CN103990567B - Spray equipment - Google Patents

Spray equipment Download PDF

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Publication number
CN103990567B
CN103990567B CN201410236407.4A CN201410236407A CN103990567B CN 103990567 B CN103990567 B CN 103990567B CN 201410236407 A CN201410236407 A CN 201410236407A CN 103990567 B CN103990567 B CN 103990567B
Authority
CN
China
Prior art keywords
support
turntable
shower nozzle
spray
guide rail
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
CN201410236407.4A
Other languages
Chinese (zh)
Other versions
CN103990567A (en
Inventor
马群
王丹
王耸
张琨鹏
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
BOE Technology Group Co Ltd
Ordos Yuansheng Optoelectronics Co Ltd
Original Assignee
BOE Technology Group Co Ltd
Ordos Yuansheng Optoelectronics Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by BOE Technology Group Co Ltd, Ordos Yuansheng Optoelectronics Co Ltd filed Critical BOE Technology Group Co Ltd
Priority to CN201410236407.4A priority Critical patent/CN103990567B/en
Publication of CN103990567A publication Critical patent/CN103990567A/en
Application granted granted Critical
Publication of CN103990567B publication Critical patent/CN103990567B/en
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B05SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05BSPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
    • B05B13/00Machines or plants for applying liquids or other fluent materials to surfaces of objects or other work by spraying, not covered by groups B05B1/00 - B05B11/00
    • B05B13/02Means for supporting work; Arrangement or mounting of spray heads; Adaptation or arrangement of means for feeding work
    • B05B13/04Means for supporting work; Arrangement or mounting of spray heads; Adaptation or arrangement of means for feeding work the spray heads being moved during spraying operation
    • B05B13/0405Means for supporting work; Arrangement or mounting of spray heads; Adaptation or arrangement of means for feeding work the spray heads being moved during spraying operation with reciprocating or oscillating spray heads
    • B05B13/041Means for supporting work; Arrangement or mounting of spray heads; Adaptation or arrangement of means for feeding work the spray heads being moved during spraying operation with reciprocating or oscillating spray heads with spray heads reciprocating along a straight line
    • B05B13/0415Means for supporting work; Arrangement or mounting of spray heads; Adaptation or arrangement of means for feeding work the spray heads being moved during spraying operation with reciprocating or oscillating spray heads with spray heads reciprocating along a straight line the angular position of the spray heads relative to the straight line being modified during the reciprocating movement
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B05SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05BSPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
    • B05B13/00Machines or plants for applying liquids or other fluent materials to surfaces of objects or other work by spraying, not covered by groups B05B1/00 - B05B11/00
    • B05B13/02Means for supporting work; Arrangement or mounting of spray heads; Adaptation or arrangement of means for feeding work
    • B05B13/04Means for supporting work; Arrangement or mounting of spray heads; Adaptation or arrangement of means for feeding work the spray heads being moved during spraying operation
    • B05B13/0442Installation or apparatus for applying liquid or other fluent material to separate articles rotated during spraying operation

Landscapes

  • Spray Control Apparatus (AREA)

Abstract

The present invention relates to panel production equipment field, disclose a kind of spray equipment, comprising: fuselage and be arranged on shower nozzle, shower nozzle balladeur train, the substrate support on fuselage, substrate support is horizontally set on fuselage, for support substrate to be sprayed; Shower nozzle balladeur train comprises two linear guides, and two linear guides parallel the side top that is arranged on substrate support, and linear guides all parallels with substrate support; Shower nozzle is arranged on linear guides, linear slide on linear guides; Also comprise rotation control unit and rotating mechanism, rotating mechanism drives shower nozzle balladeur train and substrate support to relatively rotate; Rotation control unit is connected with rotating mechanism, rotates for controlling rotating mechanism. The present invention can make spray film line and the reference line of the every one deck spray rete on substrate all have a little angle, and the angle angle of every layer is all not identical, can the Fast Identification linearity whether spray equipment fault causes bad, and engineering position, get rid of fast the fault of spray equipment, cost-saving.

Description

Spray equipment
Technical field
The present invention relates to panel production equipment field, particularly relate to a kind of spray equipment.
Background technology
In the manufacturing process of liquid crystal panel, on substrate, make film and be absolutely necessary one sectionTechnique, film refers to the entirety of the multilayer spray rete on substrate. This technique is mainly to make successivelySpray uniformly liquid thin-film material at substrate surface with spray equipment, then by himselfDiffusion, forms spray rete. Concrete, the shower nozzle of spray equipment is elongated rod shape, on shower nozzleBe provided with multiple nozzles along the length direction of stock, in spraying process, make shower nozzle along with itselfThe direction rectilinear movement that length direction is perpendicular, to substrate spray-coated film material, this spraying profileBe spray film line. Spray film thickness on panel is thinner, and the aperture of nozzle is less, easily causes sprayMouth is unstable, as occur in spray nozzle clogging, nozzle with bubble and nozzle internal pressure is excessive orThe problem such as too small. In certain or certain several nozzles go wrong, the region of this nozzle spraying existsForming spray, to be the linearity consistent with spray film line after rete bad. Existing spray equipment lack angleDegree adjusting device, parallels between the spray film line of multilayer spray rete. Detecting, linearity is badProduce spray rete time, because the spray film line of each spray rete parallels, being difficult to determine is whichIndividual spray rete occurs linear bad, cannot determine the workshop section of problem and the position of spray film device.
Summary of the invention
(1) technical problem that will solve
The object of this invention is to provide the spray equipment that a kind of panel is produced, this spray equipment canRotary spraying angle, has angle between multilayer spray rete, the linear bad generation of convenient detectionWorkshop section.
(2) technical scheme
In order to solve the problems of the technologies described above, the invention provides a kind of spray equipment, comprising: fuselageWith the shower nozzle, shower nozzle balladeur train, the substrate support that are arranged on described fuselage, described substrate support waterFlat being arranged on described fuselage, for support substrate to be sprayed; Described shower nozzle balladeur train comprises twoBar linear guides, two described linear guides parallel in the side that is arranged on described substrate supportSide, and described linear guides all parallels with described substrate support; Described in described shower nozzle is arranged onOn linear guides, linear slide on described linear guides; Also comprise rotation control unit and revolveRotation mechanism, described rotating mechanism drives described shower nozzle balladeur train and described substrate support to relatively rotate;Described rotation control unit is connected with rotating mechanism, rotates for controlling described rotating mechanism.
Wherein, described rotating mechanism comprises two guide rail turntables, and two described guide rail turntables are installedOn described fuselage, two described linear guides are arranged on respectively on described guide rail turntable, twoDescribed guide rail turntable drives two described linear guides parallel rotation; Described rotation control unit dividesBe not connected with described guide rail turntable, for controlling described guide rail turntable rotation.
Wherein, two described linear guides include slideway and slide block, and described slideway is fixed on instituteState on guide rail turntable, described slide block is slidably mounted on slideway; The two ends of described shower nozzle are dividedBe not arranged on slide block.
Wherein, on two described guide rail turntables, be respectively equipped with sensor, described sensor respectively withDescribed rotation control unit connects.
Wherein, described rotating mechanism comprises support turntable, and described support turntable is arranged on described machineWith it, described substrate support is arranged on described support turntable, described in described support turntable drivesThe rotation of substrate support; Described rotation control unit is connected with described support turntable, for controllingState the rotation of support turntable.
Wherein, on described support turntable, be equipped with sensor, described sensor and described rotation controlUnit processed connects.
(3) beneficial effect
A kind of spray equipment provided by the invention, makes to spray relative turning between film balladeur train and substrate supportMoving, make spray film line and the reference line of the every one deck spray rete on substrate all there is a little angle(as 5 degree), and the angle angle of every layer is all not identical, when follow-up technique is found linear badTime, whether the angle bad according to linearity, can Fast Identification be that spray equipment fault causesLinear bad, and there is linear bad engineering position, thus get rid of fast the event of spray equipmentBarrier, cost-saving.
Brief description of the drawings
Fig. 1 is the left view of spray equipment embodiment of the present invention;
Fig. 2 is the top view of spray equipment embodiment of the present invention;
Fig. 3 is the top view that spray equipment of the present invention rotates guide rail turntable in use;
Fig. 4 is the schematic diagram that uses the substrate of spray equipment spraying of the present invention.
In figure, 1: substrate; 100: datum line; 101: ground floor spray rete; 111: the firstSpray film line; 102: second layer spray rete; 112:: the second spray film line; 103: the three layers of spray filmsLayer; 113: the three spray film lines; 2: substrate support; 3: support turntable; 4: shower nozzle; 41:Nozzle; 5: linear guides; 51: slideway; 52: slide block; 6: guide rail turntable; 7: rotationControl module.
Detailed description of the invention
Below in conjunction with drawings and Examples, the specific embodiment of the present invention is done further in detailDescribe. Following instance is used for illustrating the present invention, but is not used for limiting the scope of the invention.
Shown in seeing figures.1.and.2, spray equipment of the present invention, comprising: (figure does not show fuselageGo out), shower nozzle 4, shower nozzle balladeur train, substrate support 2, rotating mechanism and rotation control unit 7,Shower nozzle 4, shower nozzle balladeur train, substrate support 2 are arranged on fuselage, and substrate support 2 is horizontally disposed withOn fuselage, for support substrate 1 to be sprayed. Shower nozzle balladeur train comprises two lines that parallelProperty guide rail 5, two linear guides 5 be separately positioned on the side top of substrate support 2, and linearGuide rail 5 all parallels with substrate support 2. Shower nozzle 4 is arranged on linear guides 5, in linearityRectilinear movement on guide rail 5; Rotating mechanism drives shower nozzle balladeur train and substrate support 2 to relatively rotate.Rotation control unit 7 is connected with rotating mechanism, rotates for controlling rotating mechanism.
Further, rotating mechanism comprises 6, two guide rail turntables of two guide rail turntables 6 respectivelyBe arranged on fuselage, be positioned at two side positions of substrate support 2. Article two, linear guides 5 is pacified respectivelyBe contained on two guide rail turntables 6, two guide rail turntables 6 drive two parallel turning of linear guides 5Moving. Article two, linear guides 5 is still parallel to each other after rotating, and makes the shower nozzle 4 can be along linear guides 5Mobile. Rotation control unit 7 is connected with guide rail turntable 6 respectively, for controlling guide rail turntable 6Rotation. Rotation control unit 7 sends rotation command to guide rail turntable 6, and guide rail turntable 6 receivesTo control signal, carry out the rotation of control signal drive linear guides 5.
Further, two linear guides 5 include slideway 51 and slide block 52, slideway 51Be fixed on guide rail turntable 6, slide block 52 is slidably mounted on slideway 51; Shower nozzle 4Two ends are arranged on respectively on slide block 52.
Rotating mechanism comprises support turntable 3, and support turntable 3 is arranged on fuselage, substrate support2 are arranged on support turntable 3, and support turntable 3 drives substrate support 2 to rotate; Rotation is controlledUnit 7 is connected with support turntable 3, rotates for controlling support turntable 3.
When spray equipment of the present invention uses, substrate 1 is placed on the upper of substrate support 2, movingUnder power drives, slide block 52 is along slideway 51 linear slide, in slip moving process, and shower nozzle 4Nozzle 41 spray thin-film material, shower nozzle to the substrate to be sprayed 1 being positioned on substrate support 2The track of 4 spraying is spray film line.
As shown in Figure 3, when production, on thin film coatings production line, be provided with successively multiple and send outBright spray equipment, arranges the anglec of rotation of the linear guides 5 of each spray equipment. With substrateA limit be that true edge is determined datum line 100, datum line 100 parallels with true edge, makesSpray film line and the datum line 100 of every layer of spray rete are different angles, as shown in Figure 4, and with oneThe films of planting three layers of spray rete are example, the first spray film line 111 and base of ground floor spray rete 101Directrix 100 is-5 ° of angles, the second spray film line 112 and datum line of second layer spray rete 102100 are 0 ° of angle, the 3rd spray film line 113 and datum line 100 of the 3rd layer of spray rete 103Be 5 ° of angles. When late detection when bad, detects benchmark linear bad and substrate to linearThe angle angle on limit, thus promptly determine whether occur linear bad is that spray equipment fault is drawnThe linearity rising is bad, and occur linear bad be ground floor spray rete 101, second layer spray rete102 or the 3rd layer of spray rete 103, and then determine linear bad workshop section and spraying dress occurPut, staff can be determined fast and find linear bad spray equipment, fix a breakdown,Cost-saving.
Same, when above-mentioned production, also can rotate support turntable 3, thereby determine spray film lineAngle with datum line.
Further, in order to control exactly the anglec of rotation of guide rail turntable 6 and support turntable 3,On guide rail turntable 6 and support turntable 3, be equipped with sensor (scheming not shown), sensor withRotation control unit connects respectively, and sensor detects the angle of rotation, and signal is sent to rotationControl module, rotation control unit is accurately controlled the angle of rotation according to testing result.
It should be noted that rotating mechanism of the present invention can only comprise support turntable, also canOnly comprise guide rail turntable, also can on spray equipment, be provided with support turntable and guide rail turns simultaneouslyPlatform.
The foregoing is only preferred embodiment of the present invention, not in order to limit the present invention,Within the spirit and principles in the present invention all, any amendment of doing, be equal to replacement, improvement etc.,Within all should being included in protection scope of the present invention.

Claims (6)

1. a spray equipment, comprising: fuselage and be arranged on shower nozzle, the spray on described fuselageHead carriage, substrate support, described substrate support is horizontally set on described fuselage, for supportSubstrate to be sprayed; Described shower nozzle balladeur train comprises two linear guides, two described linear guidesParallel the side top that is arranged on described substrate support, and described linear guides all with described basePlate support parallels; Described shower nozzle is arranged on described linear guides, on described linear guidesLinear slide; It is characterized in that: also comprise rotation control unit and rotating mechanism, described rotationMechanism drives described shower nozzle balladeur train and described substrate support to relatively rotate; Described rotation control unitBe connected with rotating mechanism, rotate for controlling described rotating mechanism.
2. spray equipment as claimed in claim 1, is characterized in that: described rotating mechanismComprise two guide rail turntables, two described guide rail turntables are arranged on described fuselage, described in twoLinear guides is arranged on respectively on described guide rail turntable, and two described guide rail turntables drive two institutesState linear guides parallel rotation; Described rotation control unit is connected with described guide rail turntable respectively,Be used for controlling described guide rail turntable rotation.
3. spray equipment as claimed in claim 2, is characterized in that: two described linearitiesGuide rail includes slideway and slide block, and described slideway is fixed on described guide rail turntable, described slide blockBe slidably mounted on slideway; The two ends of described shower nozzle are arranged on respectively on slide block.
4. spray equipment as claimed in claim 2, is characterized in that: two described guide railsOn turntable, be respectively equipped with sensor, described sensor is connected with described rotation control unit respectively.
5. the spray equipment as described in claim 1 to 4 any one, is characterized in that: instituteState rotating mechanism and comprise support turntable, described support turntable is arranged on described fuselage, described basePlate support is arranged on described support turntable, and described support turntable drives described substrate support to revolveTurn; Described rotation control unit is connected with described support turntable, for controlling described support turntableRotation.
6. spray equipment as claimed in claim 5, is characterized in that: described support turntableOn be equipped with sensor, described sensor is connected with described rotation control unit.
CN201410236407.4A 2014-05-29 2014-05-29 Spray equipment Expired - Fee Related CN103990567B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201410236407.4A CN103990567B (en) 2014-05-29 2014-05-29 Spray equipment

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201410236407.4A CN103990567B (en) 2014-05-29 2014-05-29 Spray equipment

Publications (2)

Publication Number Publication Date
CN103990567A CN103990567A (en) 2014-08-20
CN103990567B true CN103990567B (en) 2016-05-18

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Application Number Title Priority Date Filing Date
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Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104689939B (en) * 2015-02-09 2018-05-08 上海夏普电器有限公司 Possesses the wiring board anti-blushing agent equipment for spraying of anti-blushing agent pollution absorption and alarm function
CN105562270B (en) * 2016-03-09 2017-11-07 徐州泰和门窗有限公司 A kind of spray equipment
CN105665169A (en) * 2016-03-23 2016-06-15 柳州一健科技有限公司 Spraying mechanism for manufacturing liquid crystal display panel films
CN106269360A (en) * 2016-08-26 2017-01-04 太仓市鑫鹤印刷包装有限公司 A kind of sliding double-head spray coating device of band adjustable spray coating head
CN109807001B (en) * 2019-03-06 2020-10-16 华北理工大学 Spreading machine for industrial processing based on internet of things control

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4301596B2 (en) * 1998-06-12 2009-07-22 三菱電機株式会社 Manufacturing method of electronic device and slit dropping nozzle used in the manufacturing method
KR100463520B1 (en) * 2002-04-08 2004-12-29 엘지전자 주식회사 manufacture spray ink-jet for make panel display
JP2008094044A (en) * 2006-10-16 2008-04-24 Seiko Epson Corp Head unit, droplet discharge device, discharge method of liquid matter, manufacturing method of color filter, manufacturing method of organic el element and manufacturing method of wiring board
KR101164627B1 (en) * 2008-07-28 2012-07-11 주식회사 탑 엔지니어링 Dispenser with frames capable of separation
KR100999936B1 (en) * 2008-08-08 2010-12-13 주식회사 탑 엔지니어링 Dispenser with device reducing stress of gantry
KR101015137B1 (en) * 2008-10-31 2011-02-16 주식회사 탑 엔지니어링 Cylinder and head apparatus having the same and liquid crystal dispenser having the same
CN101862720B (en) * 2010-06-23 2012-09-19 林挺 Intelligent spraying device for use in streamline production operation

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Granted publication date: 20160518