CN104064503A - Graphite boat cleaning process - Google Patents
Graphite boat cleaning process Download PDFInfo
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- CN104064503A CN104064503A CN201410299396.4A CN201410299396A CN104064503A CN 104064503 A CN104064503 A CN 104064503A CN 201410299396 A CN201410299396 A CN 201410299396A CN 104064503 A CN104064503 A CN 104064503A
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- graphite boat
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
Abstract
The invention discloses a graphite boat cleaning process. The cleaning process successively comprises the following steps: the graphite boat is disassembled; the disassembled graphite boat is cleaned for the first time in a hydrofluoric acid solution; the disassembled graphite boat is cleaned for the second time in clear water; the graphite boat is dried in a drying oven; the graphite boat is assembled; and the saturation process is performed on the graphite boat in a tubular PECVD. According to the invention, the cleaning time can be greatly reduced, and after the graphite boat is subjected to the saturation process, the number of pieces having color difference can be effectively reduced, and the overall product quality can be improved.
Description
Technical field
The present invention relates to the coating process in silicon solar cell manufacture, especially relate to a kind of cleaning of graphite boat.
Background technology
In coating process in silicon solar cell is manufactured, the surface of graphite boat can be etched gradually along with the increase of processing procedure number of times, and after graphite boat access times are many, the otherness that can make to be deposited on the SiN film on cell piece surface becomes large.Therefore, when access times reach 100 times above after, graphite boat need to be decomposed and cleans.
The time that existing graphite boat cleaning process expends is longer, even and clean, after long-time use, the saturation effect of graphite boat also can variation, this can cause aberration sheet to increase, and has affected the total quality of product.
Summary of the invention
The present invention, in order to overcome above-mentioned deficiency, provides a kind of scavenging period short, and has improved the cleaning of the graphite boat of graphite boat saturation effect.
Technical scheme of the present invention is as follows:
A cleaning for graphite boat, is characterized in that, comprises the following steps:
(1) decompose graphite boat;
(2) in hydrofluoric acid solution, the graphite boat having decomposed is cleaned for the first time;
(3) in clear water, clean for the second time;
(4) in drying oven, dry;
(5) assembling graphite boat;
(6) in tubular type PECVD, graphite boat is carried out to saturated processing.
In step (2) and step (3), all carried out lasting bubbling, bubbling gas is pressed between 0.12-0.2Mpa.
In step (2), the concentration of hydrofluoric acid is 10%, and the scavenging period in this step is 2-3h.
Scavenging period in step (3) is 1-2h.
Drying time in step (4) is 8h.
For to carry out 2 times radio frequency aura under 400 ℃ of vacuum conditions, the aura time is 2500s to step (6) for the first time, carries out aura for the second time after the 500s of interval, and the aura time is 1800s.
In step (6), the frequency of radio frequency aura is penetrated power and is made as 5000W, and has used ammonia and hydrogen sulfide that flow-rate ratio is 1: 9.
The invention has the beneficial effects as follows:
The present invention has reduced the time of cleaning use greatly, and graphite boat is after carrying out saturated processing, can effectively reduce the quantity of aberration sheet, has improved the total quality of product.
Embodiment
The invention discloses a kind of cleaning of graphite boat.
Embodiment 1
A cleaning for graphite boat, is characterized in that, comprises the following steps:
(1) decompose graphite boat;
(2) in concentration, be, in 10% hydrofluoric acid solution, the graphite boat having decomposed is carried out to 3h cleaning, during cleaning, solution carried out to lasting bubbling, bubbling air pressure is 0.12Mpa;
(3) in clear water, carry out the cleaning of 2h, during cleaning, equally clear water is carried out to lasting bubbling, bubbling air pressure is 0.12Mpa;
(4) in drying oven, dry 8h;
(5) assembling graphite boat;
(6) in tubular type PECVD, graphite boat is carried out to saturated processing.
Wherein, (6), for to carry out 2 times radio frequency aura under 400 ℃ of vacuum conditions, the aura time is 2500s for the first time, carries out aura for the second time after the 500s of interval, and the aura time is 1800s.The frequency of above-mentioned radio frequency aura is penetrated power and is made as 5000W, and in the process of radio frequency aura, has used ammonia and hydrogen sulfide that flow-rate ratio is 1: 9.
Embodiment 2
A cleaning for graphite boat, is characterized in that, comprises the following steps:
(1) decompose graphite boat;
(2) in concentration, be, in 10% hydrofluoric acid solution, the graphite boat having decomposed is carried out to 2h cleaning, during cleaning, solution carried out to lasting bubbling, bubbling air pressure is 0.15Mpa;
(3) in clear water, carry out the cleaning of 1h, during cleaning, equally clear water is carried out to lasting bubbling, bubbling air pressure is 0.15Mpa;
(4) in drying oven, dry 8h;
(5) assembling graphite boat;
(6) in tubular type PECVD, graphite boat is carried out to saturated processing.
Wherein, (6), for to carry out 2 times radio frequency aura under 400 ℃ of vacuum conditions, the aura time is 2500s for the first time, carries out aura for the second time after the 500s of interval, and the aura time is 1800s.The frequency of above-mentioned radio frequency aura is penetrated power and is made as 5000W, and in the process of radio frequency aura, has used ammonia and hydrogen sulfide that flow-rate ratio is 1: 9.
Embodiment 3
A cleaning for graphite boat, is characterized in that, comprises the following steps:
(1) decompose graphite boat;
(2) in concentration, be, in 10% hydrofluoric acid solution, the graphite boat having decomposed is carried out to 2.6h cleaning, during cleaning, solution carried out to lasting bubbling, bubbling air pressure is 0.18Mpa;
(3) in clear water, carry out the cleaning of 1.5h, during cleaning, equally clear water is carried out to lasting bubbling, bubbling air pressure is 0.18Mpa;
(4) in drying oven, dry 8h;
(5) assembling graphite boat;
(6) in tubular type PECVD, graphite boat is carried out to saturated processing.
Wherein, (6), for to carry out 2 times radio frequency aura under 400 ℃ of vacuum conditions, the aura time is 2500s for the first time, carries out aura for the second time after the 500s of interval, and the aura time is 1800s.The frequency of above-mentioned radio frequency aura is penetrated power and is made as 5000W, and in the process of radio frequency aura, has used ammonia and hydrogen sulfide that flow-rate ratio is 1: 9.
Embodiment 4
A cleaning for graphite boat, is characterized in that, comprises the following steps:
(1) decompose graphite boat;
(2) in concentration, be, in 10% hydrofluoric acid solution, the graphite boat having decomposed is carried out to 3h cleaning, during cleaning, solution carried out to lasting bubbling, bubbling air pressure is 0.2Mpa;
(3) in clear water, carry out the cleaning of 2h, during cleaning, equally clear water is carried out to lasting bubbling, bubbling air pressure is 2Mpa;
(4) in drying oven, dry 8h;
(5) assembling graphite boat;
(6) in tubular type PECVD, graphite boat is carried out to saturated processing.
Wherein, (6), for to carry out 2 times radio frequency aura under 400 ℃ of vacuum conditions, the aura time is 2500s for the first time, carries out aura for the second time after the 500s of interval, and the aura time is 1800s.The frequency of above-mentioned radio frequency aura is penetrated power and is made as 5000W, and in the process of radio frequency aura, has used ammonia and hydrogen sulfide that flow-rate ratio is 1: 9.
From above-mentioned four embodiment, can find out, when bubbling air pressure larger, scavenging period is shorter, but when bubbling air pressure is greater than 0.18Mpa, scavenging period starts elongated, and when reaching 0.2Mpa, it is longer that scavenging period becomes, therefore only when bubbling air pressure is 0.12-0.2Mpa, scavenging period is just short.And having carried out saturated processing after cleaning, graphite boat, after carrying out saturated processing, can effectively reduce the quantity of aberration sheet, has improved the total quality of product.
Above-mentioned is enlightenment according to the present invention, and by above-mentioned description, relevant staff can, within not departing from the scope of this invention technological thought, carry out various change and modification completely.The technical scope of this invention is not limited to the content on specification, must determine its technical scope according to claim scope.
Claims (7)
1. a cleaning for graphite boat, is characterized in that, comprises the following steps:
(1) decompose graphite boat;
(2) in hydrofluoric acid solution, the graphite boat having decomposed is cleaned for the first time;
(3) in clear water, clean for the second time;
(4) in drying oven, dry;
(5) assembling graphite boat;
(6) in tubular type PECVD, graphite boat is carried out to saturated processing.
2. the cleaning of graphite boat according to claim 1, is characterized in that, in step (2) and step (3), has all carried out lasting bubbling, and bubbling gas is pressed between 0.12-0.2Mpa.
3. the cleaning of graphite boat according to claim 2, is characterized in that, in step (2), the concentration of hydrofluoric acid is 10%, and the scavenging period in this step is 2-3h.
4. the cleaning of graphite boat according to claim 3, is characterized in that, the scavenging period in step (3) is 1-2h.
5. the cleaning of graphite boat according to claim 4, is characterized in that, the drying time in step (4) is 8h.
6. the cleaning of graphite boat according to claim 4, is characterized in that, for to carry out 2 times radio frequency aura under 400 ℃ of vacuum conditions, the aura time is 2500s to step (6) for the first time, carries out aura for the second time after the 500s of interval, and the aura time is 1800s.
7. the cleaning of graphite boat according to claim 6, is characterized in that, in step (6), the frequency of radio frequency aura is penetrated power and is made as 5000W, and has used ammonia and hydrogen sulfide that flow-rate ratio is 1: 9.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410299396.4A CN104064503A (en) | 2014-06-19 | 2014-06-19 | Graphite boat cleaning process |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410299396.4A CN104064503A (en) | 2014-06-19 | 2014-06-19 | Graphite boat cleaning process |
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| CN104064503A true CN104064503A (en) | 2014-09-24 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN201410299396.4A Pending CN104064503A (en) | 2014-06-19 | 2014-06-19 | Graphite boat cleaning process |
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Cited By (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104399699A (en) * | 2014-09-29 | 2015-03-11 | 湖南红太阳光电科技有限公司 | Graphite boat cleaning process |
| CN104923518A (en) * | 2015-04-24 | 2015-09-23 | 中建材浚鑫科技股份有限公司 | Cleaning technology of graphite boat |
| CN105195469A (en) * | 2015-07-31 | 2015-12-30 | 横店集团东磁股份有限公司 | Method for cleaning graphite boat and technological sticking points by virtue of ultrasonic wave |
| CN105457942A (en) * | 2015-09-28 | 2016-04-06 | 阳光大地（福建）新能源有限公司 | Method for prolonging service life of graphite boat for PECVD furnace |
| CN107611220A (en) * | 2017-09-14 | 2018-01-19 | 东方日升新能源股份有限公司 | A kind of solar cell piece preparation method |
| CN108110083A (en) * | 2017-11-29 | 2018-06-01 | 江苏彩虹永能新能源有限公司 | A kind of graphite boat saturation process of solar cell |
| CN110400769A (en) * | 2019-07-18 | 2019-11-01 | 晶澳太阳能有限公司 | The saturation process and graphite frame of graphite frame |
| CN110429020A (en) * | 2019-06-28 | 2019-11-08 | 湖南红太阳光电科技有限公司 | A kind of method that Tubular PECVD device prepares amorphous silicon membrane |
| CN111589769A (en) * | 2020-05-25 | 2020-08-28 | 常州时创能源股份有限公司 | Cleaning method of graphite boat for silicon wafer PECVD amorphous silicon plating |
| CN113787048A (en) * | 2021-09-13 | 2021-12-14 | 通威太阳能(眉山)有限公司 | Method for cleaning graphite boat |
| CN115181956A (en) * | 2021-04-06 | 2022-10-14 | 天津爱旭太阳能科技有限公司 | Graphite boat repairing method and graphite boat |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102280396A (en) * | 2011-09-14 | 2011-12-14 | 江阴鑫辉太阳能有限公司 | Graphite boat saturated treating technology |
| US20130171759A1 (en) * | 2011-12-28 | 2013-07-04 | Wei-Chien CHEN | Method for modifying light absorption layer |
| CN103521473A (en) * | 2013-10-29 | 2014-01-22 | 宁夏银星能源股份有限公司 | Graphite boat cleaning process |
| CN103579057A (en) * | 2012-08-07 | 2014-02-12 | 浙江鸿禧光伏科技股份有限公司 | Method for improving graphite boat processing effect |
-
2014
- 2014-06-19 CN CN201410299396.4A patent/CN104064503A/en active Pending
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102280396A (en) * | 2011-09-14 | 2011-12-14 | 江阴鑫辉太阳能有限公司 | Graphite boat saturated treating technology |
| US20130171759A1 (en) * | 2011-12-28 | 2013-07-04 | Wei-Chien CHEN | Method for modifying light absorption layer |
| CN103579057A (en) * | 2012-08-07 | 2014-02-12 | 浙江鸿禧光伏科技股份有限公司 | Method for improving graphite boat processing effect |
| CN103521473A (en) * | 2013-10-29 | 2014-01-22 | 宁夏银星能源股份有限公司 | Graphite boat cleaning process |
Cited By (14)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104399699B (en) * | 2014-09-29 | 2016-06-15 | 湖南红太阳光电科技有限公司 | A kind of graphite boat cleaning |
| CN104399699A (en) * | 2014-09-29 | 2015-03-11 | 湖南红太阳光电科技有限公司 | Graphite boat cleaning process |
| CN104923518A (en) * | 2015-04-24 | 2015-09-23 | 中建材浚鑫科技股份有限公司 | Cleaning technology of graphite boat |
| CN105195469A (en) * | 2015-07-31 | 2015-12-30 | 横店集团东磁股份有限公司 | Method for cleaning graphite boat and technological sticking points by virtue of ultrasonic wave |
| CN105457942B (en) * | 2015-09-28 | 2018-02-13 | 阳光中科（福建）能源股份有限公司 | A kind of method of extension PECVD stoves graphite boat service life |
| CN105457942A (en) * | 2015-09-28 | 2016-04-06 | 阳光大地（福建）新能源有限公司 | Method for prolonging service life of graphite boat for PECVD furnace |
| CN107611220A (en) * | 2017-09-14 | 2018-01-19 | 东方日升新能源股份有限公司 | A kind of solar cell piece preparation method |
| CN108110083A (en) * | 2017-11-29 | 2018-06-01 | 江苏彩虹永能新能源有限公司 | A kind of graphite boat saturation process of solar cell |
| CN110429020A (en) * | 2019-06-28 | 2019-11-08 | 湖南红太阳光电科技有限公司 | A kind of method that Tubular PECVD device prepares amorphous silicon membrane |
| CN110400769A (en) * | 2019-07-18 | 2019-11-01 | 晶澳太阳能有限公司 | The saturation process and graphite frame of graphite frame |
| CN111589769A (en) * | 2020-05-25 | 2020-08-28 | 常州时创能源股份有限公司 | Cleaning method of graphite boat for silicon wafer PECVD amorphous silicon plating |
| CN115181956A (en) * | 2021-04-06 | 2022-10-14 | 天津爱旭太阳能科技有限公司 | Graphite boat repairing method and graphite boat |
| CN115181956B (en) * | 2021-04-06 | 2024-04-16 | 天津爱旭太阳能科技有限公司 | Repairing method of graphite boat and graphite boat |
| CN113787048A (en) * | 2021-09-13 | 2021-12-14 | 通威太阳能(眉山)有限公司 | Method for cleaning graphite boat |
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Application publication date: 20140924 |
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