CN104029129A - Polishing solution constant-temperature feeding device for optical machining and temperature control method - Google Patents
Polishing solution constant-temperature feeding device for optical machining and temperature control method Download PDFInfo
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- CN104029129A CN104029129A CN201410250596.0A CN201410250596A CN104029129A CN 104029129 A CN104029129 A CN 104029129A CN 201410250596 A CN201410250596 A CN 201410250596A CN 104029129 A CN104029129 A CN 104029129A
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- temperature
- polishing fluid
- controller
- refrigeration unit
- sensor
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Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B57/00—Devices for feeding, applying, grading or recovering grinding, polishing or lapping agents
- B24B57/02—Devices for feeding, applying, grading or recovering grinding, polishing or lapping agents for feeding of fluid, sprayed, pulverised, or liquefied grinding, polishing or lapping agents
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B51/00—Arrangements for automatic control of a series of individual steps in grinding a workpiece
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
- F25B—REFRIGERATION MACHINES, PLANTS OR SYSTEMS; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS
- F25B29/00—Combined heating and refrigeration systems, e.g. operating alternately or simultaneously
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- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Physics & Mathematics (AREA)
- Thermal Sciences (AREA)
- General Engineering & Computer Science (AREA)
- Grinding-Machine Dressing And Accessory Apparatuses (AREA)
- Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
Abstract
The invention discloses a polishing solution constant-temperature feeding device for optical machining and a temperature control method, and belongs to the technical field of optical machining. The device comprises a refrigeration unit, a heating unit, an internal circulation loop and a control unit, wherein the refrigeration unit is used for reducing the polishing solution temperature to be a set value; the refrigeration unit comprises a compressor, a cool exchanger, a radiator and an expansion valve; the internal circulation loop comprises a polishing solution storage tank, a polishing solution circulation pump, a heat exchanger and a cool exchanger; the control unit comprises a liquid level sensor, a mixing motor, a combined aural and visual alarm, a heater, a temperature sensor in a clear water tank, a temperature sensor in the polishing solution tank, a controller and a power interface. The polishing solution constant-temperature feeding device disclosed by the invention has wider temperature control range and high temperature control precision, and can ensure that the corrosion of the polishing solution cannot influence the device; the passive heating manner can ensure that the molecular properties of the polishing solution cannot be damaged.
Description
Technical field
The invention belongs to optical processing technology field, be specifically related to a kind of optics processing polishing fluid constant temperature feedway and Temp. control method.
Background technology
In conventional optical system, the surface roughness Ra <0.012 μ m of optical element can use conventionally; But at shortwave optical field, particularly light laser, grenz ray and etching system etc., very harsh to the requirement of optical element surface roughness, its obvious characteristic is that surface roughness requires to be less than 1nm.
Polishing is requisite a kind of precise machining process in optics process, the polishing fluid processing auxiliary material that is absolutely necessary in this machining process.Polishing fluid is the suspension being mixed according to a certain percentage by polishing powder and water, has certain Acidity of Aikalinity or corrosivity.Inevitably can cause certain infringement to fluid reservoir, pipeline, valve body etc.And polishing fluid has the feature of easy crystallization, if cleaning out not in time, residual polishing fluid can form crystallization, the existence of crystallization fragment can affect the normal work of the device such as valve body, pump, produces cut thereby the fragment of crystallization is simultaneously blended in the optical workpiece surfaces that also can pollute processing polishing fluid in polishing fluid.
Polishing fluid has low-corrosiveness, processes rear direct discharge meeting environment is caused damage, and also can increase optical element processing cost, need to polishing fluid be carried out purifying and be recycled.
In optics processing, adopt noncontact polishing technology that workpiece and bistrique are not come in contact in process, rely on abrasive particle (or ion beam) to impact surface of the work and reach the object of removing material, realize the processing of micro-nano optical element.In process, polishing fluid directly carries out machinery, chemistry removal to optical surface, polishing fluid is exposed in air in process, particularly need the time relatively long for bigbore optical element and high-precision processing, and follow the evaporation etc. of the rotation of work stage in polishing process heat absorption and carrier fluid moisture, the temperature of polishing fluid and one-tenth branch change, the precision of impact processing.
Therefore, need to process with polishing fluid constant temperature feedway by a kind of optics, ensure that the constant temperature of high precision polishing liquid is supplied with, guarantee polishing model is stable with removal function, thereby can ensure machining optical element surface figure accuracy.
Summary of the invention
The object of this invention is to provide a kind of optics processing polishing fluid constant temperature feedway and Temp. control method thereof, the method has wide temperature control range and high-temperature control accuracy, the corrosivity that has simultaneously ensured polishing fluid can not exert an influence to device, and passive mode of heating has ensured that the molecular characterization of polishing fluid can be not destroyed simultaneously.
In order to achieve the above object, the present invention has adopted following technical scheme:
A kind of polishing fluid constant temperature feedway for optics processing, for delivery of High Accuracy Constant Temperature polishing fluid, to external optical process equipment, it comprises refrigeration unit, heating unit, interior closed circuit, control module; Described refrigeration unit comprises compressor and cold-producing medium, cool exchanger, expansion valve, radiator, the entrance point of described compressor is connected with the port of export of radiator, the port of export of compressor is connected with the coil pipe one end in cool exchanger, the other end of described cool exchanger is connected with expansion valve, and the expansion valve other end is connected with the arrival end of radiator.The switch of refrigeration unit can be by control module control; Described heating unit comprises filtered water tank, heater, clear water circulating pump, heat exchanger, the outlet of described filtered water tank is connected with clear water pump entry end, the port of export of clear water circulating pump is connected with the entrance of heat exchanger, the port of export of described heat exchanger is connected with filtered water tank arrival end, and the thermal power of heater can regulate by control module; Described interior closed circuit comprises polishing fluid liquid reserve tank, polishing fluid circulating pump, cool exchanger, heat exchanger, the port of export of described polishing fluid liquid reserve tank is connected with the arrival end of cool exchanger, the port of export of cool exchanger is connected with the arrival end of heat exchanger inner coil pipe, and the port of export of heat exchanger inner coil pipe is connected with the arrival end of polishing fluid liquid reserve tank; Described control module comprises temperature sensor, polishing fluid the temperature inside the box sensor, heater in controller, power interface, audible-visual annunciator, liquid level sensor, stirring motor, filtered water tank, described liquid level sensor is to liquid level information in polishing fluid liquid reserve tank and feed back to controller, described stirring motor can regulate by controller control rotating speed, and the thermal power of described heater can regulate by controller; Described audible-visual annunciator carries out sound and light alarm by controller to low liquid level or overheated etc.; In described filtered water tank and polishing fluid the temperature inside the box sensor to fluid temperature information in case and feed back to controller; Described power interface is arranged on casing, and it is for being connected with external power source; Described refrigeration unit, heating unit, interior closed circuit and control module are all placed in casing, and the liquid outlet of casing is connected to polishing fluid liquid reserve tank after filter, and liquid outlet is the outlet of optics processing polishing fluid; The liquid inlet of casing is connected to polishing fluid liquid reserve tank after filter, and liquid inlet is the entrance that the polishing fluid after optics processing is reclaimed.
Temp. control method based on above-mentioned optics processing with polishing fluid constant temperature feedway, comprises the steps:
In step 1, filtered water tank, temperature sensor gathers the temperature value of clear water and sends to controller, and polishing fluid the temperature inside the box sensor gathers the temperature value of polishing fluid and sends to controller;
Step 2, controller compare temperature value and the desired temperature of temperature sensor in filtered water tank and the collection of polishing fluid the temperature inside the box sensor, if the temperature value of polishing fluid the temperature inside the box sensor collection is greater than desired temperature, perform step three; If polishing fluid temperature sensor collecting temperature value is less than setting value, perform step four;
Step 3, controller send instruction to refrigeration unit, stirring motor, and refrigeration unit is opened, and compressor output maximum cooling capacity, makes polishing fluid temperature value approach setting value, completes temperature control;
Step 4, controller send instruction to refrigeration unit, heater, close refrigeration unit and output refrigerating capacity thereof, increase the heat outputting power of heater, make the temperature of polishing fluid approach desired temperature, complete temperature control.
The invention has the beneficial effects as follows: the method has wide temperature control range and high-temperature control accuracy, ensured that the corrosivity of polishing fluid can not exert an influence to device simultaneously, and passive mode of heating ensures that the molecular characterization of polishing fluid can be not destroyed.
Brief description of the drawings
Fig. 1 is the structural representation of optics processing polishing fluid constant temperature feedway of the present invention.
Fig. 2 is the temperature curve that adopts polishing fluid liquid reserve tank after the temperature control of apparatus of the present invention, filtered water tank and environment.
Fig. 3 adopts after the stable temperature control of apparatus of the present invention temperature curve in polishing fluid liquid reserve tank.
Wherein: 1, casing, 2, filtered water tank, 3, polishing fluid liquid reserve tank, 4, liquid level sensor, 5, stirring motor, 6, audible-visual annunciator, 7, heater, 8, temperature sensor in filtered water tank, 9, filter, 10, liquid inlet, 11, filter, 12, liquid outlet, 13, polishing fluid the temperature inside the box sensor, 14, clear water circulating pump, 15, polishing fluid circulating pump, 16, controller, 17, power interface, 18, heat exchanger, 19, cool exchanger, 20, expansion valve, 21, radiator, 22, compressor, 23, refrigeration unit.
Detailed description of the invention
Describe the present invention in detail below in conjunction with accompanying drawing.
As shown in Figure 1, optics processing of the present invention comprises casing 1, refrigeration unit 23, heating unit, interior closed circuit and control module with polishing fluid constant temperature feedway.
Described refrigeration unit 23 is for being reduced to setting value by the temperature of polishing fluid, described refrigeration unit 23 comprises compressor 22, cool exchanger 19, radiator 21, expansion valve 20 etc., the entrance point of described compressor 22 is connected with the port of export of radiator 21, the port of export of compressor 22 is connected with the coil pipe one end in cool exchanger 19, the other end of described cool exchanger 19 is connected with expansion valve 20, and expansion valve 20 other ends are connected with the arrival end of radiator 21.Described compressor 22 becomes refrigerant compression the steam of HTHP, and cool exchanger 19 inner coil pipes of flowing through are condensed into liquid, and the while is passed through tube wall heat exchange with the polishing fluid in cool exchanger 19 casings, reduces polishing fluid temperature.Liquid refrigerant is by being gasificated into the gaseous steam of low pressure in the rear inflow radiator 21 of expansion valve 20, then is compressed into the vapor recycle refrigeration of HTHP by compressor 22.The switch of refrigeration unit 23 can be controlled by controller 16.
Described heating unit is for being elevated to setting value by the temperature of polishing fluid.Described heating unit comprises filtered water tank 2, heater 7, clear water circulating pump 14, heat exchanger 18, described filtered water tank 2 heats clear water temperature by heater 7, the outlet of described filtered water tank 2 is connected with clear water circulating pump 14 arrival ends, the port of export of clear water circulating pump 14 is connected with the entrance of heat exchanger 18, and the port of export of described heat exchanger 18 is connected with filtered water tank 2 arrival ends.Carry out heat exchange by polishing fluid in the clear water in heat exchanger 18 casings and heat exchanger 18 coil pipes, polishing fluid temperature is raise.The thermal power of heater 7 can regulate by controller 16.
Described interior closed circuit comprises polishing fluid liquid reserve tank 3, polishing fluid circulating pump 15, cool exchanger 19, heat exchanger 18, the port of export of described polishing fluid liquid reserve tank 3 is connected with the arrival end of cool exchanger 18, the port of export of cool exchanger 19 is connected with the arrival end of heat exchanger 18 inner coil pipes, and the port of export of heat exchanger 18 inner coil pipes is connected with the arrival end of polishing fluid liquid reserve tank 3.Flow through in interior closed circuit cool exchanger 18, heat exchanger 18 of polishing fluid makes temperature control to setting value.
Described control module comprises temperature sensor 8, polishing fluid the temperature inside the box sensor 13, heater 7 in controller 16, power interface 17, audible-visual annunciator 6, liquid level sensor 4, stirring motor 5, filtered water tank, described liquid level sensor 4 is to the interior liquid level information of polishing fluid liquid reserve tank 3 and feed back to controller 16, described stirring motor 5 is controlled rotating speed by controller 16 and can be regulated, and the thermal power of described heater 7 can regulate by controller 16.Described audible-visual annunciator 6 carries out sound and light alarm by controller 16 to low liquid level or overheated etc.The interior temperature sensor 8 of described filtered water tank and the interior temperature sensor 13 of polishing fluid liquid reserve tank are to fluid temperature information in case and feed back to controller 16.Described power interface 17 is arranged on casing 1, and it is for being connected with external power source.
Described optics processing is all placed in external box of microvave 1 with all devices in polishing fluid constant temperature feedway, and the liquid outlet 12 of casing 1 is connected to polishing fluid liquid reserve tank 3 after filter 11, and liquid outlet 12 is the outlet of polishing fluid for optics processing; The liquid inlet 10 of casing 1 is connected to polishing fluid liquid reserve tank 3 after filter 9, the entrance of liquid inlet 10 for the polishing fluid after optics processing is reclaimed.
Described expansion valve 20 can adopt heating power expansion valve, electric expansion valve or orifice plate.Described compressor 22 can be selected digital scroll compressor, invariable frequency compressor or frequency-changeable compressor.
Described optics processing all adopts stainless steel material or composite with all devices in polishing fluid constant temperature feedway, and corrosivity can not exert an influence to it.
Described filtered water tank 2, polishing fluid liquid reserve tank 3, heat exchanger 18, cool exchanger 19 and connecting line parcel heat insulation foam reduce the heat exchange with external environment condition.
Meanwhile, the present invention also provides a kind of optics to process the temperature-controlled process adopting with polishing fluid constant temperature feedway, comprises that step is as follows:
In filtered water tank, temperature sensor 8, polishing fluid the temperature inside the box sensor 13 gather respectively the temperature value of clear water and polishing fluid and send to controller 16;
Controller 16 judges temperature value that described temperature sensor 8, temperature sensor 13 gather and the size of setting value, and according to judged result, to heater 7, refrigeration unit 23, stirring motor 5 sending controling instructions; Heater 7 and refrigeration unit 23, stirring motor 5 receive instruction, and corresponding refrigerating capacity and the heating power of regulating makes the temperature of polishing fluid approach setting value.
Specific as follows:
The temperature value gathering when the temperature sensor 13 of polishing fluid is greater than setting value, controller 16 sends instruction to refrigeration unit 23, heater 7, stirring motor 5, and refrigeration unit 23 is opened, compressor output maximum cooling capacity, heater 7 thermal powers reduce, and make polishing fluid temperature value approach setting value.
When polishing fluid temperature sensor 13 collecting temperature values are less than setting value, controller 16 sends instruction to refrigeration unit 23, closes refrigeration unit 23, increases the heat outputting power of heater 7, makes the temperature fast approaching desired temperature of polishing fluid.
As shown in Figure 2, it is 22 degrees Celsius for unit temp sets value, the temperature changing curve diagram of the interior temperature of polishing fluid liquid reserve tank 3, the interior temperature of filtered water tank 2, external environment.
As shown in Figure 3, it is the temperature curves of interior temperature sensor 13 collecting temperatures of polishing fluid liquid reserve tank 3 after stable, temperature control precision can reach ± and 0.02 DEG C.
The liquid level information that liquid level sensor 4 gathers in polishing fluid liquid reserve tank 3 sends to controller 16.Controller 16 judge the liquid level information of liquid level sensor 4 and with the comparison of high and low liquid level preset value, according to result sending controling instruction to audible-visual annunciator 6, if exceed preset value, sound and light alarm remind.
Be more than the specific embodiment of the present invention, but limitation of the present invention absolutely not.
Claims (4)
1. a polishing fluid constant temperature feedway for optics processing, comprises refrigeration unit (23), heating unit, interior closed circuit and control module, it is characterized in that:
Described refrigeration unit (23) is for being reduced to setting value by the temperature of polishing fluid, described refrigeration unit (23) comprises compressor (22), cool exchanger (19), radiator (21) and expansion valve (20), the entrance point of described compressor (22) is connected with the port of export of radiator (21), the port of export of compressor (22) is connected with the coil pipe one end in cool exchanger (19), the other end of cool exchanger (19) is connected with expansion valve (20), the other end of expansion valve (20) is connected with the arrival end of radiator (21),
Described interior closed circuit comprises polishing fluid liquid reserve tank (3), polishing fluid circulating pump (15), heat exchanger (18) and cool exchanger (19), the port of export of described polishing fluid liquid reserve tank (3) is connected with the arrival end of cool exchanger (18), the port of export of cool exchanger (19) is connected with the arrival end of heat exchanger (18) inner coil pipe, and the port of export of heat exchanger (18) inner coil pipe is connected with the arrival end of polishing fluid liquid reserve tank (3);
Described control module comprises liquid level sensor (4), stirring motor (5), audible-visual annunciator (6), heater (7), temperature sensor (8) in filtered water tank, polishing fluid the temperature inside the box sensor (13), controller (16) and power interface (17), described liquid level sensor (4) is to the interior liquid level information of polishing fluid liquid reserve tank (3) and feed back to controller (16), described stirring motor (5) is controlled rotating speed by controller (16), the thermal power of described heater (7) regulates by controller (16), described audible-visual annunciator (6) by controller (16) to high and low liquid level or the overheated sound and light alarm that carries out, in described filtered water tank, temperature sensor (8) gathers and feeds back to controller (16) to clear water temperature information in case, and described polishing fluid the temperature inside the box sensor (13) gathers and feed back to controller (16) to polishing fluid temperature information in case, it is upper that described power interface (17) is arranged on casing (1), and it is for being connected with external power source,
Described refrigeration unit (23), heating unit, interior closed circuit and control module are all placed in casing (1), the liquid outlet (12) of casing (1) is connected to polishing fluid liquid reserve tank (3) after filter (11), and the liquid inlet (10) of casing (1) is connected to polishing fluid liquid reserve tank (3) after filter (9).
2. optics processing polishing fluid constant temperature feedway according to claim 1, is characterized in that, described expansion valve (20) is heating power expansion valve or electric expansion valve or orifice plate.
3. optics processing polishing fluid constant temperature feedway according to claim 1, is characterized in that, described compressor (22) is screw compressor or invariable frequency compressor or frequency-changeable compressor.
4. the temperature-controlled process of polishing fluid constant temperature feedway for the processing of the optics based on described in above-mentioned arbitrary claim, is characterized in that, the method comprises the steps:
In step 1, filtered water tank, temperature sensor (8) gathers the temperature value of clear water and sends to controller (16), and polishing fluid the temperature inside the box sensor (13) gathers the temperature value of polishing fluid and sends to controller (16);
Step 2, controller (16) compare temperature value and the desired temperature of temperature sensor in filtered water tank (8) and polishing fluid the temperature inside the box sensor (13) collection, if the temperature value that polishing fluid the temperature inside the box sensor (13) gathers is greater than desired temperature, perform step three; If polishing fluid temperature sensor (13) collecting temperature value is less than setting value, perform step four;
Step 3, controller (16) send instruction to refrigeration unit (23), stirring motor (5), refrigeration unit (23) is opened, compressor (22) output maximum cooling capacity, make polishing fluid temperature value approach setting value, complete temperature control;
Step 4, controller (16) send instruction to refrigeration unit (23), heater (7), close refrigeration unit (23) and output refrigerating capacity thereof, increase the heat outputting power of heater (7), make the temperature of polishing fluid approach desired temperature, complete temperature control.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410250596.0A CN104029129A (en) | 2014-06-06 | 2014-06-06 | Polishing solution constant-temperature feeding device for optical machining and temperature control method |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410250596.0A CN104029129A (en) | 2014-06-06 | 2014-06-06 | Polishing solution constant-temperature feeding device for optical machining and temperature control method |
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| CN104029129A true CN104029129A (en) | 2014-09-10 |
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| CN201410250596.0A Pending CN104029129A (en) | 2014-06-06 | 2014-06-06 | Polishing solution constant-temperature feeding device for optical machining and temperature control method |
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Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109569866A (en) * | 2018-11-30 | 2019-04-05 | 中国科学院合肥物质科学研究院 | A kind of soil milling apparatus intelligent control system and its control method |
| CN112666670A (en) * | 2019-09-30 | 2021-04-16 | 中国科学院长春光学精密机械与物理研究所 | Active thermal control device and method of space optical remote sensor |
| CN115213499A (en) * | 2022-08-16 | 2022-10-21 | 江苏双环齿轮有限公司 | Grinding oil supply device of numerical control gear lapping machine and use method thereof |
| ES2965583A1 (en) * | 2023-06-02 | 2024-04-15 | Steros Gpa Innovative S L | METHOD AND EQUIPMENT FOR CONTROLLING THE TEMPERATURE OF PARTICLES IN POLISHING PROCESSES USING SOLID PARTICLES WITH ELECTROLYTE IN A LIQUID ENVIRONMENT (Machine-translation by Google Translate, not legally binding) |
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Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109569866A (en) * | 2018-11-30 | 2019-04-05 | 中国科学院合肥物质科学研究院 | A kind of soil milling apparatus intelligent control system and its control method |
| CN112666670A (en) * | 2019-09-30 | 2021-04-16 | 中国科学院长春光学精密机械与物理研究所 | Active thermal control device and method of space optical remote sensor |
| CN115213499A (en) * | 2022-08-16 | 2022-10-21 | 江苏双环齿轮有限公司 | Grinding oil supply device of numerical control gear lapping machine and use method thereof |
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| ES2965583A1 (en) * | 2023-06-02 | 2024-04-15 | Steros Gpa Innovative S L | METHOD AND EQUIPMENT FOR CONTROLLING THE TEMPERATURE OF PARTICLES IN POLISHING PROCESSES USING SOLID PARTICLES WITH ELECTROLYTE IN A LIQUID ENVIRONMENT (Machine-translation by Google Translate, not legally binding) |
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Application publication date: 20140910 |