CN103983699A - Flexible comb-shaped acoustic surface wave phased-array energy converter - Google Patents
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- 238000010897 surface acoustic wave method Methods 0.000 claims abstract description 59
- 238000001514 detection method Methods 0.000 claims abstract description 25
- 230000001681 protective effect Effects 0.000 claims abstract description 9
- 238000003491 array Methods 0.000 claims abstract description 8
- 230000007547 defect Effects 0.000 claims abstract description 8
- 238000011065 in-situ storage Methods 0.000 claims abstract description 8
- 239000000945 filler Substances 0.000 claims abstract description 5
- 230000005284 excitation Effects 0.000 claims description 19
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- 239000002131 composite material Substances 0.000 claims description 7
- 239000000919 ceramic Substances 0.000 claims description 6
- 230000015572 biosynthetic process Effects 0.000 claims description 2
- 238000003786 synthesis reaction Methods 0.000 claims description 2
- 230000007704 transition Effects 0.000 claims 1
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- 210000001520 comb Anatomy 0.000 abstract 1
- 238000007689 inspection Methods 0.000 abstract 1
- 239000000523 sample Substances 0.000 description 21
- 238000010586 diagram Methods 0.000 description 6
- 238000004519 manufacturing process Methods 0.000 description 4
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- 238000005516 engineering process Methods 0.000 description 3
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- 238000010168 coupling process Methods 0.000 description 2
- 238000005859 coupling reaction Methods 0.000 description 2
- 238000013016 damping Methods 0.000 description 2
- 238000013461 design Methods 0.000 description 2
- 238000009434 installation Methods 0.000 description 2
- 238000000034 method Methods 0.000 description 2
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- 230000000737 periodic effect Effects 0.000 description 2
- 239000007822 coupling agent Substances 0.000 description 1
- 230000001808 coupling effect Effects 0.000 description 1
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- 238000009826 distribution Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000003384 imaging method Methods 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 230000000644 propagated effect Effects 0.000 description 1
- 230000001902 propagating effect Effects 0.000 description 1
- 230000035945 sensitivity Effects 0.000 description 1
- 238000012360 testing method Methods 0.000 description 1
- 238000002560 therapeutic procedure Methods 0.000 description 1
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Abstract
本发明涉及了一种柔性梳状声表面波相控阵换能器，所述换能器可以在曲表面激励接收声表面波，并通过相控延时实现声束的偏转与聚焦。换能器包括多个柔性梳状阵列、吸声填充物、背衬吸声层、匹配层、保护膜、电路板、外套、多芯同轴电缆、接头和电缆固定外壳，其中柔性梳状二维阵列、柔性吸声填充物、柔性背衬吸声层、柔性匹配层、柔性保护膜和柔性电路板形成柔性梳状声表面波相控阵换能器主体。由于换能器具有柔性结构，特别适用于任意复杂曲表面微小缺陷检测。换能器厚度小于6mm，且可通过电子扫描完成整个表面检测，无需机械扫查，可用于伸入狭小空间或贴装在密闭空间内的零构件表面，实现嵌入式原位检测或在役实时监测。
The invention relates to a flexible comb-shaped surface acoustic wave phased array transducer, which can excite and receive surface acoustic waves on a curved surface, and realize deflection and focusing of sound beams through phase control delay. The transducer includes a plurality of flexible comb arrays, sound-absorbing fillers, backing sound-absorbing layers, matching layers, protective films, circuit boards, jackets, multi-core coaxial cables, connectors and cable fixing shells, in which the flexible combs are two Dimensional array, flexible sound-absorbing filler, flexible backing sound-absorbing layer, flexible matching layer, flexible protective film and flexible circuit board form the main body of the flexible comb-shaped surface acoustic wave phased array transducer. Because the transducer has a flexible structure, it is especially suitable for the detection of small defects on arbitrary complex curved surfaces. The thickness of the transducer is less than 6mm, and the entire surface inspection can be completed by electronic scanning without mechanical scanning. It can be used to extend into a small space or be mounted on the surface of a component in a confined space to realize embedded in-situ detection or real-time in-service monitor.
Description
一、技术领域1. Technical field
本发明涉及一种用于激励和接收声表面波的柔性梳状相控阵换能器，特别适用于任意复杂曲表面微小缺陷的快速扫描检测和嵌入式原位检测。The invention relates to a flexible comb-shaped phased array transducer for exciting and receiving surface acoustic waves, which is especially suitable for rapid scanning detection and embedded in-situ detection of tiny defects on arbitrary complex curved surfaces.
二、背景技术2. Background technology
随着设计和制造能力的飞速发展，各个工业领域在其关键装置的关键零部件上大量采用复杂曲面零构件。这些零构件的工作时，往往受周期应力和温度环境作用，腐蚀性冲击强、工作时间长等特点，工作过程中极易形成表面疲劳裂纹缺陷。由于其通常在机器运转中承担着关键性作用，因此在该类复杂关键零构件的生产制造和在役过程中，需对其表面缺陷进行快速扫描检测与嵌入式原位监测，对保障各工业领域关键装置的安全运行具有重大意义。With the rapid development of design and manufacturing capabilities, a large number of complex curved surface components are used in key components of key devices in various industrial fields. When these components are working, they are often affected by cyclic stress and temperature environment, with strong corrosive impact and long working hours, so surface fatigue crack defects are easily formed during the working process. Because it usually plays a key role in the operation of the machine, it is necessary to perform rapid scanning detection and embedded in-situ monitoring of surface defects during the manufacturing and in-service process of such complex key components, which is of great importance to the protection of various industries. The safe operation of key devices in the field is of great significance.
传统的相控阵成像技术采用超声纵波探头组成探头阵列，利用相控原理对检测对象进行电子扫描成像。由于纵波是沿零件表面法向传播的，无法检测试样表面裂纹缺陷，且无法实现整个试样表面的快速扫描检测。The traditional phased array imaging technology uses ultrasonic longitudinal wave probes to form a probe array, and uses the phase control principle to electronically scan and image the detection object. Since the longitudinal wave propagates along the normal direction of the part surface, it is impossible to detect crack defects on the surface of the sample, and it is impossible to realize fast scanning detection of the entire sample surface.
今年来，出现使用带斜楔的相控阵换能器在被测试样表面激励声表面波，实现表面裂纹检测，但由于其采用刚性斜楔，且尺寸较大，无法与曲表面进行贴合，无法保证激励声表面波所需的入射角，耦合效果差，检测信号能量转换率和检测灵敏度极差。同时相控阵换能器在其中所起作用仅为利用声束偏转调整入射角度，其产生的表面波与传统单晶压电换能器斜入射激励的表面波一样，仅为沿斜入射方向传播的一维声束。为完成整个试样表面的检测，必须配合机械扫描运动。控制刚性斜楔沿空间曲面进行一维扫查时，除了一维移动外，还至少必须增加其两个转角运动，以控制斜楔姿态，保证与曲面的良好耦合。In recent years, a phased array transducer with a wedge has been used to excite surface acoustic waves on the surface of the tested sample to detect surface cracks. However, due to the rigid wedge and its large size, it cannot be fitted to the curved surface. , the incident angle required to stimulate the surface acoustic wave cannot be guaranteed, the coupling effect is poor, and the detection signal energy conversion rate and detection sensitivity are extremely poor. At the same time, the role of the phased array transducer is to use the deflection of the sound beam to adjust the incident angle, and the surface wave generated by it is the same as the surface wave excited by the oblique incidence of the traditional single crystal piezoelectric transducer, only along the direction of oblique incidence. Propagated 1D sound beam. In order to complete the detection of the entire sample surface, it must cooperate with the mechanical scanning movement. When controlling the rigid wedge to perform one-dimensional scanning along the spatial surface, in addition to the one-dimensional movement, at least two angular movements must be added to control the wedge posture and ensure good coupling with the surface.
因此，急需开发一种能够适用于复杂曲面表面裂纹缺陷检测、且无需机械扫查的声表面波换能器，这种换能器应能贴合复杂曲表面，且具有安装简单、体积小等特点，能够满足曲面构件表面的快速或嵌入式原位无损检测需求。Therefore, there is an urgent need to develop a surface acoustic wave transducer that can be applied to the detection of crack defects on complex curved surfaces without mechanical scanning. This transducer should be able to fit complex curved surfaces, and has the advantages of simple installation and small size. It can meet the needs of rapid or embedded in-situ non-destructive testing on the surface of curved components.
国家知识产权局公开了一篇公开号为CN103157594A的专利：“一种柔性超声相控阵阵列换能器及制作方法”，目前该专利处于实效审查状态，该专利描述了一种柔性超声相控阵阵列换能器及其制作方法，所述换能器包括柔性压电陶瓷复合材料晶片、阻尼背材、匹配层、柔性线路板、同轴电缆线和探头接口；所述匹配层、柔性压电陶瓷复合材料晶片和阻尼背材依次粘接在一起形成声学叠层；所述柔性线路板与柔性压电陶瓷复合材料晶片连接，并从柔性线路板引出多芯同轴电缆线到所述探头接口。公开号为CN101152646A的专利：“柔性超声换能器阵列及其应用装置”，目前该专利已授权，该专利描述了一种柔性超声换能器阵列，该超声换能器的超声换能器单元、超声发射器/超声发射接收器、超声耦合介质、微处理器、及柔性层介质，该超声换能器单元以阵列形式安置于该柔性层介质中或表面而构成柔性超声换能器阵列，柔性超声换能器阵列能够贴合各种具有不同表面形状的身体部位，从而能够获得现有技术无法达到的超声治疗/超声成像效果。上述两种柔性阵列换能器均是通过对阵列中的不同压电振子单元施加具有一定延时的脉冲激励，在被测试样内部沿柔性层法向方向激励具有电子偏转或聚焦扫描特点的纵向体波，而不能在被测试样表面传播的具有电子偏转或聚焦扫描特点的声表面波。The State Intellectual Property Office has published a patent with the publication number CN103157594A: "A Flexible Ultrasonic Phased Array Transducer and Its Manufacturing Method". An array transducer and a manufacturing method thereof, the transducer includes a flexible piezoelectric ceramic composite wafer, a damping back material, a matching layer, a flexible circuit board, a coaxial cable, and a probe interface; the matching layer, the flexible pressure The electric ceramic composite wafer and the damping back material are bonded together in sequence to form an acoustic laminate; the flexible circuit board is connected to the flexible piezoelectric ceramic composite wafer, and a multi-core coaxial cable is drawn from the flexible circuit board to the probe interface. Patent Publication No. CN101152646A: "Flexible Ultrasonic Transducer Array and Its Application Device", currently the patent has been authorized, the patent describes a flexible ultrasonic transducer array, the ultrasonic transducer unit of the ultrasonic transducer , an ultrasonic transmitter/ultrasonic transmitter receiver, an ultrasonic coupling medium, a microprocessor, and a flexible layer medium, the ultrasonic transducer units are arranged in an array in or on the surface of the flexible layer medium to form a flexible ultrasonic transducer array, The flexible ultrasonic transducer array can conform to various body parts with different surface shapes, so as to obtain ultrasonic therapy/ultrasound imaging effects that cannot be achieved by existing technologies. The above-mentioned two kinds of flexible array transducers all apply a pulse excitation with a certain delay to different piezoelectric vibrator units in the array, and excite the longitudinal direction with the characteristics of electronic deflection or focus scanning along the normal direction of the flexible layer inside the tested sample. Body waves, but surface acoustic waves that cannot propagate on the surface of the tested sample and have the characteristics of electronic deflection or focused scanning.
三、发明内容3. Contents of the invention
本发明提供了一种特别适用于曲表面裂纹检测的柔性梳状声表面波相控阵换能器，具有能够贴合曲表面、厚度小的特点，可以实现曲表面裂纹缺陷的快速嵌入式原位无损检测。The invention provides a flexible comb-shaped surface acoustic wave phased array transducer which is especially suitable for the detection of curved surface cracks. bit non-destructive testing.
该声表面波相控阵换能器由多个柔性梳状阵列组成，具体个数由检测曲面尺寸确定。The surface acoustic wave phased array transducer is composed of multiple flexible comb arrays, and the specific number is determined by the size of the detection surface.
每个柔性梳状阵列至少包括2个以上多个条形压电振子，一般为4到8个条形压电振子，多个条形压电振子沿宽度方向排列形成梳状阵列结构。各压电振子之间的中心间距w为被测材料声表面波波长，即被测材料声表面波声速与换能器中心频率之比。通过对多个柔性梳状声表面波换能器的所有压电振子同时施加电激励，如周期脉冲激励或正弦串激励，在被测材料表面激励出沿柔性层内阵列排布方向传播的声表面波。Each flexible comb array includes at least two or more strip-shaped piezoelectric vibrators, generally 4 to 8 strip-shaped piezoelectric vibrators, and the plurality of strip-shaped piezoelectric vibrators are arranged along the width direction to form a comb-shaped array structure. The center distance w between the piezoelectric vibrators is the wavelength of the surface acoustic wave of the measured material, that is, the ratio of the sound velocity of the surface acoustic wave of the measured material to the center frequency of the transducer. By applying electrical excitation to all the piezoelectric vibrators of multiple flexible comb-shaped surface acoustic wave transducers at the same time, such as periodic pulse excitation or sinusoidal string excitation, the acoustic wave propagating along the array arrangement direction in the flexible layer is excited on the surface of the material to be tested. surface waves.
多个上述柔性梳状阵列构成的二维阵列构成本柔性梳状声表面波相控阵换能器主体，激励时根据相控声束偏转或聚焦原理，确定各个柔性梳状阵列之间的激励时间差，控制所有柔性梳状阵列激励的合成声表面波声束在被测试样表面的偏转或聚焦，改变激励时间差，在被测试样表面完成电子扫描。The two-dimensional array composed of multiple flexible comb arrays constitutes the main body of the flexible comb surface acoustic wave phased array transducer, and the excitation between each flexible comb array is determined according to the principle of phased acoustic beam deflection or focusing during excitation. The time difference controls the deflection or focusing of the synthetic surface acoustic wave beams excited by the flexible comb array on the surface of the tested sample, changes the excitation time difference, and completes the electronic scanning on the tested sample surface.
如图2所示，该声表面波相控阵换能器包括多个条形压电振子(1)、正负电极(2)、吸声填充物(3)、背衬吸声层(4)、匹配层(5)、保护膜(6)、电路板(7)、外套(8)、电缆固定外壳(9)、同轴电缆(10)、接头(11)，其中由多个条形压电振子形成的梳状阵列规则排列形成二维阵列，如图1所示。压电振子采用柔性压电陶瓷复合材料，吸声填充物、背衬吸声层、匹配层、保护膜和电路板均采用柔性材料，以保证换能器能够适应曲表面，与之完全贴合。As shown in Figure 2, the surface acoustic wave phased array transducer includes a plurality of strip-shaped piezoelectric vibrators (1), positive and negative electrodes (2), sound-absorbing fillers (3), a backing sound-absorbing layer (4 ), matching layer (5), protective film (6), circuit board (7), jacket (8), cable fixing shell (9), coaxial cable (10), connector (11), which consists of multiple strips The comb array formed by the piezoelectric vibrator is regularly arranged to form a two-dimensional array, as shown in Figure 1. The piezoelectric vibrator is made of flexible piezoelectric ceramic composite material, and the sound-absorbing filler, backing sound-absorbing layer, matching layer, protective film and circuit board are all made of flexible materials to ensure that the transducer can adapt to the curved surface and fit it perfectly .
如图2所示，条形柔性压电振子宽度d为被测材料声表面波波长的二分之一，振子与振子之间的间隙s亦为被测材料声表面波波长的二分之一，振子与振子之间的中心间距w为被测材料声表面波波长。振子长度l为梳状阵列总长度D的0.618倍并取整，即:取整[(振子间中心间距w×振子个数n-振子间隙s)×0.618]，一般振子长度l与宽度d之比不超过10:1。As shown in Figure 2, the width d of the strip-shaped flexible piezoelectric vibrator is 1/2 of the wavelength of the surface acoustic wave of the tested material, and the gap s between the vibrators is also 1/2 of the wavelength of the surface acoustic wave of the tested material. , the center distance w between the vibrator and the vibrator is the wavelength of the surface acoustic wave of the measured material. The length l of the vibrator is 0.618 times the total length D of the comb array and rounded to an integer, that is, rounded [(center distance between vibrators w×number of vibrators n-vibrator gap s)×0.618], the general dipole length l and width d The ratio does not exceed 10:1.
如图1所示，各柔性梳状阵列沿压电振子长度方向排列形成二维阵列，各梳状阵列之间间隙Δs相同，一般不超过被测材料声表面波波长。As shown in Figure 1, each flexible comb array is arranged along the length direction of the piezoelectric vibrator to form a two-dimensional array, and the gap Δs between each comb array is the same, generally not exceeding the surface acoustic wave wavelength of the material to be tested.
本声表面波相控阵换能器为接触式换能器，使用时通过耦合剂与被测试样表面耦合。该换能器为激励/接收一体换能器，可采用周期性脉冲信号或正弦串进行激励，检测系统如图3所示，包括：柔性梳状声表面波相控阵换能器、相控阵超声信号激励接收装置、计算机和被测试样。激励时，如图4所示根据相控声束偏转或聚焦原理，确定各个柔性梳状阵列之间的激励时间差，控制所有柔性梳状阵列激励的合成声表面波声束在被测试样表面的偏转或聚焦。接收时，同样根据相控声束偏转或聚焦原理，采用该时间差对各个柔性梳状阵列接收到的声表面波回波信号进行合成，形成相控合成回波信号。利用相控阵超声信号激励接收装置改变该时间差，在被测试样表面完成二维电子扫描。由此，无需机械扫查，即可利用本柔性梳状声表面波相控阵换能器实现曲表面的二维扫查，如图5或6所示的S扫查或B扫查。The surface acoustic wave phased array transducer is a contact transducer, which is coupled with the surface of the tested sample through a coupling agent during use. The transducer is an excitation/reception integrated transducer, which can be excited by periodic pulse signals or sinusoidal strings. The detection system is shown in Figure 3, including: flexible comb-shaped surface acoustic wave phased array transducer, phased The array of ultrasonic signals excites the receiving device, the computer and the tested sample. When exciting, as shown in Figure 4, according to the principle of phase-controlled acoustic beam deflection or focusing, determine the excitation time difference between each flexible comb array, and control the synthetic surface acoustic wave beam excited by all flexible comb arrays on the surface of the tested sample. deflection or focus. When receiving, also according to the principle of phase-controlled acoustic beam deflection or focusing, the time difference is used to synthesize the SAW echo signals received by each flexible comb array to form a phase-controlled synthesized echo signal. The phased array ultrasonic signal is used to excite the receiving device to change the time difference, and two-dimensional electronic scanning is completed on the surface of the tested sample. Therefore, without mechanical scanning, the flexible comb-shaped surface acoustic wave phased array transducer can be used to realize two-dimensional scanning of curved surfaces, such as S-scan or B-scan as shown in FIG. 5 or 6 .
本发明的的优点在于：The advantages of the present invention are:
1.本发明研制的声表面波相控阵换能器具有柔性结构，适用于检测变曲率复杂曲面；1. The surface acoustic wave phased array transducer developed by the present invention has a flexible structure and is suitable for detecting complex curved surfaces with variable curvature;
2.本发明研制的声表面波相控阵换能器，可根据相控原理，通过相位延迟激励及合成各柔性梳状阵列接收的声表面波信号，在被测试样表面形成偏转或聚焦声表面波声束。2. The surface acoustic wave phased array transducer developed by the present invention can form deflected or focused acoustic waves on the surface of the tested sample through phase delay excitation and synthesis of surface acoustic wave signals received by each flexible comb array according to the phase control principle. Surface wave sound beam.
3.本发明研制的声表面波相控阵换能器，可通过电子扫描完成被测曲面的二维扫查，无需复杂多轴机械扫查即可实现曲面的二维检测。3. The surface acoustic wave phased array transducer developed by the present invention can complete the two-dimensional scanning of the measured curved surface through electronic scanning, and can realize the two-dimensional detection of the curved surface without complex multi-axis mechanical scanning.
4.本发明研制的换能器总厚度不超过6mm，可伸入狭窄空间检测，且特别适用于嵌入式贴合安装在狭小空间或封闭空间中的零构件表面上，以实现关键易损在役件的原位检测或实时监测。4. The total thickness of the transducer developed by the present invention is not more than 6mm, which can be extended into narrow spaces for detection, and is especially suitable for embedded installation on the surface of components in narrow spaces or closed spaces, so as to realize the key vulnerability In-situ detection or real-time monitoring of service parts.
四、附图说明4. Description of drawings
图1为一种柔性梳状声表面波相控阵换能器整体结构示意图。Figure 1 is a schematic diagram of the overall structure of a flexible comb-shaped surface acoustic wave phased array transducer.
图2为一种柔性梳状声表面波相控阵换能器组成分布图。Fig. 2 is a composition distribution diagram of a flexible comb-shaped surface acoustic wave phased array transducer.
图3为一种柔性梳状声表面波相控阵换能器检测系统示意图。Fig. 3 is a schematic diagram of a flexible comb SAW phased array transducer detection system.
图4为相控声束偏转或聚焦原理示意图。Fig. 4 is a schematic diagram of the principle of phase-controlled acoustic beam deflection or focusing.
图5为一种柔性梳状声表面波相控阵换能器S扫查图。Fig. 5 is a S-scan diagram of a flexible comb-shaped surface acoustic wave phased array transducer.
图6为一种柔性梳状声表面波相控阵换能器B扫查图。Fig. 6 is a B-scan diagram of a flexible comb-shaped surface acoustic wave phased array transducer.
五、具体实施方式5. Specific implementation
该声表面波相控阵换能器由多个柔性梳状阵列组成，具体个数由检测曲面尺寸确定。每个柔性梳状阵列至少包括2个以上多个条形压电振子，一般为4到8个条形压电振子，多个条形压电振子沿宽度方向排列形成梳状阵列结构。各柔性梳状阵列沿压电振子长度方向排列形成二维阵列。The surface acoustic wave phased array transducer is composed of multiple flexible comb arrays, and the specific number is determined by the size of the detection surface. Each flexible comb array includes at least two or more strip-shaped piezoelectric vibrators, generally 4 to 8 strip-shaped piezoelectric vibrators, and the plurality of strip-shaped piezoelectric vibrators are arranged along the width direction to form a comb-shaped array structure. Each flexible comb array is arranged along the length direction of the piezoelectric vibrator to form a two-dimensional array.
各条形压电振子采用柔性1-3型压电陶瓷复合材料。根据压电振子设计原则，将压电振子层制备为中心频率为期望频率的纵振压电振子层。制备柔性匹配层，其厚度为匹配层纵波波长的四分之一。将柔性压电振子与柔性匹配层贴合安装，形成压电-匹配叠层。Each strip-shaped piezoelectric vibrator is made of flexible 1-3 type piezoelectric ceramic composite material. According to the design principle of the piezoelectric vibrator, the piezoelectric vibrator layer is prepared as a longitudinal vibration piezoelectric vibrator layer whose center frequency is the desired frequency. A flexible matching layer is prepared, and its thickness is 1/4 of the longitudinal wave wavelength of the matching layer. The flexible piezoelectric vibrator is attached to the flexible matching layer to form a piezoelectric-matching stack.
切割压电-匹配叠层，切割深度为压电振子层厚度，即将压电振子层切割为二维压电振子梳状阵列。如图2所示，条形柔性压电振子宽度d为被测材料声表面波波长的二分之一，振子与振子之间的间隙s亦为被测材料声表面波波长的二分之一，振子与振子之间的中心间距w为被测材料声表面波波长，梳状阵列总长度D：(振子间中心间距w×振子个数n-振子间隙s)，振子长度l为梳状阵列总长度D的0.618倍并取整，即:取整(梳状阵列总长度D×0.618)，一般振子长度l与宽度d之比不超过10:1。各梳状阵列之间间隙Δs相同，一般不超过被测材料声表面波波长。Cutting the piezoelectric-matching stack, the cutting depth is the thickness of the piezoelectric vibrator layer, that is, cutting the piezoelectric vibrator layer into a two-dimensional piezoelectric vibrator comb array. As shown in Figure 2, the width d of the strip-shaped flexible piezoelectric vibrator is 1/2 of the wavelength of the surface acoustic wave of the tested material, and the gap s between the vibrators is also 1/2 of the wavelength of the surface acoustic wave of the tested material. , the center distance w between the vibrators is the wavelength of the surface acoustic wave of the material to be tested, the total length of the comb array D: (the center distance between the vibrators w×the number of vibrators n-the gap s between the vibrators), the length l of the vibrator is the comb array 0.618 times the total length D and rounded up, that is: rounded up (the total length of the comb array D × 0.618), generally the ratio of the length l of the vibrator to the width d does not exceed 10:1. The gap Δs between the comb arrays is the same, and generally does not exceed the wavelength of the surface acoustic wave of the material to be tested.
在二维梳状阵列上贴合柔性背衬吸声层，并使用柔性吸声填充材料填充梳状阵列间间隙，在匹配层外侧贴合柔性保护膜。在背衬吸声层外侧贴合柔性电路板，并连接电极，形成柔性梳状声表面波相控阵换能器主体。Attach a flexible backing sound-absorbing layer on the two-dimensional comb array, use flexible sound-absorbing filling materials to fill the gaps between the comb arrays, and attach a flexible protective film to the outside of the matching layer. A flexible circuit board is pasted on the outside of the sound-absorbing layer of the backing, and the electrodes are connected to form the main body of a flexible comb-shaped surface acoustic wave phased array transducer.
如图1所示，其中柔性电路板将各梳状阵列中的条形压电振子的正负极分别并联汇集，形成各梳状阵列的正负极，并引出。As shown in Figure 1, the flexible circuit board connects the positive and negative poles of the bar-shaped piezoelectric vibrators in each comb-shaped array in parallel to form the positive and negative poles of each comb-shaped array, and leads them out.
将换能器正负极与多芯同轴电缆各芯的正负极焊接，在柔性梳状声表面波相控阵换能器主体除保护膜一侧以外的其他5个表面安装柔性外套，并在柔性电路板与同轴电缆连接处安装刚性电缆固定外壳，以保护连接点。为保证柔性梳状声表面波相控阵换能器主体能完好贴合在曲表面上，柔性梳状声表面波相控阵换能器主体边缘与刚性电缆固定外壳间应具有一定宽度的柔性保护外套，宽度一般为10～30mm。最后在同轴电缆的末端焊接安装与相控阵超声信号激励/接收装置配合的多芯同轴电缆标准通用接头，如D38999、DL-260P、Hypertronic、Omni Connector30056等。Weld the positive and negative poles of the transducer with the positive and negative poles of each core of the multi-core coaxial cable, and install flexible jackets on the other five surfaces of the flexible comb-shaped surface acoustic wave phased array transducer body except the protective film side, And install a rigid cable fixing shell at the connection between the flexible circuit board and the coaxial cable to protect the connection point. In order to ensure that the main body of the flexible comb-shaped surface acoustic wave phased array transducer can fit perfectly on the curved surface, there should be a certain width of flexible space between the edge of the main body of the flexible comb-shaped surface acoustic wave phased array transducer and the rigid cable fixing shell. Protective jacket, the width is generally 10 ~ 30mm. Finally, weld and install the multi-core coaxial cable standard universal joints that are compatible with the phased array ultrasonic signal excitation/reception device at the end of the coaxial cable, such as D38999, DL-260P, Hypertronic, Omni Connector30056, etc.
本声表面波相控阵换能器可以用作激励/接收一体换能器，或作为声表面波的激励或接收换能器。作为激励/接收换能器检测时，如图3所示，声表面波相控阵换能器与被测试样表面耦合，将换能器接头连接至相控阵超声信号激励/接收装置，激励/接收装置的信号输出端接示波器或经模数转换装置接计算机。换能器在相控脉冲或正弦串信号的激励下，在试样表面激励偏转或聚焦声表面波声束。声表面波沿试样表面传播，经缺陷或表面边缘反射后，由各梳状阵列接收，各接收信号经相控阵超声信号激励/接收装置形成相控合成回波信号。利用相控阵超声信号激励接收装置改变该时间差，完成被测试样表面二维电子扫描，各扫描回波信号由计算机进行显示成像。由此，无需机械扫查，即可利用本柔性梳状声表面波相控阵换能器实现曲表面的二维扫查，如图5或6所示的S扫查或B扫查。换能器厚度小于6mm，可以深入狭小空间或贴装在密闭空间的零构件表面，实现快速嵌入式原位检测或在役监测。The surface acoustic wave phased array transducer can be used as an excitation/reception integrated transducer, or as an excitation or reception transducer for surface acoustic waves. When testing as an excitation/reception transducer, as shown in Figure 3, the surface acoustic wave phased array transducer is coupled with the surface of the tested sample, and the transducer connector is connected to the phased array ultrasonic signal excitation/reception device, and the excitation The signal output terminal of the receiving device is connected to an oscilloscope or connected to a computer through an analog-to-digital conversion device. Under the excitation of phase-controlled pulse or sinusoidal series signal, the transducer excites the deflected or focused surface acoustic wave beam on the surface of the sample. The surface acoustic wave propagates along the surface of the sample, and after being reflected by defects or surface edges, it is received by each comb array, and each received signal forms a phase-controlled composite echo signal through a phased array ultrasonic signal excitation/receiving device. The phased array ultrasonic signal is used to stimulate the receiving device to change the time difference to complete the two-dimensional electronic scanning of the surface of the tested sample, and each scanning echo signal is displayed and imaged by the computer. Therefore, without mechanical scanning, the flexible comb-shaped surface acoustic wave phased array transducer can be used to realize two-dimensional scanning of curved surfaces, such as S-scan or B-scan as shown in FIG. 5 or 6 . The thickness of the transducer is less than 6mm, and it can penetrate into a small space or be mounted on the surface of components in a confined space to realize fast embedded in-situ detection or in-service monitoring.
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