CN104052252B - Electron beam acceleration power device and control method - Google Patents
Electron beam acceleration power device and control method Download PDFInfo
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- CN104052252B CN104052252B CN201410267554.8A CN201410267554A CN104052252B CN 104052252 B CN104052252 B CN 104052252B CN 201410267554 A CN201410267554 A CN 201410267554A CN 104052252 B CN104052252 B CN 104052252B
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- 238000010894 electron beam technology Methods 0.000 title claims abstract description 23
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- 230000033228 biological regulation Effects 0.000 claims abstract description 38
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- 230000000087 stabilizing effect Effects 0.000 claims abstract description 14
- 238000005070 sampling Methods 0.000 claims abstract description 12
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- 230000003287 optical effect Effects 0.000 claims description 13
- 230000005540 biological transmission Effects 0.000 claims description 5
- 230000003831 deregulation Effects 0.000 claims description 5
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- 238000011105 stabilization Methods 0.000 abstract 7
- 230000009286 beneficial effect Effects 0.000 description 6
- 238000010586 diagram Methods 0.000 description 6
- 230000008569 process Effects 0.000 description 6
- 230000001052 transient effect Effects 0.000 description 4
- 230000001629 suppression Effects 0.000 description 3
- 239000003990 capacitor Substances 0.000 description 2
- 230000006872 improvement Effects 0.000 description 2
- 230000007547 defect Effects 0.000 description 1
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Abstract
The invention relates to an electron beam acceleration power device and a control method. The double-closed-loop voltage stabilizing control method is adopted, according to a front-stage voltage stabilization system, a DC-DC converter is used for voltage regulation, a three-phase rectangular wave inverter is used for inversion, a multi-phase rectangular wave high-voltage alternating current rectifier is used for filtering, high-voltage voltage stabilization element output ends are connected in parallel for voltage stabilization, sampling signals of high voltage element currents and sampling signals of voltage stabilization element currents are output for comprehensive feedback, and low-voltage power supply direct currents are fed forwards for compensation to retrain ripple waves. According to a rear-stage voltage stabilization system, high-voltage electron tubes are connected in series for regulation, voltage sampling signals are output for negative feedback control, a sampling element and a regulator are made to be constant in temperature to improve voltage stabilization precision and dynamic regulation speed. Compared with the prior art, high-voltage rectification conventional ripples, sag voltages and peak pulse voltages can be restrained, and the output voltage stabilization precision and dynamic regulation speed are improved.
Description
Technical field
The present invention relates to electron beam process equipment technical field, more particularly to a kind of electron beam accelerating power source device and control
Method.
Background technology
The application of electron beam process equipment is more and more extensive, and requirement of the electron beam precise machining equipment to its accelerating power source
More and more higher, it is on the one hand higher to accelerating potential stability requirement, on the other hand the peak-to-peak value of output voltage waveforms is required more
Little, such as forth generation light source is less than 0.05% up to 500kV, peak-to-peak value with the accelerating potential of electron gun accelerating power source.For so severe
The requirement at quarter, current conventional high voltage power supply are not reached, and bottleneck is the peak-to-peak value of ripple index, and DC high-voltage power supply is all
It is that rectifying and wave-filtering is obtained Jing AC boosting again, in addition to the ripple of normal rectification waveform, high-voltage commutation process can produce point to ripple
Peak pulse voltage, the effect of high-voltage rectifying process Inductor cause direct current output waveform to produce depression again, so as to be formed more
Big ripple., due to there is parasitic parameter, the ability to eliminating spike and depression voltage greatly drops for hv filtering inductance and electric capacity
It is low.High voltage power supply operating current is typically small in addition, and filter action of the inductance to normal ripple is little, the electric capacity of high-voltage capacitor
Value is again less, and all these factors are all unfavorable to the ripple for reducing output voltage.In order to improve the precision of accelerating power source, must be from electricity
Improved in the structure and control method in source.
The content of the invention
The technical problem to be solved is to provide one kind and can suppress high-voltage rectifying routine ripple and depression voltage, suppression
Peaking voltage processed, the electron beam accelerating power source device and controlling party that improve output voltage stable state accuracy and dynamic regulation speed
Method.
The technical scheme that the present invention solves above-mentioned technical problem is as follows：A kind of electron beam accelerating power source control method, adopts
Dual loop pressure-stabilizing control method, prime voltage-stabilizing system employ DC-DC converter pressure regulation, three-phase scanning wave inverter inversion,
Multiphase square wave High Level AC Voltage rectifying and wave-filtering, high voltage stabilizing cell output parallel voltage-stabilizing, output high pressure and voltage stabilizing element electricity
The sampled signal integrative feedback of stream and low-voltage power supply direct current feedforward compensation suppress ripple, rear class voltage-stabilizing system to employ tandem high pressure
It is steady that electron tube adjustment, output voltage sampled signal negative feedback control, sampling element and actuator constant temperature process raising output voltage
State precision and dynamic regulation speed, comprise the steps：
Step 1：Lower pressure rectifier filter unit is input into electric network source, and exports straight uncontrollable straight to DC-DC converter
Stream electricity, voltage detector detect the straight uncontrollable DC voltage, and it is straight uncontrollable to export this to DC-DC converter
The signal u of DC voltage valueg；
Step 2：DC-DC converter distinguishes the voltage detection signal u of receiving voltage detectorg, Setting signal generator send out
The prime high pressure U for going outaSetting signalThe prime high pressure U that fiber optic receiver sendsaFeedback signal uaIt is high with prime is flowed through
Voltage source varistor Ry501 electric current IyFeedback signal uy, by internal regulation by lower pressure rectifier filter unit export can not
The unidirectional current of control becomes controllable unidirectional current, transmits the controllable unidirectional current to three-phase scanning wave inverter；DC-DC converter with
Fault comprehensive device transmitted in both directions fault-signal eb；
Step 3：The controllable galvanic electricity that amperometric detection DC-DC converter is transmitted to three-phase scanning wave inverter
Flow valuve, exports the detection signal u of the controllable galvanic current value to fault comprehensive devicei；
Step 4：Unidirectional current is transformed into three-phase square wave ac by three-phase scanning wave inverter, and three-phase square wave is handed over
Pressure-oil tank, three-phase scanning wave inverter and fault comprehensive device transmitted in both directions fault-signal e are defeated by stream faxi；
Step 5：Pressure-oil tank carries out boosting to three-phase square wave ac, rectification, filtering and voltage stabilizing obtain prime high pressure
Power supply, prime high voltage power supply transmit unidirectional current, the prime high pressure U of prime high voltage power supply to rear class high pressure regulatoraSampling letter
Number u'aWith flow through prime high voltage power supply varistor Ry501 electric current IySampled signal u'yOptical signal is converted into, and passes through light
It is fine to send optical signal to fiber optic receiver；
Step 6：Rear class voltage regulator carries out voltage-regulation to prime high voltage power supply, exports constant high-pressure to electron gun.
Precision resistance R601 connect with precision resistance R602 partial pressure composition output high direct voltage sample circuit, on precision resistance R602
Voltage signal ueThe sampled signal of high direct voltage is as exported, and rear class voltage-regulation is constituted by core of operational amplifier IC601
Device, to output voltage Setting signalSampled signal ueIt is compared and PI computings, then output control signal up, by upGo to adjust
The conducting state of section pressure-oil tank mesohigh electron tube V501.
The step 2 comprises the steps：
Step 2.1：Prime voltage regulator receives Setting signalWith feedback signal ua、uy, carry out it is given with feedback ratio compared with
Computing obtains deviation signal Jing PID (PID) or PI (proportional integral) or P (ratio) computing output control signal againSend into power network fluctuation suppressor；
Step 2.2：Power network fluctuation suppressor receives the output signal of prime voltage regulatorIt is defeated with voltage detector
Go out signal ug, be compared backward regulation power transistor driver output control signal u is processed with scalingc；
Step 2.3：Power transistor driver is adjusted control signal ucPWM (pulsewidth modulation) signal is converted into, pwm signal is again
Regulation power tube T201 is transferred to after isolation is amplified；Adjust two-way biography between power transistor driver and discharge power pipe driver
Defeated abnormal signal ec；The working condition that power transistor driver detection adjusts power tube T201 is adjusted, if working condition exception,
Abnormal signal e is put thencFor effective；Adjust power transistor driver and judge abnormal signal ecEffectively, just block adjusts power tube
T201；
Step 2.4：The abnormal signal e of transmitted in both directions between discharge power pipe driver and regulation power transistor driverc, electric discharge
Transmitted in both directions fault-signal e between power transistor driver and fault comprehensive deviceb；If due to adjust power tube T201 working condition it is different
Often, cause abnormal signal ecFor effective, discharge power pipe driver puts fault-signal ebFor effective, fault comprehensive device is sent to；
If fault comprehensive device exports fault-signal ebEffectively, discharge power pipe driver puts abnormal signal ecTo be effectively sent to regulation
Power transistor driver；Discharge power pipe driver is by abnormal signal ecWith fault-signal ebEffective judgement is carried out, if ecOr
ebEffectively, then discharge power pipe driver opens discharge power pipe T202.
The step 4 comprises the steps：
Step 4.1：Three phase inverter bridge drive waveforms generator produces drive signal and is transferred to three phase inverter bridge drive circuit；
Step 4.2：Three phase inverter bridge drive circuit carries out isolation amplification to drive signal, and respectively to U phase inverter bridge legs,
V phase inverter bridge legs, W phases inverter bridge leg send drive signal, go to drive U phase inverter bridge legs, V phase inverter bridge legs, W phase inverter bridge legs
Power tube T401～T406；
Step 4.3：Input dc power is transformed into three-phase alternating current by U phase inverter bridge legs, V phase inverter bridge legs, W phase inverter bridge legs
Electricity output；
Step 4.4：Three phase inverter bridge drive circuit detects the working condition of each power tube T401～T406, if not just
Often, then put fault-signal eiFor effective；Three phase inverter bridge drive circuit is to fault-signal eiEffective judgement is carried out, once failure
Signal eiEffectively, three phase inverter bridge drive circuit just blocks the drive signal of three phase inverter bridge power tube；Three phase inverter bridge drives
Transmitted in both directions fault-signal e between circuit and fault comprehensive devicei。
The step 5 comprises the steps：
Step 5.1:Three-phase voltage increasing transformator receives the three-phase alternating current of three-phase scanning wave inverter output, is boosted,
Output three-phase high-voltage rectangular-wave alternating-current supplies electricity to high-voltage rectifier bridge；
Step 5.2：The hv filtering network of inductance L501, L502 and electric capacity C501, C502 composition, high-voltage rectifier bridge and height
Filter pressing wave network carries out rectifying and wave-filtering to three-phase high-voltage square wave ac, obtains straight prime high pressure Ua；
Step 5.3：Resistance R502 connect with resistance R503 partial pressure composition prime high pressure UaSample circuit, on resistance R503
Voltage signal u'aAs prime high pressure UaSampled signal, varistor Ry501 is attempted by prime after connecting with resistance R501
The outfan of high voltage power supply, the voltage signal u' on resistance R503yThe electric current I of varistor Ry501 is flowed through asySampling letter
Number, prime high pressure UaSampled signal and flow through the electric current I of varistor Ry501ySampled signal Jing fiber optic emitters be converted into
Optical signal, is sent to fiber optic receiver by optical fiber；
Step 5.4：High-voltage electrical tube V501 is serially connected in prime high pressure UaIn output loop, adjusted by receiving output voltage
Regulate signal u that device sendspTo adjust the conducting degree of high-voltage electrical tube V501, and then realize automatically adjusting for output high pressure.
A kind of electron beam accelerating power source device, including lower pressure rectifier filter unit, DC-DC converter, amperometric, three
Phase scanning wave inverter, pressure-oil tank, rear class voltage regulator, radiator valve, optical fiber, fiber optic receiver, fault comprehensive device,
Voltage detector, Setting signal generator, the lower pressure rectifier filter unit are connected with voltage detector, DC-DC converter respectively
Connect, the DC-DC converter respectively with three-phase scanning wave inverter, fiber optic receiver, fault comprehensive device, Setting signal generator
Connection, the amperometric are placed between DC-DC converter and three-phase scanning wave inverter, and are connected with fault comprehensive device
Connect, the three-phase scanning wave inverter is connected with pressure-oil tank, fault comprehensive device respectively, the pressure-oil tank is electric with rear class respectively
Pressure actuator, fiber optic receiver connection, the rear class voltage regulator are connected with radiator valve, Setting signal generator respectively
Connect；
The electric current being input into from electric network source is carried out rectifying and wave-filtering by the lower pressure rectifier filter unit, and what output was straight can not
Control unidirectional current；
The DC-DC converter distinguishes the voltage detection signal u of receiving voltage detectorg, Setting signal generator sends
Prime high pressure UaSetting signalThe prime high pressure U that fiber optic receiver sendsaFeedback signal uaWith flow through prime high pressure Ua
Feedback signal u of varistor Ry501 electric currentsy, by internal regulation by lower pressure rectifier filter unit export it is uncontrollable straight
Stream electricity becomes controllable unidirectional current, transmits the controllable unidirectional current to three-phase scanning wave inverter；DC-DC converter is comprehensive with failure
Clutch transmitted in both directions fault-signal eb；
The controllable galvanic electric current that the amperometric detection DC-DC converter is transmitted to three-phase scanning wave inverter
Value, while the signal u of the controllable galvanic current value is exported to fault comprehensive devicei；
Unidirectional current is transformed into three-phase alternating current by the three-phase scanning wave inverter, and three-phase alternating current is transferred to high pressure
Fuel tank, at the same with fault comprehensive device transmitted in both directions fault-signal ei；
The pressure-oil tank carries out boosting to three-phase alternating current, rectification, filtering and voltage stabilizing obtain prime high voltage power supply, prime
High voltage power supply transmits unidirectional current, the prime high pressure U of prime high voltage power supply to rear class high pressure regulatoraSampled signal u'aAnd high pressure
UaVaristor Ry501 electric current IySampled signal u'yOptical signal is converted into, and light is sent to fiber optic receiver by optical fiber
Signal；
The rear class voltage regulator carries out voltage-regulation to prime high voltage power supply, exports constant height to external electron gun
Pressure；Precision resistance R601 connect with precision resistance R602 partial pressure composition output high direct voltage sample circuit, precision resistance R602
On voltage signal ueThe sampled signal of high direct voltage is as exported, and rear class voltage is constituted by core of operational amplifier IC601
Actuator, to output voltage Setting signalSampled signal ueIt is compared and PI computings, then output control signal up, by up
The conducting state of de-regulation pressure-oil tank mesohigh electron tube V501；
The ambient temperature of the radiator valve control rear class voltage regulator keeps constant；
The optical fiber is except transmission is comprising prime high-voltage signal u'aWith varistor Ry501 current signal u'yOptical signal
Outward, also act as High-Voltage Insulation buffer action；
The fiber optic receiver is comprising prime high-voltage signal u'aWith varistor Ry501 current signal u'yThe light of information
Signal is converted into the signal of telecommunication respectively；
The fault comprehensive device receives amperometric output signal uiWith output signal u of fiber optic receivery, and in real time
It is respectively compared whether this two signal exceedes respective setting value, if either signal is all judged to failure more than its setting value, failure is comprehensive
Clutch receives the abnormal signal e from DC-DC converter simultaneouslybWith the abnormal signal e from three-phase scanning wave inverteri,
ebAnd eiThe effective fault comprehensive device of either signal is also judged to failure, while putting e when fault comprehensive device judges faulty generationbAnd ei
Two signals are effective；
The voltage detector detects the supplying DC piezoelectric voltage of DC-DC converter, and to DC-DC converter output signal
ug；
The Setting signal generator produces prime high-voltage power voltage Setting signalWith rear class high voltage power supply output electricity
Pressure Setting signal
The invention has the beneficial effects as follows：1st, can reduce AC wave shape into high-voltage rectifying output voltage ripple；2nd, can be effective
During suppressing high-voltage rectifying, AC inductance is acted on so that direct current output waveform produces depression；3rd, high-voltage commutation mistake can effectively be suppressed
The peaking voltage produced in journey；4th, output voltage static cost control precision and dynamic regulation speed can be improved.
On the basis of above-mentioned technical proposal, the present invention can also do following improvement.
Further technical scheme, the lower pressure rectifier filter unit include three-phase rectifier, inductance L101, L102 and electric capacity
C101, C102, the outside three-phase current of ac input end input of the three-phase rectifier, the output head anode of three-phase rectifier and
Negative pole distinguishes the filter network output of Jing inductance L101, L102 and electric capacity C101, C102 composition.
Using the beneficial effect of above-mentioned further scheme it is：Three-phase alternating current is rectified into unidirectional current by three-phase rectifier, electricity
Sense L101, L102 have outside filter function, also the initiation of charge electric current of limiting capacitance C101, C102 and suppression electromagnetic interference letter
Number in DC terminal and the transmission for exchanging end；Electric capacity C101 is high frequency capacitance, and electric capacity C101 is in parallel with electrochemical capacitor C102 to improve filter
Wave network suppresses high frequency spikes pulse voltage ability.
Further technical scheme, the DC-DC converter include prime voltage regulator, power network fluctuation suppressor, adjust
Power transistor driver, discharge power pipe driver, varistor Ry201～203, regulation power tube T201, discharge power pipe
T202, inductance L201～L202, diode D201, electric capacity C101～C102 and resistance R201, the varistor Ry201 two ends
Connect the positive pole and negative pole of inlet highway respectively, described varistor Ry202 one end connects the positive pole of inlet highway, described pressure-sensitive
One end of resistance Ry203 connects the negative pole of inlet highway, and the other end of the varistor Ry202 is with varistor Ry203's
The other end is connected with each other and is grounded, and the positive pole and regulation power tube of the regulation power tube T201 colelctor electrodes connection inlet highway drive
Dynamic device, adjusts the front end of the negative electrode and inductance L201 of power tube T201 emitter stages connection diode D201, adjusts power tube T201
Base stage connection adjust power transistor driver, before the anode of diode D201 and the negative pole of inlet highway and inductance L202
End connection, one end of one end, the positive pole of electric capacity C202 and resistance R201 of the inductance L201 rear ends connection electric capacity C201 are described
The emitter stage of the other end, the negative pole of electric capacity C202 and discharge power pipe T202 of inductance L202 rear ends connection electric capacity C201, it is described
The other end of resistance R201 connects the colelctor electrode of discharge power pipe T202, the base stage connection electric discharge work(of the discharge power pipe T202
Rate pipe driver, the discharge power pipe driver with adjust power transistor driver be connected, it is described regulation power transistor driver and
Power network fluctuation suppressor connects, and the power network fluctuation suppressor is connected with prime voltage regulator.
Using the beneficial effect of above-mentioned further scheme it is：Adjust power tube to regulate and control uncontrollable unidirectional current is controllable direct current
Electricity, varistor Ry201 suppress the transient overvoltage between inlet highway, varistor Ry202 and Ry203 to suppress inlet highway pair
The filter network of the transient overvoltage on ground, inductance L201, L202 and electric capacity C201, C202 composition, also suppression electromagnetic interference letter
Number DC-DC converter input and outfan transmission, the prime voltage regulator adopts uaAnd uyIntegrative feedback, both protected
The high voltage power supply output of card prime is stable at the pressure limiting magnitude of voltage of varistor Ry501, is avoided that varistor Ry501 flow through again
High current and burn.
Further technical scheme, the three-phase scanning wave inverter include three phase inverter bridge drive waveforms generator, three-phase
Inverter bridge drive circuit, U phase inverter bridge legs, V phase inverter bridge legs, W phases inverter bridge leg and varistor Ry401～Ry406；
The U phases inverter bridge leg includes power tube T401, power tube T404 and electric capacity C401, the power tube T401 current collections
Pole and DC-DC converter export galvanic positive pole, electric capacity C401 one end and are connected, the emitter stage of the power tube T401 respectively with
The colelctor electrode of power tube T404, one end of varistor Ry401, one end of varistor Ry404, the one of varistor Ry406
End connection, emitter stage and the DC-DC converter of the power tube T404 export the other end company of galvanic negative pole, electric capacity C401
Connect；
The V phases inverter bridge leg includes power tube T403, power tube T406 and electric capacity C402, the power tube T403 current collections
Pole and DC-DC converter export galvanic positive pole, C402 one end and are connected, the emitter stage of the power tube T403 respectively with power
The colelctor electrode of pipe T406, one end of varistor Ry402, the other end of varistor Ry404, one end of varistor Ry405
Connection, emitter stage and the DC-DC converter of the power tube T406 export the other end company of galvanic negative pole, electric capacity C402
Connect；
The W phases inverter bridge leg includes power tube T405, power tube T402 and electric capacity C403, the power tube T405 current collections
Pole and DC-DC converter export galvanic positive pole, C403 one end and are connected, the emitter stage of the power tube T405 respectively with power
The colelctor electrode of pipe T402, one end of varistor Ry403, the other end of varistor Ry405, varistor Ry406 it is another
End connection, emitter stage and the DC-DC converter of the power tube T402 export the other end company of galvanic negative pole, electric capacity C403
Connect；
The other end and the varistor Ry402 other ends, the other end of varistor Ry403 of the varistor Ry401
It is connected, and is grounded；The three phase inverter bridge drive circuit respectively with U phase inverter bridge legs, V phase inverter bridge legs, W phase inverter bridge legs
Connection, the three phase inverter bridge drive circuit are connected with three phase inverter bridge drive waveforms generator.
Using the beneficial effect of above-mentioned further scheme it is：Varistor Ry401, Ry402 and Ry403 suppress three-phase rectangle
Ripple inverter exports phase line transient overvoltage over the ground, and varistor Ry404, Ry405 and Ry406 suppress three-phase square wave inversion
Transient overvoltage between device output phase line, three phase inverter bridge carry out square wave inversion, reduce high-voltage alternating electrical waveform whole to which
The impact of stream output ripple；Three phase inverter bridge drive waveforms are balancing waveform, the driving ripple of the upper and lower bridge arm power tube of every bridge arm
Shape is also balancing waveform, and the drive signal width of every half bridge arm a cycle is more than 120 ° and is less than 180 °, both reliable to avoid often
The upper and lower bridge arm power tube of bridge arm is simultaneously turned on and can improve the utilization rate of inverter bridge and booster transformer, and three-phase width is big in addition
Rectification output waveform depression defect can be reduced in 120 ° of square wave voltage waveform switching processes for being less than 180 °.
Further technical scheme, the pressure-oil tank include three-phase voltage increasing transformator, high-voltage rectifier bridge, fiber optic emitter,
Screen grid power supply, inclined grid power supply, filament supply, high-voltage electrical tube V501, inductance L501～L503, electric capacity C501～C503, resistance
R501～R503, varistor Ry501～Ry502, the three-phase voltage increasing primary are defeated with three-phase scanning wave inverter
Go out end to be connected, three-phase voltage increasing transformer secondary output is connected with high-voltage rectifier bridge ac input end, the high-voltage rectifier bridge positive pole with
Inductance L501 front ends, C501 one end connect, and the high-voltage rectifier bridge negative pole is connected with inductance L502 front ends, the C501 other ends, institute
State inductance L501 rear ends to connect with varistor Ry501 one end, electric capacity C502 one end, resistance R502 one end and inductance L503 front ends
Connect, inductance L502 rear ends respectively with resistance R501 one end, the electric capacity C502 other ends, resistance R503 one end, varistor Ry502 mono-
The anode of end and high-voltage electrical tube V501 connects, and the varistor Ry501 other ends are connected with the resistance R501 other ends, and even
Fiber optic emitter is connect, the other end of the resistance R502 is connected with the resistance R503 other ends, and is connected with fiber optic emitter, described
The varistor Ry502 other ends are connected with the negative electrode of electric capacity C503 one end and high-voltage electrical tube V501 respectively and are connected to rear step voltage
The low-pressure end of actuator, the inductance L503 rear ends are connected with the electric capacity C503 other ends and are connected to the high pressure of rear class voltage regulator
End, the screen grid of the high-voltage electrical tube V501 are connected to the outfan of screen grid power supply, the inclined grid of the high-voltage electrical tube V501
The outfan of inclined grid power supply is connected to, the filament electrode of the high-voltage electrical tube V501 is connected to the outfan of filament supply.
Using the beneficial effect of above-mentioned further scheme it is：The inclined grid of the high-voltage electrical tube receives the inclined grid of adjustable control
Power supply, and then high-voltage electrical tube conducting degree is adjusted, realize that output voltage is adjusted at a high speed；The filtering net of the prime out-put supply
The comprehensive function of network and varistor Ry501 can effectively suppress peaking voltage.
Further technical scheme, the rear class voltage regulator include operational amplifier IC601, Low Drift Temperature resistance R601～
The inductance L503 rear ends of R609, electric capacity C601, diode D601～D602, described Low Drift Temperature resistance R601 one end and pressure-oil tank
Connection, the Low Drift Temperature resistance R601 other ends are connected with Low Drift Temperature resistance R602 one end, Low Drift Temperature resistance R604 one end respectively, described
The other end of Low Drift Temperature resistance R602 is connected and is grounded with Low Drift Temperature resistance R603 one end, the connection of the Low Drift Temperature resistance R603 other ends
The other end of the varistor Ry502 of pressure-oil tank, the other end of the Low Drift Temperature resistance R604 respectively with Low Drift Temperature resistance
The connection of R605 one end, the negative electrode of diode D601, the anode of diode D602 and Low Drift Temperature resistance R606 one end, the Low Drift Temperature
The resistance R605 other ends are connected with Setting signal generator, the anode of the diode D601 and the negative electrode of diode D602, low
Temperature drift resistance R607 one end connects and is grounded, and the Low Drift Temperature resistance R606 other ends concatenation operation amplifier IC601's is anti-phase
Input, the other end of the Low Drift Temperature resistance R607 are connected with the in-phase input end of operational amplifier IC601, and the computing is put
The outfan of big device IC601 is connected to the control signal of the inclined grid power supply of pressure-oil tank, the electricity with Jing Low Drift Temperature resistance R609
Hold C601 and Low Drift Temperature resistance R608 to be connected in series between the outfan and inverting input of operational amplifier IC601；After described
Step voltage actuator is in an isoperibol controlled by radiator valve.
Using the beneficial effect of above-mentioned further scheme it is：IC601 circuits constitute pi regulator circuit controlled output high pressure
Control voltage u of the inclined grid power supply of electron tubep, an adjustable control power supply is provided to the inclined grid of high-voltage electrical tube, adjust
The conducting degree of section V501, realizes that the floating of output voltage is adjusted at a high speed；Isoperibol further increases control accuracy.
Description of the drawings
Fig. 1 is electron beam accelerating power source apparatus structure schematic diagram of the present invention；
Schematic diagrams of the Fig. 2 for lower pressure rectifier filter unit；
Schematic diagrams of the Fig. 3 for DC-DC converter；
Fig. 4 is three-phase scanning wave inverter schematic diagram；
Fig. 5 is the drive signal waveform figure that three phase inverter bridge drive waveforms generator occurs；
Fig. 6 is pressure-oil tank schematic diagram；
Fig. 7 is rear class voltage regulator schematic diagram.
In accompanying drawing, the list of parts representated by each label is as follows：
1st, lower pressure rectifier filter unit, 2, DC-DC converter, 3, amperometric, 4, three-phase scanning wave inverter, 5, high
Force feed case, 6, rear class voltage regulator, 7, radiator valve, 8, optical fiber, 9, fiber optic receiver, 10, fault comprehensive device, 11, electricity
Pressure detector；12nd, Setting signal generator, 101, three-phase rectifier, 201, prime voltage regulator, 202, power network fluctuation suppresses
Device, 203, adjust power transistor driver, 204, discharge power pipe driver, 401, three phase inverter bridge drive waveforms generator,
402nd, three phase inverter bridge drive circuit, 403, U phase inverter bridge legs, 404, V phase inverter bridge legs, 405, W phase inverter bridge legs, 501, three
Phase booster transformer；502nd, high-voltage rectifier bridge；503rd, fiber optic emitter, 504, screen grid power supply, 505, inclined grid power supply, 506, filament
Power supply.
Specific embodiment
The principle and feature of the present invention are described below in conjunction with accompanying drawing, example is served only for explaining the present invention, and
It is non-for limiting the scope of the present invention.
As shown in figure 1, a kind of electron beam accelerating power source control method, using dual loop pressure-stabilizing control method, prime is steady
Pressure system employs 2 pressure regulation of DC-DC converter, 4 inversion of three-phase scanning wave inverter, the filter of multiphase square wave high-voltage alternating electric rectification
The sampled signal integrative feedback and low pressure of ripple, high voltage stabilizing cell output parallel voltage-stabilizing, output high pressure and voltage stabilizing element electric current
Supplying DC feedforward compensation suppresses ripple, rear class voltage-stabilizing system to employ the adjustment of tandem high pressure electron tube, output voltage sampling letter
Number negative feedback control, sampling element and actuator constant temperature are processed and improve output voltage stable state accuracy and dynamic regulation speed, including
Following steps：
Step 1：Lower pressure rectifier filter unit 1 is input into electric network source, and exports straight uncontrollable to DC-DC converter 2
Unidirectional current, voltage detector 11 detect the straight uncontrollable DC voltage, and this is straight to the output of DC-DC converter 2
The signal u of uncontrollable DC voltage valueg；
Step 2：The voltage detection signal u of the difference receiving voltage of DC-DC converter 2 detector 11g, Setting signal generator
The Setting signal of the 12 prime high pressure Ua for sendingThe prime high pressure U that fiber optic receiver 9 sendsaFeedback signal uaBefore flowing through
Level high pressure UaFeedback signal u of varistor Ry501 electric currentsy, by internal regulation by lower pressure rectifier filter unit export can not
The unidirectional current of control becomes controllable unidirectional current, transmits the controllable unidirectional current, DC-DC converter 2 to three-phase scanning wave inverter 4
With 10 transmitted in both directions fault-signal e of fault comprehensive deviceb；
Step 3：The controllable unidirectional current that the detection of amperometric 3 DC-DC converter 2 is transmitted to three-phase scanning wave inverter 4
Current value, while to fault comprehensive device 10 export the controllable galvanic current value signal ui；
Step 4：Unidirectional current is transformed into three-phase alternating current by three-phase scanning wave inverter 4, and three-phase alternating current is transferred to
Pressure-oil tank 5, while to 10 transmitted in both directions fault-signal e of fault comprehensive devicei；
Step 5：Pressure-oil tank 5 carries out boosting to three-phase alternating current, rectification, filtering and voltage stabilizing obtain prime high voltage power supply,
Prime high voltage power supply transmits unidirectional current, the prime high pressure U of prime high voltage power supply to rear class high pressure regulatoraSampled signal u'aWith
Flow through prime high voltage power supply varistor Ry501 electric current IySampled signal u'yOptical signal is converted into, and by optical fiber 8 to light
Fine receptor 9 sends optical signal；
Step 6：Rear class voltage regulator 6 carries out voltage-regulation to prime high voltage power supply, exports constant to external electron gun
High pressure, precision resistance R601 connect with precision resistance R602 partial pressure composition output high direct voltage sample circuit, precision resistance
Voltage signal u on R602eThe sampled signal of high direct voltage is as exported, and rear class is constituted by core of operational amplifier IC601
Voltage regulator 6, to output voltage Setting signalSampled signal ueIt is compared and PI computings, then output control signal
up, by upThe conducting state of de-regulation pressure-oil tank mesohigh electron tube V501.
The step 2 comprises the steps：
Step 2.1：Prime voltage regulator 201 receives Setting signalFeedback signal uaAnd uy, given and fed back
Comparison operation obtains deviation signal Jing PID (PID) or PI (proportional integral) or P (ratio) computing output control again
SignalSend into power network fluctuation suppressor 202；
Step 2.2：Power network fluctuation suppressor 202 receives the output signal of prime voltage regulator 201And voltage detecting
Output signal u of device 11g, be compared backward regulation 203 output control signal u of power transistor driver is processed with scalingc；
Step 2.3：Power transistor driver 203 is adjusted control signal ucBe converted into pwm signal, pwm signal again through every
Regulation power tube T201 is transferred to after amplification；Adjust two-way biography between power transistor driver 203 and discharge power pipe driver 204
Defeated abnormal signal ec, the working condition that the detection of power transistor driver 203 adjusts power tube T201 is adjusted, if working condition is different
Often, then put abnormal signal ecFor effective, adjust power transistor driver 203 and judge abnormal signal ecEffectively, just block adjusts work(
Rate pipe T201；
Step 2.4：The abnormal signal of transmitted in both directions between discharge power pipe driver 204 and regulation power transistor driver 203
ec, transmitted in both directions fault-signal e between discharge power pipe driver 204 and fault comprehensive device 10b；Adjust the work of power tube T201
Make abnormal state, cause abnormal signal ecFor effective, discharge power pipe driver 204 puts fault-signal ebFor effective, it is sent to
Fault comprehensive device 10；If fault comprehensive device 10 exports fault-signal ebEffectively, discharge power pipe driver 204 puts abnormal signal
ecPower transistor driver 203 is adjusted to be effectively sent to；Discharge power pipe driver 204 is by abnormal signal ecWith fault-signal
ebEffective judgement is carried out, if ecOr ebEffectively, then discharge power pipe driver 204 opens discharge power pipe T202.
The step 4 comprises the steps：
Step 4.1：Three phase inverter bridge drive waveforms generator 401 produces drive signal and is transferred to three phase inverter bridge driving electricity
Road 402；
Step 4.2：Three phase inverter bridge drive circuit 402 carries out isolation amplification to drive signal, and respectively to U phase inverter bridges
Arm 403, V phases inverter bridge leg 404, W phases inverter bridge leg 405 send drive signal, go to drive U phases inverter bridge leg 403, V phase inversions
Power tube T401～the T406 of bridge arm 404, W phases inverter bridge leg 405；
Step 4.3：Input dc power is changed by U phases inverter bridge leg 403, V phases inverter bridge leg 404, W phases inverter bridge leg 405
Into three-phase alternating current electricity output；
Step 4.4：Three phase inverter bridge drive circuit 402 detects the working condition of each power tube T401～T406, if not
Normally, then put fault-signal eiFor effective；Three phase inverter bridge drive circuit 402 is to fault-signal eiCarry out Effective judgement, failure
Signal eiEffectively, three phase inverter bridge drive circuit 402 just blocks the drive signal of three phase inverter bridge power tube；Three phase inverter bridge drives
Transmitted in both directions fault-signal e between galvanic electricity road 402 and fault comprehensive device 10i。
The step 5 comprises the steps：
Step 5.1:Three-phase voltage increasing transformator 501 receives the three-phase alternating current of 4 output of three-phase scanning wave inverter, is risen
Pressure, output three-phase high-voltage rectangular-wave alternating-current supply electricity to high-voltage rectifier bridge 502；
Step 5.2：The hv filtering network of inductance L501, L502 and electric capacity C501, C502 composition, high-voltage rectifier bridge 502
And hv filtering network carries out rectifying and wave-filtering to three-phase high-voltage square wave ac, straight prime high pressure U is obtaineda；
Step 5.3：Resistance R502 connect with resistance R503 partial pressure composition prime high pressure UaSample circuit, on resistance R503
Voltage signal u'aAs prime high pressure UaSampled signal, varistor Ry501 is attempted by prime after connecting with resistance R501
The outfan of high voltage power supply, the voltage signal u' on resistance R503yThe electric current I of varistor Ry501 is flowed through asySampling letter
Number, prime high pressure UaSampled signal and flow through the electric current I of varistor Ry501y503 turns of sampled signal Jing fiber optic emitters
Change optical signal into, fiber optic receiver 9 is sent to by optical fiber 8；
Step 5.4：High-voltage electrical tube V501 is serially connected in prime high pressure UaIn output loop, adjusted by receiving output voltage
Regulate signal u that device 6 sendspTo adjust the conducting degree of high-voltage electrical tube V501, and then realize automatically adjusting for output high pressure.
A kind of electron beam accelerating power source device, including lower pressure rectifier filter unit 1, DC-DC converter 2, amperometric
3rd, three-phase scanning wave inverter 4, pressure-oil tank 5, rear class voltage regulator 6, radiator valve 7, optical fiber 8, fiber optic receiver 9,
Fault comprehensive device 10, voltage detector 11, Setting signal generator 12, the lower pressure rectifier filter unit 1 are examined with voltage respectively
Survey device 11, DC-DC converter 2 to connect, the DC-DC converter 2 respectively with three-phase scanning wave inverter 4, fiber optic receiver 9,
Fault comprehensive device 10, Setting signal generator 12 connect, and the amperometric 3 is serially connected in DC-DC converter 2 and three-phase rectangle
Between ripple inverter 4, and be connected with fault comprehensive device 19, the three-phase scanning wave inverter 4 respectively with pressure-oil tank 5, failure
Synthesizer 10 connects, and the pressure-oil tank 5 is connected with rear class voltage regulator 6, fiber optic receiver 9 respectively, the rear step voltage
Actuator 6 is connected with radiator valve 7, Setting signal generator 12 respectively；
The electric current being input into from electric network source is carried out rectifying and wave-filtering by the lower pressure rectifier filter unit 1, and output is straight not
Controllable unidirectional current；
The voltage detection signal u of the difference receiving voltage of the DC-DC converter 2 detector 11g, Setting signal generator 12
The Setting signal of the prime high pressure Ua for sendingThe prime high pressure U that fiber optic receiver 9 sendsaFeedback signal uaWith flow through prime
High pressure UaFeedback signal u of varistor Ry501 electric currentsy, by internal regulation by lower pressure rectifier filter unit export it is uncontrollable
Unidirectional current become controllable unidirectional current, to three-phase scanning wave inverter 4 transmit the controllable unidirectional current；DC-DC converter 2 with
10 transmitted in both directions fault-signal e of fault comprehensive deviceb；
The amperometric 3 detect DC-DC converter 2 to three-phase scanning wave inverter 4 transmit it is controllable galvanic
Current value, while the signal u of the controllable galvanic current value is exported to fault comprehensive device 10i；
Unidirectional current is transformed into three-phase alternating current by the three-phase scanning wave inverter 4, and three-phase alternating current is transferred to height
Force feed case 5, while with 10 transmitted in both directions fault-signal ei of fault comprehensive device；
The pressure-oil tank 5 carries out boosting to three-phase alternating current, rectification, filtering and voltage stabilizing obtain prime high voltage power supply, front
Level high voltage power supply transmits unidirectional current, the prime high pressure U of prime high voltage power supply to rear class high pressure regulatoraSampled signal u'aAnd height
Pressure UaVaristor Ry501 electric current IySampled signal u'yIt is converted into optical signal, and by optical fiber 8 to fiber optic receiver 9
Send optical signal；
The rear class voltage regulator 8 carries out voltage-regulation to prime high voltage power supply, exports constant height to external electron gun
Pressure, Low Drift Temperature resistance R601 partial pressure compositions of connect with Low Drift Temperature resistance R602 export the sample circuit of high direct voltage, and Low Drift Temperature is electric
Voltage signal u on resistance R602eThe sampled signal of high direct voltage is exported as, after constituting with operational amplifier IC601 as core
Step voltage actuator 8, to output voltage Setting signalSampled signal ueIt is compared and PI computings, then output control letter
Number up, by upThe conducting state of de-regulation pressure-oil tank mesohigh electron tube V501；
The ambient temperature of the control rear class of the radiator valve 7 voltage regulator 6 keeps constant；
The optical fiber 8 is gone back in addition to optical signal of the transmission comprising prime high-voltage signal and varistor Ry501 current signals
Play High-Voltage Insulation buffer action；
The fiber optic receiver 9 is the difference of the optical signal comprising prime high-voltage signal and varistor Ry501 current signals
It is converted into the signal of telecommunication；
The fault comprehensive device 10 receives 3 output signal u of amperometriciWith output signal u of fiber optic receiver 10y, and
It is respectively compared whether this two signal exceedes setting value in real time, if either signal is all judged to failure more than its setting value, failure is comprehensive
Clutch 10 receives the abnormal signal e from DC-DC converter 2 simultaneouslybWith the abnormal signal e from three-phase inverteri, eb
And eiThe effective fault comprehensive device of either signal is also judged to failure, while putting e when fault comprehensive device 10 judges faulty generationbAnd ei
Two signals are effective；
The voltage detector 11 detects the supplying DC piezoelectric voltage of DC-DC converter 2, and exports to DC-DC converter 2
Signal ug；
The Setting signal generator 12 produces prime high-voltage power voltage Setting signalExport with rear class high voltage power supply
Voltage Setting signal
The lower pressure rectifier filter unit 1 includes three-phase rectifier 101, inductance L101, L102 and electric capacity C101, C102,
The outside three-phase current of ac input end input of the three-phase rectifier 101, the output head anode and negative pole of three-phase rectifier 101
The filter network that Jing inductance L101, L102 and electric capacity C101, C102 are constituted respectively.
The DC-DC converter 2 includes prime voltage regulator 201, power network fluctuation suppressor 202, adjusts power tube drive
Dynamic device 203, discharge power pipe driver 204, varistor Ry201～203, adjust power tube T201, discharge power pipe T202,
Inductance L201～L202, diode D201, electric capacity C101～C102 and resistance R201, the varistor Ry201 two ends difference
The positive pole and negative pole of connection inlet highway, described varistor Ry202 one end connects the positive pole of inlet highway, the varistor
One end of Ry203 connects the negative pole of inlet highway, and the other end of the varistor Ry202 is another with varistor Ry203
End is connected with each other and is grounded, the positive pole and regulation power transistor driver of the regulation power tube T201 colelctor electrodes connection inlet highway
203, the front end of the negative electrode and inductance L201 of power tube T201 emitter stages connection diode D201 is adjusted, adjusts power tube T201's
Base stage connection adjusts power transistor driver 203, the anode of diode D201 and the negative pole of inlet highway and inductance L202
Front end connects, one end of one end, the positive pole of electric capacity C202 and resistance R201 of the inductance L201 rear ends connection electric capacity C201, institute
State the emitter stage of the other end, the negative pole of electric capacity C202 and discharge power pipe T202 of inductance L202 rear ends connection electric capacity C201, institute
The other end for stating resistance R201 connects the colelctor electrode of discharge power pipe T202, the base stage connection electric discharge of the discharge power pipe T202
Power transistor driver 204, the discharge power pipe driver 204 are connected with power transistor driver 203 is adjusted, the regulation power
Pipe driver 203 is connected with power network fluctuation suppressor 202, and the power network fluctuation suppressor 202 is connected with prime voltage regulator 201
Connect.
The three-phase scanning wave inverter 4 includes that three phase inverter bridge drive waveforms generator 401, three phase inverter bridge drives electricity
Road 402, U phases inverter bridge leg 403, V phases inverter bridge leg 404, W phases inverter bridge leg 405 and varistor Ry401～Ry406；
The U phases inverter bridge leg 403 includes power tube T401, power tube T404 and electric capacity C401, the power tube T401
Colelctor electrode exports galvanic positive pole, electric capacity C401 one end with DC-DC converter 2 and is connected, the emitter stage of the power tube T401
Colelctor electrode respectively with power tube T404, one end of varistor Ry401, one end of varistor Ry404, varistor
One end connection of Ry406, emitter stage and the DC-DC converter 2 of the power tube T404 export galvanic negative pole, electric capacity C401
The other end connection；
The V phases inverter bridge leg 404 includes power tube T403, power tube T406 and electric capacity C402, the power tube
T403 colelctor electrodes export galvanic positive pole, C402 one end with DC-DC converter 2 and are connected, the emitter stage of the power tube T403
Colelctor electrode respectively with power tube T406, one end of varistor Ry402, the other end of varistor Ry404, varistor
One end connection of Ry405, emitter stage and the DC-DC converter 2 of the power tube T406 export galvanic negative pole, electric capacity C402
The other end connection；
The W phases inverter bridge leg 405 includes power tube T405, power tube T402 and electric capacity C403, the power tube T405
Colelctor electrode exports galvanic positive pole, C403 one end with DC-DC converter 2 and is connected, the emitter stage difference of the power tube T405
Colelctor electrode, one end of varistor Ry403 with power tube T402, the other end of varistor Ry405, varistor Ry406
Other end connection, the emitter stage of the power tube T402 and DC-DC converter 2 export galvanic negative pole, electric capacity C403
The other end connects；
The other end and the varistor Ry402 other ends, the other end of varistor Ry403 of the varistor Ry401
It is connected, and is grounded；The three phase inverter bridge drive circuit 402 respectively with U phases inverter bridge leg 403, V phases inverter bridge leg 404, W
Phase inverter bridge leg 405 connects, and the three phase inverter bridge drive circuit 402 is connected with three phase inverter bridge drive waveforms generator 401.
The pressure-oil tank 5 includes three-phase voltage increasing transformator 501, high-voltage rectifier bridge 502, fiber optic emitter 503, screen electricity
Source 504, inclined grid power supply 505, filament supply 506, high-voltage electrical tube V501, inductance L501～L503, electric capacity C501～C503, electricity
Resistance R501～R503, varistor Ry501～Ry502,501 primary of the three-phase voltage increasing transformator and three-phase scanning wave inverter
4 outfan is connected, and 501 levels of three-phase voltage increasing transformator are connected with 502 ac input end of high-voltage rectifier bridge, the high repoussage
Stream 502 positive pole of bridge connects with inductance L501 front ends, C501 one end, 502 negative pole of the high-voltage rectifier bridge and inductance L502 front ends,
The C501 other ends connect, the inductance L501 rear ends and varistor Ry501 one end, electric capacity C502 one end, resistance R502 one end
With inductance L503 front ends connect, inductance L502 rear ends respectively with resistance R501 one end, the electric capacity C502 other ends, resistance R503 mono-
The anode connection of end, varistor Ry502 one end and high-voltage electrical tube V501, the varistor Ry501 other ends and resistance
The R501 other ends connect, and connect fiber optic emitter 503, and the other end of the resistance R502 is connected with the resistance R503 other ends,
And be connected with fiber optic emitter 503, the varistor Ry502 other ends respectively with electric capacity C503 one end and high-voltage electrical tube
The negative electrode of V501 connects and is connected to the low-pressure end of rear class voltage regulator 6, the inductance L503 rear ends and the electric capacity C503 other ends
Connect and be connected to the high-pressure side of rear class voltage regulator 6, the screen grid of the high-voltage electrical tube V501 is connected to screen grid power supply 504
Outfan, the inclined grid of the high-voltage electrical tube V501 are connected to the outfan of inclined grid power supply 505, the high-voltage electrical tube V501's
Filament electrode is connected to the outfan of filament supply 506.
The rear class voltage regulator 6 include operational amplifier IC601, Low Drift Temperature resistance R601～R609, electric capacity C601,
Diode D601～D602, described Low Drift Temperature resistance R601 one end are connected with the inductance L503 rear ends of pressure-oil tank 5, Low Drift Temperature electricity
The resistance R601 other ends are connected with Low Drift Temperature resistance R602 one end, Low Drift Temperature resistance R604 one end respectively, the Low Drift Temperature resistance
The other end of R602 is connected and is grounded with Low Drift Temperature resistance R603 one end, Low Drift Temperature resistance R603 other ends connection pressure-oil tank 5
Varistor Ry502 the other end, the other end of the Low Drift Temperature resistance R604 respectively with Low Drift Temperature resistance R605 one end, two
The connection of the negative electrode of pole pipe D601, the anode of diode D602 and Low Drift Temperature resistance R606 one end, the Low Drift Temperature resistance R605 are another
One end is connected with Setting signal generator 12, the anode of the diode D601 and the negative electrode of diode D602, Low Drift Temperature resistance
R607 one end connects and is grounded, the inverting input of the Low Drift Temperature resistance R606 other ends concatenation operation amplifier IC601, institute
The other end for stating Low Drift Temperature resistance R607 is connected with the in-phase input end of operational amplifier IC601, the operational amplifier IC601
Outfan and Jing Low Drift Temperature resistance R609 be connected to the control signal of inclined grid power supply 505, the electric capacity C601 and Low Drift Temperature electricity
Resistance R608 is connected in series between the outfan and inverting input of operational amplifier IC601；The rear class voltage regulator 6 is in
In one isoperibol controlled by radiator valve 7.
The foregoing is only presently preferred embodiments of the present invention, not to limit the present invention, all spirit in the present invention and
Within principle, any modification, equivalent substitution and improvements made etc. should be included within the scope of the present invention.
Claims (10)
1. a kind of electron beam accelerating power source control method, it is characterised in that：Using dual loop pressure-stabilizing control method, prime voltage stabilizing
System employs DC-DC converter (2) pressure regulation, three-phase scanning wave inverter (4) inversion, multiphase square wave high-voltage alternating electric rectification
Filtering, high voltage stabilizing cell output parallel voltage-stabilizing, output high pressure and the sampled signal integrative feedback of voltage stabilizing element electric current and low
Pressure supplying DC feedforward compensation suppresses ripple, rear class voltage-stabilizing system to employ the adjustment of tandem high pressure electron tube, output voltage sampling
Signal negative feedback control, sampling element and actuator constant temperature are processed and improve output voltage stable state accuracy and dynamic regulation speed, bag
Include following steps：
Step 1：Lower pressure rectifier filter unit (1) is input into electric network source, and exports straight uncontrollable to DC-DC converter (2)
Unidirectional current, voltage detector (11) detect the straight uncontrollable DC voltage, and it is flat to export this to DC-DC converter (2)
The signal u of straight uncontrollable DC voltage valueg；
Step 2：The voltage detection signal u of DC-DC converter (2) difference receiving voltage detector (11)g, Setting signal generator
(12) the prime high pressure U for sendingaSetting signal, the prime high pressure U that fiber optic receiver (9) sendsaFeedback signal uaWith flow through
Prime high pressure UaFeedback signal u of varistor Ry501 electric currentsy, lower pressure rectifier filter unit is exported not by internal regulation
Controllable unidirectional current becomes controllable unidirectional current, transmits the controllable unidirectional current to three-phase scanning wave inverter (4), and DC-DC becomes
Parallel operation (2) and fault comprehensive device (10) transmitted in both directions fault-signal eb；
Step 3：The controllable direct current that amperometric (3) detection DC-DC converter (2) is transmitted to three-phase scanning wave inverter (4)
The current value of electricity, while the signal u of the controllable galvanic current value is exported to fault comprehensive device (10)i；
Step 4：Unidirectional current is transformed into three-phase alternating current by three-phase scanning wave inverter (4), and three-phase alternating current is transferred to height
Force feed case (5), while to fault comprehensive device (10) transmitted in both directions fault-signal ei；
Step 5：Pressure-oil tank (5) carries out boosting to three-phase alternating current, rectification, filtering and voltage stabilizing obtain prime high voltage power supply, front
Level high voltage power supply transmits unidirectional current, the prime high pressure U of prime high voltage power supply to rear class high pressure regulatoraSampled signal u'aAnd stream
Premenstrual level high voltage power supply varistor Ry501 electric current IySampled signal u'yOptical signal is converted into, and by optical fiber (8) to light
Fine receptor (9) sends optical signal；
Step 6：Rear class voltage regulator (6) carries out voltage-regulation to prime high voltage power supply, exports constant height to external electron gun
Pressure, precision resistance R601 connect with precision resistance R602 partial pressure constitute export high direct voltage sample circuit, precision resistance R602
On voltage signal ueThe sampled signal of high direct voltage is as exported, and rear class voltage is constituted by core of operational amplifier IC601
Actuator (6), to output voltage Setting signal, sampled signal ueIt is compared and PI computings, then output control signal up,
By upThe conducting state of de-regulation pressure-oil tank mesohigh electron tube V501.
2. a kind of electron beam accelerating power source control method according to claim 1, it is characterised in that the step 2 include as
Lower step：
Step 2.1：Prime voltage regulator (201) receives Setting signal, feedback signal uaAnd uy, carry out given and feedback ratio
Deviation signal Jing PID (PID) or PI (proportional integral) or P (ratio) computings output control letter again are obtained compared with computing
NumberSend into power network fluctuation suppressor (202)；
Step 2.2：Power network fluctuation suppressor (202) receives the output signal of prime voltage regulator (201)And voltage detecting
Output signal u of device (11)g, be compared backward regulation power transistor driver (203) output control letter is processed with scaling
Number uc；
Step 2.3：Power transistor driver (203) is adjusted control signal ucPwm signal is converted into, pwm signal is put through isolation again
Regulation power tube T201 is transferred to after big；Adjust two-way biography between power transistor driver (203) and discharge power pipe driver (204)
Defeated abnormal signal ec, the working condition that power transistor driver (203) detection adjusts power tube T201 is adjusted, if working condition
It is abnormal, then put abnormal signal ecFor effective, adjust power transistor driver (203) and judge abnormal signal ecEffectively, just block is adjusted
Section power tube T201；
Step 2.4：The abnormal signal of transmitted in both directions between discharge power pipe driver (204) and regulation power transistor driver (203)
ec, transmitted in both directions fault-signal e between discharge power pipe driver (204) and fault comprehensive device (10)b；Adjust power tube T201
Working condition exception, cause abnormal signal ecFor effective, discharge power pipe driver (204) puts fault-signal ebFor effective,
It is sent to fault comprehensive device (10)；If fault comprehensive device (10) exports fault-signal ebEffectively, discharge power pipe driver (204)
Put abnormal signal ecPower transistor driver (203) is adjusted to be effectively sent to；Discharge power pipe driver (204) will be abnormal
Signal ecWith fault-signal ebEffective judgement is carried out, if ecOr ebEffectively, then discharge power pipe driver (204) is opened and is put
Electrical power pipe T202.
3. a kind of electron beam accelerating power source control method according to claim 1, it is characterised in that the step 4 include as
Lower step：
Step 4.1：Three phase inverter bridge drive waveforms generator (401) produces drive signal and is transferred to three phase inverter bridge drive circuit
(402)；
Step 4.2：Three phase inverter bridge drive circuit 402 carries out isolation amplification to drive signal, and respectively to U phase inverter bridge legs
(403), V phases inverter bridge leg (404), W phase inverter bridge legs (405) send drive signal, go to drive U phase inverter bridge legs (403), V
Power tube T401～the T406 of phase inverter bridge leg (404), W phase inverter bridge legs (405)；
Step 4.3：Input dc power is turned by U phase inverter bridge legs (403), V phase inverter bridge legs (404), W phase inverter bridge legs (405)
Become three-phase alternating current electricity output；
Step 4.4：Three phase inverter bridge drive circuit (402) detects the working condition of each power tube T401～T406, if not just
Often, then put fault-signal eiFor effective；Three phase inverter bridge drive circuit (402) is to fault-signal eiCarry out Effective judgement, failure
Signal eiEffectively, three phase inverter bridge drive circuit (402) just blocks the drive signal of three phase inverter bridge power tube；Three phase inverter bridge
Transmitted in both directions fault-signal e between drive circuit (402) and fault comprehensive device (10)i。
4. a kind of electron beam accelerating power source control method according to claim 1, it is characterised in that the step 5 include as
Lower step：
Step 5.1:Three-phase voltage increasing transformator (501) receives the three-phase alternating current that three-phase scanning wave inverter (4) is exported, and is risen
Pressure, output three-phase high-voltage rectangular-wave alternating-current supply electricity to high-voltage rectifier bridge (502)；
Step 5.2：Inductance L501, L502 and electric capacity C501, C502 composition hv filtering network, high-voltage rectifier bridge (502) and
Hv filtering network carries out rectifying and wave-filtering to three-phase high-voltage square wave ac, obtains straight prime high pressure Ua；
Step 5.3：Resistance R502 connect with resistance R503 partial pressure composition prime high pressure UaSample circuit, the electricity on resistance R503
Pressure signal u'aAs prime high pressure UaSampled signal, varistor Ry501 is attempted by prime high pressure after connecting with resistance R501
The outfan of power supply, the voltage signal u' on resistance R503yThe electric current I of varistor Ry501 is flowed through asySampled signal, it is front
Level high pressure UaSampled signal and flow through the electric current I of varistor Ry501ySampled signal Jing fiber optic emitters (503) be converted into
Optical signal, is sent to fiber optic receiver (9) by optical fiber (8)；
Step 5.4：High-voltage electrical tube V501 is serially connected in prime high pressure UaIn output loop, by receiving output voltage regulator (6)
Regulate signal u of transmissionpTo adjust the conducting degree of high-voltage electrical tube V501, and then realize automatically adjusting for output high pressure.
5. a kind of electron beam accelerating power source device, it is characterised in that：Including lower pressure rectifier filter unit (1), DC-DC converter
(2), amperometric (3), three-phase scanning wave inverter (4), pressure-oil tank (5), rear class voltage regulator (6), thermostatic control
Device (7), optical fiber (8), fiber optic receiver (9), fault comprehensive device (10), voltage detector (11), Setting signal generator (12),
It is characterized in that：The lower pressure rectifier filter unit (1) is connected with voltage detector (11), DC-DC converter (2) respectively, institute
State DC-DC converter (2) respectively with three-phase scanning wave inverter (4), fiber optic receiver (9), fault comprehensive device (10), given letter
The connection of number generator (12), the amperometric (3) be serially connected in DC-DC converter (2) and three-phase scanning wave inverter (4) it
Between, and be connected with fault comprehensive device (19), the three-phase scanning wave inverter (4) respectively with pressure-oil tank (5), fault comprehensive device
(10) connect, the pressure-oil tank (5) is connected with rear class voltage regulator (6), fiber optic receiver (9) respectively, the rear class electricity
Pressure actuator (6) is connected with radiator valve (7), Setting signal generator (12) respectively；
The electric current being input into from electric network source is carried out rectifying and wave-filtering by the lower pressure rectifier filter unit (1), and what output was straight can not
Control unidirectional current；
The voltage detection signal u of the DC-DC converter (2) difference receiving voltage detector (11)g, Setting signal generator
(12) the prime high pressure U for sendingaSetting signal, the prime high pressure U that fiber optic receiver (9) sendsaFeedback signal uaWith flow through
Prime high pressure UaFeedback signal u of varistor Ry501 electric currentsy, lower pressure rectifier filter unit is exported not by internal regulation
Controllable unidirectional current becomes controllable unidirectional current, transmits the controllable unidirectional current to three-phase scanning wave inverter (4)；DC-DC becomes
Parallel operation (2) and fault comprehensive device (10) transmitted in both directions fault-signal eb；
The controllable unidirectional current that the amperometric (3) detection DC-DC converter (2) is transmitted to three-phase scanning wave inverter (4)
Current value, while the signal u of the controllable galvanic current value is exported to fault comprehensive device (10)i；
Unidirectional current is transformed into three-phase alternating current by the three-phase scanning wave inverter (4), and three-phase alternating current is transferred to high pressure
Fuel tank (5), at the same with fault comprehensive device (10) transmitted in both directions fault-signal ei；
The pressure-oil tank (5) carries out boosting to three-phase alternating current, rectification, filtering and voltage stabilizing obtain prime high voltage power supply, prime
High voltage power supply transmits unidirectional current, the prime high pressure U of prime high voltage power supply to rear class high pressure regulatoraSampled signal u'aAnd prime
High pressure UaVaristor Ry501 electric current IySampled signal u'yOptical signal is converted into, and by optical fiber (8) to fiber optic receiver
(9) send optical signal；
The rear class voltage regulator (8) carries out voltage-regulation to prime high voltage power supply, exports constant high-pressure to external electron gun,
Low Drift Temperature resistance R601 connect with Low Drift Temperature resistance R602 partial pressure composition output high direct voltage sample circuit, Low Drift Temperature resistance
Voltage signal u on R602eThe sampled signal of high direct voltage is as exported, and rear class is constituted by core of operational amplifier IC601
Voltage regulator (8), to output voltage Setting signal, sampled signal ueIt is compared and PI computings, then output control letter
Number up, by upThe conducting state of de-regulation pressure-oil tank mesohigh electron tube V501；
The ambient temperature of the radiator valve (7) control rear class voltage regulator (6) keeps constant；
The optical fiber (8) is also risen in addition to optical signal of the transmission comprising prime high-voltage signal and varistor Ry501 current signals
To High-Voltage Insulation buffer action；
The fiber optic receiver (9) turns the optical signal comprising prime high-voltage signal and varistor Ry501 current signals respectively
Change the signal of telecommunication into；
The fault comprehensive device (10) receives amperometric (3) output signal uiWith output signal u of fiber optic receiver (10)y,
And it is respectively compared whether this two signal exceedes setting value in real time, if either signal is all judged to failure, failure more than its setting value
Synthesizer (10) is while receive the abnormal signal e from DC-DC converter (2)bWith the abnormal letter from three-phase inverter
Number ei, ebAnd eiThe effective fault comprehensive device of either signal is also judged to failure, when fault comprehensive device (10) judges faulty generation while
Put ebAnd eiTwo signals are effective；
The supplying DC piezoelectric voltage of the voltage detector (11) detection DC-DC converter (2), and it is defeated to DC-DC converter (2)
Go out signal ug；
The Setting signal generator (12) produces prime high-voltage power voltage Setting signalWith rear class high voltage power supply output electricity
Pressure Setting signal。
6. a kind of electron beam accelerating power source device according to claim 5, it is characterised in that：The lower pressure rectifier filter unit
(1) including three-phase rectifier (101), inductance L101, L102 and electric capacity C101, C102, the exchange of the three-phase rectifier (101)
The outside three-phase current of input input, the output head anode of three-phase rectifier (101) and negative pole difference Jing inductance L101, L102 and
The filter network of electric capacity C101, C102 composition.
7. a kind of electron beam accelerating power source device according to claim 5, it is characterised in that：DC-DC converter (2) bag
Include prime voltage regulator (201), power network fluctuation suppressor (202), adjust power transistor driver (203), the drive of discharge power pipe
Dynamic device (204), varistor Ry201～203, adjust power tube T201, discharge power pipe T202, inductance L201～L202, two
Pole pipe D201, electric capacity C101～C102 and resistance R201, the varistor Ry201 two ends connect the positive pole of inlet highway respectively
And negative pole, the positive pole of varistor Ry202 one end connection inlet highway, one end connection of the varistor Ry203 are defeated
Enter the negative pole of bus, the other end of the varistor Ry202 is connected with each other and is grounded with the other end of varistor Ry203,
The positive pole of the regulation power tube T201 colelctor electrodes connection inlet highway and regulation power transistor driver (203), adjust power tube
The front end of the negative electrode and inductance L201 of T201 emitter stages connection diode D201, the base stage connection for adjusting power tube T201 adjust work(
Rate pipe driver (203), the anode of diode D201 are connected with the front end of the negative pole of inlet highway and inductance L202, described
One end of one end, the positive pole of electric capacity C202 and resistance R201 of inductance L201 rear ends connection electric capacity C201, after the inductance L202
The emitter stage of the other end, the negative pole of electric capacity C202 and discharge power pipe T202 of end connection electric capacity C201, the resistance R201's
The other end connects the colelctor electrode of discharge power pipe T202, the base stage connection discharge power pipe driver of the discharge power pipe T202
(204), the discharge power pipe driver (204) is connected with power transistor driver (203) is adjusted, and the regulation power tube drives
Device (203) is connected with power network fluctuation suppressor (202), the power network fluctuation suppressor (202) and prime voltage regulator (201)
Connection.
8. a kind of electron beam accelerating power source device according to claim 5, it is characterised in that：The three-phase scanning wave inverter
(4) including three phase inverter bridge drive waveforms generator (401), three phase inverter bridge drive circuit (402), U phase inverter bridge legs
(403), V phases inverter bridge leg (404), W phase inverter bridge legs (405) and varistor Ry401～Ry406；
The U phases inverter bridge leg (403) includes power tube T401, power tube T404 and electric capacity C401, the power tube T401 collection
Electrode exports galvanic positive pole, electric capacity C401 one end with DC-DC converter (2) and is connected, the emitter stage of the power tube T401
Colelctor electrode respectively with power tube T404, one end of varistor Ry401, one end of varistor Ry404, varistor
One end connection of Ry406, emitter stage and the DC-DC converter (2) of the power tube T404 export galvanic negative pole, electric capacity
The other end connection of C401；
The V phases inverter bridge leg (404) includes power tube T403, power tube T406 and electric capacity C402, the power tube
T403 colelctor electrodes export galvanic positive pole, C402 one end with DC-DC converter (2) and are connected, the transmitting of the power tube T403
Pole colelctor electrode respectively with power tube T406, one end of varistor Ry402, the other end of varistor Ry404, varistor
One end connection of Ry405, emitter stage and the DC-DC converter (2) of the power tube T406 export galvanic negative pole, electric capacity
The other end connection of C402；
The W phases inverter bridge leg (405) includes power tube T405, power tube T402 and electric capacity C403, the power tube T405 collection
Electrode exports galvanic positive pole, C403 one end with DC-DC converter (2) and is connected, the emitter stage difference of the power tube T405
Colelctor electrode, one end of varistor Ry403 with power tube T402, the other end of varistor Ry405, varistor Ry406
Other end connection, the emitter stage of the power tube T402 exports galvanic negative pole, electric capacity C403 with DC-DC converter (2)
The other end connection；
The other end of the varistor Ry401 is connected with the other end of the varistor Ry402 other ends, varistor Ry403
Connect, and be grounded；The three phase inverter bridge drive circuit (402) respectively with U phase inverter bridge legs (403), V phase inverter bridge legs (404),
W phase inverter bridge legs (405) connections, the three phase inverter bridge drive circuit (402) and three phase inverter bridge drive waveforms generator
(401) connect.
9. a kind of electron beam accelerating power source device according to claim 5, it is characterised in that：The pressure-oil tank (5)
Including three-phase voltage increasing transformator (501), high-voltage rectifier bridge (502), fiber optic emitter (503), screen grid power supply (504), inclined grid electricity
Source (505), filament supply (506), high-voltage electrical tube V501, inductance L501～L503, electric capacity C501～C503, resistance R501～
R503, varistor Ry501～Ry502, the three-phase voltage increasing transformator (501) are primary and three-phase scanning wave inverter (4)
Outfan is connected, and three-phase voltage increasing transformator (501) secondary is connected with high-voltage rectifier bridge (502) ac input end, the high pressure
Rectifier bridge (502) positive pole is connected with inductance L501 front ends, C501 one end, high-voltage rectifier bridge (502) negative pole and inductance L502
Front end, the C501 other ends connect, the inductance L501 rear ends and varistor Ry501 one end, electric capacity C502 one end, resistance R502
One end and inductance L503 front ends connection, inductance L502 rear ends respectively with resistance R501 one end, the electric capacity C502 other ends, resistance R503
The anode connection of one end, varistor Ry502 one end and high-voltage electrical tube V501, the varistor Ry501 other ends and electricity
Resistance R501 other end connections, and connect fiber optic emitter (503), the other end and the resistance R503 other ends of the resistance R502 connect
Connect, and be connected with fiber optic emitter (503), the varistor Ry502 other ends respectively with electric capacity C503 one end and high-tension electricity
The negative electrode of sub- pipe V501 connects and is connected to the low-pressure end of rear class voltage regulator (6), the inductance L503 rear ends and electric capacity C503
The other end connects and is connected to the high-pressure side of rear class voltage regulator (6), and the screen grid of the high-voltage electrical tube V501 is connected to screen
The outfan of power supply (504), the inclined grid of the high-voltage electrical tube V501 are connected to the outfan of inclined grid power supply (505), the height
The filament electrode of pressure electron tube V501 is connected to the outfan of filament supply (506).
10. a kind of electron beam accelerating power source device according to claim 5, it is characterised in that：The rear class voltage regulator
(6) it is including operational amplifier IC601, Low Drift Temperature resistance R601～R609, electric capacity C601, diode D601～D602, described low
Temperature drift resistance R601 one end is connected with the inductance L503 rear ends of pressure-oil tank (5), the Low Drift Temperature resistance R601 other ends respectively with it is low
Temperature drift resistance R602 one end, the connection of Low Drift Temperature resistance R604 one end, the other end and the Low Drift Temperature electricity of the Low Drift Temperature resistance R602
Resistance R603 one end connects and is grounded, and the varistor Ry502's of Low Drift Temperature resistance R603 other ends connection pressure-oil tank (5) is another
End, the other end of the Low Drift Temperature resistance R604 respectively with Low Drift Temperature resistance R605 one end, the negative electrode of diode D601, diode
The anode of D602 and the connection of Low Drift Temperature resistance R606 one end, the Low Drift Temperature resistance R605 other ends and Setting signal generator
(12) connect, the anode of the diode D601 is connected and is grounded with the negative electrode of diode D602, Low Drift Temperature resistance R607 one end,
The inverting input of the Low Drift Temperature resistance R606 other ends concatenation operation amplifier IC601, the Low Drift Temperature resistance R607's
The other end is connected with the in-phase input end of operational amplifier IC601, outfan and the Jing Low Drift Temperatures of the operational amplifier IC601
Resistance R609 is connected to the control signal of inclined grid power supply (505), and the electric capacity C601 and Low Drift Temperature resistance R608 are connected in series in fortune
Calculate between the outfan and inverting input of amplifier IC601；The rear class voltage regulator (6) is in one by thermostatic control
In the isoperibol that device (7) is controlled.
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| CN201410267554.8A CN104052252B (en) | 2014-06-16 | 2014-06-16 | Electron beam acceleration power device and control method |
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| CN105141169A (en) * | 2015-09-17 | 2015-12-09 | 桂林狮达机电技术工程有限公司 | Electron beam processing equipment precision acceleration power supply device and control method thereof |
| CN110831278B (en) | 2018-08-07 | 2022-04-19 | 卡任特照明解决方案有限公司 | Driver for LED device and LED system |
| CN114350925B (en) * | 2021-12-30 | 2023-08-04 | 桂林电子科技大学 | Method for treating metal cylindrical curved surface by scanning electron beam |
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| CN102573163A (en) * | 2012-01-18 | 2012-07-11 | 桂林电子科技大学 | Control method of high-voltage power supply of electron beam melting furnace and power supply device |
| CN103235626A (en) * | 2013-02-06 | 2013-08-07 | 桂林狮达机电技术工程有限公司 | Accelerator power supply device of rapid prototyping manufacturing equipment for electron beams and control method of accelerator power supply device |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102573163A (en) * | 2012-01-18 | 2012-07-11 | 桂林电子科技大学 | Control method of high-voltage power supply of electron beam melting furnace and power supply device |
| CN103235626A (en) * | 2013-02-06 | 2013-08-07 | 桂林狮达机电技术工程有限公司 | Accelerator power supply device of rapid prototyping manufacturing equipment for electron beams and control method of accelerator power supply device |
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| 多晶硅提纯电子束熔炼炉高压电源的研究;苏振源等;《电子科技》;20140515;第27卷(第5期);全文 * |
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