, its feature exists
In 5. step specifically includes：The demoulding is to remove core, and the resist layer post processing includes dissolving adhesion layer and barrier layer successively,
And retain leading body layer.
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| CN114205729B (en) * | 2021-12-17 | 2023-10-27 | 南京驰韵科技发展有限公司 | Processing technology of terahertz frequency band feed source loudspeaker |
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