CN103993264A - Vacuum degree measurement device for vacuum coating equipment - Google Patents
Vacuum degree measurement device for vacuum coating equipment Download PDFInfo
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- CN103993264A CN103993264A CN201310053618.XA CN201310053618A CN103993264A CN 103993264 A CN103993264 A CN 103993264A CN 201310053618 A CN201310053618 A CN 201310053618A CN 103993264 A CN103993264 A CN 103993264A
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Abstract
The invention relates to a vacuum degree measurement device for vacuum coating equipment. The device comprises a vacuum gauge and a switch valve. The switch valve is mounted in a vacuum chamber of the vacuum coating equipment and is connected to the vacuum gauge. When the switch valve is opened, the vacuum chamber and the vacuum gauge are mutually communicated, so that the vacuum gauge can convert the vacuum degree in the vacuum chamber by measuring the physical properties of gas. When the switch valve is closed, the vacuum chamber and the vacuum gauge are not communicated with each other, so that the contact opportunities of the vacuum gauge to a chemical corrosion gas can be reduced, thus reaching the purposes of prolonging the repair cycle and the service life. Meanwhile, the device is convenient for repair and operation.
Description
Technical field
The present invention is relevant with vacuum coating film equipment, refers to especially a kind of vacuum tightness measuring equipment of vacuum coating film equipment.
Background technology
In simple terms, so-called vacuum plating is that a thing to be deposited (for example substrate) is put in a vacuum cavity, then a vapor deposition source is heated to the state of vaporization distillation, makes the gas of vapor deposition source be attached to the surface of thing to be deposited and form thin film.
In order to guarantee that in whole processing procedure the inside of vacuum cavity can maintain vacuum state; conventionally a vacuumometer can be set in vacuum cavity; in order to the vacuum tightness in measured vacuum cavity; but because vacuumometer is that long-term exposure is in the gas of vapor deposition source; so the internals of vacuumometer is easy to suffer corrosion damage and often needs repairing; once vacuumometer, keep in repair and can cause whole processing procedure to be procrastinateed, and then the related production efficiency that affects.
Summary of the invention
Main purpose of the present invention is to provide a kind of vacuum tightness measuring equipment of vacuum coating film equipment, and it can extend maintenance cycle and work-ing life, and has good maintenance convenience.
In order to reach above-mentioned purpose, this vacuum coating film equipment includes a vacuum cavity, this vacuum cavity have one run through in, the open holes of outside wall surface, vacuum tightness measuring equipment of the present invention includes a vacuum and takes into account a switch-valve, this switch-valve is installed on the open holes of this vacuum cavity and is positioned at the outside wall surface of this vacuum cavity, and link together with this vacuumometer, when this switch-valve is opened, between this vacuum cavity and this vacuumometer, via a passage of this switch-valve, be interconnected, make this vacuumometer be converted into force value by measuring the physical properties of gas, to obtain the vacuum tightness of this vacuum cavity, when this switch-valve cuts out, not connected between this vacuum cavity and this vacuumometer, make this vacuumometer can reduce the chance that touches chemical corrosion gas, to reach the object that extends maintenance cycle and work-ing life and be convenient to maintenance operation.
Accompanying drawing explanation
Fig. 1 is the three-dimensional exploded view of the present invention's the first preferred embodiment.
Fig. 2 is the cross-sectional schematic of the present invention's the first preferred embodiment.
Fig. 3 is the cross-sectional schematic of the present invention's the second preferred embodiment.
Fig. 4 is analogous to Fig. 3, mainly shows different installation sites.
Embodiment
In order to describe structure of the present invention, feature and effect place in detail, hereby enumerate a preferred embodiment and coordinate following graphic explanation as after.
Refer to Fig. 1, the vacuum tightness measuring equipment 20 providing for a preferred embodiment of the present invention, mainly use at a vacuum coating film equipment, vacuum coating film equipment includes a vacuum cavity 10, the inside of vacuum cavity 10 defines a chamber 12, uses for a thing (not shown) to be deposited and carries out film-plating process, in addition, vacuum cavity 10 has an open holes 14 that runs through inside and outside wall, and chamber 12 can be communicated with the external world via open holes 14.Referring again to Fig. 1 and Fig. 2, vacuum tightness measuring equipment 20 of the present invention is arranged at the top of vacuum cavity 10, and includes a vacuumometer 30 and a switch-valve 40.
Vacuumometer 30 is a cold-cathode ionization gauge in the present embodiment, is mainly under low-pressure state, to utilize the relation between discharging current and gaseous tension to carry out the measurement of vacuum tightness.Because cold-cathode ionization gauge is prior art, in order saving space, at this, to hold and do not repeat its detailed structure and principle of work.
Switch-valve 40 is that an angle valve has an inlet end 42 and an outlet side 44 that is 90 degree phase differential in the present embodiment, and between inlet end 42 and outlet side 44, forms a passage 46.Whether switch-valve 40 is positioned at the outside wall surface of vacuum cavity 10 and by inlet end 42 and outlet side 44 be spirally connected respectively open holes 14 and the vacuumometer 30 of vacuum cavity 10, in order to control between vacuum cavity 10 and vacuumometer 30, can be interconnected via passage 46.
Before film-plating process starts, first switch-valve 40 is opened, make via passage 46, to be interconnected between vacuum cavity 10 and vacuumometer 30, vacuumometer 30 now can be converted into force value by measuring the physical properties of gas, with the inside of guaranteeing vacuum cavity 10, in vacuum state, as shown in Figure 2, then switch-valve 40 cuts out, make between vacuum cavity 10 and vacuumometer 30 not connectedly, now just can start to carry out film-plating process.In whole film-plating process, the gas of vapor deposition source can cannot enter in vacuumometer 30 because of closing of passage 46, so just can allow the internals of vacuumometer 30 reduce the chance that touches chemical corrosion gas, to reach, extend maintenance cycle and the object in work-ing life.When vacuumometer 30 is keeped in repair, only switch-valve 40 need cut out in addition, vacuumometer 30 can be pulled down, this process is without the intrinsic vacuum tightness of destroying in vacuum cavity 10, to reach the object of maintenance convenience.
What at this, need to add a supplementary explanation is, vacuum tightness measuring equipment 20 of the present invention can arrange two groups of vacuumometers 30 and two groups of switch-valves 40 above vacuum cavity 10, when wherein one group of vacuumometer 30 keeps in repair, operator still can use other one group of vacuumometer 30 to carry out film-plating process, as shown in Figure 3, the improving production efficiency to avoid film-plating process to be procrastinateed, and, vacuum tightness measuring equipment 20 of the present invention also can arrange wherein one group of vacuumometer 30 and switch-valve 40 above vacuum cavity 10, and the side at vacuum cavity 10 arranges other one group of vacuumometer 30 and switch-valve 40, as shown in Figure 4, can reach identical object equally.
Finally, the present invention takes off disclosed composed component in embodiment in front, only for illustrating, is not used for limiting the protection domain of this case, and substituting or changing of other equivalence element, also should be this case claim and contain.
Claims (5)
1. a vacuum tightness measuring equipment for vacuum coating film equipment, is characterized in that, this vacuum coating film equipment has a vacuum cavity, and this vacuum cavity has an open holes that runs through inside and outside wall, and this vacuum tightness measuring equipment includes:
At least one vacuumometer; And
At least one switch-valve, be installed on the open holes of this vacuum cavity and be positioned at the outside wall surface of this vacuum cavity, this switch-valve connects this vacuumometer and has a passage, when this switch-valve is opened, between this vacuum cavity and this vacuumometer, via this passage, be interconnected, when this switch-valve cuts out, not connected between this vacuum cavity and this vacuumometer.
2. the vacuum tightness measuring equipment of vacuum coating film equipment according to claim 1, is characterized in that, this vacuum is taken into account the top that this switch-valve is positioned at this vacuum cavity simultaneously.
3. the vacuum tightness measuring equipment of vacuum coating film equipment according to claim 1, is characterized in that, includes two these vacuum and takes into account two these switch-valves.
4. the vacuum tightness measuring equipment of vacuum coating film equipment according to claim 3, is characterized in that, each vacuum is taken into account the top that each switch-valve is positioned at this vacuum cavity simultaneously.
5. the vacuum tightness measuring equipment of vacuum coating film equipment according to claim 3, it is characterized in that, one this vacuumometer and wherein this switch-valve are positioned at the top of this vacuum cavity simultaneously, and other one this vacuum is taken into account the side that other one this switch-valve is positioned at this vacuum cavity simultaneously.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201310053618.XA CN103993264A (en) | 2013-02-19 | 2013-02-19 | Vacuum degree measurement device for vacuum coating equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201310053618.XA CN103993264A (en) | 2013-02-19 | 2013-02-19 | Vacuum degree measurement device for vacuum coating equipment |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN103993264A true CN103993264A (en) | 2014-08-20 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201310053618.XA Pending CN103993264A (en) | 2013-02-19 | 2013-02-19 | Vacuum degree measurement device for vacuum coating equipment |
Country Status (1)
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| CN (1) | CN103993264A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107841730A (en) * | 2017-11-23 | 2018-03-27 | 滁州国凯电子科技有限公司 | A kind of method of extension ALD vacuum meter service lifes |
| CN113957407A (en) * | 2021-10-26 | 2022-01-21 | 京东方科技集团股份有限公司 | Vacuum monitor and evaporation equipment |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1676665A (en) * | 2004-04-02 | 2005-10-05 | 矽统半导体股份有限公司 | Vacuum working apparatus and method for preventing vacuometer corrosion |
| CN201281644Y (en) * | 2008-10-21 | 2009-07-29 | 中芯国际集成电路制造(上海)有限公司 | Ionization vacuum gauge device with air section valve |
| CN203187748U (en) * | 2013-02-19 | 2013-09-11 | 生阳新材料科技（宁波）有限公司 | Vacuum measurement device of vacuum coating equipment |
-
2013
- 2013-02-19 CN CN201310053618.XA patent/CN103993264A/en active Pending
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1676665A (en) * | 2004-04-02 | 2005-10-05 | 矽统半导体股份有限公司 | Vacuum working apparatus and method for preventing vacuometer corrosion |
| CN201281644Y (en) * | 2008-10-21 | 2009-07-29 | 中芯国际集成电路制造(上海)有限公司 | Ionization vacuum gauge device with air section valve |
| CN203187748U (en) * | 2013-02-19 | 2013-09-11 | 生阳新材料科技（宁波）有限公司 | Vacuum measurement device of vacuum coating equipment |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107841730A (en) * | 2017-11-23 | 2018-03-27 | 滁州国凯电子科技有限公司 | A kind of method of extension ALD vacuum meter service lifes |
| CN113957407A (en) * | 2021-10-26 | 2022-01-21 | 京东方科技集团股份有限公司 | Vacuum monitor and evaporation equipment |
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| PB01 | Publication | ||
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| WD01 | Invention patent application deemed withdrawn after publication | ||
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Application publication date: 20140820 |