CN104007609A - Mask plate box - Google Patents
Mask plate box Download PDFInfo
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- CN104007609A CN104007609A CN201410206149.5A CN201410206149A CN104007609A CN 104007609 A CN104007609 A CN 104007609A CN 201410206149 A CN201410206149 A CN 201410206149A CN 104007609 A CN104007609 A CN 104007609A
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- mask plate
- body structure
- box body
- suction pipe
- vacuum suction
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Abstract
The invention provides a mask plate box comprising a box body structure for accommodating a mask plate; and a cleaning mechanism which can adsorb contaminant particles on the surface of the mask plate in the box body structure to clean the mask plate, and is disposed on the box body structure. The mask plate box provided by the invention is provided with the cleaning mechanism; opening of a box cover of the mask plate box is not necessary; the cleaning of the mask plate can be carried out directly by using the cleaning mechanism; the mask plate box has the advantages of simple operation, and high contaminant particle removing efficiency, and can save a lot of manpower cost.
Description
Technical field
The present invention relates to display panel manufacturing technology field, relate in particular to a kind of mask plate box.
Background technology
At Thin Film Transistor-LCD (Thin Film Transistor Liquid Crystal Display, be called for short TFT-LCD) and organic light emitting diode display (Organic Light Emitting Diode, be called for short OLED) manufacture process in, using mask plate (Mask) to carry out mask exposure technique is very important core process, it is the important step that determines product quality, is also the key component that affects product yield.Because mask exposure technique is very sensitive to polluting, need the strict cleanliness factor of controlling process procedure, exist contamination particle (Particle) to need strict management and control to the surface of mask plate, conventionally mask plate need to be deposited in mask box, mask plate box is totally enclosed type box body structure, and the contamination particle that can reduce external environment pollutes mask plate.But along with mask plate access times increase, mask plate is in mask exposure technique or inevitably meeting is contaminated.
At present, the mask plate box using in TFT-LCD production run is the function of clean mask plate not, in the time there is mask plate particle contamination (Mask Particle), often need at least two operating personnel to carry out mask plate clean (Mask Cleaning) to production scene.When clean, the lid of mask plate box (Case Cover) need to be opened, lid is opened, in closed process, the secondary that is easy to pollute particle (Particle) drops, extend greatly equipment idle time (Down Time), and waste of manpower.
Summary of the invention
The object of this invention is to provide a kind of mask plate box, simple in structure, can clean mask plate easily, simple to operate, cleaning efficiency is high, saves manpower.
Technical scheme provided by the present invention is as follows:
A kind of mask plate box, comprising:
For the box body structure of accommodating mask plate;
And, can adsorb the lip-deep contamination particle of mask plate in described box body structure, to clean the cleaning mechanism of mask plate, described cleaning mechanism is arranged on described box body structure.
Further, described cleaning mechanism comprises:
Can on box body structure, move, to move to the adsorption element of pre-position on the surface of the mask plate in described box body structure, the surface of the mask plate of the adsorption plane of described adsorption element in described box body structure arranges;
Be arranged at the guide rail on described box body structure, described adsorption element is arranged on described guide rail, and can move along described guide rail;
And, for the driver element that drives described adsorption element to move along described guide rail.
Further, described driver element is positioned at outside described box body structure, and described adsorption element stretches out outside described box body structure, is connected with described driver element;
Described mask plate box also comprises: for sealing the space forming between described adsorption element and described box body structure, stop outside contamination to enter the enclosed construction in described box body structure to coordinate with described box body structure.
Further, described guide rail comprises: the length direction along the mask plate in box body structure extends, so that the mobile groove that described adsorption element moves along the length direction of described mask plate, described mobile groove is arranged at least one side of described box body structure;
Described adsorption element stretches out outside described box body structure from described mobile groove; Described enclosed construction is arranged on described mobile groove, can be in described adsorption element moving process, seal the cell body part outside the described adsorption element of described mobile groove, and stop outside contamination to enter in described box body structure to coordinate with described box body structure.
Further, described adsorption element comprises:
The vacuum suction pipe that extends to the opposite side of mask plate on the Width of mask plate that can be in described box body structure from a side of mask plate, described vacuum suction pipe is arranged in described mobile groove movably;
And, be used to described vacuum suction pipe that the vacuum gas feeding unit of vacuum suction power is provided;
Wherein, the inner hollow of described vacuum suction pipe, described vacuum suction pipe on the adsorption plane of mask plate, be distributed with multiple suckers; Stretch out outside described box body structure from described mobile groove the end, at least one end of described vacuum suction pipe, and end outside the described box body structure of stretching out of described vacuum suction pipe is provided with the vacuum interface for being communicated with described vacuum gas feeding unit.
Further, on described vacuum interface, the stopper for stopping up described vacuum interface is removably installed.
Further, described mobile groove has two at least, at least two described mobile grooves are arranged at respectively on the relative two sides on the Width that is positioned at mask plate of described box body structure, the end, two ends of described vacuum suction pipe is arranged at respectively at least two mobile grooves movably, and self-corresponding described mobile groove stretches out outside described box body structure respectively.
Further, described driver element comprises:
For the carriage release lever that drives described vacuum suction pipe to move along described mobile groove, described carriage release lever is connected with the end outside the described box body structure of stretching out of described vacuum suction pipe.
Further, development length on the length direction of the mask plate of described mobile groove in described box body structure is greater than the length of the mask plate in described box body structure, and described carriage release lever is flexibly connected with the end outside the described box body structure of stretching out of described vacuum suction pipe, and can be around the rotation of the axle center of described vacuum suction pipe.
Further, described enclosed construction comprises:
Be arranged in the zip in the opening opposite edges of described mobile groove along the length direction of the mask plate in described box body structure;
Be arranged on a side of described vacuum suction pipe, can be in the time that described vacuum suction pipe move, open and be positioned at described vacuum suction pipe and move the zip in front, and make the unlocking apparatus that distance is greater than the external diameter of described vacuum suction pipe of opening of described zip;
And, be arranged on the opposite side of described vacuum suction pipe, can be in the time that described vacuum suction pipe move, locking is positioned at described vacuum suction pipe and moves the blocking device of the zip at rear.
Further, described mask plate box also comprises and being arranged on described box body structure, for preventing the electrostatic precipitator of static.
Beneficial effect of the present invention is as follows:
On mask plate box provided by the present invention, be provided with cleaning mechanism, can open the lid of mask plate box, directly utilize its cleaning mechanism to carry out the cleaning of mask plate, there is easy and simple to handle, removing contamination particle efficiency advantages of higher, meanwhile, can save a large amount of human costs.
Brief description of the drawings
Fig. 1 is the front view of mask plate box provided by the present invention;
Fig. 2 is the left view of Fig. 1;
Fig. 3 is the perspective view of the lid of mask plate box provided by the present invention;
Fig. 4 is the structural representation of the vacuum suction pipe of mask plate box provided by the present invention;
Fig. 5 is the structural representation of the sucker of vacuum suction pipe.
Embodiment
Below in conjunction with accompanying drawing, principle of the present invention and feature are described, example, only for explaining the present invention, is not intended to limit scope of the present invention.
When clean for the mask plate in mask plate box in prior art, need to open, close lid mask plate is cleaned, cause that production efficiency is low, the problem of waste of manpower, the invention provides a kind of mask plate box, it is simple in structure, can clean easily mask plate, simple to operate, cleaning efficiency is high, saves manpower.
Mask plate box provided by the present invention comprises:
For the box body structure of accommodating mask plate;
And, can adsorb the lip-deep contamination particle of mask plate in described box body structure, to clean the cleaning mechanism of mask plate, described cleaning mechanism is arranged on described box body structure.
On mask plate box provided by the present invention, be provided with cleaning mechanism, can open the lid of mask plate box, directly utilize cleaning mechanism to adsorb the contamination particle on mask plate surface, mask plate is cleaned, there is easy and simple to handle, removing contamination particle efficiency advantages of higher, meanwhile, can save a large amount of human costs.
The preferred embodiment of mask plate box provided by the present invention is below described.
In the present embodiment, preferred, as shown in Figure 1 to Figure 3, described cleaning mechanism comprises:
Can on box body structure 100, move, to move to the adsorption element 200 of pre-position on the surface of the mask plate 10 in described box body structure 100, the surface of the mask plate 10 of the adsorption plane of described adsorption element 200 in described box body structure 100 arranges;
Be arranged at the guide rail on described box body structure 100, described adsorption element 200 is arranged on described guide rail, and can move along described guide rail;
And, for the driver element that drives described adsorption element 200 to move along described guide rail.
Adopt such scheme, when detecting while there is contamination particle on mask plate 10 surfaces, because adsorption element 200 is removable, move along guide rail by drive unit drives adsorption element 200, on mask plate 10 surfaces, there is the position of contamination particle adsorption fouling particle so that adsorption element 200 is moved to, realize cleaning mask plate 10; Meanwhile, because adsorption element 200 is removable, can make clean without dead angle.
It should be noted that, in such scheme, be that adsorption element 200 is arranged on box body structure 100 movably, in actual applications, described adsorption element 200 can be also to adopt other modes to be arranged on box body structure 100, for example: can be on the lid of box body structure 100, to be fixedly installed multiple adsorption elements 200, and corresponding whole mask plate 10 surf zones in the distributed areas of multiple adsorption elements 200, will not enumerate at this.
In addition, in the present embodiment, preferred, as shown in Figure 1 to Figure 3, described driver element is positioned at outside described box body structure 100, and described adsorption element 200 stretches out outside described box body structure 100, to be connected with described driver element; Described mask plate box also comprises: for sealing the space forming between described adsorption element 200 and described box body structure 100, stop outside contamination to enter the enclosed construction 301 in described box body structure 100 to coordinate with described box body structure 100.
Adopt such scheme, in order to ensure clean environment and the convenient operation in box body structure 100, in the present embodiment, driver element is arranged on outside box body structure 100, adsorption element 200 stretches out outside box body structure 100 and is connected with driver element, thereby, between adsorption element 200 and box body structure 100, can form space, the mask plate box providing in the present embodiment is by arranging enclosed construction 301, coordinate with box body structure 100 and adsorption element 200, to stop outside contamination to enter in box body structure 100 by this space.
It should be noted that, in the present embodiment, described adsorption element 200 stretches out outside box body structure 100 and is connected with driver element, and in actual applications, described adsorption element 200 also can be connected by other means with driver element, adsorption element 200 is directly closed in box body structure 100, for example, thereby box body structure 100 can be totally-enclosed: driver element is by magnet magnetic attraction adsorption element 200, to drive adsorption element 200 to move along guide rail, etc., will not enumerate at this.
In addition, in the present embodiment, preferably, as shown in Figure 1 to Figure 3, described guide rail comprises: the length direction along the mask plate 10 in box body structure 100 extends, so that the mobile groove 300 that described adsorption element 200 moves along the length direction of described mask plate 10, described mobile groove 300 is arranged at least one side of described box body structure 100;
Described adsorption element 200 stretches out outside described box body structure 100 from described mobile groove 300;
Described enclosed construction 301 is arranged on described mobile groove 300, can be in described adsorption element 200 moving process, seal the cell body part outside the described adsorption element 200 of described mobile groove 300, stop outside contamination to enter in described box body structure 100 to coordinate with described box body structure 100.
In such scheme, adsorption element 200 can move along the length direction of mask plate 10, to move to the surperficial pre-position of mask plate 10; And Guide Rail Design is the structure of mobile groove 300, adsorption element 200 is to stretch out outside box body structure 100 by mobile groove 300, be connected with driver element, by enclosed construction 301 being set on mobile groove 300, can be in moving process, mobile groove 300 is sealed, to stop environmental contaminants to enter in box body structure 100.It should be noted that, in actual applications, the structure of guide rail can be also other structures, will not enumerate at this.
In the present embodiment, as shown in Figures 1 to 5, further preferred, described adsorption element 200 comprises:
The vacuum suction pipe 201 that extends to the opposite side of mask plate 10 on the Width of mask plate 10 that can be in described box body structure 100 from a side of mask plate 10, described vacuum suction pipe 201 is arranged in described mobile groove 300 movably;
And, be used to described vacuum suction pipe 201 that the vacuum gas feeding unit (not shown) of vacuum suction power is provided;
Wherein, the inner hollow of described vacuum suction pipe 201, described vacuum suction pipe 201 on the adsorption plane of mask plate 10, be distributed with multiple suckers 202;
Stretch out outside described box body structure 100 from described mobile groove 300 end, at least one end of described vacuum suction pipe 201, and end outside the described box body structure 100 of stretching out of described vacuum suction pipe is provided with the vacuum interface 203 for being communicated with described vacuum gas feeding unit.
In such scheme, adsorption element 200 adopts vacuum suction pipe 201, vacuum suction pipe 201 moves along the length direction of mask plate 10, and vacuum suction pipe 201 can extend to the opposite side of mask plate 10 on the Width of mask plate 10 from a side of mask plate 10, thereby vacuum suction pipe 201, can be from the whole surface process of mask plate 10 along in mobile groove 300 moving process, thereby, can adsorb the whole surface of mask plate 10 clean; In addition, stretch out outside mobile groove 300 end of vacuum suction pipe 201, in its end, vacuum interface 203 is set, and can be communicated with vacuum gas feeding unit by this vacuum interface 203, provides vacuum suction power by vacuum gas feeding unit for it.
It should be noted that, in the present embodiment, described adsorption element 200 adopts vacuum suction mode, and in actual applications, adsorption element 200 also can adopt other modes, for example: adsorption element 200 adopts chemisorption mode etc.
Also it should be noted that, in the present embodiment, described adsorption element 200 adopts a development length to be more than or equal to the hollow tubular structure of the width of mask plate 10, in actual applications, the concrete structure of adsorption element 200 is not limited, also can adopt other structures, no longer enumerate at this.
In the present embodiment, preferably, as shown in Figure 1, described mobile groove 300 has two at least, at least two described mobile grooves 300 are arranged at respectively on the relative two sides on the Width that is positioned at mask plate 10 of described box body structure 100, the end, two ends of described vacuum suction pipe 201 is arranged at respectively at least two mobile grooves 300 movably, and self-corresponding described mobile groove 300 stretches out outside described box body structure 100 respectively.
Adopt such scheme, by two relative mobile grooves 300 are set, the two ends of vacuum suction pipe 201 can be separately positioned in two relative mobile grooves 300, and then ensure the two ends synchronizing moving of vacuum suction pipe 201.Certainly can understand, in actual applications, the set-up mode of the set-up mode of mobile groove 300 and vacuum suction pipe 201 is also not only confined to this.
In addition, in the present embodiment, preferred, as shown in Figures 1 to 4, the stopper 204 for stopping up described vacuum interface 203 is removably installed on described vacuum interface 203.Adopt such scheme, in the time that needs clean mask plate 10, stopper 204 can be disassembled from vacuum interface 203, vacuum interface 203 is communicated with vacuum gas feeding unit; In the time not needing clean mask plate 10, can utilize the clogging vacuum interface 203 of stopper 204.And, in the time that in vacuum suction pipe 201, only the vacuum interface 203 of one end is communicated with vacuum gas feeding unit, can utilize stopper 204 by clogging the vacuum interface 203 of vacuum suction pipe 201 other ends, to ensure the vacuum suction environment in vacuum suction pipe 201 and to avoid environmental contaminants to enter in vacuum suction pipe 201.
In addition, in the present embodiment, preferably, as shown in Figure 1 to Figure 3, described driver element comprises: for the carriage release lever 400 that drives described vacuum suction pipe 201 to move along described mobile groove 300, described carriage release lever 400 is connected with the end outside the described box body structure 100 of stretching out of described vacuum suction pipe 201.
In such scheme, the two ends of carriage release lever 400 can be connected with the end, two ends of vacuum suction pipe 201, and operating personnel can manually move described carriage release lever 400, drive described vacuum suction pipe 201 to move along mobile groove 300.It should be noted that, described driver element can be also to adopt other structures, for example: described driver element can be the mode that adopts motorized motions, or described driver element can be to utilize the fit system of rotary handle and drive mechanism to drive vacuum suction pipe 201 to move etc.
In addition, in the present embodiment, preferably, development length on the length direction of the mask plate 10 of described mobile groove 300 in described box body structure 100 is greater than the length of the mask plate 10 in described box body structure 100, and described carriage release lever 400 is flexibly connected with the end outside the described box body structure 100 of stretching out of described vacuum suction pipe 201, and can be around the rotation of the axle center of described vacuum suction pipe 201.
Adopt such scheme, the development length of mobile groove 300 is greater than the length of mask plate 10, can further ensure that vacuum suction pipe 201 can adsorb clean through the surface of whole mask plate 10, and, after absorption clean operation finishes, the vacuum interface of vacuum suction pipe 201 203 use stoppers 204 are sealed, carriage release lever 400 can be moved to after the end position of mobile groove 300, rotate described carriage release lever 400 around vacuum suction pipe 201, make the sucker 202 of vacuum suction pipe 201 by changing into placement parallel with mask plate 10 towards the direction on mask plate 10 surfaces, thereby, can prevent on vacuum suction pipe 201 that also remaining contamination particle drops, thereby can not affect the normal use of mask plate 10.
In addition,, in the present embodiment, preferred, described enclosed construction 301 comprises:
Be arranged in the zip in the opening opposite edges of described mobile groove 300 along the length direction of the mask plate 10 in described box body structure 100;
Be arranged on a side of described vacuum suction pipe 201, can be in the time that described vacuum suction pipe 201 moves, open and be positioned at described vacuum suction pipe 201 and move the zip in front, and make the unlocking apparatus that distance is greater than the external diameter of described vacuum suction pipe 201 of opening of described zip;
And, be arranged on the opposite side of described vacuum suction pipe 201, can be in the time that described vacuum suction pipe 201 move, locking is positioned at described vacuum suction pipe 201 and moves the blocking device of the zip at rear.
In such scheme, described enclosed construction 301 adopts relative type motor double slide fastener structure, in the time that vacuum suction pipe 201 moves to first direction along mobile groove 300, can open vacuum suction pipe 201 in the unlocking apparatus in vacuum suction pipe 201 fronts and move the zip of sealing above, and make described zip open distance and be greater than the external diameter of vacuum suction pipe 201, thereby make vacuum suction pipe 201 can not produce friction with two slide fasteners of the relative both sides of opening of mobile groove 300; Move the blocking device at rear in vacuum suction pipe 201, can be taking the external diameter of this vacuum suction pipe 201 as initial by zip locking, thus stop environmental contaminants to enter in box body structure 100.
It should be noted that, in actual applications, described enclosed construction 301 also can adopt other modes to realize, for example: described enclosed construction 301 can adopt along the length direction of the mask plate 10 in described box body structure 100 and be arranged in, in the opening opposite edges of described mobile groove 300, elastically-deformable enclosed elastic part can occur, a gap is offered in the centre of this enclosed elastic part, described vacuum suction pipe 201 is arranged in described gap, when vacuum suction pipe 201 moves in described gap, be positioned at the mobile front of vacuum suction pipe 201 and the enclosed elastic part at mobile rear can seal described gap, will not enumerate other embodiments of described enclosed construction 301 at this.
In addition, in the present embodiment, preferred, described mask plate box also comprises and being arranged on described box body structure 100, for preventing the electrostatic precipitator (not shown) of static.
In addition, also it should be noted that, in the present embodiment, as shown in Figure 1 to Figure 3, and the lid 102 that described box body structure 100 can comprise box body 101 and coordinate with described box body, preferred, described cleaning mechanism is arranged on described lid 102.Particularly, described mobile groove 300 is separately positioned on the relative two sides of described lid, and preferred, the adsorption plane of described vacuum suction pipe 201 to the distance between the upper surface of the mask plate 10 in box body structure 100 is 10～20mm.
In addition, in the present embodiment, preferred, as shown in Figure 5, the sucker 202 of described vacuum suction pipe 201 is designed to wedge structure, and the bore of one end of the close mask plate 10 of this sucker 202 is greater than the bore of one end away from mask plate 10 of this sucker 202.In such scheme, the sucker 202 of described vacuum suction pipe 201 is designed to up-small and down-big structure, is conducive to carry out large-area absorption.
It should be noted that in addition, in order to ensure the clean environment of mask plate 10, in the present invention, vacuum suction pipe 201, carriage release lever 400 etc. in described cleaning mechanism all adopt clean material to make.
Below illustrate that the mask plate box in preferred embodiment provided by the present invention carries out the clean course of work to mask plate 10:
In the time detecting that the surface of mask plate 10 exists contamination particle, the vacuum interface 203 of vacuum suction pipe 201 ends on mask plate box is communicated with vacuum gas feeding unit, open the switch of electrostatic precipitator and described vacuum gas feeding unit, operating personnel's hand reciprocating moves described carriage release lever 400, make vacuum suction pipe 201 in mobile groove 300 inter-sync to-and-fro movements, the sucker 202 on vacuum suction pipe 201 draws the lip-deep contamination particle of mask plate 10;
After having cleaned, the vacuum interface of vacuum suction pipe 201 ends 203 and vacuum gas feeding unit are disconnected, and utilize stopper 204 to seal this vacuum interface 203, carriage release lever 400 is moved to the rear portion of box body structure 100, and around vacuum suction pipe 201 bar 400 in rotary moving, make the sucker 202 of vacuum suction pipe 201 by just mask plate 10 being rotated to placement parallel with mask plate 10, to prevent that the inner also remaining contamination particle of clean pipe from dropping, one fixed support 103 can be set on box body structure 100, for carriage release lever 400 is fixed on to box body structure 100, thereby can not affect the normal use of mask plate 10.
Wherein, in said process, in the time detecting that the contamination particle on mask plate 10 surfaces is present in the first side of mask plate 10, the stopper 204 of vacuum suction pipe 201 first ends can be pulled out, the stopper 204 of the second end is motionless, and the vacuum interface of the first end of vacuum suction pipe 201 203 and the interface of vacuum gas feeding unit are connected;
In the time detecting that the contamination particle on mask plate 10 surfaces is present in the second side of mask plate 10, the stopper 204 of vacuum suction pipe 201 second ends can be pulled out, the stopper 204 of first end is motionless, and the vacuum interface of the second end of vacuum suction pipe 201 203 and the interface of vacuum gas feeding unit are connected;
In the time detecting that the contamination particle on mask plate 10 surfaces is present in the centre position of mask plate 10, the stopper 204 at vacuum suction pipe 201 two ends all can be pulled out, the vacuum interface at the two ends of vacuum suction pipe 201 203 is all connected with the interface of vacuum gas feeding unit.
The above is the preferred embodiment of the present invention; it should be pointed out that for those skilled in the art, do not departing under the prerequisite of principle of the present invention; can also make some improvements and modifications, these improvements and modifications also should be considered as protection scope of the present invention.
Claims (11)
1. a mask plate box, is characterized in that, comprising:
For the box body structure of accommodating mask plate;
And, can adsorb the lip-deep contamination particle of mask plate in described box body structure, to clean the cleaning mechanism of mask plate, described cleaning mechanism is arranged on described box body structure.
2. mask plate box according to claim 1, is characterized in that,
Described cleaning mechanism comprises:
Can on box body structure, move, to move to the adsorption element of pre-position on the surface of the mask plate in described box body structure, the surface of the mask plate of the adsorption plane of described adsorption element in described box body structure arranges;
Be arranged at the guide rail on described box body structure, described adsorption element is arranged on described guide rail, and can move along described guide rail;
And, for the driver element that drives described adsorption element to move along described guide rail.
3. mask plate box according to claim 2, is characterized in that,
Described driver element is positioned at outside described box body structure, and described adsorption element stretches out outside described box body structure, is connected with described driver element;
Described mask plate box also comprises: for sealing the space forming between described adsorption element and described box body structure, stop outside contamination to enter the enclosed construction in described box body structure to coordinate with described box body structure.
4. mask plate box according to claim 3, is characterized in that,
Described guide rail comprises: the length direction along the mask plate in box body structure extends, so that the mobile groove that described adsorption element moves along the length direction of described mask plate, described mobile groove is arranged at least one side of described box body structure;
Described adsorption element stretches out outside described box body structure from described mobile groove; Described enclosed construction is arranged on described mobile groove, can be in described adsorption element moving process, seal the cell body part outside the described adsorption element of described mobile groove, and stop outside contamination to enter in described box body structure to coordinate with described box body structure.
5. mask plate box according to claim 4, is characterized in that,
Described adsorption element comprises:
The vacuum suction pipe that extends to the opposite side of mask plate on the Width of mask plate that can be in described box body structure from a side of mask plate, described vacuum suction pipe is arranged in described mobile groove movably;
And, be used to described vacuum suction pipe that the vacuum gas feeding unit of vacuum suction power is provided;
Wherein, the inner hollow of described vacuum suction pipe, described vacuum suction pipe on the adsorption plane of mask plate, be distributed with multiple suckers; Stretch out outside described box body structure from described mobile groove the end, at least one end of described vacuum suction pipe, and end outside the described box body structure of stretching out of described vacuum suction pipe is provided with the vacuum interface for being communicated with described vacuum gas feeding unit.
6. mask plate box according to claim 5, is characterized in that,
Stopper for stopping up described vacuum interface is removably installed on described vacuum interface.
7. mask plate box according to claim 5, is characterized in that,
Described mobile groove has two at least, at least two described mobile grooves are arranged at respectively on the relative two sides on the Width that is positioned at mask plate of described box body structure, the end, two ends of described vacuum suction pipe is arranged at respectively at least two mobile grooves movably, and self-corresponding described mobile groove stretches out outside described box body structure respectively.
8. mask plate box according to claim 5, is characterized in that,
Described driver element comprises:
For the carriage release lever that drives described vacuum suction pipe to move along described mobile groove, described carriage release lever is connected with the end outside the described box body structure of stretching out of described vacuum suction pipe.
9. mask plate box according to claim 8, is characterized in that,
Development length on the length direction of the mask plate of described mobile groove in described box body structure is greater than the length of the mask plate in described box body structure, and described carriage release lever is flexibly connected with the end outside the described box body structure of stretching out of described vacuum suction pipe, and can be around the rotation of the axle center of described vacuum suction pipe.
10. mask plate box according to claim 5, is characterized in that,
Described enclosed construction comprises:
Be arranged in the zip in the opening opposite edges of described mobile groove along the length direction of the mask plate in described box body structure;
Be arranged on a side of described vacuum suction pipe, can be in the time that described vacuum suction pipe move, open and be positioned at described vacuum suction pipe and move the zip in front, and make the unlocking apparatus that distance is greater than the external diameter of described vacuum suction pipe of opening of described zip;
And, be arranged on the opposite side of described vacuum suction pipe, can be in the time that described vacuum suction pipe move, locking is positioned at described vacuum suction pipe and moves the blocking device of the zip at rear.
11. mask plate boxes according to claim 1, is characterized in that,
Described mask plate box also comprises and being arranged on described box body structure, for preventing the electrostatic precipitator of static.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410206149.5A CN104007609B (en) | 2014-05-15 | 2014-05-15 | A kind of mask plate box |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410206149.5A CN104007609B (en) | 2014-05-15 | 2014-05-15 | A kind of mask plate box |
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| CN104007609A true CN104007609A (en) | 2014-08-27 |
| CN104007609B CN104007609B (en) | 2017-07-04 |
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| CN201410206149.5A Expired - Fee Related CN104007609B (en) | 2014-05-15 | 2014-05-15 | A kind of mask plate box |
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Cited By (5)
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| CN105739235A (en) * | 2016-03-23 | 2016-07-06 | 常州鸿开电子科技有限公司 | Multifunctional suction cup device with backlight for mask plate detection |
| CN106950797A (en) * | 2017-05-22 | 2017-07-14 | 深圳市华星光电技术有限公司 | Light shield clip cleaning device and exposure machine |
| CN107464770A (en) * | 2017-08-28 | 2017-12-12 | 武汉华星光电半导体显示技术有限公司 | A kind of mask plate storage device |
| CN107600687A (en) * | 2017-09-26 | 2018-01-19 | 武汉华星光电技术有限公司 | Automatically cleaning box for photomask |
| CN109782551A (en) * | 2019-01-11 | 2019-05-21 | 深圳市华星光电技术有限公司 | Mask plate foreign body eliminating apparatus |
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| CN105739235A (en) * | 2016-03-23 | 2016-07-06 | 常州鸿开电子科技有限公司 | Multifunctional suction cup device with backlight for mask plate detection |
| CN106950797A (en) * | 2017-05-22 | 2017-07-14 | 深圳市华星光电技术有限公司 | Light shield clip cleaning device and exposure machine |
| CN107464770A (en) * | 2017-08-28 | 2017-12-12 | 武汉华星光电半导体显示技术有限公司 | A kind of mask plate storage device |
| CN107600687A (en) * | 2017-09-26 | 2018-01-19 | 武汉华星光电技术有限公司 | Automatically cleaning box for photomask |
| CN109782551A (en) * | 2019-01-11 | 2019-05-21 | 深圳市华星光电技术有限公司 | Mask plate foreign body eliminating apparatus |
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|---|---|
| CN104007609B (en) | 2017-07-04 |
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