CN104037608B - Single longitudinal mode laser interlock method and device based on thermoelectric cooling and acousto-optic frequency translation - Google Patents
Single longitudinal mode laser interlock method and device based on thermoelectric cooling and acousto-optic frequency translation Download PDFInfo
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Abstract
Single longitudinal mode laser interlock method and device based on thermoelectric cooling and acousto-optic frequency translation belong to laser application technique field, the output laser frequency lock of the single longitudinal mode laser using acousto-optic frequency translation technology by many stylobates in thermoelectric cooling of the invention is in the same output laser frequency with reference to single longitudinal mode frequency stabilized carbon dioxide laser, so that all laser output laser have unified frequency values, purpose is to solve the relatively low deficiency of traditional frequency stabilized carbon dioxide laser frequency invariance each other, for ultra-precise laser interferometry provides a kind of new LASER Light Source.
Description
Technical field
The invention belongs to laser application technique field, particularly a kind of single longitudinal mode based on thermoelectric cooling and acousto-optic frequency translation swashs
Light device interlock method and its device.
Background technology
In recent years, the ultra precise measurement with litho machine and Digit Control Machine Tool as representative and process technology are towards large scale, high-precision
Degree, many spatial degrees of freedom synchro measure directions are developed, and the total laser power consumption to laser interferometry system is sharply increased, far
More than the output laser power of separate unit frequency stabilized carbon dioxide laser, it is therefore desirable to while being combined measurement using many frequency stabilized carbon dioxide lasers.
However, different frequency stabilized carbon dioxide lasers have differences at aspects such as frequency traeea-bility, laser wave long value, wave length shift directions, this
To bring that certainty of measurement, wavelength standard and the space coordinates of the laser interferometry system different spaces free degree are inconsistent to ask
Topic, so as to influence the integrated measurement accuracy of whole multi-dimension laser interferometer measuration system.In order to ensure laser interferometry system
Integrated measurement accuracy, it is desirable to which many frequency invariances of frequency stabilized carbon dioxide laser being applied in combination will reach 10-8, therefore frequency stabilized carbon dioxide laser
Between frequency invariance have become one of key issue of ultra precise measurement and Processing Technology Development urgent need to resolve.
Being applied to the Frequency Stabilized Lasers light source of laser interferometry system at present mainly has dual vertical mode stable frequency laser, laterally plug
Graceful frequency stabilized carbon dioxide laser and Zeeman Laser laser etc., this kind of laser is on frequency stabilization benchmark with the centre frequency of Laser gain curve
Used as the reference frequency of path length control, and the centre frequency of Laser gain curve changes with working gas air pressure and discharging condition
Become, and many frequency stabilized carbon dioxide lasers cannot accomplish highly consistent in physical parameter, therefore the reference frequency of its path length control is in the presence of poor
It is different, so as to cause the frequency invariance of many frequency stabilized carbon dioxide laser output laser relatively low, 10 can only be reached-6~10-7。
Poor in order to solve the problems, such as the frequency invariance between frequency stabilized carbon dioxide laser, Harbin Institute of Technology proposes a kind of double
Longitudinal-mode laser frequency-offset-lock method (Chinese Patent Application No. CN200910072517, CN200910072518,
CN200910072519 and CN200910072523), the method is swashed with an iodine stabilizd laser or double-longitudinal-mode laser output
The frequency of light is locked as benchmark, remaining many double-longitudinal-mode laser numerical value certain relative to reference frequency offset, from
And make the output laser of many double-longitudinal-mode lasers that there is identical wavelength (frequency), but the method in the locking of laser frequency
During, it is necessary to adjust the internal running parameter of laser, on the one hand because the mode for adjusting belongs to Indirect method, the sound of system
Answer speed relatively slow, on the other hand there is some difference due to the characterisitic parameter of each laser, laser inside work
Making changing for parameter may produce harmful effect to the frequency stability of laser, and serious situation results even in laser mistake
Lock.
The content of the invention
In view of the shortcomings of the prior art, the present invention proposes that a kind of single longitudinal mode based on thermoelectric cooling and acousto-optic frequency translation swashs
Light device interlock method, the purpose is to combine acousto-optic frequency shifters shift frequency characteristic and thermoelectric cooling single longitudinal mode frequency stabilized carbon dioxide laser it is excellent
Point, is that Ultra-precision Turning and e measurement technology provide a kind of consistent wavelength excellent LASER Light Source.Present invention also offers one kind
Single longitudinal mode laser interlock based on thermoelectric cooling and acousto-optic frequency translation.
The purpose of the present invention is achieved through the following technical solutions：
A kind of single longitudinal mode laser interlock method based on thermoelectric cooling and acousto-optic frequency translation, the method is comprised the following steps：
(1) power supply with reference to single longitudinal mode frequency stabilized carbon dioxide laser is opened, by after preheating and frequency stabilization process, laser output is single
Longitudinal mode laser, its frequency of light wave is designated as νr, this output light is separated into n >=1 tunnel, is designated as light beam X by fiber optic splitteri, i=1,
2 ..., n, respectively as single longitudinal mode laser Li, i=1,2 ..., the reference beam of n Frequency Lockings；
(2) single longitudinal mode laser L is openedi, the power supply of i=1,2 ..., n, all single longitudinal mode lasers are simultaneously into preheating
Process, measures the temperature value of current environment, and the target temperature T of preheating is set accordinglyset, and TsetHigher than environment temperature, using heat
Electric refrigerator is heated to the laser tube inside laser, the temperature of laser tube is tended to predetermined temperature value TsetAnd
Thermal equilibrium state is reached, is divided the horizontal polarization and vertical polarization laser in laser tube pair output end laser using polarization spectroscope
Amount is separated, its luminous power Pi 1, i=1,2 ..., n and Pi 2, i=1,2 ..., n is respectively by photodetector A and photodetector B
Measurement show that path length control module adjusts the positive and negative and size of TEC operating current according to preheating algorithm, makes level inclined
Shake the performance number P of laser componentsi 1=0, i=1,2 ..., n, now the laser of the main output end of laser tube and secondary output end is vertical
The single longitudinal mode laser of polarization；
(3) after warm terminates, single longitudinal mode laser Li, i=1,2 ..., n enter path length control process, path length control
Module further finely tunes the positive and negative and size of TEC operating current, makes the performance number P of vertical polarization laser componenti 2, i=
1,2 ..., n tend to maximum, and the working current value of electrothermal device is controlled according to path length control algorithm, make Pi 2, i=1,
2 ..., n remain maximum, and then the frequency of laser is tended towards stability numerical value；
(4) laser of the main output end of laser tube is designated as light beam Ti, i=1,2 ..., n, the light beam Ti, i=1,2 ..., n
Frequency is designated as νi, i=1,2 ..., n, light beam Ti, i=1,2 ..., it is f that n enters working frequencyi, i=1,2 ..., the acousto-optic of n is moved
Frequency device Si, i=1,2 ..., n carries out shift frequency, acousto-optic frequency shifters Si, i=1,2 ..., the frequency of the corresponding output laser of n is designated as νi+
fi, i=1,2 ..., n, the acousto-optic frequency shifters Si, i=1,2 ..., it is 9 that n outputs laser is divided into strength ratio by spectroscope again:1
The relatively large part light of two parts light, wherein intensity is designated as output beam Zi, i=1,2 ..., n swash respectively as single longitudinal mode
Light device Li, the output laser of i=1,2 ..., n, the relatively small part light of intensity is designated as light beam Yi, i=1,2 ..., n；
(5) by light beam Xi, i=1,2 ..., n respectively with light beam Yi, i=1,2 ..., n carries out optical frequency mixing and forms optics bat
Frequency signal, electric signal is converted to using photodetector by optical beat signal, its frequency values Δ νi=νi+fi–νr, i=1,
2 ..., n are measured by frequency measuring block, the frequency values Δ ν of the optical beat signal that frequency regulation block is obtained according to measurementi,i
=1,2 ..., n calculate light beam Xi, i=1,2 ..., n and Yi, i=1,2 ..., the frequency-splitting ν of nr–νi=fi–Δνi,i
=1,2 ..., n, and by acousto-optic frequency shifters Si, i=1,2 ..., the working frequency f of ni, i=1,2 ..., n is adjusted to νr–νi, i=
1,2 ..., n, so that single longitudinal mode laser Li, i=1,2 ..., n output beams Zi, i=1,2 ..., the frequency of n is equal to reference
Light beam Xi, the frequency of i=1,2 ..., n, i.e. νi+fi=νr, i=1,2 ..., n；
(6) circulating repetition step (4) to (5), by adjusting acousto-optic frequency shifters Si, i=1,2 ..., the working frequency f of ni,i
=1,2 ..., n make single longitudinal mode laser Li, i=1,2 ..., the output beam Z of ni, i=1,2 ..., the frequency of n is locked all the time
In same frequency value νr。
A kind of single longitudinal mode laser interlock based on thermoelectric cooling and acousto-optic frequency translation, including laser power supply A (1),
Frequency stabilization status indicator lamp (2), with reference to single longitudinal mode frequency stabilized carbon dioxide laser (3), fiber optic splitter (4), laser power supply A (1) and frequency stabilization
Status indicator lamp (2) be connected with reference to single longitudinal mode frequency stabilized carbon dioxide laser (3), with reference to single longitudinal mode frequency stabilized carbon dioxide laser (3) output end and
Fiber optic splitter (4) input is connected, and also includes that n >=1 structure is identical, single longitudinal mode laser in parallel relationship in device
Li, i=1,2 ..., n, each of which single longitudinal mode laser Li, i=1,2 ..., the assembling structure of n is：Laser power supply B
(15) it is connected with laser tube (5), laser tube (5) is placed in heat-conducting metal chamber (13), laser tube (5) and heat-conducting metal chamber (13)
Between space fill heat conduction silicone (12), laser tube temperature sensor (10) is positioned in heat conduction silicone (12), and tightly
Patch laser tube (5) outer wall, the laser tube temperature sensor (10) output termination path length control module (9), TEC
(11) it is fitted on heat-conducting metal chamber (13) outer wall, the TEC (11) input termination path length control module (9), environment
Temperature sensor (14) is connected with path length control module (9), after polarization spectroscope (6) is placed on laser tube (5) pair output end, institute
State (6) two output ends of polarization spectroscope and place photodetector A (7) and photodetector B (8), the output end of the two respectively
All it is connected with path length control module (9), before acousto-optic frequency shifters (16) are placed on laser tube (5) main output end, spectroscope (17) is put
Put between acousto-optic frequency shifters (16) and an input of optical-fiber bundling device (18), another input of optical-fiber bundling device (18)
End is connected with one of the output end of fiber optic splitter (4), and analyzer (19) is placed on the output end and light of optical-fiber bundling device (18)
Between electric explorer C (20), photodetector C (20), frequency measuring block (21), frequency regulation block (22), acousto-optic frequency translation
Device (16) is sequentially connected, and frequency-locked state indicator lamp (23) is connected with frequency regulation block (22).
The invention has the characteristics that and good result：
(1) present invention carries out Frequency Locking in parallel, all single longitudinal modes to multiple single longitudinal mode lasers using acousto-optic frequency shifters
Frequency stabilized carbon dioxide laser output laser has unified frequency values, and because the high frequency of acousto-optic frequency shifters adjusts resolving power, multiple swashs
The frequency invariance of light device may be up to 10-9, one to two orders of magnitude are improved than existing method, this is different from prior art
One of innovative point.
(2) present invention carries out Frequency Locking in parallel using acousto-optic frequency shifters to multiple single longitudinal mode lasers, because acousto-optic is moved
Frequency device frequency adjustment response speed higher, can effectively suppress optical maser wavelength drift and transition that external interference factor causes, from
And the stability and ambient adaptability of light source are improve, this is the two of the innovative point for being different from prior art.
(3) present invention carries out Frequency Locking in parallel using acousto-optic frequency shifters to multiple single longitudinal mode lasers, due to laser
The frequency adjustment mode of final output laser belongs to a kind of outside method of adjustment for laser inner laser pipe, therefore
Harmful effect will not be produced to the path length control mechanism of laser tube, be conducive to the stability and frequency stabilization precision of raising system,
This is the three of the innovative point for being different from prior art.
(4) present invention has carried out temperature control and regulation using TEC, can due to changing its operating current direction
To allow TEC to produce heat or absorb heat, so as to reduce the dependence to function of environment heat emission performance, it is right to be advantageously implemented
The quick control and regulation of laser tube temperature, improve the reaction speed of control system, and this is the innovative point for being different from prior art
Four.
Brief description of the drawings
Fig. 1 is the principle schematic of apparatus of the present invention
Fig. 2 is the schematic diagram of single longitudinal mode laser frequency stabilization structure in apparatus of the present invention
Fig. 3 is the cross-sectional view of single longitudinal mode laser thermal control mechanical structure in apparatus of the present invention
Fig. 4 is the closed loop control function block diagram of single longitudinal mode laser warm in apparatus of the present invention
Fig. 5 is the closed loop control function block diagram of single longitudinal mode laser frequency stabilization process in apparatus of the present invention
Fig. 6 is the closed loop control function block diagram of single longitudinal mode laser frequency lock procedure in apparatus of the present invention
In figure, 1 laser power supply A, 2 frequency stabilization status indicator lamps, 3 are with reference to single longitudinal mode frequency stabilized carbon dioxide laser, 4 fiber optic splitters, 5
Laser tube, 6 polarization spectroscopes, 7 photodetector A, 8 photodetector B, 9 path length control modules, 10 laser tube temperatures sensing
Device, 11 TECs, 12 heat conduction silicones, 13 heat-conducting metal chambers, 14 environment temperature sensors, 15 laser power supply B, 16 sound
Optical frequency shifter, 17 spectroscopes, 18 optical-fiber bundling devices, 19 analyzers, 20 photodetector C, 21 frequency measuring blocks, 22 frequencies are adjusted
Mould preparation block, 23 frequency-locked state indicator lamps.
Specific embodiment
Embodiment of the invention is described in detail below in conjunction with accompanying drawing.
As shown in Figure 1, Figure 2 and Figure 3, the single longitudinal mode laser based on thermoelectric cooling and acousto-optic frequency translation is mutual in apparatus of the present invention
Locking device, including laser power supply A1, frequency stabilization status indicator lamp 2, with reference to single longitudinal mode frequency stabilized carbon dioxide laser 3, fiber optic splitter 4, swash
Light device power supply A1 and frequency stabilization status indicator lamp 2 are connected with reference to single longitudinal mode frequency stabilized carbon dioxide laser 3, with reference to single longitudinal mode frequency stabilized carbon dioxide laser
3 output ends are connected with the input of fiber optic splitter 4, also include that n >=1 structure is identical, single longitudinal mode in parallel relationship in device
Laser Li, i=1,2 ..., n, each of which single longitudinal mode laser Li, i=1,2 ..., the assembling structure of n is：Laser electricity
Source B15 is connected with laser tube 5, and laser tube 5 is placed in heat-conducting metal chamber 13, the sky between laser tube 5 and heat-conducting metal chamber 13
Gap fills heat conduction silicone 12, and laser tube temperature sensor 10 is positioned in heat conduction silicone 12, and is close to the outer wall of laser tube 5,
The output of the laser tube temperature sensor 10 termination path length control module 9, TEC 11 is fitted in outside heat-conducting metal chamber 13
On wall, the input termination path length control of the TEC 11 module 9, environment temperature sensor 14 connects with path length control module 9
Connect, after polarization spectroscope 6 is placed on the secondary output end of laser tube 5,6 two output ends of the polarization spectroscope place light electrical resistivity survey respectively
Device A7 and photodetector B8 is surveyed, the output end of the two is all connected with path length control module 9, and acousto-optic frequency shifters 16 are placed on laser
Before the main output end of pipe 5, spectroscope 17 is placed between acousto-optic frequency shifters 16 and an input of optical-fiber bundling device 18, and optical fiber is closed
One of another input of beam device 18 and output end of fiber optic splitter 4 are connected, and analyzer 19 is placed on optical-fiber bundling device 18
Output end and photodetector C20 between, photodetector C20, frequency measuring block 21, frequency regulation block 22, acousto-optic
Frequency shifter 16 is sequentially connected, and frequency-locked state indicator lamp 23 is connected with frequency regulation block 22.
In view of device includes multiple structure identical single longitudinal mode frequency stabilized carbon dioxide laser L1,L2,…,Ln, these single longitudinal mode frequency stabilizations
The course of work of laser is completely the same, below only to one of single longitudinal mode frequency stabilized carbon dioxide laser L1It is operated process description,
These descriptive texts are equally applicable to other the similar single longitudinal mode frequency stabilized carbon dioxide lasers in device.
During start-up operation, laser power supply A1 is opened, preheating and frequency stabilization process is entered with reference to single longitudinal mode frequency stabilized carbon dioxide laser 3,
When the above-noted process is finished, frequency stabilization status indicator lamp 2 is enabled, is represented and enter steady operation shape with reference to single longitudinal mode frequency stabilized carbon dioxide laser 3
State, its output laser is single longitudinal mode light, and is coupled into fiber optic splitter 5, is separated into n roads frequency reference light beam, is designated as light
Beam X1,X2,…,Xn, its frequency is designated as νr, as single longitudinal mode laser L1,L2,…,LnThe reference frequency of Frequency Locking.
While frequency stabilization status indicator lamp 2 is enabled, laser tube power supply B15, single longitudinal mode frequency stabilized carbon dioxide laser L are opened1Into pre-
Thermal process.The target that path length control module 9 measures the ambient temperature value for obtaining and sets preheating according to environment temperature sensor 11
Temperature Tset, and TsetHigher than environment temperature, by TsetAs the reference input of preheating closed-loop control system as shown in Figure 4, together
When measured with laser tube temperature sensor 10 and obtain the actual temperature T of laser tube 5realAs feedback signal, path length control module 9
The difference of the two is calculated, and the positive and negative and size of the operating current of TEC 11 is adjusted according to path length control algorithm, to laser
Pipe 5 is heated or freezed, and its temperature is tended to default target temperature Tset, it is using polarization spectroscope 6 that laser tube 5 is secondary defeated
Go out to hold horizontal polarization and vertical polarization laser component in laser to separate, its luminous power P1 1And P1 2Respectively by photodetector A7
Drawn with photodetector B8 measurements, path length control module 9 adjusts the working current value of TEC 11 according to preheating algorithm,
Make the performance number P of horizontal polarization laser components1 1=0, now the laser of the main output end of laser tube 5 and secondary output end is vertical polarization
Single longitudinal mode laser.
After warm terminates, the switching single longitudinal mode laser of path length control module 9 L1Into path length control process, frequency stabilization control
Molding block 9 further finely tunes the positive and negative and size of the working current value of TEC 11, makes the power of vertical polarization laser component
Value P1 2Tend to maximum, the maximum is designated as P1 2max, and by P1 2maxAs the ginseng of frequency stabilization closed-loop control system as shown in Figure 5
Consider, while photodetector B8 to be measured the performance number P of the vertical polarization laser component for obtaining in real time1 2As feedback quantity, surely
Frequency control module 9 calculates the difference of the two, and is controlling the working current value of TEC 11 just according to path length control algorithm
Anti- and size, makes P1 2Remain maximum P1 2max, and then the frequency of laser is tended towards stability numerical value.
After frequency stabilization process terminates, laser L1Into frequency lock procedure, the single longitudinal mode laser of the main output end of laser tube 5 is made
It is the input light of acousto-optic frequency shifters 16, its frequency is designated as ν1, the working frequency of acousto-optic frequency shifters 16 is designated as f1, because acousto-optic is mutual
Effect, the frequency of the output laser of acousto-optic frequency shifters 16 is ν1+f1, it is 9 that the light beam is separated into intensity by spectroscope 17 again:1 two
The relatively large part light of light splitting, wherein intensity is designated as light beam Z1, as single longitudinal mode laser L1Output laser, intensity is relative
Less part light is designated as light beam Y1, the light beam and light beam X1By optical-fiber bundling device 18 be coupled into optical fiber synthesize it is a branch of coaxial
Light beam, the coaxial beam forms optical beat signal after passing through analyzer 19, after carrying out opto-electronic conversion through photodetector C20,
Its frequency values Δ ν1=ν1+f1–νrObtained by the measurement of frequency measuring block 21, and as Frequency Locking closed loop control as shown in Figure 6
The feed back input amount of system processed, reference input is set to zero, difference DELTA ν of the frequency regulation block 22 according to the two1, calculate
Go out light beam X1With light beam Y1Frequency-splitting be νr–ν1=f1–Δν1, and by the driving frequency f of acousto-optic frequency shifters 161It is adjusted to νr–
ν1, so that laser L1Output beam Z1Frequency (light beam Z1With light beam Y1Same frequency) it is equal to reference beam X1Frequency νr。
After the completion of said frequencies locking process, frequency regulation block 22 enables frequency-locked state indicator lamp 23.
When external environment change or other factorses cause with reference to single longitudinal mode frequency stabilized carbon dioxide laser 3 or single longitudinal mode laser L1It is defeated
When the frequency for going out laser changes, the above-mentioned frequency stabilization locking process of automatic cycle, by the work that adjusts acousto-optic frequency shifters 16 frequently
Rate f1, make single longitudinal mode laser L1Export the frequency ν of laser1All the time it is locked in reference frequency νr.Similarly, single longitudinal mode laser L2,
L3,…,LnExport the frequency ν of laser2,ν3,…,νnAlso reference frequency ν is locked in all the timerOn.
Claims (2)
1. a kind of single longitudinal mode laser interlock method based on thermoelectric cooling and acousto-optic frequency translation, it is characterised in that the method include with
Lower step：
(1) power supply with reference to single longitudinal mode frequency stabilized carbon dioxide laser is opened, by after preheating and frequency stabilization process, laser exports single longitudinal mode
Laser, its frequency of light wave is designated as νr, this output light is separated into n >=1 tunnel, is designated as light beam X by fiber optic splitteri, i=1,2 ..., n,
Respectively as single longitudinal mode laser Li, i=1,2 ..., the reference beam of n Frequency Lockings；
(2) single longitudinal mode laser L is openedi, the power supply of i=1,2 ..., n, all single longitudinal mode lasers enter warm simultaneously,
The temperature value of current environment is measured, the target temperature T of preheating is set accordinglyset, and TsetHigher than environment temperature, using thermoelectric cooling
Device is heated to the laser tube inside laser, the temperature of laser tube is tended to predetermined temperature value TsetAnd reach heat
Poised state, is divided the horizontal polarization and vertical polarization laser component in laser tube pair output end laser using polarization spectroscope
From its luminous power Pi 1, i=1,2 ..., n and Pi 2, i=1,2 ..., n is measured by photodetector A and photodetector B respectively
Draw, path length control module adjusts the positive and negative and size of TEC operating current according to preheating algorithm, swash horizontal polarization
The performance number P of light componenti 1=0, i=1,2 ..., n, now the laser of the main output end of laser tube and secondary output end is vertical polarization
Single longitudinal mode laser；
(3) after warm terminates, single longitudinal mode laser Li, i=1,2 ..., n enter path length control process, path length control module
The positive and negative and size of TEC operating current is further finely tuned, makes the performance number P of vertical polarization laser componenti 2, i=1,
2 ..., n tend to maximum, and the working current value of electrothermal device is controlled according to path length control algorithm, make Pi 2, i=1,2 ...,
N remains maximum, and then the frequency of laser is tended towards stability numerical value；
(4) laser of the main output end of laser tube is designated as light beam Ti, i=1,2 ..., n, the light beam Ti, i=1,2 ..., n frequencies
It is designated as νi, i=1,2 ..., n, light beam Ti, i=1,2 ..., it is f that n enters working frequencyi, i=1,2 ..., the acousto-optic frequency shifters of n
Si, i=1,2 ..., n carries out shift frequency, acousto-optic frequency shifters Si, i=1,2 ..., the frequency of the corresponding output laser of n is designated as νi+fi,i
=1,2 ..., n, the acousto-optic frequency shifters Si, i=1,2 ..., it is 9 that n outputs laser is divided into strength ratio by spectroscope again:The two of 1
The relatively large part light of part light, wherein intensity is designated as output beam Zi, i=1,2 ..., n, respectively as single longitudinal mode laser
Device Li, the output laser of i=1,2 ..., n, the relatively small part light of intensity is designated as light beam Yi, i=1,2 ..., n；
(5) by light beam Xi, i=1,2 ..., n respectively with light beam Yi, i=1,2 ..., n carries out optical frequency mixing and forms optical beat letter
Number, optical beat signal is converted into electric signal using photodetector, its frequency values Δ νi=νi+fi–νr, i=1,2 ..., n
Measured by frequency measuring block, the frequency values Δ ν of the optical beat signal that frequency regulation block is obtained according to measurementi, i=1,
2 ..., n, calculate light beam Xi, i=1,2 ..., n and Yi, i=1,2 ..., the frequency-splitting ν of nr–νi=fi–Δνi, i=1,
2 ..., n, and by acousto-optic frequency shifters Si, i=1,2 ..., the working frequency f of ni, i=1,2 ..., n is adjusted to νr–νi, i=1,
2 ..., n, so that single longitudinal mode laser Li, i=1,2 ..., n output beams Zi, i=1,2 ..., the frequency of n is equal to reference light
Beam Xi, the frequency of i=1,2 ..., n, i.e. νi+fi=νr, i=1,2 ..., n；
(6) circulating repetition step (4) to (5), by adjusting acousto-optic frequency shifters Si, i=1,2 ..., the working frequency f of ni, i=1,
2 ..., n, make single longitudinal mode laser Li, i=1,2 ..., the output beam Z of ni, i=1,2 ..., the frequency of n is locked in together all the time
One frequency values νr。
2. it is a kind of single longitudinal mode laser interlock based on thermoelectric cooling and acousto-optic frequency translation, including laser power supply A (1), steady
Frequency status indicator lamp (2), with reference to single longitudinal mode frequency stabilized carbon dioxide laser (3), fiber optic splitter (4), laser power supply A (1) and frequency stabilization shape
State indicator lamp (2) is connected with reference to single longitudinal mode frequency stabilized carbon dioxide laser (3), with reference to single longitudinal mode frequency stabilized carbon dioxide laser (3) output end and light
Fine beam splitter (4) input connection, it is characterised in that also include that n >=1 structure is identical, single longitudinal mode in parallel relationship in device
Laser Li, i=1,2 ..., n, each of which single longitudinal mode laser Li, i=1,2 ..., the assembling structure of n is：Laser electricity
Source B (15) is connected with laser tube (5), and laser tube (5) is placed in heat-conducting metal chamber (13), laser tube (5) and heat-conducting metal chamber
(13) heat conduction silicone (12) is filled in the space between, and laser tube temperature sensor (10) is positioned in heat conduction silicone (12),
And it is close to laser tube (5) outer wall, the laser tube temperature sensor (10) output termination path length control module (9), thermoelectric cooling
Device (11) is fitted on heat-conducting metal chamber (13) outer wall, the TEC (11) input termination path length control module (9), ring
Border temperature sensor (14) is connected with path length control module (9), after polarization spectroscope (6) is placed on laser tube (5) pair output end,
(6) two output ends of the polarization spectroscope place photodetector A (7) and photodetector B (8), the output of the two respectively
End is all connected with path length control module (9), before acousto-optic frequency shifters (16) are placed on laser tube (5) main output end, spectroscope (17)
It is placed between acousto-optic frequency shifters (16) and an input of optical-fiber bundling device (18), another of optical-fiber bundling device (18) is defeated
Enter end to be connected with one of the output end of fiber optic splitter (4), analyzer (19) be placed on optical-fiber bundling device (18) output end and
Between photodetector C (20), photodetector C (20), frequency measuring block (21), frequency regulation block (22), acousto-optic are moved
Frequency device (16) is sequentially connected, and frequency-locked state indicator lamp (23) is connected with frequency regulation block (22).
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| CN101615757A (en) * | 2009-07-17 | 2009-12-30 | 哈尔滨工业大学 | Double-longitudinal-mode laser composite frequency stabilization method and device based on thermoelectric cooling module |
| CN203607670U (en) * | 2013-12-12 | 2014-05-21 | 中国科学院国家授时中心 | Laser power stabilizing device capable of improving frequency stabilization performance of semiconductor laser |
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| JP2002368317A (en) * | 2001-06-07 | 2002-12-20 | Fujitsu Ltd | Multi-wavelength light source using acoustooptic tunable filter |
| CN101609958A (en) * | 2009-07-17 | 2009-12-23 | 哈尔滨工业大学 | Double-longitudinal-mode laser frequency-offset-lock method and device based on thermoelectric cooling module |
| CN101615757A (en) * | 2009-07-17 | 2009-12-30 | 哈尔滨工业大学 | Double-longitudinal-mode laser composite frequency stabilization method and device based on thermoelectric cooling module |
| CN203607670U (en) * | 2013-12-12 | 2014-05-21 | 中国科学院国家授时中心 | Laser power stabilizing device capable of improving frequency stabilization performance of semiconductor laser |
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