CN104089707A - Thermopile sensor - Google Patents
Thermopile sensor Download PDFInfo
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- CN104089707A CN104089707A CN201410354056.7A CN201410354056A CN104089707A CN 104089707 A CN104089707 A CN 104089707A CN 201410354056 A CN201410354056 A CN 201410354056A CN 104089707 A CN104089707 A CN 104089707A
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- thermode
- thermopair
- thermopile sensor
- series
- thermopile
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Abstract
The invention relates to the field of non-contact temperature measurement, in particular to a temperature sensor based on infrared induction, and discloses a thermopile sensor. The thermopile sensor comprises at least two thermocouples. Each thermocouple comprises a first thermode and a second thermode, wherein the second thermode is arranged on the upper surface of the first thermode, and the other part, except a working end, of the first thermode and the other part, except a working end, of the second thermode are insulated. All the thermocouples are connected in series, or in a grouping series mode or in a serial-parallel mode. The thermopile sensor is simple in structure, the thermocouples based on the thermoelectric effect are connected in series, or in the grouping series mode or in the serial-parallel mode to form a thermopile, the thermoelectromotive force of the thermocouples increases along with temperature rise of the working ends, and the temperature of an object to be measured can be measured with high sensitivity and high accuracy in real time.
Description
Technical field
The present invention relates to non-contact type temperature measurement field, relate to specifically the temperature sensor based on infrared induction, especially a kind of thermopile sensor.
Background technology
At occurring in nature, temperature all can be constantly to surrounding radiated electromagnetic wave higher than the object of absolute zero, has wherein just comprised the infrared ray that wave band is positioned at 0.75～100 μ m.Infrared temperature measurement apparatus is made based on surveying infrared ray.And thermoelectric pile is exactly a kind of infrared temperature-test sensor, it is the core component of heat-conducted meter.Thermoelectric pile structure is to be formed by some identical thermopair serial connections.The ultimate principle of thermocouple temperature measurement is that conductor or semiconductor (being called thermocouple wire material or the thermode) two ends of two kinds of different components are bonded into loop, when there is thermograde in two ends, in loop, just have electric current by producing electromotive force---thermopower, this phenomenon is called thermoelectric effect, i.e. Seebeck effect (Seebeck effect).Directly the one end as measuring media temperature is called working end (also referred to as measuring junction or focus etc.), and the other end is called cold junction (also referred to as compensation end or cold spot); Cold junction is connected with Displaying Meter or matching instrument, and Displaying Meter can be pointed out the thermoelectrical potential that thermopair produces.As shown in Figure 1, existing thermopair is comprised of the first thermode 1 and the second thermode 2, one end of the first thermode 1 is connected with one end of the second thermode 1 and forms working end c, the body portion of the first thermode 1 and the second thermode 2 is every the both sides that are arranged on working end c, the other end of the first thermode 1 is cold junction one a, and the other end of the second thermode 2 is cold junction two b, and cold junction one a and cold junction two b are separated, in the time that temperature survey need to being carried out, between a and b, access Displaying Meter.
Yet, along with scientific and technological development, to the degree of accuracy of non-contact type temperature measurement, require more and more higher.Yet existing temperature measuring equipment but can not meet high precision, highly sensitive requirement.
Summary of the invention
Technical matters to be solved by this invention is to provide a kind of high precision, highly sensitive thermopile sensor.
The technical solution adopted for the present invention to solve the technical problems is: a kind of thermopile sensor, comprise at least two thermopairs, each thermopair comprises the first thermode and the second thermode, the second thermode is placed in the first thermode upper surface, remainder between the first thermode and the second thermode except working end insulate mutually, and each thermopair is connected with series connection, grouping series connection or series-parallel system.
Concrete, each thermopair is connected to form linear structure.
Concrete, each thermopair is connected to form loop configuration.
Further, very semiconductor material or the conductor material of heterogeneity material of the first thermode and the second thermoelectricity.
Further, the first thermode of each thermopair and the second thermode adopt respectively P-type material and n type material.
Concrete, the first thermode of each thermopair is identical with the size of the second thermode.
The invention has the beneficial effects as follows: of the present invention simple in structure, the thermoelectric pile that the thermopair of utilization based on thermoelectric effect forms with series connection, grouping series connection or series-parallel system, its thermopower, along with working end temperature raises and increases, can be carried out to object to be measured the real time temperature measurement of high sensitivity, pinpoint accuracy.The present invention is applicable to infrared measurement of temperature process.
Accompanying drawing explanation
Fig. 1 is the structural representation of existing thermopair;
Fig. 2 is the structural representation of thermopair in the present invention;
Fig. 3 is the structural representation of the embodiment of the present invention 1 of the present invention;
Fig. 4 is the structural representation of the embodiment of the present invention 2 of the present invention;
Fig. 5 is the structural representation of the embodiment of the present invention 3 of the present invention;
Fig. 6 is the structural representation of the embodiment of the present invention 4 of the present invention;
Wherein, 1 is the first thermode, and 2 is the second thermode, and a is cold junction one, and b is cold junction two, and c is working end, and e is substrate.
Embodiment
Below in conjunction with drawings and Examples, describe technical scheme of the present invention in detail.
A kind of thermopile sensor of the present invention, comprise a plurality of thermopairs, as Fig. 2 be as described in the structural representation of electroheat pair, each thermopair comprises the first thermode 1 and the second thermode 2, the second thermode 2 is placed in the first thermode 1 upper surface, 2 remainders except the c of working end of the first thermode 1 and the second thermode insulate mutually, and each thermopair is connected with series connection, grouping series connection or series-parallel system.
Above-mentioned the first thermode 1 and the overlap-like arrangement of the second thermode 2, but only at c place, working end, with the third material, be connected, and all insulate mutually in other parts, the character of thermopair itself determines that the third material can not receive in real time infrared signal to thermopair and produce thermoelectromotive force.This structure is different from the both sides that the first thermode 1 in prior art and the second thermode 2 are separated at working end c.The material of thermode can adopt semiconductor, has higher thermoelectromotive force, and in Integrated design, conventional material has N-type and P type polysilicon, Si-Ge compound, Bi-Te compound, Bi-Sb-Te compound etc.This thermopile sensor adopts stacked thermopair as the element that forms thermoelectric pile, accepts the infrared induction signal from detected object in accessible visual field.The first thermode 1 overlapping mutually and the area of the second thermode 2 can be identical, and the area of the first thermode 1 also can be greater than or less than the area of the second thermode 2.
Embodiment 1
Thermopair of the present invention has a variety of in connected mode.As shown in Figure 3, be the annular emitting shape thermopile sensor that the thermopair in 8 the present invention forms.The upper adjacent thermopair of substrate e is directly connected and is formed annular.Particularly, using the thermopair 1 of its second thermode as extraction electrode h, clockwise direction is counted thermopair, it is the second thermode serial connection of the first thermode and the thermopair 2 of thermopair 1, the second thermode serial connection of the first thermode of thermopair 2 and thermopair 3, all thermopairs are together in series in this way, the first thermode of the second thermode of first thermopair and last thermopair are drawn as extraction electrode h, f, so that external secondary measurement instrument.In addition can be also the thermoelectric pile that the thermopair of other numbers is connected to form, as n.The size of annular heat pile is to be determined by the number of integrated thermal electric idol and chip area.
Embodiment 2
As shown in Figure 4, be the linear thermopile sensor that the thermopair in 8 the present invention forms.The upper adjacent thermopair of substrate e directly connect form linear.The series connection of adjacent heat galvanic couple is linear array, has greatly improved sensitivity.Particularly, successively thermopair is counted from left to right, the first thermode of thermopair 1 and the second thermode of thermopair 2 are connected in series, the second thermode serial connection of the first thermode of thermopair 2 and thermopair 3, all thermopairs are together in series in this way, the first thermode of the second thermode of first thermopair and last thermopair is drawn as extraction electrode f, h, so that external secondary measurement instrument.
Embodiment 3
As shown in Figure 5, be 8 annular emitting shape thermopile sensors that the thermopair grouping series connection in the present invention forms.This example is different from embodiment 1 part and is, all thermopairs are divided into two groups, first group of thermopair and second group of thermopair transpostion interval distribute, the different thermodes of the adjacent heat galvanic couple in are on the same group connected in series simultaneously, particularly, using the thermopair 1 of its second thermode as extraction electrode h, clockwise direction is counted thermopair, thermopair 1, thermopair 3, thermopair 5 and thermopair 7 are first group, thermopair 2, thermopair 4, thermopair 6 and thermopair 8 are second group, the second thermode serial connection of the first thermode of thermopair 1 and thermopair 3, the second thermode serial connection of the first thermode of thermopair 3 and thermopair 5, the second thermode serial connection of the first thermode of thermopair 5 and thermopair 7, the first thermode serial connection of the second thermode of thermopair 2 and thermopair 4, the first thermode serial connection of the second thermode of thermopair 4 and thermopair 6, the first thermode serial connection of the second thermode of thermopair 6 and thermopair 8, the first thermode of thermopair 7 is connected with the second thermode of thermopair 8, the first thermode of thermopair 2 and the second thermode of thermopair 1 are as exit f, h, so that external secondary measurement instrument.In addition, can also adopt series-parallel connected mode.
Embodiment 4
As shown in Figure 6, be 8 linear thermopile sensors that the thermopair grouping series connection in the present invention forms.All thermopairs are divided into two groups, first group of thermopair and second group of thermopair cross-distribution, and simultaneously the different thermodes of the adjacent heat galvanic couple in are on the same group connected in series, in this way, thermopair series connection on the same group.In figure, successively thermopair is counted from left to right, thermopair 1, thermopair 3, thermopair 5 and thermopair 7 are first group, thermopair 2, thermopair 4, thermopair 6 and thermopair 8 are second group, the first thermode serial connection of the second thermode of thermopair 1 and thermopair 3, the first thermode serial connection of the second thermode of thermopair 3 and thermopair 5, the first thermode serial connection of the second thermode of thermopair 5 and thermopair 7; The first thermode of thermopair 2 is connected with the second thermode of thermopair 4, the first thermode of thermopair 4 is connected with the second thermode of thermopair 6, the first thermode of thermopair 6 is connected with the second thermode of thermopair 8, and the second thermode of thermopair 7 is connected with the first thermode of thermopair 8; The first thermode of thermopair 1 and the second thermode of thermopair 2 are as exit f, h, so that external secondary measurement instrument.In addition, can also adopt series-parallel connected mode.
Claims (6)
1. a thermopile sensor, comprise at least two thermopairs, each thermopair comprises the first thermode and the second thermode, it is characterized in that, the second thermode is placed in the first thermode upper surface, remainder between the first thermode and the second thermode except working end insulate mutually, and each thermopair is connected with series connection, grouping series connection or series-parallel system.
2. a kind of thermopile sensor as claimed in claim 1, is characterized in that, each thermopair is connected to form linear structure.
3. a kind of thermopile sensor as claimed in claim 1, is characterized in that, each thermopair is connected to form loop configuration.
4. according to a kind of thermopile sensor described in any one in claims 1 to 3, it is characterized in that, the first thermode and the second thermoelectricity is semiconductor material or the conductor material of heterogeneity material very.
5. according to a kind of thermopile sensor described in any one in claims 1 to 3, it is characterized in that, the first thermode and second thermode of each thermopair adopt respectively P-type material and n type material.
6. a kind of thermopile sensor as claimed in claim 5, is characterized in that, the first thermode of each thermopair is identical with the size of the second thermode.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410354056.7A CN104089707A (en) | 2014-07-23 | 2014-07-23 | Thermopile sensor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410354056.7A CN104089707A (en) | 2014-07-23 | 2014-07-23 | Thermopile sensor |
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| CN104089707A true CN104089707A (en) | 2014-10-08 |
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| CN201410354056.7A Pending CN104089707A (en) | 2014-07-23 | 2014-07-23 | Thermopile sensor |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105444906A (en) * | 2015-11-23 | 2016-03-30 | 惠州学院 | High-sensitivity temperature sensor |
| CN110392823A (en) * | 2017-02-28 | 2019-10-29 | 赛峰直升机发动机公司 | The temperature measurement carried out especially in turbogenerator by the network of sensitive detection parts |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4456919A (en) * | 1980-12-30 | 1984-06-26 | Horiba, Ltd. | Thermopile type detector with temperature sensor for cold junction |
| WO2010143190A1 (en) * | 2009-06-12 | 2010-12-16 | Ophir Optronics Ltd. | Multifunction laser power meter |
| CN102884405A (en) * | 2010-04-14 | 2013-01-16 | 埃赛力达加拿大有限公司 | Vertically stacked thermopile |
| EP2549250A2 (en) * | 2011-07-20 | 2013-01-23 | Melexis Technologies NV | Thermopile design for an infrared sensor |
-
2014
- 2014-07-23 CN CN201410354056.7A patent/CN104089707A/en active Pending
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4456919A (en) * | 1980-12-30 | 1984-06-26 | Horiba, Ltd. | Thermopile type detector with temperature sensor for cold junction |
| WO2010143190A1 (en) * | 2009-06-12 | 2010-12-16 | Ophir Optronics Ltd. | Multifunction laser power meter |
| CN102884405A (en) * | 2010-04-14 | 2013-01-16 | 埃赛力达加拿大有限公司 | Vertically stacked thermopile |
| EP2549250A2 (en) * | 2011-07-20 | 2013-01-23 | Melexis Technologies NV | Thermopile design for an infrared sensor |
Non-Patent Citations (2)
| Title |
|---|
| I. M. TOUGAS等: "Metallic and Ceramic Thin Film Thermocouples for Gas Turbine Engines", 《SENSORS》 * |
| 王从瑞等: "功能-结构一体化NiCr/NiSi薄膜热电偶的制备", 《测控技术》 * |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105444906A (en) * | 2015-11-23 | 2016-03-30 | 惠州学院 | High-sensitivity temperature sensor |
| CN105444906B (en) * | 2015-11-23 | 2019-04-12 | 惠州学院 | High-sensitivity temperature sensor |
| CN110392823A (en) * | 2017-02-28 | 2019-10-29 | 赛峰直升机发动机公司 | The temperature measurement carried out especially in turbogenerator by the network of sensitive detection parts |
| CN110392823B (en) * | 2017-02-28 | 2021-12-31 | 赛峰直升机发动机公司 | Temperature measurement, in particular in a turbine engine, by means of a grid structure of probe means |
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Inventor after: Qiao Ming Inventor after: Xue Tengfei Inventor after: Huang Junjun Inventor after: Ma Jinrong Inventor after: Zhang Bo Inventor before: Qiao Ming Inventor before: Xue Tengfei Inventor before: Qi Zhao Inventor before: Wen Shuai Inventor before: Zhang Bo |
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Free format text: CORRECT: INVENTOR; FROM: QIAO MING XUE TENGFEI QI ZHAO WEN SHUAI ZHANG BO TO: QIAO MING XUE TENGFEI HUANG JUNJUN MA JINRONG ZHANG BO |
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Application publication date: 20141008 |
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