CN104101431A - Method and system for calibrating linear array sensor of full-spectrum direct-reading type spectrograph - Google Patents
Method and system for calibrating linear array sensor of full-spectrum direct-reading type spectrograph Download PDFInfo
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- 230000008569 process Effects 0.000 claims description 11
- 239000013307 optical fiber Substances 0.000 claims description 4
- 238000010835 comparative analysis Methods 0.000 claims description 3
- QSHDDOUJBYECFT-UHFFFAOYSA-N mercury Chemical compound [Hg] QSHDDOUJBYECFT-UHFFFAOYSA-N 0.000 claims description 3
- 229910052753 mercury Inorganic materials 0.000 claims description 3
- 229910052754 neon Inorganic materials 0.000 claims description 3
- GKAOGPIIYCISHV-UHFFFAOYSA-N neon atom Chemical compound [Ne] GKAOGPIIYCISHV-UHFFFAOYSA-N 0.000 claims description 3
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Abstract
The invention relates to the technical field of spectrographs, and particularly to a method and a system for calibrating a linear array sensor of a full-spectrum direct-reading type spectrograph. The system comprises a calibration light source used for generating a calibration spectrum line; a light splitting device which comprises an entrance slit, a collimating mirror, a plane grating and a collecting lens, projects a calibration spectrum line on the linear array sensor and controls movement of the calibration spectrum line; a data acquisition device for acquiring spectrum data of each sensing unit and transmitting the data to a data analysis and processing device; the data analysis and processing device for analyzing the acquired data transmitted by the data acquisition device to obtain a compensation value of each sensor unit and compensating a measured value of each sensor unit. The method and the system for calibrating the linear array sensor of the full-spectrum direct-reading type spectrograph can measure and calibrate difference of different sensing units of the full-spectrum direct-reading type spectrograph and can obtain a steady measured value, so that the reliability of an analysis result is guaranteed, and the manufacturing cost of instruments and use difficulty of users are reduced.
Description
Technical field
The present invention relates to spectrometer technical field, especially a kind of calibration steps and system of full spectrum direct reading spectroscopic instrument line array sensor.
Background technology
The optical texture of spectroanalysis instrument generally includes multi-channel type, single channel scan-type and full spectrum direct-reading.Wherein, entirely compose direct-reading because once can gather all spectral lines, contain much information, measuring speed is fast, and accuracy advantages of higher has progressively become the market mainstream.
Full spectrum direct reading spectroscopic instrument adopts array type detector conventionally, comprises line array sensor and area array sensor.But which kind of sensor no matter, each the discrete sensing unit on sensor, its spectral response and quantum efficiency have otherness, that is to say, and to same line strength, different sensing units may have different responses.In actual use, this species diversity can affect to measuring.
Therefore, current full spectrum direct reading spectroscopic instrument is taked the hard-wired mode of whole parts conventionally, spectral line is accurately positioned on the different sensing units of detector.In actual use, must guarantee that spectral line is positioned on certain fixing sensing unit all the time, avoid spectral line to fall different sensing units and cause measured deviation.
Owing to must guaranteeing that spectral line is positioned at certain fixing sensing unit all the time.This has just proposed very high requirement to the stability of instrument.Thisly require one to be to be embodied in the design of instrument, must guarantee stability by rational design and high-level part manufacture, assembly technology; The 2nd, be embodied in the use of instrument, the necessary strict and steady of user's laboratory environment, avoids environment temperature, the variation of ambient humidity and various vibrations etc. completely.This just brings instrument manufacturing cost high, and service condition is harsh, and the shortcomings such as operating cost height have been raised the buying of instrument and used threshold, are unfavorable for popularizing between medium-sized and small enterprises.
Summary of the invention
The technical problem to be solved in the present invention is to provide a kind of calibration steps of full spectrum direct reading spectroscopic instrument line array sensor, is guaranteeing under the prerequisite of analysis to measure precision, reduces the manufacturing cost of full spectrum direct reading spectroscopic instrument.
In order to solve the problems of the technologies described above, the present invention includes following steps:
Step 1, determines regulation light source, obtains calibration spectral line data;
Step 2, each sensor unit of line array sensor gathers the spectral line data of regulation light source successively;
Step 3, the spectral line data that each sensor unit is gathered successively and calibration spectral line data comparative analysis, obtain the offset of each sensor unit;
Step 4, compensates the measured value of each sensor unit according to offset, completes the calibration of full spectrum direct reading spectroscopic instrument line array sensor.
The present invention also provides a kind of calibration system of full spectrum direct reading spectroscopic instrument line array sensor, comprising:
Regulation light source, for generation of calibration spectral line;
Light-dividing device, comprises entrance slit, collimating mirror, plane grating and condenser, calibration spectral line is dropped on line array sensor, and controls the movement of calibration spectral line;
Data collector, gathers the spectroscopic data of each sensing unit, and is transferred to data analysis and process device.
Data analysis and process device, the image data that data collector is transmitted is analyzed, and obtains more afterwards the offset of each sensor unit, and the measured value of each sensor unit is compensated with calibration spectral line data.And the measured value of each sensor unit is compensated.
Preferably, described regulation light source is mercury lamp or neon lamp.
Further, also comprise optical fiber, for the calibration spectral line that regulation light source is sent, be coupled to entrance slit front end.
The present invention can measure and calibrate the different sensing unit othernesses of full spectrum direct reading spectroscopic instrument, even if spectral line is positioned on different sensing units, also can obtain stable measured value, guarantee the reliability of analysis result, and reduced the manufacturing cost of instrument and user's use difficulty.
Accompanying drawing explanation
Fig. 1 is structural representation of the present invention.
Embodiment
The embodiment that the present invention is cited; just for helping to understand the present invention; should not be construed as limiting the scope of the present invention; for those skilled in the art; without departing from the inventive concept of the premise; can also the present invention be improved and be modified, these improvement and modification also fall in the scope of the claims in the present invention protection.
Full spectrum direct reading spectroscopic instrument line array sensor calibration steps of the present invention, comprises the following steps:
Step 1, determines regulation light source, obtains calibration spectral line data;
Step 2, each sensor unit of line array sensor gathers the spectral line data of regulation light source successively;
Step 3, the spectral line data that each sensor unit is gathered successively and calibration spectral line data comparative analysis, obtain the offset of each sensor unit;
Step 4, compensates the measured value of each sensor unit according to offset, completes the calibration of full spectrum direct reading spectroscopic instrument line array sensor.
Full spectrum direct reading spectroscopic instrument line array sensor calibration system of the present invention, comprising:
Regulation light source 1, preferred mercury lamp or neon lamp or other single line light source, for generation of calibration spectral line;
Light-dividing device, comprises entrance slit 2, collimating mirror 3, plane grating 4 and condenser 5, calibration spectral line is dropped on line array sensor 6, and controls the movement of calibration spectral line;
Data collector 7, gathers the spectroscopic data of each sensor unit on line array sensor 6, and is transferred to data analysis and process device 8.
Data analysis and process device 8, the image data that data collector 7 is transmitted is analyzed, and obtains more afterwards the offset of each sensor unit, and the measured value of each sensor unit is compensated with calibration spectral line data.And the measured value of each sensor unit is compensated.
Further, the present invention also comprises optical fiber, for the calibration spectral line that regulation light source is sent, is coupled to entrance slit front end.
Principle of work of the present invention is:
The spectral line that stable regulation light source 1 sends, by the mode of scanning, fall successively on each sensing unit of line array sensor 6, utilize data collector 7, obtain the response data of each sensing unit to this spectral line, the inconsistency of these data has embodied the inconsistency of each sensing unit, according to these data, the data that data analysis and process device obtains each sensor unit are compared with calibration spectral line data, can obtain the offset of each sensor unit, and the measured value of each sensor unit is compensated, guarantee the accuracy of measuring.
The course of work of the present invention is:
Calibration process at first, close analysis light source, open regulation light source 1, light source 1 to be calibrated enters after steady state (SS), the calibration spectral line being sent by optical fiber is coupled to the front end of entrance slit 2, as another embodiment of the invention, the light that regulation light source 1 sends also can carry out Space Coupling to entrance slit 2 front ends by the mode of utilizing collimating mirror to add catoptron, by the rotational angle of Electric Machine Control plane grating 4, enter short scan pattern, fast will with calibration spectral line move to the edge of the sensing unit array of line array sensor 6, then by Electric Machine Control plane grating 4, enter slow scanning pattern.In slow scanning pattern, control the rotating speed of motor, make to calibrate spectral line and slowly move, fall successively on each sensing unit of line array sensor 6.Data collector 7, in slow scanning process, gathers the data of each sensing unit.After collection completes, can obtain same spectral line in the measurement situation of each sensing unit, data analysis and process device 8 is in analytic process subsequently, utilize these data to compensate the measured value of different sensing units, just can avoid the spectral line that will analyze to fall the measuring error that different sensing units cause.
Claims (4)
1. full spectrum direct reading spectroscopic instrument line array sensor calibration steps, is characterized in that, comprises the following steps:
Step 1, determines regulation light source, obtains calibration spectral line data;
Step 2, each sensor unit of line array sensor gathers the spectral line data of regulation light source successively;
Step 3, the spectral line data that each sensor unit is gathered successively and calibration spectral line data comparative analysis, obtain the offset of each sensor unit;
Step 4, compensates the measured value of each sensor unit according to offset, completes the calibration of full spectrum direct reading spectroscopic instrument line array sensor.
2. full spectrum direct reading spectroscopic instrument line array sensor calibration system, is characterized in that, comprising:
Regulation light source (1), for obtaining calibration spectral line data;
Light-dividing device, comprises entrance slit (2), collimating mirror (3), plane grating (4) and condenser (5), calibration spectral line is dropped into line array sensor (6) upper, and controls the movement of calibration spectral line;
Data collector (7), gathers the spectroscopic data of each sensor unit on line array sensor (6), and is transferred to data analysis and process device (8);
Data analysis and process device (8), the image data that data collector (7) is transmitted is analyzed, and obtains more afterwards the offset of each sensor unit, and the measured value of each sensor unit is compensated with calibration spectral line data.
3. full spectrum direct reading spectroscopic instrument line array sensor calibration system according to claim 2, is characterized in that, described regulation light source (1) is mercury lamp or neon lamp.
4. full spectrum direct reading spectroscopic instrument line array sensor calibration system according to claim 2, is characterized in that, also comprises optical fiber, for the calibration spectral line that regulation light source is sent, is coupled to entrance slit front end.
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106500840A (en) * | 2016-10-20 | 2017-03-15 | 无锡创想分析仪器有限公司 | A kind of exceptional spectrum elimination method of full spectrum formula direct-reading spectrometer |
| CN113092389A (en) * | 2017-04-26 | 2021-07-09 | 唯亚威通讯技术有限公司 | Calibration of an instrument |
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| US5083035A (en) * | 1990-07-17 | 1992-01-21 | Tencor Instruments | Position location in surface scanning using interval timing between scan marks on test wafers |
| CN101354287A (en) * | 2007-07-24 | 2009-01-28 | 杭州远方光电信息有限公司 | Spectrometer and method for correcting the same |
| CN203203714U (en) * | 2012-11-23 | 2013-09-18 | 中国科学院上海光学精密机械研究所 | Absolute wavelength calibration instrument |
| CN103765503A (en) * | 2011-08-29 | 2014-04-30 | 高通股份有限公司 | Fast calibration of displays using spectral-based colorimetrically calibrated multicolor camera |
| CN103776531A (en) * | 2014-01-01 | 2014-05-07 | 西安应用光学研究所 | Near infrared weak pulse spectral radiance calibration device |
| CN203949726U (en) * | 2014-07-09 | 2014-11-19 | 无锡创想分析仪器有限公司 | Full spectrum direct reading spectroscopic instrument line array sensor calibration system |
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2014
- 2014-07-09 CN CN201410326705.2A patent/CN104101431B/en active Active
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5083035A (en) * | 1990-07-17 | 1992-01-21 | Tencor Instruments | Position location in surface scanning using interval timing between scan marks on test wafers |
| CN101354287A (en) * | 2007-07-24 | 2009-01-28 | 杭州远方光电信息有限公司 | Spectrometer and method for correcting the same |
| CN103765503A (en) * | 2011-08-29 | 2014-04-30 | 高通股份有限公司 | Fast calibration of displays using spectral-based colorimetrically calibrated multicolor camera |
| CN203203714U (en) * | 2012-11-23 | 2013-09-18 | 中国科学院上海光学精密机械研究所 | Absolute wavelength calibration instrument |
| CN103776531A (en) * | 2014-01-01 | 2014-05-07 | 西安应用光学研究所 | Near infrared weak pulse spectral radiance calibration device |
| CN203949726U (en) * | 2014-07-09 | 2014-11-19 | 无锡创想分析仪器有限公司 | Full spectrum direct reading spectroscopic instrument line array sensor calibration system |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN106500840A (en) * | 2016-10-20 | 2017-03-15 | 无锡创想分析仪器有限公司 | A kind of exceptional spectrum elimination method of full spectrum formula direct-reading spectrometer |
| CN106500840B (en) * | 2016-10-20 | 2018-08-14 | 无锡创想分析仪器有限公司 | A kind of exceptional spectrum elimination method of full spectrum formula direct-reading spectrometer |
| CN113092389A (en) * | 2017-04-26 | 2021-07-09 | 唯亚威通讯技术有限公司 | Calibration of an instrument |
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| CN104101431B (en) | 2016-08-24 |
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Denomination of invention: Calibration method and system for linear sensor of full spectrum direct reading spectrometer Effective date of registration: 20200928 Granted publication date: 20160824 Pledgee: Bank of China Limited Liangxi Branch, Wuxi Pledgor: WUXI CHUANGXIANG ANALYSIS INSTRUMENT Co.,Ltd. Registration number: Y2020320010153 |
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Denomination of invention: Calibration method and system of linear array sensor of full spectrum direct reading spectrometer Effective date of registration: 20210810 Granted publication date: 20160824 Pledgee: Bank of China Limited Liangxi Branch, Wuxi Pledgor: WUXI CHUANGXIANG ANALYSIS INSTRUMENT Co.,Ltd. Registration number: Y2021980007458 |
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Date of cancellation: 20220905 Granted publication date: 20160824 Pledgee: Bank of China Limited Liangxi Branch, Wuxi Pledgor: WUXI CHUANGXIANG ANALYSIS INSTRUMENT CO.,LTD. Registration number: Y2021980007458 |
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