CN104111352A - Servo-type acceleration sensor - Google Patents
Servo-type acceleration sensor Download PDFInfo
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- CN104111352A CN104111352A CN201410146195.0A CN201410146195A CN104111352A CN 104111352 A CN104111352 A CN 104111352A CN 201410146195 A CN201410146195 A CN 201410146195A CN 104111352 A CN104111352 A CN 104111352A
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- printed base
- transducer
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- 230000001133 acceleration Effects 0.000 title claims abstract description 30
- 229910052751 metal Inorganic materials 0.000 claims abstract description 44
- 239000002184 metal Substances 0.000 claims abstract description 44
- 238000006073 displacement reaction Methods 0.000 claims abstract description 33
- 229910000831 Steel Inorganic materials 0.000 claims description 41
- 239000010959 steel Substances 0.000 claims description 41
- 238000005452 bending Methods 0.000 claims description 10
- 239000000758 substrate Substances 0.000 abstract description 5
- 238000001514 detection method Methods 0.000 abstract 2
- 239000003795 chemical substances by application Substances 0.000 description 17
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 8
- 239000011889 copper foil Substances 0.000 description 8
- 238000009826 distribution Methods 0.000 description 7
- 239000000463 material Substances 0.000 description 6
- 239000000853 adhesive Substances 0.000 description 5
- 230000001070 adhesive effect Effects 0.000 description 5
- 238000010586 diagram Methods 0.000 description 5
- 238000010438 heat treatment Methods 0.000 description 4
- 239000011248 coating agent Substances 0.000 description 3
- 238000000576 coating method Methods 0.000 description 3
- 238000001723 curing Methods 0.000 description 3
- 238000005516 engineering process Methods 0.000 description 3
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 2
- 238000004873 anchoring Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 239000012212 insulator Substances 0.000 description 2
- 239000000696 magnetic material Substances 0.000 description 2
- 239000004593 Epoxy Substances 0.000 description 1
- 239000004411 aluminium Substances 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 229920006351 engineering plastic Polymers 0.000 description 1
- 239000003822 epoxy resin Substances 0.000 description 1
- 230000004907 flux Effects 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 238000013007 heat curing Methods 0.000 description 1
- 229910052742 iron Inorganic materials 0.000 description 1
- SZVJSHCCFOBDDC-UHFFFAOYSA-N iron(II,III) oxide Inorganic materials O=[Fe]O[Fe]O[Fe]=O SZVJSHCCFOBDDC-UHFFFAOYSA-N 0.000 description 1
- 239000007769 metal material Substances 0.000 description 1
- 229920000647 polyepoxide Polymers 0.000 description 1
- 229910052761 rare earth metal Inorganic materials 0.000 description 1
- 238000003466 welding Methods 0.000 description 1
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- Transmission And Conversion Of Sensor Element Output (AREA)
- Force Measurement Appropriate To Specific Purposes (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
Abstract
A servo-type acceleration sensor comprises an oscillator portion (6) moving based on the acceleration, a frame portion (7) supporting the oscillator portion (6), displacement detection portions (16a, 16b) detecting the displacement of the oscillator portion (6) through changes of electrostatic capacitance, and a servo circuit portion that supplies current to a coil (13a) disposed on the oscillator portion (6) on the basis of the changes, detected by the displacement detection portions (16a, 16b), of the electrostatic capacitance, the current being used for controlling displacement of the oscillator portion (6). The current supplied by the servo circuit portion serves as the acceleration and is output. A metal thin sheet part (11) is sandwiched between a pair of printed substrates (12a, 12b) for the oscillator portion so that the oscillator portion (6) is formed, and the metal thin sheet part (11) is also sandwiched between a pair of printed substrates (17a, 17b) for the frame portion so that the frame portion (7) is formed.
Description
Technical field
The present invention relates to a kind of servo-type acceleration transducer of application in seismograph etc.
Background technology
The servo-type acceleration transducer of capacitance type, in the time applying acceleration, transducer part will be subjected to displacement with respect to frame portion, but detect this displacement by the variation of electrostatic capacitance, the coil midstream possessing in transducer part is crossed with the corresponding electric current of variation of electrostatic capacitance and is produced electromagnetic force, on transducer part is apparent, is stationary state.Due to this electric current and acceleration proportional, therefore as long as measure electric current, just can know acceleration.
At No. 2861694 communique of patent documentation 1(Jap.P.) in, record a kind of servo-type vibration transducer, form oscillator (transducer part) by the multiple substrates that are formed with coil pattern, as the supporter of this oscillator (transducer part), distolaterally be provided with flexual spring at one of oscillator (transducer part), this spring is also as the wiring material performance function of coil pattern.
In addition, at No. 2913525 communique of patent documentation 2(Jap.P.) in, record a kind of tiltmeter, the structure of this tiltmeter is: movable platen (transducer part) is set to split with hinge, formed the hinge that supports movable platen (transducer part) by flexible plate (spring material of metal), utilize (" コ " font of Japanese) clip member of English " U " font that this flexible plate is fixed on to movable platen (transducer part) and fixed head (frame portion).
In the technology of recording at patent documentation 1, by magnetic force, oscillator (transducer part) is controlled to driving, but the number of turn of this driving force and coil, gap magnetic field and to flow through the electric current of coil proportional.This modular construction is difficult to guarantee gap magnetic field (for example 5000 Gausses), is difficult to guarantee the number of turn of coil pattern on (for example 600 circles), need to flow through a large amount of electric currents, is therefore difficult to practical.
In addition, in the technology of recording at patent documentation 2, be to utilize the clip member of " U " font flexible plate to be individually fixed in to the structure of fixed head and movable platen, therefore components number increases, and assembly operation is also not easy, and not towards miniaturization, assembling also increases man-hour.
Summary of the invention
The present invention is the above problem having in view of prior art and the invention completing, and its object is to provide a kind of servo-type acceleration transducer that can be formed and be easy to assembling and regulate by cheap parts.
The servo-type acceleration transducer that solves the mode of above-mentioned problem possesses: transducer part, carry out displacement according to acceleration, frame portion, supports described transducer part, displacement detecting portion, detects the displacement of described transducer part by the variation of electrostatic capacitance, and servo circuit portion, the variable quantity of the electrostatic capacitance detecting according to described displacement detecting portion, supply with the electric current of the displacement of controlling described transducer part to the coil that is arranged at described transducer part, the electric current that servo-type acceleration transducer is supplied with described servo circuit portion is exported as acceleration, it is characterized in that, described transducer part and described frame portion form by sandwiching metal steel unit by a pair of transducer part with printed base plate and a pair of frame portion printed base plate, the surface configuration of the surface of described transducer part and described frame portion is in same plane, described transducer part is supported by described frame portion by described metal steel unit, on described metal steel unit, be formed with flexible portion, described flexible portion doubles as the electrode wiring portion of described displacement detecting portion and the wiring part of described coil, and can bending deflection.
Described displacement detecting portion can be by forming with each housing relative with these electrodes with the electrode forming respectively on printed base plate in described a pair of transducer part.
At least one in described each housing can form magnetic circuit.
Between described frame portion and described each housing, sandwich and dispose pad, by the thickness of described pad, can set the interelectrode gap of described displacement detecting portion.
The front of described transducer part is formed with protuberance, the described protuberance of described frame portion towards position be formed with notch, form the described metal steel unit of described protuberance and described notch, can be respectively outstanding with printed base plate and described frame portion printed base plate from described transducer part.
Described electrode wiring portion is can at least a portion bending and form.In addition, " bending and form " comprise, bending and form and additional broken line makes it bending and form after additional broken line.
Described metal steel unit can be formed multiple holes by described transducer part with the face that printed base plate and described frame portion clip with printed base plate.
According to above-mentioned mode, due to by forming transducer part and frame portion by a pair of transducer part with printed base plate and a pair of frame portion printed base plate clamping metal steel unit, therefore the assembly operation of transducer part and frame portion becomes easily, and can be made up of cheap parts.
By the electrode and each housing that are formed at respectively a pair of transducer part printed base plate are oppositely arranged, can form less displacement detecting portion.
Due at least one formation magnetic circuit of each housing, therefore can form magnetic field by housing.
In addition, if set the interelectrode gap of displacement detecting portion according to the thickness of pad, the adjustment of interelectrode gap becomes easy.
If the front in transducer part forms protuberance, and forms the notch of this protuberance towards (facing) in frame portion, can easily confirm the position skew of transducer part with respect to frame portion.
Form if at least a portion of electrode wiring portion is bending, while assembling by release and the pressure of the generation such as stretching, can prevent the skew of transducer part.
In addition, if formed multiple holes by described transducer part with the face that printed base plate and described frame portion clip with printed base plate at described metal steel unit, when coating cementing agent makes a pair of transducer part printed base plate and a pair of frame portion printed base plate is adhered to one another and while being close to, solidify because cementing agent enters in Nei Bing hole, hole, therefore can obtain sufficient cohesive force (anchoring effect).
Brief description of the drawings
Fig. 1 is the fragmentary cross sectional view of the servo-type acceleration transducer that the present invention relates to.
Fig. 2 is the fragmentary cross sectional view of sensor.
Fig. 3 is the vertical view of metal steel unit.
Fig. 4 is the vertical view of transducer part printed base plate.
Fig. 5 is the vertical view of frame portion printed base plate.
Fig. 6 is coated with the transducer part printed base plate of cementing agent and the vertical view of frame portion printed base plate.
Fig. 7 is the key diagram of the first assembling fixture.(a) being the vertical view of the first assembling fixture, is (b) side view of the first assembling fixture, is (c) vertical view that transducer part printed base plate and frame portion printed base plate is positioned over to the state of the first assembling fixture.
Fig. 8 is the vertical view that metal steel unit is positioned over to the state of transducer part printed base plate and frame portion printed base plate.
Fig. 9 is the vertical view that transducer part printed base plate and frame portion printed base plate is positioned over to the state of metal steel unit.
Figure 10 is the key diagram of the second assembling fixture.(a) be the vertical view of the second assembling fixture, (b) be the side view of the second assembling fixture, (c) be the vertical view that the second assembling fixture is fixed on to the state of the first assembling fixture, (d) be the side view that the second assembling fixture is fixed on to the state of the first assembling fixture.
Figure 11 is the vertical view of transducer part and frame portion.
Figure 12 is the expanded view of the front end protuberance of transducer part and the notch of frame portion.
Figure 13 is the sectional view that the transducer part of coil is installed.
Figure 14 is the key diagram of the first housing.(a) being vertical view, is (b) sectional view.
Figure 15 is the key diagram of the second housing.(a) being vertical view, is (b) sectional view.
Figure 16 is the vertical view of pad.
Figure 17 is the key diagram of base component.(a) being vertical view, is (b) sectional view.
Embodiment
With reference to the accompanying drawings the mode of enforcement of the present invention is described below.The servo-type acceleration transducer 1 of embodiment, as shown in Figure 1, comprises sensor portion 2, servo circuit portion 3, shell 4 and base component 5.Sensor portion 2 is installed on base component 5, and servo circuit portion 3 is installed on sensor portion 2.
As shown in Figure 2, sensor portion 2 comprises transducer part 6, frame portion 7, the first housing 8, the second housing 9, two pad 10a, 10b etc.The shape of sensor portion 2 forms general cylindrical shape, is highly about 15mm, and external diameter is about 23mm.
Transducer part 6 and frame portion 7 by printed base plate 12a, 12b for a pair of transducer part and for frame portion printed base plate 17a, 17b respectively metal steel unit 11 is clamped and is bondd.Printed base plate 12a, 12b for transducer part on two surfaces that form transducer part 6 are provided with coil 13a, 13b.
Herein, printed base plate refers to the substrate that carries out the distribution of circuit in the surface of insulator and the inside of the inside or insulator with Copper Foil etc.For transducer part, printed base plate 12a, 12b are the printed base plates for transducer part 6.For frame portion, printed base plate 17a, 17b are the printed base plates for frame portion 7.
Be arranged at electrode 14a, the 14b of transducer part printed base plate 12a, 12b, be disposed near the two surfaces end of the opposition side of passing through the side that metal steel unit 11 supported by frame portion 7 of transducer part 6.The surperficial 15a of first housing 8 relative with these electrodes 14a, 14b and the surperficial 15b of the second housing 9, form the 16a of displacement detecting portion, the 16b that detect electrostatic capacitance.
In addition, 7, frame portion is sandwiched the first housing 8 and the second housing 9 across pad 10a, 10b.
As shown in Figure 3, metal steel unit 11 is formed with becomes the transducer part of transducer part 6 side 11a, and becomes the side 11b of frame portion of frame portion 7.Be formed with the two flexible 11c of portion in place, the 11d of the distribution that doubles as coil 13a, 13b at metal steel unit 11, and become the 11e of electrode wiring portion, the 11f of the distribution of electrode 14a, the 14b of the 16a of displacement detecting portion, 16b.The flexible 11c of portion, 11d, can bending deflection.
Double as the flexible 11c of portion, the 11d of distribution and the 11e of electrode wiring portion, 11f by with servo circuit portion 3 distributions.The transducer part side 11a of metal steel unit 11 and the side 11b of frame portion are formed with two (amounting to four) guide hole 11g separately.In addition,, the in the situation that of this shape of Fig. 3, in assembly operation, cut off unwanted part 11h and the 11i of metal steel unit 11.
The flexual adjustment of the flexible 11c of portion, 11d, becomes easily by the width adjustment of the thickness of slab to metal steel unit 11 and the flexible 11c of portion, 11d, and the deviation of quality reduces.In addition, additional pressure when the shape that the 11e of electrode wiring portion, the 11f of electrode 14a, the 14b of the 16a of displacement detecting portion, 16b is for example roughly the bending of " U " word shape by employing discharges assembling, thus can prevent the distortion etc. of transducer part 6.
As shown in Figure 4, be formed with two guide hole 12c and through hole 12d at printed base plate 12a, 12b for transducer part.In addition, be formed with arc electrode 14a, 14b and three coil location copper foil pattern 14c at printed base plate 12a, 12b for transducer part.In addition, there is no electrode 14a, 14b and copper foil pattern 14c at the adhesive surface (the inside) of 11a bonding in transducer part side printed base plate 12a, 12b for transducer part and metal steel unit 11.
As shown in Figure 5, be formed with two guide hole 17c at printed base plate 17a, 17b for frame portion.In addition, at the face (surface) of printed base plate 17a, 17b for the frame portion contacting with pad 10a, 10b, with the thickness identical with electrode 14a, the 14b of printed base plate 12a, 12b for transducer part, whole ground of nearly cover is formed with copper foil pattern 17d.In addition, there is no copper foil pattern 17d at the adhesive surface (the inside) of the side 11b of frame portion bonding printed base plate 17a, 17b for frame portion and metal steel unit 11.
Next, the assembly operation of the servo-type acceleration transducer 1 to embodiment order describes.First, in order to assemble the transducer part 6 and frame portion 7 that form sensor portion 2, as shown in Figure 6, the position coating cementing agent 18 specifying in the inside of printed base plate 12a, 12b for transducer part.Similarly, the position coating cementing agent 18 specifying in the inside of printed base plate 17a, 17b for frame portion.The epoxy resin cementing agent of heat-curing type is suitable as cementing agent 18.
Then,, as shown in Fig. 7 (a) and (b), prepare to have the first assembling fixture 20 that is provided with screw hole 20a and four directing pin 20b.Then, as shown in Fig. 7 (c), on the first assembling fixture 20, by the face (the inside) that is coated with cementing agent 18 upward, transducer part is passed respectively to directing pin 20b with the guide hole 12c of printed base plate 12a and the guide hole 17c of the printed base plate 17a of frame portion, place transducer part printed base plate 12a and a printed base plate 17a of frame portion.
Then, as shown in Figure 8, place metal steel unit 11 adhesive-coated being faced up be placed on transducer part printed base plate 12a on the first assembling fixture 20 and the printed base plate 17a of frame portion.Now, cut away the unwanted part 11i of metal steel unit 11, respectively two guide hole 11g are passed to the directing pin 20b of the first assembling fixture 20 and place metal steel unit 11.In addition, the metal steel unit 11 shown in Fig. 8 is the states that cut away before unwanted part 11h.
Then, as shown in Figure 9, by the adhesive-coated face (the inside) of another transducer part use printed base plate 12b and the use printed base plate 17b of another frame portion down, respectively guide hole 12c, the 17c of printed base plate 12b, 17b are passed to the directing pin 20b of the first assembling fixture 20 and be placed on metal steel unit 11.
Then, as shown in Figure 10 (a), (b), prepare to have the second assembling fixture 21 and the fastening bolt 22 that are provided with through hole 21a and four hole 21b.In addition, hole 21b plays a part to make the second assembling fixture 21 not meet the directing pin 20b of the first assembling fixture 20 in the time placing the second assembling fixture 21.Then, make the position alignment of screw hole 20a and through hole 21a and directing pin 20b and the hole 21b of the first assembling fixture 20, the second assembling fixture 21 is placed on transducer part printed base plate 12b and the printed base plate 17b of frame portion.In addition, hole 21b is the hole that can embed with the gapped state of tool, insert be embedded into thing and can move mutually.
And, as shown in Figure 10 (c), (d), fastening bolt 22, through the through hole 21a of the second assembling fixture 21, the through hole 12d of printed base plate 12b, the central portion of metal steel unit 11, the through hole 12d of transducer part printed base plate 12a for transducer part, be combined with the screw hole 20a of the first assembling fixture 20 screw thread and fastening with the moment of torsion of regulation.At this, although use fastening bolt 22, also can be fastening without fastening bolt 22, and the second assembling fixture 21 is applied to certain load as counterweight.
Like this, utilize the first assembling fixture 20 and the second assembling fixture 21, by metal steel unit 11 and be coated with a pair of transducer part printed base plate 12a, the 12b of cementing agent 18 and a pair of frame printed base plate 17a of portion, 17b are heating and curing by defined terms under the state of clamping with the pressure of regulation.
In addition, for example, if form multiple not shown micro hole (being the square hole of 0.2mm) on one side at the whole adhesive surface of metal steel unit 11, ought be coated with the transducer part printed base plate 12a of cementing agent 18, 12b and the printed base plate 17a of frame portion, 17b is by utilizing the first assembling fixture 20, the secure bond of the second assembling fixture 21 and fastening bolt 22 is in the time of metal steel unit 11, because cementing agent 18 enters micro hole and is heating and curing in hole, therefore can either prevent cementing agent 18 overflow and result from bonding warpage, can obtain again sufficient cohesive force (anchoring effect).
In addition, if for transducer part printed base plate 12a, 12b and for frame portion printed base plate 17a, 17b be glass epoxy substrate, also can not use cementing agent 18, and make transducer part printed base plate 12a, 12b and the printed base plate 17a of frame portion, 17b and metal steel unit 11 thermal weldings.
By assembling as above, though printed base plate 12a, 12b and printed base plate 17a, 17b warpage a little for frame portion for transducer part, the heating when solidifying, the flatness of transducer part 6 and frame portion 7 also improves, and can obtain essentially identical plane.In addition, transducer part 6 is supported by frame portion 7 by the flexible 11c of portion, the 11d of metal steel unit 11, forms with respect to the good integrative-structure of metal steel unit 11 symmetry.
Then, as shown in figure 11, after cementing agent 18 solidifies, transducer part 6 and frame portion 7 are unloaded from sectional fixture 20,21, cut away the unwanted part 11h of metal steel unit 11.
By utilizing the assembly operation of above-mentioned steps, transducer part 6 and frame portion 7 form integrative-structure.Then, as shown in figure 12, front in transducer part 6 forms protuberance 6a, and the 7(of frame portion facing at this protuberance 6a the front end of protuberance 6a towards position) form notch 7a, make transducer part side 11a and the side 11b of frame portion of the metal steel unit 11 that forms protuberance 6a and notch 7a outstanding from transducer part printed base plate 12a, 12b and the printed base plate 17a of printed base plate frame portion of frame portion, 17b respectively, therefore easily confirm that transducer part 6 and frame portion 7 are in the skew of the position of sense of displacement.
Then, as shown in figure 13, the transducer part printed base plate 12a, the coil location copper foil pattern 14c of 12b that coil 13a, 13b are aimed to two surfaces that become transducer part 6 place, and bond by cementing agent.In order to keep balance, at two surface mount coil 13a, the 13b of transducer part 6.Then, only the coil 13a of a side is electrically connected with the flexible 11c of portion, the 11d that double as distribution.In addition also coil 13a, the 13b on two sides can be connected with the flexible 11c of portion, 11d.
By forming the copper foil pattern 14c of location use at printed base plate 12a, 12b for transducer part, because copper foil pattern 14c is convex state compared with printed base plate 12a, 12b for transducer part, (m), therefore coil 13a, 13b can easily locate outstanding approximately 75 μ.
Then, as shown in figure 14, be pre-formed the first housing 8 that forms magnetic circuit.The high soft magnetic material (for example, electromagnetism soft iron) of materials'use saturation magnetic flux density of the first housing 8.At central portion, magnetite (for example, rare earth element magnet) 25 is set.The first housing 8 is set to coil 13a to surround, and the magnetic field of regulation is given in the gap being positioned to coil 13a.The first housing 8 has combination screw hole 8a and the guide hole 8b with the second housing 9.
In addition, as shown in figure 15, be pre-formed the second housing 9.Although the second housing 9 does not form magnetic circuit, if also use coil 13b, also can similarly form with the first housing 8.In order to obtain thermal equilibrium, the material that materials'use is identical with the first housing 8.The second housing 9 has combination hole 9a and the guide hole 9b with the first housing 8.
Then, use directing pin (not shown) and joint bolt (not shown), sandwich the frame portion 7 that utilizes a pair of frame printed base plate 17a of portion, 17b to clamp and be bonded with metal steel unit 11 across two pad 10a, 10b by the first housing 8 and the second housing 9.Pad 10a, 10b use thin plate and nonmagnetic metal material.As shown in figure 16, pad 10a, 10b are the shapes almost identical with the printed base plate 17a of frame portion, 17b, but are formed as the shape of non-incision.Pad 10a, 10b have in conjunction with using hole 10c and guide hole 10d.
Then,, at the 16a of displacement detecting portion being formed by the surperficial 15a of one that is arranged at transducer part 6 surperficial electrode 14a and the first housing 8 relative with electrode 14a, utilize the thickness of pad 10a to regulate electrostatic capacitance to obtain desirable electrostatic capacitance.Equally, at the 16b of displacement detecting portion by being arranged at another surperficial electrode 14b of transducer part 6 and the surperficial 15b of the second housing 9 and forming, utilize the thickness of pad 10b to regulate electrostatic capacitance to obtain desirable electrostatic capacitance.In addition, pad 10a, 10b adopt identical thickness, but also can adopt as required different thickness.
As mentioned above, by using pad 10a, 10b, the adjusting that obtains desirable electrostatic capacitance becomes easy.In addition, at displacement test section 16a, 16b, by the surperficial 15a of housing 8,9,15b ground connection.
Then, servo circuit portion 3 is installed on the second housing 9.In addition, the flexible 11c of portion, the 11d of the distribution of coil 13a by doubling as metal steel unit 11 are connected in servo circuit portion 3.Electrode 14a, the 14b of the 16a of displacement detecting portion, 16b is connected in servo circuit portion 3 by the 11e of electrode wiring portion, 11f.
Then, on the base component 5 shown in Figure 17, utilize in conjunction with hole 5a by screw to be provided with the sensor portion 2 of servo circuit portion 3 carry out 3 fix.Now, use is arranged at the angular adjustment screw hole 5b at three places of base component 5, the skew of the small sensitive axes producing during to assembling, advance and retreat by screw regulate, can easily change the setting angle with respect to the sensor portion 2 of base component 5, therefore the position correction of transducer part 6 becomes possibility.
Then,, on the base component 5 that is fixed with sensor portion 2, utilize in conjunction with shell 4 being carried out at 4 with hole 5c by screw and fix.The profile of shell 4 is rectangular shape roughly, but can be also drum.Material, owing to using aluminium, can either utilize shield effectiveness to reduce the generation of noise and the impact of noise, again can lightweight, and cheap.If magnetic material can reduce the impact of magnetic noise.If be not out of shape under service condition and stablize with respect to temperature etc., also can use engineering plastics.Select according to required.
As shown in the assembly operation based on above-mentioned steps, utilize the first assembling fixture 20 and the second assembling fixture 21 to clamp and fastening or pressurize by certain load transducer part 6 and frame portion 7, and cementing agent 18 is heating and curing, therefore transducer part 6 and frame portion 7 become same plane substantially, by pad 10a, the 10b of specific thickness are clipped in respectively between frame portion 7 and the first housing 8 and frame portion 7 and the second housing 9, can easily set the electrostatic capacitance of requirement.
In addition, even the structure that uses printed base plate 12a, 12b, 17a, 17b in transducer part 6 and frame portion 7, owing to can obtaining the thermotolerance of-50 DEG C～100 DEG C, therefore also can obtain sufficient temperature range for the seismographic specification that requires.
According to present embodiment, can provide a kind of cheap component parts and assembly operation/adjustment operation of using to be easy to servo-type acceleration transducer.
Symbol description
1 servo-type acceleration transducer; 2 sensor portions; 3 servo circuit portions; 4 shells; 5 base components; 6 transducer part; 6a protuberance; 7 frame portions; 7a notch; 8 first housings; 9 second housings; 10a, 10b pad; 11 metal steel units; 11a transducer part side; 11b frame portion side; The flexible portion of 11c, 11d; 11e, 11f electrode wiring portion; 11g, 12c, 17c guide hole; 12d, 21a through hole; 12a, 12b transducer part printed base plate; 13a, 13b coil; 14a, 14b electrode; 15a, 15b surface; 16a, 16b displacement detecting portion; 17a, 17b frame portion printed base plate; 18 cementing agents; 20 first assembling fixtures; 20a screw hole; 20b directing pin; 21 second assembling fixtures; 21b guide hole; 22 fastening bolts.
Claims (7)
1. a servo-type acceleration transducer, possesses: transducer part, carry out displacement according to acceleration; Frame portion, supports described transducer part; Displacement detecting portion, detects the displacement of described transducer part by the variation of electrostatic capacitance; And servo circuit portion, the variable quantity of the electrostatic capacitance detecting according to described displacement detecting portion, supply with to the coil that is arranged at described transducer part the electric current of displacement of controlling described transducer part, the electric current that described servo-type acceleration transducer is supplied with described servo circuit portion is exported as acceleration
It is characterized in that,
Described transducer part and described frame portion form by sandwiching metal steel unit by a pair of transducer part with printed base plate and a pair of frame portion printed base plate,
The surface configuration of the surface of described transducer part and described frame portion is in same plane,
Described transducer part is supported by described frame portion by described metal steel unit,
On described metal steel unit, be formed with flexible portion, described flexible portion doubles as the electrode wiring portion of described displacement detecting portion and the wiring part of described coil, and can bending deflection.
2. servo-type acceleration transducer according to claim 1, is characterized in that,
Described displacement detecting portion is by forming with each housing relative with these electrodes with the electrode forming respectively on printed base plate in described a pair of transducer part.
3. servo-type acceleration transducer according to claim 2, is characterized in that,
At least one in described each housing forms magnetic circuit.
4. according to the servo-type acceleration transducer described in claim 2 or 3, it is characterized in that,
Between described frame portion and described each housing, sandwich and dispose pad, by the thickness of described pad, set the interelectrode gap of described displacement detecting portion.
5. according to the servo-type acceleration transducer described in any one in claims 1 to 3, it is characterized in that,
Front in described transducer part is formed with protuberance,
Described frame portion, described protuberance towards position be formed with notch,
The described metal steel unit that forms described protuberance and described notch is outstanding with printed base plate and described frame portion printed base plate from described transducer part respectively.
6. according to the servo-type acceleration transducer described in any one in claims 1 to 3, it is characterized in that,
Described electrode wiring portion at least a portion is bending and form.
7. according to the servo-type acceleration transducer described in any one in claims 1 to 3, it is characterized in that,
On the face being clipped with printed base plate with printed base plate and described frame portion by described transducer part of described metal steel unit, be formed with multiple holes.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2013-086444 | 2013-04-17 | ||
| JP2013086444A JP5330620B1 (en) | 2013-04-17 | 2013-04-17 | Servo type acceleration sensor |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN104111352A true CN104111352A (en) | 2014-10-22 |
| CN104111352B CN104111352B (en) | 2018-01-19 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201410146195.0A Expired - Fee Related CN104111352B (en) | 2013-04-17 | 2014-04-11 | Servo-type acceleration transducer |
Country Status (2)
| Country | Link |
|---|---|
| JP (1) | JP5330620B1 (en) |
| CN (1) | CN104111352B (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113049849A (en) * | 2021-01-08 | 2021-06-29 | 中国船舶重工集团公司第七0七研究所 | Flexible accelerometer pendulous reed temperature performance test method and system |
Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4944184A (en) * | 1989-04-14 | 1990-07-31 | Sundstrand Data Control, Inc. | Asymmetric flexure for pendulous accelerometer |
| US5024089A (en) * | 1988-06-29 | 1991-06-18 | Sundstrand Data Control, Inc. | Stress compensated transducer |
| US5546805A (en) * | 1994-08-12 | 1996-08-20 | Coyote Engineering Services, Inc. | Angle and angular acceleration sensors |
| JP2861694B2 (en) * | 1992-12-24 | 1999-02-24 | 株式会社村田製作所 | Servo type vibration sensor |
| JP2913525B2 (en) * | 1992-02-28 | 1999-06-28 | 株式会社共和電業 | Inclinometer |
| WO2002041006A2 (en) * | 2000-11-16 | 2002-05-23 | Micma Engineering Ltd. | Silicon capacitive accelerometer |
Family Cites Families (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5238219Y2 (en) * | 1973-02-15 | 1977-08-31 | ||
| US4441366A (en) * | 1981-07-14 | 1984-04-10 | Sundstrand Data Control, Inc. | Flexure with electrical conductor |
| JPS6117959A (en) * | 1984-07-05 | 1986-01-25 | Japan Aviation Electronics Ind Ltd | Accelerometer |
| JPH03104862U (en) * | 1990-02-07 | 1991-10-30 | ||
| JP2761803B2 (en) * | 1990-11-05 | 1998-06-04 | 株式会社コパル | Acceleration sensor |
-
2013
- 2013-04-17 JP JP2013086444A patent/JP5330620B1/en not_active Expired - Fee Related
-
2014
- 2014-04-11 CN CN201410146195.0A patent/CN104111352B/en not_active Expired - Fee Related
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5024089A (en) * | 1988-06-29 | 1991-06-18 | Sundstrand Data Control, Inc. | Stress compensated transducer |
| US4944184A (en) * | 1989-04-14 | 1990-07-31 | Sundstrand Data Control, Inc. | Asymmetric flexure for pendulous accelerometer |
| JP2913525B2 (en) * | 1992-02-28 | 1999-06-28 | 株式会社共和電業 | Inclinometer |
| JP2861694B2 (en) * | 1992-12-24 | 1999-02-24 | 株式会社村田製作所 | Servo type vibration sensor |
| US5546805A (en) * | 1994-08-12 | 1996-08-20 | Coyote Engineering Services, Inc. | Angle and angular acceleration sensors |
| WO2002041006A2 (en) * | 2000-11-16 | 2002-05-23 | Micma Engineering Ltd. | Silicon capacitive accelerometer |
Also Published As
| Publication number | Publication date |
|---|---|
| JP5330620B1 (en) | 2013-10-30 |
| CN104111352B (en) | 2018-01-19 |
| JP2014211316A (en) | 2014-11-13 |
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