CN104124306A - Conveying mechanism and method for manufacturing photovoltaic battery superfine gate electrode through ink jet printing - Google Patents

Conveying mechanism and method for manufacturing photovoltaic battery superfine gate electrode through ink jet printing Download PDF

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Publication number
CN104124306A
CN104124306A CN201410330326.0A CN201410330326A CN104124306A CN 104124306 A CN104124306 A CN 104124306A CN 201410330326 A CN201410330326 A CN 201410330326A CN 104124306 A CN104124306 A CN 104124306A
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silicon chip
seat
inkjet printing
transmits
gate electrode
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CN104124306B (en
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刘良玉
陈晖�
贾京英
苏卫中
樊坤
吕文利
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CETC 48 Research Institute
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CETC 48 Research Institute
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    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67706Mechanical details, e.g. roller, belt
    • H01L31/1876
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02EREDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E10/00Energy generation through renewable energy sources
    • Y02E10/50Photovoltaic [PV] energy
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02PCLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P70/00Climate change mitigation technologies in the production process for final industrial or consumer products
    • Y02P70/50Manufacturing or production processes characterised by the final manufactured product

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Ink Jet (AREA)
  • Electrodes Of Semiconductors (AREA)

Abstract

The invention discloses a conveying mechanism and a method for manufacturing a photovoltaic battery superfine gate electrode through ink jet printing. The conveying mechanism comprises a support plate, a conveying belt arranged on the support plate and driven by a belt pulley and a silicon wafer conveying seat assembled on the conveying belt and used for conveying silicon wafers. A conveying seat lateral guide plate for guiding the silicon wafer conveying seat is arranged on each side of the support plate, a heating element is arranged in the silicon wafer conveying seat, and an ink jet printing head for conducting ink jet printing on the silicon wafers is arranged above the conveying belt. A silicon wafer manufacturing method includes feeding, conveying and heating, online ink jet printing and heat insulation, conveying, online drying and material taking. The mechanism and the method achieve a silicon wafer online heating function, improves the stability and the accuracy of the silicon wafers in the conveying process, and is applicable to the occasion where the silicon wafers need to be in the constant temperature state in the high accuracy conveying process in the process for manufacturing the solar battery surface superfine gate electrode through the ink jet printing.

Description

Inkjet printing is prepared connecting gear and the preparation method of the ultra-fine gate electrode of photovoltaic cell
Technical field
The present invention relates to a kind of connecting gear of preparing ultra-fine gate electrode photovoltaic call apparatus for inkjet printing, being applicable to needs silicon chip occasion in temperature constant state all the time in high accuracy transport process in preparing the ultra-fine gate process of solar cell surface being applicable to inkjet printing, belong to electronic semi-conductor's technique particularly crystal silicon solar energy battery produce equipment special field.
Background technology
Solar energy crystal silicon cell is produced and is comprised the links such as material purification, battery manufacture, assembly manufacture, battery manufacture is wherein divided into again a plurality of processing steps such as thin slice cutting, cleaning and texturing, diffusion knot processed, etching, antireflective coating preparation, surface electrode printing, high temperature sintering, testing, sorting, and each process special equipment has formed crystal silicon cell production line with corresponding automatic connecting system.Silicon chip/cell piece connecting gear has been used for the transmission between silicon chip/cell piece Ge manufacturing process, it is the important component part in photovoltaic mechanized production system, along with photovoltaic is to high efficiency, low-cost future development, in production process, require pollution and the fragment loss that manual operation brings as far as possible, carry out fine-grained management enhances productivity simultaneously, reduce recruitment quantity to reduce the cost of labor day by day increasing, the final production cost that reduces solar-energy photo-voltaic cell is to improve the core competitiveness of enterprise, modern manufacture of solar cells line is more and more focused on production capacity and high-efficient automatic, perfect in shape and function, reliable silicon chip/cell piece the connecting gear that moves is significant for the automated production of photovoltaic cell.
In crystal-silicon solar cell process procedure, crystal silicon cell surface metalation technology, for cell photoelectric is derived, is very important link during crystal silicon cell is manufactured, and directly affects conversion efficiency and the production cost of solar cell.At present, pursue high efficiency, cheaply under trend at crystal-silicon solar cell, crystal silicon cell positive electrode grid line is just towards ultra-fine, fine and close, large ratio of height to width future development, and screen printing technique demonstrates its limitation gradually.Along with the development of technology, the novel grid line technologies of preparing such as inkjet technology have been emerged at present.
Inkjet technology originates from the late 19th century, is risen the nineties in 20th century, and its basic functional principle is, according to the instruction of computer, oily ink is directly injected to the assigned address stock from fine nozzle, thereby forms pre-designed pattern.The inkjet technology of photovoltaic cell manufacturing field, is by ink gun, Nano Silver ink electric conducting material to be sprayed in silicon chip surface and forms gate line electrode, and for traditional screen printing technique, inkjet technology has following advantage:
(1) positive grid line width can be less than 40um, is much better than 80 um-120um of silk screen printing, and is printed silver-colored ink is printed onto to emitter by multilayer, can form than the meticulous electrode structure of traditional silk-screened technology and more superior depth-width ratio;
(2) digital plate-making, designs the shape of battery surface electrode by computer, has conveniently, saves time, material-saving and economic feature;
(3) noncontact is printed, adopt In line printing technique, the ink droplet that is ink gun ejection in cell piece transmitting procedure deposits to cell piece surface in the mode of splashing, ink gun and silicon chip noncontact in print procedure, can realize the transmission of silicon chip on-line continuous formula, need not worry silicon wafer thickness, be applicable to slimline battery technique.
In view of above-mentioned advantage, inkjet technology has very large application potential in the efficient crystal silicon battery of commercialization field, is one of mainstream development trend of making battery front surface gate electrode line technology.
Summary of the invention
For inkjet printing, prepare the above-mentioned specific (special) requirements that ultra-fine gate electrode solar cell transmits silicon chip, the present invention aims to provide a kind of connecting gear of preparing ultra-fine gate electrode photovoltaic call apparatus for inkjet printing, this connecting gear transmits seat design by independent heating, realizes the on-line heating function of silicon chip; By the full supporting construction of steel band and the accurate guiding of side direction, improve stability and the precision of silicon chip transport process, be applicable to inkjet printing and prepare and in the ultra-fine gate process of solar cell surface, need silicon chip occasion in temperature constant state all the time in high accuracy transport process.
To achieve these goals, the technical solution adopted in the present invention is:
A kind of connecting gear of preparing ultra-fine gate electrode photovoltaic call apparatus for inkjet printing, its design feature is, comprise supporting bracket, be contained in supporting bracket by the conveyer belt with wheel drive transmission, and be installed on conveyer belt for transmitting the silicon chip of silicon chip and transmit seat, in supporting bracket both sides, be provided with for silicon chip is transmitted to the transmission seat side guide plate that seat leads; Described silicon chip transmits in seat and is provided with heating element; Described conveyer belt top is provided with for silicon chip being carried out to the ink jet-print head of inkjet printing.
Be below the technical scheme of further improvement of the present invention:
Between described heating element and silicon chip, be provided with and be contained in silicon chip and transmit the porous even heat plate on seat, silicon chip transmits heat that in seat, heating element produces and is passed to silicon chip after by porous even heat plate again, and heat uniformity is high, add Heat stability is good.
In order to realize automatic loading/unloading, described conveyer belt one side is provided with feeding manipulator and blanking mechanical hand.
Preferably, described heating element is resistive heater.
Described supporting bracket is circular layout, described conveyer belt consists of multistage, integral body is arranged ringwise, thus, a plurality of silicon chips transmission seats that are positioned on conveyer belt are done circulatory motion under the driving of conveyer belt, the silicon chip automatic loading/unloading that coordinates feeding manipulator, blanking mechanical hand, has realized silicon chip and has transmitted recycling of seat, and silicon chip transmission efficiency is high.
Described conveyer belt is steel band, and the supporting bracket that transmits steel band below plays a supportive role to steel band, can effectively prevent from transmitting the shake of steel band in motion process, thereby avoid silicon chip to transmit the vibrations of seat in transmitting procedure, has improved the stability that silicon chip transmits.
In order to realize the independent control that each silicon chip is transmitted to temperature in seat, each silicon chip transmits on seat temperature control modules is all housed.
Further, the present invention also provides a kind of and has utilized the above-mentioned connecting gear of preparing ultra-fine gate electrode photovoltaic call apparatus for inkjet printing to carry out the preparation method of the online inkjet printing of silicon chip surface grid line, and it comprises the steps:
1) material loading step, delivers to silicon chip by silicon chip from silicon box and transmits in seat and fix;
2) carry with online and heat up, the silicon chip that is loaded with silicon chip transmits seat and moves under the driving of conveyer belt, and meanwhile, silicon chip is heated element heat temperature raising in silicon chip transmits seat, silicon chip surface is heated up before inkjet printing and reach predetermined temperature;
3) online inkjet printing and incubation step, silicon chip is sent to ink jet-print head below, a plurality of ink gun array collaborative work ejection ink droplets, in the process transmitting at silicon chip, complete the multilayer spray printing of silicon chip front surface grid line, simultaneously, the heating element that silicon chip transmits seat works on, and makes silicon chip in ink jet printing process, maintain all the time a steady temperature, is ejected into the liquid ink droplets rapid curing of silicon chip surface;
4) carry and online baking step; After inkjet printing completes, silicon chip transmits seat and under the driving of conveyer belt, continues motion, and the silicon chip that silicon chip transmits on seat transmits under seat heating and continues to maintain temperature constant state at silicon chip, and grid line continues sintering curing;
5) material step; The complete silicon chip of sintering curing is transmitted to seat from silicon chip to be taken away.
Further, in step 1), material loading step adopts feeding manipulator to complete, and in step 5), material step adopts blanking mechanical hand to complete.
By said structure, the invention discloses a kind of connecting gear of preparing ultra-fine gate electrode photovoltaic call apparatus for inkjet printing, its structure forms by transmitting steel band, steel band supporting bracket, silicon chip transmission seat, resistive heater, Miniature temperature control module, porous even heat plate, a transmission seat side guide plate, feeding manipulator, blanking mechanical hand etc.Described transmission steel band consists of multistage, and integral body arranges ringwise, described steel band supporting bracket be positioned at transmit steel band below and with transmit steel band and contact.Described silicon chip transmits seat and is positioned at the top of transmitting steel band, and quantity is a plurality of, and its upper end is fixed with silicon chip, and inside is provided with resistive heater and porous even heat plate, and side is fixed with a Miniature temperature control module, and thus, it is controlled separately that silicon chip transmits seat heating-up temperature.Described transmission seat side guide plate is fixed on steel band supporting bracket and is positioned at the both sides that silicon chip transmits seat, and transmitting seat side guide plate is 2.Connecting gear of the present invention transmits seat design by independent heating, realizes the on-line heating function of silicon chip; By the full supporting construction of steel band and the accurate guiding of side, improve stability and the precision of silicon chip transport process, be applicable to inkjet printing and prepare and in the ultra-fine gate process of solar cell surface, need silicon chip occasion in temperature constant state all the time in high accuracy transport process.
The present invention transmits seat design by independent heating, realizes the on-line heating function of silicon chip; By the full supporting construction of steel band and the accurate guiding of side, improve stability and the precision of silicon chip transport process.
Possess independent heating and transmit seat, heating-up temperature is controlled separately, can implement on-line heating to single silicon chip.
The silicon chip of abandoning tradition of the present invention is directly placed in the silicon chip load mode that transmits steel band, adopt independent transmission seat design, each transmits in seat all resistive heater, by Miniature temperature control module, can realize the on-line heating function of single silicon chip, while guaranteeing that silicon chip completes front surface electrode inkjet printing technique in transport process all the time in temperature constant state.In addition, the independent transmission seat heating design that the present invention adopts, in heating process, heat only concentrates on silicon chip, heat diffusion is little, avoided preparing in the ultra-fine gate electrode process of solar cell front surface at inkjet printing, because heat diffusion causes inkjet print head nozzles aperture ink inside dry solidification, caused the situation of plug-hole fault to occur.
By the accurate guiding of side, improved silicon chip and transmitted the precision of rectilinear motion of seat, thereby improved the transmission linearity of silicon chip; Silicon chip transmits seat when mobile, and silicon chip transmits seat and moves in the accurate side guide plate of both sides, by accurate side, leads, and has improved the transmission linearity of silicon chip, thereby has guaranteed that inkjet printing prepares the quality of solar battery surface grid line.
Inkjet printing In line printing technique of the present invention transmits and has proposed new functional requirement silicon chip, is in particular in:
(1) on-line heating of silver-colored ink is dried and is solidified
Inkjet printing is prepared in ultra-fine grid solar cell process, silver ink is that the form with ink droplet is splashed to silicon chip surface, 1 micron of the high less than of heap that the each ink-jet of each ink ejection amount very little (only 10 skins rise left and right) forms, and thin grid height is generally tens of microns, realize the positive auxiliary grid line of crystal silicon solar energy battery and prepare requirement for height, need the collaborative tens of inferior repetition spray printings of many shower nozzles just can complete heap high.Spray printing process ink is ejected into silicon chip with the form of liquid ink droplets from shower nozzle, if silver-colored ink can not rapid draing, under the effect of siphonic effect, silver ink can be mobile to surrounding along the suede structure of silicon chip surface rapidly, grid line shape that can not formation rule, also cannot form the multilayer heap high request of grid line.For guaranteeing that gate line electrode width becomes more meticulous and realizes multilayer and pile high inkjet printing, must realize online homogeneous heating to silicon chip, make to be ejected into the ink droplet rapid curing on silicon chip at every turn.
Inkjet printing is prepared in the ultra-fine gate process of solar cell surface, and the heating process of silicon chip requires strict, need to guarantee heating uniformity on the one hand, make silicon chip in ink jet printing process all the time in temperature constant state.On the other hand, require heating to concentrate, heat diffusion is little, because if too much heat is passed to ink gun, can make ink dried in ink gun nozzle aperture solidify and cause plug-hole fault, therefore the heat radiation of should trying one's best is to ink gun, work impacts, and to thermal field, design has proposed very high requirement for this.
(2) high-precision and high-stability transmits
The width that inkjet printing is prepared solar cell surface grid line is tens of microns, in spray printing process, in ink gun and silicon chip relative motion process, complete the spray printing of multilayer grid line, this transmission precision to silicon chip course of conveying has proposed strict requirement, for realizing high-quality ultra-fine grid inkjet printing, must improve stability and the precision of silicon chip transport process.
Compared with prior art, the invention has the beneficial effects as follows:
(1) independent heating transmits seat design, possesses silicon chip on-line heating function, and heating is concentrated, and heat diffusion impact is to external world little.
Connecting gear of the present invention transmits in seat and all has heating element at the silicon chip of fixing silicon chip, by Miniature temperature control module, can realize the independence of silicon chip, on-line heating function, between resistive heater and silicon chip, be also provided with porous even heat plate, the thermal field uniformity is high, add Heat stability is good, guarantee that silicon chip need complete inkjet printing in transport process, during the surface metal metallization processes such as laser transfer, all the time in temperature constant state.
In addition, the present invention adopts independent transmission seat heating design, and silicon chip heating is concentrated, heat diffusion is little, avoided in the silicon chip surface metallization processes such as inkjet printing, because heat diffusion causes inkjet print head nozzles aperture ink inside dry solidification, caused the situation of plug-hole fault to occur.
(2) the full supporting construction of conveyer belt, transmits stability high;
Public affairs of the present invention have under the conveyer belt of silicon chip high accuracy connecting gear of on-line heating function and are designed with supporting plate structure, can effectively prevent from transmitting the shake of seat in transmitting procedure, improve the stability that silicon chip transmits.
(3) adopt side guide frame, transport process linearity is high;
The both sides of transmitting seat are provided with accurate side guide, in moving process, transmit seat and move in the precise guide rail of both sides, and precision of rectilinear motion is high, has improved precision of rectilinear motion when silicon chip need complete ink-jet printed surface metallization process in transport process.
 
Accompanying drawing explanation
Fig. 1 is the structural representation of a kind of embodiment of invention.
Fig. 2 is the local amplification plan view of Fig. 1;
Fig. 3 is the flow schematic diagram of an embodiment of the present invention.
In the drawings:
1-transmits steel band; 2-steel band supporting bracket; 3-silicon chip transmits seat; 4-transmits seat side guide plate;
5-resistive heater; 6-porous even heat plate; 7-feeding manipulator; 8-blanking mechanical hand;
9-silicon chip; 10-ink jet-print head; 11-the first nozzle; 12-second nozzle;
13-the 3rd nozzle; 14-belt wheel.
Embodiment
A kind of connecting gear of preparing ultra-fine gate electrode photovoltaic call apparatus for inkjet printing, as Fig. 1,2, shown in 3, by transmitting steel band, steel band supporting bracket, silicon chip transmission seat, resistive heater, Miniature temperature control module, porous even heat plate, a transmission seat side guide plate, feed mechanism hand, blanking mechanical hand etc., form; Wherein, transmit steel band and consist of multistage, integral body is arranged ringwise, below steel band, is provided with supporting bracket, for supporting transmission steel band, prevents from transmitting the shake of steel band when motion, improves silicon chip and transmits stability.Silicon chip transmits seat and is positioned at the top of transmitting steel band, and its quantity is a plurality of, and silicon chip transmits fixedly silicon chip of seat upper end, transmits seat inside resistive heater is set, and a Miniature temperature control module is installed in side.Silicon chip transmits heated seats and realizes the controlled separately of heating-up temperature by Miniature temperature control module, makes silicon chip in transport process, possess on-line heating function.A porous even heat plate is also set between silicon chip and resistive heater, further to promote heating uniformity.In the steel band supporting bracket of inkjet printing and automatic loading/unloading station, fixedly silicon chip transmits seat guide plate, and transmitting seat guide plate is 2, lays respectively at the both sides that silicon chip transmits seat, transmits the linearity of seat motion for improving silicon chip.
The workflow of connecting gear of the present invention is divided into: material loading, conveying and intensification, online inkjet printing and insulation, conveying and online oven dry, feeding.
1, material loading.Automatic charging machinery hand captures silicon chip from silicon box, and silicon chip is fixed on to silicon chip transmission seat.
2, carry and heat up.The silicon chip that is loaded with silicon chip transmits seat and moves under the driving that transmits steel band, and meanwhile, silicon chip, transmitting heat temperature raising on seat, heats up silicon chip surface and reaches predetermined temperature before inkjet printing.
3, online inkjet printing and insulation.Silicon chip is sent to ink gun below, a plurality of ink gun array collaborative works spray ink droplets, complete the multilayer spray printing of silicon chip front surface grid line, simultaneously at silicon chip in the process transmitting, the heater that silicon chip transmits seat works on, and makes silicon chip in ink jet printing process, maintain all the time a steady temperature.By heating, be ejected into the liquid ink droplets rapid curing of battery surface, formation rule and meet the grid line that multilayer is printed heap high request.
4, carry and dry online.After inkjet printing completes, silicon chip transmits seat and under the driving of transmission steel band, continues motion, and the silicon chip that silicon chip transmits on seat continues to maintain temperature constant state under the heating of transmission seat, and grid line is a step sintering curing more.
5, feeding.Automatic charging machinery hand transmits seat by silicon chip from silicon chip and takes away, completes the biography sheet flow process that inkjet printing is prepared ultra-fine gate electrode photovoltaic cell.
Material loading completes by automatic manipulator, and manipulator can adopt vacuum cup mode, and during material loading, manipulator is drawn silicon chip from silicon box, and it is upper that silicon chip is positioned over to silicon chip transmission seat, and material loading action completes in the intermittence of inkjet printing.
In conveying and temperature-rise period, belt wheel rotates, the transmission seat that is loaded with silicon chip moves under the driving that transmits steel band, for avoiding the loose shift of silicon chip in transport process, silicon chip is positioned over after silicon chip transmits on seat to be needed to fix, and fixed form can according to circumstances adopt the modes such as vacuum suction, Electrostatic Absorption, electromagnetism absorption.When silicon chip is carried, the heater that silicon chip transmits in seat starts silicon chip to carry out heat temperature raising, heater adopts common resistance heating mode, the needed electric current of heater can consider to adopt slidingtype contact electrode, by two parallel steel bands, transfer in the Miniature temperature control module that silicon chip transmits seat (now, transmitting belt wheel can consider to adopt non-metal insulating material or carry out corresponding insulation processing).
Silicon chip is sent to ink gun below, the collaborative work of a plurality of ink gun array starts to spray ink droplet, in the process transmitting at silicon chip, complete the multilayer spray printing of silicon chip front surface grid line, simultaneously, the heater that silicon chip transmits seat makes silicon chip in ink jet printing process, maintain all the time a steady temperature, make to be ejected into every layer of liquid ink droplets rapid curing of battery surface, with formation rule and meet the grid line that multilayer is printed heap high request.
After inkjet printing completes, silicon chip transmits seat and under the driving of transmission steel band, continues motion, and the silicon chip that silicon chip transmits on seat continues to maintain temperature constant state under the heating of transmission seat, and grid line is a step sintering curing more.
Feeding is taken silicon chip away by vacuum chuck type manipulator from transmitting seat, complete the biography sheet flow process that inkjet printing is prepared ultra-fine gate electrode photovoltaic cell.
Above embodiments of the present invention are described, but the present invention is not limited to above-mentioned execution mode, those of ordinary skill in the art can also make many variations after the content of understanding such scheme under the prerequisite that does not depart from aim of the present invention.

Claims (9)

1. a connecting gear of preparing ultra-fine gate electrode photovoltaic call apparatus for inkjet printing, it is characterized in that, comprise supporting bracket (2), be contained in the conveyer belt (1) by belt wheel (14) driving transmission in supporting bracket (2), and it is upper for transmitting a plurality of silicon chips transmission seats (3) of silicon chip (14) to be installed in conveyer belt (1), is provided with for silicon chip is transmitted to the transmission seat side guide plate (4) that seat (3) leads in supporting bracket (2) both sides; Described silicon chip transmits in seat (3) and is provided with heating element (5); Described conveyer belt (1) top is provided with for silicon chip being carried out to the ink jet-print head (10) of inkjet printing.
2. the connecting gear of preparing ultra-fine gate electrode photovoltaic call apparatus for inkjet printing according to claim 1, is characterized in that, is provided with the porous even heat plate (6) being contained on silicon chip transmission seat (3) between described heating element (5) and silicon chip (14).
3. the connecting gear of preparing ultra-fine gate electrode photovoltaic call apparatus for inkjet printing according to claim 1, is characterized in that, described conveyer belt (1) one side is provided with feeding manipulator (7) and blanking mechanical hand (8).
4. the connecting gear of preparing ultra-fine gate electrode photovoltaic call apparatus for inkjet printing according to claim 1 and 2, is characterized in that, described heating element (5) is resistive heater.
5. the connecting gear of preparing ultra-fine gate electrode photovoltaic call apparatus for inkjet printing according to claim 1 and 2, is characterized in that, described supporting bracket (2) is circular layout, and described conveyer belt (1) consists of multistage, and integral body is arranged ringwise.
6. the connecting gear of preparing ultra-fine gate electrode photovoltaic call apparatus for inkjet printing according to claim 1 and 2, is characterized in that, described conveyer belt (1) is steel band.
7. the connecting gear of preparing ultra-fine gate electrode photovoltaic call apparatus for inkjet printing according to claim 1 and 2, is characterized in that, each silicon chip transmits on seat (3) temperature control modules is all housed.
8. utilize the described connecting gear of preparing ultra-fine gate electrode photovoltaic call apparatus for inkjet printing of one of claim 1-7 to carry out a preparation method for the online inkjet printing of silicon chip surface grid line, it is characterized in that, comprise the steps:
1) material loading step, delivers to silicon chip by silicon chip from silicon box and transmits in seat and fix;
2) carry with online and heat up, the silicon chip that is loaded with silicon chip transmits seat and moves under the driving of conveyer belt, and meanwhile, silicon chip is heated element heat temperature raising in silicon chip transmits seat, silicon chip surface is heated up before inkjet printing and reach predetermined temperature;
3) online inkjet printing and incubation step, silicon chip is sent to ink jet-print head below, a plurality of ink gun array collaborative work ejection ink droplets, in the process transmitting at silicon chip, complete the multilayer spray printing of silicon chip front surface grid line, simultaneously, the heating element that silicon chip transmits seat works on, and makes silicon chip in ink jet printing process, maintain all the time a steady temperature, is ejected into the liquid ink droplets rapid curing of silicon chip surface;
4) carry and online baking step; After inkjet printing completes, silicon chip transmits seat and under the driving of conveyer belt, continues motion, and the silicon chip that silicon chip transmits on seat transmits under seat heating and continues to maintain temperature constant state at silicon chip, and grid line continues sintering curing;
5) material step; The complete silicon chip of sintering curing is transmitted to seat from silicon chip to be taken away.
9. the online inkjet printing preparation method of silicon chip surface grid line according to claim 8, is characterized in that, in step 1), material loading step adopts feeding manipulator to complete, and in step 5), material step adopts blanking mechanical hand to complete.
CN201410330326.0A 2014-07-11 2014-07-11 Inkjet printing is prepared connecting gear and the preparation method of the ultra-fine gate electrode of photovoltaic cell Active CN104124306B (en)

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Cited By (6)

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CN105226136A (en) * 2015-10-13 2016-01-06 中国电子科技集团公司第四十八研究所 A kind of annular ink-jet print system for the preparation of the thin grid of solar cell
CN106298607A (en) * 2016-08-15 2017-01-04 太仓高创电气技术有限公司 A kind of high efficiency drive mechanism for manufacturing semiconductor module and method of work thereof
CN106816483A (en) * 2015-12-01 2017-06-09 天津斯沃姆科技发展有限公司 A kind of contactless preparation system and method for crystal-silicon solar cell grid line
CN113932699A (en) * 2021-09-23 2022-01-14 浦江荣达量具有限公司 Manufacturing process of digital display caliper capacitive grating sensor
CN114126872A (en) * 2019-04-18 2022-03-01 埃克森蒂斯知识股份有限公司 Apparatus and method for producing a three-dimensional screen-printed workpiece
CN117568835A (en) * 2023-11-20 2024-02-20 株洲国创轨道科技有限公司 Preparation method of high-performance porous self-supporting electrolyzed water hydrogen evolution electrode and rapid printing device

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