CN104070801B - Fluid jetting head and liquid injection apparatus - Google Patents
Fluid jetting head and liquid injection apparatus Download PDFInfo
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- CN104070801B CN104070801B CN201410099927.5A CN201410099927A CN104070801B CN 104070801 B CN104070801 B CN 104070801B CN 201410099927 A CN201410099927 A CN 201410099927A CN 104070801 B CN104070801 B CN 104070801B
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- Prior art keywords
- generating chamber
- pressure generating
- piezoelectric element
- fluid jetting
- jetting head
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Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/14—Structure thereof only for on-demand ink jet heads
- B41J2/14201—Structure of print heads with piezoelectric elements
- B41J2/14233—Structure of print heads with piezoelectric elements of film type, deformed by bending and disposed on a diaphragm
Abstract
The present invention provides the fluid jetting head improving running efficiency further.This fluid jetting head is the ink jet recording head (10) possessing multiple pressure generating chamber (21) being filled with ink and the piezoelectric element (40) that makes ink droplet discharge by giving pressure to ink in this pressure generating chamber (21) via the nozzle opening (34) being arranged in correspondence with each pressure generating chamber (21), pressure generating chamber (21) is following shape: with compared with at least some of lead direction side drawn outside pressure generating chamber (21) of piezoelectric element (40), piezoelectric element (40) easily deforms in its opposition side.
Description
Technical field
The present invention relates to the fluid jetting head from nozzle opening injection liquid and liquid injection apparatus, especially
Its ink jet recording head and inkjet recording device of relating to discharge ink as liquid.
Background technology
As an example that is the ink jet recording head of fluid jetting head, such as have possesses: activate
Device unit, it is provided with piezoelectric element and pressure generating chamber；And channel unit, its have be provided with
Pressure generating chamber connects and discharge the nozzle plate of the nozzle opening of ink and being provided with to be become pressure and produces
The manifold of the manifold of the ink chamber shared of raw room forms substrate.
The shape of the pressure generating chamber in this ink jet recording head is usually formed as rectangle, but also carries
Go out the ink jet recording head having the pressure generating chamber with following shape, i.e. play high driving efficiency
Reduce electrode pad portion while this advantage to realize the constraint of drive division deflection deformation driving
The shape (with reference to patent document 1) of the raising of efficiency is i.e. circular；In order to reduce the crosstalk of structure,
The shape as the shape (with reference to patent document 2) corresponding with the absolute electrode of almost parallel quadrangle
Become parallelogram shape.Additionally, the shape of pressure generating chamber described herein refers to, thrown
The shape of shadow pressure generating chamber in the plane parallel with the nozzle plate being formed with nozzle opening (with
Under, the most identical).
Patent document 1: Japanese Unexamined Patent Publication 2002-248765 publication
Patent document 2: Japanese Unexamined Patent Publication 2007-237746 publication
But, if improving the displacement efficiency of piezoelectric element, then the fault caused because of electrode pad is produced
Raw possibility raises.
Additionally, this problem is not only present in ink jet recording head, it is present in injection ink removing too
The fluid jetting head of the liquid beyond water.
Summary of the invention
The present invention is in view of the foregoing, it is provided that improve fluid jetting head and the liquid of running efficiency further
Body injection apparatus.
The mode of the present invention solving above-mentioned problem is fluid jetting head, it is characterised in that possess:
Multiple pressure generating chamber being filled with liquid；And piezoelectric element, by right in this pressure generating chamber
Aforesaid liquid gives pressure and makes drop open via the nozzle being arranged in correspondence with each pressure generating chamber
Mouthful discharging, above-mentioned pressure generating chamber is following shape: at least some of with by above-mentioned piezoelectric element
The lead direction side drawn outside above-mentioned pressure generating chamber is compared, and above-mentioned piezoelectric element is easily at it
Opposition side deforms.
According to the manner, with piezoelectricity unit compared with the lead direction side drawn outside pressure generating chamber
The mode that part easily deforms in its opposition side forms the shape of pressure generating chamber, therefore, it is possible to make piezoelectricity
Element displacement well such that it is able to increase i.e. corresponding with nozzle opening region, above-mentioned opposition side
Displacement efficiency.Meanwhile, it is capable to be effectively prevented being increased dramatically of outlet side displacement.As a result of which it is,
Can not only relax stress concentrate, additionally it is possible to realize simultaneously piezoelectric element displacement efficiency raising and
Long lifetime.In addition it is possible to be effectively prevented crosstalk.
, being preferably, above-mentioned pressure generating chamber is following shape: away from by above-mentioned piezoelectric element herein
Regulation is left in the end of at least some of lead direction side drawn outside above-mentioned pressure generating chamber
Pressure generating chamber at the inner side of distance and orthogonal with above-mentioned lead direction direction, above-mentioned
Width, leave than the end away from the side contrary with the above-mentioned lead direction of above-mentioned pressure generating chamber
On at the inner side of above-mentioned predetermined distance and above-mentioned orthogonal direction, above-mentioned pressure generating chamber
Narrow width.
Now, owing to making the narrowed width of the end of lead direction side, it is possible to be reliably prevented
Being increased dramatically of outlet side displacement.Concentrate as a result of which it is, stress can be relaxed.
It addition, above-mentioned piezoelectric element can be configured to have the shared electricity that multiple piezoelectric element is shared
Pole, piezoelectric body layer and the absolute electrode arranged for each piezoelectric element, above-mentioned lead direction is
The direction that above-mentioned absolute electrode is drawn outside above-mentioned pressure generating chamber.Further, the most above-mentioned
Absolute electrode is formed as the shape corresponding with the shape of each pressure generating chamber.Now, it is possible to high efficiency
Make the displacement of piezoelectric element act on the liquid in pressure generating chamber.It addition, above-mentioned absolute electrode
Rectangle can also be formed as.
Above-mentioned pressure generating chamber can being formed as in the direction orthogonal with above-mentioned lead direction that is
Above-mentioned pressure generating chamber be set up in parallel on direction corresponding to adjacent above-mentioned pressure generating chamber upper
Stating the position of nozzle opening, the interconnected mode staggered in above-mentioned lead direction is constituted.This
Time, owing to nozzle opening is interconnected, it is possible to easily realize the densification of nozzle opening.
Further, above-mentioned pressure generating chamber can also arrange and be: adjoin above-mentioned being set up in parallel on direction
Pressure generating chamber in one, produce at other the pressure adjoined each other with this pressure generating chamber
Between room, make above-mentioned lead direction be formed at and draw with described adjacent the above-mentioned of other pressure generating chamber
The side that outgoing direction is contrary.It also is able to the interval between the pressure generating chamber making to adjoin in this case
Narrow and realize densification.
It addition, the present invention can also make pressure generating chamber be rectangle, and only will include via connection
The upper electrode film that distribution and electrode pad form as one is in the shape as above institute of interior piezoelectric element
Be formed as each shape with stating.That is, other the mode of the present invention is fluid jetting head, and its feature exists
In, possess: multiple pressure generating chamber being filled with liquid；And piezoelectric element, by this pressure
Give pressure to aforesaid liquid in generating chamber and make drop set accordingly via with each pressure generating chamber
The nozzle opening put is discharged, and above-mentioned upper electrode film is following shape: at least some of upwards with by it
The lead direction side drawn outside stating pressure generating chamber is compared, and above-mentioned piezoelectric element is easily contrary at it
Side deforms.
According to the manner, for raising and the mitigation of stress concentration of displacement efficiency, it is also possible to obtain
The effect that the situation of the shape shown in aforesaid way is identical must be formed as with making pressure generating chamber.
, being preferably, above-mentioned upper electrode film is, produces to above-mentioned pressure at least partially away from by it herein
The end of the lead direction side drawn outside raw room is left at the inner side of predetermined distance and with above-mentioned
On the direction that lead direction is orthogonal, the width of above-mentioned upper electrode film, than away from above-mentioned lead direction
The end of contrary side is left at the inner side of above-mentioned predetermined distance and above-mentioned orthogonal direction
, the shape of the narrow width of above-mentioned upper electrode film.It addition, there is multiple pressure with above-mentioned piezoelectric element
Common electrode that electric device is shared, piezoelectric body layer and the independence arranged for each piezoelectric element
Electrode, above-mentioned lead direction is the direction drawn outside pressure generating chamber by above-mentioned absolute electrode
Situation that mode is constituted, to be formed as at the direction orthogonal with above-mentioned lead direction that is above-mentioned pressure
The adjacent said nozzle corresponding to above-mentioned pressure generating chamber that is set up in parallel on direction of generating chamber is opened
Mouthful the interconnected mode that staggers in above-mentioned lead direction of position situation about constituting and with
Above-mentioned pressure generating chamber is arranged and is, be set up in parallel on direction in adjacent pressure generating chamber above-mentioned
One between other pressure generating chamber that this pressure generating chamber adjoins each other, make above-mentioned extraction side
To being formed at the side contrary with the above-mentioned lead direction of above-mentioned other adjacent pressure generating chamber
The situation etc. that mode is constituted also is able at random carry out.
The liquid injection apparatus of other modes of the present invention is characterised by, possesses liquid as above
Body shower nozzle.
According to the manner, it is possible to realize improve the liquid injection apparatus of liquid spray characteristic.
Accompanying drawing explanation
Fig. 1 is the sectional view of the record head of embodiments of the present invention.
Fig. 2 is the main portions top view of the record head of embodiments of the present invention.
Fig. 3 is the main portions top view for illustrating the shape of pressure generating chamber.
Fig. 4 is the main portions top view for illustrating the shape of pressure generating chamber.
Fig. 5 is the main portions top view for illustrating the shape of pressure generating chamber.
Fig. 6 is the main portions top view for illustrating the shape of pressure generating chamber.
Fig. 7 is the sectional view of the record head of other embodiments of the present invention.
Fig. 8 is main for illustrate the shape of the pressure generating chamber of the situation shown in Fig. 7
Position top view.
Fig. 9 is the skeleton diagram of the inkjet recording device of an embodiment of the invention.
Detailed description of the invention
Hereinafter, with reference to the accompanying drawings embodiments of the present invention are described in detail.
Fig. 1 is the sectional view of ink jet recording head, represents the fluid jetting head of embodiments of the present invention
One example, Fig. 2 is the main portions top view of ink jet recording head.
As shown in both figures, the ink jet recording head 10 of present embodiment is by actuating unit 20, for being somebody's turn to do
The fixing channel unit 30 of actuating unit 20 is constituted.
Actuating unit 20 is the actuator devices possessing piezoelectric element 40, has and is formed with pressure product
The stream of raw room 21 formed substrate 22, be located at stream formed substrate 22 one side side oscillating plate 23,
And it is located at the pressure generating chamber base plate 24 that stream forms the another side side of substrate 22.
Stream forms substrate 22 such as by the aluminum oxide (Al of the thickness having about 150 μm2O3),
Zirconium oxide (ZrO2) etc. ceramic wafer constitute, in the present embodiment, multiple pressure generating chamber 21 edge
Its width is set up in parallel.And, this stream formed substrate 22 one side, be such as fixed with by
The oscillating plate 23 that stainless steel (SUS) thin plate of thickness 10～12 μm is constituted, pressure generating chamber 21
One side is sealed by this oscillating plate 23.Herein, as expressed in Fig. 2, the pressure in the manner produces
Room 21 is formed as, and piezoelectric element 40 at least some of is drawn outside pressure generating chamber 21
Lead direction side (right side of Fig. 2) is compared, and piezoelectric element 40 is easily at its contrary side (Fig. 2
Left side) shape that deforms, be simultaneously formed as the shape of the narrowed width of the end of above-mentioned lead direction side
Shape.It is described in detail after shape about above-mentioned pressure generating chamber 21.
Form the one side of substrate 22 at stream, be fixed with by the stainless steel of such as thickness 10～12 μm
(SUS) oscillating plate 23 that thin plate is constituted, the one side of pressure generating chamber 21 is sealed by this oscillating plate 23.
Pressure generating chamber base plate 24 is fixed on stream and forms the another side side of substrate 22 and to pressure generating chamber 21
Another side seal, and there is the near one end of the length direction being located at pressure generating chamber 21
And supply intercommunicating pore 25 that pressure generating chamber 21 connected with manifold described later and be located at pressure and produce
The nozzle connection near the other end of the length direction of room 21 and connected with nozzle opening 34 described later
Hole 26.And, it is right with each pressure generating chamber 21 that piezoelectric element 40 is respectively arranged on oscillating plate 23
The region put.
Herein, each piezoelectric element 40 is by the lower electrode film 41 being located on oscillating plate 23, for each pressure
Piezoelectric body layer 42 and each piezoelectric body layer 42 that generating chamber 21 is independently arranged are provided thereon surface accordingly
Absolute electrode that is upper electrode film 43, be positioned at the outside of pressure generating chamber 21 electrode pad 44,
And distribution that is the connection wiring 45 being connected with electrode pad 44 by upper electrode film 43 is constituted.Herein,
Upper electrode film 43, electrode pad 44 and connection wiring 45 form as one.And, electrode pad
44 to be formed compared with connection wiring 45 in the way of oscillating plate 23 highland is prominent.Piezoelectric body layer 42
Formed by pasting the tellite being made up of piezoelectric, or formed by printing.Separately
Outward, lower electrode film 41 is arranged to become each piezoelectric element throughout the piezoelectric body layer 42 being set up in parallel
The common electrode of 40, as a part of function of oscillating plate.It is of course also possible to for each piezoelectricity
Body layer 42 arranges lower electrode film 41.
Additionally, each layer of actuating unit 20 that is stream form substrate 22, oscillating plate 23 and pressure
Power generating chamber base plate 24, is configured to regulation by the most so-called for claylike ceramic material tellite
Thickness, and such as run through pressure generating chamber 21 etc. is set after stacking firing, thus be formed as one
Body is without adhesive.And, afterwards, oscillating plate 23 forms piezoelectric element 40.
On the other hand, channel unit 30 is engaged by the pressure generating chamber base plate 24 with actuating unit 20
Liquid supply port formed substrate 31, be formed with the shared ink chamber becoming multiple pressure generating chamber 21
Manifold 32 manifold formed substrate 33, be located at manifold formed substrate 33 with liquid supply port formed
The substrate 50 of the side that substrate 31 is contrary and be formed with the nozzle plate 35 of nozzle opening 34 and constitute.
Liquid supply port forms substrate 31 and is made up of stainless steel (SUS) thin plate of thickness 60 μm, and
The nozzle intercommunicating pore 36 that is configured to be provided through to be connected with pressure generating chamber 21 by nozzle opening 34,
And the liquid being connected with pressure generating chamber 21 by manifold 32 together with aforesaid supply intercommunicating pore 25 supplies
To mouth 37, connect and supply the ink from outside ink tank with each manifold 32 it addition, be provided with
Liquid inlet port 38.Liquid supply port 37 and liquid inlet port 38, with the length in pressure generating chamber 21
Degree direction, i.e. with pressure generating chamber 21 be set up in parallel the orthogonal direction in direction that is a direction, with rear
The mode that the both ends of the manifold 32 stated are respectively communicated with is arranged.
Manifold forms substrate 33 in such as 150 μm being suitable to constitute ink flow path (liquid flow path)
Stainless steels etc. possess on the sheet material of corrosion resistance, have and accept ink from outside ink tank (not shown)
The supply of water and pressure generating chamber 21 is supplied the manifold 32 of ink and by pressure generating chamber 21 and spray
The nozzle intercommunicating pore 39 of mouth opening 34 connection.Manifold 32 is arranged to throughout multiple pressure generating chamber 21,
I.e. it is set up in parallel direction throughout pressure generating chamber 21.
Substrate 50 forms the side contrary with liquid supply port formation substrate 31 of substrate 33 with manifold
Face engages and seals the bottom surface of manifold 32.It addition, at substrate 50, through-thickness is through
And be provided with and form, by being located at manifold, the spray that the nozzle intercommunicating pore 39 of substrate 33 connects with nozzle opening 34
Mouth intercommunicating pore 52.That is, the ink from pressure generating chamber 21 is formed via being located at liquid supply port
Substrate 31, manifold form the nozzle intercommunicating pore 36,39 and 52 of substrate 33 and substrate 50 from spray
Mouth opening 34 is discharged.
The plate-shaped member that nozzle plate 35 is formed by ceramic materials such as metal, silicon such as such as stainless steels is constituted.
At nozzle plate 35, run through with the arrangement pitches identical with pressure generating chamber 21 and be configured to be formed with nozzle
Opening 34.
This channel unit 30 is by utilizing adhesive, hot melt sheet etc. to fix liquid supply port formation
Substrate 31, manifold form substrate 33, substrate 50 and nozzle plate 35 and are formed.Additionally, at figure
In 1, illustrate only the adhesive 62 nozzle plate 35 and substrate 50 bonded, but constituting stream list
Adhesive it also is provided with although not shown between the miscellaneous part of unit 30.And, via adhesive, hot melt sheet
This channel unit 30 is engaged with actuating unit 20 and fixes.
Herein, according to Fig. 2, the shape of the pressure generating chamber in the manner is described in more detail.
As in figure 2 it is shown, pressure generating chamber 21 is formed as, with using as absolute electrode upper electrode film 43 from
The electrode pad side of the piezoelectric element 40 that piezoelectric element 40 is drawn and connected as one with electrode pad 44
End (in the drawings for right part) is compared, the shape that piezoelectric element 40 easily deforms in its opposition side.
That is, be formed as can allow for the shape of the big displacement of the relatively large piezoelectric element of area 40.Meanwhile,
Be formed as pressure generating chamber 21, above-mentioned electrode pad side end away from this pressure generating chamber 21 leaves
Width W1 at the inner side of predetermined distance L, ratio is away from the above-mentioned electrode pad side with pressure generating chamber 21
The width at the inner side of predetermined distance L is left in the end (in the drawings for left part) of the side that end is contrary
The shape that degree W2 is narrow.That is, the width W1 that is shaped so as at electrode pad side end is gradually reduced
The shape and being formed as of point the displacement at each position of the electrode pad side of piezoelectric element 40 can be made to delay
The shape of slow change.Herein, the shape of piezoelectric element 40 be imitate pressure generating chamber 21 shape and
Shape.
By so being formed, it is possible to contrary relative to electrode pad 44 of pressure generating chamber 21
The end side of side makes piezoelectric element 40 displacement well such that it is able to increase corresponding with nozzle opening 34
Region in displacement efficiency.Simultaneously as can make pressure generating chamber 21 at electrode pad 44
The width W1 of the end of side narrows, it is possible to reduce the displacement efficiency of electrode pad 44 side.Its knot
Fruit it is possible to relax stress and concentrates.Accompany with this, it is possible to during reduction piezoelectric element 40 each displacement all
By the alternate stress in the connection wiring 45 of alternate stress effect such that it is able to prevent it from breaking in advance
Line.
As it has been described above, in the ink jet recording head 10 of the manner, from print cartridge (stockpiling unit) via
Liquid inlet port 38 obtains ink in manifold 32, is full of from manifold 32 to nozzle opening with ink
After in the ink flow path of 34, according to the tracer signal from not shown drive circuit, to each pressure
Each piezoelectric element 40 of generating chamber 21 correspondence applies voltage and makes oscillating plate 23 and piezoelectric element 40 1
Play flexural deformation, thus improve the pressure in each pressure generating chamber 21 and spray from each nozzle opening 34
Ink droplet.
Herein, as it has been described above, form the shape of pressure generating chamber 21 as illustrated in fig. 2, therefore, it is possible to
Improve the displacement efficiency of the side contrary with electrode pad 44 side such that it is able to via nozzle opening 34
Carry out the discharge of ink droplet well, the stress collection to electrode pad side pressure electric device 40 can be relaxed simultaneously
In.As a result of which it is, raising and the long lifetime of the displacement efficiency of piezoelectric element 40 can be realized simultaneously.
In addition it is possible to be effectively prevented crosstalk.
Play the shape etc. of the pressure generating chamber of effect same as described above, effect, be not limited to Fig. 2
Shown shape.As long as being formed as to derivative electrode side, electrode pad side, opposite to that side is compared
It is difficult to the structure of displacement, therefore, it is possible to consider the shape of such as Fig. 3～Fig. 5.Pressure shown in Fig. 3
The combination on its essentially straight limit of power generating chamber 211, but pressure generating chamber 211 is along with close to electrode pole
Plate 441 side and width is gradually reduced.Herein, upper electrode film 431 is via connection wiring 451 and electrode
Pole plate 441 connects.
It addition, as shown in Figure 4, it is also possible to pressure generating chamber 212 is configured to, by making at it also
Pressure generating chamber adjacent in row setting direction staggers and shape at length direction (electrode pad 442 side)
Become interconnected.Now, additionally it is possible to realize the densification of nozzle opening 34.Additionally, upper electrode
Film 432 is connected with electrode pad 442 via connection wiring 452.
Further, as shown in Figure 5, it is also possible to pressure generating chamber 213 being arranged is to make to set side by side at it
Put pressure generating chamber adjacent on direction the most different, also be able in this case realize nozzle
The densification of opening 34.Herein, upper electrode film 433 is via connection wiring 453 and electrode pad
443 connect.
In Fig. 3～Fig. 5, the upper electrode film 431 that is integrally forming with electrode pad 441,442,443,
432, the shape of the shape specific pressure generating chamber 211,212,213 of 433 is slightly smaller, but is formed as imitating
The shape of this pressure generating chamber 211～213.Pressure is imitated in the shape so making upper electrode film 431～433
In the case of the shape of power generating chamber 211～213, it is possible to the most efficiently the displacement of piezoelectric element 40 is passed
It is handed to the ink of pressure generating chamber 211～213.But, it is not limited to this.Even if it is above-mentioned having
The shape of pressure generating chamber as example, the shape of upper electrode film 431～433 and piezoelectric element 40
In the case of rectangle as in the past, though degree diminishes, but play identical with above-mentioned embodiment
Effect, effect.
Further, as shown in Figure 6, it is also possible to pressure generating chamber 214 is set to rectangle as in the past,
And only will include the upper electrode film 434 being integrally forming via connection wiring 454 and electrode pad 444
In the shape shown in Fig. 2～Fig. 5 of being shaped so as to of interior piezoelectric element, (Fig. 6 is shape same with Fig. 2
The situation of shape).The mitigation concentrated about raising and the stress of displacement efficiency, it is possible to obtain and will press
Power generating chamber 211～213 is formed as the effect that the situation of the shape shown in Fig. 2～Fig. 5 is identical.
It addition, as shown in Fig. 8 of Fig. 7 and top view thereof, it is also possible to it is configured to make piezoelectric element 405
Piezoelectric body layer 425 extend to electrode pad 445 part, and be disposed in vibration in the direction of the width
The whole surface of plate 23.Herein, upper electrode film 43 is via connection wiring 455 and electrode pad 445
Connect.
Other embodiments
Above, an embodiment of the invention is illustrated, but the basic structure of the present invention is not
It is defined in above-mentioned embodiment.Such as, in the above-described embodiment, exemplified with having thick-film type piezoelectricity
The ink jet recording head 10 of element 40, but as the pressure making pressure generating chamber 21 produce pressure change
Generation unit, is not particularly restricted to this, such as, even if having the ink jet type note of following piezoelectric element etc.
Record head also functions to identical effect, i.e. utilize sol-gel process, MOD method, sputtering by having
Method etc. formed piezoelectric film-type piezoelectric element deformation and from nozzle opening discharge ink droplet.
It addition, the ink jet recording head of present embodiment is constituted possesses the ink flow path connected with print cartridge etc.
The part of head unit, and be equipped on inkjet recording device.Fig. 9 is to represent this ink jet type
The skeleton diagram of one example of tape deck.
As it is shown in figure 9, inkjet recording device I possesses the record head list with ink jet recording head 10
Unit 1A and 1B.Head unit 1A, 1B are located at the box constituting providing ink unit removably
2A and 2B, the balladeur train 3 being equipped with this head unit 1A and 1B sets with can axially move
In the balladeur train axle 5 being installed on apparatus main body 4.This head unit 1A and 1B are formed as such as dividing
Pai Chu black ink composition and color inks composition.
It addition, drive the driving force of motor 6 to transmit via not shown multiple gears and Timing Belt 7
To balladeur train 3, thus the balladeur train 3 being equipped with head unit 1A and 1B moves along balladeur train axle 5.
On the other hand, it is provided with platen 8 at apparatus main body 4 along balladeur train axle 5, utilizes not shown paper supply
The record media such as the paper of the supply such as roller that is record paper S are wound in platen 8 and are carried.And,
Utilize the control portion that is made up of not shown CPU, memory etc., control above-mentioned driving motor 6,
The action of the pressure generating unit etc. of head unit 1A and 1B.
In the above-described embodiment, an example as fluid jetting head enumerates ink jet recording head and carries out
Explanation, but the present invention is all as object with fluid jetting head widely, certainly can also be applied to injection
The fluid jetting head of the liquid beyond ink removing water.As other fluid jetting head, enumerate printer etc.
Various record heads that image recording structure is used, the colored filter manufacturing liquid crystal display etc. are made
Colorant shower nozzle, organic el display, FED(field-emitter display) etc. electrode formed
The electrode material shower nozzle that used, manufacture the organism organic matter shower nozzle etc. that biochip is used.
Description of reference numerals:
10 ... ink jet recording head (fluid jetting head)；20 ... actuating unit；21 ... pressure generating chamber；
22 ... stream forms substrate；23 ... oscillating plate；24 ... pressure generating chamber base plate；25 ... supply intercommunicating pore；
30 ... channel unit；31 ... liquid supply port forms substrate；32 ... manifold；33 ... manifold forms substrate；
34 ... nozzle opening；35 ... nozzle plate；36 ... nozzle intercommunicating pore；37 ... liquid supply port；38 ... liquid
Body introducing port；39 ... nozzle intercommunicating pore；40,405 ... piezoelectric element；41 ... lower electrode film；42、425…
Piezoelectric body layer；43 ... upper electrode film；44,441～445 ... electrode pad.
Claims (8)
1. a fluid jetting head, it is characterised in that
Possess: multiple pressure generating chamber being filled with liquid；And piezoelectric element, by this pressure
Give pressure to described liquid in generating chamber, make drop set accordingly via with each pressure generating chamber
The nozzle opening put is discharged,
Described pressure generating chamber is following shape: at least some of to institute away from by described piezoelectric element
State the end of the lead direction side drawn outside pressure generating chamber leave at the inner side of predetermined distance,
And on the direction orthogonal with described lead direction, the width of described pressure generating chamber, than away from institute
Described predetermined distance is left in the end stating the contrary side of the described lead direction of pressure generating chamber
On at Nei Ce and described orthogonal direction, the narrow width of described pressure generating chamber.
Fluid jetting head the most according to claim 1, it is characterised in that
Described pressure generating chamber is following shape: at least some of to institute with by described piezoelectric element
The lead direction side drawn outside stating pressure generating chamber is compared, and described piezoelectric element is easily contrary at it
Side deforms.
Fluid jetting head the most according to claim 1 and 2, it is characterised in that
Described piezoelectric element have common electrode that multiple piezoelectric element shared, piezoelectric body layer and
The absolute electrode arranged for each piezoelectric element, described lead direction be by described absolute electrode to
The direction drawn outside described pressure generating chamber.
Fluid jetting head the most according to claim 3, it is characterised in that
Described absolute electrode is formed as the shape corresponding with the shape of each pressure generating chamber.
Fluid jetting head the most according to claim 3, it is characterised in that
Described absolute electrode is formed as rectangle.
Fluid jetting head the most according to claim 1 and 2, it is characterised in that
Described pressure generating chamber, to be formed as in the direction orthogonal with described lead direction that is described
Pressure generating chamber is set up in parallel on direction the adjacent described spray corresponding to described pressure generating chamber
The position of mouth opening, the interconnected mode staggered in described lead direction is constituted.
Fluid jetting head the most according to claim 6, it is characterised in that
Described pressure generating chamber arranges: be set up in parallel on direction adjacent pressure generating chamber described
In one, between other pressure generating chamber that this pressure generating chamber adjoins each other, make described
Lead direction is formed at contrary with the described lead direction of described other adjacent pressure generating chamber
Side.
8. a liquid injection apparatus, it is characterised in that possess any one institute in claim 1～7
The fluid jetting head stated.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2013067655A JP6123998B2 (en) | 2013-03-27 | 2013-03-27 | Liquid ejecting head and liquid ejecting apparatus |
| JP2013-067655 | 2013-03-27 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN104070801A CN104070801A (en) | 2014-10-01 |
| CN104070801B true CN104070801B (en) | 2016-08-24 |
Family
ID=51592592
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201410099927.5A Active CN104070801B (en) | 2013-03-27 | 2014-03-18 | Fluid jetting head and liquid injection apparatus |
Country Status (3)
| Country | Link |
|---|---|
| US (1) | US9073320B2 (en) |
| JP (1) | JP6123998B2 (en) |
| CN (1) | CN104070801B (en) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107107615B (en) * | 2014-12-22 | 2018-10-09 | 精工爱普生株式会社 | Liquid ejecting head |
| US10457042B2 (en) * | 2017-09-11 | 2019-10-29 | Panasonic Intellectual Property Management Co., Ltd. | Inkjet head and inkjet device using same |
| JP7131478B2 (en) * | 2019-05-21 | 2022-09-06 | セイコーエプソン株式会社 | Liquid ejecting head and liquid ejecting apparatus |
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| CN1442297A (en) * | 2002-02-18 | 2003-09-17 | 兄弟工业株式会社 | Ink jet printer head and ink jet printer having ink jet printer head |
| CN1647928A (en) * | 2004-01-29 | 2005-08-03 | 兄弟工业株式会社 | Inkjet head |
| CN1721183A (en) * | 2004-07-16 | 2006-01-18 | 兄弟工业株式会社 | Inkjet head unit |
| CN102180013A (en) * | 2010-01-13 | 2011-09-14 | 精工爱普生株式会社 | Liquid ejection head and liquid ejection apparatus |
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| JPS62297157A (en) * | 1986-06-17 | 1987-12-24 | Fujitsu Ltd | Ink jet head |
| JP3414227B2 (en) * | 1997-01-24 | 2003-06-09 | セイコーエプソン株式会社 | Ink jet recording head |
| JP3695507B2 (en) * | 1998-02-18 | 2005-09-14 | セイコーエプソン株式会社 | Method for manufacturing ink jet recording head |
| JP2001260352A (en) * | 2000-03-21 | 2001-09-25 | Matsushita Electric Ind Co Ltd | Ink jet head and method of manufacture |
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| JP4240135B2 (en) | 2007-06-25 | 2009-03-18 | ブラザー工業株式会社 | Inkjet head |
| JP2012116039A (en) * | 2010-11-30 | 2012-06-21 | Kyocera Corp | Liquid discharge head, and recording device using the same |
| EP2727731B1 (en) * | 2011-06-29 | 2019-07-10 | Kyocera Corporation | Liquid discharge head and recording device using same |
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| CN1442297A (en) * | 2002-02-18 | 2003-09-17 | 兄弟工业株式会社 | Ink jet printer head and ink jet printer having ink jet printer head |
| CN1647928A (en) * | 2004-01-29 | 2005-08-03 | 兄弟工业株式会社 | Inkjet head |
| CN1721183A (en) * | 2004-07-16 | 2006-01-18 | 兄弟工业株式会社 | Inkjet head unit |
| CN102180013A (en) * | 2010-01-13 | 2011-09-14 | 精工爱普生株式会社 | Liquid ejection head and liquid ejection apparatus |
Also Published As
| Publication number | Publication date |
|---|---|
| JP2014188899A (en) | 2014-10-06 |
| CN104070801A (en) | 2014-10-01 |
| JP6123998B2 (en) | 2017-05-10 |
| US9073320B2 (en) | 2015-07-07 |
| US20140292944A1 (en) | 2014-10-02 |
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