JP7131478B2 - Liquid ejecting head and liquid ejecting apparatus - Google Patents

Description

The present invention relates to a liquid ejecting head and a liquid ejecting apparatus that eject liquid from nozzles, and more particularly to an ink jet recording head and an ink jet recording apparatus that eject ink as liquid.

2. Description of the Related Art As a liquid ejecting head that ejects liquid, an ink jet recording head that performs printing by ejecting ink as liquid onto a print medium is known.

The ink jet recording head consists of individual channels having pressure chambers communicating with nozzles, a common liquid chamber communicating with multiple individual channels in common, and an energy source such as a piezoelectric actuator that causes pressure changes in the ink in the pressure chambers. and an energy generating element that causes a pressure change in the ink in the pressure chamber, thereby ejecting an ink droplet from the nozzle.

In such an ink jet recording head, if air bubbles remain in the pressure chambers, the air bubbles absorb the pressure changes caused by the energy generating elements, making it impossible to normally eject ink droplets from the nozzles.

For this reason, a first common liquid chamber and a second common liquid chamber are provided as common liquid chambers common to the individual flow paths, and ink flows from the first common liquid chamber through the individual flow paths to the second common liquid chamber. An ink jet recording head having a circulating configuration has been proposed (see, for example, Japanese Laid-Open Patent Publication No. 2002-100003).

JP 2012-143948 A

In such an ink jet recording head, there is a demand to reduce the channel resistance and inertance without lowering the resolution of the nozzles. , there is a problem that the rigidity of the partition wall between the flow paths is lowered and crosstalk occurs.

Such problems are present not only in ink jet recording heads, but also in liquid jet heads that jet liquids other than ink.

In view of such circumstances, the present invention aims to provide a liquid ejecting head and a liquid ejecting apparatus in which crosstalk is suppressed by suppressing an increase in the size of the channel substrate and a decrease in rigidity of the partition walls between the channels. aim.

A mode of the present invention for solving the above-mentioned problems comprises a channel substrate in which a channel is formed, and an energy generating element for causing a pressure change in the liquid in the channel, wherein the channel comprises a first a common liquid chamber; a second common liquid chamber; an individual flow path, wherein the individual flow path includes a nozzle communicating with the outside, a pressure chamber in which a pressure change is caused by the energy generating element, and the nozzle between the nozzle and the first common liquid chamber. and an upstream communicating passage extending in a direction perpendicular to the nozzle surface to which is opened, the upstream communicating passages of the individual flow passages adjacent to each other in the direction in which the nozzles are arranged, when viewed in plan from the direction in which the nozzles are arranged, The liquid jet head is characterized by having portions that do not overlap each other.

According to another aspect, there is provided a liquid ejecting apparatus including the liquid ejecting head according to the above aspects.

1 is a plan view of a recording head according to Embodiment 1 of the present invention; FIG. 1 is a cross-sectional view of a recording head according to Embodiment 1 of the present invention; FIG. 1 is a cross-sectional view of a recording head according to Embodiment 1 of the present invention; FIG. It is a figure which represented typically the flow path which concerns on Embodiment 1 of this invention. 1 is a perspective view of a channel according to Embodiment 1 of the present invention; FIG. 1 is a cross-sectional view of a main part of a recording head according to Embodiment 1 of the present invention; FIG. 1 is a cross-sectional view of a main part of a recording head according to Embodiment 1 of the present invention; FIG. FIG. 5 is a perspective view of a channel according to Embodiment 2 of the present invention; FIG. 10 is a cross-sectional view of a main part of a print head according to Embodiment 2 of the present invention; 1 is a diagram showing a schematic configuration of a recording apparatus according to an embodiment of the invention; FIG.

The present invention will be described in detail below based on embodiments.
(Embodiment 1)
An ink jet recording head, which is an example of the liquid jet head of the present embodiment, will be described with reference to FIGS. 1 to 7. FIG. FIG. 1 is a plan view of an ink jet recording head, which is an example of a liquid jet head according to Embodiment 1 of the present invention, viewed from the nozzle surface side. FIG. 2 is a cross-sectional view taken along line AA' of FIG. FIG. 3 is a cross-sectional view taken along line BB' of FIG. FIG. 4 is a diagram schematically showing a flow path. FIG. 5 is a perspective view of the flow path from the Z2 side. 6A and 6B are cross-sectional views of the main part of the recording head, which are cross-sectional views taken along the lines CC', DD', and EE' of FIG. FIG. 7 is a cross-sectional view taken along line FF' of FIG.

As shown in the figure, an ink jet recording head 1 (hereinafter simply referred to as recording head 1), which is an example of the liquid jet head of this embodiment, includes a flow path forming substrate 10, a communication plate 15, and a nozzle plate 20 as flow path substrates. , a protective substrate 30, a case member 40, a compliance substrate 49 and the like.

The channel-forming substrate 10 is made of a silicon single crystal substrate, and a vibrating plate 50 is formed on one surface thereof. Diaphragm 50 may be a single layer or laminate selected from a silicon dioxide layer and a zirconium oxide layer.

A plurality of pressure chambers 12 constituting the individual flow paths 200 are provided in the flow path forming substrate 10 and partitioned by a plurality of partition walls. The plurality of pressure chambers 12 are arranged side by side at a predetermined pitch along the direction in which the plurality of nozzles 21 for ejecting ink are arranged side by side. Hereinafter, this direction will be referred to as the direction in which the nozzles 21 are arranged side by side, the direction in which the pressure chambers 12 are arranged side by side, or the first direction X. In addition, the flow path forming substrate 10 is provided with a plurality of rows in which the pressure chambers 12 are arranged in the first direction X, two rows in the present embodiment. The direction in which a plurality of rows of the pressure chambers 12 are arranged is hereinafter referred to as a second direction Y. As shown in FIG. In this embodiment, the portion between the pressure chambers 12 arranged side by side in the first direction X of the flow path forming substrate 10 is called a partition. This partition is formed along the second direction Y. As shown in FIG. That is, the partition wall is a portion of the flow path forming substrate 10 that overlaps the pressure chamber 12 in the second direction Y. As shown in FIG.

Further, in the present embodiment, among the two rows of pressure chambers 12, one row of pressure chambers 12 is referred to as a first pressure chamber 12A, and the other row of pressure chambers 12 is referred to as a second pressure chamber 12B. The first pressure chamber 12A and the second pressure chamber 12B are arranged at positions that do not overlap each other in a plan view from the first direction X. As shown in FIG. Also, the first pressure chambers 12A and the second pressure chambers 12B are staggered in the first direction X, that is, arranged in a staggered manner. In the present embodiment, the row in which the first pressure chambers 12A are arranged side by side in the first direction X and the row in which the second pressure chambers 12B are arranged side by side in the first direction X are arranged in the first direction X. They are arranged at positions shifted from each other by half a pitch. Note that a portion of the first pressure chamber 12A and a portion of the second pressure chamber 12B may be arranged at positions that overlap each other in plan view from the first direction X.

Further, in the present embodiment, a direction perpendicular to both the first direction X and the second direction Y is referred to as a third direction Z. The nozzle plate 20 side with respect to the member 40 is called the Z2 side. Although the first direction X, the second direction Y, and the third direction Z are directions orthogonal to each other, the directions are not particularly limited to this, and may be directions that intersect at an angle other than orthogonal. .

In this embodiment, only the pressure chambers 12 are provided in the flow path forming substrate 10. However, the pressure chambers 12 cross the flow paths rather than the pressure chambers 12 so as to impart flow path resistance to the ink supplied to the pressure chambers 12. A flow path resistance imparting portion having a reduced cross-sectional area may be provided.

The vibration plate 50 is formed as described above on the Z1 side, which is one surface side in the third direction Z, of the flow path forming substrate 10. On the vibration plate 50, the first electrode 60 and the piezoelectric element The body layer 70 and the second electrode 80 are laminated by film formation and lithography to form the piezoelectric actuator 300 . In this embodiment, the piezoelectric actuator 300 is an energy generating element that causes pressure change in the ink inside the pressure chamber 12 . Here, the piezoelectric actuator 300 is also referred to as a piezoelectric element, and refers to a portion including the first electrode 60 , the piezoelectric layer 70 and the second electrode 80 . Generally, one of the electrodes of the piezoelectric actuator 300 is used as a common electrode, and the other electrode and the piezoelectric layer 70 are patterned for each pressure chamber 12 . In this embodiment, the first electrode 60 is the common electrode of the piezoelectric actuator 300, and the second electrode 80 is the individual electrode of the piezoelectric actuator 300. However, there is no problem even if this is reversed for convenience of the drive circuit and wiring. In the above example, the diaphragm 50 and the first electrode 60 act as diaphragms, but the invention is not limited to this. It may act as a diaphragm. Also, the piezoelectric actuator 300 itself may substantially serve as a diaphragm.

A lead electrode 90 is connected to the second electrode 80 of each piezoelectric actuator 300, and a voltage is selectively applied to each piezoelectric actuator 300 via the lead electrode 90. .

A protective substrate 30 is bonded to the surface of the flow path forming substrate 10 on the side of the piezoelectric actuator 300 .

A piezoelectric actuator holding portion 31 having a space that does not hinder the movement of the piezoelectric actuator 300 is provided in the area of the protective substrate 30 facing the piezoelectric actuator 300 . The piezoelectric actuator holding portion 31 may have a space that does not hinder the movement of the piezoelectric actuator 300, and the space may or may not be sealed. Also, in the present embodiment, the piezoelectric actuator holding portion 31 is provided independently for each row of the plurality of piezoelectric actuators 300 arranged side by side in the first direction X. As shown in FIG. That is, the piezoelectric actuator holding portion 31 is formed to have a size to integrally cover the row of the plurality of piezoelectric actuators 300 arranged side by side in the first direction X. As shown in FIG. Of course, the piezoelectric actuator holding portion 31 is not particularly limited to this, and may cover the piezoelectric actuators 300 individually, and is composed of two or more piezoelectric actuators 300 arranged side by side in the first direction X. It may be covered by groups.

As such a protective substrate 30, it is preferable to use a material having substantially the same coefficient of thermal expansion as the channel forming substrate 10, such as glass or ceramic material. was formed using a silicon single crystal substrate.

In addition, a through hole 32 that penetrates the protection substrate 30 in the third direction Z is provided in the protection substrate 30 . The vicinity of the end of the lead electrode 90 drawn out from each piezoelectric actuator 300 extends so as to be exposed inside the through hole 32 and is electrically connected to the flexible cable 120 inside the through hole 32 . The flexible cable 120 is a wiring board having flexibility, and in this embodiment, a drive circuit 121, which is a semiconductor element, is mounted thereon. Note that the lead electrode 90 and the drive circuit 121 may be electrically connected without the flexible cable 120 interposed. Also, a flow path may be provided in the protection substrate 30 .

A case member 40 is fixed to the Z1 side of the protective substrate 30 . The case member 40 is joined to the surface opposite to the flow path forming substrate 10 of the protection substrate 30, and is also joined to the communication plate 15, which will be described later.

The case member 40 is provided with a first liquid chamber portion 41 forming part of the first common liquid chamber 101 and a second liquid chamber portion 42 forming part of the second common liquid chamber 102. It is The first liquid chamber portion 41 and the second liquid chamber portion 42 are provided on both sides of the two rows of pressure chambers 12 in the second direction Y, respectively.

Each of the first liquid chamber portion 41 and the second liquid chamber portion 42 has a concave shape that opens to the surface of the case member 40 on the Z2 side, and has a plurality of pressure chambers 12 arranged side by side in the first direction X. provided continuously throughout.

The case member 40 also has an inlet 43 that communicates with the first liquid chamber 41 and introduces ink into the first liquid chamber 41 , and a second liquid chamber 42 that communicates with the second liquid chamber 42 . A discharge port 44 is provided for discharging ink from the nozzle.

Furthermore, the case member 40 is provided with a connection port 45 that communicates with the through hole 32 of the protective substrate 30 and through which the flexible cable 120 is inserted.

On the other hand, the communication plate 15, the nozzle plate 20, and the compliance substrate 49 are provided on the Z2 side, which is the side opposite to the protective substrate 30, of the flow path forming substrate 10. As shown in FIG.

The communication plate 15 is configured by stacking a first communication plate 151 and a second communication plate 152 in the third direction Z in this embodiment. The first communication plate 151 is provided on the flow path forming substrate 10 side, that is, on the Z1 side in the third direction Z, and the second communication plate 152 is provided on the nozzle plate 20 side, that is, in the third direction Z. It is provided on the Z2 side.

The first communication plate 151 and the second communication plate 152 constituting the communication plate 15 can be made of metal such as stainless steel, glass, ceramic material, or the like. The communication plate 15 is preferably made of a material having substantially the same coefficient of thermal expansion as the channel forming substrate 10. In this embodiment, the communicating plate 15 is formed using a silicon single crystal substrate of the same material as the channel forming substrate 10. .

The communication plate 15 is provided with a first communication portion 16 and a second communication portion 17, which constitute parts of the first common liquid chamber 101 and the second common liquid chamber 102, respectively, although the details will be described later. In addition, the communication plate 15 includes a flow path for communicating the first common liquid chamber 101 and the pressure chamber 12, a flow path for communicating the pressure chamber 12 and the nozzle 21, and a nozzle 21 and the nozzle 21, which will be described later in detail. 2, a channel communicating with the common liquid chamber 102 is provided. These channels provided in the communication plate 15 constitute part of the individual channels 200 .

The nozzle plate 20 is formed with a plurality of nozzles 21 that communicate with the outside and with the pressure chambers 12 . In this embodiment, as shown in FIG. 1, a first nozzle row 22A in which a plurality of nozzles 21 are arranged side by side in the first direction X, and a second nozzle row 22A in which a plurality of nozzles 21 are arranged side by side in the first direction X 22B are arranged side by side in the second direction Y, and the first nozzle row 22A and the second nozzle row 22B are shifted in the first direction X so as not to be in the same position in the second direction Y. They are arranged in a staggered pattern. In this embodiment, the nozzles 21 of the first nozzle row 22A are called first nozzles 21A, and the nozzles 21 of the second nozzle row 22B are called second nozzles 21B. The first nozzles 21A of the first nozzle row 22A communicate with the first pressure chamber 12A. Also, the second nozzles 21B of the second nozzle row 22B communicate with the second pressure chamber 12B. Note that the first nozzle row 22A and the second nozzle row 22B may be arranged on a straight line in the first direction X.

The communication plate 15 also has a first communication portion 16 forming part of the first common liquid chamber 101 and a second communication portion 17 forming part of the second common liquid chamber 102 .

The first communicating portion 16 is provided at a position overlapping the first liquid chamber portion 41 of the case member 40 in the third direction Z, and is provided so as to open on both the Z1 side and the Z2 side of the communicating plate 15. ing. The first communicating portion 16 constitutes the first common liquid chamber 101 by communicating with the first liquid chamber portion 41 on the Z1 side. That is, the first common liquid chamber 101 is composed of the first liquid chamber portion 41 of the case member 40 and the first communication portion 16 of the communication plate 15 . Also, the first communicating portion 16 extends in the second direction Y to a position overlapping the pressure chamber 12 in the third direction Z on the Z2 side. The first common liquid chamber 101 may be configured by the first liquid chamber portion 41 of the case member 40 without providing the first communication portion 16 in the communication plate 15 .

The second communicating portion 17 is provided at a position overlapping the second liquid chamber portion 42 of the case member 40 in the third direction Z, and is provided so as to open on both the Z1 side and the Z2 side of the communicating plate 15. ing. The second communicating portion 17 constitutes the second common liquid chamber 102 by communicating with the second liquid chamber portion 42 on the Z1 side. That is, the second common liquid chamber 102 is composed of the second liquid chamber portion 42 of the case member 40 and the second communication portion 17 of the communication plate 15 . The second communicating portion 17 extends in the second direction Y to a position overlapping the pressure chamber 12 in the third direction Z on the Z2 side. The second common liquid chamber 102 may be configured by the second liquid chamber portion 42 of the case member 40 without providing the second communication portion 17 in the communication plate 15 .

A compliance substrate 49 having a compliance portion 494 is provided on the surface of the communication plate 15 on the Z2 side where the first communication portion 16 and the second communication portion 17 are opened. The compliance substrate 49 seals the openings of the first common liquid chamber 101 and the second common liquid chamber 102 on the side of the nozzle surface 20a.

Such a compliance substrate 49 in this embodiment includes a sealing film 491 made of a flexible thin film and a fixed substrate 492 made of a hard material such as metal. A region of the fixed substrate 492 facing the first common liquid chamber 101 and the second common liquid chamber 102 is an opening 493 that is completely removed in the thickness direction. A part of the wall surface of the common liquid chamber 102 is a compliance portion 494 which is a flexible portion sealed only by a sealing film 491 having flexibility. In this embodiment, the compliance portion 494 provided in the first common liquid chamber 101 is called a first compliance portion 494A, and the compliance portion 494 provided in the second common liquid chamber 102 is called a second compliance portion 494B. By providing the compliance portion 494 on a part of the wall surface of each of the first common liquid chamber 101 and the second common liquid chamber 102 in this manner, the ink in the first common liquid chamber 101 and the second common liquid chamber 102 is Pressure fluctuations can be absorbed by deformation of the compliance portion 494 .

Further, in this embodiment, the first common liquid chamber 101 and the second common liquid chamber 102 are provided so as to open on the Z2 side where the nozzle 21 opens, so that the nozzle plate 20 and the compliance portion 494 are located on the nozzle surface 20a. is arranged on the Z2 side, which is the same side as the individual channel 200 having the pressure chamber 12 and the nozzle 21 in the third direction Z, which is the direction perpendicular to . In this way, by arranging the compliance portion 494 on the same side as the nozzle 21 with respect to the individual channel 200, the compliance portion 494 can be provided in a region where the nozzle 21 is not provided, and the compliance portion 494 can be relatively It can be provided over a large area. Further, by arranging the compliance portion 494 and the nozzle 21 on the same side with respect to the individual channel 200, the compliance portion 494 is arranged at a position close to the individual channel 200, and the pressure of the ink in the individual channel 200 is reduced. Fluctuations can be effectively absorbed by the compliance section 494 .

Also, the two compliance sections 494 of this embodiment are provided on one compliance board 49 as shown in FIG. Of course, the compliance board 49 is not limited to this, and an independent compliance board 49 may be provided for each compliance section 494 .

Further, the flow path forming substrate 10, the communication plate 15, the nozzle plate 20, the compliance substrate 49, etc., which constitute the flow path substrate, communicate with the first common liquid chamber 101 and the second common liquid chamber 102, and the first common liquid chamber 101 communicates with the second common liquid chamber . A plurality of individual channels 200 are provided for sending the ink in the common liquid chamber 101 to the second common liquid chamber 102 . Here, the individual channel 200 of the present embodiment communicates with the first common liquid chamber 101 and the second common liquid chamber 102 , is provided for each nozzle 21 , and includes the nozzle 21 . The three individual flow paths 200 adjacent in the first direction X, which is the direction in which the nozzles 21 are arranged side by side, are provided in communication with the first common liquid chamber 101 and the second common liquid chamber 102, respectively. That is, the plurality of individual flow paths 200 provided for each nozzle 21 are provided so as to communicate only with the first common liquid chamber 101 and the second common liquid chamber 102, respectively. Except for the first common liquid chamber 101 and the second common liquid chamber 102, they are not communicated with each other. That is, in the present embodiment, a channel provided with one nozzle 21 and one pressure chamber 12 is referred to as an individual channel 200, and each individual channel 200 is connected to the first common liquid chamber 101 and the second common liquid chamber 101. It is provided so as to communicate only with the chamber 102 .

Further, in the present embodiment, among the individual channels 200, the channel closer to the first common liquid chamber 101 than the nozzle 21 is referred to as an upstream channel. The side channel is referred to as the downstream channel.

Furthermore, in the present embodiment, the plurality of individual flow paths 200 arranged in parallel in the first direction X are a first individual flow path 200A having first nozzles 21A and a second individual flow path having second nozzles 21B. 200B. The first individual flow paths 200A and the second individual flow paths 200B are alternately arranged in the first direction X. As shown in FIG.

As shown in FIG. 2, the first individual channel 200A includes a first channel 201, a first pressure chamber 12A, a second channel 202, a first nozzle 21A, a third channel 203, and a fourth channel 204. and a fifth channel 205 .

The first flow path 201 communicates between the first pressure chamber 12A and the first common liquid chamber 101, and one end on the Z2 side communicates with the first communication portion 16 constituting the first common liquid chamber 101, The first communication plate 151 is penetrated in the third direction Z so that the other end on the Z1 side communicates with one end side of the pressure chamber 12 in the second direction Y. As shown in FIG.

The first pressure chamber 12A is provided in the flow path forming substrate 10 as described above. A part of the side opening is covered with a communicating plate 15 . Such first pressure chambers 12A are formed in the direction in which the flow paths are arranged, that is, in the first direction X with the first resolution. That is, the flow path provided between the flow path forming substrate 10 as the first flow path substrate and the communication plate 15 as the second flow path substrate is the pressure chamber 12 . Also, since the first pressure chamber 12A and the second pressure chamber 12B are arranged at different positions in the second direction Y, the first resolution means the resolution of the first pressure chamber 12A and the second pressure chamber 12B. resolution of each. The first resolution is the pitch of the channels in the first direction X, which is the direction in which the channels are arranged.

The second flow path 202 communicates the first pressure chamber 12A and the first nozzle 21A, one end on the Z1 side communicates with the other end of the first pressure chamber 12A in the second direction Y, and the second flow path 202 communicates with the other end on the Z2 direction side. It is provided so as to penetrate the communication plate 15 in the third direction Z so that the other end of the side communicates with the first nozzles 21A provided in the nozzle plate 20 . That is, the second flow path 202 is provided extending in the third direction Z, which is the direction perpendicular to the nozzle surface 20a, between the nozzle 21 and the first common liquid chamber 101. It corresponds to the upstream communication path described in the claims.

The first nozzle 21A communicates with the other end of the second flow path 202 on the Z2 side, and opens on the nozzle surface 20a on the Z2 side of the nozzle plate 20 to communicate with the outside.

The third flow path 203 extends along the second direction Y in the in-plane direction of the nozzle surface 20 a so that one end communicates with the second flow path 202 between the second communication plate 152 and the nozzle plate 20 . is set. The third flow path 203 is formed by providing a recess in the second communication plate 152 and covering the opening of the recess with the nozzle plate 20 . Note that the third flow path 203 is not particularly limited to this, and a recess may be provided in the nozzle plate 20 and the recess may be covered with the second communication plate 152 . You may make it provide a recessed part in both. The third channel 203 constitutes part of the channel provided between the communication plate 15 as the second channel substrate and the nozzle plate 20 as the third channel substrate. do.

The fourth flow path 204 communicates with the third flow path 203 at one end on the Z2 side, and is provided so as to penetrate the second communication plate 152 in the third direction. That is, the fourth flow path 204 extends in the third direction Z, which is the direction perpendicular to the nozzle surface 20a, between the nozzle 21 and the second common liquid chamber 102. It corresponds to the downstream communication path described in the claims.

The fifth flow path 205 has a nozzle surface between the first communication plate 151 and the second communication plate 152 so that one end communicates with the fourth flow path 204 and the other end communicates with the second common liquid chamber 102 . It extends along the second direction Y in the in-plane direction of 20a. The fifth flow path 205 of this embodiment is formed by providing a recess in the second communication plate 152 and covering the recess with the first communication plate 151 . Of course, the fifth flow path 205 may be formed by providing a recess in the first communication plate 151 and covering it with the second communication plate 152. You may make it provide a recessed part in. That is, the fifth flow path 205 extends in the second direction Y, which is the in-plane direction of the nozzle surface 20a, between the nozzle 21 and the second common liquid chamber 102. corresponds to the downstream horizontal channel described in the claims.

In this manner, the first individual flow path 200A includes the first flow path 201, the pressure chamber 12, the second pressure chamber 12, and the second flow path 200A in order from the upstream side communicating with the first common liquid chamber 101 to the downstream side communicating with the second common liquid chamber . It has a channel 202 , a first nozzle 21 A, a third channel 203 , a fourth channel 204 and a fifth channel 205 . That is, in this embodiment, as shown in FIG. 4, the first individual flow path 200A is arranged from the upstream side to the downstream side with respect to the ink flow from the first common liquid chamber 101 to the second common liquid chamber 102. The first pressure chamber 12A and the first nozzle 21A are arranged in this order.

In the first individual channel 200A, ink flows from the first common liquid chamber 101 to the second common liquid chamber 102 through the first individual channel 200A. In addition, by driving the piezoelectric actuator 300, the pressure of the ink in the first pressure chamber 12A is changed, and the pressure of the ink in the first nozzle 21A is increased. Dispensed. When the ink flows from the first common liquid chamber 101 through the first individual channel 200A to the second common liquid chamber 102, the piezoelectric actuator 300 may be driven, or the first common liquid chamber 101 may flow into the first individual channel. Piezoelectric actuator 300 may be driven when ink does not flow through 200A to second common liquid chamber 102 . Ink may temporarily flow from the second common liquid chamber 102 to the first common liquid chamber 101 due to a pressure change caused by driving the piezoelectric actuator 300 .

In the present embodiment, in the first individual flow path 200A, the upstream side of the first nozzle 21A, that is, the second flow path 202 communicating with the first common liquid chamber 101, the first pressure chamber 12A, and the first pressure chamber 12A. The channel 201 is called a first upstream channel. Further, among the first individual flow paths 200A, the third flow path 203, the fourth flow path 204, and the fifth flow path 205, which communicate with the second common liquid chamber 102 on the downstream side of the first nozzle 21A, are connected to each other. 1 downstream channel.

As shown in FIG. 3, the second individual channel 200B includes a sixth channel 206, a seventh channel 207, an eighth channel 208, a second nozzle 21B, a ninth channel 209, and a second pressure chamber 12B. and a tenth channel 210 .

The sixth flow path 206 extends in the second direction Y in the in-plane direction of the nozzle surface 20 a so that one end communicates with the first common liquid chamber 101 between the first communication plate 151 and the second communication plate 152 . extended along. The sixth flow path 206 of this embodiment is formed by providing a recess in the second communication plate 152 and covering the recess with the first communication plate 151 . Of course, the sixth flow path 206 may be formed by providing a recess in the first communicating plate 151 and covering it with the second communicating plate 152, and both the first communicating plate 151 and the second communicating plate 152 You may make it provide a recessed part in. That is, the sixth flow path 206 extends in the second direction Y, which is the in-plane direction of the nozzle surface 20a, between the nozzle 21 and the first common liquid chamber 101. It corresponds to the upstream horizontal flow path described in the claims.

The sixth flow path 206 and the first pressure chamber 12A of the first individual flow path 200A are arranged at different positions in the third direction Z, which is the direction perpendicular to the nozzle surface 20a. Specifically, the first pressure chamber 12A is provided on the Z1 side of the first communication plate 151, the sixth flow path 206 is provided on the Z2 side of the first communication plate 151, and the first pressure chamber 12A and the sixth flow path 206 are arranged at different positions in the third direction Z. As shown in FIG. Therefore, even if the first pressure chamber 12A and the sixth flow path 206 are arranged close to each other in the first direction X, the thickness of the partition separating the first pressure chamber 12A is suppressed from being thinned. The deformation of the partition walls of the first pressure chambers 12A suppresses the absorption of the pressure of the ink in the first pressure chambers 12A, thereby suppressing variations in ejection characteristics. Also, the first pressure chamber 12A and the sixth flow path 206 may be arranged so that at least a portion of them overlap when viewed from the third direction Z in a plan view. Even if the first pressure chamber 12A and the sixth flow path 206 are arranged so that at least a part thereof overlaps in plan view from the third direction Z, the first pressure chamber 12A and the sixth flow path 206 are arranged at different positions in the third direction Z, the first pressure chamber 12A and the sixth flow path 206 do not communicate with each other. In addition, in the present embodiment, the sixth flow path 206 is arranged at a position that does not overlap the first pressure chamber 12A when viewed in plan from the third direction Z. As shown in FIG.

The seventh flow path 207 communicates with the sixth flow path 206 at one end on the Z1 side, and is provided to penetrate the second communication plate 152 in the third direction. That is, the seventh flow path 207 extends from the nozzle 21 to the first common liquid chamber 101 in the third direction Z, which is the direction perpendicular to the nozzle surface 20a. It corresponds to the upstream communication path described in the claims.

Here, as shown in FIGS. 5, 6 and 7, the individual flow path 200 of the present embodiment extends from the nozzle 21 to the first common liquid chamber 101 in the direction perpendicular to the nozzle surface 20a where the nozzle 21 opens. has a second flow path 202 and a seventh flow path 207 that are upstream communication paths extending in the third direction Z, and are adjacent to each other in the first direction X that is the direction in which the nozzles 21 are arranged side by side. The upstream communication paths of the flow paths 200, that is, the second flow path 202 of the first individual flow path 200A and the seventh flow path 207 of the second individual flow path 200B are arranged in the first direction in which the nozzles 21 are arranged side by side. When viewed from the direction X, it has portions that do not overlap each other. In this embodiment, the second flow path 202 and the seventh flow path 207 are arranged at positions where they do not completely overlap in the second direction Y. As shown in FIG. Of course, the second flow path 202 and the seventh flow path 207 may partially overlap when viewed from the first direction X as long as they do not completely overlap. In this manner, the second flow path 202 and the seventh flow path 207 are arranged at different positions in the second direction Y, so that they are arranged in a so-called zigzag pattern along the first direction X. .

In addition, in the present embodiment, the seventh flow path 207, which is the upstream communication path of the second individual flow path 200B, is located in the second direction Y from the second flow path 202, which is the upstream communication path of the first individual flow path 200A. are arranged so as to be on the first common liquid chamber 101 side. Therefore, the second channel 202, which is the upstream communication channel of the first individual channel 200A, and the sixth channel 206, which is the upstream horizontal channel of the second individual channel 200B, are aligned in the direction in which the nozzles 21 are arranged. They are arranged to intersect each other in plan view from a certain first direction X. The position of the seventh flow path 207 is not particularly limited to this, and the seventh flow path 207 is arranged so as to be closer to the second common liquid chamber 102 than the second flow path 202 in the second direction Y. may In this case, the second flow path 202, which is the communication path of the first individual flow path 200A, and the sixth flow path 206, which is the upstream horizontal flow path of the second individual flow path 200B, are aligned in the direction in which the nozzles 21 are arranged. Although they do not intersect in plan view from the first direction X, the flow path length of the eighth flow path 208 of the second individual flow path 200B becomes longer, which is not preferable because there is a risk that the flow path resistance increases. .

Furthermore, at least one of the second flow path 202 and the sixth flow path 206 of the present embodiment is provided so that the width in the first direction X of the mutually intersecting portion is narrower than the other portions. . In the present embodiment, the width of the portion of the sixth flow path 206 that intersects with the second flow path 202, that is, the portion that overlaps with the second flow path 202 when viewed in plan from the first direction X, is larger than that of the other portions. Also, a first narrow portion 206a having a narrow width in the first direction X is provided. Specifically, in the second direction Y, the sixth channel 206 has a first narrow portion 206a provided on the second common liquid chamber 102 side and a first narrow portion 206a provided on the first common liquid chamber 101 side. and a first wide portion 206b that is wider in the first direction X than the one narrow portion 206a. The first narrow portion 206a is provided with a length that intersects with the second flow path 202 when viewed from above in the first direction X. As shown in FIG.

Thus, by providing the first wide portion 206b in the sixth flow path 206, the flow path resistance and inertance can be reduced as compared with the case where the sixth flow path 206 is provided only with the first narrow portion 206a. Ink droplets can be ejected continuously in a short cycle by suppressing insufficient supply of ink from the first common liquid chamber 101 to the second pressure chamber 12B. In addition, since the flow path resistance and inertance of the sixth flow path 206 can be reduced, it is possible to suppress a reduction in the amount of ink circulated from the first common liquid chamber 101 to the second common liquid chamber 102. .

In this way, by arranging the second flow path 202 and the seventh flow path 207 so as to have portions that do not overlap each other in a plan view from the first direction X, the second flow paths adjacent in the first direction X The rigidity of the walls between the passages 202 and the walls between the seventh passages 207 can be improved, and the walls of the second passages 202 and the seventh passages 207 are deformed by pressure fluctuations when ink droplets are ejected. It is possible to suppress pressure absorption due to deformation of the walls of the second channel 202 and the seventh channel 207, thereby suppressing the occurrence of crosstalk due to a decrease in the rigidity of the walls. .

Incidentally, when the second flow path 202 and the seventh flow path 207 are arranged in a position where they completely overlap each other in plan view from the first direction X, the second flow path 202 and the seventh flow path 207 The wall between is thinly formed in the third direction Z, and the wall is deformed by the pressure fluctuation of the ink in the second channel 202 and the seventh channel 207, causing crosstalk. Resulting in. In addition, when the second flow path 202 and the seventh flow path 207 are arranged apart from each other in the first direction X in order to increase the rigidity of the walls of the second flow path 202 and the seventh flow path 207, the nozzle 21 are arranged at a low density in the first direction X, and the flow path substrate becomes large in the first direction X. By arranging the second flow path 202 and the seventh flow path 207 so that at least a part thereof does not overlap in a plan view from the first direction X as in the present embodiment, the second flow path 202 and the seventh flow path 207 7 flow paths 207 can be arranged relatively close to the first direction X, the rigidity of the wall can be suppressed from being lowered, and the density of the nozzles 21 can be suppressed and the size of the flow path substrate can be suppressed. can be done.

The eighth flow path 208 extends along the second direction Y in the in-plane direction of the nozzle surface 20 a so that one end communicates with the seventh flow path 207 between the second communication plate 152 and the nozzle plate 20 . is set. The eighth flow path 208 of this embodiment is formed by providing a recess in the second communication plate 152 and covering the opening of the recess with the nozzle plate 20 . Note that the eighth flow path 208 is not particularly limited to this, and a recess may be provided in the nozzle plate 20 and the recess may be covered with the second communication plate 152 . You may make it provide a recessed part in both. The eighth channel 208 constitutes part of the channel provided between the communication plate 15, which is the second channel substrate, and the nozzle plate 20, which is the third channel substrate. do. That is, between the communication plate 15 which is the second channel substrate and the nozzle plate 20 which is the third channel substrate, the third channel 203 and the eighth channel 208 are alternately arranged in the first direction X. are placed. A resolution in which the third flow path 203 and the eighth flow path 208 are alternately arranged in the first direction X is called a second resolution. The second resolution of the third flow path 203 and the eighth flow path 208 is greater than the first resolution of the first pressure chamber 12A or the second pressure chamber 12B. For example, if the first pressure chamber 12A is formed with a first resolution of 300 dpi and the second pressure chamber 12B is formed with a first resolution of 300 dpi, the third channel 203 and the eighth channel 208 are formed with a second resolution of 600 dpi. will be formed. Therefore, the first resolution of each of the first pressure chamber 12A and the second pressure chamber 12B is made smaller than the second resolution of the third flow path 203 and the eighth flow path 208, and the first pressure chamber 12A Also, the opening width of the second pressure chamber 12B in the first direction X can be widened, and the displacement volume of the pressure chamber 12 can be increased.

The ninth flow path 209 connects the communication plate 15 so that one end on the Z2 side communicates with the second nozzle 21B and the other end on the Z1 side communicates with one end side of the second direction Y of the second pressure chamber 12B. 3 are provided so as to penetrate in the direction Z. That is, the ninth flow path 209 is provided between the second pressure chamber 12B and the second nozzle 21B so as to extend in the third direction Z, which is the direction perpendicular to the nozzle surface 20a. That is, the ninth flow path 209 extends between the nozzle 21 and the second common liquid chamber 102 in the third direction Z, which is the direction perpendicular to the nozzle surface 20a. It corresponds to the downstream communication path described in the claims.

Here, the individual channel 200 of the present embodiment is a downstream communication channel extending in the third direction Z, which is the direction perpendicular to the nozzle surface 20a in which the nozzle 21 opens, between the nozzle 21 and the second common liquid chamber 102. The downstream communicating paths of the individual channels that have a fourth channel 204 and a ninth channel 209 and are adjacent to each other in the first direction X that is the direction in which the nozzles 21 are arranged side by side, that is, the first individual channel 200A and the ninth flow path 209 of the second individual flow path 200B have portions that do not overlap each other when viewed from the first direction X, which is the direction in which the nozzles 21 are arranged side by side. In this embodiment, the fourth flow path 204 and the ninth flow path 209 are arranged in positions where they do not completely overlap in the second direction Y. As shown in FIG. Of course, the fourth flow path 204 and the ninth flow path 209 may partially overlap when viewed from the first direction X as long as they do not completely overlap. In this way, the fourth flow path 204 and the ninth flow path 209 are arranged at different positions in the second direction Y, so that they are arranged in a so-called zigzag pattern along the first direction X. .

Further, in the present embodiment, the fourth channel 204, which is the downstream communication path of the first individual channel 200A, is located in the second direction Y from the ninth channel 209, which is the downstream communication channel of the second individual channel 200B. are arranged so as to be on the first common liquid chamber 101 side. Therefore, the ninth channel 209, which is the downstream communication channel of the second individual channel 200B, and the fifth channel 205, which is the downstream horizontal channel of the first individual channel 200A, are aligned in the direction in which the nozzles 21 are arranged. They are arranged to intersect each other in plan view from a certain first direction X. The position of the fourth flow path 204 is not particularly limited to this, and the fourth flow path 204 is arranged so as to be closer to the second common liquid chamber 102 than the ninth flow path 209 in the second direction Y. may In this case, the ninth flow path 209, which is the communication path of the second individual flow path 200B, and the fifth flow path 205, which is the downstream horizontal flow path of the first individual flow path 200A, are aligned in the direction in which the nozzles 21 are arranged. Although they do not intersect in plan view from the first direction X, the channel length of the third channel 203 of the first individual channel 200A becomes longer, which is not preferable because there is a possibility that the channel resistance increases. .

Furthermore, at least one of the ninth flow path 209 and the fifth flow path 205 of the present embodiment is provided so that the width in the first direction X of the mutually intersecting portion is narrower than the other portions. . In the present embodiment, the portion of the fifth channel 205 that intersects with the ninth channel 209, that is, the portion that overlaps with the ninth channel 209 when viewed in plan from the first direction X is narrower than the other portions. I made it so that Specifically, in the second direction Y, the fifth channel 205 has a second narrow portion 205a provided on the first common liquid chamber 101 side and a second narrow portion 205a provided on the second common liquid chamber 102 side. and a second wide portion 205b having a width in the direction X of 1 that is wider than the second narrow portion 205a. The second narrow portion 205a is provided with a length that intersects with the ninth flow path 209 when viewed in plan from the first direction X. As shown in FIG.

Thus, by providing the second wide portion 205b in the fifth flow path 205, the flow path resistance and inertance can be reduced as compared with the case where the fifth flow path 205 is provided only with the second narrow portion 205a. Therefore, ink droplets can be ejected continuously in a short cycle by suppressing insufficient supply of ink from the second common liquid chamber 102 to the first pressure chamber 12A. Also, by reducing the flow path resistance and inertance of the fifth flow path 205, it is possible to suppress a reduction in the amount of ink circulated from the first common liquid chamber 101 to the second common liquid chamber .

In this manner, by arranging the fourth flow path 204 and the ninth flow path 209 so as to have portions that do not overlap each other in plan view from the first direction X, fourth flow paths adjacent in the first direction X The rigidity of the walls between the channels 204 and the walls between the ninth channels 209 can be improved, and the walls of the fourth channel 204 and the walls of the ninth channel 209 are deformed by pressure fluctuations when ink droplets are ejected. It is possible to suppress pressure absorption due to deformation of the walls of the fourth channel 204 and the ninth channel 209, thereby suppressing the occurrence of crosstalk due to a decrease in the rigidity of the walls. .

Incidentally, if the fourth flow path 204 and the ninth flow path 209 are arranged in a position where they completely overlap each other in plan view from the first direction X, the fourth flow path 204 and the ninth flow path 209 is thinly formed in the third direction Z, and the wall is deformed due to the pressure fluctuation of the ink in the fourth channel 204 and the ninth channel 209, causing crosstalk. Resulting in. Further, in order to increase the rigidity of the walls of the fourth flow path 204 and the ninth flow path 209, when the fourth flow path 204 and the ninth flow path 209 are arranged at positions separated from each other in the first direction X, the nozzle 21 are arranged at a low density in the first direction X, and the flow path substrate becomes large in the first direction X. By arranging the fourth flow path 204 and the ninth flow path 209 so that at least a part thereof does not overlap in a plan view from the first direction X as in the present embodiment, the fourth flow path 204 and the ninth flow path 209 Even if the 9 channels 209 are arranged relatively close to the first direction X, it is possible to suppress a decrease in the rigidity of the wall, and to suppress a decrease in the density of the nozzles 21 and an increase in the size of the channel substrate. can be done.

The second pressure chamber 12B is provided in the flow path forming substrate 10 as described above. A part of the side opening is covered with a communicating plate 15 . Such a second pressure chamber 12B is arranged at a different position in the second direction Y from the first pressure chamber 12A of the first individual channel 200A, and when viewed in plan from the first direction X, The first pressure chamber 12A and the second pressure chamber 12B are provided at positions that do not overlap each other. Such a second pressure chamber 12B is formed in the first direction X with a first resolution, like the first pressure chamber 12A.

Further, the second pressure chamber 12B and the fifth channel 205 of the first individual channel 200A are arranged at different positions in the third direction Z, which is the direction perpendicular to the nozzle surface 20a. Specifically, the second pressure chamber 12B is provided on the Z1 side of the first communication plate 151, the fifth flow path 205 is provided on the Z2 side of the first communication plate 151, and the second pressure chamber 12B and the fifth flow path 205 are arranged at different positions in the third direction Z. As shown in FIG. Therefore, even if the second pressure chamber 12B and the fifth flow path 205 are arranged close to each other in the first direction X, the thickness of the partition separating the second pressure chamber 12B is suppressed from being thinned. It is possible to suppress variations in discharge characteristics due to pressure absorption caused by deformation of the partition wall of the second pressure chamber 12B. Further, the second pressure chamber 12B and the fifth flow path 205 may be arranged so that at least a part of them overlap when viewed from the third direction Z in a plan view. Even if the second pressure chamber 12B and the fifth flow path 205 are arranged so that at least a part thereof overlaps in plan view from the third direction Z, the second pressure chamber 12B and the fifth flow path 205 are are arranged at different positions in the third direction Z, the second pressure chamber 12B and the fifth flow path 205 do not communicate with each other. In addition, in the present embodiment, the fifth flow path 205 is arranged at a position that does not overlap the second pressure chamber 12B in plan view from the third direction Z. As shown in FIG.

The second nozzle 21B communicates with the end of the ninth flow path 209 on the Z2 side, and is provided to communicate with the outside by opening at the nozzle surface 20a on the Z2 side of the nozzle plate 20 .

The tenth flow path 210 communicates between the second pressure chamber 12B and the second common liquid chamber 102, and one end on the Z1 side communicates with the other end in the second direction Y of the second pressure chamber 12B. , Z2 side communicates with the second communication portion 17 constituting the second common liquid chamber 102, and penetrates the first communication plate 151 in the third direction Z. As shown in FIG.

In this manner, the second individual flow path 200B is composed of a sixth flow path 206, a seventh flow path 207, a sixth flow path 207, and a sixth flow path 207 in order from the upstream side communicating with the first common liquid chamber 101 to the downstream side communicating with the second common liquid chamber . An eighth channel 208, a second nozzle 21B, a ninth channel 209, a second pressure chamber 12B and a tenth channel 210 are provided. That is, in the present embodiment, as shown in FIG. 4, the second individual flow path 200B is arranged from the upstream side to the downstream side with respect to the ink flow from the first common liquid chamber 101 to the second common liquid chamber 102. The second nozzle 21B and the second pressure chamber 12B are arranged in this order. That is, in the first individual flow path 200A and the second individual flow path 200B, the order of the pressure chambers 12 and the nozzles 21 with respect to the flow of ink from the first common liquid chamber 101 to the second common liquid chamber 102 is different. are arranged as In the present embodiment, each individual flow path 200 is provided with one pressure chamber 12 and one nozzle 21 , so the first individual flow path 200A and the second individual flow path 200B are separated from each other by the pressure chamber 12 and the nozzle 21 . are arranged in reverse order.

In the second individual channel 200B, ink flows from the first common liquid chamber 101 to the second common liquid chamber 102 through the second individual channel 200B. Further, by driving the piezoelectric actuator 300, the pressure of the ink in the second pressure chamber 12B is changed to increase the pressure in the second nozzle 21B, thereby ejecting ink droplets from the second nozzle 21B to the outside. be. When the ink flows from the first common liquid chamber 101 through the second individual channel 200B to the second common liquid chamber 102, the piezoelectric actuator 300 may be driven, or the first common liquid chamber 101 may flow from the first common liquid chamber 101 to the second individual channel. Piezoelectric actuator 300 may be driven when ink does not flow through 200B to second common liquid chamber 102 . Ink may temporarily flow from the second common liquid chamber 102 to the first common liquid chamber 101 due to a pressure change caused by driving the piezoelectric actuator 300 . Incidentally, ejection of ink droplets from the second nozzles 21B is determined by the pressure of the ink inside the second nozzles 21B. The pressure of the ink in the second nozzle 21B is the pressure of the ink flowing from the first common liquid chamber 101 toward the second common liquid chamber 102, that is, the so-called circulation pressure, and the drive of the piezoelectric actuator 300. to the second nozzle 21B.

For example, with respect to the flow of ink from the first common liquid chamber 101 to the second common liquid chamber 102, the ink pressure fluctuation in the second pressure chamber 12B causes the ink to flow from the second pressure chamber 12B toward the second nozzle 21B. may flow back and ink droplets may be ejected from the second nozzle 21B. In this way, the reverse flow of ink from the second pressure chamber 12B toward the second nozzle 21B means that the circulation pressure from the first common liquid chamber 101 to the second common liquid chamber 102 is small. By making the circulation pressure relatively small, the pressure loss in the individual flow paths 200 can be reduced. By reducing the pressure loss in the individual flow paths 200, the difference in pressure loss between the individual flow paths 200 can be reduced. can be reduced.

Further, for example, with respect to the flow of ink from the first common liquid chamber 101 to the second common liquid chamber 102, the pressure fluctuation of the ink in the second pressure chamber 12B causes the ink to flow from the second pressure chamber 12B to the second nozzle 21B. The ink may be ejected from the second nozzle 21B without causing the ink to flow back. In this case, since ink does not flow from the second pressure chamber 12B toward the second nozzle 21B, air bubbles are less likely to flow back from the second pressure chamber 12B toward the second nozzle 21B. Ink droplet ejection failure is less likely to occur.

In the present embodiment, in the second individual flow channel 200B, the sixth flow channel 206, the seventh flow channel 207, and the eighth flow channel 207 communicate with the first common liquid chamber 101 on the upstream side of the second nozzle 21B. The channel 208 is called a second upstream channel. Further, among the second individual flow paths 200B, the ninth flow path 209, the second pressure chamber 12B, and the tenth flow path 210, which are connected to the downstream side of the second nozzle 21B, that is, the second common liquid chamber 102, are connected to each other. It is called a second downstream flow path.

Such first individual flow paths 200A and second individual flow paths 200B are alternately arranged in the first direction X as shown in FIG. That is, with respect to the flow of ink from the first common liquid chamber 101 to the second common liquid chamber 102 , regardless of the positions of the pressure chambers 12 and the nozzles 21 , the pressure fluctuations in the pressure chambers 12 cause the ink droplets to be ejected from the nozzles 21 . can be discharged. That is, even if the first pressure chamber 12A is arranged upstream and the first nozzle 21A is arranged downstream like the first individual channel 200A, the second nozzle 21B is arranged upstream like the second individual channel 200B. Even if the second pressure chamber 12B is arranged downstream, ink droplets can be selectively ejected from both the first nozzle 21A and the second nozzle 21B by the pressure fluctuation of the ink inside the pressure chamber 12B. Therefore, as described above, with respect to the flow of ink from the first common liquid chamber 101 to the second common liquid chamber 102, the first individual flow path 200A and the second individual flow path 200A in which the order of the pressure chambers 12 and the nozzles 21 are different. By alternately arranging the flow paths 200B in the first direction X, the positions of the pressure chambers 12 are changed between the first individual flow paths 200A and the second individual flow paths 200B, that is, the first pressure chambers 12A and the second pressure chambers 12A and 200B are changed. The two pressure chambers 12B can be arranged at different positions in the second direction Y. Therefore, the pressure chambers 12 of each individual channel 200 can be formed wide in the first direction X, and the pressure chambers 12 can be arranged in the first direction X at high density. That is, by arranging the first pressure chamber 12A and the second pressure chamber 12B at different positions in the second direction Y, the partition wall between the first pressure chambers 12A arranged side by side in the first direction X is thickened. In addition, the partition walls of the second pressure chambers 12B arranged side by side in the first direction X can be thickened. Therefore, even if the first pressure chamber 12A and the second pressure chamber 12B are formed wide in the first direction X, it is possible to suppress a decrease in the rigidity of the partition wall, thereby improving the displacement volume and the ink droplets. The ejection characteristics, that is, the weight of the ink droplets can be increased, and the occurrence of crosstalk due to the decrease in the rigidity of the partition wall can be suppressed. In addition, even if the first pressure chambers 12A and the second pressure chambers 12B are arranged in the first direction X at high density, it is possible to suppress the decrease in the rigidity of the partition wall, and the rigidity of the partition wall is reduced. The occurrence of crosstalk due to this can be suppressed.

Incidentally, for example, when only the first individual flow paths 200A are arranged side by side in the first direction X without providing the second individual flow paths 200B, the first pressure chambers 12A are densely arranged in the first direction X. As a result, the thickness of the partition between the adjacent first pressure chambers 12A becomes thin, and the rigidity of the partition decreases. When the rigidity of the partition wall is lowered in this manner, crosstalk occurs due to deformation of the partition wall. That is, when ink droplets are simultaneously ejected from the nozzles 21 on both sides of the nozzles 21 for ejecting ink droplets, pressure is applied to the partition wall between the adjacent first pressure chambers 12A from both sides at the same timing. In this case, pressure is applied to the partition wall from both sides regardless of the rigidity of the partition wall, so that the partition wall is difficult to deform. On the other hand, when ink droplets are not ejected from the nozzles 21 on both sides of the nozzles 21 that eject ink droplets, pressure is applied to only one side of the partition wall between the adjacent first pressure chambers 12A. At this time, if the rigidity of the partition wall is low, the partition wall deforms and absorbs pressure fluctuations, thereby deteriorating the ejection characteristics of ink droplets. Therefore, the ejection characteristics of the ink droplets vary due to the difference in the conditions for ejecting the ink droplets from any of the plurality of nozzles 21 . Therefore, when only the first pressure chamber 12A is provided, the first pressure chamber 12A cannot be formed wide in the first direction X, and the first pressure chamber 12A cannot be widened in the first direction X. Cannot be placed in high density.

In this embodiment, the first pressure chamber 12A and the second pressure chamber 12B are arranged at different positions in the second direction Y, so that the space between the first pressure chambers 12A adjacent in the first direction X is The thickness of the partition can be relatively thick, and the thickness of the partition between the second pressure chambers 12B adjacent in the first direction X can be relatively thick. Therefore, even if the first pressure chamber 12A and the second pressure chamber 12B are formed wide in the first direction X, the rigidity of the partition between the first pressure chamber 12A and the partition between the second pressure chamber 12B is It is possible to suppress the decrease. Therefore, the volume of the first pressure chamber 12A and the second pressure chamber 12B can be increased by suppressing an increase in the size of the flow path substrate in the first direction X, and the volume excluded by driving the piezoelectric actuator 300 can be increased. By increasing the size, it is possible to improve the ejection characteristics of the ink droplets, particularly the weight of the ink droplets, and to suppress the occurrence of crosstalk due to the decrease in the rigidity of the partition walls.

Even if the distance between the first pressure chamber 12A and the second pressure chamber 12B is shortened in the first direction X, the rigidity of the partition between the first pressure chamber 12A and the partition between the second pressure chamber 12B is Since the decrease can be suppressed, the first pressure chambers 12A and the second pressure chambers 12B can be arranged in the first direction X with high density. Therefore, it is possible to reduce the size of the flow path substrate in the first direction X, improve the displacement volume of the pressure chambers 12 to improve ink droplet ejection characteristics, and increase the density of the pressure chambers 12 in the first direction X. In this way, the nozzles 21 can be arranged at a high density, and the occurrence of crosstalk due to a decrease in the rigidity of the partition wall can be suppressed.

Further, in the present embodiment, the first nozzle 21A is placed at a position where one end communicates with the other end of the second flow path 202, which is the first communication path along the third direction Z and communicates with the first pressure chamber 12A. are placed. For this reason, the cross-sectional area of the second flow path 202 from the first pressure chamber 12A to the first nozzle 21A is made relatively large, the flow path resistance of the second flow path 202 is made small, and the liquid is discharged from the first nozzle 21A. The weight of the ink droplet applied can be increased.

Similarly, in the present embodiment, the position where the second nozzle 21B communicates with the other end of the eighth flow path 208, which is the second communication path along the third direction Z, one end of which communicates with the second pressure chamber 12B. are placed in For this reason, the cross-sectional area of the eighth flow path 208 from the second pressure chamber 12B to the second nozzle 21B is made relatively large to reduce the flow path resistance of the eighth flow path 208, thereby discharging from the second nozzle 21B. The weight of the ink droplet applied can be increased.

That is, in this embodiment, the first nozzle 21A and the second nozzle 21B are connected to the second nozzle 21A so that the first nozzle 21A and the second nozzle 21B directly communicate with the second flow path 202 and the eighth flow path 208, respectively. By arranging the nozzles 21 at different positions in the direction Y and staggering the nozzles 21 in the first direction X, the weight of the ink droplets ejected from the first nozzles 21A and the second nozzles 21B can be increased. can.

Of course, the first nozzle 21A may be arranged so as to communicate with the middle of the third flow path 203, and the second nozzle 21B may be arranged so as to communicate with the middle of the seventh flow path 207. 203 and the seventh flow path 207 are restricted by the thickness of the communicating plate 15 in the third direction Z, and the cross-sectional area of the flow path, particularly the height in the third direction Z, is restricted. The flow path resistance of the third flow path 203 and the seventh flow path 207 tends to be greater than that of the flow path 202 and the eighth flow path 208 . Therefore, the weight of the ink droplets ejected from the first nozzle 21A and the second nozzle 21B may become relatively small.

In the present embodiment, the flow resistance of the upstream flow path on the first common liquid chamber 101 side of the nozzle 21 of the individual flow path 200 and the flow resistance of the downstream flow path on the second common liquid chamber 102 side of the nozzle 21 The road resistance is set to be the same.

That is, the channel resistance of the first upstream channel and the channel resistance of the first downstream channel of the first individual channel 200A are the same. That is, the total flow path resistance of the first flow path 201, the first pressure chamber 12A, and the second flow path 202 that constitute the first upstream flow path, the third flow path 203 that constitutes the first downstream flow path, and the The total flow path resistance of the 4th flow path 204 and the 5th flow path 205 is formed to be the same flow path resistance. Here, the channel resistance between the first upstream channel and the first downstream channel is determined by the cross-sectional area across the channels, the channel length, and the shape.

Further, the second upstream channel and the second downstream channel of the second individual channel 200B have the same channel resistance. That is, the total flow path resistance of the sixth flow path 206, the seventh flow path 207, and the eighth flow path 208 constituting the second upstream flow path, the ninth flow path 209, the second pressure chamber 12B, and the tenth flow The total channel resistance of the channels 210 is formed to be the same.

In this embodiment, the first individual flow path 200A and the second individual flow path 200B have shapes that are opposite to each other with respect to the direction in which the ink flows from the first common liquid chamber 101 to the second common liquid chamber 102. It has become. That is, the first upstream channel of the first individual channel 200A and the second downstream channel of the second individual channel 200B are provided to have the same shape and the same channel resistance. The first downstream channel of the channel 200A and the second upstream channel of the second individual channel 200B are provided to have the same shape and the same channel resistance.

In this way, the first upstream channel and the first downstream channel of the first individual channel 200A have the same channel resistance, and the second upstream channel and the second downstream channel of the second individual channel 200B have the same channel resistance. By setting the flow path resistance to be the same, the first individual flow path 200A and the second individual flow path 200B are reversed with respect to the direction in which the ink flows from the first common liquid chamber 101 to the second common liquid chamber 102. Even with such a shape, the flow path resistance of the first upstream flow path from the first common liquid chamber to the nozzle 21 and the flow path resistance of the second upstream flow path can be made uniform. Therefore, it is possible to suppress variations in ejection characteristics between the ink droplets ejected from the first nozzles 21A of the first individual channel 200A and the ink droplets ejected from the second nozzles 21B of the second individual channel 200B. In addition, the structure of the channel can be simplified.

Also, by matching the flow path resistance between the first downstream flow path of the first individual flow path 200A and the second downstream flow path of the second individual flow path 200B, the ejection characteristics of the ink droplets ejected from the nozzles 21 are made uniform. be able to. That is, when ink droplets are ejected simultaneously from a plurality of nozzles 21, ink is supplied to the pressure chamber 12 from both the first common liquid chamber 101 and the second common liquid chamber 102. By setting the flow path resistance to be the same for the two downstream flow paths, it is possible to suppress variations in the amount of ink supplied, thereby suppressing variations in the ejection characteristics of ink droplets.

Incidentally, for example, when the first upstream channel and the first downstream channel of the first individual channel 200A have different channel resistances, when the first individual channel 200A is reversed to form the second individual channel 200B, Furthermore, since the first downstream channel of the first individual channel 200A becomes the second upstream channel of the second individual channel 200B, the first upstream channel from the first common liquid chamber 101 to the nozzle 21 and the second The channel resistance will be different in the upstream channel. For this reason, the ejection characteristics of the ink droplets ejected from the first nozzles 21A of the first individual flow paths 200A and the second nozzles 21B of the second individual flow paths 200B vary. In order to make the first upstream flow path and the second upstream flow path have the same flow path resistance, the second upstream flow path must be formed with a cross-sectional area, flow path length, shape, etc. different from those of the first downstream flow path. It must be done and it is complicated.

In addition, when ink is flowing from the first common liquid chamber 101 to the second common liquid chamber 102 via the individual flow path 200 and no ink droplets are ejected from the nozzles 21 , the nozzles 21 are arranged in parallel. The ink pressure difference relative to the atmospheric pressure in the nozzles 21 of the individual channels 200 adjacent in the first direction X is preferably -2% or more and +2% or less. For example, when the atmospheric pressure is 1013 hPa, the pressure inside the nozzle 21 is approximately 1000 hPa. Therefore, the maximum pressure difference between the inks in the adjacent nozzles 21 is about 20 hPa.

In this way, during non-ejection, the difference between the ink pressure in the first nozzles 21A adjacent in the first direction X and the ink pressure in the second nozzles 21B is set to −2% or more and +2% or less. By making it relatively small, it is possible to suppress variations in the ejection characteristics of the ink droplets ejected from the first nozzles 21A and the ink droplets ejected from the second nozzles 21B. Thus, in order to relatively reduce the difference between the ink pressure in the first nozzles 21A and the ink pressure in the second nozzles 21B, the flow path from the first common liquid chamber 101 to the first nozzles 21A is The resistance and the flow path resistance from the first common liquid chamber 101 to the second nozzle 21B must be matched so that the ink pressure difference in the nozzle 21 is -2% or more and +2% or less. The pressure difference between the flow path resistance from the first common liquid chamber 101 to the first nozzle 21A and the flow path resistance from the first common liquid chamber 101 to the second nozzle 21B is -2%. As described above, in the case of forming +2% or less, the first individual flow path 200A and the second individual flow path 200B have the same shape and are reversed to each other with respect to the direction of ink flow. The first pressure chamber 12A and the second pressure chamber 12B can be arranged at different positions in the second direction Y by simplifying the structure of the flow path 200 .

Also, the flow path resistance between the first upstream flow path and the first downstream flow path, the flow path resistance between the second upstream flow path and the second downstream flow path, and the two nozzles adjacent in the first direction X The pressure differential of the ink within 21 is not limited to that described above. For example, when the flow path resistance between the first upstream flow path and the first downstream flow path and the flow path resistance between the second upstream flow path and the second downstream flow path are different, or when the flow resistance in the first nozzle 21A The ink pressure and the ink pressure in the second nozzle 21B may be less than -2% or greater than +2%. In such a case, different voltages may be applied to the piezoelectric actuators 300 of the individual channels 200 adjacent in the direction in which the nozzles 21 are arranged.

For example, in the case of a structure in which the first individual channel 200A and the second individual channel 200B are inverted, when the channel resistance of the first upstream channel is greater than that of the first downstream channel, the first nozzle 21A The pressure of the ink inside becomes smaller, and the weight of the ink droplet ejected from the first nozzle 21A becomes smaller. On the other hand, in the case of the structure in which the first individual channel 200A and the second individual channel 200B are inverted, the channel resistance of the second upstream channel is smaller than the channel resistance of the second downstream channel. As a result, the ink pressure in the second nozzle 21B becomes smaller. Therefore, the weight of the ink droplet ejected from the second nozzle 21B is increased. Therefore, the voltage applied to the piezoelectric actuators 300 corresponding to the first individual flow paths 200A is set relatively higher than the voltage applied to the piezoelectric actuators 300 corresponding to the second individual flow paths 200B. In order to make the voltage applied to the piezoelectric actuator 300 corresponding to the first individual channel 200A relatively larger than the voltage applied to the piezoelectric actuator 300 corresponding to the second individual channel 200B, for example, the first The voltage applied to the piezoelectric actuator 300 corresponding to the individual channel 200A may be increased, or the voltage applied to the piezoelectric actuator 300 corresponding to the second individual channel 200B may be decreased. Both may be performed with respect to the reference voltage. As a result, even if there is a relatively large difference between the ink pressure in the first nozzle 21A and the ink pressure in the second nozzle 21B, by adjusting the voltage applied to the piezoelectric actuator 300, the first nozzle Print quality can be improved by reducing variations in the weight of ink droplets ejected from the second nozzles 21A and 21B.

As described above, in the ink jet recording head 1, which is an example of the liquid jet head of the present embodiment, the flow path substrate in which the flow path is formed and the pressure change in the ink, which is the liquid in the flow path, are provided. and a piezoelectric actuator 300 which is an energy generating element. A plurality of individual channels 200 through which liquid flows from the first common liquid chamber 101 toward the second common liquid chamber 102 are included. and the second flow path, which is an upstream communication path extending in the third direction Z, which is the direction perpendicular to the nozzle surface 20a in which the nozzle 21 opens, between the pressure chamber 12 where the pressure is generated and the first common liquid chamber 101. 202 and a seventh flow channel 207, which are the first individual flow channel 200A and the second individual flow channel 200B, which are adjacent individual flow channels 200 in the first direction X, which is the direction in which the nozzles 21 are arranged side by side. The channel 202 and the seventh channel 207 have portions that do not overlap each other when viewed from the first direction X in plan.

In this way, by arranging the second flow path 202 and the seventh flow path 207 so as to have portions that do not overlap each other in a plan view from the first direction X, the second flow paths adjacent in the first direction X The rigidity of the walls between the passages 202 and the walls between the seventh passages 207 can be improved, and the walls of the second passages 202 and the seventh passages 207 are deformed by pressure fluctuations when ink droplets are ejected. It is possible to suppress pressure absorption due to deformation of the walls of the second channel 202 and the seventh channel 207, thereby suppressing the occurrence of crosstalk due to a decrease in the rigidity of the walls. .

Incidentally, when the second flow path 202 and the seventh flow path 207 are arranged in a position where they completely overlap each other in plan view from the first direction X, the second flow path 202 and the seventh flow path 207 The wall between is thinly formed in the third direction Z, and the wall is deformed by the pressure fluctuation of the ink in the second channel 202 and the seventh channel 207, causing crosstalk. Resulting in. In addition, when the second flow path 202 and the seventh flow path 207 are arranged apart from each other in the first direction X in order to increase the rigidity of the walls of the second flow path 202 and the seventh flow path 207, the nozzle 21 are arranged at a low density in the first direction X, and the flow path substrate becomes large in the first direction X. By arranging the second flow path 202 and the seventh flow path 207 so that at least a part thereof does not overlap in a plan view from the first direction X as in the present embodiment, the second flow path 202 and the seventh flow path 207 7 flow paths 207 can be arranged relatively close to the first direction X, the rigidity of the wall can be suppressed from being lowered, and the density of the nozzles 21 can be suppressed and the size of the flow path substrate can be suppressed. can be done.

In addition, in the recording head 1 of the present embodiment, the second individual flow channel 200B, which is one of the two individual flow channels 200 adjacent in the first direction X, which is the parallel direction, has the in-plane direction of the nozzle surface 20a. and intersects the second channel 202, which is an upstream communication channel of the first individual channel 200A, which is the other individual channel, in plan view from the first direction X At least one of the second flow path 202 and the sixth flow path 206 has a sixth flow path 206 that is an upstream horizontal flow path, and at the intersection of the second flow path 202 and the sixth flow path 206, The width in the first direction X is narrower than other portions.

In the present embodiment, by providing the first narrow width portion 206a and the first wide width portion 206b in the sixth flow path 206, the ink supply failure from the first common liquid chamber 101 to the second pressure chamber 12B is suppressed. Therefore, ink droplets can be ejected in a short cycle. Also, by reducing the flow path resistance and inertance of the sixth flow path 206, it is possible to suppress a decrease in the amount of ink circulated from the first common liquid chamber 101 to the second common liquid chamber .

Of course, the sixth flow path 206 may be provided with the same width in the first direction X over the second direction Y. FIG.

Further, in the recording head 1 of the present embodiment, the individual flow path 200 is a downstream communication path extending in the third direction Z, which is the direction perpendicular to the nozzle surface 20a, between the nozzles 21 and the second common liquid chamber 102. It further has a certain fourth flow channel 204 and a ninth flow channel 209, and the first individual flow channel 200A and the second individual flow channel 200B which are adjacent individual flow channels in the first direction X which is the side-by-side arrangement direction. The 4th channel 204 and the 9th channel 209 have portions that do not overlap each other when viewed from the first direction X in plan.

In this way, by arranging the fourth flow path 204 and the ninth flow path 209 so as to have portions that do not overlap each other in plan view from the first direction X, fourth flow paths adjacent in the first direction X The rigidity of the walls between the channels 204 and the walls between the ninth channels 209 can be improved, and the walls of the fourth channel 204 and the walls of the ninth channel 209 are deformed by pressure fluctuations when ink droplets are ejected. It is possible to suppress pressure absorption due to deformation of the walls of the fourth channel 204 and the ninth channel 209, thereby suppressing the occurrence of crosstalk due to a decrease in the rigidity of the walls. .

Incidentally, if the fourth flow path 204 and the ninth flow path 209 are arranged in a position where they completely overlap each other in plan view from the first direction X, the fourth flow path 204 and the ninth flow path 209 is thinly formed in the third direction Z, and the wall is deformed due to the pressure fluctuation of the ink in the fourth channel 204 and the ninth channel 209, causing crosstalk. Resulting in. Further, in order to increase the rigidity of the walls of the fourth flow path 204 and the ninth flow path 209, when the fourth flow path 204 and the ninth flow path 209 are arranged at positions separated from each other in the first direction X, the nozzle 21 are arranged at a low density in the first direction X, and the flow path substrate becomes large in the first direction X. By arranging the fourth flow path 204 and the ninth flow path 209 so that at least a part thereof does not overlap in a plan view from the first direction X as in the present embodiment, the fourth flow path 204 and the ninth flow path 209 Even if the 9 channels 209 are arranged relatively close to the first direction X, it is possible to suppress a decrease in the rigidity of the wall, and to suppress a decrease in the density of the nozzles 21 and an increase in the size of the channel substrate. can be done.

In addition, in the recording head 1 of the present embodiment, the first individual flow channel 200A, which is one of the two individual flow channels 200 adjacent in the first direction X, which is the side-by-side direction, has an in-plane direction of the nozzle surface 20a. and intersects the fifth channel 205, which is the downstream communication channel of the first individual channel 200A, which is the other individual channel, in plan view from the first direction X. At least one of the fifth channel 205 and the ninth channel 209 has a ninth channel 209 which is a downstream horizontal channel, and at the intersection of the fifth channel 205 and the ninth channel 209, The width in the first direction X is narrower than other portions.

In this embodiment, by providing the second narrow portion 205a and the second wide portion 205b in the fifth flow path 205, the flow path resistance and inertance of the fifth flow path 205 can be reduced. Ink droplets can be ejected continuously in a short cycle by suppressing the ink supply failure from the common liquid chamber 102 to the first pressure chamber 12A. Further, by reducing the flow path resistance and inertance of the fifth flow path 205, it is possible to suppress a decrease in the amount of ink circulated from the first common liquid chamber 101 to the second common liquid chamber .

Of course, the fifth flow path 205 may be provided with the same width in the first direction X over the second direction Y.

In this embodiment, the nozzle plate 20 and the compliance substrate 49 are provided separately, but the present invention is not particularly limited to this. For example, the nozzle plate 20 may be provided with a size that covers the openings of the first common liquid chamber 101 and the second common liquid chamber 102, and the compliance portion 494 may be provided on a part of the nozzle plate 20. FIG. The nozzle plate 20 provided with such a compliance portion 494 can be manufactured from a resin film such as polyimide or a metal material with a stainless steel ridge.

When the compliance portion 494 is provided in a part of the nozzle plate 20 in this manner, the nozzle plate 20 covers the openings of the first common liquid chamber 101 and the second common liquid chamber 102. A nozzle plate 20 covers between the common liquid chamber 101 and the nozzle 21 and between the second common liquid chamber 102 and the nozzle 21 . Therefore, a ninth flow path 209 and a tenth flow path, which are part of the individual flow paths 200 communicating with the first common liquid chamber 101 and the second common liquid chamber 102, are formed at the joint interface between the nozzle plate 20 and the communication plate 15. 210 and the like can be formed. By forming the ninth channel 209 and the tenth channel 210, which are part of the individual channels 200, at the joint interface between the nozzle plate 20 and the communicating plate 15, the communicating plate 15 is formed by laminating a plurality of substrates. It is possible to manufacture with one substrate without the need to manufacture it as a single substrate.

(Embodiment 2)
FIG. 8 is a perspective view from the Z2 side showing the flow path of an ink jet recording head which is an example of a liquid jet head according to Embodiment 2 of the present invention, and FIG. 9 is a main part of the recording head of this embodiment. 7 is a cross-sectional view along line FF' of FIG. 6. FIG. In addition, the same code|symbol is attached|subjected to the member similar to embodiment mentioned above, and the overlapping description is abbreviate|omitted.

As in the first embodiment described above, the first common liquid chamber 101 and the second common liquid chamber 101 and the second common liquid It has a chamber 102 and a plurality of individual channels 200 .

In addition, the individual channel 200 has a first individual channel 200A and a second individual channel 200B.

The first individual flow path 200A includes a first flow path 201, a first pressure chamber 12A, a second flow path 202 that is an upstream communication path, a first nozzle 21A, a third flow path 203, and a fourth flow that is a downstream communication path. Channel 204 has a fifth channel 205 which is a downstream horizontal channel.

The second individual flow path 200B includes a sixth flow path 206 as an upstream horizontal flow path, a seventh flow path 207 as an upstream communication path, an eighth flow path 208, a second nozzle 21B, and a ninth flow as a downstream communication path. It has a channel 209 , a second pressure chamber 12B and a tenth channel 210 .

As shown in FIGS. 8 and 9, the second channel 202, which is the upstream communication channel of the first individual channel 200A, and the sixth channel 206, which is the upstream horizontal channel of the second individual channel 200B, They are arranged so as to intersect each other when viewed from above in the first direction X, which is the direction in which the nozzles 21 are arranged side by side.

At least one of the second flow path 202 and the sixth flow path 206 is provided so that the width in the first direction X of the mutually intersecting portion is narrower than the other portions.

The sixth flow path 206 has a first narrow portion 206a and a first wide portion 206b, as in the first embodiment described above. That is, the sixth channel 206 has a first narrow portion 206a at the portion where it intersects with the second channel 202 .

In addition, the portion of the second flow path 202 that intersects with the sixth flow path 206, that is, the portion that overlaps with the sixth flow path 206 when viewed in plan from the first direction X, is arranged in the first direction more than the other portions. A third narrow portion 202a with a narrower width of X is provided. Specifically, the second flow path 202 includes a third wide portion 202b wider in the first direction X than the third narrow portion 202a on the Z1 side of the third narrow portion 202a, and a third wide portion 202b. A fourth wide portion 202c having a wider width in the first direction X than the third narrow portion 202a is provided on the Z2 side of the narrow portion 202a.

By thus providing the third wide portion 202b and the fourth wide portion 202c in the second flow path 202, the flow path resistance and inertance of the second flow path 202 can be reduced. Even if they are arranged at a high density, the ejection characteristics of ink droplets, particularly the weight of ink droplets, can be increased. In addition, since the flow path resistance and inertance of the second flow path 202 can be reduced, it is possible to suppress a decrease in the amount of ink circulated from the first common liquid chamber 101 to the second common liquid chamber 102. .

Further, by providing the first wide portion 206b in the sixth flow path 206, the flow path resistance and inertance can be reduced compared to the case where the sixth flow path 206 is provided only with the first narrow portion 206a. Ink droplets can be ejected continuously in a short cycle by suppressing insufficient supply of ink from the first common liquid chamber 101 to the second pressure chamber 12B. In addition, since the flow path resistance and inertance of the sixth flow path 206 can be reduced, it is possible to suppress a reduction in the amount of ink circulated from the first common liquid chamber 101 to the second common liquid chamber 102. .

Similarly, the ninth channel 209, which is the downstream communication channel of the second individual channel 200B, and the fifth channel 205, which is the downstream horizontal channel of the first individual channel 200A, are aligned in the direction in which the nozzles 21 are arranged. They are arranged so as to intersect when viewed from a certain first direction X in plan.

At least one of the ninth flow path 209 and the fifth flow path 205 is provided so that the width in the first direction X of the mutually intersecting portion is narrower than the other portions.

The fifth flow path 205 has a second narrow portion 205a and a second wide portion 205b, as in the first embodiment described above. That is, the fifth channel 205 has a second narrow portion 205a at the portion where it intersects with the ninth channel 209 .

In addition, the portion of the ninth flow path 209 that intersects the fifth flow path 205, that is, the portion that overlaps with the fifth flow path 205 when viewed in plan from the first direction X, is arranged in the first direction more than the other portions. A fourth narrow portion 209a with a narrower width of X is provided. Specifically, the fifth flow path 205 includes a fifth wide portion 209b wider in the first direction X than the fourth narrow portion 209a on the Z1 side of the fourth narrow portion 209a, and a fourth narrow portion 209b. A sixth wide portion 209c having a wider width in the first direction X than the fourth narrow portion 209a is provided on the Z2 side of the narrow portion 209a.

Thus, by providing the fifth wide portion 209b and the sixth wide portion 209c in the ninth flow path 209, the flow path resistance and inertance of the ninth flow path 209 can be reduced. Even if they are arranged at a high density, the ejection characteristics of ink droplets, particularly the weight of ink droplets, can be increased. Moreover, since the flow path resistance and inertance of the ninth flow path 209 can be reduced, it is possible to suppress a decrease in the amount of ink circulated from the first common liquid chamber 101 to the second common liquid chamber 102 . .

In addition, by providing the second wide portion 205b in the fifth flow path 205, the flow path resistance and inertance can be reduced compared to the case where the fifth flow path 205 is provided only with the second narrow portion 205a. Ink droplets can be ejected continuously in a short period by suppressing insufficient supply of ink from the second common liquid chamber 102 to the first pressure chamber 12A. Also, by reducing the flow path resistance and inertance of the fifth flow path 205, it is possible to suppress a reduction in the amount of ink circulated from the first common liquid chamber 101 to the second common liquid chamber .

As described above, in the ink jet recording head 1, which is an example of the liquid jet head of the present embodiment, the flow path substrate in which the flow path is formed and the pressure change in the ink, which is the liquid in the flow path, are provided. and a piezoelectric actuator 300 which is an energy generating element. A plurality of individual channels 200 through which liquid flows from the first common liquid chamber 101 toward the second common liquid chamber 102 are included. and the second flow path, which is an upstream communication path extending in the third direction Z, which is the direction perpendicular to the nozzle surface 20a in which the nozzle 21 opens, between the pressure chamber 12 where the pressure is generated and the first common liquid chamber 101. 202 and a seventh flow channel 207, which are the first individual flow channel 200A and the second individual flow channel 200B, which are adjacent individual flow channels 200 in the first direction X, which is the direction in which the nozzles 21 are arranged side by side. The channel 202 and the seventh channel 207 have portions that do not overlap each other when viewed from the first direction X in plan.

In this way, by arranging the second flow path 202 and the seventh flow path 207 so as to have portions that do not overlap each other in a plan view from the first direction X, the second flow paths adjacent in the first direction X The rigidity of the walls between the passages 202 and the walls between the seventh passages 207 can be improved, and the walls of the second passages 202 and the seventh passages 207 are deformed by pressure fluctuations when ink droplets are ejected. It is possible to suppress pressure absorption due to deformation of the walls of the second channel 202 and the seventh channel 207, thereby suppressing the occurrence of crosstalk due to a decrease in the rigidity of the walls. .

Incidentally, when the second flow path 202 and the seventh flow path 207 are arranged in a position where they completely overlap each other in plan view from the first direction X, the second flow path 202 and the seventh flow path 207 The wall between is thinly formed in the third direction Z, and the wall is deformed by the pressure fluctuation of the ink in the second channel 202 and the seventh channel 207, causing crosstalk. Resulting in. In addition, when the second flow path 202 and the seventh flow path 207 are arranged apart from each other in the first direction X in order to increase the rigidity of the walls of the second flow path 202 and the seventh flow path 207, the nozzle 21 are arranged at a low density in the first direction X, and the flow path substrate becomes large in the first direction X. By arranging the second flow path 202 and the seventh flow path 207 so that at least a part thereof does not overlap in a plan view from the first direction X as in the present embodiment, the second flow path 202 and the seventh flow path 207 7 flow paths 207 can be arranged relatively close to the first direction X, the rigidity of the wall can be suppressed from being lowered, and the density of the nozzles 21 can be suppressed and the size of the flow path substrate can be suppressed. can be done.

In addition, in the recording head 1 of the present embodiment, the second individual flow channel 200B, which is one of the two individual flow channels 200 adjacent in the first direction X, which is the parallel direction, has the in-plane direction of the nozzle surface 20a. and intersects the second channel 202, which is an upstream communication channel of the first individual channel 200A, which is the other individual channel, in plan view from the first direction X At least one of the second flow path 202 and the sixth flow path 206 has a sixth flow path 206 that is an upstream horizontal flow path, and at the intersection of the second flow path 202 and the sixth flow path 206, The width in the first direction X is narrower than other portions.

In this embodiment, both the first narrow portion 206a and the third narrow portion 202a are provided in both the sixth flow path 206 and the second flow path 202 .

By providing the first narrow portion 206a and the first wide portion 206b in the sixth flow path 206 in this manner, the flow path resistance and inertance of the sixth flow path 206 can be reduced. Ink droplets can be ejected continuously in a short cycle by suppressing the ink supply failure from the chamber 101 to the second pressure chamber 12B. In addition, since the flow path resistance and inertance of the sixth flow path 206 can be reduced, it is possible to suppress a reduction in the amount of ink circulated from the first common liquid chamber 101 to the second common liquid chamber 102. .

Further, by providing the third narrow portion 202a, the third wide portion 202b, and the fourth wide portion 202c in the second flow path 202, the flow path resistance and inertance of the second flow path 202 can be reduced. Even if the first nozzles 21A are arranged at a high density, the ejection characteristics of the ink droplets, particularly the weight of the ink droplets, can be increased. In addition, since the flow path resistance and inertance of the second flow path 202 can be reduced, it is possible to suppress a decrease in the amount of ink circulated from the first common liquid chamber 101 to the second common liquid chamber 102. .

Of course, only the second channel 202 may be provided with the third narrow portion 202a, and the sixth channel 206 may be provided with the same width in the first direction X over the second direction Y. .

Further, in the recording head 1 of the present embodiment, the individual flow path 200 is a downstream communication path extending in the third direction Z, which is the direction perpendicular to the nozzle surface 20a, between the nozzles 21 and the second common liquid chamber 102. It further has a certain fourth flow channel 204 and a ninth flow channel 209, and the first individual flow channel 200A and the second individual flow channel 200B which are adjacent individual flow channels in the first direction X which is the side-by-side arrangement direction. The 4th channel 204 and the 9th channel 209 have portions that do not overlap each other when viewed from the first direction X in plan.

In this way, by arranging the fourth flow path 204 and the ninth flow path 209 so as to have portions that do not overlap each other in plan view from the first direction X, fourth flow paths adjacent in the first direction X The rigidity of the walls between the channels 204 and the walls between the ninth channels 209 can be improved, and the walls of the fourth channel 204 and the walls of the ninth channel 209 are deformed by pressure fluctuations when ink droplets are ejected. It is possible to suppress pressure absorption due to deformation of the walls of the fourth channel 204 and the ninth channel 209, thereby suppressing the occurrence of crosstalk due to a decrease in the rigidity of the walls. .

Incidentally, if the fourth flow path 204 and the ninth flow path 209 are arranged in a position where they completely overlap each other in plan view from the first direction X, the fourth flow path 204 and the ninth flow path 209 is thinly formed in the third direction Z, and the wall is deformed due to the pressure fluctuation of the ink in the fourth channel 204 and the ninth channel 209, causing crosstalk. Resulting in. Further, in order to increase the rigidity of the walls of the fourth flow path 204 and the ninth flow path 209, when the fourth flow path 204 and the ninth flow path 209 are arranged at positions separated from each other in the first direction X, the nozzle 21 are arranged at a low density in the first direction X, and the flow path substrate becomes large in the first direction X. By arranging the fourth flow path 204 and the ninth flow path 209 so that at least a part thereof does not overlap in a plan view from the first direction X as in the present embodiment, the fourth flow path 204 and the ninth flow path 209 Even if the 9 channels 209 are arranged relatively close to the first direction X, it is possible to suppress a decrease in the rigidity of the wall, and to suppress a decrease in the density of the nozzles 21 and an increase in the size of the channel substrate. can be done.

In addition, in the recording head 1 of the present embodiment, the first individual flow channel 200A, which is one of the two individual flow channels 200 adjacent in the first direction X, which is the side-by-side direction, has an in-plane direction of the nozzle surface 20a. and intersects the fifth channel 205, which is the downstream communication channel of the first individual channel 200A, which is the other individual channel, in plan view from the first direction X. At least one of the fifth channel 205 and the ninth channel 209 has a ninth channel 209 which is a downstream horizontal channel, and at the intersection of the fifth channel 205 and the ninth channel 209, The width in the first direction X is narrower than other portions.

In this embodiment, both the fifth channel 205 and the ninth channel 209 are provided with the second narrow portion 205a and the fourth narrow portion 209a.

By providing the second narrow width portion 205a and the second wide width portion 205b in this way, the flow resistance and inertance of the fifth flow path 205 can be reduced. Ink droplets can be ejected continuously in a short cycle by suppressing the ink supply failure to the first pressure chamber 12A. Further, by reducing the flow path resistance and inertance of the fifth flow path 205, it is possible to suppress a decrease in the amount of ink circulated from the first common liquid chamber 101 to the second common liquid chamber .

Further, by providing the fourth narrow portion 209a, the fifth wide portion 209b, and the sixth wide portion 209c in the ninth flow path 209, the flow path resistance and inertance of the ninth flow path 209 can be reduced. Even if the second nozzles 21B are arranged at a high density, it is possible to increase the ejection characteristics of the ink droplets, especially the weight of the ink droplets. Moreover, since the flow path resistance and inertance of the ninth flow path 209 can be reduced, it is possible to suppress a decrease in the amount of ink circulated from the first common liquid chamber 101 to the second common liquid chamber 102 . .

Of course, only the ninth channel 209 may be provided with the fourth narrow portion 209a, and the third channel 203 may be provided with the same width in the first direction X over the second direction Y. .

(Other embodiments)
Although each embodiment of the present invention has been described above, the basic configuration of the present invention is not limited to the above.

Further, in each of the above-described embodiments, the configuration in which the first nozzle 21A and the second nozzle 21B are arranged at different positions in the second direction Y has been exemplified. and the second nozzle 21B may be arranged at the same position in the second direction Y, that is, the nozzle 21 may be arranged on a straight line along the first direction X. That is, in order to provide the first nozzle 21A and the second nozzle 21B at the same position in the second direction Y, the first nozzle 21A is provided at a position communicating with the middle of the third flow path 203, and the second nozzle 21B is provided. It may be provided at a position communicating with the middle of the eighth flow path 208 . Of course, even if the first nozzle 21A and the second nozzle 21B are arranged at different positions in the second direction Y, the first nozzle 21A is provided at a position communicating with the middle of the third flow path 203, You may make it provide the 2nd nozzle 21B in the position which connects in the middle of the 8th flow path 208. FIG.

By arranging the first nozzle 21A and the second nozzle 21B at relatively close positions in the second direction Y in this way, ink droplets ejected from the first nozzle 21A and the second nozzle 21B generate By suppressing mutual influence of turbulence, it is possible to suppress deviation in the flight direction of ink droplets due to turbulence. In addition, by arranging the plurality of nozzles 21 in a straight line in the first direction X, there is no need to adjust the timing of ejecting ink droplets from each nozzle 21 so as to be shifted, which simplifies drive control of the piezoelectric actuator 300. can do.

Further, in each of the above-described embodiments, the configuration in which two rows of the first pressure chambers 12A and the rows of the second pressure chambers 12B are provided, one row each, is exemplified. Two or more rows of the first pressure chambers 12A may be provided, and two or more rows of the second pressure chambers 12B may be provided.

Further, in each of the above-described embodiments, the configuration in which one nozzle 21 and one pressure chamber 12 are provided in each individual channel 200 is illustrated, but the number of nozzles 21 and pressure chambers 12 is not particularly limited, Two or more nozzles 21 may be provided for one pressure chamber 12 , and two or more pressure chambers 12 may be provided for one nozzle 21 . However, from the nozzles 21 provided in one individual channel 200, ink droplets are simultaneously ejected in one ejection cycle. In other words, even if a plurality of nozzles 21 are provided in one individual flow path 200, the plurality of nozzles 21 either eject ink droplets at the same time or do not eject ink droplets at the same time. . In other words, in a configuration in which a plurality of nozzles 21 are provided in one individual channel 200, ejection and non-ejection of ink droplets from the plurality of nozzles 21 need only be performed at the same time.

Further, in each of the above-described embodiments, the flow path substrate includes the flow path forming substrate 10, the communication plate 15, the nozzle plate 20, the compliance substrate 49, the case member 40, etc., but the flow path substrate is particularly limited to this. Instead, the channel substrate may be a single substrate, or a laminate of two or more substrates. For example, the channel substrate may include the channel forming substrate 10 and the nozzle plate 20, and may not include the communication plate 15, the compliance substrate 49, and the case member 40. Further, one pressure chamber 12 may be formed by a plurality of flow path forming substrates 10, or the pressure chambers 12, the first common liquid chamber 101 and the second common liquid chamber 102 may be formed in the flow path forming substrate 10. may

Further, in each of the above-described embodiments, the thin-film type piezoelectric actuator 300 is used as an energy generating element that causes a pressure change in the pressure chamber 12, but the present invention is not limited to this, and for example, a green sheet may be attached. A thick-film type piezoelectric actuator formed by a method such as the above, and a vertical vibration type piezoelectric actuator that alternately laminates a piezoelectric material and an electrode forming material and expands and contracts in the axial direction can be used. Also, as an energy generating element, a heating element is placed in the pressure chamber, and droplets are ejected from a nozzle by bubbles generated by heat generated by the heating element, or static electricity is generated between the diaphragm and the electrode, A so-called electrostatic actuator or the like can be used, which deforms a diaphragm by electrostatic force and discharges liquid droplets from nozzle openings.

Here, an example of an ink jet recording apparatus, which is an example of the liquid ejecting apparatus of the present embodiment, will be described with reference to FIG. Note that FIG. 10 is a diagram showing a schematic configuration of the ink jet recording apparatus of the present invention.

As shown in FIG. 10, in an ink jet recording apparatus I, which is an example of a liquid ejecting apparatus, a plurality of recording heads 1 are mounted on a carriage 3 . A carriage 3 on which the recording head 1 is mounted is provided axially movably on a carriage shaft 5 attached to an apparatus main body 4 . In this embodiment, the moving direction of the carriage 3 is the second direction Y. As shown in FIG.

Further, the apparatus main body 4 is provided with a tank 2 which is a storage means in which ink is stored as a liquid. The tank 2 is connected to the recording head 1 via a supply pipe 2a such as a tube, and ink from the tank 2 is supplied to the recording head 1 via the supply pipe 2a. The recording head 1 and the tank 2 are connected via a discharge pipe 2b such as a tube, and the ink discharged from the recording head 1 is returned to the tank 2 via the discharge pipe 2b. will be Note that the tank 2 may be composed of a plurality of tanks.

The driving force of the driving motor 7 is transmitted to the carriage 3 via a plurality of gears (not shown) and a timing belt 7a, so that the carriage 3 on which the recording head 1 is mounted is moved along the carriage shaft 5. FIG. On the other hand, the apparatus main body 4 is provided with a transport roller 8 as transport means, and the transport roller 8 transports a recording sheet S, which is an ejection receiving medium such as paper. The conveying means for conveying the recording sheet S is not limited to the conveying roller 8, and may be a belt, a drum, or the like. In this embodiment, the conveying direction of the recording sheet S is the first direction X. As shown in FIG.

In the above-described ink jet recording apparatus I, the recording head 1 is mounted on the carriage 3 and moves in the main scanning direction, but is not limited to this. The present invention can also be applied to a so-called line-type recording apparatus that prints by simply moving a recording sheet S such as paper in the sub-scanning direction.

Further, when the ink is circulated between the tank 2 and the recording head 1 as in the second embodiment described above, a discharge pipe connecting the tank 2 and the recording head 1 is provided, and the ink from the recording head 1 is It may be returned to the tank 2 through the discharge pipe.

In each embodiment, an ink jet recording head is used as an example of a liquid ejecting head, and an ink jet recording apparatus is used as an example of a liquid ejecting apparatus. , and can of course be applied to a liquid ejecting head or a liquid ejecting apparatus that ejects a liquid other than ink. Other liquid jet heads include, for example, various recording heads used in image recording apparatuses such as printers, coloring material jet heads used in manufacturing color filters such as liquid crystal displays, organic EL displays, and FEDs (field emission displays). and an electrode material ejection head used for electrode formation, and a bioorganic material ejection head used for bio-chip manufacturing.

I... Inkjet recording apparatus (liquid ejecting apparatus), 1... Inkjet recording head (liquid ejecting head), 2... Tank, 2a... Supply pipe, 2b... Discharge pipe, 3... Carriage, 4... Apparatus main body, 5... Carriage Shaft 7 Drive motor 7a Timing belt 8 Conveying roller 10 Flow path forming substrate 12 Pressure chamber 12A First pressure chamber 12B Second pressure chamber 15 Communication plate 16 First communicating portion 17 Second communicating portion 20 Nozzle plate 20a Nozzle surface 21 Nozzle 21A First nozzle 21B Second nozzle 22A First nozzle row 22B Second nozzle Column 30 Protective substrate 31 Piezoelectric actuator holding portion 32 Through hole 40 Case member 41 First liquid chamber 42 Second liquid chamber 43 Inlet 44 Outlet 45... Connection port 49... Compliance substrate 50... Diaphragm 60... First electrode 70... Piezoelectric layer 80... Second electrode 90... Lead electrode 101... First common liquid chamber 102... Second Common liquid chamber 120 Flexible cable 121 Drive circuit 151 First communication plate 152 Second communication plate 200 Individual channel 200A First individual channel 200B Second individual channel 201... First channel, 202... Second channel, 202a... Third narrow part, 202b... Third wide part, 202c... Fourth wide part, 203... Third channel, 204... Fourth channel, 205... Fifth channel, 205a... Second narrow part, 205b... Second wide part, 206... Sixth channel, 206a... First narrow part, 206b... First wide part, 207... Seventh channel , 208... 8th channel, 209... 9th channel, 209a... 4th narrow portion, 209b... 5th wide portion, 209c... 6th wide portion, 210... 10th channel, 300... piezoelectric actuator, 491 Sealing film 492 Fixed substrate 493 Opening 494 Compliance section 494A First compliance section 494B Second compliance section S Recording sheet X First direction Y Second second direction, Z... third direction

Claims (5)

A channel substrate having a channel formed thereon, and an energy generating element for causing a pressure change in the liquid in the channel,
The flow path communicates with a first common liquid chamber, a second common liquid chamber, and the first common liquid chamber and the second common liquid chamber to extend from the first common liquid chamber to the second common liquid chamber. a plurality of discrete channels toward which liquid flows;
The individual flow path includes a nozzle that communicates with the outside, a pressure chamber in which pressure changes are caused by the energy generating element, and a direction perpendicular to the nozzle surface where the nozzle opens between the nozzle and the first common liquid chamber. and an upstream communication path extending to
The liquid jet head according to claim 1, wherein the upstream communication paths of the individual flow paths that are adjacent to each other in the direction in which the nozzles are arranged have portions that do not overlap each other when viewed in plan from the direction in which the nozzles are arranged. One of the two individual flow paths adjacent in the juxtaposition direction is provided with a nozzle extending in the in-plane direction of the nozzle surface so as to be the upstream connection of the other individual flow path in plan view from the juxtaposition direction. having an upstream horizontal flow path intersecting the passage,
At the portion where the upstream communication path and the upstream horizontal flow path intersect, at least one of the upstream communication path and the upstream horizontal flow path has a narrower width in the direction in which the nozzles are arranged than other portions. 2. The liquid jet head according to claim 1, wherein the liquid jet head comprises: the individual flow path further includes a downstream communication path extending in a direction perpendicular to the nozzle surface between the nozzle and the second common liquid chamber;
3. The liquid according to claim 1, wherein the downstream communication paths of the individual flow paths adjacent in the juxtaposition direction have portions that do not overlap each other when viewed in plan from the juxtaposition direction. injection head. In one of the two individual flow paths adjacent in the juxtaposition direction, the downstream connection of the other individual flow path in plan view from the juxtaposition direction is provided extending in the in-plane direction of the nozzle surface. having a downstream horizontal channel that intersects the passageway,
At the portion where the downstream communication path and the downstream horizontal flow path intersect, at least one of the downstream communication path and the downstream horizontal flow path has a narrower width in the side-by-side direction than the other portions. 4. The liquid jet head according to claim 3, characterized in that: A liquid ejecting apparatus comprising the liquid ejecting head according to any one of claims 1 to 4.

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