CN104073763A - Electrical heated tube vapor deposition device - Google Patents
Electrical heated tube vapor deposition device Download PDFInfo
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- CN104073763A CN104073763A CN201410256225.3A CN201410256225A CN104073763A CN 104073763 A CN104073763 A CN 104073763A CN 201410256225 A CN201410256225 A CN 201410256225A CN 104073763 A CN104073763 A CN 104073763A
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- high temperature
- spray gun
- pressure spray
- temperature furnaces
- heating apparatus
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Abstract
The invention discloses an electrical heated tube vapor deposition device which comprises a high temperature furnace, wherein a rotary mechanism is arranged at the front side of the high temperature furnace; the rotary mechanism comprises a rotating cylinder, a rotating shaft connected with the rotating cylinder and a motor connected with the rotating shaft; a through hole is formed in the front side surface of the high temperature furnace; the rotating cylinder penetrates through the through hole and stretches into a heating chamber of the high temperature furnace; the rotating cylinder comprises a cylinder body and a plurality of fixing rods arranged at the end surface of the cylinder body; quartz glass tubes are arranged on the fixing rods in a penetration manner; a crankshaft sliding block mechanism is arranged on the left side of the high temperature furnace; the crankshaft sliding block mechanism is connected with a high-pressure spray gun; a liquid inlet of the high-pressure spray gun is connected with a liquid storage bottle through a hose; a gas inlet in the high-pressure spray gun is connected with a high-pressure air pump through another hose; a notch is formed in the left side surface of the high temperature furnace; a spraying nozzle of the high-pressure spray gun stretches into the heating chamber of the high temperature furnace through the notch; and the crankshaft sliding block mechanism drives the high-pressure spray gun so that the spraying nozzle makes straight straight reciprocating motion inside the notch. The device is high in production efficiency and is beneficial to health of operators.
Description
Technical field
The present invention relates to a kind of electrothermal tube vapor phase growing apparatus.
Technical background
Electric radiant Heating Film solution air pressure adds and is pressed into mixing fog gas and adopts gas phase deposition technology to spray to the quartz glass tube in High Temperature Furnaces Heating Apparatus, makes the attached mixing fog of the even cigarette of quartz glass tube form electric heating membrane pipe.
Existing electrothermal tube vapor deposition apparatus adopts manual operation mostly, and production efficiency is low, and cost of labor is higher, and the gas of vaporization at high temperature is unfavorable for workman's health.
Summary of the invention
Technical problem to be solved by this invention is just to provide a kind of electrothermal tube vapor phase growing apparatus, automatically completes the Electric radiant Heating Film solution vapour deposition of silica glass tube-surface, and production efficiency is high, and cost is low, is conducive to workman's health.
For solving the problems of the technologies described above, the present invention adopts following technical scheme:
Electrothermal tube vapor phase growing apparatus, comprise High Temperature Furnaces Heating Apparatus, the front side of described High Temperature Furnaces Heating Apparatus is provided with traversing mechanism, described traversing mechanism comprises rotating cylinder, connect the rotating shaft of rotating cylinder and the motor of connection rotating shaft, the leading flank of described High Temperature Furnaces Heating Apparatus is provided with through hole, described rotating cylinder stretches in High Temperature Furnaces Heating Apparatus heating chamber through through hole, described rotating cylinder comprises cylindrical shell and is arranged at some fixed links of body end surface, on described fixed link, wear quartz glass tube, described High Temperature Furnaces Heating Apparatus left side is provided with slider-crank mechanism, described slider-crank mechanism connects high-pressure spray gun, fluid inlet on described high-pressure spray gun is by hose connection liquid storage bottle, inlet mouth on described high-pressure spray gun is by hose connection high-pressure pump, the left surface of described High Temperature Furnaces Heating Apparatus is provided with breach, the fog nozzle of described high-pressure spray gun stretches in High Temperature Furnaces Heating Apparatus heating chamber through breach and slider-crank mechanism drives high-pressure spray gun to make fog nozzle in breach, do straight reciprocating motion.
Preferably, described motor is fixed on pole upper end, and described pole lower end is slidably connected on slide rail.
Preferably, described fixed link is circumferentially distributed in the end face of cylindrical shell and the head end of fixed link is provided with heat resistant rubber cap.
Preferably, described slider-crank mechanism comprises slide block, and described slide block is provided with two flexure strips, and described high-pressure spray gun base embeds in the gap between two flexure strips.
Preferably, described High Temperature Furnaces Heating Apparatus upper end is provided with the escape pipe that connects High Temperature Furnaces Heating Apparatus heating chamber, and the coupling end of described escape pipe and High Temperature Furnaces Heating Apparatus is provided with centrifugal blower.
Preferably, the flexible pipe between described high-pressure spray gun and high-pressure pump is provided with weather gage.
The present invention adopts technique scheme, Electric radiant Heating Film solution in liquid storage bottle enters high pressure gas that high-pressure spray gun fluid inlet inputs by high-pressure pump and adds and be pressed into mixed gas, high-pressure spray gun is driven and is made fog nozzle in breach, do straight reciprocating motion by slider-crank mechanism, thereby the atomization Electric radiant Heating Film solution of fog nozzle ejection is sprayed in High Temperature Furnaces Heating Apparatus heating chamber uniformly, quartz glass tube is fixed on fixed link and rotates by traversing mechanism, thereby make the atomization Electric radiant Heating Film solution in High Temperature Furnaces Heating Apparatus be attached to uniformly silica glass tube-surface formation electric heating membrane pipe through high temperature vapour deposition.The present invention has replaced manual operation and has gripped high-pressure spray gun and rotate rotation quartz glass tube, has higher production efficiency, lower cost, and can avoid workman because pressing close to High Temperature Furnaces Heating Apparatus work, to suck the danger of poisonous volatilization gas.
Accompanying drawing explanation
Below in conjunction with the drawings and specific embodiments, the present invention is described further:
Fig. 1 is structural representation of the present invention;
Fig. 2 is the left view of Fig. 1;
Fig. 3 is the structural representation of rotating cylinder in the present invention;
Fig. 4 is the structural representation of slide block in the present invention.
Embodiment
Below in conjunction with accompanying drawing, the specific embodiment of the present invention is elaborated.
As depicted in figs. 1 and 2, the present invention includes High Temperature Furnaces Heating Apparatus 1, the front side of described High Temperature Furnaces Heating Apparatus is provided with traversing mechanism 2, described traversing mechanism comprises rotating cylinder 201, connect the rotating shaft 202 of rotating cylinder and the motor 203 of connection rotating shaft, the leading flank of described High Temperature Furnaces Heating Apparatus is provided with through hole 101, described rotating cylinder stretches in High Temperature Furnaces Heating Apparatus heating chamber through through hole, described rotating cylinder comprises cylindrical shell 201a and is arranged at some fixed link 201b of body end surface, on described fixed link, wear quartz glass tube, described High Temperature Furnaces Heating Apparatus left side is provided with slider-crank mechanism 3, described slider-crank mechanism connects high-pressure spray gun 4, fluid inlet on described high-pressure spray gun is by hose connection liquid storage bottle 5, inlet mouth on described high-pressure spray gun is by hose connection high-pressure pump 6, the left surface of described High Temperature Furnaces Heating Apparatus is provided with breach 102, the fog nozzle of described high-pressure spray gun stretches in High Temperature Furnaces Heating Apparatus heating chamber through breach and slider-crank mechanism drives high-pressure spray gun to make fog nozzle in breach, do straight reciprocating motion.
Described motor 203 is fixed on pole 204 upper ends, and described pole lower end is slidably connected on slide rail 205.By being slidably connected of pole 204 and slide rail 205, carry out charging and the discharging of quartz glass tube, easy to operate.
Described High Temperature Furnaces Heating Apparatus 1 upper end is provided with the escape pipe 104 that connects High Temperature Furnaces Heating Apparatus heating chamber, and the coupling end of described escape pipe and High Temperature Furnaces Heating Apparatus is provided with centrifugal blower 104a.Described centrifugal blower 104a detaches the obnoxious flavour in High Temperature Furnaces Heating Apparatus heating chamber and is disposed to gas processing pond by escape pipe 104 and carries out purifying treatment.Described High Temperature Furnaces Heating Apparatus 1 bottom is provided with 103 pairs of heating chambers of some heating members and heats.
Flexible pipe between described high-pressure spray gun 4 and high-pressure pump 6 is provided with weather gage 601, is convenient to observe and debugging air pressure size.
As shown in Figure 3, described fixed link 201b is circumferentially distributed in the end face of cylindrical shell 201a and the head end of fixed link is provided with heat resistant rubber cap, prevents that quartz glass tube from skidding off from fixed link.
As shown in Figure 4, described slider-crank mechanism 3 comprises slide block 301, and described slide block is provided with two flexure strip 301a, and described high-pressure spray gun 4 bases embed in the gap between two flexure strips.
Electrothermal tube CVD (Chemical Vapor Deposition) method of the present invention is:
First, the temperature of the heating chamber of High Temperature Furnaces Heating Apparatus 1 is heated to 700 ℃～900 ℃, quartz glass tube is socketed on respectively to fixed link 201b upper, and prevent that at fixed link head end socket heat resistant rubber cap quartz glass tube from skidding off from fixed link;
Secondly, pushing motor 203 pushes rotating cylinder 201 in the heating chamber of High Temperature Furnaces Heating Apparatus 1, and starter motor makes the quartz glass tube tin axle center rotation that rotates, and opens afterwards switch and high-pressure pump 6 switches of high-pressure spray gun 4, then start the electric motor of controlling slider-crank mechanism 3, be 15min heat-up time;
Finally, after having heated, close successively electric motor and the motor 203 of high-pressure spray gun switch, control slider-crank mechanism, pull motor that rotating cylinder is drawn in to High Temperature Furnaces Heating Apparatus, take off quartz glass tube and be transferred to cooling station.
Just preferred embodiment of the present invention is described above, but can not be interpreted as it is limitations on claims.The present invention is not only confined to above embodiment, and its concrete structure allows to change, and those skilled in the art can make according to the present invention various changes and distortion, only otherwise depart from spirit of the present invention, all belongs to the defined scope of claims of the present invention.
Claims (6)
1. electrothermal tube vapor phase growing apparatus, comprise High Temperature Furnaces Heating Apparatus (1), it is characterized in that: the front side of described High Temperature Furnaces Heating Apparatus is provided with traversing mechanism (2), described traversing mechanism comprises rotating cylinder (201), connect the rotating shaft (202) of rotating cylinder and the motor (203) of connection rotating shaft, the leading flank of described High Temperature Furnaces Heating Apparatus is provided with through hole (101), described rotating cylinder stretches in High Temperature Furnaces Heating Apparatus heating chamber through through hole, described rotating cylinder comprises cylindrical shell (201a) and is arranged at the some fixed links (201b) of body end surface, on described fixed link, wear quartz glass tube, described High Temperature Furnaces Heating Apparatus left side is provided with slider-crank mechanism (3), described slider-crank mechanism connects high-pressure spray gun (4), fluid inlet on described high-pressure spray gun is by hose connection liquid storage bottle (5), inlet mouth on described high-pressure spray gun is by hose connection high-pressure pump (6), the left surface of described High Temperature Furnaces Heating Apparatus is provided with breach (102), the fog nozzle of described high-pressure spray gun stretches in High Temperature Furnaces Heating Apparatus heating chamber through breach and slider-crank mechanism drives high-pressure spray gun to make fog nozzle in breach, do straight reciprocating motion.
2. electrothermal tube vapor phase growing apparatus according to claim 1, is characterized in that: described motor (203) is fixed on pole (204) upper end, and described pole lower end is slidably connected on slide rail (205).
3. electrothermal tube vapor phase growing apparatus according to claim 2, is characterized in that: described fixed link (201b) is circumferentially distributed in the end face of cylindrical shell (201a) and the head end of fixed link is provided with heat resistant rubber cap.
4. electrothermal tube vapor phase growing apparatus according to claim 3, it is characterized in that: described slider-crank mechanism (3) comprises slide block (301), described slide block is provided with two flexure strips (301a), and described high-pressure spray gun (4) base embeds in the gap between two flexure strips.
5. electrothermal tube vapor phase growing apparatus according to claim 1, it is characterized in that: described High Temperature Furnaces Heating Apparatus (1) upper end is provided with the escape pipe (104) that connects High Temperature Furnaces Heating Apparatus heating chamber, and the coupling end of described escape pipe and High Temperature Furnaces Heating Apparatus is provided with centrifugal blower (104a).
6. electrothermal tube vapor phase growing apparatus according to claim 1, is characterized in that: the flexible pipe between described high-pressure spray gun (4) and high-pressure pump (6) is provided with weather gage (601).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410256225.3A CN104073763A (en) | 2014-06-10 | 2014-06-10 | Electrical heated tube vapor deposition device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410256225.3A CN104073763A (en) | 2014-06-10 | 2014-06-10 | Electrical heated tube vapor deposition device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN104073763A true CN104073763A (en) | 2014-10-01 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201410256225.3A Pending CN104073763A (en) | 2014-06-10 | 2014-06-10 | Electrical heated tube vapor deposition device |
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| CN (1) | CN104073763A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104549844A (en) * | 2015-01-10 | 2015-04-29 | 长兴宏能电热膜元件厂 | Electric heat pipe spraying device |
| CN104549824A (en) * | 2015-01-10 | 2015-04-29 | 长兴宏能电热膜元件厂 | Device for coating electric heating tube with electro-thermal film |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN200943099Y (en) * | 2006-08-22 | 2007-09-05 | 刘占友 | Electric heating film coater |
| CN203002547U (en) * | 2012-12-05 | 2013-06-19 | 中山市君禾机电设备有限公司 | Swinger with extension spring type pulley structure |
| CN203866380U (en) * | 2014-06-10 | 2014-10-08 | 长兴宏能电热膜元件厂 | Electric heating tube vapor deposition device |
-
2014
- 2014-06-10 CN CN201410256225.3A patent/CN104073763A/en active Pending
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN200943099Y (en) * | 2006-08-22 | 2007-09-05 | 刘占友 | Electric heating film coater |
| CN203002547U (en) * | 2012-12-05 | 2013-06-19 | 中山市君禾机电设备有限公司 | Swinger with extension spring type pulley structure |
| CN203866380U (en) * | 2014-06-10 | 2014-10-08 | 长兴宏能电热膜元件厂 | Electric heating tube vapor deposition device |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104549844A (en) * | 2015-01-10 | 2015-04-29 | 长兴宏能电热膜元件厂 | Electric heat pipe spraying device |
| CN104549824A (en) * | 2015-01-10 | 2015-04-29 | 长兴宏能电热膜元件厂 | Device for coating electric heating tube with electro-thermal film |
| CN104549824B (en) * | 2015-01-10 | 2017-02-01 | 长兴宏能电热膜元件厂 | Device for coating electric heating tube with electro-thermal film |
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Application publication date: 20141001 |