CN104064433A - Field emission plane light source and preparing method thereof - Google Patents
Field emission plane light source and preparing method thereof Download PDFInfo
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- CN104064433A CN104064433A CN201310094750.5A CN201310094750A CN104064433A CN 104064433 A CN104064433 A CN 104064433A CN 201310094750 A CN201310094750 A CN 201310094750A CN 104064433 A CN104064433 A CN 104064433A
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Abstract
The invention provides a field emission plane light source which comprises the components of: an anode, a focusing electrode, a gate electrode, a cathode and an isolator. The anode, the focusing electrode, the gate electrode, the cathode and the isolator form a vacuum sealed chamber. The anode comprises an anode substrate, an anode conducting layer and a light emitting layer successively. The isolator comprises an isolator body and a side wall supporting member. The isolator body is provided with a funnel-shaped through hole. The large opening end of the isolator body is connected with the light emitting layer, and the small opening end is connected with the focusing electrode through the side wall supporting member. The focusing electrode is provided with a focusing through hole which can focus electrons. The gate electrode is provided with a gate electrode through hole which allows passing-through of electrons that are transmitted by the cathode. The gate electrode is sandwiched between the focusing electrode and the cathode through the side wall supporting member. The cathode comprises a cathode emitter, a cathode conducting layer and a cathode substrate successively. The cathode emitter is a sheet-shaped nanometer film layer. The cathode emitter is flatly paved on the upper surface of the cathode conducting layer. The invention further provides a preparing method for the field emission plane light source.
Description
Technical field
The present invention relates to photoelectron technology field, particularly a kind of field emission planar light source and preparation method thereof.
Background technology
The principle of field emission planar light source is: in the vacuum band in the middle of negative electrode and positive electrode, import voltage to produce electric field, make electrical field stimulation cathode emitter electron emission and on anode the acceleration of positive voltage under attracting, clash into and be coated on the phosphor powder of anode, and produce luminescent effect.
Field emission planar light source, because having energy-saving and environmental protection, can work under adverse circumstances (as hot environment and low temperature environment), the advantage such as frivolous, can be widely used in each lighting field.Field emission planar light source compared with traditional backlight module, not only simple structure, and energy-conservation, volume is little, be easy to large-area planar, brightness is high, has met the growth requirement of following planar light source.Although field emission planar light source has irreplaceable advantage in following city's competition, it still exists some problems to need to solve in practical application.
In practical work process, anode can produce a certain amount of residual gas under the bombardment of the electron beam that is subject to going out from cathode emission, in these gases, part ionisation of gas can be less than the electron beam energy going out from cathode emission therefore ionization phenomena can occur, cation out of ionization will be under highfield effect vertical cathode surface direction bombarding cathode surface, thereby cause cathode electronics emissive material to damage, cause the decline of emissivities, have a strong impact on stability and the life-span of field emission planar light source work.
Summary of the invention
In view of this, the invention provides a kind of field emission planar light source, this field emission planar light source has the isolating main bodies that offers a funnel-form through hole, this isolating main bodies can blocking anode the approach of the positive ion bombardment cathode surface that produces of ionization, reduce the cation number of bombardment to cathode surface, and then improved the stability of cathode emission electronics and the life-span of having improved field emission planar light source.The present invention also provides the preparation method of this field emission planar light source.
First aspect present invention provides a kind of field emission planar light source, comprises anode, focusing electrode, grid, negative electrode and slider, and described anode, focusing electrode, grid, negative electrode and slider form a vacuum-packed cavity,
Described anode comprises anode substrate, anode conductive layer and luminescent layer successively;
Described slider comprises isolating main bodies and side wall support body, and described isolating main bodies offers a funnel-form through hole, and large openend and the described luminescent layer of described isolating main bodies join, and little openend joins by described side wall support body and described focusing electrode;
Described focusing electrode is offered the focusing through hole that can make electron focusing;
Described grid is offered and can be made the gate via passed through by the electronics of cathode emission, and described grid is arranged between described focusing electrode and described negative electrode by side wall support body is sandwich;
Described negative electrode comprises cathode emitter, cathode conductive layer and cathode base successively, and described cathode emitter is flake nano thin layer, and described cathode emitter tiling is arranged on described cathode conductive layer upper surface.
Preferably, described focusing through hole comprises conducting plate and the projection that is arranged on described conducting plate top, and described focusing through hole runs through described conducting plate and described projection and has the minimum diameter of locating on described projection top.
Preferably, the little openend opening of described isolating main bodies bore is less than or equal to the aperture at the minimum place of described focusing through hole.
Preferably, described cathode emitter and described gate via, described focusing electrode through hole and described isolating main bodies funnel-form through hole are in same axial location.
Preferably, the material of described anode substrate is glass, and described anode conductive layer is metallic aluminium, gold or silver layer, or indium tin oxide layer, and described luminescent layer is to inspire the phosphor powder layer that wavelength is 420nm～480nm blue light.
Preferably, the material of described slider is pottery, glass or boron carbide.
Preferably, the material of described focusing electrode and/or grid is copper.
Preferably, the material of described cathode base is glass, and described cathode conductive layer is metallic aluminium, gold or silver layer, or indium tin oxide layer, and the material of described cathode emitter is carbon nano-tube.
Preferably, the region of cathode emitter is set in described cathode conductive layer upper surface tiling and the shape of described gate via is circle, and the diameter in described region equals the bore of described gate via.
Second aspect present invention provides a kind of preparation method of field emission planar light source, comprises the following steps:
On anode substrate, adopt and prepare anode conductive layer, then on described anode conductive layer surface, luminescent layer is set, obtain anode;
Cathode conductive layer is set on cathode base, then in the surface tiling of described cathode conductive layer, cathode emitter is set, described cathode emitter is flake nano thin layer, obtains negative electrode;
Adopt insulating material to make slider, described slider comprises isolating main bodies and side wall support body, and described isolating main bodies offers a funnel-form through hole;
Preparation offers the focusing electrode of the focusing through hole that can make electron focusing;
Preparation offers the grid that can make the gate via of being passed through by the electronics of cathode emission;
Described anode, focusing electrode, grid, negative electrode and slider are assembled, large openend and the described luminescent layer of described isolating main bodies join, little openend joins by described side wall support body and described focusing electrode, described grid is arranged between described focusing electrode and described negative electrode by side wall support body is sandwich, described anode, focusing electrode, grid, negative electrode and slider assembling form a cavity, cavity described in vacuum seal, makes field emission planar light source.
The invention provides a kind of field emission planar light source and preparation method thereof.This field emission planar light source has the isolating main bodies that offers a funnel-form through hole, when applying after corresponding voltage at each electrode, the cation producing after the beam bombardment anode that cathode emission goes out accelerates toward negative electrode with vertical direction under electric field action, this isolating main bodies can blocking anode the approach of the positive ion bombardment cathode surface that produces of ionization, the little openend opening of isolating main bodies bore is less, reduce the cation number of bombardment to cathode surface, reduce the damage degree of target emitter, and then improve the stability of cathode emission electronics and the life-span of having improved field emission planar light source.
Brief description of the drawings
Fig. 1 is the profile of field emission planar light source in the embodiment of the present invention;
Fig. 2 is the anode construction figure of field emission planar light source in the embodiment of the present invention;
Fig. 3 is the isolating main bodies structure chart of field emission planar light source in the embodiment of the present invention;
Fig. 4 is the focus electrode structure figure of field emission planar light source in the embodiment of the present invention;
Fig. 5 is the drain junctions composition of field emission planar light source in the embodiment of the present invention;
Fig. 6 is the cathode junction composition of field emission planar light source in the embodiment of the present invention;
Fig. 7 is the section working effect schematic diagram of field emission planar light source in the embodiment of the present invention.
Embodiment
The following stated is the preferred implementation of the embodiment of the present invention; should be understood that; for those skilled in the art; do not departing under the prerequisite of embodiment of the present invention principle; can also make some improvements and modifications, these improvements and modifications are also considered as the protection range of the embodiment of the present invention.
Fig. 1 is the sectional view of field emission planar light source in the embodiment of the present invention; Fig. 2 is the anode construction figure of field emission planar light source in the embodiment of the present invention; Fig. 3 is the isolating main bodies structure chart of field emission planar light source in the embodiment of the present invention; Fig. 4 is the focus electrode structure figure of field emission planar light source in the embodiment of the present invention; Fig. 5 is the drain junctions composition of field emission planar light source in the embodiment of the present invention; Fig. 6 is the cathode junction composition of field emission planar light source in the embodiment of the present invention.
With reference to Fig. 1～6, a kind of field emission planar light source that the embodiment of the present invention provides, comprises anode 10, slider 20, focusing electrode 30, grid 40 and minus plate 50.Anode 10, focusing electrode 30, grid 40, negative electrode 50 and slider 20 form a vacuum-packed cavity.Anode 10 comprises anode substrate 11, anode conductive layer 12 and luminescent layer 13 successively; Slider 20 comprises isolating main bodies 21 and side wall support body 22, and isolating main bodies 21 offers a funnel-form through hole 200, and large openend and the luminescent layer 13 of isolating main bodies 21 join, and little openend joins by side wall support body 22 and focusing electrode 30; Focusing electrode 30 is offered the focusing through hole 300 that can make electron focusing, focusing electrode 30 comprises conducting plate 31 and is arranged on the projection 32 of conducting plate top, focus on through hole 300 and run through conducting plate 31 and projection 32 and have the minimum diameter of locating on projection 32 tops, the little openend opening of isolating main bodies 21 bore is less than or equal to the aperture that focuses on through hole 300 minimum places.Grid 40 comprises conductive grid plate 41 and is opened in the gate via 400 that can make in conductive grid plate 41 passed through by the electronics of cathode emission, and grid 40 is arranged between focusing electrode 30 and negative electrode 50 by side wall support body 22 is sandwich.Negative electrode 50 comprises cathode emitter 51, cathode conductive layer 52 and cathode base 53 successively, and cathode conductive layer 52 is arranged on cathode base 53 upper surfaces, and cathode emitter 51 cathode emitter 51 tilings are arranged on cathode conductive layer 52 upper surfaces.
Fig. 2 is the anode construction figure of field emission planar light source in the embodiment of the present invention.Anode 10(Fig. 1 shows) comprise anode substrate 11 and be formed at anode conductive layer 12 and the luminescent layer 13 on anode substrate 11, luminescent layer 13 is formed on anode conductive layer 12.Wherein, anode substrate 11 is selected from circle or the square plate of glass or ceramic material, adopts glass material in the present embodiment.Anode conductive layer 12 is metallic aluminium, gold or silver layer, or indium tin oxide (ITO) layer, adopts aluminium lamination in the present embodiment, prepares on anode substrate 11 by magnetron sputtering method.Luminescent layer 13 is for can inspire the phosphor powder layer that wavelength is 420nm～480nm blue light.Luminescent layer 13 can adopt the mode of silk screen printing to prepare.The thickness of antianode substrate 11 of the present invention, anode conductive layer 12 and luminescent layer 13 is not made particular determination.
Fig. 3 is the isolating main bodies structure chart of field emission planar light source in the embodiment of the present invention.Slider 20(Fig. 1 shows) comprise that isolating main bodies 21 and side wall support body 22(Fig. 1 show), isolating main bodies 21 offers a funnel-form through hole 200, large openend and the luminescent layer 13 of isolating main bodies 21 join, and little openend joins by side wall support body 22 and focusing electrode 30.The material selection of slider has certain rigidity and is not easy the insulating material of venting, for example pottery, glass or boron carbide, and the present embodiment adopts 94% aluminium oxide ceramics.In the present embodiment, slider 20 is for splitting structure, and isolating main bodies 21 and side wall support body 22 individualism respectively, seal by adhesive, wherein, side wall support body 22 comprises that support daughter 221(Fig. 1 of three central columns shows), 222(Fig. 1 shows) and 223(Fig. 1 show).Certainly, slider 20 can be integrated in other embodiments, and isolating main bodies 21 and side wall support body 22 are an integrated member.The external surface shape of slider 20 is not made particular restriction, can be cylindricality.Described cylindricality can be cylindrical, can be also square column type.In the present embodiment, the outer surface of slider 20 is cylindrical.The funnel-form through hole 200 of isolating main bodies 21 can be square or circular.In the present embodiment, funnel-form through hole 200 is circular.
In the present embodiment, focusing electrode 30, grid 40 and negative electrode 50 are spaced apart by the support daughter 221,222 and 223 of central column respectively, and are fixed by adhesive, and anode 10 adopts low glass powder and slider 20 to be fixed.
Fig. 4 is the focus electrode structure figure of field emission planar light source in the embodiment of the present invention.Fig. 5 is the drain junctions composition of field emission planar light source in the embodiment of the present invention.Focusing electrode 30 is offered the focusing through hole 300 that can make electron focusing, and focusing electrode 30 comprises conducting plate 31 and is arranged on the projection 32 of conducting plate top, focuses on through hole 300 and runs through conducting plate 31 and projection 32 and have the minimum diameter of locating on projection 32 tops.In the present embodiment, the little openend opening of isolating main bodies 21 bore is less than the minimum place diameter that focuses on through hole 300.In other embodiments, the little openend opening of isolating main bodies 21 bore can equal to focus on the minimum place diameter of through hole 300.Grid 40 comprises conductive grid plate 41 and is opened in the gate via 400 that can make in conductive grid plate 41 passed through by the electronics of cathode emission.Focusing electrode 30 and grid 40 are circle or square plate metallic plate, are circular metal copper coin in the present embodiment.In the present embodiment, focusing electrode 30 is consistent with the shape of anode substrate 11 with grid 40, is circle.Grid 40 is arranged between focusing electrode 30 and negative electrode 50 by side wall support body 23 is sandwich, focusing electrode 30 and grid 40 are with preset distance setting, this preset distance can be according to actual conditions Scientific Establishment, so that device obtains best launching effect, the present invention does not do particular determination to this.
Fig. 6 is the cathode junction composition of field emission planar light source in the embodiment of the present invention.Negative electrode 50 comprises cathode emitter 51, cathode conductive layer 52 and cathode base 53 successively.The shape of cathode base 53 and anode substrate 11 match, and can be circular or square.In the present embodiment, cathode base 53 is circular, and material is glass.Cathode conductive layer 52 is metallic aluminium, gold or silver layer, or indium tin oxide (ITO) layer, tiles preparation on cathode base 53 by magnetron sputtering method, and in the present embodiment, cathode conductive layer 52 forms skim, completely covered cathode substrate 53.Cathode emitter 51 is tiled and is arranged on cathode conductive layer 52 upper surfaces by the mode of direct growth (as chemical vapour deposition technique) or coating (as silk screen print method), tiling area is suitable with gate via 400 area of section in the horizontal direction, the material of cathode emitter 51 is zinc oxide nano rod or carbon nano-tube, in the present embodiment, cathode emitter 51 is sheet carbon nano-tube film layer.In the present embodiment, the funnel-form through hole 200 of cathode emitter 51 and gate via 400, focusing through hole 300 and isolating main bodies is in same axial location.
Fig. 7 is the section working effect schematic diagram of field emission planar light source in the embodiment of the present invention.The operation principle of the field emission planar light source that the present embodiment provides is as follows: negative electrode 50(Fig. 7 is not shown) ground connection, do not show at grid 40(Fig. 7) apply a forward voltage V
g, do not show at focusing electrode 30(Fig. 7 simultaneously) and apply a negative voltage V
f, apply an accelerating voltage V that relative grid voltage is larger at anode conductive layer 12
a, at this time, do not show from negative electrode 50(Fig. 7) electron beam that produces 60 can be through the impact of focusing electrode voltages and the high-tension acceleration of anode the form bombardment luminescent layer 13 with transmitting, with the difference of traditional field emission planar light source be, electron beam 60 bombards rear the produced cation of luminescent layer 13 and does not show toward negative electrode 50(Fig. 7 with vertical direction under electric field action) pilot process that accelerates tackled by the insulation isolating main bodies 21 of " funnel " shape, because the little openend opening bore of funnel-form through hole is less, so greatly reducing bombarding cathode 50(Fig. 7 does not show) amount of positive ions, thereby having reduced target emitter 51(Fig. 7 does not show) damage degree, stability and the life-span of device work are improved.
On the other hand, the preparation method of above-mentioned field emission planar light source is as follows:
First, select a circular glass as anode substrate 11, thickness of glass is that 3mm, diameter are 100mm, by anode substrate 11 successively with acetone, ethanol, deionized water ultrasonic cleaning 15 minutes and dry up or dry.Then on this clean anode substrate 11, adopt the method for magnetron sputtering to prepare the metallic aluminium anode conductive layer 12 that thickness is 2 μ m, on this anode conductive layer 12, adopt subsequently cladding process apply a layer thickness be the ZnS:Ag blue light emitting phosphor layer of 35 μ m as luminescent layer 13, obtain anode 10;
Select a circular glass consistent with the shape and size of anode substrate 11 as cathode base 53, by cathode base 53 successively with acetone, ethanol, deionized water ultrasonic cleaning 15 minutes and dry up or dry.Then on this clean cathode base 53, adopt the method for magnetron sputtering to prepare the metallic aluminium cathode conductive layer 52 that thickness is 2 μ m, in the border circular areas that is 30mm at these cathode conductive layer 52 upper surface middle part diameters subsequently, adopting cladding process to apply a layer thickness is the carbon nanotube cathod emitter 51 of 5 μ m, obtains negative electrode 50;
It is cylindrical adopting the processing methods such as cutting, polishing to obtain an outer surface, periphery circular diameter is that ceramic material isolating main bodies 21 and three outer surfaces of 100mm are cylindrical, periphery circular diameter is the ceramic material side wall support daughter 221,222 and 223 of 100mm, the interior ring diameter central column that is 80mm, isolating main bodies 21 middle parts offer funnel-form through hole 200, the large openend opening bore of funnel-form through hole 200 is 80mm, and little openend opening bore is 2mm;
Adopting the method processing such as cutting, polishing to obtain diameter is 100mm, and center has the circular metal copper coin that focuses on through hole 300 as focusing electrode 30, this focusing electrode comprises metallic copper conducting plate 31 and is arranged on the projection 32 of metallic copper conducting plate 31 tops, focusing on through hole 300 runs through metallic copper conducting plate 31 and projection 32 and has minimum place diameter on projection 32 tops, the aperture that focuses on through hole 300 minimum places equals the little openend opening of isolating main bodies 21 bore, is 2mm; Equally, adopting the methods such as cutting, polishing to process and obtaining diameter is 100mm, and the circular metal copper coin that center has gate via 400 is as grid 40, and the bore of gate via 400 is 30mm;
Above-mentioned gained anode 10, slider 20, focusing electrode 30, grid 40 and negative electrode 50 are assembled, large openend and the luminescent layer 13 of isolating main bodies 21 join, employing low glass powder is fixed, little openend and side wall support body 22 join, focusing electrode 30, grid 40 and negative electrode 50 adopt three support daughters 221,222 and 223 to be spaced apart, and fixing by adhesive bonding, grid 40 is arranged on negative electrode 50 1 sides; Finally assembling forms a receiving space, is evacuated to 1 × 10
-5pa, seals this receiving space, makes field emission planar light source.
By reference to the accompanying drawings embodiments of the invention are described above; but the present invention is not limited to above-mentioned embodiment; above-mentioned embodiment is only schematic; instead of restrictive; those of ordinary skill in the art is under enlightenment of the present invention; not departing from the scope situation that aim of the present invention and claim protect, also can make a lot of forms, within these all belong to protection of the present invention.
Claims (10)
1. a field emission planar light source, comprises anode, focusing electrode, grid, negative electrode and slider, and described anode, focusing electrode, grid, negative electrode and slider form a vacuum-packed cavity, it is characterized in that,
Described anode comprises anode substrate, anode conductive layer and luminescent layer successively;
Described slider comprises isolating main bodies and side wall support body, and described isolating main bodies offers a funnel-form through hole, and large openend and the described luminescent layer of described isolating main bodies join, and little openend joins by described side wall support body and described focusing electrode;
Described focusing electrode is offered the focusing through hole that can make electron focusing;
Described grid is offered and can be made the gate via passed through by the electronics of cathode emission, and described grid is arranged between described focusing electrode and described negative electrode by side wall support body is sandwich;
Described negative electrode comprises cathode emitter, cathode conductive layer and cathode base successively, and described cathode emitter is flake nano thin layer, and described cathode emitter tiling is arranged on described cathode conductive layer upper surface.
2. a kind of field emission planar light source as claimed in claim 1, it is characterized in that, described focusing through hole comprises conducting plate and the projection that is arranged on described conducting plate top, and described focusing through hole runs through described conducting plate and described projection and has the minimum diameter of locating on described projection top.
3. a kind of field emission planar light source as claimed in claim 2, is characterized in that, the little openend opening of described isolating main bodies bore is less than or equal to the aperture at the minimum place of described focusing through hole.
4. a kind of field emission planar light source as claimed in claim 1, is characterized in that, described cathode emitter and described gate via, described focusing electrode through hole and described isolating main bodies funnel-form through hole are in same axial location.
5. a kind of field emission planar light source as claimed in claim 1, it is characterized in that, the material of described anode substrate is glass, and described anode conductive layer is metallic aluminium, gold or silver layer, or indium tin oxide layer, described luminescent layer is to inspire the phosphor powder layer that wavelength is 420nm～480nm blue light.
6. a kind of field emission planar light source as claimed in claim 1, is characterized in that, the material of described slider is pottery, glass or boron carbide.
7. a kind of field emission planar light source as claimed in claim 1, is characterized in that, the material of described focusing electrode and/or grid is copper.
8. a kind of field emission planar light source as claimed in claim 1, is characterized in that, the material of described cathode base is glass, and described cathode conductive layer is metallic aluminium, gold or silver layer, or indium tin oxide layer, and the material of described cathode emitter is carbon nano-tube.
9. a kind of field emission planar light source as claimed in claim 1, it is characterized in that, the region of cathode emitter is set in described cathode conductive layer upper surface tiling and the shape of described gate via is circle, and the diameter in described region equals the bore of described gate via.
10. a preparation method for field emission planar light source, is characterized in that, comprises the following steps:
On anode substrate, adopt and prepare anode conductive layer, then on described anode conductive layer surface, luminescent layer is set, obtain anode;
Cathode conductive layer is set on cathode base, then in the surface tiling of described cathode conductive layer, cathode emitter is set, described cathode emitter is flake nano thin layer, obtains negative electrode;
Adopt insulating material to make slider, described slider comprises isolating main bodies and side wall support body, and described isolating main bodies offers a funnel-form through hole;
Preparation offers the focusing electrode of the focusing through hole that can make electron focusing;
Preparation offers the grid that can make the gate via of being passed through by the electronics of cathode emission;
Described anode, focusing electrode, grid, negative electrode and slider are assembled, large openend and the described luminescent layer of described isolating main bodies join, little openend joins by described side wall support body and described focusing electrode, described grid is arranged between described focusing electrode and described negative electrode by side wall support body is sandwich, described anode, focusing electrode, grid, negative electrode and slider assembling form a cavity, cavity described in vacuum seal, makes field emission planar light source.
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Application publication date: 20140924 |