CN104034322A - Device for measuring angular speed through optical suspension rotor microgyroscope - Google Patents
Device for measuring angular speed through optical suspension rotor microgyroscope Download PDFInfo
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- CN104034322A CN104034322A CN201410274332.9A CN201410274332A CN104034322A CN 104034322 A CN104034322 A CN 104034322A CN 201410274332 A CN201410274332 A CN 201410274332A CN 104034322 A CN104034322 A CN 104034322A
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- rotor
- microballoon
- dimensional
- ligh trap
- light
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
- G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
- G01C19/02—Rotary gyroscopes
- G01C19/04—Details
- G01C19/06—Rotors
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
- G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
- G01C19/02—Rotary gyroscopes
- G01C19/42—Rotary gyroscopes for indicating rate of turn; for integrating rate of turn
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- Engineering & Computer Science (AREA)
- General Physics & Mathematics (AREA)
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Abstract
The invention discloses a device for measuring the angular speed through an optical suspension rotor microgyroscope. The device comprises a laser device, a light intensity modulator, a three-dimensional vortex light trap system, a base, a parallel light source, a microsphere rotor, a photoelectric image detector, a processor and a three-dimensional light trap stabilizing capturing system, wherein the three-dimensional vortex light trap system is fixed on the base; laser emitted from the laser device enters the three-dimensional vortex light trap system through the light intensity modulator; a birefringence quartz microsphere is stably captured in a central position of a rotating shaft of an object to be measured through the three-dimensional vortex light trap system. By adopting the device, errors caused by mechanical contact of a common acceleration measuring device are eliminated, high measurement precision is achieved, angular rates of two freedom degrees can be simultaneously detected, and the size and the cost of a device of a micro inertial measurement unit can be reduced and lowered.
Description
Technical field
The present invention relates to the device of measured angular speed, especially a kind of device of optical levitation rotor micro gyro measured angular speed.
Background technology
According to quantum theory, light beam is a group has again momentum photon with light velocity motion, existing quality.When photon incides dielectric surface, refraction and reflection occur, the speed of photon and direction change, and cause the variation of its momentum vector.Just can be released by the law of conservation of momentum, when light beam incident particulate, the momentum change amount of photon is exactly the momentum change amount of particulate.So light beam exists the effect of power to particulate, be called optical radiation and press.Optical radiation is pressed and has been comprised along the scattering force of direction of beam propagation and always pointed to light intensity compared with the gradient force of strength.Under the effect of these two power, light beam can catch particulate in certain area, even it is stabilized in certain ad-hoc location, this region is called ligh trap.Research shows, in some special light beam (as circularly polarized Laguerre-Gaussian beam), photon carries orbital angular momentum, thereby its orbital angular momentum can be passed to particle in interacting with the mechanics of birefringence particle, and then make particle obtain angular momentum and deflect.Utilize two single-mode fiber outgoing vortex beams of accurately aiming at, propagating in opposite directions, the line polarisation that becomes optical fiber outgoing by wavelength/4 slide is rotatory polarization, can be to the birefringence particulate moment that rotates.Change the luminous power size in two optical fiber, just can change the size of rotating torque.
The basic functional principle of suspension rotor micro gyro is to utilize gyroscopic inertia and the precession of the rotor of High Rotation Speed.Suspension rotor in the null balance position of housing, and is playing to do high speed rotation around its maximum principal axis of inertia under optically-active bundle at the effect low suspension of optical levitation supporting power.In the time that the external world applies power angle speed, holding position is constant owing to doing High Rotation Speed to possess gyroscopic effect for rotor, and the position of stator is along with extraneous load changes, therefore the relative position between rotor and stator changes, and rotor has departed from relative equilibrium position.When rotor departs from behind relative equilibrium position, gather the hot spot changing with rotational angle by photoelectric image detector.By detecting light spot shape and light distribution, can obtain the corresponding information of extraneous power angle speed, vortex beams according to this angular velocity information on stator applies corresponding light intensity, according to the precession of gyro, the vortex beams applying can make rotor return to relative equilibrium position, thereby reach the effect of the FEEDBACK CONTROL to gyro, changed and can calculate angular velocity by final modulation light intensity.
There are at present numerous method of testings about angular acceleration and device.The most general principle is utilized vibration gyroscope measured angular speed exactly.Vibration gyroscope is all to utilize vibrating machine element as detecting quality substantially, and between the structure exciting mode causing based on Coriolis acceleration and sensed-mode, the transfer of energy detects angular velocity.According to mechanical vibration principle of work, excitation driven-mode and sensed-mode will carry out accurate frequency tuning, thereby vibrating micromechanical gyro instrument has following shortcoming: 1) detect quality and conventionally prop up outstanding by the flexible support beam being attached on substrate, for two kinds of mode of oscillations that make an outstanding vibrational structure reach matched well, supporting construction need be carried out symmetric design and three-dimensional micro-processing, technical difficulty and expend large.2) the outstanding vibrational structure being attached on substrate makes the precision performance of gyro be subject to the impact of manufacturing defect larger, thereby the very difficult guarantee of the design accuracy of device mechanical spring constant, and has mechanical couplings quadrature error problem.3) for improving the sensitivity of vibration rate gyro, require the resonance frequency coupling of excitation driven-mode and sensed-mode, thereby except reducing the bandwidth of system responses, also can correspondingly make system responses to becoming very sensitive because manufacturing defect, environmental baseline change the system parameter variations causing, be easy to make the natural frequency of driven-mode or sensed-mode to change.All application that all restricts vibration gyroscope above.
Summary of the invention
The object of the invention is the deficiency for existing machinery gyro to measure angular velocity, a kind of device of optical levitation rotor micro gyro measured angular speed has been proposed, improve angular velocity measurement precision, can detect again the angular velocity of two degree of freedom simultaneously, be conducive to reduce device size and the cost of micro inertial measurement unit.
The device of optical levitation rotor micro gyro measured angular speed, comprises that laser instrument, light intensity modulator, three-dimensional vortex ligh trap system, base, parallel light source, microballoon rotor, photoelectric image detector, processor, three-dimensional ligh trap stablize capture systems, described three-dimensional vortex ligh trap system is fixed on base, the laser of laser emitting enters three-dimensional vortex ligh trap system through light intensity modulator, three-dimensional vortex ligh trap system by three groups of mutually orthogonal single-mode fibers to forming, described single-mode fiber is to by two in opposite directions and aim at good single-mode fiber composition, the tail optical fiber end face of single-mode fiber all sticks wavelength/4 slide, output terminal is separately fixed on base, between the output end face of two single-mode fibers, keep interval, microballoon rotor described in placing one in the middle at interval, birefringence quartz microballoon is stablized the stable object under test spindle central position that is captured in of capture systems by three-dimensional ligh trap, parallel light source is positioned at the below of birefringence quartz microballoon, photoelectric image detector is positioned at the top of birefringence quartz microballoon, after the light transmission birefringence quartz microballoon that parallel light source sends, gathered by photoelectric image detector, photoelectric image detector is connected with processor respectively with light intensity modulator.
Described microballoon rotor is the spherical birefringence particle that surface optics was processed, and radius is at 2 ~ 500 microns, and quality is 10
-11~ 10
-4gram, microballoon rotor is by photoetching technique some opaque symmetrical patterns on its surface sputtering, and described opaque symmetrical pattern forms light spot shape and the pattern around its axis of rotation axle anglec of rotation vector sensitivity in addition to microballoon rotor after making directional light irradiate microballoon rotor on photoelectric image detector.
Described three-dimensional ligh trap is stablized capture systems and is adopted six roots of sensation single-mode fiber to export three couple relative on three-dimensional, basic mode Gauss catches light makes microballoon rotor stability at spindle central place, and in real time modulation catches light light intensity and make microballoon rotor in the time having edge acceleration still be stabilized in relative equilibrium position, and make microballoon rotor depart from the distance at ligh trap center that three-dimensional ligh trap stablizes capture systems in 1 micron.
The output end face of described three-dimensional vortex ligh trap system be spaced apart 50 ~ 800 microns, described wavelength/4 slide main shaft becomes 45 degree with emerging ray polarisation polarization direction, can transmit spin angular momentum to microballoon rotor to ensure to export circularly polarized light.
Described microballoon rotor quality is evenly distributed, and rotation center and photoengraving pattern center superposition adopt birefringece crystal material can transmit spin angular momentum to meet, and guarantee that the geometric center of microballoon rotor and the turning axle of object under test overlap.
The light beam of described three-dimensional vortex ligh trap system and microballoon rotor meet light beam and carry rotation angle momentum and can have an effect and shift rotation angle momentum and cause microballoon rotor with microballoon rotor, the producing method of light beam comprise utilize calculate that complete set grating pair linearly polarized laser converts, method of formation, 1/4 slide method in spiral position photo method, rotation Dove prism method, laser chamber, birefringence particle is comprised to the effect of revolving that causes of quartz, icelandspar, PMDA/TFDB particle, and the right title particulate of asymmetric ligh trap cause the effect of revolving.
Described three-dimensional ligh trap is stablized between the tail optical fiber of three pairs of single-mode fibers of capture systems and the tail optical fiber of three pairs of single-mode fibers of three-dimensional vortex ligh trap system angle, so that the installation of two ligh trap systems, when installing, three-dimensional vortex ligh trap system must ensure that rising of eddy optically active fiber revolved direction consistent with the rotary main shaft of object under test.
Beneficial effect of the present invention, has the advantage that vibrating micromechanical gyro instrument does not have:
1) rotor supports by the mode of optical levitation, and the error that the wearing and tearing of rotor and main shaft junction and the loss of framework supporting are introduced has been exempted in machinery-free contact, therefore can reach degree of precision.
2) rotor-support-foundation system is placed in vacuum environment, has so just overcome air resistance, has got rid of the quadrature error problem that oscillating micro gyroscope has, without frequency tuning simultaneously.
Brief description of the drawings
Fig. 1 is the structural representation of the device of optical levitation rotor micro gyro measured angular speed of the present invention.
Fig. 2 is the ligh trap schematic diagram of microballoon rotor, comprises three-dimensional stability and catches ligh trap, three-dimensional vortex light beam ligh trap and rotation attitude measuring system.
Fig. 3 is the dynamic balance reaction type principle of work of optical levitation rotor micro gyro.
In figure, laser instrument 1, light intensity modulator 2, three-dimensional vortex ligh trap system 3, base 4, parallel light source 5, microballoon rotor 6, photoelectric image detector 7, processor 8, three-dimensional ligh trap are stablized capture systems 9.
Embodiment
With reference to Fig. 1, the device of optical levitation rotor micro gyro measured angular speed, the three-dimensional vortex ligh trap system 3, parallel light source 5, photoelectric image detector 7, the three-dimensional ligh trap that comprise laser instrument 1, light intensity modulator 2, processor 8 and base 4, are fixed on base are stablized the microballoon rotor 6 of capture systems 9 and vacuum suspension.The center that microballoon rotor 6 is placed on three-dimensional ligh trap stablizes capture systems 9 and three-dimensional vortex ligh trap system 3, the angular velocity vector direction that the vortex beams that has ensured to revolve provides is consistent with testee rotary main shaft.Three-dimensional ligh trap stablize two fiber end faces that capture systems 9 is relative apart between 50 to 800 microns, forces to such an extent that the particle error that departs from center is controlled in 1 micron by accurate modulation feedback light.Be used for revolving and provide the three-dimensional vortex ligh trap system 3 of angular velocity of precession moment of face to require optically-active bundle fiber end face distance closer, than microballoon root diameter large 20 to 100 microns, and provide the beam fiber-optic end face distance of angular velocity of precession moment of face in 50 to 800 microns, microballoon rotor (particle) can adopt there is light transmission, surface smoothness better and be easy to the birefringence ball of optical surface processing, as quartzy microballoon, radius is at 2 ~ 500 microns, and quality is 10
-11~ 10
-4gram, specific requirement can also further be done optimal design according to the birefringence refractive index characteristic of microballoon rotor, density, light beam mould field type and power requirement.
The principle of catching according to ligh trap power to particle, stablizes capture systems 9 by three-dimensional ligh trap and makes particle-stabilised being suspended on object under test turning axle main shaft.The particle is here exactly the microballoon rotor 6 in vacuum environment, microballoon carries out optical surface processing, form light tight pattern on its surface, and make pattern with respect to turning axle alignment of shafts symmetry, this is mainly to have different imaging faculas in order to obtain the corresponding different attitude of rotating in the rotation attitude measurement of microballoon.Parallel light source 5 by below, along being parallel to the up incident of turning axle main shaft, gathering light spot shape and distribution of light intensity and distributes on photoelectric image detector 7 up, and calculates angle of rotation direction and the size of microballoon by processor 8.In three-dimensional vortex ligh trap system 3 certain one dimension direction, make microballoon rotor 6 rise and revolve at a high speed around testee rotary main shaft (being made as z axle) by applying high power vortex beams, now close the vortex beams light source revolving, in the time having extraneous turning rate input and angular velocity vector to have the component perpendicular to z axle, holding position is constant owing to doing High Rotation Speed to possess gyroscopic effect for microballoon rotor 6, and the position of stator is along with extraneous load changes, therefore the relative position between microballoon rotor 6 and stator changes, and microballoon rotor 6 has departed from relative equilibrium position.When microballoon rotor 6 departs from behind relative equilibrium position, on photoelectric image detector 7, the facula position information of Real-time Collection microballoon rotor 6 is judged roughly rotational angle and the direction thereof of microballoon rotor 6, and modulate except z axle the light intensity magnitude of vortex beams in two other direction as feedback information and make vortex beams produce moment of face vector to microballoon rotor 6, according to the precession of gyro, now microballoon rotor 6 by produce one with the axis of rotation and the perpendicular angular velocity of precession of moment of face vector axle, according to moment again equilibrium principle can make microballoon rotor 6 return to relative equilibrium position, change to calculate rotational angular velocity by now modulating the light intensity of whirlpool light beam.Can measure two angular velocity on orthogonal directions by the method simultaneously.
Fig. 3 has described the dynamic balance reaction type principle of work of optical levitation rotor micro gyro, in the time working with vortex ligh trap dynamic balance feedback model, rotor is followed the tracks of the rotation of housing all the time, in the time that the carrier of housing connection rotates angle α, rotating Attitude Measuring Unit measures angular displacement by optical imagery method, then be translated into optical intensity modulation signal signal by processor 8, enter light intensity modulator 2, light intensity modulator 2 is modulated vortex beams luminous power and is produced corresponding luminous power moment M, to drive microballoon rotor 6 to rotate to keep parallel with housing.In control procedure, the size of vortex beams luminous power and the angular velocity of housing rotation that after modulation, produce moment of face are in proportion.
It should be noted last that, above embodiment is only unrestricted in order to technical scheme of the present invention to be described.Although the present invention is had been described in detail with reference to embodiment, those of ordinary skill in the art is to be understood that, technical scheme of the present invention is modified or is equal to replacement, do not depart from the spirit and scope of technical solution of the present invention, it all should be encompassed in the middle of claim scope of the present invention.
Claims (6)
1. the device of an optical levitation rotor micro gyro measured angular speed, it is characterized in that, described device comprises that laser instrument (1), light intensity modulator (2), three-dimensional vortex ligh trap system (3), base (4), parallel light source (5), microballoon rotor (6), photoelectric image detector (7), processor (8), three-dimensional ligh trap stablize capture systems (9), described three-dimensional vortex ligh trap system (3) is fixed on base (4), laser instrument (1) emitting laser enters three-dimensional vortex ligh trap system (3) through light intensity modulator (2), three-dimensional vortex ligh trap system (3) by three groups of mutually orthogonal single-mode fibers to forming, described single-mode fiber is to by two in opposite directions and aim at good single-mode fiber composition, the tail optical fiber end face of single-mode fiber all sticks wavelength/4 slide, output terminal is separately fixed on base (4), between the output end face of two single-mode fibers, keep interval, microballoon rotor (6) described in placing one in the middle at interval, microballoon rotor (6) is stablized the stable object under test spindle central position that is captured in of capture systems (9) by three-dimensional ligh trap, parallel light source (5) is positioned at the below of microballoon rotor (6), photoelectric image detector (7) is positioned at the top of birefringence quartz microballoon (6), after the light transmission birefringence quartz microballoon (6) that parallel light source (5) sends, gathered by photoelectric image detector (7), photoelectric image detector (7) is connected with processor (8) respectively with light intensity modulator (2).
2. device according to claim 1, is characterized in that, the spherical birefringence particle that described microballoon rotor (6) was processed for surface optics, and microballoon rotor (6) mass distribution is even, and radius is at 2 ~ 500 microns, and quality is 10
-11~ 10
-4gram, microballoon rotor (6) is by photoetching technique some opaque symmetrical patterns on its surface sputtering, described opaque symmetrical pattern is above to form the pattern around the light spot shape of its axis of rotation axle anglec of rotation vector sensitivity in addition to microballoon rotor (6) at photoelectric image detector (7) after making directional light irradiate microballoon rotor (6), rotation center and photoengraving pattern center superposition, and guarantee that the geometric center of microballoon rotor (6) overlaps with the turning axle of object under test.
3. device according to claim 1, it is characterized in that, described three-dimensional ligh trap is stablized capture systems (9) and is adopted six roots of sensation single-mode fiber output three couples of relative basic mode Gausses on three-dimensional to catch light to make microballoon rotor (6) be stabilized in spindle central place, and catch light light intensity according to the positional information modulation of microballoon rotor (6) in real time and make microballoon rotor (6) in the time having edge acceleration still be stabilized in relative equilibrium position, and make microballoon rotor (6) depart from the distance at ligh trap center that three-dimensional ligh trap stablizes capture systems (9) in 1 micron.
4. device according to claim 1, it is characterized in that, the output end face of described three-dimensional vortex ligh trap system (3) be spaced apart 50 ~ 800 microns, described wavelength/4 slide main shaft becomes 45 degree with emerging ray polarisation polarization direction, to ensure that exporting circularly polarized light can transmit spin angular momentum to microballoon rotor (6).
5. device according to claim 1, it is characterized in that, the light beam of described three-dimensional vortex ligh trap system (3) and microballoon rotor (6) meet light beam and carry rotation angle momentum and can have an effect and shift rotation angle momentum and cause microballoon rotor (6) rotation with microballoon rotor (6), the producing method of light beam comprises utilizes calculating complete set grating pair linearly polarized laser to convert, spiral position photo method, rotation Dove prism method, method of formation in laser chamber, 1/4 slide method, birefringence particle is comprised to quartz, icelandspar, PMDA/TFDB particle cause the effect of revolving, and the right title particulate of asymmetric ligh trap cause the effect of revolving.
6. device according to claim 3, it is characterized in that, described three-dimensional ligh trap is stablized between the tail optical fiber of three pairs of single-mode fibers of capture systems (9) and the tail optical fiber of three pairs of single-mode fibers of three-dimensional vortex ligh trap system (3) angle, so that the installation of two ligh trap systems, when installing, three-dimensional vortex ligh trap system (3) must ensure that rising of eddy optically active fiber revolved direction consistent with the rotary main shaft of object under test.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410274332.9A CN104034322B (en) | 2014-06-19 | Optical levitation rotor micro gyro measures the device of angular velocity |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410274332.9A CN104034322B (en) | 2014-06-19 | Optical levitation rotor micro gyro measures the device of angular velocity |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN104034322A true CN104034322A (en) | 2014-09-10 |
| CN104034322B CN104034322B (en) | 2016-11-30 |
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Cited By (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104900290A (en) * | 2015-04-15 | 2015-09-09 | 中国人民解放军国防科学技术大学 | Device and method for realizing photoinduced rotation based on double-beam light trap |
| CN105469847A (en) * | 2015-11-29 | 2016-04-06 | 中国人民解放军国防科学技术大学 | Device for realizing light-induced track rotation based on double-light beam misalignment method and method |
| CN105738643A (en) * | 2016-02-03 | 2016-07-06 | 中国人民解放军装备学院 | Flight body angular velocity measurement method based on vortex light rotation Doppler effect |
| CN106908946A (en) * | 2016-05-05 | 2017-06-30 | 中国计量大学 | A kind of dual-beam optical optical tweezers system of simplification |
| CN107045070A (en) * | 2016-12-29 | 2017-08-15 | 中国人民解放军装备学院 | A kind of angular speed high-precision detecting method based on polaron Sagnac phases |
| CN110514191A (en) * | 2019-10-22 | 2019-11-29 | 中国人民解放军国防科技大学 | Micro-computer electro-optical suspension rotary microparticle gyroscope |
| US10866099B1 (en) * | 2019-05-31 | 2020-12-15 | United States Of America As Represented By The Secretary Of The Navy | Electro-opto-mechanical micro gyroscope |
| CN113063408A (en) * | 2021-03-15 | 2021-07-02 | 西安交通大学 | Ultrasonic suspended gyroscope based on planar holographic transducer |
| CN114441794A (en) * | 2022-04-08 | 2022-05-06 | 之江实验室 | Optical suspension angular velocity measuring device and method based on solid atomic spin geometric phase |
| CN115079737A (en) * | 2022-07-22 | 2022-09-20 | 之江实验室 | Gravitational acceleration modulation device and method |
| CN116448086A (en) * | 2023-06-16 | 2023-07-18 | 中国人民解放军国防科技大学 | Optical suspension microsphere rotor gyroscope based on optical axis attitude angle detection |
Cited By (14)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104900290A (en) * | 2015-04-15 | 2015-09-09 | 中国人民解放军国防科学技术大学 | Device and method for realizing photoinduced rotation based on double-beam light trap |
| CN105469847A (en) * | 2015-11-29 | 2016-04-06 | 中国人民解放军国防科学技术大学 | Device for realizing light-induced track rotation based on double-light beam misalignment method and method |
| CN105738643A (en) * | 2016-02-03 | 2016-07-06 | 中国人民解放军装备学院 | Flight body angular velocity measurement method based on vortex light rotation Doppler effect |
| CN106908946A (en) * | 2016-05-05 | 2017-06-30 | 中国计量大学 | A kind of dual-beam optical optical tweezers system of simplification |
| CN106908946B (en) * | 2016-05-05 | 2019-03-22 | 中国计量大学 | A kind of dual-beam optical optical tweezers system of simplification |
| CN107045070A (en) * | 2016-12-29 | 2017-08-15 | 中国人民解放军装备学院 | A kind of angular speed high-precision detecting method based on polaron Sagnac phases |
| US10866099B1 (en) * | 2019-05-31 | 2020-12-15 | United States Of America As Represented By The Secretary Of The Navy | Electro-opto-mechanical micro gyroscope |
| CN110514191A (en) * | 2019-10-22 | 2019-11-29 | 中国人民解放军国防科技大学 | Micro-computer electro-optical suspension rotary microparticle gyroscope |
| CN113063408A (en) * | 2021-03-15 | 2021-07-02 | 西安交通大学 | Ultrasonic suspended gyroscope based on planar holographic transducer |
| CN114441794A (en) * | 2022-04-08 | 2022-05-06 | 之江实验室 | Optical suspension angular velocity measuring device and method based on solid atomic spin geometric phase |
| CN115079737A (en) * | 2022-07-22 | 2022-09-20 | 之江实验室 | Gravitational acceleration modulation device and method |
| CN115079737B (en) * | 2022-07-22 | 2022-12-02 | 之江实验室 | Gravitational acceleration modulation device and method |
| CN116448086A (en) * | 2023-06-16 | 2023-07-18 | 中国人民解放军国防科技大学 | Optical suspension microsphere rotor gyroscope based on optical axis attitude angle detection |
| CN116448086B (en) * | 2023-06-16 | 2023-09-12 | 中国人民解放军国防科技大学 | Optical suspension microsphere rotor gyroscope based on optical axis attitude angle detection |
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