CN103983699A - Flexible comb-shaped acoustic surface wave phased-array energy converter - Google Patents
Flexible comb-shaped acoustic surface wave phased-array energy converter Download PDFInfo
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- CN103983699A CN103983699A CN201410238692.3A CN201410238692A CN103983699A CN 103983699 A CN103983699 A CN 103983699A CN 201410238692 A CN201410238692 A CN 201410238692A CN 103983699 A CN103983699 A CN 103983699A
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Abstract
The invention relates to a flexible comb-shaped acoustic surface wave phased-array energy converter. The energy converter can excite and receive an acoustic surface wave on a curved surface and realize the deflection and focusing of acoustic beams through phased delay. The energy converter comprises a plurality of flexible comb-shaped arrays, a sound absorption filler, a back-lining sound absorption layer, a matching layer, a protective film, a circuit board, a jacket, a multi-core coaxial cable, a connector and a cable fixed shell, wherein the flexible comb-shaped two-dimensional arrays, the flexible sound absorption filler, the flexible back-lining sound absorption layer, the flexible matching layer, the flexible protective film and the flexible circuit board form a flexible comb-shaped acoustic surface wave phased-array energy converter main body. The energy converter is provided with a flexible structure, thereby being particularly suitable for detecting micro defects on any complicated curved surface. The thickness of the energy converter is smaller than 6mm, the detection of the entire surface can be completed through an electronic scanning manner, the mechanical scanning is not needed, and the flexible comb-shaped acoustic surface wave phased-array energy converter can be used for the surface of a component stretching into a narrow space or surface-mounted in a closed space so as to realize the embedded in-situ detection or the in-service real-time monitoring.
Description
One, technical field
The present invention relates to a kind of for encouraging and receive the flexible pectination phase array transducer of surface acoustic wave, be specially adapted to any complicated curved surface tiny flaw rapid scanning detect and embedded in situ detection.
Two, background technology
Along with the develop rapidly of Design and manufacture ability, each industrial circle is complex-curved zero member of a large amount of employing on the key components and parts of its key device.When the work of these zero members, be often subject to cyclic stress and temperature environment effect, the features such as that corrosivity is impacted is strong, longevity of service, very easily form surface fatigue crack defect in the course of work.Because it is bearing key effect conventionally in machine run, therefore in the manufacturing and in-service process of such complicated crucial zero member, need carry out rapid scanning to its surface imperfection and detect and embedded in-situ monitoring, the safe operation that ensures each industrial circle key device is significant.
Traditional phased array imaging technology adopts ultrasonic longitudinal wave probe composition linear transducer array, utilizes phased principle to carry out electron scanning imaging to detected object.Because compressional wave is propagated along piece surface normal direction, cannot test samples surface crack defect, and the rapid scanning that cannot realize whole specimen surface detects.
This year, occur using the phase array transducer with wedge to encourage surface acoustic wave on tested sample surface, realize surface crack testing, but because it adopts rigidity wedge, and size is larger, cannot fit with curved surface, cannot ensure the incident angle that encourages surface acoustic wave required, coupling effect is poor, detection signal energy conversion rate and detection sensitivity extreme difference.Role is only for utilizing acoustic beam deflection to adjust incident angle therein for phase array transducer simultaneously, and the surface wave of its generation is the same with the surface wave of traditional monocrystalline piezoelectric transducer oblique incidence excitation, is only the one dimension acoustic beam of propagating along oblique incidence direction.For completing the detection of whole specimen surface, must cooperative mechanical scanning motion.When control rigidity wedge carries out one dimension scanning along space curved surface, except one-dimensional movement, also at least must increase two corner motion, to control wedge attitude, the good coupling of guarantee and curved surface.
Therefore, urgent need exploitation is a kind of can be applicable to complex-curved surface crack defect detection and the SAW transducer without mechanical scanning, this transducer complicated curved surface of should be able to fitting, and have the features such as simple, volume is little are installed, can meet the quick or embedded original position Non-Destructive Testing demand on curved surface member surface.
State Intellectual Property Office discloses one section of patent that publication number is CN103157594A: " a kind of flexible ultrasonic phased array array energy transducer and method for making ", this patent is examined state in actual effect at present, this patent has been described a kind of flexible ultrasonic phased array array energy transducer and preparation method thereof, and described transducer comprises flexible piezoelectric ceramic composite wafer, damping backing, matching layer, flexible circuit board, coaxial wire and probe interface; Described matching layer, flexible piezoelectric ceramic composite wafer and the damping backing formation acoustic stack that bonds together successively; Described flexible circuit board is connected with flexible piezoelectric ceramic composite wafer, and draws multicore coaxial cable line to described probe interface from flexible circuit board.Publication number is the patent of CN101152646A: " flexible ultrasonic transducer array and application apparatus thereof ", this patent is authorized at present, this patent has been described a kind of flexible ultrasonic transducer array, the ultrasonic transducer unit of this ultrasonic transducer, ultrasonic transmitter/ultrasound emission receiver, ultrasonic coupling medium, microprocessor, and flexible layer medium, this ultrasonic transducer unit is placed in this flexible layer medium with array format or surface and form flexible ultrasonic transducer array, the flexible ultrasonic transducer array various body parts with different surfaces shape of can fitting, thereby can obtain prior art ultrasonic therapy/ultrasonic imaging effect that is beyond one's reach.Above-mentioned two kinds of flexible array transducers are all to apply the pulse excitation with certain time-delay by the different piezoelectric vibrators unit in pair array, there is longitudinal bulk wave of electronic deflection or focusing scanning feature along the excitation of flexible layer normal orientation in tested sample inside, and the surface acoustic wave with electronic deflection or focusing scanning feature that can not propagate on tested sample surface.
Three, summary of the invention
The invention provides a kind of flexible pectination surface acoustic wave phase array transducer that is specially adapted to curved surface crack detection, there is the curved surface of can fitting, feature that thickness is little, can realize the quick embedded original position Non-Destructive Testing of curved surface crack defect.
This surface acoustic wave phase array transducer is made up of multiple flexible comb arrays, and concrete number is determined by detecting curved surface size.
Each flexible comb arrays at least comprises 2 above multiple bar shaped piezoelectric vibrators, is generally 4 to 8 bar shaped piezoelectric vibrators, and multiple bar shaped piezoelectric vibrator broad ways are arranged and formed comb arrays structure.Center distance w between each piezoelectric vibrator is measured material surface acoustic wave wavelength, i.e. the ratio of the measured material surface acoustic wave velocity of sound and transducer centre frequency.Apply electric excitation by all piezoelectric vibrators to multiple flexible pectination SAW transducers simultaneously, encourage as recurrent pulse excitation or sinusoidal series excitation, motivate the surface acoustic wave of propagating along array arrangement direction in flexible layer on measured material surface.
The two-dimensional array that multiple above-mentioned flexible comb arrays form forms this flexible pectination surface acoustic wave phase array transducer main body, when excitation according to phased acoustic beam deflection or focusing principle, determine that the actuation duration between each flexible comb arrays is poor, control the synthetic sound surface wave acoustic beam of all flexible comb arrays excitations in deflection or the focusing on tested sample surface, change the actuation duration poor, complete electron scanning on tested sample surface.
As shown in Figure 2; this surface acoustic wave phase array transducer comprises multiple bar shaped piezoelectric vibrators (1), positive and negative electrode (2), sound absorption filling material (3), backing absorbent treatment (4), matching layer (5), diaphragm (6), circuit board (7), overcoat (8), cable fixed housing (9), concentric cable (10), joint (11); the regularly arranged two-dimensional array that forms of comb arrays wherein being formed by multiple bar shaped piezoelectric vibrators, as shown in Figure 1.Piezoelectric vibrator adopts flexible piezoelectric ceramic composite, and sound absorption filling material, backing absorbent treatment, matching layer, diaphragm and circuit board all adopt flexible material, to ensure that transducer can adapt to curved surface, and laminating completely with it.
As shown in Figure 2, bar shaped flexible piezoelectric oscillator width d is 1/2nd of measured material surface acoustic wave wavelength, gap s between oscillator and oscillator is also 1/2nd of measured material surface acoustic wave wavelength, and the center distance w between oscillator and oscillator is measured material surface acoustic wave wavelength.Oscillator length l is 0.618 times of comb arrays total length D and rounds, that is: round [(center distance w × oscillator number n-oscillator gap s) × 0.618 between oscillator], general oscillator length l is no more than 10:1 with the ratio of width d.
As shown in Figure 1, each flexible comb arrays is arranged and is formed two-dimensional array along piezoelectric vibrator length direction, and between each comb arrays, clearance delta s is identical, is generally no more than measured material surface acoustic wave wavelength.
This surface acoustic wave phase array transducer is contact transducer, when use, is coupled by couplant and tested sample surface.This transducer is excitation/reception one transducer, can adopt cyclic pulse signal or sinusoidal string to encourage, detection system as shown in Figure 3, comprising: flexible pectination surface acoustic wave phase array transducer, the excitation of phased array supersonic signal receiving trap, computing machine and tested sample.When excitation, as shown in Figure 4 according to phased acoustic beam deflection or focusing principle, determine that the actuation duration between each flexible comb arrays is poor, control the synthetic sound surface wave acoustic beam of all flexible comb arrays excitations in deflection or the focusing on tested sample surface.When reception, equally according to phased acoustic beam deflection or focusing principle, adopt the surface acoustic wave echoed signal that this mistiming receives each flexible comb arrays to synthesize, form phased synthetic echo signal.Utilize phased array supersonic signal excitation receiving trap to change this mistiming, complete Two-dimensional electron scanning on tested sample surface.Thus, without mechanical scanning, can utilize this flexible pectination surface acoustic wave phase array transducer to realize the two-dimentional scanning of curved surface, the S scanning as shown in Fig. 5 or 6 or B scanning.
Advantage of the present invention is:
1. the surface acoustic wave phase array transducer of the present invention's development has flexible structure, is applicable to detect variable curvature complex-curved;
2. the surface acoustic wave phase array transducer of the present invention's development, can, according to phased principle, by the surface acoustic wave signal that phase delay encourages and synthetic each flexible comb arrays receives, form deflection or focus on surface acoustic wave acoustic beam on tested sample surface.
3. the surface acoustic wave phase array transducer of the present invention's development, can complete by electron scanning the two-dimentional scanning of tested curved surface, can realize the two-dimensional detection of curved surface without complicated multi-spindle machining scanning.
4. the transducer gross thickness of the present invention's development is no more than 6mm, can stretch into narrow space detects, and be specially adapted to embedded laminating and be arranged in zero component surface in small space or enclosure space, to realize in situ detection or the Real-Time Monitoring of in-service of crucial rapid wear.
Four, brief description of the drawings
Fig. 1 is a kind of flexible pectination surface acoustic wave phase array transducer one-piece construction schematic diagram.
Fig. 2 is a kind of flexible pectination surface acoustic wave phase array transducer composition distribution plan.
Fig. 3 is a kind of flexible pectination surface acoustic wave phase array transducer detection system schematic diagram.
Fig. 4 is phased acoustic beam deflection or focusing principle schematic diagram.
Fig. 5 is a kind of flexible pectination surface acoustic wave phase array transducer S scanning figure.
Fig. 6 is a kind of flexible pectination surface acoustic wave phase array transducer B scanning figure.
Five, embodiment
This surface acoustic wave phase array transducer is made up of multiple flexible comb arrays, and concrete number is determined by detecting curved surface size.Each flexible comb arrays at least comprises 2 above multiple bar shaped piezoelectric vibrators, is generally 4 to 8 bar shaped piezoelectric vibrators, and multiple bar shaped piezoelectric vibrator broad ways are arranged and formed comb arrays structure.Each flexible comb arrays is arranged and is formed two-dimensional array along piezoelectric vibrator length direction.
Each bar shaped piezoelectric vibrator adopts flexible 1-3 type piezo-electric ceramic composite material.According to piezoelectric vibrator principle of design, piezoelectric vibrator layer is prepared as to the longitudinal vibration piezoelectric vibrator layer that centre frequency is expected frequency.Prepare flexible matching layer, its thickness is 1/4th of matching layer compressional wave wavelength.Flexible piezoelectric oscillator and the laminating of flexible matching layer are installed, formed piezoelectricity-coupling lamination.
Cutting piezoelectricity-coupling lamination, depth of cut is piezoelectric vibrator layer thickness, is cut into two-dimensional piezoelectric oscillator comb arrays by piezoelectric vibrator layer.As shown in Figure 2, bar shaped flexible piezoelectric oscillator width d is 1/2nd of measured material surface acoustic wave wavelength, gap s between oscillator and oscillator is also 1/2nd of measured material surface acoustic wave wavelength, center distance w between oscillator and oscillator is measured material surface acoustic wave wavelength, between comb arrays total length D:(oscillator, center distance w × oscillator number n-oscillator gap s), oscillator length l is 0.618 times of comb arrays total length D and rounds, that is: round (comb arrays total length D × 0.618), general oscillator length l is no more than 10:1 with the ratio of width d.Between each comb arrays, clearance delta s is identical, is generally no more than measured material surface acoustic wave wavelength.
The flexible backing absorbent treatment of fitting in two-dimensional comb array, and use flexible sound absorption packing material to fill gap between comb arrays, at matching layer outside laminating flexible protective film.At backing absorbent treatment outside laminating flexible PCB, and connecting electrode, flexible pectination surface acoustic wave phase array transducer main body formed.
As shown in Figure 1, wherein flexible PCB by the both positive and negative polarity of the bar shaped piezoelectric vibrator in each comb arrays respectively parallel connection collect, form the both positive and negative polarity of each comb arrays, and draw.
By the both positive and negative polarity welding of transducer both positive and negative polarity and the each core of multicore coaxial cable; flexible jacket is installed on other 5 surfaces in flexible pectination surface acoustic wave phase array transducer main body except diaphragm one side; and at flexible PCB and concentric cable junction, rigid cable fixed housing is installed, to protect tie point.For ensureing intact being fitted in curved surface of flexible pectination surface acoustic wave phase array transducer main body energy; the flexible protective overcoat should between flexible pectination surface acoustic wave phase array transducer body rim and rigid cable fixed housing with certain width, width is generally 10～30mm.The last multicore coaxial cable standard universal joint coordinating with phased array supersonic signal excitation/receiving trap in the end welded and installed of concentric cable, as D38999, DL-260P, Hypertronic, Omni Connector30056 etc.
This surface acoustic wave phase array transducer can be as excitation/receive one transducer, or as excitation or the receiving transducer of surface acoustic wave.While detection as excitation/receiving transducer, as shown in Figure 3, surface acoustic wave phase array transducer and the coupling of tested sample surface, transducer joint is connected to phased array supersonic signal excitation/receiving trap, and the signal output part of excitation/receiving trap connects oscillograph or connects computing machine through analog-digital commutator.Transducer is under the excitation of phased pulse or sinusoidal string signal, at specimen surface excitation deflection or focusing surface acoustic wave acoustic beam.Surface acoustic wave is propagated along specimen surface, after defect or marginal surface reflection, is received by each comb arrays, respectively receives signal and forms phased synthetic echo signal through phased array supersonic signal excitation/receiving trap.Utilize phased array supersonic signal excitation receiving trap to change this mistiming, complete the Two-dimensional electron scanning of tested sample surface, each scan echo signal is shown as picture by computing machine.Thus, without mechanical scanning, can utilize this flexible pectination surface acoustic wave phase array transducer to realize the two-dimentional scanning of curved surface, the S scanning as shown in Fig. 5 or 6 or B scanning.Transducer thickness is less than 6mm, can go deep into small space or be mounted on zero component surface of confined space, realizes quick embedded in situ detection or in-service monitoring.
Claims (9)
1. one kind is specially adapted to the flexible pectination surface acoustic wave phase array transducer of the detection of curved surface crackle rapid scanning and embedded in situ detection, it is characterized in that: formed by multiple flexible comb arrays, each flexible comb arrays at least comprises 2 above multiple bar shaped piezoelectric vibrators, be generally 4 to 8 bar shaped piezoelectric vibrators, multiple bar shaped piezoelectric vibrator broad ways are arranged and are formed comb arrays structure, and each flexible comb arrays is arranged and formed two-dimensional array along piezoelectric vibrator length direction.
2. flexible pectination surface acoustic wave phase array transducer according to claim 1; it is characterized in that: flexible piezoelectric ceramic composite piezoelectric vibrator two-dimensional array; flexible sound absorption filling material, flexible backing absorbent treatment, flexible matching layer, flexible protective film, flexible PCB and flexible jacket form the flexible structure of described flexible pectination surface acoustic wave phase array transducer; make its can with various curved surface good coupling, realize the detection of curved surface crack defect.
3. flexible pectination surface acoustic wave phase array transducer according to claim 1, it is characterized in that: the wiring in flexible PCB collects by the positive pole parallel connection of the each bar shaped piezoelectric vibrator in each flexible comb arrays the positive pole, the negative pole parallel connection that form each comb arrays and collects the negative pole that forms each comb arrays, and each comb arrays both positive and negative polarity is drawn by multicore coaxial cable.
4. flexible pectination surface acoustic wave phase array transducer according to claim 1, it is characterized in that: according to phased acoustic beam deflection or focusing principle, determine that the actuation duration between each flexible comb arrays is poor, control after each flexible comb arrays excitation surface acoustic wave acoustic beam synthesizes and form deflection or focusing on tested sample surface.When reception, equally according to phased acoustic beam deflection or focusing principle, adopt the surface acoustic wave echoed signal that this mistiming receives each flexible comb arrays to synthesize, form phased synthetic echo signal.
5. flexible pectination surface acoustic wave phase array transducer according to claim 1, is characterized in that: utilize phased array supersonic signal excitation receiving trap to change this mistiming, complete Two-dimensional electron scanning on tested sample surface.Thus, without mechanical scanning, can utilize this flexible pectination surface acoustic wave phase array transducer to realize the two-dimentional scanning of curved surface.
6. flexible pectination surface acoustic wave phase array transducer according to claim 1, it is characterized in that: each bar shaped flexible piezoelectric oscillator width d of phase array transducer comb arrays is 1/2nd of measured material surface wave wavelength, gap s between oscillator and oscillator is also 1/2nd of measured material surface wave wavelength, center distance w between oscillator and oscillator is measured material surface wave wavelength, oscillator length l is 0.618 times of comb arrays total length D and rounds, that is: round (comb arrays total length D × 0.618), general oscillator length l is no more than 10:1 with the ratio of width d, between each comb arrays, clearance delta s is identical, generally be no more than measured material surface acoustic wave wavelength.
7. flexible pectination surface acoustic wave phase array transducer according to claim 1; it is characterized in that: for protection flexible PCB pad is reliably connected with the lasting of multicore coaxial cable pad, at flexible PCB and multicore coaxial cable junction, rigid cable fixed housing is installed.
8. flexible pectination surface acoustic wave phase array transducer according to claim 1; it is characterized in that: for ensureing that two-dimension flexible array energy transducer main body and curved surface fit completely; flexible protective is enclosed within the transition between flexible comb transducer body rim and rigid cable fixed housing with certain width, and width is generally 10～30mm.
9. flexible pectination surface acoustic wave phase array transducer according to claim 1, is characterized in that: transducer thickness is less than 6mm, can go deep into small space or be mounted on zero component surface of confined space, realizes quick in situ and detects or embedded detection.
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| CN105044205A (en) * | 2015-04-17 | 2015-11-11 | 北京理工大学 | Gas-liquid two-phase flow ultrasound flexibility array detection method based on probabilistic algorithmic |
| CN108020597A (en) * | 2016-10-28 | 2018-05-11 | 核动力运行研究所 | A kind of phased array probe for automatic ultrasonic detection |
| CN108375630A (en) * | 2018-01-28 | 2018-08-07 | 北京工业大学 | A kind of harden structure surface defect lossless detection method |
| CN109102791A (en) * | 2018-09-27 | 2018-12-28 | 武汉天马微电子有限公司 | Flexible circuit board and manufacturing method thereof |
| CN109668963A (en) * | 2018-12-03 | 2019-04-23 | 曼图电子(上海)有限公司 | A kind of flexible probe for the detection of car panel glue-line |
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| CN112050839A (en) * | 2020-08-11 | 2020-12-08 | 大连理工大学 | Shape-following variable-curvature electromagnetic ultrasonic probe and measuring method thereof |
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Cited By (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104623816A (en) * | 2015-01-26 | 2015-05-20 | 上海爱声生物医疗科技有限公司 | Matrix type probe for ultrasonic physiotherapy instruments |
| CN105044205A (en) * | 2015-04-17 | 2015-11-11 | 北京理工大学 | Gas-liquid two-phase flow ultrasound flexibility array detection method based on probabilistic algorithmic |
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| CN110651395A (en) * | 2017-05-30 | 2020-01-03 | 华为技术有限公司 | Multi-antenna system |
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| CN108375630A (en) * | 2018-01-28 | 2018-08-07 | 北京工业大学 | A kind of harden structure surface defect lossless detection method |
| CN109102791A (en) * | 2018-09-27 | 2018-12-28 | 武汉天马微电子有限公司 | Flexible circuit board and manufacturing method thereof |
| CN109668963A (en) * | 2018-12-03 | 2019-04-23 | 曼图电子(上海)有限公司 | A kind of flexible probe for the detection of car panel glue-line |
| CN112050839A (en) * | 2020-08-11 | 2020-12-08 | 大连理工大学 | Shape-following variable-curvature electromagnetic ultrasonic probe and measuring method thereof |
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Application publication date: 20140813 |