CN104062463A - 一种压阻式加速度传感器及其制造方法 - Google Patents
一种压阻式加速度传感器及其制造方法 Download PDFInfo
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- CN104062463A CN104062463A CN201410263793.6A CN201410263793A CN104062463A CN 104062463 A CN104062463 A CN 104062463A CN 201410263793 A CN201410263793 A CN 201410263793A CN 104062463 A CN104062463 A CN 104062463A
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CN201410263793.6A CN104062463B (zh) | 2014-06-13 | 2014-06-13 | 一种压阻式加速度传感器及其制造方法 |
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CN104062463A true CN104062463A (zh) | 2014-09-24 |
CN104062463B CN104062463B (zh) | 2017-04-12 |
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Cited By (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN105174198A (zh) * | 2015-08-12 | 2015-12-23 | 中国电子科技集团公司第三十八研究所 | 一种封装结构的加速度传感器及其制备方法 |
CN105174201A (zh) * | 2015-06-24 | 2015-12-23 | 上海芯赫科技有限公司 | 一种mems集成复合传感器及其加工方法 |
CN108458820A (zh) * | 2018-03-16 | 2018-08-28 | 广东和宇传感器有限公司 | 一种单片硅基微压传感器及其制作方法 |
CN108675260A (zh) * | 2018-05-30 | 2018-10-19 | 南京元感微电子有限公司 | 一种带结构图形的衬底与玻璃的阳极键合方法 |
CN110780090A (zh) * | 2019-12-02 | 2020-02-11 | 北京航空航天大学 | 基于碳化硅材料的压阻式加速度传感器及其制造方法 |
CN112093771A (zh) * | 2019-06-17 | 2020-12-18 | 芜湖天波光电技术研究院有限公司 | 一种单轴高冲击加速度传感器及其制造方法 |
CN112798821A (zh) * | 2020-12-28 | 2021-05-14 | 武汉大学 | 一种双轴压电式加速度计 |
Family Cites Families (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20050172717A1 (en) * | 2004-02-06 | 2005-08-11 | General Electric Company | Micromechanical device with thinned cantilever structure and related methods |
CN101551403B (zh) * | 2009-05-22 | 2012-09-05 | 中国科学院上海微系统与信息技术研究所 | 一种测试加速度,压力和温度的集成硅芯片及制作方法 |
US8569092B2 (en) * | 2009-12-28 | 2013-10-29 | General Electric Company | Method for fabricating a microelectromechanical sensor with a piezoresistive type readout |
-
2014
- 2014-06-13 CN CN201410263793.6A patent/CN104062463B/zh active Active
Non-Patent Citations (3)
Title |
---|
ARINDOM DATTA等: "Nanofluidic channels by anodic bonding of amorphous silicon to glass to study ion-accumulation and ion-depletion effect", 《TALANTA》 * |
董健: "侧面扩散电阻的微机械加速度传感器的设计", 《浙江工业大学学报》 * |
董健: "冲击硅微机械加速度传感器的封装与封装性能分析", 《传感技术学报》 * |
Cited By (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN105174201A (zh) * | 2015-06-24 | 2015-12-23 | 上海芯赫科技有限公司 | 一种mems集成复合传感器及其加工方法 |
CN105174201B (zh) * | 2015-06-24 | 2017-10-10 | 上海芯赫科技有限公司 | 一种mems集成复合传感器及其加工方法 |
CN105174198A (zh) * | 2015-08-12 | 2015-12-23 | 中国电子科技集团公司第三十八研究所 | 一种封装结构的加速度传感器及其制备方法 |
CN108458820A (zh) * | 2018-03-16 | 2018-08-28 | 广东和宇传感器有限公司 | 一种单片硅基微压传感器及其制作方法 |
CN108675260A (zh) * | 2018-05-30 | 2018-10-19 | 南京元感微电子有限公司 | 一种带结构图形的衬底与玻璃的阳极键合方法 |
CN112093771A (zh) * | 2019-06-17 | 2020-12-18 | 芜湖天波光电技术研究院有限公司 | 一种单轴高冲击加速度传感器及其制造方法 |
CN110780090A (zh) * | 2019-12-02 | 2020-02-11 | 北京航空航天大学 | 基于碳化硅材料的压阻式加速度传感器及其制造方法 |
CN112798821A (zh) * | 2020-12-28 | 2021-05-14 | 武汉大学 | 一种双轴压电式加速度计 |
CN112798821B (zh) * | 2020-12-28 | 2021-10-08 | 武汉大学 | 一种双轴压电式加速度计 |
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CN104062463B (zh) | 2017-04-12 |
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