CN1041035A - Laser precision measured object linearity device and measuring method thereof - Google Patents
Laser precision measured object linearity device and measuring method thereof Download PDFInfo
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- CN1041035A CN1041035A CN 88106504 CN88106504A CN1041035A CN 1041035 A CN1041035 A CN 1041035A CN 88106504 CN88106504 CN 88106504 CN 88106504 A CN88106504 A CN 88106504A CN 1041035 A CN1041035 A CN 1041035A
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Abstract
The device of laser precision measured object linearity of the present invention and measuring method thereof have proposed a kind of new method and device thereof with accurate laser measurement large sized object linearity.This device is done light source with laser, with the two-face mirror of grating, crystal wafer and symmetry after reflection once more diffraction unique principle of interfering then constitute measuring system, mainly by laser head and photodetector system, plane mirror and minute adjustment system thereof, grating, crystal wafer and regulating system thereof, electronic data processing and display system, figure punch and five most of compositions, be a kind of large sized object in real time, automatically, the device and the method for testing thereof of efficient, high-resolution, high-acruracy survey linearity.
Description
Laser precision measured object linearity device of the present invention and measuring method thereof belong to the category that testing tool device and measuring technique thereof are measured by physical technique portion.Specifically be exactly a kind of Measuring Object linearity especially the precision measuring instrument apparatus and measuring method thereof of large sized object linearity of being mainly used to.
The apparatus of current domestic and international Measuring Object linearity and measuring method generally have collimating telescope, laser collimator, two-frequency laser interferometer and single frequency laser interferometer etc., but it is not all high because of precision, use inconvenience, expend time in, the measurement range finite sum can't overcome the external interference influence, equipment complexity, defective inconvenience such as cost an arm and a leg are promoted the use of, and especially measure for high-level efficiency, high precision, robotization, the high-resolution of large sized object linearity to be difficult to realize always.
According to us-A-3891321, us-A-3756723, us-A-3738753, us-A-3738753, the us-A-3790284 and the Measuring Object displacement of us-A-3726595 report and its common ground of apparatus of linearity are the optical system complexity, used laser instrument costliness, the object of surveying is limited in scope, generally be limited in the 3m scope, and precision is not high, manufacture difficulty is also big.As the report of us-A-3738753 wherein a kind of be mainly used to the Measuring Object displacement device it use asymmetric catoptron by the very close holographic grating of striped and expensive He-Ne laser instrument and reflection unit, adjust and use inconvenience, directly influenced promoting the use of of measurement mechanism.
The objective of the invention is to overcome the defective that exists in the apparatus of existing Measuring Object linearity and the measuring method, and utilize optical grating diffraction and the optical principle of diffraction design once more after reflection in a creative way, thereby provide a kind of have unique measuring system, precision height, simple in structure, easy to use, efficient is high, measurement range is big, especially can solve a kind of high automation of large sized object straight line degree measurement problem, high-resolution accurate laser measurement apparatus and measuring method thereof.
The device of laser precision measured object linearity of the present invention is a kind ofly to do light source with laser, with the two-face mirror of grating, crystal wafer and symmetry after reflection once more diffraction unique measuring system of interfering then constitute, and to use that asymmetrical diffraction beam interference and crystal polarization effect provide with the grating constant be the measurement numeral of unit handled and showed measurement result by electronic device precision measurement apparatus.This device is by laser head and photodetector system, plane mirror and minute adjustment system thereof, grating crystal wafer and regulating system thereof, electronic data processing and display system, digital printer five most of compositions, (as shown in Figure 1) wherein first's laser head and photodetector system by He-Ne laser instrument (1), inverted telescope (2), beam splitter (3), all-dielectric film (4), interference filter (5), Glan is paid section's prism (6), photoelectric cell is to (7), prime amplifier (8) (as shown in Figure 9) is formed, and put into a chest, (as shown in Figure 2) their center line is all in a plane, distance from the chest bottom surface equates that all wherein He-Ne laser instrument (1) is exported TEM
OoMould, power are at the milliwatt order of magnitude, and photoelectric cell is designed to more than or equal to 1cm the light-receiving area of each silicon photocell in (7)
2, the response time is 20 microseconds, two silicon photocell performance parameter unanimities, and especially photoelectric transformation efficiency is close, i.e. and pairing is used, and has added a metallic shield that prevents to disturb at prime amplifier (8) circuit board; Its second portion plane mirror and minute adjustment system thereof, mainly the catoptron (16) and the minute adjustment system of symmetry form (shown in Fig. 3,4) two level crossings in space energy high precision adjusting fully by the two sides, every mirror has a secondary level, one pair of vertical coarse adjustment and fine tuning device, tilt adjustment resolution is that 0.6, two plane mirror (16) is symmetrically placed in the chest; Its third part grating, crystal wafer and Precision trimming system thereof mainly are made up of grating (18), crystal wafer (19) and mounting box (as shown in Figure 6) thereof and Precision trimming frame (as shown in Figure 7).Place a diffraction grating and a quartz crystal slice in its mounting box (Fig. 6), its Precision trimming frame (Fig. 7) is normal flat structure; Its 4th portions of electronics data processing and display system, it is made up of electronic fine-grained part (9), control section (10), display part (11).Wherein electronic fine-grained part (9) adopts parallel circuit phase shift bridge shaping circuit, and control section (10) comprises up-down counter (12) and discriminating direction device (13), and its display part (11) are formed by four decimal system reversible counter cascades.And increase between the seven-segment decoder (14) 4D trigger (15) is arranged: its 5th part digital printer is a kind of integrated general register instrument.
The interference filter (5) of first, glan-foucault prism (6), photoelectric cell are put into the Photoelectric Detection box to (7) in the above-mentioned laser precision measured object linearity device, and its prism chamber (49) of its Photoelectric Detection box structure (as shown in Figure 5), prism chamber fore shell (48), prism chamber back cover (50), adjusting ring (47) and lock dog (36) etc. all are to be provided with for optical element fixing and that regulate in the detection box.
The second portion plane mirror of above-mentioned laser precision measured object linearity device and the shape in the minute adjustment system thereof and the identical two sides of the quality flatness on catoptron (16) surface of symmetry fully are the physical measurement benchmark of linearity, the axis of two catoptrons is included in the angle bisecting plane of two reflecting surface angles the axis alignment with testee, the flatness of two level crossings can be chosen the level crossing of (going into)/20 flatness, two level crossings (16) are put in the reflection dressing case (27), build with dressing case end cap (28), put into mirror unit (23) again, there has been the steel ball (29) of conversion dressing case dimensional orientation point action at the center, behind of every catoptron, can carry out the coarse adjustment and the fine tuning of level crossing locus by handwheel (31) and fine motion cover (39), spring (32) is contained in level crossing behind for the adjustment level crossing is provided with, handwheel (31) is housed on the fine motion bar (30), top handwheel (31) is fine-tuning, below handwheel (31) but coarse adjustment, fine setting part is used custom-designed differential thread, tilt adjustment resolution is 0.6 ".Its adjusting mechanism is connected by web joint (37) with level crossing mechanism, its adjustment seat (38), fine motion cover (39), differential swivel nut (40), lock sleeve (34), locking decorative cover (35), latch segment (36), screw grommet (33), nut (24), packing ring (25), screw (26) all is provided with for adjusting mechanism is connected with level crossing mechanism, (as shown in Figure 3) the fine motion regulator of its plane mirror regulating system has adopted the differential thread structure, M differential (43), one is coarse thread, one is fine thread, coarse control rod is (42), positioning key is (44), coupking shaft is (45), and joint sheeve is finished coarse adjustment and fine setting for (46) by handwheel (31).
The third part minute adjustment frame of above-mentioned laser precision measured object linearity device is that normal flat structure is exactly that bobbin has the feature that is similar to star, this kind adjusting bracket carries out precise angle two orthogonal directions to be regulated, total degree of tilt is that 12 ° of dip resolutions are 7 "; this adjusting bracket can be with stainless steel or aluminum alloy materials; the mainboard (57) of star formula gimbal has two through holes (as shown in Figure 7) for holding two fine motion heads (58); a macropore is arranged for holding gimbal inner ring (59) and gimbal outer ring (60); outer ring (60) are contained on the inboard Z-axis of mainboard (57) and rotate; inner ring (59) is contained on the transverse axis of inboard, outer ring (60) and rotates, the intersection point of two axles accurately coincides with the center of mirror surface, crystal wafer (19), grating optical elements such as (18) are that rotate at the center with this point then.
Electronic fine-grained part (9) in the 4th part of above-mentioned laser precision measured object linearity device adopts parallel resistance phase shift bridge and shaping circuit, be exactly suitably to select phase shift resistor bridge parameter, by SinWt,-CosWt,-SinWt, CosWt obtains the signal of the following phase place of hysteresis SinWt: 9 °, 45 °, 81 °, 117 °, 153 °, 189 °, 225 °, 261 °, 297 °, 330 °, 10 road sine waves that phase-shift circuit produces, elder generation becomes 10 road square waves by trigger separately, and then becomes 10 tunnel burst pulses by monostable circuit separately, phase shift corresponding to 10 tunnel sinusoidal signals, these pulse edge time shafts are evenly distributed, utilize the phase subdivision technology of interference fringe, can be inferior level of the every variation of interference fringe, regarded phase change as 360 °, obtain a plurality of count pulses from interference fringe changes, the up-down counter (12) in its control section (10) is the pulse and just carrying of successively decreasing that adds up, the counter of negative information, its discriminating direction device (13) are ten frequency multiplication closed loop self-locking arbiters.
The available small-sized digital printer of the 5th part digital printer (22) of above-mentioned laser precision measured object linearity device, it is a kind of integrated general graphic meter, and the 8421 encoded binary tracer signals that it can be sent electronic data processing system here directly are printed on the common blank sheet of paper with the tens digit form.
Description of drawings
Fig. 1 is laser precision measured object linearity device of the present invention and instrumentation plan thereof, and with dashed lines has been represented five major parts of this device roughly, has summarily embodied main design of the present invention.
Fig. 2 is the first's laser head and the photodetector system block scheme of laser precision measured object linearity device of the present invention.
Fig. 3 is the second portion plane mirror and the minute adjustment system schematic thereof of laser precision measured object linearity device of the present invention.
Fig. 4 is that synoptic diagram is regulated in the fine motion of second portion plane mirror regulating system of the present invention.
Fig. 5 is the Photoelectric Detection box synoptic diagram in first of the present invention laser head and the photodetector system.
Fig. 6 is a wherein crystal holder left end cap (51) of third part grating of the present invention, crystal wafer and mounting box synoptic diagram thereof, right end cap (53), and set screw (52) has three, grating seat to be (56) for (54), crystal holder.
Fig. 7 is the minute adjustment shelf structure synoptic diagram in third part grating crystal wafer of the present invention and the minute adjustment system thereof.
Fig. 8 is the minute adjustment frame fine motion header structure synoptic diagram in third part grating crystal wafer of the present invention and the minute adjustment system thereof, and fixed head is (61), and the fine motion cylindrical shell is (62), and the fine motion sleeve is (63).
Fig. 9 is the preamplifier circuit schematic diagram in the first of the present invention.
The drawing reference numeral explanation:
1, He-Ne laser instrument 2, inverted telescope
3, beam splitter 4, all-dielectric film
5, interference filter 6, Glan are paid section's prism
7, photoelectric cell to 8, prime amplifier
9, electronic fine-grained part 10, control section
11, counting display part 12, up-down counter
13, discriminating direction device 14, seven-segment decoder
15,4D trigger 16, plane mirror
17, data processing and display unit 18, grating
19, crystal wafer 20, planker
21, tested guide rail 22, printer
23, mirror unit 24, nut
25, packing ring 26, screw
27, reflection dressing case 28, dressing case end cap
29, steel ball 30, fine motion bar
31, handwheel 32, spring
33, sleeve pipe 34, lock sleeve
35, locking decorative cover 36, latch segment
37, web joint 38, adjustment seat
39, fine motion cover 40, differential swivel nut
41, catoptron cover 42, M coarse control rod
43, differential 44, the positioning key of M
45, coupling spindle 46, coupling sleeve
47, adjusting ring 48, prism chamber fore shell
49, prism chamber 50, prism back cover
51, brilliant box left end cap 52, brilliant box set screw
53, brilliant box right end cap 54, grating seat
55, left end cap 56, crystal holder
57, mainboard 58, fine motion head
59, inner ring 60, outer ring
61, fixed head 62, fine motion cylindrical shell
63, fine motion sleeve
The method of laser precision measured object linearity of the present invention is characterized in that doing light source with the good laser instrument of coherence, with diffraction grating, crystal wafer, two sides symmetry catoptron constitutes optical measuring system, with diffraction of light, interfere, the polarization theory is the basis, with pre-amplification circuit, electronic sub-circuit, the reversible counting circuit, digital display circuits etc. constitute electronic data processing system, constitute optical adjusting mechanism with the precision optical machinery parts, with the diffraction grating is motor element, the linearity of testee and the displacement of grating accurately connect, and carrying two bundle interference light intensities of coherent lights of object nonstraightness information and grating is I(along the quantitative relationship of groove vertical direction displacement
)=K.Cos(4 (2 π)/(d)
).I(in the formula
) be interference light intensity, d is a grating constant,
Be the displacement of grating along the groove vertical direction, utilize optical grating diffraction and behind two catoptron vertical reflections diffraction once more, interfere then.Laser carries out diffraction by the asymmetrical diffraction grating, produces ± 1 grade, ± 2 grades ... etc. diffraction lights at different levels, two plane mirrors only go back ± 1 order diffraction light vertical reflection, make its secondary by grating, diffraction again, (+1 behind the secondary diffraction; + 1) level light and (1;-1) level light is interfered, and this interference light intensity reflects the linearity of object.The specific operation process of its this method of testing is: before measuring, at first the reference data line is set up on the surface of testee, laser head and two-face mirror are placed on the two ends of object under test respectively, centre-height is identical, with grating, crystal holder is placed on measured object by the place, two ends, seek identical digital reading, the grating crystal holder is moved on to an end of testee, read a number by instrument, the other end that raster box is moved on to testee is read a number more then, repeats this process, till obtaining identical numerical value, article one, the reference data line is just set up, then that the reference data line is parallel with the bisecting plane of two level crossings, grating is put into an end of testee, at the uniform velocity promote it, numeric display unit just shows measurement result, and available printer is got measurement result simultaneously.
Laser precision measured object linearity device of the present invention and method of testing advantage thereof be to utilize in a creative way optical grating diffraction and after reflection once more the optical principle of diffraction constitute unique optical measuring system, make this measurement mechanism and method of testing thereof reach the precision height, usable range is big, especially the most suitable for the high-acruracy survey of large sized object linearity, and this apparatus structure is simple, easy to use, automaticity height, efficient height are fabulous precision measurement apparatus and the methods of current domestic and international Measuring Object linearity.
Claims (5)
1, a kind of device of laser precision measured object linearity is characterized in that it being to do light source with laser, with the two-face mirror of grating, crystal wafer and symmetry after reflection once more diffraction unique measuring system of interfering then constitute.Specifically this device is made up of laser head and photodetector system, plane mirror and minute adjustment system, grating, crystal wafer and regulating system thereof, electronic data processing and display system, digital printer five major parts:
-first laser head and photodetector system are made up of (7), prime amplifier (8) He-Ne laser instrument (1), inverted telescope (2), beam splitter (3), all-dielectric film (4), interference filter (5), glan-foucault prism (6), photoelectric cell and are put into a chest, their center line is all in a plane, distance from the chest bottom surface all equates, wherein the He-Ne laser beam is the TEMoo mould, power is at the milliwatt order of magnitude, and photoelectric cell is designed to more than or equal to 1cm the light-receiving area of each silicon photocell in (7)
2, the response time is 20 microseconds, two silicon photocell performance parameter unanimities, and especially photoelectric transformation efficiency is close, i.e. and pairing is used, and has added a metallic shield that prevents to disturb at prime amplifier (8) circuit board.
Mainly the catoptron (16) and the minute adjustment system of symmetry form fully by the two sides for-second portion plane mirror and minute adjustment system thereof, two level crossings can high precision be regulated in the space, every mirror has a secondary level, one pair of vertical coarse adjustment and fine tuning device, and tilt adjustment resolution is 0.6 ".Two plane mirrors (16) are symmetrically placed in the chest.
-third part grating, crystal wafer and Precision trimming system thereof are mainly by grating (18), and crystal wafer (19) and mounting box (Fig. 6) thereof and Precision trimming frame (Fig. 7) are formed.Place a diffraction grating and a quartz crystal slice in its mounting box (Fig. 6), its Precision trimming frame (Fig. 7) is normal flat structure.
-Di four portions of electronics data processing and display systems, it is made up of electronic fine-grained part (9), control section (10), display part (11).Wherein electronic fine-grained part (9) adopts parallel circuit transposition bridge shaping circuit.Control section (10) comprises up-down counter (12) and discriminating direction device (13), and its display part (11) are formed by four decimal system reversible counter cascades, and increase has 4D trigger (15) between the seven-segment decoder (14).
-its 5th part digital printer is a kind of integrated general register instrument.
2, the second portion plane mirror according to the described laser precision measured object linearity of claim 1 device is two sides shape and the identical catoptron of quality, two catoptron axis are included in the angle bisecting plane of two reflecting surface angles the axis alignment with testee, the flatness of two level crossings can be chosen the catoptron of (going into)/20 flatness, it is 0.6 that the fine setting part is used custom-designed differential thread, tilt adjustment resolution ".
3, third part minute adjustment frame according to the described laser precision measured object linearity of claim 1 device is that normal flat structure is exactly that bobbin has the feature that is similar to star, this kind adjusting bracket carries out precise angle two orthogonal directions to be regulated, total degree of tilt is 12 °, dip resolution is 7 "; this adjusting bracket can be with stainless steel or aluminum alloy materials; the mainboard (57) of star formula gimbal has two through holes for holding two fine motion heads (58); a macropore is arranged for holding gimbal inner ring (59) and gimbal outer ring (60); outer ring (60) are contained on the inboard Z-axis of mainboard (57) and rotate; inner ring (59) is contained on the transverse axis of inboard, outer ring (60) and rotates, the intersection point of two axles accurately coincides with the center of mirror surface, crystal wafer (19), grating optical elements such as (18) are that rotate at the center with this point then.
4, adopt parallel resistance phase shift bridge and shaping circuit according to the electronic fine-grained part (9) in the 4th part of the described laser precision measured object linearity of claim 1 device, be exactly suitably to select phase shift resistor bridge parameter, by SinWt,-CosWt,-SinWt, CosWt obtains the signal of the following phase place of hysteresis SinWt: 9 °, 45 °, 81 °, 117 °, 153 °, 189 °, 225 °, 261 °, 297 °, 330 °, 10 road sine waves that phase-shift circuit produces, the trigger by separately becomes 10 road square waves earlier, and then becomes 10 tunnel burst pulses by monostable circuit separately, phase shift corresponding to 10 tunnel sinusoidal signals, these pulse edge time shafts are evenly distributed, utilize the phase subdivision technology of interference fringe, and are inferior level of the every variation of interference fringe, regarded phase change as 360 °, obtain a plurality of count pulses from an interference fringe changes, the up-down counter (12) in its control section (10) is to add up, successively decrease and just carry, the counter of negative information, its discriminating direction device (13) are ten frequency multiplication closed loop self-locking arbiters.
5, the measuring method of the described laser precision measured object linearity of claim 1 device, it is characterized in that it being to do light source with the good laser instrument of coherence, with diffraction grating, crystal wafer, two sides symmetry catoptron constitutes optical measuring system, with diffraction of light, interfere, the polarization theory is the basis, with pre-amplification circuit, electronic sub-circuit, the reversible counting circuit, digital display circuits etc. constitute electronic data processing system, constitute optical adjusting mechanism with the precision optical machinery parts, with the diffraction grating is motor element, the linearity of testee and the displacement of grating accurately connect, and the interference light intensity and the grating line vertical direction displacement quantitative pass of carrying two bundle coherent lights of object nonstraightness information are I(
)=KCos(4, (2 π)/(d)
), I(in the formula
) for interference light string, d are grating constant,
Be the displacement of grating along the groove vertical direction, utilize optical grating diffraction and diffraction once more behind two catoptron vertical reflections, interfere then, laser carries out diffraction by the asymmetrical diffraction grating, generation ± level, ± 2 grades ... etc. diffraction lights at different levels, two plane mirrors only go back ± 1 order diffraction light vertical reflection, make its secondary by grating, diffraction again, (+1 behind the secondary diffraction; + 1) level light and (1;-1) level light is interfered.This interference light intensity reflects the linearity of object; Its concrete operation method is: before measuring, at first the reference data line is set up on the surface of testee, laser head and two-face mirror are placed on the two ends of object under test respectively, centre-height is identical, with grating, crystal holder is placed on measured object by the place, two ends, seek identical digital reading, with grating, crystal holder moves on to an end of testee, read a number by instrument, the other end that the grating crystal holder is moved on to testee is read a number again, repeat this process, till obtaining identical numerical value, a reference data line is just set up, then that the reference data line is parallel with the bisecting plane of two level crossings, an end that grating is put into testee at the uniform velocity promotes it, and numeric display unit just shows measurement result, and available printer is got measurement result simultaneously.
Priority Applications (1)
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CN 88106504 CN1026192C (en) | 1988-09-05 | 1988-09-05 | Laser measuring equipment and method for precision measurement of linearity |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
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CN 88106504 CN1026192C (en) | 1988-09-05 | 1988-09-05 | Laser measuring equipment and method for precision measurement of linearity |
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CN1041035A true CN1041035A (en) | 1990-04-04 |
CN1026192C CN1026192C (en) | 1994-10-12 |
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CN 88106504 Expired - Fee Related CN1026192C (en) | 1988-09-05 | 1988-09-05 | Laser measuring equipment and method for precision measurement of linearity |
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Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
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CN102654386A (en) * | 2011-12-15 | 2012-09-05 | 上海卫星工程研究所 | High precision horizontal vernier device used for measuring |
CN103154664A (en) * | 2010-10-08 | 2013-06-12 | 东京毅力科创株式会社 | Method of determining an asymmetric property of a structure |
CN107345794A (en) * | 2016-04-18 | 2017-11-14 | 斯塔图斯专业机械测量技术有限公司 | For the rotary laser for the perpendicularity for detecting two machine parts |
CN107388990A (en) * | 2017-07-19 | 2017-11-24 | 天津科技大学 | Laser grating striped projection system based on multifacet rotating prism |
CN108895986A (en) * | 2018-07-17 | 2018-11-27 | 广西师范大学 | Microscopic three-dimensional topography measurement device based on striped projection |
CN108994769A (en) * | 2018-08-21 | 2018-12-14 | 凡己科技(苏州)有限公司 | It is a kind of for improving the electric screw driver of copper installation precision |
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1988
- 1988-09-05 CN CN 88106504 patent/CN1026192C/en not_active Expired - Fee Related
Cited By (10)
Publication number | Priority date | Publication date | Assignee | Title |
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CN103154664A (en) * | 2010-10-08 | 2013-06-12 | 东京毅力科创株式会社 | Method of determining an asymmetric property of a structure |
US9239522B2 (en) | 2010-10-08 | 2016-01-19 | Kla-Tencor Corporation | Method of determining an asymmetric property of a structure |
CN102654386A (en) * | 2011-12-15 | 2012-09-05 | 上海卫星工程研究所 | High precision horizontal vernier device used for measuring |
CN102654386B (en) * | 2011-12-15 | 2014-12-10 | 上海卫星装备研究所 | High precision horizontal vernier device used for measuring |
CN107345794A (en) * | 2016-04-18 | 2017-11-14 | 斯塔图斯专业机械测量技术有限公司 | For the rotary laser for the perpendicularity for detecting two machine parts |
CN107388990A (en) * | 2017-07-19 | 2017-11-24 | 天津科技大学 | Laser grating striped projection system based on multifacet rotating prism |
CN107388990B (en) * | 2017-07-19 | 2019-07-23 | 天津科技大学 | Laser grating striped projection system based on multifacet rotating prism |
CN108895986A (en) * | 2018-07-17 | 2018-11-27 | 广西师范大学 | Microscopic three-dimensional topography measurement device based on striped projection |
CN108994769A (en) * | 2018-08-21 | 2018-12-14 | 凡己科技(苏州)有限公司 | It is a kind of for improving the electric screw driver of copper installation precision |
CN108994769B (en) * | 2018-08-21 | 2021-01-15 | 凡己科技(苏州)有限公司 | A electronic bottle opener for improving copper bar installation accuracy |
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