CN104076610B - Scan-type UV-LED exposure device - Google Patents
Scan-type UV-LED exposure device Download PDFInfo
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- CN104076610B CN104076610B CN201310098074.9A CN201310098074A CN104076610B CN 104076610 B CN104076610 B CN 104076610B CN 201310098074 A CN201310098074 A CN 201310098074A CN 104076610 B CN104076610 B CN 104076610B
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Abstract
A kind of scan-type UV-LED exposure device, comprise exposing unit, UV-LED lighting unit and cycle period shift(ing) ring, that utilization one does the UV-LED exposure light source of loop cycle with fixed rate, do not need when carrying out scan exposure processing procedure to large area target region to stop moving, reach exposure light source to be constantly cycled to repeat and utilize and increase the object of energy ecology, and increase the homogeneity of light emitting diode array light source for radiant illumination with Heterogeneous Permutation, to increase exposition uniformity, and then effectively improve product yield; In addition, the present invention is through the structural design of upper and lower exposure desk and cycle period shift(ing) ring, device volume can be made to reduce, save production space and energy resource consumption and reduce production cost, cycle period shift(ing) ring is utilized to drive light emitting diode array light source, make workpiece make full use of space between upper and lower exposure desk and cycle period shift(ing) ring and the exposure of upper and lower exposure desk can be carried out simultaneously, the energy can be saved and effectively relatively increase and produce speed, to improve prouctiveness.
Description
Technical field
The present invention has about a kind of scan-type UV-LED exposure device, espespecially relate to a kind of LED exposure machine with large area cut zone exposure function, refer in particular to the UV-LED exposure light source doing loop cycle with a fixed rate, do not need when carrying out scan exposure processing procedure to large area target region to stop moving, reach exposure light source to be constantly cycled to repeat and utilize and increase energy ecology, to increase the object of exposition uniformity.
Background technology
The exposure bench of non-UV-LED system was large in the past, and shared production space is also large, causes cost of investment relatively also to increase.And use ultraviolet (UV) to carry out the board exposed at present, its exposure manufacture process is not when doing special improvement, exposure light source adopts cut zone exposure for exposure target area, when light source moves in different cut zone, due to the action of mobile light source → brake → mobile light source must be repeated, therefore easily cause because sweep velocity is irregular, cause UV flashing fixed, and this kind is for the mode of some LED exposure positions, also easily make its radiant illumination produce the problem of exposition uniformity deficiency not, and then reduce product yield; In addition, when known technology carries out exposure manufacture process, its light source needs a direct-open, therefore its UV light source life is short, and before the startup of having no progeny in each time, all need to carry out warm lamp preliminary activities, to such an extent as to light source ON/OFF (ON/OFF) is also wayward.
In view of the problem of the lack of uniformity of the overlapping field of illumination of light source in known technology, therefore, generally cannot meet user and when reality uses, reach increase exposition uniformity and promote needed for energy ecology object.
Summary of the invention
The object of the invention is to, for above-mentioned the deficiencies in the prior art, a kind of scan-type UV-LED exposure device is provided, the UV-LED exposure light source of loop cycle is done with fixed rate, do not need when carrying out scan exposure processing procedure to large area target region to stop moving, reach exposure light source to be constantly cycled to repeat and utilize and increase energy ecology, increase the object of exposition uniformity.Secondary objective of the present invention is, provides one that device volume can be made to reduce, and saves production space and energy resource consumption, reduces production cost and improves the scan-type UV-LED exposure device of prouctiveness.
To achieve these objectives, the technical solution adopted in the present invention is: a kind of scan-type UV-LED exposure device, comprise exposing unit, be characterized in, also comprise UV-LED lighting unit and cycle period shift(ing) ring, wherein, this exposing unit comprises one group of upper exposure desk be spaced and lower exposure desk, corresponding two planes of this upper and lower exposure desk are coated with the substrate of photoresist layer in order to put, this photoresist layer is made up of photochromics and is formed on this substrate, and using two planes of putting this substrate as linear goal exposure area; The light emitting diode array light source that this UV-LED lighting unit is arranged by two-dimensional directional forms, and this light emitting diode array light source is made up of several UV-LED the slim-line lamp bar be arranged in parallel with each other, and those UV-LED the slim-line lamp bars separate to each other mutually, each UV-LED the slim-line lamp bar comprises several line spread in the light emitting diode of the longitudinal region of lamp bar, and the longitudinal direction of each UV-LED the slim-line lamp bar is mutually vertical with the longitudinal axis of the linear goal exposure area of this upper and lower exposure desk; This cycle period shift(ing) ring to be arranged in this exposing unit the middle position at exposure desk and this lower exposure desk interval on this, and its arranged outside lays with interval the light emitting diode array light source that this UV-LED the slim-line lamp bar forms, this cycle period shift(ing) ring in time carrying out exposure manufacture process without the need to stop, and rotate with a fixed rate, the light emitting diode array light source that this UV-LED the slim-line lamp bar outside this cycle period shift(ing) ring forms carries out the exposure of the linear goal exposure area of this upper and lower exposure desk in scan round mode.
Above-mentioned scan-type UV-LED exposure device is in previous embodiment, and described cycle period shift(ing) ring comprises: driving wheel, is arranged at one end of this cycle period shift(ing) ring, to drive the rotation of this cycle period shift(ing) ring; Carrier wheel group, is arranged at the inner side of this cycle period shift(ing) ring, comprises several carrier wheel, to carry the weight of UV-LED the slim-line lamp bar outside this cycle period shift(ing) ring and this cycle period shift(ing) ring, and this cycle period shift(ing) ring smooth rotation auxiliary; Inducer, is arranged at the other end of this cycle period shift(ing) ring this driving wheel relative, with the rotation of this cycle period shift(ing) ring auxiliary; And active heat removal assembly, be arranged at this cycle period shift(ing) ring inner, to carry out active heat removal to this cycle period shift(ing) ring.
Above-mentioned scan-type UV-LED exposure device is in previous embodiment, and this cycle period shift(ing) ring forms bilevel horizontal cyclic cycle moving structure by this driving wheel and this inducer.
Above-mentioned scan-type UV-LED exposure device is in previous embodiment, and those carrier wheels are arranged at the inner side of this cycle period shift(ing) ring at each interval, and and has spacing between this driving wheel and this inducer and separate.
Above-mentioned scan-type UV-LED exposure device is in previous embodiment, and this active heat removal assembly is water cooled heat radiating assembly or ventilation type radiating subassembly.
Above-mentioned scan-type UV-LED exposure device is in a specific embodiment, and this light emitting diode is made up of secondary optics assembly and LED source.
Above-mentioned scan-type UV-LED exposure device is in previous embodiment, and this secondary optics assembly is lens or catoptron.
Above-mentioned scan-type UV-LED exposure device is in a specific embodiment, and this UV-LED the slim-line lamp bar is lens type the slim-line lamp bar or mirror type the slim-line lamp bar.
Above-mentioned scan-type UV-LED exposure device is in a specific embodiment, and be provided with diffuser plate further above this light emitting diode array, this diffuser plate is covered in the top of each light emitting diode.
Above-mentioned scan-type UV-LED exposure device is in previous embodiment, and this diffuser plate is covered in the top of each light emitting diode with whole piece structure.
Above-mentioned scan-type UV-LED exposure device is in previous embodiment, and this diffuser plate is covered in the top of each light emitting diode with a rib-like structure.
Above-mentioned scan-type UV-LED exposure device is in previous embodiment, and this diffuser plate is covered in the top of each light emitting diode with several list structure.
Above-mentioned scan-type UV-LED exposure device is in previous embodiment, and this diffuser plate is the printing opacity of resistance to UV material, and can be quartz or glass.
Above-mentioned scan-type UV-LED exposure device is in a specific embodiment, this cycle period shift(ing) ring is when two-end-point carries out rotating up and being rotated down, and outside it, UV-LED the slim-line lamp bar can control as closed condition further at each light emitting diode at the place of rotating up and the place of being rotated down.
Above-mentioned scan-type UV-LED exposure device is in a specific embodiment, and those UV-LED the slim-line lamp bars arrange with the longitudinal axis direction of this linear goal exposure area parallel.
Above-mentioned scan-type UV-LED exposure device in a specific embodiment, the light emitting diode Heterogeneous Permutation in those UV-LED the slim-line lamp bars in adjacent column.
Accompanying drawing explanation
Fig. 1 is structural representation of the present invention.
Fig. 2 is the schematic top plan view of the UV-LED lighting unit of the present invention one specific embodiment.
Fig. 3 is the schematic top plan view of the UV-LED lighting unit of another specific embodiment of the present invention.
Label declaration
Scan-type UV-LED exposure device 100 exposing unit 10
Upper exposure desk 11 times exposure desks 12
Linear goal exposure area 13UV-LED lighting unit 20
Light emitting diode array light source 21UV-LED the slim-line lamp bar 22
Light emitting diode 23 diffuser plate 24
Secondary optics assembly 231 LED source 232
Cycle period shift(ing) ring 30 driving wheel 31
Carrier wheel group 32 carrier wheel 321
Inducer 33 active heat removal assembly 34
Embodiment
Refer to shown in Fig. 1 to Fig. 3, be respectively structural representation of the present invention, the schematic top plan view of UV-LED lighting unit of the present invention one specific embodiment and the schematic top plan view of the UV-LED lighting unit of another specific embodiment of the present invention.As shown in the figure: the present invention is a kind of scan-type UV-LED exposure device, cording has the LED exposure machine of large area cut zone exposure function, can make the transmitted light that the illumination light of light source irradiation is obtained by light shield, projection illumination is done in the target light exposure region corresponding to workpiece.This scan-type UV-LED exposure device 100 at least comprises exposing unit 10, UV-LED lighting unit 20 and cycle period shift(ing) ring 30 and formed.
Above-mentioned carried exposing unit 10 comprises one group of upper exposure desk be spaced 11 and lower exposure desk 12, its two corresponding planes are coated with the substrate (not shown) of photoresist layer in order to put, this photoresist layer is made up of photochromics and is formed on this substrate, and using two planes of putting this substrate as linear goal exposure area 13.
The light emitting diode array light source 21 that above-mentioned carried UV-LED lighting unit 20 is arranged by two-dimensional directional forms, and this light emitting diode array light source 21 is made up of several UV-LED the slim-line lamp bar 22 be arranged in parallel with each other, and those UV-LED the slim-line lamp bars 22 separate to each other mutually, each UV-LED the slim-line lamp bar 22 comprises several line spread in the light emitting diode 23 of the longitudinal region of lamp bar, and the longitudinal axis of the linear goal exposure area 13 of the longitudinal direction of each UV-LED the slim-line lamp bar 22 and exposure desk on this 11 and this lower exposure desk 12 is mutually vertical.
Above-mentioned carried cycle period shift(ing) ring 30 to be arranged in this exposing unit 10 middle position at exposure desk 11 and this lower exposure desk 12 interval on this, and its arranged outside lays with interval the light emitting diode array light source 21 that this UV-LED the slim-line lamp bar 22 forms.
Above-mentioned UV-LED the slim-line lamp bar 22 arranges with the direction of the longitudinal axis of this linear goal exposure area 13 parallel, and light emitting diode 23 Heterogeneous Permutation in row adjacent in those UV-LED the slim-line lamp bars 22, as shown in Figure 2, the radiation energy of each UV-LED the slim-line lamp bar 22 can effectively be superposed.In Fig. 2, arrow direction is the longitudinal direction of linear goal exposure area 13.
Above-mentioned light emitting diode 23 comprises a secondary optics assembly 231 and a LED source 232 formed, and wherein, when this secondary optics assembly 2131 is lens, this UV-LED the slim-line lamp bar 22 is lens type the slim-line lamp bar, as shown in Figure 2; When this secondary optics assembly 231 is catoptron, this UV-LED the slim-line lamp bar 22 is mirror type the slim-line lamp bar, as shown in Figure 3.
Above-mentioned cycle period shift(ing) ring 30 comprises driving wheel 31, carrier wheel group 32, inducer 33 and active heat removal assembly 34 and formed, and this cycle period shift(ing) ring 30 forms bilevel horizontal cyclic cycle moving structure by this driving wheel 31 and this inducer 33.Wherein, this driving wheel 31 is arranged at one end of this cycle period shift(ing) ring 30, in order to drive the rotation of this cycle period shift(ing) ring 30; This carrier wheel group 32 comprises several carrier wheel 321, those carrier wheels 321 are arranged at the inner side of this cycle period shift(ing) ring 30 at each interval, and and between this driving wheel 31 and this inducer 33, there is a suitable spacing and separate, in order to carry the weight of UV-LED the slim-line lamp bar 22 outside this cycle period shift(ing) ring 30 and this cycle period shift(ing) ring 30, and this cycle period shift(ing) ring 30 smooth rotation auxiliary; This inducer 33 is arranged at the other end of this cycle period shift(ing) ring 30 this driving wheel 31 relative, in order to the rotation of this cycle period shift(ing) ring 30 auxiliary; And this active heat removal assembly 34 to be arranged at this cycle period shift(ing) ring 30 inner, in order to carry out active heat removal to this cycle period shift(ing) ring 30, in wherein, this active heat removal assembly 34 can be water cooled heat radiating assembly or ventilation type radiating subassembly.
Above-mentioned light emitting diode array light source 21 can be provided with diffuser plate 24 further, and this diffuser plate 24 is covered in the top of each light emitting diode 23, and this diffuser plate 24 is made for the printing opacity of resistance to UV material, and can be quartz or glass.Specifically execute in example in one, this diffuser plate 24 is covered in the top of each light emitting diode 23 with whole piece structure, as shown in Figure 1; Specifically execute in example in another, this diffuser plate 24 is covered in the top of each light emitting diode 23 with a rib-like structure; Yu Zaiyi specifically executes in example, and this diffuser plate 24 is covered in the top of each light emitting diode 23 with several list structure.
The above, form brand-new scan-type UV-LED exposure device 100.
When using, this cycle period shift(ing) ring 30 in time carrying out exposure manufacture process without the need to stop, its rotation drives primarily of this driving wheel 31, this inducer 33 of arranging in pairs or groups again is assisted, rotate with a fixed rate, the light emitting diode array light source 21 that outside shift(ing) ring, this UV-LED the slim-line lamp bar 22 forms, carries out the exposure of the linear goal exposure area 13 of exposure desk 11 and this lower exposure desk 12 on this in scan round mode in order to this light emitting diode array light source 21.And, when this cycle period shift(ing) ring 30 carries out rotating up and being rotated down in two-end-point, outside it, UV-LED the slim-line lamp bar can control as closed condition further at each light emitting diode 23 at the place of rotating up and the place of being rotated down, and more can reach the effect of saving energy resource consumption while extending light source life by this further.
By this, scan-type UV-LED exposure device of the present invention, be that utilization one does the UV-LED exposure light source of loop cycle with fixed rate, do not need when carrying out scan exposure processing procedure to large area target region to stop moving, reach exposure light source to be constantly cycled to repeat and utilize and increase the object of energy ecology, and increase light emitting diode array light source for the homogeneity of the radiant illumination of linear goal exposure area with Heterogeneous Permutation, to increase exposition uniformity, and then effectively improve product yield; In addition, the present invention is through the structural design of upper and lower exposure desk and cycle period shift(ing) ring, device volume can be made to reduce, save production space and energy resource consumption and reduce production cost, cycle period shift(ing) ring is utilized to drive light emitting diode array light source, make workpiece make full use of space between upper and lower exposure desk and cycle period shift(ing) ring and the exposure of upper and lower exposure desk can be carried out simultaneously, reaching the consumption of saving the energy and can effectively relatively increase and produce speed, to reach raising prouctiveness.
In sum, a kind of scan-type UV-LED exposure device of the present invention, can effectively improve the various shortcoming existed in prior art, be that utilization one does the UV-LED exposure light source of loop cycle with fixed rate, do not need when carrying out scan exposure processing procedure to large area target region to stop moving, reach exposure light source to be constantly cycled to repeat and utilize and increase the object of energy ecology, exposition uniformity can be increased, and can reduction means volume, save production space and energy resource consumption, reduce production cost and improve prouctiveness, and then can produce more progressive, more practical, more meeting user institute must, indeed meet the important document of application for a patent for invention, patented claim is proposed in accordance with the law.
Only as described above, be only preferred embodiment of the present invention, when not limiting scope of the invention process with this; Therefore all simple equivalences done according to the present patent application the scope of the claims and description of the invention content change and modify, and all should still remain within the scope of the patent.
Claims (16)
1. a scan-type UV-LED exposure device, comprises exposing unit, it is characterized in that, also comprises UV-LED lighting unit and cycle period shift(ing) ring, wherein,
This exposing unit comprises one group of upper exposure desk be spaced and lower exposure desk, corresponding two planes of this upper and lower exposure desk are coated with the substrate of photoresist layer in order to put, this photoresist layer is made up of photochromics and is formed on this substrate, and using two planes of putting this substrate as linear goal exposure area;
The light emitting diode array light source that this UV-LED lighting unit is arranged by two-dimensional directional forms, and this light emitting diode array light source is made up of several UV-LED the slim-line lamp bar be arranged in parallel with each other, and those UV-LED the slim-line lamp bars separate to each other mutually, each UV-LED the slim-line lamp bar comprises several line spread in the light emitting diode of the longitudinal region of lamp bar, and the longitudinal direction of each UV-LED the slim-line lamp bar is mutually vertical with the longitudinal axis of the linear goal exposure area of this upper and lower exposure desk;
This cycle period shift(ing) ring to be arranged in this exposing unit the middle position at exposure desk and this lower exposure desk interval on this, and its arranged outside lays with interval the light emitting diode array light source that this UV-LED the slim-line lamp bar forms, this cycle period shift(ing) ring in time carrying out exposure manufacture process without the need to stop, and rotate with a fixed rate, the light emitting diode array light source that this UV-LED the slim-line lamp bar outside this cycle period shift(ing) ring forms carries out the exposure of the linear goal exposure area of this upper and lower exposure desk in scan round mode.
2. scan-type UV-LED exposure device as claimed in claim 1, it is characterized in that, described cycle period shift(ing) ring comprises:
Driving wheel, is arranged at one end of this cycle period shift(ing) ring, to drive the rotation of this cycle period shift(ing) ring;
Carrier wheel group, is arranged at the inner side of this cycle period shift(ing) ring, comprises several carrier wheel, to carry the weight of UV-LED the slim-line lamp bar outside this cycle period shift(ing) ring and this cycle period shift(ing) ring, and this cycle period shift(ing) ring smooth rotation auxiliary;
Inducer, is arranged at the other end of this cycle period shift(ing) ring this driving wheel relative, with the rotation of this cycle period shift(ing) ring auxiliary; And
Active heat removal assembly, is arranged at this cycle period shift(ing) ring inner, to carry out active heat removal to this cycle period shift(ing) ring.
3. scan-type UV-LED exposure device as claimed in claim 2, it is characterized in that, described cycle period shift(ing) ring forms bilevel horizontal cyclic cycle moving structure by this driving wheel and this inducer.
4. scan-type UV-LED exposure device as claimed in claim 2, it is characterized in that, described carrier wheel is arranged at the inner side of this cycle period shift(ing) ring at each interval, and and has spacing between this driving wheel and this inducer and separate.
5. scan-type UV-LED exposure device as claimed in claim 2, it is characterized in that, described active heat removal assembly is water cooled heat radiating assembly or ventilation type radiating subassembly.
6. scan-type UV-LED exposure device as claimed in claim 1, it is characterized in that, described light emitting diode is made up of secondary optics assembly and LED source.
7. scan-type UV-LED exposure device as claimed in claim 6, it is characterized in that, described secondary optics assembly is lens or catoptron.
8. scan-type UV-LED exposure device as claimed in claim 1, it is characterized in that, described UV-LED the slim-line lamp bar is lens type the slim-line lamp bar or mirror type the slim-line lamp bar.
9. scan-type UV-LED exposure device as claimed in claim 1, it is characterized in that, be provided with diffuser plate further above described light emitting diode array light source, this diffuser plate is covered in the top of each light emitting diode.
10. scan-type UV-LED exposure device as claimed in claim 9, it is characterized in that, described diffuser plate is covered in the top of each light emitting diode with whole piece structure.
11. scan-type UV-LED exposure devices as claimed in claim 9, it is characterized in that, described diffuser plate is covered in the top of each light emitting diode with a rib-like structure.
12. scan-type UV-LED exposure devices as claimed in claim 9, it is characterized in that, described diffuser plate is covered in the top of each light emitting diode with several list structure.
13. scan-type UV-LED exposure devices as claimed in claim 9, it is characterized in that, described diffuser plate is made up of the printing opacity of resistance to UV material, and is quartz or glass.
14. scan-type UV-LED exposure devices as claimed in claim 1, it is characterized in that, described cycle period shift(ing) ring is when two-end-point carries out rotating up and being rotated down, and outside it, UV-LED the slim-line lamp bar controls as closed condition further at each light emitting diode at the place of rotating up and the place of being rotated down.
15. scan-type UV-LED exposure devices as claimed in claim 1, is characterized in that, described UV-LED the slim-line lamp bar arranges with the longitudinal axis direction of this linear goal exposure area parallel.
16. scan-type UV-LED exposure devices as claimed in claim 1, is characterized in that, the light emitting diode Heterogeneous Permutation in described UV-LED the slim-line lamp bar in adjacent column.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201310098074.9A CN104076610B (en) | 2013-03-26 | 2013-03-26 | Scan-type UV-LED exposure device |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201310098074.9A CN104076610B (en) | 2013-03-26 | 2013-03-26 | Scan-type UV-LED exposure device |
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| CN104076610A CN104076610A (en) | 2014-10-01 |
| CN104076610B true CN104076610B (en) | 2016-01-20 |
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| CN201310098074.9A Expired - Fee Related CN104076610B (en) | 2013-03-26 | 2013-03-26 | Scan-type UV-LED exposure device |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN110794654A (en) * | 2019-11-19 | 2020-02-14 | 江苏上达电子有限公司 | Novel exposure machine structure exposure method capable of producing super-long products |
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|---|---|---|---|---|
| CN1847985A (en) * | 2005-04-15 | 2006-10-18 | 陈花明 | Printed circuit board exposure machine |
| TW200928597A (en) * | 2007-12-31 | 2009-07-01 | Hon Hai Prec Ind Co Ltd | Exposure apparatus |
| CN201497853U (en) * | 2009-08-19 | 2010-06-02 | 韩宝森 | Pcb exposure machine |
| CN101937910A (en) * | 2009-06-30 | 2011-01-05 | 株式会社日立高新技术 | LED light source, its manufacturing method, and LED-based photolithography apparatus and method |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2009248433A (en) * | 2008-04-04 | 2009-10-29 | Seiko Epson Corp | Ultraviolet irradiation device and ink ejection device |
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- 2013-03-26 CN CN201310098074.9A patent/CN104076610B/en not_active Expired - Fee Related
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1847985A (en) * | 2005-04-15 | 2006-10-18 | 陈花明 | Printed circuit board exposure machine |
| TW200928597A (en) * | 2007-12-31 | 2009-07-01 | Hon Hai Prec Ind Co Ltd | Exposure apparatus |
| CN101937910A (en) * | 2009-06-30 | 2011-01-05 | 株式会社日立高新技术 | LED light source, its manufacturing method, and LED-based photolithography apparatus and method |
| CN201497853U (en) * | 2009-08-19 | 2010-06-02 | 韩宝森 | Pcb exposure machine |
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