CN102891248A - Flexible thermoelectric conversion system and manufacturing method thereof - Google Patents

Flexible thermoelectric conversion system and manufacturing method thereof Download PDF

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Publication number
CN102891248A
CN102891248A CN2012103956183A CN201210395618A CN102891248A CN 102891248 A CN102891248 A CN 102891248A CN 2012103956183 A CN2012103956183 A CN 2012103956183A CN 201210395618 A CN201210395618 A CN 201210395618A CN 102891248 A CN102891248 A CN 102891248A
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flexible
flexible substrate
thermoelectric material
type thermoelectric
conversion system
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CN102891248B (en
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吴庆
曹二林
王润兰
陈岚
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China core Microelectronics Technology Chengdu Co.,Ltd.
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Jiangsu IoT Research and Development Center
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Abstract

The invention relates to a flexible thermoelectric conversion system and a manufacturing method of the flexible thermoelectric conversion system. The flexible thermoelectric conversion system comprises a flexible thermoelectric generator and a flexible conversion circuit. The flexible thermoelectric generator comprises a first flexible substrate and a second flexible substrate. A plurality of alternately distributed N-type thermoelectric material particle bodies and P-type thermoelectric material particle bodies are arranged between the first flexible substrate and the second flexible substrate. After being connected with the P-type thermoelectric material particle bodies in series, the N-type thermoelectric material particle bodies are electrically connected with the P-type thermoelectric material particle bodies through a first conductive connecting layer on the first flexible substrate and a second conductive connecting layer on the second flexible substrate so as to form thermoelectric material bodies between the first flexible substrate and the second flexible substrate. The thermoelectric material bodies are packaged between the first flexible substrate and the second flexible substrate through flexible insulation heat-insulation potting material bodies. The flexible conversion circuit is electrically connected with the thermoelectric material bodies. The flexible thermoelectric conversion system has the advantages of simple and convenient process, low manufacturing cost, high generating efficiency, and safety and reliability, and the application range of thermoelectric generators is expanded.

Description

A kind of flexible thermal power conversion system and manufacture method thereof
Technical field
The present invention relates to a kind of thermoelectric conversion system, especially a kind of flexible thermal power conversion system and manufacture method thereof belong to the thermoelectric technical field of changing.
Background technology
Because the growing microminiaturized trend of portable type electronic product has promoted the research and development of compact power supply.Thermoelectric generator is as a kind of self-centered energy, it can directly be converted to electric energy with heat energy according to the Seebeck effect, can keep actual unlimited useful life under the temperature that is fit to, this makes its new and high technology as a kind of energy field become one of focus of international research.
Thermoelectric generator generally is comprised of three parts: thermal source, heat sink and thermoelectric pile.Thermoelectric pile by the thermoelectricity that thermal power transfer can be become electric energy of a series of series connection to forming (diagram 2).Thermoelectric to being formed by dissimilar N/P type thermoelectric materials, when its two ends, i.e. heat source side and heat sink end, when temperature gradient occurring, its two ends can produce electrical potential difference, as shown shown in 1.
The groundwork principle of thermoelectric device is based on the Seebeck effect.The Seebeck effect is a kind of pyroelectric phenomena that roentgen Seebeck finds.When metallic conductor or semiconductor structure add temperature difference Δ T, can supervene voltage Δ U.And open circuit voltage is proportional to the temperature difference linearly:
α s = ΔU ΔT
Wherein, α sBe called the Seebeck coefficient, also can be described as thermoelectric (al) power.If the Seebeck coefficient of two kinds of constituent materials of thermocouple is respectively α aAnd α b, then the Seebeck Coefficient Definition of thermocouple is:
α ab=α ab
When n connected to thermocouple, total Open Output Voltage can be expressed as Δ U n:
ΔU n=n·(α ab·ΔT)
According to the thermoelectric generator that the Seebeck effect is made, its efficient can be characterized by thermoelectric figure of merit Z:
Z = α s 2 · σ κ
Wherein, σ is conductivity, and κ is thermal conductivity, and quality factor Z represents can be used on heat and the electrical properties of the thermoelectric material in the thermoelectric generator.
The traditional hot electric generator adopts the rectangular-shaped particle of thermoelectric material more, the form of then pressing thermoelectric pile, and the particle that N/P is different is pasted on the ceramic plate, and its particle that adopts can reach 1mm 2* 2mm or less cross section, higher aspect ratio.But its range of application is subject to the restriction of the material behavior such as pottery and supporting booster circuit pcb board, can't be applied to the place that pipeline etc. need to have certain bending.
Summary of the invention
The objective of the invention is to overcome the deficiencies in the prior art, a kind of flexible thermal power conversion system and manufacture method thereof are provided, its technique is simple and convenient, low cost of manufacture, and generating efficiency is high, and is safe and reliable, expanded the scope of application of thermoelectric generator.
According to technical scheme provided by the invention, described flexible thermal power conversion system, the flexible change-over circuit that comprises the flexible thermal electric generator and be used for the electric energy conversion of described flexible thermal electric generator output is exported; Described flexible thermal electric generator comprises the first flexible substrate and is positioned at the second flexible substrate of the first flexible substrate below, some alternatively distributed N-type thermoelectric material granules and P type thermoelectric material granule are set between described the first flexible substrate and the second flexible substrate, described N-type thermoelectric material granule is electrically connected after connecting with P type thermoelectric material granule by the second conduction articulamentum on the conduction articulamentum of first on the first flexible substrate and the second flexible substrate, comprise the thermoelectric material body that some thermoelectricity are right to form between the first flexible substrate and the second flexible substrate, described thermoelectric material body is encapsulated between the first flexible substrate and the second flexible substrate by the adiabatic Embedding Material body of flexible insulation; Described flexible change-over circuit is positioned on the second flexible substrate, and flexible change-over circuit is positioned at the outside of the first flexible substrate, and flexible change-over circuit is electrically connected with the thermoelectric material body.
Described the second flexible substrate is provided with the first connecting electrode and the second connecting electrode that is electrically connected with the thermoelectric material body, and described the first connecting electrode and the second connecting electrode are positioned at the outside of the first flexible substrate and the adiabatic Embedding Material body of flexible insulation; Flexible change-over circuit is electrically connected with the thermoelectric material body by the first connecting electrode and the second connecting electrode.
Described flexible change-over circuit comprises the flexible circuit articulamentum, and described flexible circuit articulamentum and the second conduction articulamentum are same manufacturing layer.
Described the first flexible substrate is provided with the through hole of described the first flexible substrate of some perforations, described through hole be positioned at N-type thermoelectric material granule and/or P type thermoelectric material granule directly over.
Described the second flexible substrate is provided with the through hole of described the second flexible substrate of some perforations, described through hole be positioned at N-type thermoelectric material granule and/or P type thermoelectric material granule under.
Be filled with insulating heat-conductive Embedding Material body in the described through hole.
A kind of manufacture method of flexible thermal power conversion system, the manufacture method of described flexible thermal power conversion system comprises the steps:
A, provide required the first flexible substrate and the second flexible substrate;
B, on the required surface of the first flexible substrate electric conducting material is set, optionally shelters and the described electric conducting material of etching, to obtain the first required conduction articulamentum in the first flexible substrate;
C, on the required surface of the second flexible substrate electric conducting material is set, optionally shelters and the described electric conducting material of etching, to obtain the second required conduction articulamentum and flexible circuit conductive articulamentum in the second flexible substrate;
D, required N-type thermoelectric material granule and both ends corresponding to P type thermoelectric material granule are welded on respectively on the first flexible substrate and the second flexible substrate, described N-type thermoelectric material granule is electrically connected after connecting with P type thermoelectric material granule by the second conduction articulamentum on the conduction articulamentum of first on the first flexible substrate and the second flexible substrate, comprises the thermoelectric material body that some thermoelectricity are right to form between the first flexible substrate and the second flexible substrate;
E, the thermoelectric material body that above-mentioned the first flexible substrate, the second flexible substrate and welding are formed are annealed;
F, the structure after utilizing flexible Embedding Material to above-mentioned annealing are carried out embedding, and the thermoelectric material body is encapsulated between the first flexible substrate and the second flexible substrate by the adiabatic Embedding Material body of flexible insulation;
G, at the required electric elements of above-mentioned flexible circuit conductive articulamentum welding, to form required flexible circuit.
Also comprise step h, in the first flexible substrate and/or the second flexible substrate through hole be set, the through hole on the first flexible substrate be positioned at N-type thermoelectric material granule and/or P type thermoelectric material granule directly over; Through hole on the second flexible substrate be positioned at N-type thermoelectric material granule and/or P type thermoelectric material granule under.
Be filled with insulating heat-conductive Embedding Material body in the described through hole.Among the described step e, annealing temperature is 140 ℃ ~ 160 ℃.
Advantage of the present invention: N-type thermoelectric material granule, P type thermoelectric material granule is encapsulated between the first flexible substrate and the second flexible substrate by the adiabatic Embedding Material body of flexible insulation after forming the thermoelectric material body, simultaneously, in the second flexible substrate flexible change-over circuit is set, obtain flexible change-over circuit and the integrated converting system of flexible thermal electric generator, thereby so that the thermoelectric generator that obtains is by the first flexible substrate, the adiabatic Embedding Material body of the second flexible substrate and flexible insulation can produce certain bending and not damage, increased its range of application, the N-type thermoelectric material, P type thermoelectric material adopts traditional rectangular structure particle, has higher thermoelectrical efficiency, processing step is simple, reduce manufacturing cost, simple and compact for structure, safe and reliable.
Description of drawings
Fig. 1 is the principle schematic of existing thermoelectric generator.
Fig. 2 for form thermoelectric to after connection diagram.
Fig. 3 is the structural representation of the embodiment of the invention 1.
Fig. 4 is the view when the flexible thermal power conversion system is crooked among Fig. 3.
Fig. 5 is the schematic diagram behind formation the first conduction articulamentum on the present invention's the first flexible substrate.
Fig. 6 is the schematic diagram behind formation the second conduction articulamentum on the present invention's the second flexible substrate.
Fig. 7 is the cutaway view that forms the flexible thermal electric generator among Fig. 3.
Fig. 8 is the structural representation of the embodiment of the invention 2.
Fig. 9 is the cutaway view of flexible thermal electric generator among Fig. 8.
Figure 10 is the structural representation of the embodiment of the invention 3.
Figure 11 is the cutaway view of flexible thermal electric generator among Figure 10.
Description of reference numerals: 1-thermoelectricity is right, 10-the first flexible thermal electric generator, 20-the second flexible thermal electric generator, 30-the 3rd flexible thermal electric generator, 100-the first flexible substrate, 101-the second flexible substrate, 102-the first connecting electrode, 103-the second connecting electrode, the adiabatic Embedding Material body of 104-flexible insulation, 105-flexible circuit conductive articulamentum, 201-the first conduction articulamentum, 202-the second conduction articulamentum, 301-N type thermoelectric material granule, 302-P type thermoelectric material granule, 401-through hole and 501-insulating heat-conductive Embedding Material body.
Embodiment
The invention will be further described below in conjunction with concrete drawings and Examples.
Embodiment 1
Such as Fig. 3 and shown in Figure 7: be the structural representation of flexible thermal power conversion system, the flexible thermal power conversion system comprises that the first flexible generating generator 10 reaches the flexible change-over circuit that is used for the electric energy conversion output of the first flexible thermal electric generator 10 outputs in the present embodiment, wherein said the first flexible thermal electric generator 10 comprises the first flexible substrate 100 and is positioned at the second flexible substrate 101 of the first flexible substrate 100 belows, described the first flexible substrate 100 and 101 of the second flexible substrate arrange some alternatively distributed N-type thermoelectric material granules 301 and P type thermoelectric material granule 302, described N-type thermoelectric material granule 301 is electrically connected after connecting with P type thermoelectric material granule 302 by the second conduction articulamentum 202 on the conduction articulamentum 201 of first on the first flexible substrate 100 and the second flexible substrate 101, comprising some thermoelectricity in the first flexible substrate 100 and 101 formation of the second flexible substrate to 1 thermoelectric material body, described thermoelectric material body is encapsulated in 101 of the first flexible substrate 100 and the second flexible substrate by the adiabatic Embedding Material body 104 of flexible insulation.Described flexible change-over circuit is positioned on the second flexible substrate 101, and flexible change-over circuit is positioned at the outside of the first flexible substrate 100, and flexible change-over circuit is electrically connected with the thermoelectric material body.
Particularly, described the second flexible substrate 101 is provided with the first connecting electrode 102 and the second connecting electrode 103 that is electrically connected with the thermoelectric material body, and described the first connecting electrode 102 and the second connecting electrode 103 are positioned at the outside of the first flexible substrate 100 and the adiabatic Embedding Material body 104 of flexible insulation; Flexible change-over circuit is electrically connected with the thermoelectric material body by the first connecting electrode 102 and the second connecting electrode 103.Described flexible change-over circuit comprises flexible circuit articulamentum 105, and described flexible circuit articulamentum 105 and the second conduction articulamentum 202 are same manufacturing layer.
The material of above-mentioned the first flexible substrate 100 and the second flexible substrate 101 comprises PI(Polyimide Film) film.After the thermoelectric material body is encapsulated in 101 of the first flexible substrate 100 and the second flexible substrate by the adiabatic Embedding Material body 104 of flexible insulation, formed the first flexible thermal electric generator has the flexibility of certain angle of bend, can be used in needs in the crooked environment, in the occasions such as exhaust piping, discharge duct, as shown in Figure 4.The adiabatic Embedding Material body 104 of flexible insulation adopts the adiabatic Embedding Material of existing conventional flexible insulation, and personnel are known by the art; Simultaneously, the preparation process of N-type thermoelectric material granule 301 and P type thermoelectric material granule 302 is also known by the art personnel.In the thermoelectric material body that forms, the first conduction articulamentum 201 and the second conduction articulamentum 202 lay respectively at the two ends of N-type thermoelectric material granule 301 and P type thermoelectric material granule 302, and the syndeton on the first conduction articulamentum 201 and the second conduction articulamentum 202 is interspersed.
The flexible thermal electric generator of said structure can by following processing step preparation, comprise particularly
A, provide required the first flexible substrate 100 and the second flexible substrate 101;
As mentioned above, the material selection PI film of the first flexible substrate 100 and the second flexible substrate 101 also can be selected other flexible material;
B, on the first flexible substrate 100 required surfaces electric conducting material is set, optionally shelters and the described electric conducting material of etching, to obtain the first required conduction articulamentum 201 in the first flexible substrate 100;
C, on the second flexible substrate 101 required surfaces electric conducting material is set, optionally shelters and the described electric conducting material of etching, to obtain the second required conduction articulamentum 202 and flexible circuit conductive articulamentum 105 in the second flexible substrate 101;
The material of above-mentioned the first conduction articulamentum 201 and the second conduction articulamentum 202 comprises the metal materials such as copper, aluminium, silver, when forming the second conduction articulamentum 202, the second flexible substrate 101 also formed the first connecting electrode 102 and the second connecting electrode 103, described the first connecting electrode 102 and the second connecting electrode 103 are electrically connected with corresponding the second conduction articulamentum 201, follow-up formation thermoelectric material body outwards can be drawn by the first connecting electrode 102 and the second connecting electrode 103, the voltage that is about to the output of thermoelectric material body is outwards exported.In the embodiment of the invention, the length of the second flexible substrate 101 is greater than the length of the first flexible substrate 100, as shown in Figure 5 and Figure 6.
In order to access integrated flexible thermal power conversion system, in the embodiment of the invention, flexible circuit is also prepared on the second flexible substrate 101, because the length of the second flexible substrate 101 is greater than the length of the first flexible substrate 100, therefore can conveniently the first connecting electrode 102 and the second connecting electrode 103 be prepared on the second flexible substrate 101 with flexible circuit conductive articulamentum 105; Flexible circuit conductive articulamentum 105 and the first connecting electrode 102 and the 103 corresponding electrical connections of the second connecting electrode.By the required electric elements such as required resistance, electric capacity, logical circuit are set at flexible circuit conductive articulamentum 105, just can form required flexible circuit in the second flexible substrate 101; Simultaneously, the flexible circuit of formation can be electrically connected with the first connecting electrode 102 and the second connecting electrode 103.
D, the both ends of required N-type thermoelectric material granule 301 and P type thermoelectric material granule 302 correspondences are welded on respectively on the first flexible substrate 100 and the second flexible substrate 101, described N-type thermoelectric material granule 301 is electrically connected after connecting with P type thermoelectric material granule 302 by the second conduction articulamentum 202 on the conduction articulamentum 201 of first on the first flexible substrate 100 and the second flexible substrate 101, to comprise the thermoelectric material body that some thermoelectricity are right in the first flexible substrate 100 and 101 formation of the second flexible substrate;
E, the thermoelectric material body that above-mentioned the first flexible substrate 100, the second flexible substrate 101 and welding are formed are annealed;
Described annealing temperature is 140 ℃ ~ 160 ℃, and usually, carrying out annealing temperature is 150 ℃.After annealing, the first conduction articulamentum 201 on thermoelectric material body and the first flexible substrate 100 and the second conduction articulamentum 202 on the second flexible substrate 101 closely are connected.
F, the structure after utilizing flexible Embedding Material to above-mentioned annealing are carried out embedding, and the thermoelectric material body is encapsulated in 101 of the first flexible substrate 100 and the second flexible substrate by the adiabatic Embedding Material body 104 of flexible insulation.
After utilizing adiabatic Embedding Material body 104 encapsulation of flexible insulation, so that the Stability Analysis of Structures of thermoelectric material body is on the first flexible substrate 100 and the second flexible substrate 101.
G, at the required electric elements of above-mentioned flexible circuit conductive articulamentum 105 welding, to form required flexible circuit.
After the encapsulation through step f, can form the first required flexible thermal electric generator 10; In order to form required flexible circuit, only corresponding electric elements need to be welded on that corresponding position gets final product on the flexible circuit conductive articulamentum 105.When preparation flexible circuit conductive articulamentum 105, be provided with the placement location figure of corresponding electric appliance element in the second flexible substrate 101; Electric elements can be welded on by the techniques such as soldering of routine on the flexible circuit conductive articulamentum 105, the flexible circuit that obtains and the first flexible thermal electric generator 10 are integrated, can carry out simultaneously the bending of certain angle, expand the scope of application of flexible thermal power conversion system.
Embodiment 2
As shown in Figure 8: be the structural representation of present embodiment flexible thermal power conversion system, Fig. 9 is the structural representation of the second flexible thermal electric generator 20 that the flexible thermal power conversion system comprises in the present embodiment, in the present embodiment, in order to realize the good thermal conductivity with the external world, the first flexible substrate 100 of the second flexible thermal electric generator 20 is provided with the through hole 401 that connects on described the first flexible substrate 100, described through hole 401 be positioned at N-type thermoelectric material granule 301 or P type thermoelectric material granule 302 directly over, simultaneously, through hole 401 also can be positioned at simultaneously N-type thermoelectric material granule 301 and P type thermoelectric material granule 302 directly over.
Further, also can be provided with the through hole 401 that connects the second flexible substrate 101 on described the second flexible substrate 101, through hole 401 be positioned at N-type thermoelectric material granule 301 or P type thermoelectric material granule 302 directly over, simultaneously, through hole 401 also can be positioned at simultaneously N-type thermoelectric material granule 301 and P type thermoelectric material granule 302 directly over.In the present embodiment, all be provided with through hole 401 on the first flexible substrate 100 and the second flexible substrate 101.
In order to obtain the structure of present embodiment, on the preparation technology basis in embodiment 1, also comprise step h, optionally shelter and etching the first flexible substrate 100 and/or the second flexible substrate 101, to form required through hole 401 in the first flexible substrate 100 and/or the second flexible substrate 101, the position of through hole 401 arranges as mentioned above.Remaining processing step and condition are identical with embodiment 1 in the present embodiment, repeat no more herein.
Embodiment 3
As shown in figure 10: be the structural representation of present embodiment flexible thermal power conversion system, Figure 11 is the structural representation of the 3rd flexible thermal electric generator 30 that comprises in the flexible thermal power conversion system in the embodiment of the invention, in the present embodiment, on the first flexible substrate 100 and the second flexible substrate 101, through hole 401 is set simultaneously in the 3rd flexible thermal electric generator 30, the through hole 401 on described the first flexible substrate 100 be positioned at N-type thermoelectric material granule 301 and/or P type thermoelectric material granule 302 directly over; Through hole 401 on the second flexible substrate 101 be positioned at N-type thermoelectric material granule 301 and/or P type thermoelectric material granule 302 under.Then in through hole 401, be filled with flexible insulation heat conduction Embedding Material body 501, both reached good heat conduction purpose by flexible insulation heat conduction Embedding Material body 501, also internal structure has been played protective effect simultaneously.
In order to obtain the structure of present embodiment, on the preparation technology basis of embodiment 2, by the Embedding Material at through hole 401 interior embedding insulating heat-conductives, to form flexible insulation heat conduction Embedding Material body 501.
Such as Fig. 3 ~ shown in Figure 11: during use, use occasion according to the flexible thermal power conversion system, the first flexible substrate 100 and the second flexibility are carried out the bending of required angle from very low 101, in order to flexible thermal power conversion system and syndeton are fitted, improve installation and the accuracy of detection of whole converting system, also need the attended operation by inflexibility circuit part and the first connecting electrode 102 and the second connecting electrode 103 after having avoided existing flexible thermal electric generator to install, easy for installation.During work, the flexible thermal electric generator absorbing heat in the flexible thermal power conversion system also is converted to electric energy, and the electric energy of described conversion is exported after again processing conversion by flexible circuit.
N-type thermoelectric material granule 301 of the present invention, P type thermoelectric material granule 302 forms behind the thermoelectric material bodies by the adiabatic Embedding Material body 104 of flexible insulation and is encapsulated in 101 of the first flexible substrate 100 and the second flexible substrate, simultaneously, in the second flexible substrate 101 flexible change-over circuit is set, obtain flexible change-over circuit and the integrated converting system of flexible thermal electric generator, thereby so that the thermoelectric generator that obtains is by the first flexible substrate 100, the adiabatic Embedding Material body 104 of the second flexible substrate 101 and flexible insulation can produce certain bending and not damage, increased its range of application, the N-type thermoelectric material, P type thermoelectric material adopts traditional rectangular structure particle, has higher thermoelectrical efficiency, processing step is simple, reduce manufacturing cost, simple and compact for structure, safe and reliable.

Claims (10)

1. a flexible thermal power conversion system is characterized in that: the flexible change-over circuit that comprises the flexible thermal electric generator and be used for the electric energy conversion of described flexible thermal electric generator output is exported; Described flexible thermal electric generator comprises the first flexible substrate (100) and is positioned at second flexible substrate (101) of the first flexible substrate (100) below, some alternatively distributed N-type thermoelectric material granules (301) and P type thermoelectric material granule (302) are set between described the first flexible substrate (100) and the second flexible substrate (101), described N-type thermoelectric material granule (301) is electrically connected after connecting with P type thermoelectric material granule (302) by the second conduction articulamentum (202) on the conduction articulamentum (201) of first on the first flexible substrate (100) and the second flexible substrate (101), comprise the thermoelectric material body that some thermoelectricity are right to form between the first flexible substrate (100) and the second flexible substrate (101), described thermoelectric material body is encapsulated between the first flexible substrate (100) and the second flexible substrate (101) by the adiabatic Embedding Material body of flexible insulation (104); Described flexible change-over circuit is positioned on the second flexible substrate (101), and flexible change-over circuit is positioned at the outside of the first flexible substrate (100), and flexible change-over circuit is electrically connected with the thermoelectric material body.
2. flexible thermal power conversion system according to claim 1, it is characterized in that: described the second flexible substrate (101) is provided with the first connecting electrode (102) and the second connecting electrode (103) that is electrically connected with the thermoelectric material body, and described the first connecting electrode (102) and the second connecting electrode (103) are positioned at the outside of the first flexible substrate (100) and the adiabatic Embedding Material body of flexible insulation (104); Flexible change-over circuit is electrically connected with the thermoelectric material body by the first connecting electrode (102) and the second connecting electrode (103).
3. flexible thermal power conversion system according to claim 1, it is characterized in that: described flexible change-over circuit comprises flexible circuit articulamentum (105), described flexible circuit articulamentum (105) and the second conduction articulamentum (202) be same manufacturing layer.
4. flexible thermal power conversion system according to claim 1, it is characterized in that: described the first flexible substrate (100) is provided with the through hole (401) of described the first flexible substrate of some perforations (100), described through hole (401) be positioned at N-type thermoelectric material granule (301) and/or P type thermoelectric material granule (302) directly over.
5. flexible thermal power conversion system according to claim 1, it is characterized in that: described the second flexible substrate (101) is provided with the through hole (401) of described the second flexible substrate of some perforations (101), described through hole (401) be positioned at N-type thermoelectric material granule (301) and/or P type thermoelectric material granule (302) under.
6. it is characterized in that: be filled with insulating heat-conductive Embedding Material body (501) in the described through hole (401) according to claim 4 or 5 described flexible thermal power conversion systems.
7. the manufacture method of a flexible thermal power conversion system is characterized in that, the manufacture method of described flexible thermal power conversion system comprises the steps:
(a), provide required the first flexible substrate (100) and the second flexible substrate (101);
(b), on the required surface of the first flexible substrate (100) electric conducting material is set, optionally shelter and the described electric conducting material of etching, to obtain the first required conduction articulamentum (201) in the first flexible substrate (100);
(c), on the required surface of the second flexible substrate (101) electric conducting material is set, optionally shelter and the described electric conducting material of etching, to obtain the second required conduction articulamentum (202) and flexible circuit conductive articulamentum (105) in the second flexible substrate (101);
(d), required N-type thermoelectric material granule (301) and both ends corresponding to P type thermoelectric material granule (302) are welded on respectively on the first flexible substrate (100) and the second flexible substrate (101), described N-type thermoelectric material granule (301) is electrically connected after connecting with P type thermoelectric material granule (302) by the second conduction articulamentum (202) on the conduction articulamentum (201) of first on the first flexible substrate (100) and the second flexible substrate (101), comprises the thermoelectric material body that some thermoelectricity are right to form between the first flexible substrate (100) and the second flexible substrate (101);
(e), the thermoelectric material body that above-mentioned the first flexible substrate (100), the second flexible substrate (101) and welding is formed is annealed;
(f), the structure after utilizing flexible Embedding Material to above-mentioned annealing carries out embedding, the thermoelectric material body is encapsulated between the first flexible substrate (100) and the second flexible substrate (101) by the adiabatic Embedding Material body of flexible insulation (104);
(g), at the required electric elements of above-mentioned flexible circuit conductive articulamentum (105) welding, to form required flexible circuit.
8. the manufacture method of described flexible thermal power conversion system according to claim 7, it is characterized in that: also comprise step (h), in the first flexible substrate (100) and/or the second flexible substrate (101) through hole (401) be set, the through hole (401) on the first flexible substrate (100) be positioned at N-type thermoelectric material granule (301) and/or P type thermoelectric material granule (302) directly over; Through hole (401) on the second flexible substrate (101) be positioned at N-type thermoelectric material granule (301) and/or P type thermoelectric material granule (302) under.
9. the manufacture method of described flexible thermal power conversion system according to claim 8 is characterized in that: be filled with insulating heat-conductive Embedding Material body (501) in the described through hole (401).
10. the manufacture method of described flexible thermal power conversion system according to claim 7, it is characterized in that: in the described step (e), annealing temperature is 140 ℃ ~ 160 ℃.
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CN105322087A (en) * 2014-07-28 2016-02-10 中国电子科技集团公司第十八研究所 BiTe-based flexible film thermoelectric cell
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CN110249439A (en) * 2017-02-08 2019-09-17 麦格纳座椅公司 Electrothermal module and flexible thermoelectricity circuit unit

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