CN104142115A - Magnetic grating ruler precise measuring instrument - Google Patents
Magnetic grating ruler precise measuring instrument Download PDFInfo
- Publication number
- CN104142115A CN104142115A CN201310166809.7A CN201310166809A CN104142115A CN 104142115 A CN104142115 A CN 104142115A CN 201310166809 A CN201310166809 A CN 201310166809A CN 104142115 A CN104142115 A CN 104142115A
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- magnetic
- measuring instrument
- precision measuring
- stator
- railings ruler
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Abstract
The invention provides a magnetic grating ruler precise measuring instrument. The magnetic grating ruler precise measuring instrument comprises a stator plate dial, a movable magnetic pole, a signal processing unit and a display unit. The stator plate dial comprises a plurality of magnetic sensor chips arrayed in the length direction of the stator plate dial, each magnetic sensor chip comprises at least two magnetic induction films in parallel and a bonding pad electrically connected with the magnetic induction films, and the magnetic induction films are connected to form Wheatstone bridges with independent output channels. The movable magnetic pole moves in the length direction of the stator plate dial, and the magnetic field generated by the movable magnetic pole makes the magnetic sensor chip opposite to the movable magnetic pole in position induce the magnetic field and output a differential signal. The signal processing unit is used for obtaining the relative position, on the stator plate dial, of the movable magnetic pole according to the differential signal and converting the relative position into the length and the size of a measured device. The display unit is used for displaying the length and the size of the measured device. The magnetic grating ruler precise measuring instrument is high in integration level and accuracy, convenient to manufacture, suitable for batch production, low in cost and convenient to use and has wide market application prospects.
Description
Technical field
The invention belongs to precision measurement field, be specifically related to a kind of magnetic railings ruler precision measuring instrument.
Background technology
The precision measuring instrument that industrial circle adopts is at present all mechanically minimum scale to be amplified, to obtain more accurate measured value.As, vernier caliper is to utilize vernier that the minimum scale of main scale is amplified, thereby reaches the measuring accuracy of 0.02mm.For another example, micrometer caliper is to utilize spiral chi that the minimum scale of main scale is amplified, and utilizes spiral chi that air line distance is converted into angular displacement, thereby measuring accuracy is brought up to 0.01mm.
For vernier caliper, want to improve its measuring accuracy, can only increase the vernier lattice number of vernier caliper, but because main scale and the every lattice of vernier differ 1/n millimeter, the increase of vernier lattice number can increase parallax, this will increase user and distinguish the difficulty of vernier.For micrometer caliper, can only improve its degree of accuracy by dwindling the minimum scale of spiral chi, this can increase the difficulty of use equally.In fact, owing to being subject to the restriction of mechanical process capacity, this mode that improves measuring accuracy by mechan-amplifier will cause the increase of manufacture difficulty and cost, and performance difficulty, is unsuitable for batch production.
Summary of the invention
The technical problem to be solved in the present invention is exactly for the above-mentioned defect existing in precision measuring instrument, and a kind of magnetic railings ruler precision measuring instrument is provided, and its measuring accuracy is high, and easy to make, cost is low.
For this reason, the invention provides a kind of magnetic railings ruler precision measuring instrument, comprising:
Stator index dial, it comprises multiple magnetic sensor chips of arranging along its length, each described magnetic sensor chip comprises at least two inductive magnetic thin films parallel to each other and pad, described pad is electrically connected with described inductive magnetic thin film, and described inductive magnetic thin film connects into the Wheatstone bridge with independent output channel;
Mobile magnetic pole, its length direction along described stator index dial moves, and the magnetic field that described mobile magnetic pole produces can make described magnetic sensor chip induction the output difference sub-signal relative with its position;
Signal processing unit, it is for obtain the relative position of described mobile magnetic pole at described stator index dial according to described differential signal, and converts thereof into the length dimension of measured device;
Display unit, it is for showing the length dimension of measured device.
Wherein, described magnetic sensor chip longitudinal arrangement setting on the length direction of described stator index dial.
Wherein, on the length direction of described stator index dial, adjacent two described magnetic sensor chip Heterogeneous Permutations.
Wherein, described inductive magnetic thin film shifts to install at its length direction.
Wherein, described magnetic sensitive film comprises giant magnetoresistance magnetic sensitive film, anisotropic magnetoresistive magnetic sensitive film, tunneling effect magnetic resistance magnetic sensitive film, giant magnetoresistance effect magnetic resistance magnetic sensitive film, Hall effect film or giant Hall effect film.
Wherein, also comprise printed circuit board, the wiring of being located at described printed circuit board is electrically connected with described inductive magnetic thin film by described pad, and described differential signal transfers to described signal processing unit by described printed wiring board.
Wherein, described mobile magnetic pole comprises permanent magnet and shielding case, and described shielding case comprises at least one slit described permanent magnet is placed in described shielding case, and the magnetic field of described permanent magnet is launched to corresponding magnetic sensitive film by slit.
Wherein, also comprise reset unit, it is for described signal processing unit is resetted, and the reading of described display unit is made zero.
Wherein, described magnetic railings ruler precision measuring instrument is vernier caliper, and described stator index dial is located at the main scale of described vernier caliper; Described mobile magnetic pole is located on the vernier of described vernier caliper.
Wherein, described magnetic railings ruler precision measuring instrument is micrometer caliper, and a set of described stator index dial and described mobile magnetic pole are located at respectively to micrometric screw and main scale; Another set of described stator index dial and described mobile magnetic pole are located at respectively to spiral chi and main scale simultaneously; Or, mobile magnetic pole is located to main scale, two described stator index dials are located at respectively to micrometric screw and spiral chi.
The present invention has following beneficial effect:
Magnetic railings ruler precision measuring instrument provided by the invention comprises stator index dial and mobile magnetic pole, in length direction spread configuration multiple magnetic sensor chips unit or a unit that comprises multiple magnetic sensor chips of stator index dial, each magnetic sensor chip comprises the Wheatstone bridge being made up of inductive magnetic thin film, mobile magnetic pole moves along the length direction of stator index dial, make the magnetic sensor chip induction output difference sub-signal relative with its position, signal processing unit can be determined the relative position of mobile magnetic pole at stator index dial according to this differential signal, can obtain the displacement of mobile magnetic pole in stator index dial direction according to this relative position, and then the size of acquisition testee, display unit can show the size of mobile magnetic pole at the numerical value of the relative position of stator index dial or demonstration testee.Because the integrated level of magnetic sensor chip is high, and be convenient to make, be suitable for Mass production, can reduce cost of manufacture.And, this magnetic railings ruler precision measuring instrument is the magnetic field of responding to mobile magnetic pole by magnetic sensor chip, and measure the size of object under test by the relative displacement of magnetic sensor chip and mobile magnetic pole, precision is high, easy to use, meet the growth requirement of modern society to precision measuring instrument, there is market application foreground widely.
Brief description of the drawings
Fig. 1 is the theory diagram of embodiment of the present invention magnetic railings ruler precision measuring instrument;
Fig. 2 is the structural representation of embodiment of the present invention stator index dial;
Fig. 3 is the structural representation of embodiment of the present invention magnetic sensor chip;
Fig. 4 is the schematic diagram of embodiment of the present invention magnetic sensor chip.
Fig. 5 is the structural representation of embodiment of the present invention magnetic railings ruler precision measuring instrument.
Embodiment
For making those skilled in the art understand better technical scheme of the present invention, below in conjunction with accompanying drawing, magnetic railings ruler precision measuring instrument provided by the invention is described in detail.
Fig. 1 is the theory diagram of embodiment of the present invention magnetic railings ruler precision measuring instrument.As shown in Figure 1, the magnetic railings ruler precision measuring instrument that the present embodiment provides comprises stator index dial 1, mobile magnetic pole 2, signal processing unit 3 and display unit 4.Stator index dial 1 is provided with magnetic sensor chip, and it is output difference sub-signal under the induction of mobile magnetic pole 2.Signal processing unit 3 is connected with magnetic sensor chip, and its differential signal according to magnetic sensor chip output obtains the length of measured device.Display unit 4 is connected with signal processing unit 3, for showing the length of measured device.
Fig. 2 is the structural representation of embodiment of the present invention stator index dial.As shown in Figure 2, stator index dial 1 comprises the multiple magnetic sensor chip C that arrange along its length
1, C
2, C
3c
n.Each magnetic sensor chip C comprises at least two inductive magnetic thin films parallel to each other, the pinning direction of inductive magnetic thin film can be identical, also can be contrary, and two inductive magnetic thin films form the Wheatstone bridge with independent output channel, each magnetic sensor chip C has an independently output channel.In the time that magnetic sensor chip C is subject to the induction of external magnetic field, Wheatstone bridge output difference sub-signal.
Particularly, as shown in Figure 3, magnetic sensor chip C comprises two inductive magnetic thin films and three pads, the first pad 12a and the second pad 12b are separately positioned on an end of the first inductive magnetic thin film 11a and the second inductive magnetic thin film 11b, the first inductive magnetic thin film 11a is connected the 3rd pad 12c with the other end of the second inductive magnetic thin film 11b, the 3rd pad 12c is electrically connected the first inductive magnetic thin film 11a and the second inductive magnetic thin film 11b as common port.Utilize three pad 12a, 12b, 12c two inductive magnetic thin film 11a, 11b can be connected into Hui Sitong half-bridge circuit.
In the present embodiment, magnetic sensitive film can adopt and comprise giant magnetoresistance magnetic sensitive film, anisotropic magnetoresistive magnetic sensitive film, tunneling effect magnetic resistance magnetic sensitive film, giant magnetoresistance effect magnetic resistance magnetic sensitive film, Hall effect film or giant Hall effect film.
The multiple magnetic sensor chip C of the present embodiment arrange along the length direction of stator index dial.Preferably, at the length direction of stator index dial, magnetic sensor chip longitudinal arrangement.It should be noted that, the length direction of inductive magnetic thin film is defined as the horizontal of magnetic sensor chip by the present embodiment, and the Width of inductive magnetic thin film is defined as to the longitudinal of magnetic sensor chip.That is to say longitudinally laterally narrow than magnetic sensor chip of magnetic sensor chip.Make magnetic sensor chip longitudinal arrangement can improve the precision of magnetic railings ruler precision measuring instrument.
More preferably, on the length direction of stator index dial, adjacent two magnetic sensor chips shift to install, and to reduce the distance between adjacent two magnetic sensor chips, thereby further improve the precision of magnetic railings ruler precision measuring instrument.
In order further to improve the precision of magnetic railings ruler precision measuring instrument, the present embodiment shifts to install the inductive magnetic thin film that forms magnetic sensor chip at its length direction, to reduce the width of magnetic sensor chip.
In another embodiment, each magnetic sensor chip C comprises multiple Wheatstone bridges, and multiple Wheatstone bridges are arranged at the length direction of stator index dial.Each Wheatstone bridge has an output channel, and each magnetic sensor chip C has the output channel consistent with Wheatstone bridge quantity.The structure of Wheatstone bridge as described above, does not repeat them here.
As shown in Figure 1, mobile magnetic pole 2 comprises permanent magnet.Certainly, permanent magnet also can adopt other parts that can produce magnetic field such as coil to replace.Mobile magnetic pole 2 moves at the length direction of stator index dial 1, and in moving process, makes position Wheatstone bridge corresponding thereto respond to and export the differential signal of a near sinusoidal ripple.
Preferably, mobile magnetic pole 2 also comprises the shielding case (not shown) that shielding material is made, and one or more gap is set on shielding case.Permanent magnet is placed in shielding case, and the magnetic field that permanent magnet produces is through the relative Wheatstone bridge induction output difference sub-signal in Shi Yuqi position, gap, and screening can improve measuring accuracy on the one hand; On the other hand, can prevent that external environment condition magnetic field from producing and disturbing magnetic sensor chip, thereby improve the reliability of magnetic railings ruler precision measuring instrument.
Fig. 4 is the schematic diagram of embodiment of the present invention magnetic sensor chip.In figure, arrow represents the pinning direction of inductive magnetic thin film; Horizontal ordinate represents that (m), ordinate represents voltage (mV) to μ in displacement.As shown in Figure 4, magnetic sensor chip is subject to the magnetic fields of mobile magnetic pole 2, thereby causes its impedance output difference sub-signal that changes, and this differential signal is a sine wave, the center of adjacent peaks and trough is the symcenter of magnetic sensor chip, i.e. the symcenter of two inductive magnetic thin films.This symcenter is as the scale of magnetic sensor chip.In the time making magnetic railings ruler precision measuring instrument, taking the scale of this magnetic sensor chip as benchmark, magnetic sensor chip is equidistantly arranged at the length direction of stator index dial.
The present embodiment magnetic sensor chip 1 also comprises printed circuit board and capillary, one end of being located at the wiring of printed circuit board is electrically connected with corresponding capillary (not shown), the other end is electrically connected with the corresponding pad (not shown) of being located at magnetic sensor chip 1, by capillary, the input/output terminal of magnetic sensor chip 1 is electrically connected with the wiring of being located at printed circuit board.The input end of signal processing unit 3 is electrically connected with the wiring of printed circuit board, the differential signal of exporting to receive magnetic sensor chip 1, as shown in Figure 1.Signal processing unit 3 is processed the differential signal of magnetic sensor chip output, and obtains the relative position of mobile magnetic pole 2 at stator index dial.
Signal processing unit 3 comprises processor 31 and D/A converter module 32, and D/A converter module 32 is converted to digital signal for the differential signal that magnetic sensor chip is exported, and is sent to processor 31.The differential signal that processor 31 logarithmic mode modular converters 32 are changed is processed, and obtains the relative position of mobile magnetic pole 1 and stator index dial 2.Can obtain the length of measured device according to mobile magnetic pole 1 and the relative position of stator index dial 2.
Display unit 4 is electrically connected with signal processing unit 3, for showing the length of mobile magnetic pole 2 at relative position or the measured device of stator index dial.User can directly read from display unit the length of relative position or the measured device of mobile magnetic pole 2.Display unit 4 can be used for showing for liquid crystal display or other parts of numerical value.
The present embodiment magnetic railings ruler precision measuring instrument can also comprise reset unit, resets, and the reading of display unit 4 is made zero for signal processing unit 3.It is more flexible that reset unit uses magnetic railings ruler precision measuring instrument.For example, if user will carry out multistage measurement to testee, measuring after primary importance, as long as utilize reset unit that signal processing unit 3 is resetted and display unit 4 makes zero, then mobile magnetic pole 2 is moved to the second measuring position, now the reading of display unit 4 is the distance between primary importance and the second place.
The present embodiment magnetic railings ruler precision measuring instrument can be applied to vernier caliper,, stator index dial is located to the main scale of vernier caliper that is, mobile magnetic pole is located to the vernier of vernier caliper.
The present embodiment magnetic railings ruler precision measuring instrument can also be applied to micrometer caliper, as a set of stator index dial and mobile magnetic pole are located at respectively to micrometric screw 101 and main scale 102, to obtain the size of main scale; Another set of stator index dial and mobile magnetic pole are located at respectively to spiral chi 103 and main scale 102, to obtain the size of spiral chi simultaneously.Or, mobile magnetic pole is located to main scale 102, two stator index dials are located at respectively to micrometric screw 101 and spiral chi 103, utilize a mobile magnetic pole to respond to respectively the magnetic sensor chip of being located at micrometric screw 101 and spiral chi 103, thereby obtain the size of measured device.
Certainly, magnetic railings ruler of the present invention also can be applied to other displacement measuring instrument or dimensional measurement instrument, can obtain same technique effect.
The magnetic railings ruler precision measuring instrument that the present embodiment provides comprises stator index dial and mobile magnetic pole, at the multiple magnetic sensor chips of length direction spread configuration of stator index dial, each magnetic sensor chip comprises the Wheatstone bridge being made up of inductive magnetic thin film, when mobile magnetic pole moves along the length direction of stator index dial, can make the magnetic sensor chip induction output difference sub-signal relative with its position, signal processing unit can be determined the relative position of mobile magnetic pole at stator index dial according to this differential signal, can obtain the displacement of mobile magnetic pole in stator index dial direction according to this relative position, and then the size of acquisition testee, display unit can show the size of mobile magnetic pole at the numerical value of the relative position of stator index dial or demonstration testee.Because the integrated level of magnetic sensor chip is high, and be convenient to make, be suitable for Mass production, can reduce cost of manufacture.And, this magnetic railings ruler precision measuring instrument is the magnetic field of responding to mobile magnetic pole by magnetic sensor chip, and relative position by mobile magnetic pole and magnetic sensor chip obtains the size of testee, easy to use, meet the growth requirement of modern society to precision measuring instrument, there is market application foreground widely.
Be understandable that, above embodiment is only used to principle of the present invention is described and the illustrative embodiments that adopts, but the present invention is not limited thereto.For those skilled in the art, without departing from the spirit and substance in the present invention, can make various modification and improvement, these modification and improvement are also considered as protection scope of the present invention.
Claims (10)
1. a magnetic railings ruler precision measuring instrument, is characterized in that, comprising:
Stator index dial, it comprises multiple magnetic sensor chips of arranging along its length, each described magnetic sensor chip comprises at least two inductive magnetic thin films parallel to each other and pad, described pad is electrically connected with described inductive magnetic thin film, and described inductive magnetic thin film connects into the Wheatstone bridge with independent output channel;
Mobile magnetic pole, its length direction along described stator index dial moves, and the magnetic field that described mobile magnetic pole produces can make described magnetic sensor chip induction the output difference sub-signal relative with its position;
Signal processing unit, it is for obtain the relative position of described mobile magnetic pole at described stator index dial according to described differential signal, and converts thereof into the length dimension of measured device;
Display unit, it is for showing the length dimension of measured device.
2. magnetic railings ruler precision measuring instrument according to claim 1, is characterized in that, described magnetic sensor chip is longitudinal arrangement setting on the length direction of described stator index dial.
3. magnetic railings ruler precision measuring instrument according to claim 1, is characterized in that, on the length direction of described stator index dial, and adjacent two described magnetic sensor chip Heterogeneous Permutations.
4. magnetic railings ruler precision measuring instrument according to claim 1, is characterized in that, described inductive magnetic thin film shifts to install at its length direction.
5. magnetic railings ruler precision measuring instrument according to claim 1, it is characterized in that, described magnetic sensitive film comprises giant magnetoresistance magnetic sensitive film, anisotropic magnetoresistive magnetic sensitive film, tunneling effect magnetic resistance magnetic sensitive film, giant magnetoresistance effect magnetic resistance magnetic sensitive film, Hall effect film or giant Hall effect film.
6. magnetic railings ruler precision measuring instrument according to claim 1, it is characterized in that, comprise printed circuit board, the wiring of being located at described printed circuit board is electrically connected with described inductive magnetic thin film by described pad, and described differential signal transfers to described signal processing unit by described printed wiring board.
7. magnetic railings ruler precision measuring instrument according to claim 1, it is characterized in that, described mobile magnetic pole comprises permanent magnet and shielding case, described shielding case comprises at least one slit described permanent magnet is placed in described shielding case, and the magnetic field of described permanent magnet is launched to corresponding magnetic sensitive film by slit.
8. magnetic railings ruler precision measuring instrument according to claim 1, is characterized in that, comprises reset unit, and it is for described signal processing unit is resetted, and the reading of described display unit is made zero.
9. magnetic railings ruler precision measuring instrument according to claim 1, is characterized in that, described magnetic railings ruler precision measuring instrument is vernier caliper, and described stator index dial is located at the main scale of described vernier caliper; Described mobile magnetic pole is located on the vernier of described vernier caliper.
10. magnetic railings ruler precision measuring instrument according to claim 1, is characterized in that, described magnetic railings ruler precision measuring instrument is micrometer caliper, and a set of described stator index dial and described mobile magnetic pole are located at respectively to micrometric screw and main scale; Another set of described stator index dial and described mobile magnetic pole are located at respectively to spiral chi and main scale simultaneously; Or, mobile magnetic pole is located to main scale, two described stator index dials are located at respectively to micrometric screw and spiral chi.
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201310166809.7A CN104142115A (en) | 2013-05-08 | 2013-05-08 | Magnetic grating ruler precise measuring instrument |
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| Application Number | Priority Date | Filing Date | Title |
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| CN201310166809.7A CN104142115A (en) | 2013-05-08 | 2013-05-08 | Magnetic grating ruler precise measuring instrument |
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| CN104142115A true CN104142115A (en) | 2014-11-12 |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN107726941A (en) * | 2017-11-09 | 2018-02-23 | 江西凯润达精密仪器有限公司 | Magnetic waterproof screw micrometer |
| CN108871248A (en) * | 2018-06-20 | 2018-11-23 | 华中科技大学 | A kind of absolute-type position detection device can be applied to super large stroke detection |
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| CN108871248B (en) * | 2018-06-20 | 2019-09-20 | 华中科技大学 | A kind of absolute-type position detection device can be applied to super large stroke detection |
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Application publication date: 20141112 |