CN104037454B - The preparation method of power lithium-ion battery - Google Patents

The preparation method of power lithium-ion battery Download PDF

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Publication number
CN104037454B
CN104037454B CN201410226249.4A CN201410226249A CN104037454B CN 104037454 B CN104037454 B CN 104037454B CN 201410226249 A CN201410226249 A CN 201410226249A CN 104037454 B CN104037454 B CN 104037454B
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predetermined pattern
layer
lithium
metal level
insulating barrier
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CN104037454A (en
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徐荣
黄进清
桂松
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SHENZHEN HONGYUAN BODE NEW ENERGY TECHNOLOGY DEVELOPMENT CO., LTD.
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HONGYUAN HOLDINGS Ltd
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    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01MPROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
    • H01M10/00Secondary cells; Manufacture thereof
    • H01M10/05Accumulators with non-aqueous electrolyte
    • H01M10/058Construction or manufacture
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01MPROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
    • H01M10/00Secondary cells; Manufacture thereof
    • H01M10/05Accumulators with non-aqueous electrolyte
    • H01M10/052Li-accumulators
    • H01M10/0525Rocking-chair batteries, i.e. batteries with lithium insertion or intercalation in both electrodes; Lithium-ion batteries
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02EREDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E60/00Enabling technologies; Technologies with a potential or indirect contribution to GHG emissions mitigation
    • Y02E60/10Energy storage using batteries
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02PCLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P70/00Climate change mitigation technologies in the production process for final industrial or consumer products
    • Y02P70/50Manufacturing or production processes characterised by the final manufactured product

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  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Manufacturing & Machinery (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Electrochemistry (AREA)
  • General Chemical & Material Sciences (AREA)
  • Materials Engineering (AREA)
  • Secondary Cells (AREA)
  • Battery Electrode And Active Subsutance (AREA)

Abstract

The present invention provides the preparation method of a kind of power lithium-ion battery, including providing a planar substrates;The insulating barrier of predetermined pattern is formed on planar substrates;The conductive layer of predetermined pattern is formed on the insulating barrier of predetermined pattern;Carbonaceous material is provided;Forming the carbonaceous material layer of predetermined pattern on the conductive layer of predetermined pattern, then pressurize, dry, this conductive layer and carbon compound layer are collectively forming negative pole;The barrier film of predetermined pattern is formed on negative pole;Lithium hydrochlorate mixture is provided;The lithium hydrochlorate mixture layer of predetermined pattern is formed on barrier film;Forming the metal level of predetermined pattern on lithium hydrochlorate mixture layer, then pressurize, dry, this lithium hydrochlorate mixture layer and metal level are collectively forming positive pole;Positive pole is formed the insulating barrier of predetermined pattern;According to the number of plies of predetermined battery monomer, determine to repeat the number of times of step 3 10, be then repeated in step 3-10 by number of times;Step 12, to barrier film add electrolyte.

Description

The preparation method of power lithium-ion battery
Technical field
The present invention relates to the manufacture craft of a kind of battery, particularly relate to the making of a kind of power lithium-ion battery Method.
Background technology
Lithium ion battery is a kind of secondary cell (rechargeable battery), and it relies primarily on lithium ion and at positive pole and bears Move work between pole.In charge and discharge process, Li+ comes and goes between two electrodes and embeds and deintercalation: During rechargable battery, Li+, from positive pole deintercalation, embeds negative pole through electrolyte, and negative pole is in rich lithium state;Electric discharge Time the most contrary.Lithium ion battery energy density is big, and average output voltage is high;Self discharge is little, not memory Effect.A width of-20 DEG C~60 DEG C of operating temperature range.Cycle performance is superior, can fast charging and discharging, charging Efficiency is up to 100%, and power output is big.Service life is long.Without poisonous and harmful substance, it is referred to as Green battery.
The generally composition of lithium ion battery includes:
1, positive active material is generally LiMn2O4, cobalt acid lithium or nickel-cobalt lithium manganate material, conduction Collector uses the electrolysis aluminium lamination of thickness 10-20 micron;
2, a kind of macromolecule membrane through specially-shaped of barrier film, is generally formed by PP or PE, also has It is compounded to form by PE with PP.Barrier film is used for isolating battery core positive and negative plate, to prevent positive and negative plate direct Contact causes short circuit;In terms of microcosmic angle, membrane surface is network structure, has microcellular structure, permissible Allow lithium ion pass freely through, and electronics can not pass through.The membrane thicknesses that lithium ion battery with aluminum shell uses is usual For 16um, 18um, 20um etc., the membrane thicknesses that electrokinetic cell uses is with more than 30um as main flow;
3, negative electrode active material is graphite, or the carbon of approximation graphite-structure, and conductive current collector uses thickness The electrolysis layers of copper of degree 7-15 micron;
4, electrolyte solution solute: frequently with lithium salts, such as lithium perchlorate (LiClO4), hexafluorophosphoric acid Lithium (LiPF6), LiBF4 (LiBF4);Solvent: owing to the operating voltage of battery is far above the decomposition of water Voltage, therefore lithium ion battery is frequently with organic solvent, as ether, vinyl carbonate, propylene carbonate, Diethyl carbonate etc.;
5, shell is divided into box hat, aluminum hull, nickel plating iron-clad (cylindrical battery use), aluminum plastic film (soft Packaging) etc.;
6, the both positive and negative polarity exit of block battery.
The generally manufacture craft of lithium ion battery comprises the steps:
1, slurrying: mix with the both positive and negative polarity active material of powder respectively with special solvent and binding agent, Agitated uniformly after, make the both positive and negative polarity material of pulpous state;
2, film: anode and cathode slurry is uniformly coated on respectively layer on surface of metal by automatic coating machine, After automatically drying, automatic shearing makes both positive and negative polarity pole piece;
3, assembling: inject electricity by the positive plate barrier film top-down order of negative plate barrier film is rolled Solve the technical process such as liquid, sealing, positive and negative tab welding, i.e. complete the assembling process of battery, make finished product Battery;
4, chemical conversion: resultant battery is placed test cabinet and carries out charge-discharge test, filters out qualified finished product electricity Pond, waits to dispatch from the factory.
But, current lithium ion battery makes and uses tradition web-like formula technique, and uniformity and yields are neither Ideal, haves much room for improvement.
Summary of the invention
It is an object of the invention to provide the preparation method of a kind of power lithium-ion battery, it is put down in large area Substrate enterprising parallel planes formula in face is processed, and is directly produced out battery pack, and production efficiency is high, and characteristic uniformity is good, Product yields promotes, and advantageously reduces battery production cost.
For achieving the above object, the present invention provides the preparation method of a kind of power lithium-ion battery, including such as Lower step:
Step 1, provide a planar substrates;
Step 2, on planar substrates, form the insulating barrier of predetermined pattern;
Step 3, on the insulating barrier of predetermined pattern, form the conductive layer of predetermined pattern;
Step 4, offer carbonaceous material;
Step 5, on the conductive layer of predetermined pattern, form the carbonaceous material layer of predetermined pattern, then pressurization, Drying, this conductive layer and carbon compound layer are collectively forming negative pole;
Step 6, on negative pole, form the barrier film of predetermined pattern;
Step 7, offer lithium hydrochlorate mixture;
Step 8, on barrier film, form the lithium hydrochlorate mixture layer of predetermined pattern;
Step 9, on lithium hydrochlorate mixture layer, form the metal level of predetermined pattern, then pressurize, dry, This lithium hydrochlorate mixture layer and metal level are collectively forming positive pole;
Step 10, on positive pole, form the insulating barrier of predetermined pattern;
Step 11, the number of plies according to predetermined battery monomer, determine to repeat the number of times of step 3 10, then press Number of times is repeated in step 3-10;
Step 12, to barrier film add electrolyte.
The planar substrates Ceramics substrate of described step 1, step 1 is also included in the two sides shape of planar substrates Become metal level to be used as electric capacity, preferred Cu or Al of this metal level.
Described planar substrates is divided into several base board unit, and the area of each base board unit is for forming one Area required for battery cell.
Described predetermined pattern forms one or more battery pack jointly on planar substrates, at each substrate list Forming a battery unit in unit, each battery unit includes several stacked battery cell, and this is several folded The battery cell put is connected in series or parallel according to need, and each battery unit on planar substrates depends on Needs are connected in series or parallel and form one or more battery pack.
The insulating barrier preferred PI material of described step 2, step 2 is directly pressed predetermined pattern on planar substrates and is coated with Layer of cloth, or first coat an insulating barrier, then this insulating barrier is carried out patterned process, is formed predetermined The insulating barrier of pattern.
Arranging of the conductive layer of described step 3 forms conductive layer by predetermined pattern the most on the insulating layer, or first Form metal level, then this metal level is carried out patterned process, form the conductive layer of predetermined pattern;Institute State conductive layer and be preferably layers of copper.
Arranging of the carbonaceous material layer of described step 5 is directly coated with carbonaceous material layer by predetermined pattern, or is first coated with One layer of carbonaceous material of cloth, then carries out patterned process to this layer of carbonaceous material, forms containing of predetermined pattern Carbon material layer, described carbonaceous material is preferably carbon slurry.
Arranging of the lithium hydrochlorate mixture layer of step 8 is directly coated with lithium hydrochlorate mixture layer by predetermined pattern, or First one layer of lithium hydrochlorate mixture of coating, then carries out patterned process to this layer of lithium hydrochlorate mixture, is formed The lithium hydrochlorate mixture layer of predetermined pattern, described lithium hydrochlorate mixture be preferably cobalt acid lithium, LiFePO4, Or the mixture of nickle cobalt lithium manganate.
The setting of the metal level of step 9 directly forms metal level on lithium hydrochlorate mixture layer by predetermined pattern, Or it is initially formed metal level on lithium hydrochlorate mixture layer, then this metal level is carried out patterned process, shape Become the metal level of predetermined pattern;Described metal level is preferably aluminium lamination.
The material of the insulating barrier of step 10 is PI, is coated with one layer of PI the most on the metal layer by predetermined pattern, or One layer of PI of coating the most on the metal layer, then carries out patterned process to PI layer, forms the exhausted of predetermined pattern Edge layer.
The preparation method of described power lithium-ion battery also includes step 13, cutting planes substrate, is formed The secondary substrate of several predetermined dimensions, substrate includes several base board unit each time, and it forms a battery pack.
The thickness of the planar substrates of step 1 is 100um to 50mm;The thickness of the insulating barrier of step 2 is 10-15um;The thickness of the conductive layer of step 3 is 10-20um;The thickness of the carbonaceous material layer of step 5 is 0.21-0.23cm;The thickness of the barrier film of step 6 is 15-25um;The thickness of the lithium hydrochlorate mixture layer of step 8 Degree is 0.20-0.23cm;The thickness of the metal level of step 9 is 10-20um;The thickness of the insulating barrier of step 10 For 10-15um.
Described barrier film is pressed predetermined pattern coating and is arranged, or first one layer of barrier film of coating, then carries out this barrier film Patterned process, forms the barrier film of predetermined pattern.
Described step 12 adds electrolyte to barrier film by the way of soaking or injecting electrolyte.
Beneficial effects of the present invention: the preparation method of power lithium-ion battery of the present invention on planar substrates in The making of multiple battery cell can be carried out in one procedure simultaneously, improve production efficiency, uniform in characteristic Property and product yields be all substantially improved, and simultaneously the plurality of battery cell is attached form battery Group, improves production efficiency further, and the assembling of battery pack self and externally installing when facilitating follow-up use, Thus advantageously reduce cost.
In order to be able to be further understood that inventive feature and technology contents, refer to below in connection with this Bright detailed description.
Detailed description of the invention
By further illustrating the technological means and effect thereof that the present invention taked, below in conjunction with the present invention's Preferred embodiment is described in detail.
The preparation method of power lithium-ion battery of the present invention comprises the steps:
Step 1, provide a planar substrates;
Step 2, on planar substrates, form the insulating barrier of predetermined pattern;
Step 3, on the insulating barrier of predetermined pattern, form the conductive layer of predetermined pattern;
Step 4, offer carbonaceous material;
Step 5, on the conductive layer of predetermined pattern, form the carbonaceous material layer of predetermined pattern, then pressurization, Drying, this conductive layer and carbon compound layer are collectively forming negative pole;
Step 6, on negative pole, form the barrier film of predetermined pattern;
Step 7, offer lithium hydrochlorate mixture;
Step 8, on barrier film, form the lithium hydrochlorate mixture layer of predetermined pattern;
Step 9, on lithium hydrochlorate mixture layer, form the metal level of predetermined pattern, then pressurize, dry, This lithium hydrochlorate mixture layer and metal level are collectively forming positive pole;
Step 10, on positive pole, form the insulating barrier of predetermined pattern;
Step 11, the number of plies according to predetermined battery monomer, determine to repeat the number of times of step 3 10, then press Number of times is repeated in step 3-10;
Step 12, to barrier film add electrolyte.
The planar substrates Ceramics substrate of described step 1, step 1 is also included in the two sides shape of planar substrates Become metal level to be used as electric capacity, preferred Cu or Al of this metal level.
Described planar substrates is divided into several base board unit, and the area of each base board unit is for forming one Area required for battery cell.
Described predetermined pattern forms one or more battery pack jointly on planar substrates, at each substrate list Forming a battery unit in unit, each battery unit includes several stacked battery cell, and this is several folded The battery cell put is connected in series or parallel according to need, and each battery unit on planar substrates depends on Needs are connected in series or parallel and form one or more battery pack.
Insulating barrier preferred PI (polyimide) material of described step 2, step 2 is directly pressed pre-on planar substrates Determine pattern and be coated with layer of cloth, or first coat an insulating barrier, then this insulating barrier is carried out patterned process, Form the insulating barrier of predetermined pattern.
Arranging of the conductive layer of described step 3 forms conductive layer by predetermined pattern the most on the insulating layer, or first Form metal level, then this metal level is carried out patterned process, form the conductive layer of predetermined pattern;Institute State conductive layer and be preferably layers of copper.
Arranging of the carbonaceous material layer of described step 5 is directly coated with carbonaceous material layer by predetermined pattern, or is first coated with One layer of carbonaceous material of cloth, then carries out patterned process to this layer of carbonaceous material, forms containing of predetermined pattern Carbon material layer, described carbonaceous material is preferably carbon slurry.
Arranging of the lithium hydrochlorate mixture layer of step 8 is directly coated with lithium hydrochlorate mixture layer by predetermined pattern, or First one layer of lithium hydrochlorate mixture of coating, then carries out patterned process to this layer of lithium hydrochlorate mixture, is formed The lithium hydrochlorate mixture layer of predetermined pattern, described lithium hydrochlorate mixture be preferably cobalt acid lithium, LiFePO4, Or the mixture of nickle cobalt lithium manganate.
The setting of the metal level of step 9 directly forms metal level on lithium hydrochlorate mixture layer by predetermined pattern, Or it is initially formed metal level on lithium hydrochlorate mixture layer, then this metal level is carried out patterned process, shape Become the metal level of predetermined pattern;Described metal level is preferably aluminium lamination.
The material of the insulating barrier of step 10 is PI, is coated with one layer of PI the most on the metal layer by predetermined pattern, or One layer of PI of coating the most on the metal layer, then carries out patterned process to PI layer, forms the exhausted of predetermined pattern Edge layer.
Described barrier film is pressed predetermined pattern coating and is arranged, or first one layer of barrier film of coating, then carries out this barrier film Patterned process, forms the barrier film of predetermined pattern.
Described step 12 adds electrolyte to barrier film by the way of soaking or injecting electrolyte.
The preparation method of described power lithium-ion battery also includes step 13, cutting planes substrate, is formed The secondary substrate of several predetermined dimensions, substrate includes several base board unit each time, and it forms a battery pack. For traffic or the means of transport of planar substrates, such as vehicle, aircraft, tractor, fork truck etc. can be held, Directly whole planar substrates can be made a battery pack, it is not necessary to cutting.For plane can not be held The traffic of substrate or means of transport, then can cut planar substrates according to the size needs that can hold Cut, form the secondary substrate of several predetermined dimension, on substrate, form a battery pack each time, the most several The battery pack of secondary substrate is electrically connected with again, is installed on vehicle.This will be by flat relative to prior art Face substrate is cut by base board unit, is formed one by one such as the battery unit of base board unit size, is also Improve the biggest production efficiency, and be convenient to follow-up use installation.
The thickness of the planar substrates of step 1 is 100um to 50mm;The thickness of the insulating barrier of step 2 is 10-15um;The thickness of the conductive layer of step 3 is 10-20um;The thickness of the carbonaceous material layer of step 5 is 0.21-0.23cm;The thickness of the barrier film of step 6 is 15-25um;The thickness of the lithium hydrochlorate mixture layer of step 8 Degree is 0.20-0.23cm;The thickness of the metal level of step 9 is 10-20um;The thickness of the insulating barrier of step 10 For 10-15um.
Above-mentioned patterned process, can use existing technique to form the insulating barrier of predetermined pattern as required, Such as lithographic, etch process etc..
Above-mentioned formation conductive layer or metal level, can use existing technique to process, and such as chemical gaseous phase is sunk Long-pending or evaporation etc..
Step 3-10 forms individual layer battery cell, and thickness 0.66cm, the voltage of each battery cell is 3.5V. Step 11 is repeated 6 times, and forms 7 layers of battery cell altogether, and thickness is 4.62CM, these 7 layers of battery cell series connection, The voltage of the single battery then formed is 24V.
In sum, the preparation method of power lithium-ion battery of the present invention on planar substrates in a procedure In can carry out the making of multiple battery cell simultaneously, improve production efficiency, in characteristic uniformity and product Yields is all substantially improved, and is attached the plurality of battery cell forming battery pack simultaneously, enters one Step improves production efficiency, and the assembling of battery pack self and externally installing when facilitating follow-up use, thus has It is beneficial to reduce cost.
The above, for the person of ordinary skill of the art, can be according to the technical side of the present invention Other various corresponding changes and deformation are made in case and technology design, and all these change and deformation are all answered Belong to the protection domain of the claims in the present invention.

Claims (9)

1. the preparation method of a power lithium-ion battery, it is characterised in that comprise the steps:
Step 1, provide a planar substrates;
Step 2, on planar substrates, form the insulating barrier of predetermined pattern;
Step 3, on the insulating barrier of predetermined pattern, form the conductive layer of predetermined pattern;
Step 4, offer carbonaceous material;
Step 5, on the conductive layer of predetermined pattern, form the carbonaceous material layer of predetermined pattern, then pressurization, Drying, this conductive layer and carbonaceous material layer are collectively forming negative pole;
Step 6, on negative pole, form the barrier film of predetermined pattern;
Step 7, offer lithium hydrochlorate mixture;
Step 8, on barrier film, form the lithium hydrochlorate mixture layer of predetermined pattern;
Step 9, on lithium hydrochlorate mixture layer, form the metal level of predetermined pattern, then pressurize, dry, This lithium hydrochlorate mixture layer and metal level are collectively forming positive pole;
Step 10, on positive pole, form the insulating barrier of predetermined pattern;
Step 11, the number of plies according to predetermined battery monomer, determine to repeat the number of times of step 3 10, then press Number of times is repeated in step 3-10;
Step 12, to barrier film add electrolyte;
Also include: step 13, cutting planes substrate, form the secondary substrate of several predetermined dimension, each time Substrate includes several base board unit, forms a battery pack each time on substrate.
2. the preparation method of power lithium-ion battery as claimed in claim 1, it is characterised in that described The planar substrates Ceramics substrate of step 1, step 1 is also included in the two sides of planar substrates and forms metal level To be used as electric capacity, this metal level is Cu or Al;Described planar substrates is divided into several base board unit, each The area of individual base board unit is to form the area required for a battery cell.
3. the preparation method of power lithium-ion battery as claimed in claim 2, it is characterised in that described Predetermined pattern forms one or more battery pack jointly on planar substrates, is formed on each base board unit One battery unit, each battery unit includes several stacked battery cell, these several stacked batteries Monomer is connected in series or parallel according to need, and each battery unit on planar substrates is carried out according to need The one or more battery pack of formation connected in series or in parallel.
4. the preparation method of power lithium-ion battery as claimed in claim 1, it is characterised in that described The insulating barrier of step 2 is polyimide material, and step 2 directly presses predetermined pattern coating absolutely on planar substrates Edge layer, or first coat an insulating barrier, then this insulating barrier is carried out patterned process, forms predetermined pattern Insulating barrier;The material of the insulating barrier of described step 10 is polyimides, by predetermined pattern directly at metal It is coated with a strata acid imide on layer, or is first coated with a strata acid imide on the metal layer, then to polyimides Layer carries out patterned process, forms the insulating barrier of predetermined pattern.
5. the preparation method of power lithium-ion battery as claimed in claim 1, it is characterised in that described Arranging of the conductive layer of step 3 forms conductive layer by predetermined pattern the most on the insulating layer, or is initially formed metal Layer, then carries out patterned process to this metal level, forms the conductive layer of predetermined pattern;Described conductive layer For layers of copper.
6. the preparation method of power lithium-ion battery as claimed in claim 1, it is characterised in that described Arranging of the carbonaceous material layer of step 5 is directly coated with carbonaceous material layer by predetermined pattern, or first coating one layer contains Material with carbon element, then carries out patterned process to this layer of carbonaceous material, forms the carbonaceous material layer of predetermined pattern, Described carbonaceous material is carbon slurry.
7. the preparation method of power lithium-ion battery as claimed in claim 1, it is characterised in that step 8 Arranging of lithium hydrochlorate mixture layer be directly coated with lithium hydrochlorate mixture layer by predetermined pattern, or be first coated with one Layer lithium hydrochlorate mixture, then carries out patterned process to this layer of lithium hydrochlorate mixture, forms predetermined pattern Lithium hydrochlorate mixture layer, described lithium hydrochlorate mixture is cobalt acid lithium, LiFePO4, nickle cobalt lithium manganate Mixture.
8. the preparation method of power lithium-ion battery as claimed in claim 1, it is characterised in that step 9 The setting of metal level directly form metal level on lithium hydrochlorate mixture layer by predetermined pattern, or be initially formed Metal level, on lithium hydrochlorate mixture layer, then carries out patterned process to this metal level, forms predetermined figure The metal level of case;Described metal level is aluminium lamination;Described barrier film is pressed predetermined pattern coating and is arranged, or is first coated with One layer of barrier film, then carries out patterned process to this barrier film, forms the barrier film of predetermined pattern;Described step 12 add electrolyte to barrier film by the way of injecting electrolyte.
9. the preparation method of power lithium-ion battery as claimed in claim 1, it is characterised in that step 1 The thickness of planar substrates be 100 μm to 50mm;The thickness of the insulating barrier of step 2 is 10-15 μm;Step 3 The thickness of conductive layer be 10-20 μm;The thickness of the carbonaceous material layer of step 5 is 0.21-0.23cm;Step 6 The thickness of barrier film be 15-25 μm;The thickness of the lithium hydrochlorate mixture layer of step 8 is 0.20-0.23cm;Step The thickness of the metal level of rapid 9 is 10-20 μm;The thickness of the insulating barrier of step 10 is 10-15 μm.
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