CN104069904A - Preparation method for ultraviolet photoetching technique-based cloth micro fluidic chip - Google Patents
Preparation method for ultraviolet photoetching technique-based cloth micro fluidic chip Download PDFInfo
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Abstract
The invention discloses a preparation method for an ultraviolet photoetching technique-based cloth micro fluidic chip. The preparation method for the ultraviolet photoetching technique-based cloth micro fluidic chip comprises the following steps: 1. PVC photoresist is prepared; 2. cloth pieces are pretreated; 3.a mask is designed; 4. the cloth pieces are uniformly coated with the PVC photoresist; after the prebaking, the cloth pieces are placed on a piece carrying platform; the mask is aligned, so as to conduct ultraviolet exposure; after the post baking, then, the gummed cloth pieces are placed into butanone for development; the gummed cloth pieces are placed into acetone for rinse; after the gummed cloth pieces are rinsed by purified water, the SDS solution is adopted to wash the gummed cloth pieces; the gummed cloth pieces are subject to the rinse of purified water again; after drying, the cloth micro fluidic chip is obtained. Compared with the pattern wax molding method and the textile method processing, the preparation method for the ultraviolet photoetching technique-based cloth micro fluidic chip can process hydrophobic regions and hydrophilic regions with high resolution factors on the cloth micro fluidic chip; the width of the hydrophilic channel on the cloth base micro fluidic chip is as low as 500 micron; the width of a drainage dam is as low as 100 micron; the flux is high; the accuracy is high; the processing efficiency and detection efficiency are high.
Description
Technical field
The invention belongs to analyzing and testing field, be specifically related to a kind of fabricbase micro-fluidic chip, particularly a kind of fabricbase micro-flow control chip preparation method based on ultraviolet photolithographic technology.
Background technology
Early 1990s, the concept of micro-full analytical system (Micro total analysis systems, μ-TAS) is proposed first, and is developed rapidly in two more than ten years after this, becomes one of technology of current forefront.The object of μ-TAS is analytical equipment microminiaturization, integrated, namely the function of traditional experiment chamber is integrated on the chip of heart size, the microminiaturization of Realization analysis equipment, portability, thereby break the long-term general layout that relies on traditional laboratory investigations of scientific analysis, make analytical equipment can come into huge numbers of families.μ-TAS has the features such as sample size is few, detection speed is fast, flux is high, cost is low, make it have more advantage than traditional analysis system, therefore being subject to countries in the world scientific research personnel greatly pays close attention to, under the effort of large quantities of researchers, this field has obtained unprecedented development, and has obtained great achievement.
Micro-fluidic chip is to best embody the function of assay laboratory is transferred to the parts on chip in μ-TAS development.Microfluidic chip analysis is taking chip as operating platform, completes the function of whole assay laboratory, comprises sampling, dilution, application of sample, mixing, separation, detection etc.
At present, many researchers use the materials such as silicon, glass, high molecular polymer to prepare micro-fluidic chip for base material.The features such as silicon has good heat dissipation, intensity is large, purity is high and corrosion-resistant, and have benefited from ripe microelectronic technique, silicon materials are used to the making of micro-fluidic chip first, in the accurate manufacture of the devices such as Micropump, micro-valve, micro-mould, are used widely.The advantages such as glass has that intensity is high, good heat dissipation, light transmission are strong, good insulating, make it can manufacture microchannel network, are generally well suited for sample analysis.Macromolecule polymer material has the advantage such as the machine-shaping of being easy to and batch production, is also often used to the manufacture of micro-fluidic chip.
The materials such as above-mentioned silicon, glass, high molecular polymer have advantage separately on manufacturing, and can produce powerful micro-fluidic chip.But, because the factors such as their costs are high, complicated operation are difficult for being widely accepted use.
For meeting the market requirement, researcher starts to find that some costs are low, bio-compatibility good, tractable material is as the base material of micro-fluidic chip.Paper has possessed these characteristics, makes it promptly cause the very big concern of researcher, and paper substrate micro-fluidic chip has obtained unprecedented development, and has obtained great achievement.
In recent years, researcher has started to attempt adopting cloth to prepare micro-fluidic chip as base material.Cloth material has possessed the nearly all advantage of paper material, and the pliability of himself, braiding diversity, make it in some specific applied environments, there is great application potential.But up to the present, the preparation method of fabricbase micro-fluidic chip mainly contains pattern wax mould method and weaving method.But the shortcoming of these two kinds of methods is that the accuracy of manufacture is low, complexity is high, is difficult to high flux detection etc.
Summary of the invention
In order to overcome the defect of existing fabricbase micro-flow control chip preparation method, primary and foremost purpose of the present invention is to provide a kind of fabricbase micro-flow control chip preparation method based on ultraviolet photolithographic technology, and the method adopts the PVC photoresist of autogamy, and its technique is simple, cost is low.
Another object of the present invention is to provide the fabricbase being made by said method micro-fluidic chip, this chip is easy to processing, flux is high, microfluid passage resolution ratio is high.
The application of the fabricbase micro-fluidic chip that a further object of the present invention is to provide above-mentioned in analyzing and testing, above-mentioned fabricbase micro-fluidic chip can be realized the high flux of glucose in urine sample is detected.
Object of the present invention is achieved through the following technical solutions:
A fabricbase micro-flow control chip preparation method based on ultraviolet photolithographic technology, comprises the steps:
(1) preparation polyvinyl cinnamate (PVC) photoresist
5-50%PVC is dissolved in 49.0-94.9% cyclohexanone, stirs evenly, then add 0.1-1.0%5-nitro acenaphthene, stir evenly, obtain polyvinyl cinnamate photoresist (PVC photoresist), transfer in brown bottle, lucifuge is placed stand-by; Described percentage is the percentage that each raw material accounts for photoresist raw material gross mass;
Preferably, the consumption of PVC accounts for 15%, and the consumption that the consumption of cyclohexanone accounts for 84.7%, 5-nitro acenaphthene accounts for 0.3%, and described percentage is the percentage that each raw material accounts for photoresist raw material gross mass;
The component ratio of PVC photoresist will be determined according to the characteristic of different cloth base materials.It is different that different cloth base materials is manufactured the required photoresist performance of micro-fluidic chip, so should prepare corresponding PVC photoresist.The major parameter that affects photoresist performance has solid content, speed, viscosity, solidification temperature, pin hole rate, resolution ratio etc., and therefore different PVC photoresist preparations can directly affect fabricbase micro-fluidic chip quality.Cloth base material of the present invention is textile pieces of cloth, therefore in PVC photoresist, adds 5-nitro acenaphthene to improve its speed: without the photoresist wavelength photoreceptor of 5-nitro acenaphthene, as 380nm, having the photoresist wavelength photoreceptor scope of 5-nitro acenaphthene is 260～470nm.In addition, in order to manufacture high-resolution micro-fluidic chip on pure cotton cloth base material, corresponding viscosity and the solid content that increases PVC photoresist.
(2) pieces of cloth pretreatment
Textile pieces of cloth are soaked to 5min in 20%NaOH solution, after taking-up, clean with pure water, then pieces of cloth are tightened to apply tension force; Enough (can play cleaning action) lauryl sodium sulfate (SDS) washing for textile pieces of cloth after tightening, clear water rinse, and make pieces of cloth surface clean clean; Then, with in 1% glacial acetic acid solution and pieces of cloth on residual a small amount of NaOH, finally with clear water clean, dry;
(3) design of mask
Design the mask pattern of fabricbase micro-fluidic chip by Adobe Illustrator CS4 software; The ai file of printing mask pattern with professional laser printer, obtains exposure mask;
Described mask pattern has determined the distribution of hydrophilic region in chip, has determined detection method and the detection efficiency of chip more simultaneously;
The invention provides following several preferred mask pattern:
The base unit of A, mask pattern is a geometric figure; This mask pattern has determined that on chip, sample introduction district and detection zone are with a region, as shown in Figure of description Fig. 3 of the present invention, Fig. 4 a;
The base unit of B, mask pattern is two geometric figures, therebetween by line and curve connection; This mask pattern has determined on chip that sample introduction district and detection zone are zoness of different, are communicated with by microchannel, as shown in Figure of description Fig. 2 of the present invention, Fig. 4 b therebetween;
The base unit of C, mask pattern is a complicated stream, and this complexity stream is connected by the lines geometric figure large with by multiple little geometric figures, between these little geometric figures, does not connect; This mask pattern has determined that chip Shang Shiyige sample introduction district is communicated with several detection zones, and this is conducive to improve detection efficiency, as shown in Figure of description Fig. 5 of the present invention, Fig. 6;
The base unit of D, mask pattern is two or more in A, B or C;
Described geometric figure can be more than one in circle, triangle, rectangle or star;
Mask design must have alignment mark, does not have alignment mark can cause being difficult to aiming at or aiming at inaccuracy on large-scale integrated, and perhaps this can directly make chip prepare unsuccessfully.In addition, at all dislocation may cause multiple functional unit dislocation in fabricbase micro-fluidic chip, directly causes disabler or reports an error.This often shows as mistaken diagnosis in medical diagnostic applications, mistake is examined.
(4) fabricbase micro-fluidic chip ultraviolet photolithographic processing (as shown in Figure 1)
Pretreated pieces of cloth are unsettled to be tightened, and PVC photoresist is evenly applied on pieces of cloth; Gluing pieces of cloth, at 80 DEG C of baking 20min, complete front baking; After cooling, pieces of cloth are positioned over to slide glass platform, mask alignment, 3min exposes under 400W uv-exposure system; After exposure, gluing pieces of cloth are toasted to 2min, baking after completing at 95 DEG C; After cooling, gluing pieces of cloth are put in butanone, rock and soak 3min, complete development; Then, put it in acetone and rock and soak 1min, complete rinsing; After this, with purified rinse water, then use 3%SDS solution washing, again use purified rinse water, guarantee micro-fluidic chip is totally settled accounts; Finally, pieces of cloth, at 65 DEG C of baking 15min, are then taken out to pieces of cloth at room temperature cooling, obtain fabricbase micro-fluidic chip.
The fabricbase micro-fluidic chip being made by said method can be applied in analyzing and testing, especially can be applied in the high flux detection of glucose in urine sample.
The present invention has following advantage and effect with respect to prior art:
1, in method of the present invention, pieces of cloth pretreatment is an extremely important part, directly affects micro-fluidic chip and manufactures success.Pieces of cloth pretreatment is clean in order to ensure substrate surface on the one hand, for PVC photoresist is cured on cloth base material better on the other hand, improve the adsorption capacity of cloth base material to photoresist, thereby the resolution ratio of fabricbase micro-fluidic chip is improved, performance is more stable, possess certain analyzing and testing ability, reach the basic demand of micro-fluidic chip.In the preprocessing process of pure cotton cloth base material, NaOH immersion treatment can make textile cotton fiber helical structure wreck, cross section increases, longitudinal contraction, the natural hydrophobic wax in surface is removed, capillary wetability improves, thereby causes cotton fibers adsorption ability to strengthen, for PVC photoresist solidifies the condition that provides more favourable on pure cotton cloth.
2,, in method of the present invention, the functional unit of fabricbase micro-fluidic chip can be determined by the mask pattern of Adobe Illustrator CS4 Software for Design, and prepare respective chip by ultraviolet photolithographic technology.But, existing pattern wax-pattern rule is first with Software for Design functional unit pattern, shift wax by laser cutting machine cutting pattern wax-pattern, last heating pattern wax-pattern again and complete chip manufacturing to cloth, existing method has wax melting process, so be difficult to obtain high-resolution chip; In addition, laser cutting wax-pattern efficiency is low, cost is high.
3,, when existing weaving legal system is made fabricbase micro-fluidic chip, its each different units needs professional software person to design corresponding mechanical movement sequence controlled machine to complete the weaving of corresponding fabricbase micro-fluidic chip.More complicated chip manufacturing needs mechanization degree higher, and machine-building cost is higher, and its resolution ratio is also subject to braided wire thickness and Weaving method impact.Thereby chip design complicated and changeable is to be difficult to realize for weaving method.And ultraviolet photolithographic legal system of the present invention makes fabricbase micro-fluidic chip and only need designed mask pattern, and rely on ultraviolet photolithographic technical system just can produce complicated high-resolution micro-fluidic chip.
4, than pattern wax mould method, the processing of weaving method, this preparation method can process high-resolution hydrophobic region and hydrophilic area on fabricbase micro-fluidic chip, on chip, hydrophilic channel width is low to moderate 500 microns, and hydrophobic dam width degree is low to moderate 100 microns, and high flux, precision are high, processing detection efficiency is high.
5, this method is prepared low, simple to operate, the easy degradation treatment of fabricbase micro-fluidic chip cost, can be widely used in the fields such as biology, analytical chemistry and medical science detection.
Brief description of the drawings
Fig. 1 is the schematic diagram of fabricbase micro-fluidic chip ultraviolet photolithographic process in the inventive method.
Fig. 2 is mask pattern and experimental result picture related in embodiment 1.
Fig. 3 is mask pattern, fabricbase micro-fluidic chip pictorial diagram and experimental result picture related in embodiment 2.
The glucose colorimetric detection result figure of Fig. 4 based on fabricbase micro-fluidic chip; Wherein, Fig. 4 a is that sample introduction district and detection zone share a reaction tank; Fig. 4 b be sample introduction district and detection zone in chip zones of different, they connect by a microchannel.
Fig. 5 has the fabricbase micro-fluidic chip figure of complicated stream in batches.
Fig. 6 is the enlarged drawing of single complicated stream in the fabricbase micro-fluidic chip of Fig. 5; Wherein, 1-microchannel, 2-sample introduction district, 3-detection zone.
Detailed description of the invention
Below in conjunction with embodiment and accompanying drawing, the present invention is described in further detail, but embodiments of the present invention are not limited to this.
Embodiment 1
A fabricbase micro-flow control chip preparation method based on ultraviolet photolithographic technology, comprises the steps:
(1) preparation polyvinyl cinnamate (PVC) photoresist
15%PVC is dissolved in 84.7% cyclohexanone, stirs evenly, then add 0.3%5-nitro acenaphthene, stir evenly, obtain polyvinyl cinnamate photoresist (PVC photoresist), transfer in brown bottle, lucifuge is placed stand-by; Described percentage is the percentage that each raw material accounts for photoresist raw material gross mass;
(2) fabricbase micro-fluidic chip processing
(a) mask fabrication: with the mask pattern (as shown in Figure 2 a) of Adobe Illustrator CS4 Software for Design fabricbase micro-fluidic chip microchannel width resolution ratio, black part is shading light part (hydrophilic region on corresponding fabricbase micro-fluidic chip), white portion is light transmission part (hydrophobic region on corresponding fabricbase micro-fluidic chip), preserves the ai file that generates mask; The ai file of printing mask with professional laser printer, is made into exposure mask.
(b) pure cotton cloth pretreatment: pure cotton cloth plate substrate is cut into bulk by design specification, block pieces of cloth take out and rinse well soak 5min in 20%NaOH solution after; Pieces of cloth are tightened the enough lauryl sodium sulfate of rear use (SDS) solution washing, and rinse well; Spray 1% glacial acetic acid solution on pieces of cloth to neutralize residual a small amount of NaOH, after rinsing well, be put in the air dry oven of 65 DEG C of preheatings and dry, obtain pretreatment cloth base material.
(c) pretreated cloth ultraviolet photolithographic forms hydrophobic, hydrophilic region (as shown in Figure 1)
1) tighten unsettled pretreated pieces of cloth, PVC photoresist is applied on pieces of cloth equably;
2) gluing pieces of cloth are put in the air dry oven of 80 DEG C of preheatings, and baking 20min, completes front baking;
3) after cooling, pieces of cloth are positioned on slide glass platform to alignment mask;
4) 3min that exposes under 400W uv-exposure system;
5) after exposure, pieces of cloth are put in the air dry oven of 95 DEG C of preheatings and toast 2min, baking after completing;
6) after cooling, pieces of cloth are put in butanone, soak and rock 3min, complete development;
7) after development, pieces of cloth are put in acetone, soak and rock 1min, complete rinsing;
8) after rinsing, rinse pieces of cloth with lot of pure water, then use 3%SDS solution washing, again rinse with lot of pure water;
9) pieces of cloth are put in the air dry oven of 65 DEG C of preheatings to baking 15min; After dry, take out, and at room temperature cooling, obtain fabricbase micro-fluidic chip.
(3) evaluation of fabricbase micro-fluidic chip microchannel width resolution ratio
(a) 0.5 gram of carmine food dye is dissolved in 30 milliliters of 1 × PBS, fully stirs, leave standstill, thereby obtain test solution;
(b) the large circle of black in Fig. 2 a is the sample introduction district of corresponding chip, and what the large circle of black was connected with black small circular is called microchannel.From sample introduction district, add the carmine test solution of 0.5 microlitre, obtain the test result (as shown in Figure 2 b) of fabricbase micro-fluidic chip microchannel width resolution ratio, the width of the numeral passage in Fig. 2 a.As can be seen from the figure on the fabricbase micro-fluidic chip based on ultraviolet photolithographic technology, minimal channel width is 500 microns.
Embodiment 2
A fabricbase micro-flow control chip preparation method based on ultraviolet photolithographic technology, except there being below special explanation, other steps and material be all identical with embodiment 1.
Several hydrophobic dam width degree are set in preparation process on same fabricbase micro-fluidic chip and study its resolution ratio, design mask as shown in Figure 3 a, what black part was corresponding is the hydrophilic region on fabricbase micro-fluidic chip, and what white portion was corresponding is the hydrophobic region on fabricbase micro-fluidic chip.The width on the hydrophobic dam of textual representation respective column of Fig. 3 a below.
For hydrophobic region, the white square ring width of all peripheries is 300 microns, and inner white square ring width (being hydrophobic dam width degree) is from left to right followed successively by 100,200,300,400,500 and 600 microns.
Fig. 3 b is the fabricbase micro-fluidic chip pictorial diagram processing based on ultraviolet photolithographic technology; Fig. 3 c is that carmine test solution is added to the experimental result picture that the hydrophilic region between inner and outer rings obtains; Fig. 3 d is that carmine test solution is added to the hydrophilic region that interior square loop surrounds and the experimental result picture obtaining.Can find out that from Fig. 3 c and Fig. 3 d the fabricbase micro-fluidic chip based on ultraviolet photolithographic technology can obtain 100 microns of minimum hydrophobic dam width degree.
Embodiment 3
A fabricbase micro-flow control chip preparation method based on ultraviolet photolithographic technology, except there being below special explanation, other steps and material be all identical with embodiment 1.
In preparation process, on same fabricbase micro-fluidic chip, design processes the circular reaction tank of array (as shown in Fig. 4 a, reaction tank is exactly hydrophilic region, detection zone and sample introduction district are one reaction pool) detect for glucose high flux, each pond diameter is 3 millimeters.
Glucose detection process is as follows: first in array reaction tank, add 0.3 mol/L trehalose and 0.6 mol/L KI mixed solution, drying at room temperature 10min; Then adding volume ratio is glucose oxidase solution and the horseradish peroxidase solution (glucose oxidase activity is 120 units per ml, and horseradish peroxidase activity is 30 units per liter) of 5:1, and drying at room temperature 10min, completes functionalization chip; Finally add successively in different test sections the artificial urine that contains different concentration of glucose, under moisturizing environment, react 20min, complete colour developing (as shown in Fig. 4 a).
Concentration of glucose in numeral artificial urine on Fig. 4 a, the glucose of each concentration has done four duplicate detection.The artificial urine solution that contains glucose in reaction tank loading, reaction tank can become brown.The concentration of glucose difference depth difference that develops the color, concentration is higher, and color is darker.Add containing after the artificial urine sample of glucose, reaction tank is from the colourless brown that becomes.The corresponding corresponding concentration of glucose of shade, thereby the roughly content of glucose in definite urine.
On same fabricbase micro-fluidic chip, design micro-fluidic reaction system (as shown in Figure 4 b) and carry out glucose detection.On chip, detection zone is the circular pond (being at upper roundlet in Fig. 4 b) of 3 millimeters of diameters, and sample introduction district is the border circular areas (be in Fig. 4 b under great circle) of 5 millimeters of diameters.Each concentration of glucose has 2 duplicate detection.Here be that detection zone and sample introduction district are not the same areas with the difference of Fig. 4 a, behind the microchannel of will flowing through, arrive detection zone after sample introduction district adds the artificial urine sample of glucose, the substrate reactions in glucose and detection zone colour developing.The micro-fluidic reaction system distinguishing for detection zone and sample introduction, one of its advantage is to reduce the risk of cross pollution.In addition, for such reaction system, perhaps the sample introduction district of chip can directly be inserted in solution to be detected in actual applications, thereby reduces the use of sample loading gun and rifle head.
Glucose detection process is as follows: first in detection zone, add the mixed solution of 0.3 mol/L trehalose and 0.6 mol/L KI, drying at room temperature 10min; Then adding volume ratio is that (glucose oxidase activity is 120 units per ml for the glucose oxidase solution of 5:1 and horseradish peroxidase mixed solution, horseradish peroxidase activity is 30 units per liter), drying at room temperature 10min, completes functionalization chip; Finally add successively in different sample introduction districts the artificial urine solution that contains different concentration of glucose.Under moisturizing environment, react 20min, complete colour developing (as shown in Figure 4 b).
Digital watch on Fig. 4 b concentration of glucose in artificial urine, the concentration of glucose difference depth difference that develops the color, concentration is higher, and color is darker.Add containing after the artificial urine sample of glucose, from the colourless brown that becomes.The corresponding corresponding concentration of glucose of shade, thereby the roughly content of glucose in definite urine.
Embodiment 4
A fabricbase micro-flow control chip preparation method based on ultraviolet photolithographic technology, except there being below special explanation, other steps and material be all identical with embodiment 1.
There is the fabricbase micro-fluidic chip (as shown in Figure 5) of complicated stream in batches by the preparation of ultraviolet photolithographic technology, the enlarged drawing of the complicated stream on it as shown in Figure 6,10 microchannels 1 be jointly connected to one long be 20 millimeters, wide be the sample introduction district 2 of 5 millimeters, be the circle detection district 3 of 1.5 millimeters and each microchannel is connecting a diameter, the width of interface channel changes to 1000 microns (from right to left, its width interval is 100 microns) from 100 microns.Such chip design can realize based on time-resolved high flux and detecting.
Above-described embodiment is preferably embodiment of the present invention; but embodiments of the present invention are not restricted to the described embodiments; other any do not deviate from change, the modification done under Spirit Essence of the present invention and principle, substitutes, combination, simplify; all should be equivalent substitute mode, within being included in protection scope of the present invention.
Claims (7)
1. the fabricbase micro-flow control chip preparation method based on ultraviolet photolithographic technology, is characterized in that comprising the steps:
(1) preparation polyvinyl cinnamate photoresist
5-50%PVC is dissolved in 49.0-94.9% cyclohexanone, stirs evenly, then add 0.1-1.0%5-nitro acenaphthene, stir evenly, obtain PVC photoresist, transfer in brown bottle, lucifuge is placed stand-by; Described percentage is the percentage that each raw material accounts for photoresist raw material gross mass;
(2) pieces of cloth pretreatment
Textile pieces of cloth are soaked to 5min in 20%NaOH solution, after taking-up, clean with pure water, then pieces of cloth are tightened to apply tension force; Lauryl sodium sulfate washing for textile pieces of cloth after tightening, clear water rinse; Then, with in 1% glacial acetic acid solution and pieces of cloth on residual a small amount of NaOH, finally with clear water clean, dry;
(3) design of mask
The mask pattern that designs fabricbase micro-fluidic chip by Adobe Illustrator CS4 software, mask design has alignment mark; The ai file of printing mask pattern with laser printer, obtains exposure mask;
(4) fabricbase micro-fluidic chip ultraviolet photolithographic processing
Pretreated pieces of cloth are unsettled to be tightened, and PVC photoresist is evenly applied on pieces of cloth; Gluing pieces of cloth, at 80 DEG C of baking 20min, complete front baking; After cooling, pieces of cloth are positioned over to slide glass platform, mask alignment, carries out uv-exposure; After exposure, gluing pieces of cloth are toasted to 2min, baking after completing at 95 DEG C; After cooling, gluing pieces of cloth are put in butanone and rock and soaked development; Then, put it in acetone and rock and soaked rinsing; After this, with purified rinse water, then use 3%SDS solution washing, again use purified rinse water; Finally, pieces of cloth dry, cooling, obtain fabricbase micro-fluidic chip.
2. the fabricbase micro-flow control chip preparation method based on ultraviolet photolithographic technology according to claim 1, it is characterized in that: in described step (1), the consumption of PVC accounts for 15%, the consumption of cyclohexanone accounts for 84.7%, the consumption of 5-nitro acenaphthene accounts for 0.3%, and described percentage is the percentage that each raw material accounts for photoresist raw material gross mass.
3. the fabricbase micro-flow control chip preparation method based on ultraviolet photolithographic technology according to claim 1, is characterized in that:
Described mask pattern is with lower one:
The base unit of A, mask pattern is a geometric figure;
The base unit of B, mask pattern is two geometric figures, therebetween by line and curve connection;
The base unit of C, mask pattern is a complicated stream, and this complexity stream is connected by the lines geometric figure large with by multiple little geometric figures, between these little geometric figures, does not connect;
The base unit of D, mask pattern is two or more in A, B or C;
Described geometric figure can be more than one in circle, triangle, rectangle or star.
4. the fabricbase micro-flow control chip preparation method based on ultraviolet photolithographic technology according to claim 1, is characterized in that: the described uv-exposure of step (4) is the 3min that exposes under 400W uv-exposure system.
5. a fabricbase micro-fluidic chip, is characterized in that: be to be prepared by the method described in claim 1-4 any one.
6. the application of fabricbase micro-fluidic chip claimed in claim 5 in analyzing and testing.
7. fabricbase micro-fluidic chip claimed in claim 5 is in the application detecting in urine glucose.
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